CN104252081A - Liquid crystal micro-lens array and manufacturing method thereof - Google Patents

Abstract

The present invention relates to a liquid crystal microlens array and a preparation method thereof. The liquid crystal microlens array comprises: a second transparent substrate; a transparent medium layer arranged above the second transparent substrate, and on the transparent medium layer The surface has a concave portion corresponding to each microlens area; a second transparent conductive film, arranged above the transparent medium layer; a second alignment layer, arranged above the second transparent conductive film; a liquid crystal layer, disposed above the second alignment layer; a first alignment layer disposed above the liquid crystal layer; a first transparent conductive film disposed above the first alignment layer; a first transparent substrate disposed on the above the first transparent conductive film. The invention effectively solves the disadvantages of multi-electrode driven liquid crystal micro-lens, complex process, and difficulty in uniform field distribution control.

Description

A liquid crystal microlens array and its preparation method

technical field

The invention relates to the technical field of naked-eye stereoscopic display, in particular to a liquid crystal microlens array and a preparation method thereof. the

Background technique

Glasses-free 3D (Three Dimensional) displays do not require viewers to wear glasses or helmets to watch 3D images, which has become a new development trend in the display field. In practical applications, viewers often want to freely switch between a 3D display mode and a 2D display mode according to the requirements of the provided display images, such a display device is called a 2D-3D switchable display device. Existing 2D-3D switchable display devices generally use liquid crystal microlenses. At present, the liquid crystal microlenses that can be realized are mainly divided into two categories: one is active liquid crystal microlenses, that is, the liquid crystal is limited to a microlens with a certain radius of curvature. In the polymer, there is a double-electrode drive; the other is a multi-electrode drive method, that is, a plurality of mutually independent electrodes are arranged on one side of the liquid crystal layer, and a discontinuous voltage distribution is applied to the electrodes. Due to the liquid crystal molecules The deflection angle is positively correlated with the electric field strength applied to it, and the deflection angle of the liquid crystal molecules in the area above the electrode with a higher voltage is greater than the deflection angle of the liquid crystal molecules in the area above the electrode with a lower voltage. Adjust the voltage to make the liquid crystal layer becomes a microlens, the advantage of the liquid crystal microlens made in this way is that the deflection angle can be controlled by voltage, that is, the refractive index distribution of the liquid crystal layer is controllable, and the focal length of the formed microlens is also controllable; and this method is in The disadvantage of making a microlens array is that it needs to introduce fine electrode preparation, and the process of making the driving circuit is relatively complicated, and it is difficult to control the uniform distribution of the electric field, which affects the display effect; when making a microlens array, when the area of the microlens array increases, the microlens When the number increases, the electrodes of each microlens cannot be drawn out well. the

Aiming at the above-mentioned shortcomings of the multi-electrode driving method, the present invention uses liquid crystal micro-lens electrode spacing to control electric field distribution to form liquid crystal micro-lenses, and proposes a liquid crystal micro-lens array and a preparation method thereof. the

Contents of the invention

In view of this, the object of the present invention is to provide a liquid crystal microlens array and a preparation method thereof, aiming at the disadvantage that the traditional multi-electrode liquid crystal microlens array is difficult to manufacture. the

The present invention adopts the following scheme to realize: a kind of liquid crystal microlens array, it is characterized in that, comprises:

a second transparent substrate;

A transparent medium layer is arranged above the second transparent substrate, and the upper surface of the transparent medium layer has a concave portion corresponding to each microlens area, and the concave portion is etched by anisotropic silicon surface or isotropic Etching the glass surface, supplemented by subsequent soft printing for graphic transfer, or directly formed by 3D printing technology;

A second transparent conductive film, disposed above the transparent medium layer, and having the same concave portion as the upper surface of the transparent medium layer;

A second alignment layer, disposed above the second transparent conductive film, and the upper surface of the second alignment layer is parallel to the second transparent substrate;

a liquid crystal layer disposed above the second alignment layer;

a first alignment layer disposed above the liquid crystal layer;

A first transparent conductive film disposed above the first alignment layer;

A first transparent substrate is arranged above the first transparent conductive film.

