CN104236591A - Sensing device based on friction generating technology and preparing and using method of sensing device - Google Patents

Abstract

The invention provides a sensor device based on friction power generation technology and its preparation and use method. The sensor device uses the friction power generation technology to realize a self-driven working mode that can be monitored at any time without an external power supply. The sensing device of the present invention includes two arrays, each array is composed of several independent units, and these units form a network structure through mutual insulation and crossing, and there is an independent sensing pixel between every two adjacent crossing points point, the electrical signal of each sensing unit is output separately. This mesh structure greatly improves the resolution of the sensing device and reduces the amount of wiring for circuit connections, which is very beneficial for large-scale industrial applications.

Description

A sensor device based on triboelectric generation technology and its preparation and use method

technical field

The invention relates to a sensor device and its preparation and use method, in particular to a sensor device based on triboelectric generation technology and its preparation and use method.

Background technique

Tracking sensors are increasingly used in smartphones and body tracking systems, but current sensors are based on capacitance, or optical and magnetic effects. Generally speaking, the power supply of these sensors comes directly or indirectly from the battery. This has caused great hidden dangers of power outages for some situations that need to be on call at any time and signal monitoring from time to time; and in a wide range of applications, a lot of maintenance work is required in terms of battery power monitoring and battery replacement; at the same time, traditional batteries and power supply The large volume and mass of the system limit the application of the sensor in some fields; moreover, the toxic chemical substances contained in the battery are potentially harmful to the environment and the human body. Therefore, it is of great significance to develop a self-driving sensing technology.

Since 2012, the triboelectric generator based on the tribostatic effect has developed rapidly, and with its high-efficiency output, simple process, and stable performance, it provides a promising way for converting mechanical energy into electrical energy. Some triboelectric devices and sensing devices utilizing triboelectric generation have been developed successively. However, the sensors designed based on the existing friction generators all have defects such as low resolution and complex positioning circuits, which are not conducive to practical applications.

Contents of the invention

The present invention aims at the above-mentioned defects of the prior art, and designs a novel sensor device based on friction power generation technology, so that it can work by itself, not only can achieve high resolution, but also greatly simplify the detection circuit, It has a very broad application prospect.

In order to achieve the above object, the present invention firstly provides a sensing device based on triboelectric generation technology, comprising a first array, a second array and an electrical signal output end grounded at one end, wherein the first array is composed of n mutually independent first One unit, the first unit includes a first electrode unit; the second array is composed of m mutually independent second units, and the second unit includes a second electrode unit; the first array and the second The array forms a network through insulating crossings at a certain angle, and the non-intersecting surfaces of the first array and the second array form a sensing surface; the electrical signal output ends are respectively connected to the n first electrode units and the m The second electrode unit is electrically connected, and the signal output by each electrode unit is monitored separately, wherein n and m are natural numbers;

Preferably, each said first unit intersects with a second unit only once;

Preferably, each first unit forms an intersection with m second units;

Preferably, at all intersections, the upper and lower relative positions of the first unit and the second unit are the same;

Preferably, said first and second arrays have surfaces at intersections that are lower than sensing surfaces at non-intersections;

Preferably, a substrate with holes is also included, and the intersection of the first unit and the second unit is sunk in the hole of the substrate;

Preferably, at non-intersection points, the surfaces of the first array and the second array lie in the same plane;

Preferably, in the extension direction of the first unit and the second unit, at any two adjacent intersection points, the relative positions of the first unit and the second unit are opposite up and down;

Preferably, all the first units are parallel to each other, and/or, all the second units are parallel to each other;

Preferably, all the first units are arranged equidistantly, and/or, all the second units are arranged equidistantly;

Preferably, all the first electrode units have the same shape and size, and/or, all the second electrode units have the same shape and size;

Preferably, the shape and size of the first electrode unit and the second electrode unit are the same;

Preferably, the width of the first electrode unit is the same as the distance between two adjacent first electrode units;

Preferably, the certain angle is a right angle;

Preferably, at the intersection, the first unit is separated from the second unit by a gap, or by an insulating layer;

Preferably, the first unit consists only of first electrode units, and/or, the second unit consists only of second electrode units;

Preferably, an isolation layer is also included, attached on the surfaces of the first array and the second array;

Preferably, the isolation layer is an insulating material;

Preferably, the outer surface of the first electrode unit, and/or, the outer surface of the second electrode unit is bonded with a non-conductive friction layer;

Preferably, the friction layer is an organic polymer material;

Preferably, the material composition, shape and/or size of the first unit and the second unit are consistent.

The present invention also provides a method for manufacturing the above sensing device, comprising the following steps:

(1) providing a substrate, on which several holes are distributed;

(2) insulatingly paving a first array comprising n mutually independent first units on the substrate, so that each first unit passes through at least one of the holes;

(3) sinking the part of the first unit passing through the hole into the hole to form a depression;

(4) insulatingly paving a second array comprising m mutually independent second units on the substrate, so that each second unit intersects with at least one first unit at the hole to form a network;

(5) sinking the part of the second unit passing through the intersection into the hole to form a depression, and maintaining insulation between the first unit and the second unit at the depression;

(6) providing a plurality of electrical signal output terminals with one end grounded, electrically connected to n first electrode units and m second electrode units respectively, and separately monitoring the output signal of each electrode unit;

Preferably, each hole in the substrate becomes the intersection of the first unit and the second unit;

Preferably, the number of the holes is greater than or equal to n×m;

Preferably, the holes are distributed in a regular determinant array;

Preferably, step (7) is also included to remove the substrate;

Preferably, the mutual insulation in the step (5) is realized by forming a gap between the two units.

Preferably, after the step (3), the step (3-1) further includes laying an insulating layer on the first unit in each hole.

