CN104279147A - Membrane vacuum pump - Google Patents
Membrane vacuum pump Download PDFInfo
- Publication number
- CN104279147A CN104279147A CN201410321520.2A CN201410321520A CN104279147A CN 104279147 A CN104279147 A CN 104279147A CN 201410321520 A CN201410321520 A CN 201410321520A CN 104279147 A CN104279147 A CN 104279147A
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- Prior art keywords
- pump
- valve
- gas
- stage
- vacuum
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- 239000012528 membrane Substances 0.000 title abstract 4
- 238000000034 method Methods 0.000 claims abstract description 38
- 239000007789 gas Substances 0.000 claims description 113
- 230000004888 barrier function Effects 0.000 claims description 37
- 238000011144 upstream manufacturing Methods 0.000 claims description 5
- 238000001914 filtration Methods 0.000 claims description 3
- 238000010926 purge Methods 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 9
- 238000000605 extraction Methods 0.000 description 4
- 230000002349 favourable effect Effects 0.000 description 4
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 239000000284 extract Substances 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/06—Combinations of two or more pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/02—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
- F04B45/027—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows having electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/02—Stopping, starting, unloading or idling control
- F04B49/03—Stopping, starting, unloading or idling control by means of valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/04—Draining
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/50—Pumps with means for introducing gas under pressure for ballasting
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
A membrane vacuum pump includes at least one membrane pump stage, at least one inlet valve for a process gas to be conveyed associated with the membrane pump stage, and at least one gas ballast valve for the supply of a ballast gas. The flow path for the ballast gas, leading through the gas ballast valve, opens into the flow path for the process gas behind the inlet valve in the direction of flow of the process gas.
Description
The present invention relates to the vacuum diaphragm pump with at least one barrier film pump stage (Membranpumpstufe).
Vacuum diaphragm pump is suitable for gas volume to vacuumize, and in application, can be directly connected in the volume that will vacuumize, or can as the Roughing pump of another vacuum pump, this another vacuum pump is connected to the upstream of vacuum diaphragm pump in the flowing direction, such as, for turbomolecular pump.In order to provide required performance characteristics, vacuum diaphragm pump can comprise one or more barrier film pump stage, this barrier film pump stage can before and after be connected with each other or flowing direction on parallel to each other, therefore barrier film pump stage can extract serially or concurrently.
In known vacuum diaphragm pump, the condensation of the water vapour in the pump space (suction space) of vacuum pump is problematic, because the functional safety of condensation to vacuum pump occurred in pump space is harmful, and can reduce the working life of pump.
In order to reduce the functional safety of condensation on vacuum diaphragm pump and the impact in working life of liquid, gas ballasting device can be used to be imported in the pump space of vacuum pump by Balance Air (Ballastgas).With regard to this point, Balance Air for stoping the formation of cohesion, and can remove existing cohesion in pump space.By known gas ballasting device, the formation of cohesion can be prevented from, but can not per time often place reliably stoped, and the amount of the Balance Air that can be supplied also is limited.Further, use known gas ballasting device, can be increased by the vacuum pressure using vacuum pump finally can reach.
In addition, known gas ballasting device can increase the construction space needed for vacuum pump substantially, and can not realize controlling in real time automatically of Balance Air supply.
The object of the present invention is to provide a kind of vacuum diaphragm pump that can overcome above-mentioned shortcoming.Wherein, especially, when not needing the pump performance reducing vacuum pump, the formation of cohesion can fully, reliably, in real time be prevented from.
Above-mentioned target is realized by the vacuum diaphragm pump of the feature with claim 1.
This vacuum diaphragm pump comprises at least one barrier film pump stage, at least one inlet valve and at least one gas ballast valve.This inlet valve is communicated with barrier film pump stage for making the process gas that will carry, and this gas ballast valve is for supplying Balance Air.By the flow path of the Balance Air of gas ballast valve, on the flow direction of process gas, the flow path of the process gas after leading to inlet valve.
Because on the flow direction of process gas, the path of Balance Air lead to inlet valve after the flow path of process gas, inlet valve stops Balance Air to flow on the contrary direction flowing to the pump intake of vacuum diaphragm pump with process gas, thereby increases the vacuum pressure that pump finally can reach.Meanwhile, Balance Air can arrive total pump space of vacuum diaphragm pump, therefore, it is possible to fully purge pump space, thus effectively prevents the formation of often locating to condense.When supplying a large amount of Balance Airs, can avoid reducing pump performance, particularly avoid reducing the pressure that may ultimately reach, this reliably, fully can stop the formation of cohesion.