In an embodiment of the present invention, the first transparent substrate and the second transparent substrate are transparent glass, transparent inorganic material or transparent organic polymer material. the

In an embodiment of the present invention, the shape of the liquid crystal microlens is a circle or a regular polygon. the

In an embodiment of the present invention, the first transparent conductive film and the second transparent conductive film are indium tin oxide films, metal-doped zinc oxide films, metal-graphene or metal-carbon films formed by vacuum coating or spraying techniques. Nanotube composite films. the

In an embodiment of the present invention, the first alignment layer and the second alignment layer are subjected to rubbing treatment, and the rubbing directions are consistent. the

The present invention also provides a kind of preparation method of described liquid crystal microlens array, it is characterized in that, comprises the following steps:

S11: providing a clean Si substrate and making a small hole grating on its surface by photolithography;

S12: using the pinhole grating as a mask, using a potassium hydroxide solution to anisotropically etch hole-shaped grooves on the surface of the Si substrate;

S13: Using silicone rubber to prepare a silicone rubber negative template for the hole-shaped groove;

S14: Provide a clean second transparent substrate, uniformly coat a layer of transparent medium layer on its surface, place the silicone rubber negative template flatly on the transparent medium layer, apply a predetermined pressure, use heating or ultraviolet curing the transparent medium layer by light irradiation;

S15: separating the silicone rubber negative template from the transparent medium layer;

S16: Prepare a second transparent conductive film on the surface of the transparent medium layer.

The present invention also provides another preparation method of the liquid crystal microlens array, which is characterized in that it comprises the following steps:

S21: Provide a clean glass substrate and make a small hole grating on its surface by photolithography;

S22: using the pinhole grating as a mask, using a mixed solution of hydrofluoric acid and ammonium fluoride to isotropically etch hole-shaped grooves on the surface of the glass substrate;

S23: Using silicone rubber to prepare a silicone rubber negative template for the hole-shaped groove;

S24: Provide a clean second transparent substrate, uniformly coat a transparent medium layer on its surface, place the silicone rubber negative template flatly on the transparent medium layer, apply a certain pressure, and use heating or ultraviolet light curing the transparent medium layer by means of irradiation;

S25: separating the silicone rubber negative template from the transparent medium layer;

S26: Prepare a second transparent conductive film on the surface of the transparent medium layer.

The present invention also provides another preparation method of the liquid crystal microlens array, which is characterized in that it comprises the following steps:

S31: providing a clean second transparent substrate;

S32: Using 3D printing technology to print hole-shaped grooves on the surface of the second transparent substrate to obtain the surface of the transparent medium layer having the concave portion;

S33: Prepare a second transparent conductive film on the surface of the transparent medium layer.

The remarkable advantage of the present invention is that: the electrodes on both sides of the liquid crystal layer are used to control the deflection of the liquid crystal molecules in different degrees to achieve the effect of the liquid crystal microlens without drawing out more electrodes, the manufacturing process is simple and the driving circuit is relatively simple; moreover, a large Fabrication of Area Liquid Crystal Microlens Arrays. the

In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below through specific embodiments and related drawings. the

Description of drawings

Figure 1 is a schematic diagram of the structure of a unit of a liquid crystal microlens array without an electric field when the regular concave-convex shape on the surface of the transparent medium layer of the present invention is transferred through anisotropic etching of the silicon surface and supplemented by subsequent soft printing. the

Fig. 2 is a schematic diagram of the structure of a liquid crystal microlens array unit applying an electric field when the regular concave-convex shape on the surface of the transparent medium layer of the present invention is transferred by anisotropically etching the silicon surface and supplemented by subsequent soft printing. the

Fig. 3 is a structural schematic diagram of an electric field applied to a unit of a liquid crystal microlens array when the regular concave-convex shape on the surface of the transparent medium layer of the present invention is transferred through isotropic etching of the glass surface and supplemented by subsequent soft printing. the

Fig. 4 is a structural schematic diagram of an electric field applied to a unit of a liquid crystal microlens array when the regular concave-convex shape on the surface of the transparent medium layer of the present invention is formed by 3D printing technology. the

FIG. 5 is a schematic diagram of anisotropic etching on the Si surface in Embodiment 1 of the present invention. the