The present invention also provides a method for manufacturing the above sensing device, comprising the following steps:

(1) Provide n+m wires whose interior is a conductor and whose exterior is coated with insulating material, and several electrical signal output terminals with one end grounded;

(2) Using n threads as warps and m threads as wefts, the warps and wefts intersect each other to form a network structure, each warp is a first unit, and each weft is a Second unit;

(3) n warp threads and m latitude threads are respectively electrically connected to the electrical signal output terminals through internal conductors, so as to monitor the output signal of each unit separately;

Preferably, the warp and weft are intersected to form a net by weaving;

Preferably, in the extension direction of the first unit and the second unit, at any two adjacent intersection points, the relative positions of the first unit and the second unit are opposite up and down;

Preferably, it also includes step (4) removing the insulating material at the non-intersection point of the surface of the first unit and the second unit, so that the sensing surface is composed of the material of the first electrode unit and the second electrode unit;

Preferably, the insulating material is removed by mechanical polishing in the step (4).

The present invention also provides a method for using the above-mentioned sensing device, which includes using the sensing device to detect the speed, acceleration and trajectory of a single moving object, and the single moving object slides on the sensing surface of the sensing device , record the change of the electrical signal output by each unit with time;

Preferably, the first array and the second array form a mesh by being orthogonal.

The most prominent advantages of the sensing device based on the triboelectric generation technology provided by the present invention are high resolution and simple output signal wiring. A network structure is formed by crossing two arrays, and insulation treatment is carried out at the intersections, so that a small surface between each two intersections forms a sensing pixel, which overcomes the difficulty of making small-sized triboelectric generators. Due to technological limitations, the resolution of the entire sensing device is greatly improved, and the present invention can form thousands of pixels per square centimeter. At the same time, only each unit in the array is monitored instead of the electrical signal of each pixel, so that the number of electrical signal monitoring points is reduced from n×m to n+m, which greatly reduces the wiring amount of the output signal . On this basis, the intersection of the electrical signals generated by the two arrays at the same time is skillfully used to realize the positioning of the object in the two-dimensional plane; if the time dimension is added, the moving process of the object can also be monitored. track.

In addition, the sensing device of the present invention does not need external power supply, as long as the moving object touches the sensing surface, an electrical signal will be automatically output to the outside, which is a self-driven sensing. It has particularly obvious advantages for the tracking and monitoring of large-scale and random targets.

The sensor of the invention has low price and simple manufacturing process, and is very suitable for large-scale industrial application.

Description of drawings

The above and other objects, features and advantages of the present invention will be more clearly illustrated by the accompanying drawings. Like reference numerals designate like parts throughout the drawings. The drawings are not intentionally scaled and drawn according to the actual size, and the emphasis is on showing the gist of the present invention. Additionally, while illustrations of parameters comprising particular values may be provided herein, the parameters need not be exactly equal to the corresponding values, but rather may approximate the corresponding values within acceptable error margins or design constraints. In addition, the directional terms mentioned in the following embodiments, such as "upper", "lower", "front", "rear", "left", "right", etc., are only referring to the directions of the drawings. Accordingly, the directional terms are used to illustrate and not to limit the invention.

Fig. 1 is a kind of typical structure schematic diagram of the sensor device based on triboelectric power generation technology of the present invention;

Fig. 2 is a schematic diagram of the electrical signal output principle of the sensing device of the present invention;

Fig. 3 (a)-(b) is two kinds of typical structural representations of the first unit and the second unit of the sensing device of the present invention;

Fig. 4 is another typical structural schematic diagram of the sensing device of the present invention;

Fig. 5 (a)-(b) is two kinds of typical structural representations of sensing device of the present invention;

Figure 6 (a)-(d) is a schematic diagram of a typical preparation method of the sensing device of the present invention;

Fig. 7 is an exploded schematic view of the sensing device of the present invention monitoring the direction of object movement;

Figure 8(a)-(d) is a schematic diagram of the working principle of the sensing device of the present invention to monitor the movement of objects;

Figure 9 (a)-(c) is a schematic structural diagram of the sensing device and an electrical signal output spectrum of embodiment 1;

Figure 10(a)-(c) is the tracking signal diagram of the sensing device of embodiment 1 to the motion of the object; and

Fig. 11(a)-(c) are the structural schematic diagrams and electric signal output spectrum diagrams of the sensing device of Embodiment 2.

Detailed ways

The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention. Apparently, the described embodiments are only some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

Secondly, the present invention is described in detail with reference to the schematic diagrams. When describing the embodiments of the present invention in detail, for the convenience of explanation, the schematic diagrams are only examples, which should not limit the protection scope of the present invention.

Fig. 1 is a kind of typical structure of the sensing device based on triboelectric generation technology of the present invention, comprise the first array, the second array and the electric signal output end 30 of one end grounding, wherein the first array is made up of several mutually independent first units 10, the first unit 10 includes a first electrode unit 101 (not shown in the figure); the second array is composed of several mutually independent second units 20, and the second unit 20 includes a second electrode unit 201 (not shown in the figure). marked); the first array and the second array form a network through a certain angle of insulating intersection, the surface of the first array and the second array non-intersection (that is, the shaded part in the figure) constitutes the sensing surface, any two The sensing surface between adjacent intersections constitutes a sensing pixel point; two multi-channel electrical signal output terminals 30 are respectively electrically connected to each first electrode unit 101 and each second electrode unit, for each electrode The signal output by the unit is monitored individually.

