CN104234986A - Miniature pneumatic power device - Google Patents

Abstract

The present invention relates to a micro pneumatic power device, comprising: a micro gas transmission device, including a stacked air intake plate, a flow channel plate, a resonance plate and a piezoelectric actuator, wherein a first chamber is formed by a gap between the resonance plate and the piezoelectric actuator, so that when the piezoelectric actuator is driven, the gas is introduced from the air intake plate, passes through the flow channel plate and the resonance plate, enters the first chamber, and is then transmitted downward to form a pressure gradient flow channel to continuously push out the gas; a micro valve device comprises a stacked air collecting plate, a valve plate and an outlet plate; when the gas is transmitted downward from the micro gas transmission device to the air collecting chamber, it is then transmitted to the micro valve device to open or close the valve hole of the valve plate in response to the unidirectional flow of the gas to collect or release pressure.

Description

Micro Pneumatic Power Device

technical field

The invention relates to a pneumatic power device, in particular to a miniature ultra-thin and quiet micro pneumatic power device.

Background technique

At present, in various fields, whether it is medicine, computer technology, printing, energy and other industries, products are developing towards refinement and miniaturization. Among them, micro pumps, sprayers, inkjet heads, industrial printing devices and other products include products. The fluid conveying structure is its key technology, so how to break through its technical bottleneck with an innovative structure is an important content of development.

For example, in the pharmaceutical industry, many instruments or equipment that need to be driven by pneumatic power usually use traditional motors and pneumatic valves to achieve the purpose of gas delivery. However, limited by the volume limitations of the traditional motors and gas valves, it is difficult to reduce the volume of the overall device of this type of equipment, that is, it is difficult to achieve the goal of thinning, let alone achieve the purpose of portability. In addition, these traditional motors and gas valves also generate noise during operation, resulting in inconvenience and discomfort in use.

Therefore, how to develop a kind of micro-pneumatic power device that can improve the lack of the above-mentioned conventional technology, can make the instrument or equipment that traditionally adopts the gas transmission device achieve small size, miniaturization and quietness, and then achieve the purpose of light and comfortable portable, realize problems that urgently need to be solved at present.

Contents of the invention

The object of the present invention is to provide a kind of micro pneumatic power device suitable for portable or wearable instrument or equipment, by integrating micro gas transmission device and micro valve device, so as to solve the conventional technology using pneumatic power driven instrument Or the device has a large volume, is difficult to thin, cannot achieve the purpose of portability, and lacks such as loud noise.

In order to achieve the above-mentioned purpose, a more broad implementation aspect of the present invention is to provide a micro pneumatic power device, including: a micro gas transmission device, including: an air inlet plate with at least one air inlet hole for introducing gas; a flow channel plate , having at least one confluence row hole and a central hole, the confluence row hole corresponds to the air inlet hole of the air intake plate, and guides the gas in the air inlet hole to converge to the central hole; the resonator plate has a hollow hole, corresponding to the central hole of the flow channel plate and a piezoelectric actuator, which has a suspension board and an outer frame, the suspension board and the outer frame are connected by at least one bracket, and a piezoelectric ceramic plate is attached to the surface of the suspension board, wherein the above-mentioned air intake board, The flow channel plate, the resonant plate and the piezoelectric actuator are arranged and positioned in sequence, and there is a first chamber formed by a gap between the resonant plate and the piezoelectric actuator, so that the piezoelectric actuator is When driving, the gas is introduced from at least one air inlet hole of the air inlet plate, collected to the central hole through at least one confluence row hole of the flow channel plate, and then flows through the hollow hole of the resonant plate to enter the first chamber, and then the pressure The space between at least one bracket of the electric actuator is transmitted downwards to form a pressure gradient flow channel to continuously push out the gas; and the micro valve device includes: a gas collecting plate with a first through hole, a second through hole, a first The pressure relief chamber and the first outlet chamber, the first through hole communicates with the first pressure relief chamber, the second through hole communicates with the first pressure relief chamber and the first outlet chamber; the valve plate has a valve hole; and an outlet plate, which has a third through hole, a fourth through hole, a second pressure relief chamber and a second outlet chamber, the third through hole corresponds to the first through hole of the gas collecting plate, and is connected with the second discharge chamber The pressure chambers are connected, the fourth through hole corresponds to the second through hole, and communicates with the second outlet chamber, and there is a communication channel between the second pressure relief chamber and the second outlet chamber; wherein, The above-mentioned gas collecting plate, valve plate and outlet plate are stacked and positioned in sequence. The valve plate is arranged between the gas collecting plate and the outlet plate, and the valve hole of the valve plate is correspondingly arranged in the second through hole and the fourth through hole. Between the holes, when the gas is transported downward from the micro gas transmission device to the micro valve device, it enters the first pressure relief chamber and the first outlet chamber through the first through hole and the second through hole, and the introduced gas enters the first pressure relief chamber and the first outlet chamber through the valve plate. The valve hole of the valve flows into the fourth through-hole for pressure-gathering operation. When the pressure-gathering gas is greater than the inlet gas, the pressure-gathering gas flows from the fourth through-hole toward the second outlet chamber to displace the valve plate and make the valve plate The valve hole of the valve closes against the gas collecting plate, and at the same time, the pressure collecting gas in the second outlet chamber can flow into the second pressure relief chamber along the communication channel, at this time, the valve plate is displaced in the second pressure relief chamber, The pressure-collecting gas can flow out through the third through hole for pressure relief operation.