Detailed ways

As shown in Figure 1, the present invention provides a kind of liquid crystal microlens array, comprising:

A second transparent substrate 102;

A transparent medium layer 104 is arranged above the second transparent substrate 102, and the upper surface of the transparent medium layer 104 has a concave portion corresponding to each microlens area (that is, the upper surface of the transparent medium layer regularly presents concave-convex shape), the concave part is formed by anisotropically etching the silicon surface or isotropically etching the glass surface, supplemented by subsequent soft printing for pattern transfer, or directly formed by 3D printing technology;

A second transparent conductive film 105, disposed above the transparent medium layer 104, and has the same concave portion as the upper surface of the transparent medium layer 104;

A second alignment layer 107, disposed above the second transparent conductive film 105, and the upper surface of the second alignment layer 107 is parallel to the second transparent substrate 102;

a liquid crystal layer 108, disposed above the second alignment layer 107;

a first alignment layer 106, disposed above the liquid crystal layer 108, for alignment of liquid crystal molecules;

A first transparent conductive film 103, disposed above the first alignment layer 106;

A first transparent substrate 101, disposed above the first transparent conductive film 103;

The concave portion corresponding to each microlens area on the upper surface of the transparent medium layer is formed by anisotropically etching the silicon surface or isotropically etching the glass surface, supplemented by subsequent soft printing for pattern transfer, or directly formed by 3D printing technology .

Preferably, the first transparent substrate and the second transparent substrate are transparent glass, transparent inorganic material or transparent organic polymer material; the liquid crystal microlens array is a liquid crystal column microlens array and a liquid crystal microlens array, and the liquid crystal microlens array The shape of the lens is a circle or a regular polygon; the first transparent conductive film and the second transparent conductive film are indium tin oxide (ITO) films, metal-doped zinc oxide films, metal-graphite films formed by vacuum coating or spraying technology ene or metal-carbon nanotube composite film; the distance between the second transparent conductive film and the first transparent conductive film presents a continuous or discontinuous regular change, which is used to flexibly control the electric field distribution to form a liquid crystal microlens array; the second The first alignment layer and the second alignment layer are subjected to rubbing treatment, and the rubbing directions are consistent. the

As shown in Fig. 1, in the present invention, when the regular uneven shape on the surface of the first transparent medium layer is transferred by anisotropic etching of the silicon surface and supplemented by subsequent soft printing, a unit of the liquid crystal microlens array does not apply an electric field. Schematic. At this time, the liquid crystal molecules are arranged in a direction parallel to the substrate, and the long axis direction of the liquid crystal molecules is consistent with the polarization direction of the polarized light, which will not affect the optical path, so the polarized light 109 passes straight through. When an electric field is applied, the liquid crystal molecules deflect to a certain extent under the action of the electric field. When the distance between the first electrode and the second electrode is small, the electric field is large, and the liquid crystal molecules are completely deflected to be perpendicular to the substrate, and the refractive index for polarized light is the largest. As the distance between the first electrode and the second electrode increases, the electric field between the liquid crystals decreases, the deflection angle of the liquid crystals also decreases, and the refractive index of the polarized light 109 becomes smaller, forming a gradient index microlens, as shown in FIG. 2 . the

When the regular concave-convex shape on the surface of the transparent medium layer is transferred by anisotropic etching of the silicon surface and subsequent soft printing, as shown in Figures 1 and 2, the preparation of the regular concave-convex shape electrode includes the following steps :

S11: as shown in Figure 5, provide a clean Si (100) substrate and use photolithography to make a small hole grating on its surface;

S12: using the pinhole grating as a mask, using a potassium hydroxide (KOH) solution to anisotropically etch hole-shaped grooves on the surface of the Si(100) substrate;

S13: Using silicone rubber to prepare a silicone rubber negative template for the hole-shaped groove;

S14: Provide a clean second transparent substrate, uniformly coat a layer of transparent medium layer on its surface, and place the silicone rubber negative template flatly on the transparent medium layer (that is, the silicone rubber negative template has holes One side of the shaped groove is placed on the transparent medium layer), a predetermined pressure is applied, and the transparent medium layer is cured by heating or ultraviolet light irradiation;

S15: separating the silicone rubber negative template from the transparent medium layer to obtain a regular concave-convex surface of the transparent medium layer;

S16: preparing a second transparent conductive film on the surface of the transparent medium layer to form regular concave-convex electrodes.