Take the first electrode unit 101 and the second electrode unit 201 to constitute the sensing surface as an example to illustrate the working principle of the sensing device of the present invention, specifically referring to Fig. 2, wherein x ₁ , x ₂ and x ₃ represent Different positions of the three sensing pixels, A ₁ , A ₂ and A ₃ are electrical signal output terminals 30 individually connected to each sensing pixel. When a moving object A to be monitored with a non-conductive surface is in contact with the surface of the sensing pixel point at position _x1 on the sensing device of the present invention, due to the triboelectric properties of the surface material of the object A to be monitored and the sensing surface material The triboelectric properties are different, and an opposite surface charge will be formed on the surface where the two are in contact; when the moving object A leaves the sensing pixel due to continued movement, the first electrode unit 101 constituting the sensing pixel is kept Electrically neutral, the electrons will be transferred through the electrical signal output terminal 30 connected to it and one end is grounded, so that the current output can be detected at the electrical signal output terminal; when the moving object A with the frictional charge on the surface continues to move and contacts When another sensing pixel point is used, in order to achieve electrical balance, the electrode material corresponding to the pixel point will also transfer electrons through the electrical signal output terminal 30 connected to it and grounded at one end, so that the electrical signal output terminal can also transfer electrons. An electrical signal is detected. Thus, the sensor of the present invention can sense the entry, movement and departure of moving objects without resorting to an external power supply.

The triboelectric properties of materials involved in the present invention refer to the ability of a material to gain and lose electrons during friction or contact with other materials, that is, when two different materials are in contact or friction, one is positively charged and the other is charged Negative charge indicates that the two materials have different electron-accepting abilities, that is, the triboelectric properties of the two materials are different. For example, when the polymer nylon is in contact with aluminum foil, its surface is positively charged, that is, it has a strong ability to lose electrons. When the polymer polytetrafluoroethylene contacts with aluminum foil, its surface is negatively charged, that is, it has a strong ability to gain electrons.

In order to realize large-scale, high-sensitivity, and high-resolution sensing, the present invention adopts a network structure formed by crossing two arrays. The first unit 10 and the second unit 20 are the most basic components for providing and moving Sensing surfaces and electrode units that are in contact with objects and output sensing signals. Among them, the sensing surface is used to directly contact with the moving object to be monitored and form a surface charge through friction, and its material selection is the same as the friction surface of a general triboelectric generator, and can be selected from insulating materials, semiconductor materials and conductive materials. Among them, the insulator can be selected from some commonly used organic polymer materials and natural materials, including: polytetrafluoroethylene, polydimethylsiloxane, polyimide, polydiphenylpropane carbonate, polyterephthalic acid Ethylene glycol ester, aniline formaldehyde resin, polyoxymethylene, ethyl cellulose, polyamide, melamine formaldehyde, polyethylene glycol succinate, cellulose, cellulose acetate, polyethylene adipate, Polydiallyl phthalate, regenerated cellulose sponge, polyurethane elastomer, styrene-propylene copolymer, styrene-acrylonitrile copolymer, styrene-butadiene copolymer, polyamide nylon 11, polyamide nylon 66 , wool and its fabrics, silk and its fabrics, paper, rayon, cotton and its fabrics, wood, hard rubber, polymethacrylate, polyvinyl alcohol, polyester, polyisobutylene, polyurethane elastomer, polyurethane flexible sponge, Polyethylene terephthalate, polyvinyl butyral, phenolic resin, neoprene, butadiene propylene copolymer, natural rubber, polyacrylonitrile, poly(vinylidene chloride-co-acrylonitrile), Polyvinylpropanediol carbonate, polystyrene, polymethyl methacrylate, polycarbonate, liquid crystal polymer, polychloroprene, polyacrylonitrile, acetate, polybisphenol carbonate, poly Chloroethers, polychlorotrifluoroethylene, polyvinylidene chloride, polyethylene, polypropylene, polyvinyl chloride, and parylene, including parylene C, parylene N, parylene D, parylene HT or Parylene AF4.

Commonly used semiconductors include silicon, germanium; III and V group compounds, such as gallium arsenide, gallium phosphide, etc.; II and VI group compounds, such as cadmium sulfide, zinc sulfide, etc.; Solid solutions composed of II-VI compounds, such as gallium aluminum arsenic, gallium arsenic phosphorus, etc. In addition to the above-mentioned crystalline semiconductors, there are also amorphous glass semiconductors, organic semiconductors, and the like. Non-conductive oxides, semiconductor oxides and complex oxides also have triboelectric properties and can form surface charges during friction, so they can also be used as the friction layer of the present invention, such as oxides of manganese, chromium, iron, and copper , also includes silicon oxide, manganese oxide, chromium oxide, iron oxide, copper oxide, zinc oxide, BiO ₂ and Y ₂ O ₃ .

Commonly used conductor materials include metals and conductive non-metallic materials, etc., such as: metals, including gold, silver, platinum, aluminum, nickel, copper, titanium, chromium or selenium; selected from gold, silver, platinum, aluminum, nickel, Alloys formed by one or more of copper, titanium, chromium and selenium; conductive oxides, such as indium tin oxide ITO; organic conductors are generally conductive polymers, including polypyrrole, polyphenylene sulfide, polyphthalocyanine compounds, polyaniline and/or polythiophene. Due to limited space, all possible materials cannot be exhaustively listed. Here, only some specific materials are listed for people's reference, but obviously these specific materials can not become the limiting factor of the protection scope of the present invention, because in the invention Under the inspiration of , those skilled in the art can easily select other similar materials according to the triboelectric properties of these materials.

It is also possible to physically or chemically modify the sensing surface so that micron or sub-micron microstructure arrays are distributed on it to increase the contact area between the sensing surface and the object to be monitored, thereby increasing the amount of contact charge . Specific modification methods include photoetching, chemical etching and plasma etching. This purpose can also be achieved by embellishing or coating nanomaterials, or chemically modifying the sensing surface to further increase the amount of charge transfer at the moment of contact, thereby increasing the contact charge density and the output power of the generator.

In practical applications, the material selection of the sensing surface is mainly considered to match the material of the object to be monitored. The difference in triboelectric properties between the two surfaces that are in contact with each other should be as large as possible. For example, if the contact surface of the object to be monitored is a conductive material, then the sensor Selecting insulating materials or semiconductor materials for the sensing surface will obtain better output performance; if the contact surface of the object to be monitored is an insulating material, then the sensing surface can consider insulating materials, semiconductor materials or conductor materials with large differences in triboelectric properties. This makes it easy for the two to generate surface contact charges during the friction process.