Another main purpose of the present invention is to provide a micro-pneumatic power device, including: a micro gas transmission device, including: an air inlet plate with at least one air inlet hole for introducing gas; a flow channel plate with at least one bus bar holes and central holes, the confluence row holes correspond to the air inlet holes of the air inlet plate, and guide the gas in the air inlet holes to converge to the central hole; the resonant plate has a hollow hole, corresponding to the central hole of the flow channel plate; and the piezoelectric actuator , having a suspension board and an outer frame, the suspension board and the outer frame are connected by at least one bracket, and a piezoelectric ceramic plate is attached to one surface of the suspension board; and the piezoelectric actuators are arranged and positioned corresponding to each other in sequence. When the piezoelectric actuators are driven, the gas is introduced from at least one air inlet of the inlet plate, and collected to the central hole through at least one manifold hole of the flow channel plate. , and then flow through the hollow hole of the resonant plate to enter the first chamber, and then be transported downward through a gap between at least one bracket of the piezoelectric actuator to form a pressure gradient flow channel to continuously push out the gas; and micro valves The device includes: a gas collecting plate with a first through hole, a second through hole, a first pressure relief chamber and a first outlet chamber, the first through hole communicates with the first pressure relief chamber, and the second through hole It communicates with the first outlet chamber; the valve plate has a valve hole; and the outlet plate has a third through hole, a fourth through hole, a second pressure relief chamber and a second outlet chamber, and the third through hole corresponds to the collector The first through hole of the gas plate communicates with the second pressure relief chamber, the fourth through hole corresponds to the second through hole and communicates with the second outlet chamber, and the second pressure relief chamber and the second There is a communication channel between the outlet chambers; wherein, the above-mentioned gas collecting plate, valve plate and outlet plate are stacked and positioned in sequence, the valve plate is arranged between the gas collecting plate and the outlet plate, and the valve hole of the valve plate Correspondingly arranged between the second through hole and the fourth through hole, when the gas is transported downward from the micro gas transmission device to the micro valve device, it enters the first pressure relief chamber through the first through hole and the second through hole chamber and the first outlet chamber, and the introduced gas flows from the valve hole of the valve plate into the fourth through-hole for pressure-gathering operation. Chamber flow, so that the valve plate is displaced, and the valve hole of the valve plate is closed against the gas collecting plate, and at the same time, the pressure-collecting gas in the second outlet chamber can flow into the second pressure relief chamber along the communication channel. When the valve plate in the second pressure relief chamber is displaced, the pressure-collecting gas can flow out through the third through hole for pressure relief operation.

In order to achieve the above-mentioned purpose, a more general implementation aspect of the present invention is to provide a micro-pneumatic power device, including: a micro-gas transmission device, including an inlet plate, a flow channel plate, a resonant plate and a piezoelectric The actuator, wherein there is a first chamber formed by a gap between the resonant plate and the piezoelectric actuator. When the piezoelectric actuator is driven, the gas enters from the inlet plate and flows through the flow channel plate and the resonant plate to enter the first chamber and then transport downwards; and the micro valve device, including gas collecting plate, valve plate and outlet plate stacked in sequence, the valve plate has a valve hole; wherein, between the micro gas transmission device and the micro valve device A gas collection chamber is formed. After the gas is transported downward from the micro gas transmission device to the gas collection chamber, it is then transferred to the micro valve device, through at least two through holes and at least two chambers respectively provided by the gas collection plate and the outlet plate. The chamber is used to open or close the valve hole of the valve plate in response to the one-way flow of gas, so as to carry out pressure collection or pressure relief operations.

Description of drawings

Fig. 1 is a schematic diagram of the exploded front structure of the micro pneumatic power device according to the first preferred embodiment of the present invention.

FIG. 2A is a schematic diagram of the front exploded structure of the micro-pneumatic power device according to the second preferred embodiment of the present invention.

FIG. 2B is a schematic diagram of the rear exploded structure of the micro pneumatic power device according to the second preferred embodiment of the present invention.

FIG. 3A is a schematic front view of the piezoelectric actuator of the micro-pneumatic power device shown in FIG. 2A .

FIG. 3B is a schematic diagram of the rear structure of the piezoelectric actuator of the micro pneumatic power device shown in FIG. 2A .

FIG. 3C is a schematic cross-sectional structure diagram of the piezoelectric actuator of the micro-pneumatic power device shown in FIG. 2A .

FIG. 4 is a schematic diagram of various implementations of the piezoelectric actuator shown in FIG. 3A .

FIGS. 5A to 5E are schematic diagrams of the operation of the micro-gas transmission device of the micro-pneumatic power device shown in FIG. 2A .

FIG. 6A is a schematic diagram of the pressure collecting action of the micro-valve device of the micro-pneumatic power device shown in FIG. 2A .

FIG. 6B is a schematic diagram of the pressure relief action of the micro-valve device of the micro-pneumatic power device shown in FIG. 2A .

7A to 7E are schematic diagrams of the pressure collection action of the micro-pneumatic power device shown in FIG. 2A .

FIG. 8 is a schematic diagram of the decompression or decompression action of the micro-pneumatic power device shown in FIG. 2A .

[Description of main component symbols]