An advantageous embodiment of the invention is recorded in detail in dependent claims, specification and accompanying drawing.
According to favourable embodiment, the flow path of Balance Air leads to the flow path of the process gas after being located immediately at inlet valve.Ensure that the Balance Air that total pump space of vacuum pump is supplied purges thus, thus the formation of cohesion can be avoided at the often place in pump space.
The flow path of Balance Air can lead to the flow path of process gas, and such as, the join domain between inlet valve and the suction space of barrier film pump stage or connecting passage position, therefore, this region also purges by Balance Air.The suction space of barrier film pump stage is defined by the barrier film of known static head-shield with movement.Join domain between inlet valve and suction space and connecting passage, in this case, can fully or partly be defined by head-shield.
The flow path of Balance Air also directly can lead to suction space on the side of process gas connecting passage, or the flow path of the flow path of Balance Air and process gas can converge at the public opening sucking space.
The flow path of process gas can pass through Balance Air passage, and this Balance Air passage is preferably at least in part, is particularly defined by the head-shield of barrier film pump stage fully.
This valve is preferably electronically actuated valve.According to favourable embodiment, gas ballast valve is solenoid valve.This valve can realize in little construction space, and can pass through electronic control, thus can this valve of self actuating.
Preferably provide control gear, particularly numerical control device, this control gear is operably connected to gas ballast valve, can control gas ballast valve by this control gear, is electronically actuated especially, such as, realizes the time controling activated valve.Gas ballast valve is preferably and automatically controls, therefore, the actuating of gas ballast valve occur in the vacuum pump preset pump operated in, such as in order to avoid free in the formation of cohesion.Such as, in the purge cycles preset, by Balance Air purge pump space, this process completes automatically, and starts from the beginning in the pump cycle of vacuum pump.Be the operation period after purge cycles, in the operation period, do not reoffer Balance Air.
Can according to the signal adjustment control gear measured, so that dynamic gas ballast valve, this signal is that the sensor of vacuum pump and/or external sensor provide, and this signal depends on measurement parameter, the process of the execution in the vacuum that the operation or relate to that measurement parameter relates to vacuum pump will produce.
Control unit is programmable, and therefore, user can preset the self actuating needed for gas ballast valve individually, such as, with the form of the purge cycles that can arrange.
Except the first barrier film pump stage, vacuum pump can comprise at least one another barrier film pump stage.According to favourable embodiment, this another diaphragm pump level is connected to the downstream in flow of process gases direction, and therefore, first Balance Air passes through the first pump stage, then by being connected to another pump stage in downstream.In the present embodiment, due to the extraction of vacuum pump, the Balance Air being fed to the suction space of the first barrier film pump stage automatically arrives another pump stage being connected to downstream, and therefore, two pump stages are all purged, thus can prevent the formation of cohesion.
Barrier film pump stage also can comprise more than two barrier film levels, is especially 3, and 4 or summation are more than 4 barrier film levels.Preferably, in this case, gas ballast valve is associated with pump stage, and from the flow direction of process gas, pump stage is arranged on the beginning of vacuum diaphragm pump, and process gas enters from the pump intake of vacuum diaphragm pump and do not disturb another pump stage.Another barrier film pump stage can be connected to the downstream of the pump stage be associated with gas ballast valve on flow of process gases direction, and therefore, the Balance Air being fed to the first pump stage also arrives another pump stage, and purges pump stage in the operating process of vacuum pump.
The gas flow being fed to the Balance Air of pump by gas ballast valve depends on the flow conductivity of gas ballast valve.Therefore, the gas ballast valve with corresponding flow conductivity easily can realize the throughput expected.In order to reach the flow of expectation, the baffle plate of extra vacuum pump can be omitted.
According to favourable embodiment, gas ballast valve has the flow conductivity that can regulate.In this case, by flow conductivity being set to the value of expection, the flow of the Balance Air being fed to pump can be set.
Due on the flow direction of process gas, after inlet valve, introduce Balance Air, can carry out the operation with high balance tolerance, this operation ensure that and reliably purges total pump space, and does not need to reduce pump performance.Such as, without any other gas load, during the accessible final pressure at the pump intakeport place of vacuum diaphragm pump, the flow of the Balance Air of gas ballast valve supply can be arranged through, it is made to occupy more than 10%, preferably more than 20%, particularly preferably more than 30% the inlet capacity of vacuum pump.