The triboelectric charge generated on the sensing surface needs to be output through the electrode unit, so the electrode unit is a necessary part of each unit. General conductive materials can be used to prepare electrode units, including metals and conductive non-metallic materials, such as: metals, including gold, silver, platinum, aluminum, nickel, copper, titanium, chromium or selenium; Alloys formed by one or more of , platinum, aluminum, nickel, copper, titanium, chromium and selenium; conductive oxides, such as indium tin oxide ITO; organic conductors are generally conductive polymers, including polypyrrole, polyphenylene Sulfides, polyphthalocyanines, polyanilines and/or polythiophenes.

Since the sensing surface can also consist of an electrically conductive material, in this case the surface of the electrode unit can also serve as the sensing surface at the same time. This is the case shown in Figure 2. If the sensing surface is formed of insulating material or semiconductor material, in order to ensure the smooth output of surface charge, the sensing surface should form a close contact with the corresponding electrode unit. This bonding can be formed in two ways: one is before crossing to form a network structure, for example, each first unit and second unit is composed of an electrode unit and a friction layer attached to part or all of the surface of the electrode unit 40, and the final sensing surface is provided by the friction layer 40, see Fig. 3(a)-(b) for details. 3( a ) shows the case where the friction layer 40 is attached to the entire surface of the first electrode unit 101 , and FIG. 3( b ) shows the case where the friction layer 40 is attached to the upper surface of the first electrode unit 101 . The second unit 20 is similar to the first unit 10 and will not be repeated here. When using two kinds of units as shown in Fig. 3 (a)-(b) to cross to form a network structure, due to the existence of the friction layer 40, the first unit 10 and the second unit 20 can easily form insulation at the intersection structure. Another way is to attach a layer of friction layer 40 on the surface of the electrode unit after the mesh structure is formed to form a sensing surface. The specific structure can be seen in FIG. 4 . In FIG. 4 , the first unit 101 and the second unit 201 firstly form a network structure through insulating intersections, and the friction layer 40 is attached to the surface of the network structure.

In order to form a network structure, several independent first units 10 and several independent second units 20 are required, generally n first units 10 and m second units 20 can be selected, wherein n and m are natural numbers, preferably n and m are greater than 2. The composition, shape and size of each unit may be the same or different. Normally, the composition, shape and size of each unit, especially the composition, shape and size of the electrode unit are the same, so that the output electrical signal is consistent when the object to be monitored enters each position. Sometimes, in order to meet the key monitoring needs of individual positions, the first unit and the second unit of the position can be set to different materials or sizes, so that when the object to be monitored passes through this position, it will emit a different signal from other positions for identification.

The relative position between each first unit 10 and/or second unit 20 can be set arbitrarily according to needs, generally speaking, it can be set to be parallel, and the distance between two adjacent units can also be set to be equal, that is Arranged equidistantly. In order to improve efficiency, the distance between two adjacent units can also be set to be equal to the unit width. The "unit width" is the width of the unit projected on the sensing surface and perpendicular to the extending direction.

The sensing device of the present invention is a mesh structure formed by insulating crossings of the first unit 10 and the second unit 20 . The relative position between the first unit 10 and the second unit 20 at the intersection is generally not limited, but for the convenience of processing, two structures can be preferred (see Figure 5): one is the first unit at all intersections 10 and the second unit 20 have the same upper and lower relative positions, see Fig. 5(a), for example, both the first unit 10 is on the top, or the first unit 10 is all on the bottom, this structure is especially suitable for the first array and the second In the case where the arrays are laid separately, and in order to form mutually separated sensing pixels, it is preferred that the surfaces of the first array and the second array at the intersection are not higher than the sensing surface at the intersection, more preferably lower than the sensing surface, In this way, two adjacent sensing pixels are separated by the intersection. In order to form a structure with a lower surface at the intersection point, a substrate with holes can be used as an aid, specifically the steps shown in Figure 6(a)-(d): firstly provide a substrate 50 with holes 60, on which Laying the first unit 10, and sinking the first unit 10 passing through the hole 60 into the hole 60 to form an embedded structure, and then laying an insulating layer 70 on the first unit 10 in the hole, and then according to a certain intersection angle The second unit 20 is laid, passing through the hole 60 , the second unit 20 also forming an embedded structure, so that the first unit 10 and the second unit 20 form a lower surface intersection at the hole 60 . In order to ensure the insulation between the two units, in the hole 60, a certain space may also be left between the first unit 10 and the second unit 20 as an insulating layer. Of course, if the first unit 10 and/or the second unit 20 also includes a non-conductive friction layer 40, then the insulation relationship between the first unit 10 and the second unit 20 can also be realized through the isolation of the friction layer 40. , without having to leave a gap between the two or lay an insulating layer separately. It should be noted that although the hole 60 shown in FIG. 5 is square, the shape of the hole 60 in practical applications can be adjusted as required, that is, the square is not the limitation of the present invention for the hole 60 .

Another network structure is, referring to Fig. 5 (b): in the direction in which the first unit 10 and the second unit 20 extend, at any two adjacent intersections, the first unit 10 and the second unit 20 The upper and lower relative positions are opposite. This structure is more suitable to be produced by weaving. For example, the first array is used as warp threads, the second array is used as weft threads, and the warp and weft threads are crossed and pressed against each other to form a network structure with the above characteristics. Although this structure can also be accomplished with a perforated substrate 50, it is more suitable for direct weaving. Both the first unit 10 and the second unit 20 can be made into thin wires with electrode units in the middle for braiding, and at the same time, in order to form insulation at the intersection of the two units, a non-conductive layer can be formed on the outer surface of the thin wires. The friction layer 40 or the insulation isolation layer is used for isolation, and the isolation layer at the non-intersection point can be removed after the weaving is completed. The sensor device obtained in this way has the advantages of easy processing and particularly high resolution.