1, 2: Miniature dynamic pneumatic device

1A, 2A: Miniature Gas Delivery Devices

1B, 2B: Micro valve device

10, 20: air intake plate

100, 200: air intake

11, 22: Resonant film

12, 23: Piezoelectric Actuator

120, 230: hoverboard

121, 233: piezoelectric ceramic plate

13, 24: insulating sheet

14, 25: conductive sheet

15, 26: Gas collecting plate

16, 27: valve plate

17, 28: Export board

170, 285: connected flow channel

21: runner plate

211: busbar hole

210: Center Hole

220: hollow hole

221, 234, 251: conductive pins

222: First chamber

230a: upper surface of the hoverboard

230b: Lower surface of the hoverboard

230c: convex part

231: Frame

231a: Upper surface of outer frame

231b: Lower surface of outer frame

232: bracket

232a: upper surface of bracket

232b: lower surface of bracket

235: Void

260: The first surface of the gas collector plate

261: second surface of gas collector plate

262: Gathering chamber

263: First through hole

264: second through hole

265: the first pressure relief chamber

266: First Exit Chamber

267, 286: groove structure

268, 287: sealing ring

269, 281a: Convex structure

270: valve hole

271: Locating holes

280: First surface of outlet plate

281: The third through hole

282: The fourth through hole

283: Second pressure relief chamber

284: Second exit chamber

288: pressure relief hole

289: Second surface of outlet plate

29: Export

g0: Gap

(a)～(l): Different implementations of conductive actuators

a0, i0, j0: hoverboard

a1, i1, j1: outer frame

a2, i2: bracket

a3: void

Detailed ways

Some typical embodiments embodying the features and advantages of the present invention will be described in detail in the description in the following paragraphs. It should be understood that the invention is capable of various changes in different aspects without departing from the scope of the invention, and that the description and illustrations therein are illustrative in nature and not limiting. this invention.

The micro-pneumatic power device 1 of the present invention can be applied to industries such as medical biotechnology, energy, computer technology, or printing to transmit gas, but is not limited thereto. Please refer to FIG. 1 , which is a front exploded schematic view of the micro pneumatic power device according to the first preferred embodiment of the present invention. As shown in the figure, the micro pneumatic power device 1 of the present invention is composed of a micro gas transmission device 1A and a micro valve device 1B, wherein the micro gas transmission device 1A at least has an inlet plate 10, a resonant plate 11, a piezoelectric actuator Structures such as actuator 12, insulating sheet 13, conductive sheet 14, etc., it is that piezoelectric actuator 12 is set up corresponding to resonant sheet 11, and air inlet plate 10, resonant sheet 11, piezoelectric actuator 12, insulation Sheet 13, conductive sheet 14, etc. are stacked in sequence, and the piezoelectric actuator 12 is assembled from a suspension plate 120 and a piezoelectric ceramic plate 121; and the micro valve device 1B is composed of a gas collecting plate 15, The valve plate 16 and the outlet plate 17 are sequentially stacked and assembled, but not limited thereto. Through the assembled configuration of the micro-gas transmission device 1A and the micro-valve device 1B, the gas is taken in from at least one air inlet 100 on the gas inlet plate 10 of the micro-gas transmission device 1A, and passes through the piezoelectric actuator 12, it flows through multiple pressure chambers (not shown) and is transmitted downwards, so that the gas can flow in one direction in the micro-valve device 1B, and the pressure can be accumulated at the outlet of the micro-valve device 1B In a device (not shown) connected to each other, and when pressure relief is required, the output of the micro-gas transmission device 1A is regulated so that the gas is discharged through the communication channel 170 on the outlet plate 17 of the micro-valve device 1B , to relieve pressure.

Please refer to FIG. 2A and FIG. 2B at the same time, which are respectively a front exploded structure schematic diagram and a rear exploded structure schematic diagram of the micro pneumatic power device according to the second preferred embodiment of the present invention. As shown in the figure, the micro-pneumatic power device 2 is also composed of a micro-gas transmission device 2A and a micro-valve device 2B, wherein the micro-gas transmission device 2A is sequentially composed of an air inlet plate 20, a flow channel plate 21, and a resonance plate 22. The piezoelectric actuator 23, insulating sheet 24, conductive sheet 25 and other structures are stacked and assembled for positioning. In this embodiment, there is a gap g0 between the resonant sheet 22 and the piezoelectric actuator 23 (such as 5A ), however, in other embodiments, there may be no gap between the resonant piece 22 and the piezoelectric actuator 23, so the implementation is not limited thereto. In some embodiments, the inlet plate 20 and the flow channel plate 21 can also be integrally formed, that is, as shown in the first preferred embodiment of the present invention, but not limited thereto, the following is based on this embodiment The embodiment in which the air inlet plate 20 and the flow channel plate 21 are separately arranged will be described in detail. And, the micro-valve device 2B is also formed by stacking and assembling the gas collecting plate 26 , the valve plate 27 and the outlet plate 28 in sequence, but it is not limited thereto.

In this embodiment, the gas inlet plate 20 of the micro gas transmission device 2A has at least one gas inlet 200 for gas to flow into the micro gas transmission from the at least one gas inlet 200 in accordance with the effect of atmospheric pressure from outside the device. Inside device 2A. The flow channel plate 21 has at least one confluence row hole 211, which is used to correspond to the at least one air intake hole 200 of the air intake plate 20, and can guide and converge the gas entering from the at least one air intake hole 200. to a central hole 210 to pass down. The resonant plate 22 is made of a flexible material, but not limited thereto, and has a hollow hole 220 on the resonant plate 22, which is set corresponding to the central hole 210 of the flow channel plate 21, so that the gas can flow down.

Please refer to Fig. 3A, Fig. 3B and Fig. 3C at the same time, which are respectively the front structural schematic diagram, the rear structural schematic diagram and the cross-sectional structural schematic diagram of the piezoelectric actuator of the micro-pneumatic power device shown in Fig. 2A, as shown in the figure, the piezoelectric actuator The electric actuator 23 is assembled by a suspension plate 230, an outer frame 231, at least one bracket 232 and a piezoelectric ceramic plate 233, wherein the piezoelectric ceramic plate 233 is attached to the bottom of the suspension plate 230 The surface 230b and the at least one bracket 232 are connected between the suspension board 230 and the outer frame 231, and there is at least one gap 235 between the bracket 232, the suspension board 230 and the outer frame 231 for gas circulation, and The types and quantities of the suspension board 230 , the outer frame 231 and the support 232 have many variations. In addition, the outer frame 231 further has a conductive pin 234 protruding outwards for power supply connection, but not limited thereto.