When the regular concave-convex shape on the surface of the transparent medium layer is transferred by isotropically etching the glass surface and supplemented by subsequent soft printing, as shown in Figure 3, the preparation of the regular concave-convex shape electrode includes the following steps:

S21: Provide a clean glass substrate and make a small hole grating on its surface by photolithography;

S22: using the pinhole grating as a mask, using a mixed solution of hydrofluoric acid (FH) and ammonium fluoride (NH ₄ F), to isotropically etch hole-shaped grooves on the surface of the glass substrate;

S23: Using silicone rubber to prepare a silicone rubber negative template for the hole-shaped groove;

S24: Provide a clean second transparent substrate, uniformly coat a layer of transparent medium layer on its surface, and place the silicone rubber negative template flatly on the transparent medium layer (that is, the silicone rubber negative template has holes One side of the shaped groove is placed on the transparent medium layer), a certain pressure is applied, and the transparent medium layer is cured by heating or ultraviolet light irradiation;

S25: Separate the silicone rubber negative template from the transparent medium layer to obtain the surface of the first transparent medium layer with regular concave-convex shapes;

S26: Prepare a second transparent conductive film on the surface of the transparent medium layer to form regular concave-convex electrodes. the

When the regular concave-convex shape on the surface of the transparent medium layer is formed by 3D printing technology, as shown in Figure 4, the preparation of the regular concave-convex shape electrode includes the following steps:

S31: providing a clean second transparent substrate;

S32: Using 3D printing technology to print hole-shaped grooves on the surface of the second transparent substrate to obtain a surface of the transparent medium layer having regular concave-convex shapes with the concave parts;

S33: Prepare a second transparent conductive film on the surface of the regular concave-convex shape transparent medium layer to form regular concave-convex shape electrodes.

In the drawings, the thicknesses of layers and regions are exaggerated for clarity, but as schematic diagrams, they should not be considered to strictly reflect the proportional relationship of geometric dimensions. The referenced figures are schematic illustrations of idealized embodiments of the present invention, and the illustrated embodiments of the present invention should not be considered limited to the particular shapes of the regions shown in the figures, but include resulting shapes (such as manufacturing-induced deviations) . All are represented by rectangles in this embodiment, and the representation in the figure is schematic, but this should not be considered as limiting the scope of the present invention. the

In order to allow those skilled in the art to better understand the present invention, preferably, the transparent substrate in the specific embodiment of the present invention is a glass substrate, the transparent conductive film is made of indium tin oxide (ITO), the transparent medium layer is made of acrylic (PMMA), and the alignment layer is made of Polyimide (PI), the silicone rubber material used to make the silicone rubber negative template is polydimethylsiloxane (PDMS), and the ratio of its monomer to crosslinking agent is 10:1. The specific preparation method of the liquid crystal microlens array will be introduced below through the examples. the

Embodiment one

As shown in Figures 1 and 2, this embodiment is a method for preparing a liquid crystal microlens array when the regular concave-convex shape on the surface of the transparent medium layer is transferred by anisotropically etching the silicon surface and supplemented by subsequent soft printing. , its specific scheme includes the following steps:

S11: Provide a clean Si(100) substrate and make a small hole grating on its surface by photolithography;

Select a single-sided polished Si (100) substrate, place it in the aqueous solution of cleaning solution Win-10 (volume ratio is Win-10 : DI water = 3 : 97), use an ultrasonic machine with a frequency of 32KHz to clean for 15 minutes, and spray for 2 minutes Finally, put it in the aqueous solution of cleaning solution Win-41 (volume ratio is Win-41 : DI water = 5 : 95), use an ultrasonic machine with a frequency of 40KHz to clean for 10 minutes, spray and rinse with circulating tap water for 2 minutes, and then reuse The ultrasonic machine with a frequency of 28KHz was cleaned in DI pure water for 10 minutes, dried with a nitrogen gun, and then placed in a clean oven at 50°C for more than 30 minutes for later use.