Preferably, each first unit 10 and one second unit 20 of the sensing device of the present invention can only intersect once, which ensures that only one intersection point can be determined by signal cross analysis of two units. More preferably, each first unit 10 and each second unit 20 intersect once, so as to improve the positioning efficiency of the sensor. The intersection angle of the two units is not particularly limited, and can be selected according to actual needs. Commonly used can be set to vertical intersection, that is, the intersection angle is a right angle, so that it is convenient to use the x-y orthogonal coordinate system to locate the object to be monitored on it.

In order to protect the sensing surface, a layer of isolation layer can also be pasted on the surface of the first array and the second array, and the isolation layer is preferably an insulating material, which is somewhat similar to the setting method of the friction layer 40 described above, However, the material selection of the friction layer 40 is mainly considered from the triboelectric properties, while the material selection of the isolation layer is mainly considered from the protection performance. Sensing devices that include an isolation layer are more suitable for objects to be monitored that have non-conductive surfaces, in which case the surface of the object to be monitored is easily charged directly by friction with the surrounding environment and does not have to rely on contact with the sensing surface Accumulation of surface charges is realized, while the output of current is accomplished through electrostatic induction with the electrode units in the sensing device.

One end of the electrical signal output end 30 is grounded, and the other end is electrically connected to each of the first electrode unit 101 and the second electrode unit 201 , and the output signals thereof are individually monitored. In order to achieve this purpose, multiple single-channel electrical signal output terminals 30 can be used. For example, in the case where n first units 10 and m second units 20 form n×m intersection points, n+m single-channel electrical signal output terminals 30 can be used. Each unit has an electrical signal output terminal 30 for each channel for independent monitoring; several multi-channel electrical signal output terminals 30 can also be used, and each electrical signal output terminal monitors the output of multiple units at the same time. Generally speaking, the electrical signal output terminal 30 has a certain internal resistance. In order to regulate the output signal, an external resistance can also be introduced inside it. The resistance value of the resistance is not specifically limited. As an example, 10MΩ is a possible choice. The monitoring signal of the electrical signal output terminal 30 may be current and/or voltage. A signal analysis system may also be included to analyze the monitored electrical signals. These are all conventional techniques in the art, and will not be described in detail here.

Although the sensing device of the present invention can be prepared by various methods, the inventors have proposed two methods that are relatively simple and easy for large-scale industrial application, which are more suitable for the preparation of the sensing device of the present invention. One of them requires the cooperation of the base, which is more suitable for the situation that the relative positions of the first unit 10 and the second unit 20 at all intersections are the same, and specifically includes the following steps (see FIG. 6 ):

(1) provide a substrate 50, which is distributed with several holes 60;

(2) On the substrate 50, insulate and pave a first array comprising n mutually independent first units 10, so that each first unit 10 passes through at least one hole 60;

(3) sinking the part of the first unit 10 passing through the hole 60 into the hole to form a depression;

(4) laying a layer of insulating layer 70 on the first unit 10 in each hole;

(5) Insulate and lay a second array comprising m mutually independent second units 20 on the base 50, so that each second unit 20 intersects with at least one first unit at the hole 60 to form a network;

(6) sink the part of the second unit 20 passing through the intersection into the hole to form a depression, and keep the insulation between the first unit 10 and the second unit 20 at the depression through an insulating layer;

(7) Provide several electrical signal output terminals 30 with one end grounded, electrically connected with n first electrode units 101 and m second electrode units 201 respectively, and monitor the output signal of each electrode unit individually.

The substrate 50 in step (1) can be various conventional substrate materials in the field, such as plexiglass, rubber sheet, etc., preferably an insulating material, which can be hard or have certain flexibility and elasticity. The function of the base 50 is to provide a hole 60 to allow the two cells to form a sunken structure at the point of intersection. Therefore, the distribution of the holes 60 can be set according to the required cross network structure. Preferably, the holes 60 are regularly and periodically distributed on the substrate 50 , especially distributed in a determinant array. The number of holes 60 should match the number of intersections to be formed. In order to improve the utilization of the holes 60 , preferably each hole on the base 50 becomes an intersection of the first unit 10 and the second unit 20 . At the same time, considering that the substrate can also have a certain degree of versatility, the number of holes 60 can be greater than or equal to the number of intersections to be formed, for example, for n first units 10 and m second units 20, the number of holes 60 It is better to have more than or equal to n×m, so that a certain space is reserved for the number and position adjustment of intersections. The hole 60 only needs to have a certain depth, and does not have to be a through hole. The size of the hole 60 should match the size of the first unit 10 and the second unit 20 so as to allow the two units to form an embedded structure inside. In hole 60, the insulation between two units can be achieved by insulating layer or by air space. If an insulating layer is set for isolation, a step (3-1) can be added after step (3), laying a layer of insulating layer 70 on the first unit 10 in each hole, and then step (4) can be carried out .

Some sensing devices do not need the support of the substrate 50 during use. The method may also include step (6) removing the substrate 50 , that is, after the substrate 50 is used to form the above-mentioned structure and the structure is fixed, the substrate 50 can be removed.

Another manufacturing method of the sensing device provided by the present invention is more suitable for the case where the first unit 10 and the second unit 20 have opposite upper and lower relative positions at any two adjacent intersection points. Specifically include the following steps:

(1) Provide n+m wires whose interior is a conductor and whose exterior is coated with insulating material, and several electrical signal output terminals with one end grounded;

(2) Using n threads as warps and m threads as wefts, the warps and wefts intersect each other to form a network structure, each warp is a first unit, and each weft is a Second unit;

(3) The n warp threads and the m weft threads are respectively electrically connected to the electrical signal output terminal through internal conductors, so as to individually monitor the output signal of each unit.