Preferably, in principle, if gas ballast valve has at least two switching position, in a switching position of gas ballast valve, Balance Air is fed to the pump space of vacuum pump, in another switching position, this gas ballast valve forms the hermetic closed of pump space.
Gas ballast valve is preferably two position three-way valve.The present embodiment preferably gas ballast valve has two entrances and an outlet, and this outlet is linked optionally with one in two entrances, and this connection is carry out in the mode of air guide by switching gas ballast valve.The outlet of gas ballast valve is preferably connected to the pump space of pump in the mode of air guide, meanwhile, Balance Air is fed to one of them entrance, and another entrance seals preferably by airtight mode.A switching position wherein, therefore gas ballasting is supplied to pump space, but in another switching position, gas ballast valve forms the hermetic closed of pump space.
The inlet valve of barrier film pump stage and/or the outlet valve of barrier film pump stage can be set, make on the flow direction of process gas expection, only by gas, and can gas backstreaming be stoped.The inlet valve of barrier film pump stage and/or outlet valve can, such as, be set to control damper, such as, be set to gas flow optimized aerofoil profile valve.By the Balance Air after supplying inlet valve in the flowing direction, the backflow of the Balance Air contrary with flow of process gases can be avoided.
According to an advantageous embodiment of the invention, filter particularly essence filtration filter is used to filtering technique gas.On the flow direction of Balance Air, before filter is preferably arranged on the opening of the flow path of the Balance Air of the flow path entering process gas.On the flow direction of Balance Air, before filter can be arranged on gas ballast valve.Therefore, the pump space of gas ballast valve and vacuum pump can not by the impact of external contaminant.
Another embodiment of the present invention provides driver element and the gas ballast valve of vacuum pump, and they can be activated by identical voltage, such as, and 24V voltage.Accordingly, common power subsystem can be used to supply electrical power to driver element and gas ballast valve.Thus the workload manufacturing vacuum pump can be reduced.
Another object of the present invention is to provide a pump-unit, this pump-unit comprises at least one vacuum diaphragm pump described in the invention, and another vacuum pump, this another vacuum pump is connected in series vacuum diaphragm pump in the mode of air guide, and is positioned at the upstream of vacuum diaphragm pump.Such as, this another vacuum pump can be turbomolecular pump, single-stage or multi-stage roots pump, sliding vane rotary pump, vortex pump, pawl pump, volute pump, rotary piston pump or ion getter pump.
Diaphragm pump is preferably the fore pump of another vacuum pump being connected to upstream.Stoped the cohesion in vacuum diaphragm pump by gas ballast valve, therefore, do not need to increase the working life that pressure can increase the safety of operation, reliability and vacuum diaphragm pump.Increase pressure and be supplied to another vacuum pump by vacuum diaphragm pump.
Below by with reference to preferred embodiment and accompanying drawing, the present invention is described.Wherein:
The sectional view of the vacuum diaphragm pump of Fig. 1 one embodiment of the invention.
Vacuum diaphragm pump shown in Fig. 1 comprises the first barrier film pump stage 12 and the second barrier film pump stage 14, in the direction of the air flow, is connected with each other before and after the first barrier film pump stage 12 and the second barrier film pump stage 14, and they in series pump move.First pump stage 12 comprises entrance 18, and entrance 18 also forms the pump intake of pump simultaneously.Supply pipeline 60 for transmitting the process gas that will transmit is connected to entrance 18.Such as, supply pipeline 60 can connect the outlet side of vacuum diaphragm pump to turbomolecular pump, and turbomolecular pump is connected to upstream.Therefore, vacuum diaphragm pump can as the fore pump of turbomolecular pump.
The inlet channel 24 be formed in the shell 16 of pump is directed to the inlet valve 20 of pump stage 12 from entrance 18.Inlet valve 20 is set to control damper, and it has valve plate 64, and only allows the air-flow on arrow 56 marks in Fig. 1 flow of process gases direction.Inlet valve 20 be preferably arranged at the shell 16 defining inlet channel 24 jacket and define pump stage 12 suction space 30 shell 16 head-shield between, in order to simplify, inlet valve 20 in FIG not as be separated part occur.