In this embodiment, the suspension board 230 is a stepped surface structure, which means that the upper surface 230a of the suspension board 230 has a convex portion 230c. Please refer to FIG. 3A and FIG. The portion 230c is coplanar with the upper surface 231a of the outer frame 231, and the upper surface 230a of the suspension board 230 and the upper surface 232a of the bracket 232 are also coplanar, and the convex portion 230c of the suspension board 230 and the upper surface of the outer frame 231 There is a certain depth between 231 a and the upper surface 230 a of the suspension board 230 and the upper surface 232 of the bracket 232 . As for the lower surface 230b of the suspension plate 230, as shown in Fig. 3B and Fig. 3C, it is flat and coplanar with the lower surface 231b of the outer frame 231 and the lower surface 232b of the bracket 232, and the piezoelectric ceramic plate 233 is attached to Attached to the lower surface 230b of the flat suspension board 230 . In some embodiments, the suspension board 230, the bracket 232 and the outer frame 231 can be made of a metal plate, but not limited thereto, so the piezoelectric actuator 23 is formed by bonding the piezoelectric ceramic plate 233 and the metal plate. become.

Please continue to refer to FIG. 4 , which is a schematic diagram of various implementations of the piezoelectric actuator shown in FIG. 3A . As shown in the figure, it can be seen that the suspension plate 230, the outer frame 231 and the support 232 of the piezoelectric actuator 23 can have various types, and at least can have as many as (a) to (l) shown in Figure 4. One aspect, for example, (a) the outer frame a1 and the suspension plate a0 of the aspect are square structures, and the two are connected by a plurality of brackets a2, for example: 8, but not with This is the limit, and there is a gap a3 between the support a2, the suspension board a0, and the outer frame a1 for the circulation of air. In another (i) aspect, the outer frame i1 and the suspension plate i0 are also square structures, but only two brackets i2 are used to connect them; in addition, in (j)～(l) aspects, Then the suspension board j0 etc. can be a circular structure, and the outer frame j0 etc. can also be a slightly curved frame structure, but they are not limited thereto. Therefore, it can be seen from various implementations that the shape of the suspension plate 230 can be square or circular, and similarly, the piezoelectric ceramic plate 233 attached to the lower surface 230b of the suspension plate 230 can also be square or circular. shape, is not limited thereto; and, the type and quantity of the support 232 connected between the suspension board 230 and the outer frame 231 can also be changed arbitrarily according to the actual implementation situation, and are not shown in the present invention. The form is limited. And these suspension boards 230, outer frame 231 and support 232 are structures that can be integrally formed, but not limited thereto. As for their manufacturing methods, they can be processed by traditional processing, or yellow photolithography, or laser processing, or electroforming. , or electrical discharge machining, etc., are not limited to this.

In addition, please continue to refer to FIG. 2A and FIG. 2B , there are insulating sheets 24 and conductive sheets 25 in the micro-gas transmission device 2A, and the insulating sheets 24 and conductive sheets 25 are correspondingly arranged under the piezoelectric actuator 23, and their The shape roughly corresponds to the shape of the outer frame of the piezoelectric actuator 23 . In some embodiments, the insulating sheet 24 is made of insulating material, such as plastic, but not limited thereto, for insulation; in other embodiments, the conductive sheet 25 is made of conductive Composed of materials, such as, but not limited to, metal, for the purpose of conducting electricity. And, in this embodiment, there may be a conductive pin 221 on the resonant plate 22, but it is not limited thereto, and the outer frame 231 of the conductive actuator 23 also has a conductive pin 221 connected to the resonant plate 22. The corresponding conductive pin 224 is not limited thereto. In addition, a conductive pin 251 may also be provided on the conductive sheet 25 for electrical conduction.

Please refer to FIG. 2A and FIG. 5A to FIG. 5E at the same time, wherein FIG. 5A to FIG. 5E are schematic diagrams of the operation of the micro gas transmission device of the micro pneumatic power device shown in FIG. 2A . First, as shown in FIG. 5A, it can be seen that the micro-gas transmission device 2A is sequentially formed by stacking an inlet plate 20, a flow channel plate 21, a resonant plate 22, a piezoelectric actuator 23, an insulating plate 24, and a conductive plate 25. into, and there is a gap g0 between the resonant piece 22 and the piezoelectric actuator 23, in this embodiment, it is in the gap g0 between the resonant piece 22 and the outer frame 231 of the piezoelectric actuator 23 Filling a material, such as: conductive glue, but not limited thereto, so that the depth of the gap g0 can be maintained between the resonant plate 22 and the convex portion 230c of the suspension plate 230 of the piezoelectric actuator 23, and then guide The airflow flows more quickly, and because the convex portion 230c of the suspension plate 230 and the resonant plate 22 keep an appropriate distance, the mutual contact interference is reduced, and the noise generation can be reduced; The height of the outer frame 231 of the actuator 23 is such that a gap is added when it is assembled with the resonant sheet 22, but it is not limited thereto. In addition, in other embodiments, the resonant sheet 22 and the piezoelectric actuator There may also be no gap g0 between 23 , that is, its implementation is not limited thereto.

Please continue to refer to Figures 5A to 5E. As shown in the figures, when the intake plate 20, the flow channel plate 21, the resonance plate 22 and the piezoelectric actuator 23 are assembled in sequence, the center of the flow channel plate 21 The hole 210, together with the air inlet plate 20 and the resonant plate 22 on it, can form a cavity for converging gas, and a first cavity 222 is further formed between the resonant plate 22 and the piezoelectric actuator 23 for temporarily gas, and the first chamber 222 communicates with the chamber at the central hole 210 of the flow channel plate 21 through the hollow hole 220 of the resonant plate 22, and the two sides of the first chamber 222 are driven by piezoelectric The gap 235 between the brackets 232 of the actuator 23 communicates with the micro valve device 2B arranged thereunder.