Wherein the formation of the network structure in step (2) may adopt a conventional network forming method in the art, preferably by weaving to make the warp and weft intersect to form a network. For various braided structures, the preferred final structure of the present invention is: in the extension direction of the first unit 10 and the second unit 20, at any two adjacent intersections, the upper and lower sides of the first unit 10 and the second unit 20 are relative The positions are opposite.

For the situation that needs to use the sensing surface of conduction, this method also comprises step (4) the insulating material at the non-intersection point of the surface of the first unit 10 and the second unit 20 is removed, so that the sensing surface is formed by the first electrode unit 101 and the second unit 20. The material composition of the second electrode unit 201 . Specifically, the insulating material can be removed by mechanical polishing technology.

The sensing device of the present invention can not only detect the entry of the object to be monitored, but also monitor the speed and acceleration of a single moving object sliding on its surface, and track its motion track. The method is mainly to record the electrical signal output by each unit and analyze its change over time. The specific principle is as follows (see Figure 7 and Figure 8):

It can be seen from FIG. 7 that the motion on the two-dimensional plane can be decomposed into two one-dimensional motions of x and y, so the principle of monitoring the one-dimensional motion of the sensing device of the present invention is introduced first. Taking the extension direction of the first array as the x direction and the extension direction of the second array as the y direction, when the object to be monitored slides from point A to point D along a straight line, the trajectory can be decomposed into A→C motion in the x direction and the y direction A → B movement. Take the x direction as an example to illustrate the principle of motion monitoring in one-dimensional direction.

Referring to FIG. 7 , assuming that the second array is formed by a number of second electrode units 201 with a width l arranged in parallel and equidistantly (the spacing is d), each second electrode unit 201 corresponds to a fixed position x _n , and passes through an end The grounded electrical signal output terminal 30 independently outputs electrical signals. Here, the intermediate process of the object to be monitored sliding on the sensing surface is taken as an example. At this time, the surface of the object to be monitored has been negatively charged through contact with the sensing surface. The specific monitoring process can be divided into two situations:

In the first case, the width w of the object A to be monitored is equal to the electrode width (Fig. 8(a)). When the object to be monitored starts to touch the first electrode unit x ₁ and slides to the middle of the electrode unit, due to the electrostatic induction effect, electrons will flow from the electrode unit to the ground, forming a reverse current pulse peak; when the object to be monitored continues to When sliding until it just slips out of the edge of the x ₁ electrode unit, also due to electrostatic induction, electrons will flow from the ground to the electrode, forming a positive current pulse peak. The electrical signal spectrum output during the whole process is shown in Fig. 8(b).

It can be seen that the electrode unit that generates a pair of opposite pulse signals is the electrode unit that the object A to be monitored passes through.

The time points when the object to be monitored A just touches the x ₁ electrode unit and just leaves completely are t ₁₁ and t ₂₂ , which will be recorded at the start and end of the current pulse peak. Therefore, the average speed of the object A to be monitored passing through the x ₁ electrode unit is

${\mathrm{<span\; class="notranslate">\; v</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}<span\; class="notranslate">\; =</span>\frac{{\mathrm{<span\; class="notranslate">\; x</span>}}_{\mathrm{<span\; class="notranslate">\; 12</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; x</span>}}_{\mathrm{<span\; class="notranslate">\; 11</span>}}}{{\mathrm{<span\; class="notranslate">\; t</span>}}_{\mathrm{<span\; class="notranslate">\; 12</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; t</span>}}_{\mathrm{<span\; class="notranslate">\; 11</span>}}}<span\; class="notranslate">\; =</span>\frac{\mathrm{<span\; class="notranslate">\; l</span>}}{{\mathrm{<span\; class="notranslate">\; \&Delta;t</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}}<span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 1</span>}<span\; class="notranslate">\; )</span>$

Where x ₁₁ and x ₁₂ are the positions corresponding to the two outer edges of the x ₁ electrode, where x ₁₁ -x ₁₂ is equal to the width l of the electrode unit. Similarly, when the object A to be monitored slides past the second electrode unit, the same pulse peak will be generated, and the calculation formula of its velocity _v2 is

${\mathrm{<span\; class="notranslate">\; v</span>}}_{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; =</span>\frac{{\mathrm{<span\; class="notranslate">\; x</span>}}_{\mathrm{<span\; class="notranslate">\; twenty\; two</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; x</span>}}_{\mathrm{<span\; class="notranslate">\; twenty\; one</span>}}}{{\mathrm{<span\; class="notranslate">\; t</span>}}_{\mathrm{<span\; class="notranslate">\; twenty\; two</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; t</span>}}_{\mathrm{<span\; class="notranslate">\; twenty\; one</span>}}}<span\; class="notranslate">\; =</span>\frac{\mathrm{<span\; class="notranslate">\; l</span>}}{{\mathrm{<span\; class="notranslate">\; \&Delta;t</span>}}_{\mathrm{<span\; class="notranslate">\; 2</span>}}}<span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 2</span>}<span\; class="notranslate">\; )</span>$

From this, it can be calculated that the acceleration of the object A to be monitored passing through the _x1 electrode unit and the _x2 electrode unit is

${\mathrm{<span\; class="notranslate">\; a</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}<span\; class="notranslate">\; -</span>\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; =</span>\frac{{\mathrm{<span\; class="notranslate">\; v</span>}}_{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; v</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}}{{\mathrm{<span\; class="notranslate">\; t</span>}}_{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; t</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}}<span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 3</span>}<span\; class="notranslate">\; )</span>$

In the second case, the width w of the object A to be monitored is not equal to the electrode width (Figure 8(c) shows the case where w is small). At this time, the object A to be monitored with a small size may only travel along one electrode unit in the x-axis direction, but will not pass through the electrode unit in the y-axis direction. In this case, there will be a gap between the two pulse peaks formed. time interval (as shown in Fig. 8(d)), but the above formula applies equally. Because one electrode unit is only connected to the electrical signal output terminal through one wire, according to the principle of the friction generator, intermittent pulse peaks will also be formed, which also reflects which electrode unit the object is moving on.