As shown in Figure 5, on the surface of the above-mentioned clean substrate Si (100) substrate, a 100 nm SiO ₂ film was deposited by plasma enhanced chemical vapor deposition (PECVD), and a layer of photoresist was uniformly coated on the SiO ₂ film RJZ304, after baking at 110°C for 20 minutes, after exposure and development, a photoresist with a pattern of a small hole grating array (corresponding to a microlens array) is formed on the SiO ₂ film; the photoresist is used as a mask, and reactive ions are used Etching method, the exposed _SiO2 film is etched away, and the _SiO2 film protected by the photoresist is left. After the photoresist is cleaned, the _SiO2 film aperture grating array (with the aperture grating pattern photoresist) is formed. Hollow small hole part, the hollow small hole part is circular in this embodiment, corresponding to the microlens array).

S12: using the pinhole grating as a mask, using a potassium hydroxide (KOH) solution to anisotropically etch hole-shaped grooves on the surface of the Si(100) substrate;

Put the Si(100) substrate with the SiO ₂ film pinhole grating array 110 in a 30 wt.% potassium hydroxide (KOH) aqueous solution at a temperature of 80°C. Due to the etching speed of the KOH solution on the Si(100) surface Far greater than the etching rate for the Si(111) surface, an inverted triangular conical groove as shown in Figure 5 will be formed.

S13: Using silicone rubber to prepare a negative template for the hole groove;

Take the Si substrate containing the array of inverted triangular conical grooves prepared in the step S12 and seal it in a container containing trimethylchlorosilane molecules (TMCS), and take it out after standing for about 5 minutes. At this time, the Si substrate A layer of TMCS molecules is self-assembled on the surface for anti-sticking. Prepare a mixture of monomers and crosslinking agents according to the required ratio of the silicone rubber. In this example, a mixture of polydimethylsiloxane (PDMS) is prepared according to the ratio of monomers and crosslinking agents of 10:1, and stirred until uniform mix. Put the above self-assembled Si substrate with one layer of TMCS horizontally in a container, pour the polydimethylsiloxane (PDMS) mixture, let it stand for about 30 minutes until all the bubbles are eliminated, put the container at 80°C Oven for more than two hours, take out the PDMS after it is completely cured, separate the PDMS from the Si substrate, and cut the PDMS to form a silicone rubber negative template of the triangular pyramid array.

S14: Provide a clean transparent substrate 102 (second transparent substrate), uniformly coat a layer of transparent medium layer (transparent medium layer) on its surface, place the silicone rubber negative template obtained in S13 flatly on the transparent medium layer, apply Under a certain pressure, it is cured by heating or ultraviolet light irradiation;

Take a clean glass substrate 102, preferably, uniformly coat a layer of PMMA on its surface by using a spin coating method, place the triangular pyramid array silicon rubber negative template triangular pyramid array obtained in S13 on the transparent medium layer flatly, and apply a certain The pressure makes an array of inverted triangular conical grooves formed on the PMMA, and the PMMA is cured by heating.

S15: separating the silicone rubber negative template from the transparent medium layer to obtain the surface of the regular concave-convex shape of the transparent medium layer;

After the PMMA is solidified, the silicone rubber negative template is peeled off to form the surface 104 of the first transparent medium layer with regular concave-convex shapes.

S16: Prepare a transparent conductive film on the surface of a regular concave-convex shape transparent medium layer to form a regular concave-convex shape electrode;

Preferably, an ITO transparent conductive film with a thickness of 300nm is prepared by magnetron sputtering on the surface of the regular concave-convex shape of the first transparent medium layer to form a regular concave-convex shape transparent conductive electrode 105. Similarly, another clean glass substrate 101 was taken, and an ITO transparent conductive film with a thickness of 300 nm was prepared on its surface by magnetron sputtering to form regular concave-convex shape transparent conductive electrodes 103.