When the micro-gas transmission device 2A of the micro-pneumatic power device 2 is actuated, the piezoelectric actuator 23 is mainly actuated by a voltage to vibrate vertically reciprocatingly with the support 232 as a fulcrum. As shown in FIG. 5B, when the piezoelectric actuator 23 is actuated by voltage to vibrate downward, the gas enters from at least one inlet hole 200 on the inlet plate 20 and passes through at least one inlet hole 200 on the flow channel plate 21. A busbar hole 211 is collected at the central central hole 210, and then flows down into the first chamber 222 through the central hole 220 corresponding to the central hole 210 on the resonant plate 22, and then, due to the piezoelectric Driven by the vibration of the actuator 23, the resonant piece 22 will also reciprocate vertically with the resonance. As shown in Figure 5C, the resonant piece 22 will also vibrate downward, and it will be attached to the piezoelectric actuator. On the convex part 230c of the suspension plate 230 of the actuator 23, the volume of the first chamber 222 is compressed by the deformation of the resonant plate 22, and the middle circulation space of the first chamber 222 is closed, so that the gas inside is pushed It flows to both sides, and then passes through the gap 235 between the brackets 232 of the piezoelectric actuator 23 to flow downwards. As for Figure 5D, its resonant plate 22 returns to its initial position, and the piezoelectric actuator 23 is driven by voltage to vibrate upwards, so that the volume of the first chamber 222 is also squeezed, but at this time due to the piezoelectric actuator 23 is lifted upwards, so that the gas in the first chamber 222 will flow toward both sides, and then drive the gas to continuously enter from at least one inlet hole 200 on the inlet plate 20, and then flow into the center of the flow channel plate 21 In the cavity formed by the hole 210, as shown in FIG. 5E, the resonant plate 22 is vibrated upward by the upward vibration of the piezoelectric actuator 23, and then the gas in the central hole 210 of the flow channel plate 21 is further resonated. The gas flows into the first chamber 222 from the central hole 220 of the resonant plate 22 , and flows downward through the gap 235 between the brackets 232 of the piezoelectric actuator 23 to flow out of the micro gas transport device 2A. It can be seen from this embodiment that when the resonant piece 22 vibrates vertically to and fro, the maximum distance of its vertical displacement can be increased by the gap g0 between it and the piezoelectric actuator 23, in other words, between the two Setting the gap g0 between the structures can make the resonant piece 22 move up and down with a greater amplitude during resonance, thus promoting faster flow of gas and achieving a quiet effect. In this way, a pressure gradient is generated in the flow channel design of the micro gas transmission device 2A, so that the gas flows at a high speed, and the gas is transmitted from the suction end to the discharge end through the impedance difference in the direction of the flow channel, and there is a pressure gradient at the discharge end. Under the state of air pressure, it still has the ability to continuously push out gas.

In addition, in some embodiments, the vertical reciprocating vibration frequency of the resonant piece 22 can be the same as the vibration frequency of the piezoelectric actuator 23, that is, both can go up or down at the same time, which can be based on the actual implementation situation. Any changes are not limited to the action shown in this embodiment.

Please refer to Fig. 2A, Fig. 2B and Fig. 6A, Fig. 6B at the same time, wherein Fig. 6A is a schematic diagram of the pressure collection action of the micro valve device of the micro pneumatic power device shown in Fig. 2A, and Fig. 6B is the micro valve device shown in Fig. 2A. Schematic diagram of the pressure relief action of the micro-valve device of the pneumatic power unit. As shown in Figure 6A, the micro valve device 2B of the micro pneumatic power device 2 of the present invention is formed by stacking the gas collecting plate 26, the valve plate 27 and the outlet plate 28 in sequence. In this embodiment, the gas collecting plate 26 The first surface 260 of the first surface 260 is recessed to form a gas collection chamber 262, and the gas transported downward by the micro gas transmission device 2A is temporarily stored in the gas collection chamber 262, and the gas collection plate 26 has a second gas collection chamber. One through hole 263 and the second through hole 264, one end of the first through hole 263 and the second through hole 264 communicate with the gas collection chamber 262, and the other end is connected with the second surface 261 of the gas collection plate 26 respectively. The first pressure relief chamber 265 communicates with the first outlet chamber 266 . And, a protrusion structure 269 is further added at the first outlet chamber 266, such as but not limited to a cylindrical structure, and it is set corresponding to the valve hole 270 of the valve plate 27; 26 further has a plurality of groove structures 267 arranged around the gas collection chamber 262 , the first pressure relief chamber 265 and the first outlet chamber 266 for a sealing ring 268 to be disposed thereon.

The outlet plate 28 also has two third through-holes 281 and fourth through-holes 282 that are set through, and the third through-holes 281 and the fourth through-holes 282 are respectively corresponding to the first through-holes 263 and the first through-holes 263 of the gas collecting plate 26. Two through holes 264 are provided, and on the first surface 280 of the outlet plate 28, a second pressure relief chamber 283 is formed in a depression corresponding to the third through hole 281, and a second pressure relief chamber 283 is formed in a depression corresponding to the fourth through hole 282. A second outlet chamber 284, and a communication channel 285 between the second pressure relief chamber 283 and the second outlet chamber 284 for gas circulation. One end of the third through hole 281 communicates with the second pressure relief chamber 283, and a protruding convex structure 281a can be further added to the end, such as but not limited to a cylindrical structure, and the other end is It communicates with the pressure relief hole 288 on the second surface 289 of the outlet plate 28; and one end of the fourth through hole 282 communicates with the second outlet chamber 284, and the other end communicates with the outlet 29. In this embodiment, the outlet 29 can be connected with a device (not shown), for example: a press, but not limited thereto. Similarly, on the outlet plate 28, there are also a plurality of groove structures 286 arranged around the second pressure relief chamber 283 and the second outlet chamber 284, for a sealing ring 287 to be arranged thereon. In the embodiment, the material of the sealing rings 268, 287 is a rubber material with good chemical resistance, but it is not limited thereto, and it is mainly used to be correspondingly arranged in the groove structures 267, 286 to assist the gas collecting plate 26 , The tighter joint between the outlet plate 28 and the valve plate 27, and prevent the gas from leaking out.