From the above analysis, it can be seen that no matter whether the object A to be monitored moves along only one electrode unit, or passes through different electrode units at the same time, through the sensing device of the present invention, its position, speed, acceleration and other information can be monitored and analyzed. analyze. Therefore, according to the decomposition relationship between the motion on the two-dimensional plane and the motion in the x and y directions, the motion parameters of the object A to be monitored in the direction from A to D in Figure 7 can be determined by two parameters along the x direction and along the y direction The components are obtained by combining operations as follows:

$\stackrel{<span\; class="notranslate">\; \&OverBar;</span>}{\mathrm{<span\; class="notranslate">\; v</span>}}<span\; class="notranslate">\; =</span>\sqrt{{\stackrel{<span\; class="notranslate">\; -</span>\mathrm{<span\; class="notranslate">\; 2</span>}}{\mathrm{<span\; class="notranslate">\; v</span>}}}_{\mathrm{<span\; class="notranslate">\; x</span>}}<span\; class="notranslate">\; -</span>{\stackrel{<span\; class="notranslate">\; -</span>\mathrm{<span\; class="notranslate">\; 2</span>}}{\mathrm{<span\; class="notranslate">\; v</span>}}}_{\mathrm{<span\; class="notranslate">\; the\; y</span>}}}<span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 4</span>}<span\; class="notranslate">\; )</span>$

$\mathrm{<span\; class="notranslate">\; v</span>}<span\; class="notranslate">\; =</span>\sqrt{{\mathrm{<span\; class="notranslate">\; v</span>}}_{\mathrm{<span\; class="notranslate">\; x</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; v</span>}}_{\mathrm{<span\; class="notranslate">\; the\; y</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}}<span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 5</span>}<span\; class="notranslate">\; )</span>$

$\mathrm{<span\; class="notranslate">\; a</span>}<span\; class="notranslate">\; =</span>\sqrt{{\mathrm{<span\; class="notranslate">\; a</span>}}_{\mathrm{<span\; class="notranslate">\; x</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; a</span>}}_{\mathrm{<span\; class="notranslate">\; the\; y</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}}<span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 6</span>}<span\; class="notranslate">\; )</span>$

in, Represents the average velocity, v represents the instantaneous velocity, a represents the acceleration, and the subscripts x and y represent the component measured in the x direction and the component measured in the y direction, respectively.

In addition, according to its electrical pulse signals on the x-axis and y-axis, the angle θ between it and the x-axis can also be obtained:

Example 1 $\mathrm{\&theta;}=\mathrm{arctg}\frac{v_{\mathrm{the\; y}}}{v_x}=\mathrm{arctg}\frac{a_{\mathrm{the\; y}}}{a_x}---\left(7\right)$

Prepare a perforated plexiglass with a size of 20cm×20cm as the substrate, spread 9 aluminum strips with a width of 6mm and a length of 20cm in parallel on the x-direction of the substrate surface, and the distance d between adjacent aluminum strips is 14mm, And the lower surface of each aluminum strip passes through 9 uniformly arranged holes on the base, and the part passing through the holes is embedded into the holes by extrusion. Prepare another 9 aluminum strips of the same size and lay them on the surface of the above-mentioned substrate along the y direction in a similar manner, and form an intersection with the aluminum strips in the x direction at the hole, and also make an embedded structure, but control the embedding depth to ensure There is no contact between the two aluminum strips, thus forming a network structure of 9×9 sensing pixels (see Figure 9(a)). The end of each aluminum bar is electrically connected to an electrical signal output terminal with one end grounded, and a resistance of 10 MΩ is connected between the output terminal and the ground. Take a 13mm×13mm polytetrafluoroethylene sheet as the object to be monitored, and slide it on the surface of the sensing device. The electrical signal output of the sensing device is shown in Figure 9(b) and Figure 9(c). The object to be monitored The movement of the sensing device enables the sensing device to achieve an open-circuit voltage of nearly 70V and a short-circuit current output of 6μA, which is enough to light up the LED lamp to realize real-time and intuitive monitoring of the movement of the object to be monitored. In addition, according to the previous formula (4), the average moving speed of the object is calculated to be 2.8 cm/s.

When the object to be monitored slides from A to point B in an "S"-shaped path, Figure 10(a) and Figure 10(b) show the electrical signals monitored by the electrical signal output terminals in the x and y directions over time The changing spectrogram, and the xy-plane path curve synthesized from the signals of the above two spectrograms (Fig. 10(c)). Based on the formula given above, the angles between the real-time speed, acceleration and motion direction of the object to be monitored at point B and the x-axis can be calculated, which are 22.5cm/s, 0.2cm/s ² and 137° respectively. If the output signals of the x-axis and y-axis are coupled in time, we get an "S"-shaped motion trajectory, which shows the position tracking function of the sensing device.

Example 2

The enameled wire with a diameter of about 120 μm is woven into a mesh structure, the grid spacing is 250 μm, the number of electrodes in the size of 1 cm length is 41, and there are 41 x output terminals and 41 y output terminals in the area of 1 cm ² , A resolution of 41×41=1681 pixels is formed, as shown in FIG. 11( a ). When an object with a diameter of 1.2mm slides along the "G" track on the device, the single signal output of its x output and y output is shown in Figure 11(b), and its current signal-to-noise ratio reaches 50. Figure 11(c) shows the time-varying relation of the xy output current peak signal during the movement of the slider. Its movement trajectory can be clearly seen from the xy coordinate axis, and its movement speed and acceleration can be calculated through the relationship between xt and yt.