S17: preparing a liquid crystal alignment layer on the surface of the transparent conductive electrodes 103 and 105;

A layer of polyimide (PI) with a thickness of about 80nm is uniformly coated on the surface of the transparent conductive electrodes 103 and 105 by spin coating, and placed in an oven at 260°C for 2 hours, then taken out and cooled naturally, and then liquid crystal A special rubbing machine for panel preparation is used for rubbing alignment, and PI liquid crystal alignment layers 106 and 107 are respectively formed on the two transparent conductive electrodes. the

S18: Preparation of liquid crystal microlens. the

Using the standard process of LCD panel production, a complete liquid crystal microlens is formed through steps such as frame glue printing, substrate bonding, liquid crystal filling, sealing, and liquid crystal reorientation. the

Example two

As shown in Figure 3, this embodiment is a method for preparing a liquid crystal microlens array when the regular concave-convex shape on the surface of the transparent medium layer is transferred by isotropically etching the glass surface and supplemented by subsequent soft printing. The protocol includes the following steps:

S21: Provide a clean glass substrate and make a small hole grating on its surface by photolithography;

Put the glass substrate in the aqueous solution of the cleaning solution Win-10 (volume ratio of Win-10 : DI water = 3 : 97), use an ultrasonic machine with a frequency of 32KHz to clean it for 15 minutes, spray it for 2 minutes, and then place it in the cleaning solution Win -41 in aqueous solution (volume ratio Win-41 : DI water = 5 : 95), use an ultrasonic machine with a frequency of 40KHz to clean for 10 minutes, spray and rinse with circulating tap water for 2 minutes, and then use an ultrasonic machine with a frequency of 28KHz in DI Rinse in pure water for 10 minutes, blow dry with a nitrogen gun, and place in a clean oven at 50°C for at least 30 minutes for later use.

On the above-mentioned clean glass surface, a 100 nm Cr film was deposited by magnetron sputtering, and a layer of photoresist RJZ304 was uniformly coated on the Cr film, and after baking at 110°C for 20 minutes, it was exposed and developed to form on the Cr film A photoresist with a pattern of a small hole grating array (corresponding to a microlens array); placed in an aqueous etching solution containing Ce(NH ₄ ) ₂ (NO ₃ ) ₆ and HClO ₄ , using the photoresist as a mask, exposing The metal part (the hollowed out small hole part with the small hole grating pattern photoresist, the hollowed out small hole part is circular in this embodiment) is etched, and the metal protected by the photoresist is left. After the photoresist is cleaned, Finally, a Cr film pinhole grating (corresponding to a microlens array) is formed.

S22: using the Cr film pinhole grating as a mask, using a mixed solution of hydrofluoric acid (FH) and ammonium fluoride (NH ₄ F) to anisotropically etch hole-shaped grooves on the surface of the substrate;

Place the glass substrate with the Cr film pinhole grating array in 5 wt.% hydrofluoric acid (FH) aqueous solution, the Cr film pinhole grating array is used as a mask, and the glass is etched at room temperature to form microlens-shaped hole grooves . the

S23: Using silicone rubber to prepare a negative template for the hole groove;

Take the glass substrate containing microlens-shaped hole-shaped grooves prepared in the step S22, remove the Cr film on the surface with dilute hydrochloric acid, clean it, seal it and place it in a container containing trimethylchlorosilane molecules (TMCS), Take it out after standing for about 5 minutes. At this time, the surface of the glass substrate self-assembles a layer of TMCS molecules for anti-sticking. Prepare a mixture of monomers and crosslinking agents according to the required ratio of the silicone rubber. In this example, a mixture of polydimethylsiloxane (PDMS) is prepared according to the ratio of monomers and crosslinking agents of 10:1, and stirred until uniform mix. Place the above self-assembled glass substrate with one layer of TMCS horizontally in a container, pour the polydimethylsiloxane (PDMS) mixture, let it stand for about 30 minutes until all the bubbles are eliminated, and put the container at 80°C Oven for more than two hours, take out the PDMS after it is completely cured, separate the PDMS from the glass, and cut the PDMS to form a silicone rubber negative template (microlens shape) with hole grooves.

S24: Provide a clean transparent substrate 202 (second transparent substrate), uniformly coat a layer of transparent medium layer (transparent medium layer) on its surface, place the silicone rubber negative template obtained in S23 flatly on the transparent medium layer, apply Under a certain pressure, it is cured by heating or ultraviolet light irradiation;

Take a clean glass substrate 202, preferably, use a spin coating method to uniformly coat a layer of PMMA on its surface, and place the microlens-like hole-shaped groove silicone rubber negative template microlens array obtained in S23 on the transparent medium layer flatly. On, a certain pressure is applied to form a microlens-like hole-shaped groove array on the PMMA, and the PMMA is cured by heating.