There is a valve hole 270 and a plurality of positioning holes 271 on the valve plate 27. When the valve plate 27 is positioned and assembled with the gas collecting plate 26 and the outlet plate 28, the valve hole 270 is corresponding to the first outlet cavity of the gas collecting plate 26. The protrusion structure 269 of the chamber 266 is arranged correspondingly. With the design of the single valve hole 270, the gas can achieve the purpose of unidirectional flow in response to its pressure difference.

When the micro-valve device 2B is pressure-collecting and actuated, as shown in Figure 6A, it can respond to the pressure provided by the gas transmitted downwards from the micro-gas transmission device 2A, or when the external atmospheric pressure is greater than that of the outlet. When the internal pressure of the device (not shown) connected with 29 is low, the gas will be transported from the micro gas transmission device 2A to the gas collection chamber 262 of the micro valve device 2B, and then pass through the first through hole 263 and the second through hole respectively. 264 and flow downward into the first pressure relief chamber 265 and the first outlet chamber 266. At this time, the downward gas pressure makes the flexible valve plate 27 bend and deform downward, and then the first pressure relief chamber The volume of the chamber 265 increases, and the place corresponding to the first through hole 263 is flatly attached downwards and abuts against the end of the third through hole 281, so as to close the third through hole 281 of the outlet plate 28, so the second unloading The gas in the pressure chamber 283 will not flow out from the third through hole 281 . Of course, in this embodiment, the protrusion structure 281a added at the end of the third through hole 281 can be used to strengthen the valve plate 27 to quickly resist and close the third through hole 281, and achieve a complete sealing effect of pre-forced resistance. On the other hand, since the gas system flows downward from the second through hole 264 into the first outlet chamber 266, and the valve plate 27 corresponding to the first outlet chamber 266 is also bent downward, so that its corresponding The valve hole 270 is opened downward, and the gas can flow into the second outlet chamber 284 from the first outlet chamber 266 through the valve hole 270, and flow to the outlet 29 and the valve connected to the outlet 29 by the fourth through hole 282. In the device (not shown), the device is used to collect pressure.

Please continue to refer to FIG. 6B. When the micro valve device 2B is depressurized, the gas can no longer be input into the gas collection chamber 262 by regulating the gas transmission volume of the micro gas transmission device 2A, or when it is connected with the outlet 29 When the internal pressure of the connected device (not shown) is greater than the external atmospheric pressure, the micro valve device 2B can be released. At this time, the gas will be input into the second outlet chamber 284 from the fourth through hole 282 connected with the outlet 29, so that the volume of the second outlet chamber 284 will expand, thereby prompting the flexible valve plate 27 to bend upwards and deform. And upward flat, against the gas collecting plate 26, so the valve hole 270 of the valve plate 27 will be closed due to being against the gas collecting plate 26. Of course, in this embodiment, the first outlet chamber 266 can be used to add a convex structure 269, so that the flexible valve piece 27 bends upwards to change the shape quickly and resist, so that the valve hole 270 is more favorable to achieve a pre-forced resistance effect and completely adhere to it. In the closed state with a seal, the valve hole 270 of the valve plate 27 will be closed due to abutment against the convex structure 269, and the gas in the second outlet chamber 284 will not flow back into the first outlet chamber 266 . And, the gas system in the second outlet chamber 284 can flow into the second pressure relief chamber 283 through the communication channel 285, thereby expanding the volume of the second pressure relief chamber 283, and making the gas corresponding to the second pressure relief chamber 283 The valve plate 27 of the pressure chamber 283 is also bent and deformed upwards. At this time, because the valve plate 27 is not closed against the end of the third through hole 281, the third through hole 281 is in an open state, that is, the second pressure relief chamber. The gas in the chamber 283 can flow out from the third through hole 281 to the pressure relief hole 288 for pressure relief operation. Of course, in this embodiment, the convex structure 281a added at the end of the third through hole 281 can be used to make the flexible valve piece 27 change its upward bending shape quickly, which is more beneficial to get out of the state of closing the third through hole 281 . In this way, the pressure can be reduced by discharging the gas in the device (not shown) connected to the outlet 29 through this one-way pressure relief operation, or complete the pressure relief operation by discharging it completely.

Please refer to FIG. 2A, FIG. 2B and FIG. 7A to FIG. 7E at the same time, wherein FIG. 7A to FIG. 7E are schematic diagrams of the pressure collection action of the micro pneumatic power device shown in FIG. 2A. As shown in Figure 7A, the micro pneumatic power device 2 is composed of a micro gas transmission device 2A and a micro valve device 2B, wherein the micro gas transmission device 2A is composed of an air inlet plate 20 and a flow channel plate 21 in sequence as described above. , resonant sheet 22, piezoelectric actuator 23, insulating sheet 24, conductive sheet 25 and other structures are stacked and assembled, and there is a gap g0 between the resonant sheet 22 and piezoelectric actuator 23, and in There is a first chamber 222 between the resonant plate 22 and the piezoelectric actuator 23, and the micro valve device 2B is also formed by stacking and assembling the gas collecting plate 26, the valve plate 27 and the outlet plate 28 in sequence, And there is a gas collection chamber 262 between the gas collection plate 26 of the micro valve device 2B and the piezoelectric actuator 23 of the micro gas transmission device 2A, and a first pressure relief chamber is provided on the second surface 261 of the gas collection plate 26. The chamber 265 and the first outlet chamber 266, as well as the first surface 280 of the outlet plate 28 further have a second pressure relief chamber 283 and a second outlet chamber 284, through the collocation of these multiple different pressure chambers The driving of the piezoelectric actuator 23 and the vibration of the resonant plate 22 and the valve plate 27 make the gas gather and transmit downward.