The above descriptions are only preferred embodiments of the present invention, and do not limit the present invention in any form. Any person familiar with the art, without departing from the scope of the technical solution of the present invention, can use the methods and technical content disclosed above to make many possible changes and modifications to the technical solution of the present invention, or modify it into an equivalent of equivalent change Example. Therefore, any simple modifications, equivalent changes and modifications made to the above embodiments according to the technical essence of the present invention, which do not deviate from the technical solution of the present invention, still fall within the protection scope of the technical solution of the present invention.

Claims (33)

1. A sensing device based on triboelectric generation technology, comprising a first array, a second array and an electrical signal output terminal grounded at one end, it is characterized in that said first array is made up of n mutually independent first units, so The first unit includes a first electrode unit; the second array is composed of m mutually independent second units, and the second unit includes a second electrode unit; the first array and the second array pass through a certain angle Insulated intersections form a network, and the surfaces of the first array and the second array that do not intersect form a sensing surface; the electrical signal output terminals are respectively connected to the n first electrode units and the m second electrode units Electrically connected, and the signal output by each electrode unit is individually monitored, where n and m are both natural numbers. 2. The apparatus of claim 1, wherein each said first unit intersects a second unit only once. 3. The device according to claim 2, wherein each of the first units forms an intersection with m second units. 4. The device according to claim 3, wherein at all intersections, the upper and lower relative positions of the first unit and the second unit are the same. 5. The apparatus of claim 4, wherein surfaces of the first and second arrays at intersections are lower than sensing surfaces at non-intersections. 6. The device of claim 5, further comprising a perforated base, the intersection of the first unit and the second unit being recessed within the perforation of the base. 7. The device according to any one of claims 4-6, wherein at non-intersection points, the surfaces of the first array and the second array are located in the same plane. 8. The device according to claim 3, characterized in that, at any two adjacent intersection points in the extension direction of the first unit and the second unit, the upper and lower sides of the first unit and the second unit are opposite to each other. The positions are reversed. 9. The device according to any one of claims 1-8, wherein all the first units are parallel to each other, and/or all the second units are parallel to each other. 10. The device according to claim 9, characterized in that all the first units are arranged equidistantly, and/or all the second units are arranged equidistantly. 11. The device according to any one of claims 1-10, wherein all the first electrode units have the same shape and size, and/or all the second electrode units have the same shape and size same. 12. The device according to claim 11, wherein the first electrode unit and the second electrode unit have the same shape and size. 13. The device according to claim 12, wherein the width of the first electrode unit is the same as the distance between two adjacent first electrode units. 14. The device according to any one of claims 1-13, wherein the certain angle is a right angle. 15. The device according to any one of claims 1-14, wherein at the intersection point, the first unit is separated from the second unit by a gap, or by an insulating layer. 16. The device according to any one of claims 1-15, wherein the first unit is only composed of first electrode units, and/or the second unit is only composed of second electrode units. 17. The device of claim 16, further comprising an isolation layer attached to the surfaces of the first array and the second array. 18. The device of claim 17, wherein the isolation layer is an insulating material. 19. The device according to any one of claims 1-15, characterized in that, the outer surface of the first electrode unit, and/or, the outer surface of the second electrode unit is bonded with a non-conductive friction layer. 20. The device of claim 19, wherein the friction layer is an organic polymer material. 21. The device according to any one of claims 1-20, wherein the material composition, shape and/or size of the first unit and the second unit are consistent. 22. A method for manufacturing the sensing device according to any one of claims 1-7, 9-21, characterized in that it comprises the following steps: 1) providing a substrate, on which several holes are distributed; 2) insulatingly paving a first array comprising n mutually independent first units on the substrate, so that each first unit passes through at least one of the holes; 3) sinking the part of the first unit passing through the hole into the hole to form a depression; 4) insulatingly laying a second array comprising m mutually independent second units on the substrate, so that each second unit intersects with at least one first unit at the hole to form a network; 5) sinking the part of the second unit passing through the intersection into the hole to form a depression, and maintaining insulation between the first unit and the second unit at the depression; 6) Provide several electrical signal output terminals with one end grounded, electrically connected with n first electrode units and m second electrode units respectively, and monitor the output signal of each electrode unit individually. 23. The method of claim 22, wherein each hole in the substrate becomes an intersection of the first unit and the second unit. 24. The method according to claim 22, wherein the number of said holes is greater than or equal to n×m. 25. The method of claim 24, wherein the holes are distributed in a regular determinant array. 26. The method according to any one of claims 22-25, further comprising the step (7) of removing the substrate. 27. The method according to any one of claims 22-26, characterized in that the mutual insulation in step 5) is realized by forming a gap between the two units. 28. The method according to any one of claims 22-26, characterized in that, after step 3), step 3-1) laying an insulating layer on the first unit in each hole . 29. A method for manufacturing the sensing device according to claims 1-3, 8-21, characterized in that it comprises the following steps: 1) Provide n+m wires with conductor inside and insulation material outside, and several electrical signal output terminals with one end grounded; 2) Using n threads as warps and m threads as wefts, the warps and wefts intersect each other to form a network structure, each warp is a first unit, and each weft is a first unit Dyad; 3) The n warp threads and the m weft threads are respectively electrically connected to the electrical signal output terminals through internal conductors, so as to individually monitor the output signal of each unit. 30. The method according to claim 29, characterized in that the warp threads and weft threads are intersected to form a net by weaving. 31. The method according to claim 30, characterized in that, in the extension direction of the first unit and the second unit, at any two adjacent intersection points, the relative positions of the first unit and the second unit are both up and down. on the contrary. 32. The method according to claim 31, further comprising step 4) removing the insulating material at the non-intersection point of the surface of the first unit and the second unit, so that the sensing surface is formed by the first electrode unit and the second unit. The material composition of the second electrode unit. 33. The method according to claim 32, characterized in that, in the step 4), the insulating material is removed by a mechanical polishing technique.