S25: separating the silicone rubber negative template from the transparent medium layer to obtain the surface of the regular concave-convex shape of the transparent medium layer;

After the PMMA is cured, the silicone rubber negative template is removed to form the surface 204 of the first transparent medium layer with regular concave-convex shapes.

S26: Prepare a transparent conductive film on the surface of the regular concave-convex shape transparent medium layer to form a regular concave-convex shape electrode;

Preferably, an ITO transparent conductive film with a thickness of 300 nm is prepared by magnetron sputtering on the surface of the regular concave-convex shape of the transparent medium layer to form a regular concave-convex shape transparent conductive electrode 205. Similarly, another clean glass substrate 201 was taken, and an ITO transparent conductive film with a thickness of 300nm was prepared on its surface by magnetron sputtering to form regular concave-convex shape transparent conductive electrodes 203.

S27: preparing a liquid crystal alignment layer on the surface of the transparent conductive electrodes 203 and 205;

The surface of the transparent conductive electrodes 203 and 205 is evenly coated with a layer of polyimide (PI) with a thickness of about 80nm by the spin coating method, and placed in an oven at 260°C for 2 hours, then taken out and cooled naturally, and then liquid crystal A special rubbing machine for panel preparation is used for rubbing alignment, and PI liquid crystal alignment layers 206 and 207 are respectively formed on the two transparent conductive electrodes. the

S28: Preparation of liquid crystal microlenses. the

Using the standard process of LCD panel production, a complete liquid crystal microlens is formed through steps such as frame glue printing, substrate bonding, liquid crystal filling, sealing, and liquid crystal reorientation. the

Embodiment three

As shown in Figure 4, this embodiment is a method for preparing a liquid crystal microlens array when the regular concave-convex shape on the surface of the transparent medium layer is formed by 3D printing technology, and its specific scheme includes the following steps:

S31: providing a clean transparent substrate (second transparent substrate);

Put the glass substrate in the aqueous solution of the cleaning solution Win-10 (volume ratio of Win-10 : DI water = 3 : 97), use an ultrasonic machine with a frequency of 32KHz to clean it for 15 minutes, spray it for 2 minutes, and then place it in the cleaning solution Win -41 in aqueous solution (volume ratio Win-41 : DI water = 5 : 95), use an ultrasonic machine with a frequency of 40KHz to clean for 10 minutes, spray and rinse with circulating tap water for 2 minutes, and then use an ultrasonic machine with a frequency of 28KHz in DI Rinse in pure water for 10 minutes, blow dry with a nitrogen gun, and place in a clean oven at 50°C for at least 30 minutes for later use.

S32: Using 3D printing technology to print hole-shaped grooves on the surface of the second transparent substrate to obtain the regular concave-convex shape of the transparent medium layer surface 304;

S33: Prepare a transparent conductive film on the surface of the regular concave-convex shape transparent medium layer 304 to form a regular concave-convex shape electrode 305;

Preferably, the ITO transparent conductive film with a thickness of 300nm is prepared by magnetron sputtering on the surface of the regular concave-convex shape transparent medium layer 304 to form a regular concave-convex shape transparent conductive electrode 305. Similarly, another clean glass substrate 301 was taken, and an ITO transparent conductive film with a thickness of 300nm was prepared on its surface by magnetron sputtering to form regular concave-convex transparent conductive electrodes 303.

S34: preparing a liquid crystal alignment layer on the surface of the transparent conductive electrodes 303 and 305;

The surface of the transparent conductive electrodes 303 and 305 is evenly coated with a layer of polyimide (PI) with a thickness of about 80nm by the spin coating method, and placed in an oven at 260°C for 2 hours, then taken out and cooled naturally, and then liquid crystal A special rubbing machine for panel preparation is used for rubbing alignment, and PI liquid crystal alignment layers 306 and 307 are respectively formed on the two transparent conductive electrodes. the

S35: Preparation of liquid crystal microlens. the

Using the standard process of LCD panel production, a complete liquid crystal microlens is formed through steps such as frame glue printing, substrate bonding, liquid crystal filling, sealing, and liquid crystal reorientation. the