As shown in FIG. 7B, when the piezoelectric actuator 23 of the micro-gas delivery device 2A is actuated by voltage to vibrate downward, the gas will enter the micro-gas delivery device 2A from the air inlet 200 on the gas inlet plate 20. , and pass through at least one busbar hole 211 on the channel plate 21 to gather at the central hole 210 thereof, and then flow down into the first chamber 222 through the hollow hole 220 on the resonant plate 22 . Thereafter, as shown in FIG. 7C , due to the resonance effect of the vibration of the piezoelectric actuator 23, the resonant plate 22 will also vibrate reciprocatingly, that is, it vibrates downward and is adsorbed on the piezoelectric actuator 23. On the convex portion 230c of the floating plate 230, the volume of the chamber at the central hole 210 of the flow channel plate 21 is increased by the deformation of the resonant plate 22, and the volume of the first chamber 222 is compressed at the same time, thereby promoting The gas in the first chamber 222 pushes to flow to both sides, and then passes through the gap 235 between the brackets 232 of the piezoelectric actuator 23 to flow downwards, so as to flow to the micro gas transmission device 2A and the micro valve device 2B In the air-collecting chamber 262 between them, the first through-hole 263 and the second through-hole 264 communicated with the air-collecting chamber 262 flow down to the first depressurization chamber 265 and the first outlet port correspondingly. Room 266. Then, as shown in FIG. 7D , since the resonant plate 22 of the micro-gas transmission device 2A returns to the initial position, and the piezoelectric actuator 23 is driven by voltage to vibrate upward, the volume of the first chamber 222 is also squeezed like this, The gas in the first chamber 222 flows toward both sides, and is continuously input into the gas collection chamber 262 and the first pressure relief chamber of the microvalve device 2B through the gap 235 between the brackets 232 of the piezoelectric actuator 23. In the chamber 265 and the first outlet chamber 266, so that the air pressure in the first pressure relief chamber 265 and the first outlet chamber 266 is greater, and then the flexible valve plate 27 is pushed downward to produce bending deformation, then In the second pressure relief chamber 283, the valve plate 27 is flatly attached downwards and against the convex structure 281a at the end of the third through hole 281, thereby closing the third through hole 281, and in the second outlet chamber 284, the valve hole 270 corresponding to the fourth through hole 282 on the valve plate 27 is opened downwards, so that the gas in the second outlet chamber 284 can be passed down to the outlet 29 and connected with the outlet 29 through the fourth through hole 282. Any device (not shown) in order to achieve the purpose of pressure-gathering operation. Finally, as shown in FIG. 7E , when the resonant plate 22 of the micro gas transmission device 2A resonates and moves upward, the gas in the central hole 210 of the flow channel plate 21 can flow into the first chamber through the hollow hole 220 of the resonant plate 22 222, then through the gap 235 between the brackets 232 of the piezoelectric actuator 23, it is continuously transmitted downwards to the micro valve device 2B, and the gas pressure system continues to increase downwards, so the gas will continue to pass through the micro valve device 2B. The gas collection chamber 262, the second through hole 264, the first outlet chamber 266, the second outlet chamber 284 and the fourth through hole 282 of the micro valve device 2B flow into the outlet 29 and any device connected with the outlet 29 , the pressure-gathering operation system can be driven by the pressure difference between the external atmospheric pressure and the device, but not limited thereto.

When the internal pressure of the device (not shown) connected to the outlet 29 was greater than the external pressure, the micro pneumatic power device 2 could perform decompression or decompression operations as shown in Figure 8, and its decompression or decompression The action mode of the pressure is mainly as mentioned above, the gas can no longer be input into the gas collection chamber 262 by regulating the gas transmission volume of the micro gas transmission device 2A. The four through-holes 282 are fed into the second outlet chamber 284, so that the volume of the second outlet chamber 284 expands, thereby prompting the flexible valve plate 27 to bend and deform upwards, and flatten upwards and abut against the first outlet chamber. On the protrusion structure 269 of the chamber 266, the valve hole 270 of the valve plate 27 is closed, that is, the gas in the second outlet chamber 284 will not flow back into the first outlet chamber 266; and, the second outlet chamber 284 The gas system in the gas system can flow into the second pressure relief chamber 283 through the communication flow channel 285, and then flow out to the pressure relief hole 288 through the third through hole 281 to perform pressure relief operations; The one-way gas transmission operation of 2B discharges the gas in the device connected to the outlet 29 to reduce the pressure, or discharges it completely to complete the pressure relief operation.

To sum up, the micro gas power device provided by the present invention mainly uses the mutual assembly of the micro gas transmission device and the micro valve device to allow gas to enter from the air inlet on the micro gas transmission device, and utilizes piezoelectric The action of the actuator makes the gas generate a pressure gradient in the designed flow channel and pressure chamber, and then makes the gas flow at a high speed and transmits it to the micro valve device, and then through the one-way valve design of the micro valve device, the gas It flows in one direction, so that the pressure can be accumulated in any device connected to the outlet; and when it is desired to depressurize or relieve pressure, the transmission volume of the micro gas transmission device is adjusted, and the gas can be released from the device connected to the outlet. It is transmitted to the second outlet chamber of the micro valve device, and is transmitted to the second pressure relief chamber through the communication flow channel, and then flows out through the pressure relief hole, so as to achieve rapid gas transmission and at the same time achieve silence The effect can also reduce the overall volume and thinness of the micro gas power device, and then make the micro gas power device achieve the purpose of light and comfortable portability, and can be widely used in medical equipment and related equipment. Therefore, the present invention has great industrial application value, and an application is filed according to law.