The outlet side of inlet valve 20 is connected to the suction space 30 of pump stage 12 by connecting passage 26 in the mode of air guide.Connecting passage 26 is arranged on the outlet side of inlet valve 20, and extends through head-shield.Suck space 30 to be defined by head-shield and barrier film 32, barrier film 32 is supported by the connecting rod 34 at bent axle 35 place being positioned at rotary actuation.
Pump shown in Fig. 1 also comprises gas ballast valve 22, and gas ballast valve 22 supplies Balance Air by supply pipeline 62.Gas ballast valve 22 is two position three-way valve, and comprises two entrances and an outlet.The outlet of gas ballast valve 22 is connected to Balance Air passage 28 in the mode of air guide.Balance Air passage 28 is defined by the head-shield of pump stage 12, and leads to connecting passage 26.
An entrance of gas ballast valve 22 is connected to Balance Air supply pipeline 62, and therefore, supply pipeline 62 is interconnected at the corresponding switching position place of gas ballast valve 22, and Balance Air to lead Balance Air passage 28 along arrow 58, and is led by connecting passage 26 at this place and suck space 30.Another entrance of gas ballast valve 22 seals in a gas tight manner, and therefore, the corresponding switch place of gas ballast valve 22 shown in Fig. 1 forms the hermetic closed of pump space.
Gas ballast valve 22 is solenoid valve, and is preferably connected to electronic control unit, and electronic control unit does not show in FIG, and automatically controls gas ballast valve 22.Gas ballast valve 22 shown in Fig. 1 is within independent Balance Air supply pipeline 62.In fact, gas ballast valve 22 can be fixedly connected to the shell 16 of vacuum diaphragm pump, especially, is connected to outer housing cover, or is connected to the head-shield of the first pump stage 12, and especially, gas ballast valve 22 is integrated in shell 16.Such as, gas ballast valve 22 can be directly connected to shell 16 in the ingress of Balance Air passage 28, and/or gas ballast valve 22 can be arranged in gas ballasting passage 28 fully or partly.
Pump stage 12 comprises current-controlled outlet valve 36 further, and outlet valve 36 is connected to suction space 30 by being arranged on the connecting passage on head-shield in the mode of air guide.Outlet valve 36 only carries gas for leaving at stream 56 on the direction sucking space 30.Outlet valve 36 is connected to the outlet 38 of pump stage 12 at outlet side.
Connecting line 40 connects the entrance 42 of outlet 38 to the second pump stage 14 of the first pump stage 12, and therefore, pump stage 12,14 front and back on the direction of stream 56 are connected, and the extraction that is one another in series.In principle, two pump stages also can be connected in parallel, and therefore, they can parallel with one anotherly extract.For this reason, also may connect the pump intake of respective entrance to vacuum pump of two pumps, and connect the respective pump discharge exporting to vacuum pump of two pump stages.
The setting of the second pump stage 14 and the first pump stage 12 roughly identical.Gas flow optimized inlet valve 44 has valve plate 68, and valve plate 68 connects the suction space 46 of entrance 42 to the second pump stage 14.The entrance 42 that gas flow optimized inlet valve 44 follows the second pump stage 14 closely is arranged.As above about the description of the first pump stage 12, defined by the head-shield of shell 16 and barrier film 48 and suck space 44.The head-shield of shell 16 does not illustrate as separate section in FIG.By connecting rod 50, barrier film 48 is connected to rotating drive bent axle 35.Second pump stage 14 comprises outlet valve 52, and outlet valve 52 has valve plate 70, and the gas that suction space 46 is discharged can be fed to the outlet 54 of 14 of the second pump stage by valve plate 70, this outlet forms the pump discharge of vacuum diaphragm pump simultaneously.
Being described below of the operation of the vacuum pump shown in Fig. 1:
In the operation of vacuum pump, bent axle 35 is driven rotatably, therefore, connecting rod 34,50 periodically moves up and down together with the barrier film 32,48 on the connecting rod be fixed on two pump stages 12,14, one-period comprises the suction phase of each pump stage 12,14, wherein, the gas that will transmit sucks space 30,46 by respective inlet valve 20,44, follow by expulsive stage, wherein, the gas that will transmit is discharged by respective outlet valve 36,52 and is sucked space 30,46, and extracts via it.In the extraction operation of series connection, the gas that will transmit is applied to entrance 18, and by the first pump, first the direction of arrow 56 is extracted, and subsequently by the second pump stage, by this gas extraction to outlet 54, this process is realized by connecting line 40.