The above-listed preferred embodiments have further described the purpose, technical solutions and advantages of the present invention in detail. It should be understood that the above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Within the spirit and principles of the present invention, any modifications, equivalent replacements, improvements, etc., shall be included within the protection scope of the present invention. the

Claims (8)

1. a liquid crystal microlens array, is characterized in that, comprising:

One second transparency carrier;

One transparent dielectric layer, is arranged at above described second transparency carrier, and described transparent dielectric layer upper surface all has a recess corresponding to each lenticule region;

One second transparent conductive film, is arranged at above described transparent dielectric layer, and has the recess identical with described transparent dielectric layer upper surface;

One second both alignment layers, is arranged at above described second transparent conductive film, and described second both alignment layers upper surface is parallel with described second transparency carrier;

One liquid crystal layer, is arranged at above described second both alignment layers;

One first both alignment layers, is arranged at above described liquid crystal layer;

One first transparent conductive film, is arranged at above described first both alignment layers;

One first transparency carrier, is arranged at above described first transparent conductive film.

2. a kind of liquid crystal microlens array according to claim 1, is characterized in that: described first transparency carrier and the second transparency carrier are clear glass, transparent inorganic material or transparent organic polymer material.

3. a kind of liquid crystal microlens array according to claim 1, is characterized in that: the shape of described liquid crystal microlens is circular or regular polygon.

4. a kind of liquid crystal microlens array according to claim 1, is characterized in that: described first transparent conductive film and the second transparent conductive film are the indium tin oxide films, metal doped zinc oxide film, metal-graphite alkene or the metal-carbon pipe laminated film that adopt vacuum coating or spraying technology to be formed.

5. a kind of liquid crystal microlens array according to claim 1, is characterized in that: described first both alignment layers and the second both alignment layers stand friction treatment, and frictional direction is consistent.

6. a preparation method for liquid crystal microlens array as claimed in claim 1, is characterized in that, the making of described second transparent conductive film comprises the following steps:

S11: the Si substrate of a cleaning is provided and adopts photoetching to make aperture grating on its surface;

S12: with described aperture grating for mask, adopts potassium hydroxide solution, at described Si substrate surface anisotropic etching pass groove;

S13: adopt silicon rubber to prepare the silicon rubber negative norm plate of described pass groove;

S14: the second transparency carrier that a cleaning is provided, at its surface uniform coating layer of transparent dielectric layer, and be positioned over smooth for described silicon rubber negative norm plate on described transparent dielectric layer, apply a predetermined pressure, adopt the method for heating or UV-irradiation that described transparent dielectric layer is solidified;

S15: described silicon rubber negative norm plate is separated with described transparent dielectric layer;

S16: at described transparent dielectric layer surface preparation the second transparent conductive film.

7. a preparation method for liquid crystal microlens array as claimed in claim 1, is characterized in that, the making of described second transparent conductive film comprises the following steps:

S21: the glass substrate of a cleaning is provided and adopts photoetching to make aperture grating on its surface;

S22: with described aperture grating for mask, adopts hydrofluorite and ammonium fluoride mixed solution, at described glass baseplate surface isotropic etching pass groove;

S23: adopt silicon rubber to prepare the silicon rubber negative norm plate of described pass groove;

S24: the second transparency carrier that a cleaning is provided, at its surface uniform coating layer of transparent dielectric layer, and be positioned on described transparent dielectric layer by smooth for described silicon rubber negative norm plate, apply certain pressure, adopt the method for heating or UV-irradiation that described transparent dielectric layer is solidified;

S25: described silicon rubber negative norm plate is separated with described transparent dielectric layer;

S26: at described transparent dielectric layer surface preparation the second transparent conductive film.

8. a preparation method for liquid crystal microlens array as claimed in claim 1, is characterized in that, the making of described second transparent conductive film comprises the following steps:

S31: the second transparency carrier that a cleaning is provided;

S32: adopt 3D printing technique at described second transparency carrier printout surface pass groove, obtains the transparent dielectric layer surface with described recess;

S33: at described transparent dielectric layer surface preparation the second transparent conductive film.