At the final period of pump circulation, gas ballast valve 22 lays respectively at the switching position shown in Fig. 1.In this position of gas ballast valve 22, gas ballast valve 22 forms the hermetic closed of pump space, therefore, does not have Balance Air to enter pump space.
In order to avoid forming cohesion in the pump space of vacuum pump, and remove the cohesion of any appearance, periodically carry out purge cycles, particularly in the beginning in each pump cycle of pump, in purge cycles, gas ballast valve is positioned at second switch position.
In the second switch position of gas ballast valve 22, the supply pipeline 62 of Balance Air runs through, and therefore, pump stage 12,14 transmits the pump space of Balance Air to vacuum diaphragm pump by Balance Air passage 28, and in addition, the gas applying to transmit is to entrance 18.The flow path of Balance Air leads to the region of connecting passage 26, and subsequently on the flow direction of process gas, leads to the flow path of inlet valve 20 process gas below.The total pump space being arranged on the pump stage 12,14 after inlet valve 12,14 is balanced air-blowing subsequently and sweeps, therefore, it is possible to effectively avoid the formation of the cohesion often located.
Reference numerals list
12,14 pump stages
16 shells
18 entrances
20 inlet valves
22 gas ballast valves
24 inlet channeles
26 connecting passages
28 Balance Air passages
30 suck space
32 barrier films
34 connecting rods
35 bent axles
36 outlet valves
38 outlets
40 connecting lines
42 entrances
44 inlet valves
46 suck space
48 barrier films
50 connecting rods
52 outlet valves
54 outlets
56,58 arrows
60 process gas supply pipelines
62 Balance Air supply pipelines
64,66,68,70 valve plates
Claims (10)
1. a vacuum diaphragm pump, there is at least one barrier film pump stage (12), there is at least one inlet valve (20) be connected with described barrier film pump stage (12), described inlet valve (20) is for transmitting the process gas that will transmit, and there is at least one for supplying the gas ballast valve (22) of Balance Air, it is characterized in that, on the flow direction of described process gas, the flow path flowing through the Balance Air of described gas ballast valve (22) leads to the flow path of described inlet valve (20) process gas below.
2. vacuum diaphragm pump as claimed in claim 1, it is characterized in that, the flow path of described Balance Air leads to the flow path being located immediately at described inlet valve (20) described process gas below.
3. vacuum diaphragm pump as claimed in claim 1 or 2, it is characterized in that, described gas ballast valve (22) is solenoid valve.
4. the vacuum diaphragm pump as described in above-mentioned any one claim, it is characterized in that, also comprise control gear, described control gear is operably connected to described gas ballast valve (22), can be controlled the actuating of described gas ballast valve (22) by described control gear.
5. the vacuum diaphragm pump as described in above-mentioned any one claim, it is characterized in that, except there is a barrier film pump stage (12), also there is at least one another barrier film pump stage (14), on the flow direction of described process gas, another barrier film pump stage (14) described is preferably connected to the downstream of described barrier film pump stage (12).
6. the vacuum diaphragm pump as described in above-mentioned any one claim, is characterized in that, described gas ballast valve (22) has adjustable connectivity.
7. the vacuum diaphragm pump as described in above-mentioned any one claim, is characterized in that, described gas ballast valve (22) is two position three-way valve.
8. the vacuum diaphragm pump as described in above-mentioned any one claim, it is characterized in that, also comprise the filter for filtering described Balance Air, on the flow direction of described Balance Air, before described filter is preferably located in the opening of the described Balance Air flow path leading to described flow of process gases path.
9. the vacuum diaphragm pump as described in above-mentioned any one claim, is characterized in that, driver element and the described gas ballast valve (22) of vacuum pump can use identical voltage to activate; And/or
Also there is common power subsystem, for powering to described driver element and described gas ballast valve (22).
10. a pump-unit, there is at least one vacuum diaphragm pump as described in above-mentioned any one claim, and there is another vacuum pump, another vacuum pump described is connected in series in the upstream of described vacuum diaphragm pump in the mode of air guide, it is characterized in that, another vacuum diaphragm pump described is preferably turbomolecular pump, single-stage or multi-stage roots pump, rotating vane pump, vortex pump, pawl pump, volute pump, rotary piston pump or ion getter pump.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102013213257.3 | 2013-07-05 | ||
| DE102013213257.3A DE102013213257B4 (en) | 2013-07-05 | 2013-07-05 | Diaphragm vacuum pump with gas ballast valve and pump arrangement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104279147A true CN104279147A (en) | 2015-01-14 |
Family
ID=50942065
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410321520.2A Pending CN104279147A (en) | 2013-07-05 | 2014-07-07 | Membrane vacuum pump |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20150010409A1 (en) |
| EP (1) | EP2821650B1 (en) |
| JP (1) | JP2015014285A (en) |
| CN (1) | CN104279147A (en) |
| DE (1) | DE102013213257B4 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105134567A (en) * | 2015-07-21 | 2015-12-09 | 石家庄佳信汽车制动系统有限公司 | Horizontally-opposite diaphragm type electric vacuum pump |
| CN105526128A (en) * | 2016-02-05 | 2016-04-27 | 宁波泰尔斯电子实业有限公司 | Micro vacuum pump and combined type micro vacuum pump |
| CN106286205A (en) * | 2016-10-09 | 2017-01-04 | 周纪昌 | Electronics wobble pump |
| CN106438305A (en) * | 2016-10-31 | 2017-02-22 | 徐林 | Solution of vacuum pump |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016112442A1 (en) * | 2015-01-15 | 2016-07-21 | Atlas Copco Airpower, Naamloze Vennootschap | Method for controlling a gas supply to a vacuum pump |
| KR102318140B1 (en) * | 2017-11-29 | 2021-10-26 | 울박 키코 인코포레이션 | vacuum generator |
| US11873802B2 (en) * | 2020-05-18 | 2024-01-16 | Graco Minnesota Inc. | Pump having multi-stage gas compression |
| EP3916225B1 (en) * | 2021-09-29 | 2023-12-13 | Pfeiffer Vacuum Technology AG | Vacuum pump |
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- 2013-07-05 DE DE102013213257.3A patent/DE102013213257B4/en active Active
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- 2014-06-06 EP EP14171516.9A patent/EP2821650B1/en active Active
- 2014-06-23 JP JP2014127871A patent/JP2015014285A/en active Pending
- 2014-07-01 US US14/320,750 patent/US20150010409A1/en not_active Abandoned
- 2014-07-07 CN CN201410321520.2A patent/CN104279147A/en active Pending
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| JPH0315678A (en) * | 1989-03-23 | 1991-01-24 | Osaka Shinku Kiki Seisakusho:Kk | Vacuum pump system |
| DE29618911U1 (en) * | 1996-10-30 | 1996-12-19 | Dekema Dental-Keramiköfen GmbH, 83395 Freilassing | Pump arrangement |
| US6595758B1 (en) * | 1998-11-10 | 2003-07-22 | Knf Neuberger Gmbh | Method for conveying damp gases by means of a conveyor device and a conveyor device for carrying out said method |
| US20030123997A1 (en) * | 2000-05-03 | 2003-07-03 | Erwin Hauser | Device for delivering moist gases |
| DE10255792A1 (en) * | 2002-11-28 | 2004-06-17 | Vacuubrand Gmbh + Co Kg | Vacuum pump control method in which a gas ballast valve is controlled in a manner dependent on the detected formation of condensation within the container being pumped down |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105134567A (en) * | 2015-07-21 | 2015-12-09 | 石家庄佳信汽车制动系统有限公司 | Horizontally-opposite diaphragm type electric vacuum pump |
| CN105526128A (en) * | 2016-02-05 | 2016-04-27 | 宁波泰尔斯电子实业有限公司 | Micro vacuum pump and combined type micro vacuum pump |
| CN106286205A (en) * | 2016-10-09 | 2017-01-04 | 周纪昌 | Electronics wobble pump |
| CN106438305A (en) * | 2016-10-31 | 2017-02-22 | 徐林 | Solution of vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2015014285A (en) | 2015-01-22 |
| EP2821650B1 (en) | 2020-06-03 |
| US20150010409A1 (en) | 2015-01-08 |
| EP2821650A3 (en) | 2015-02-25 |
| DE102013213257A1 (en) | 2015-01-08 |
| EP2821650A2 (en) | 2015-01-07 |
| DE102013213257B4 (en) | 2024-09-19 |
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