Even though the present invention has been described in detail by the above-mentioned embodiments, it can be modified in various ways by those skilled in the art, all of which are within the scope of the attached patent application.

Claims (18)

1. micro pressure power plant, is characterized in that comprising:

One minitype gas transmitting set, comprising:

One inlet plate, has at least one inlet hole, for importing gas;

One runner plate, has at least one round and center hole of confluxing, this inlet hole of this round that confluxes this inlet plate corresponding, and guides the gas of this inlet hole to conflux to this center hole;

One resonance plate, has a hollow bore, to should this center hole of runner plate; And

One piezoelectric actuator, has a suspension board and a housing, connects between this suspension board and this housing with at least one support, and attaches a piezoelectric ceramic plate in a surface of this suspension board;

Wherein, above-mentioned inlet plate, runner plate, resonance plate and piezoelectric actuator sequentially stack reply and put location, and there is between this resonance plate and this piezoelectric actuator a gap form one first chamber, when being driven to make this piezoelectric actuator, gas is imported by this at least one inlet hole of this inlet plate, this at least one round that confluxes through this runner plate is collected to this center hole, flow through this hollow bore of this resonance plate again, to enter in this first chamber, again by this piezoelectric actuator this at least one support between a space transmit downwards, with lasting pushing out gas; And

One micro valve device, comprising:

One gas collection plate, has one first penetration hole, one second penetration hole, one first release chamber and one first outlet chamber, and this first penetration hole is connected with this first release chamber, and this second penetration hole is connected with this first outlet chamber;

One valve sheet, has a valve opening; And

One exit plate, there is one the 3rd penetration hole, one the 4th penetration hole, one second pressure-releasing cavity and one second outlet chamber, 3rd penetration hole corresponds to this first penetration hole of this gas collection plate, and be connected with this second release chamber, 4th penetration hole corresponds to this second penetration hole, and be connected with this second outlet chamber, and between this second release chamber and this second outlet chamber, there is a connection runner;

Wherein, above-mentioned gas collection plate, valve sheet and exit plate sequentially correspondence stack and arrange location, this valve sheet is arranged between this gas collection plate and this exit plate, and the valve opening correspondence of this valve sheet is arranged between this second penetration hole and the 4th penetration hole, gas is when this minitype gas transmitting set transfers to downwards in this micro valve device, enter in this first release chamber and this first outlet chamber by this first penetration hole and this second penetration hole, and import gas by the valve opening of this valve sheet flow in the 4th penetration hole carry out collection press operation, when collecting body of calming the anger and being greater than importing gas, collect body of calming the anger to flow towards this second outlet chamber from the 4th penetration hole, to make this valve sheet displacement, and make the valve opening of this valve sheet be resisted against this gas collection plate and close, collect body of calming the anger simultaneously and can flow to this second pressure-releasing cavity indoor along connection runner in this second outlet chamber, now in this valve sheet displacement indoor of the second pressure-releasing chamber, collect body of calming the anger to be flowed out by the 3rd penetration hole, to carry out release operation.

2. micro pressure power plant as claimed in claim 1, it is characterized in that this minitype gas transmitting set more comprises an insulating trip and a conducting plate, and this insulating trip and this conducting plate are sequentially arranged under this piezoelectric actuator.

3. micro pressure power plant as claimed in claim 1, is characterized in that this inlet plate of this minitype gas transmitting set and this runner plate can be integrated structure.

4. micro pressure power plant as claimed in claim 1, it is characterized in that a upper surface of this suspension board of this piezoelectric actuator of this minitype gas transmitting set is the structure of a ladder surface, namely this upper surface has a protuberance, and a upper surface coplanar of this protuberance and this housing, between a upper surface of this upper surface of this protuberance and this housing and this upper surface of this suspension board and this support, there is a certain depth.

5. micro pressure power plant as claimed in claim 1, it is characterized in that this piezoelectric ceramic plate of this piezoelectric actuator of this minitype gas transmitting set is attached at a lower surface of this suspension board, and a lower surface coplanar of this lower surface of this suspension board and this housing and this support.

6. micro pressure power plant as claimed in claim 1, it is characterized in that this gas collection plate of this micro valve device has more a gas collection chamber in a surface, and this gas collection chamber are connected with this first penetration hole and this second penetration hole.

7. as claimed in claim 6 micro pressure power plant, it is characterized in that this first release chamber of this micro valve device and this first outlet chamber be arranged at this relative gas collection chamber of this gas collection plate another on the surface.

8. micro pressure power plant as claimed in claim 1, it is characterized in that this first outlet chamber of this gas collection plate of this micro valve device has more a protuberance structure, and this protuberance structure is to should this valve opening of valve block plate arrange, and to conflict this valve opening of complete hermetically closing in order to quick conflict formation one prestressing.

9. micro pressure power plant as claimed in claim 1, it is characterized in that this second release chamber and this second outlet chamber of this micro valve device are arranged at one of this exit plate on the surface, corresponding with this first release chamber of this gas collection plate and this first outlet chamber respectively.

10. micro pressure power plant as claimed in claim 1, it is characterized in that the 3rd penetration hole end of this exit plate of this micro valve device has a protuberance structure, to conflict complete hermetically closing the 3rd penetration hole in order to this valve sheet formation one prestressing of conflicting fast, or depart from fast in order to this valve sheet and open the 3rd penetration hole.

11. 1 kinds of micro pressure power plant, is characterized in that comprising:

One minitype gas transmitting set, comprising:

One inlet plate;

One runner plate;

One resonance plate; And

One piezoelectric actuator;

Wherein, above-mentioned inlet plate, runner plate, resonance plate and piezoelectric actuator sequentially correspondence stack and arrange location, and there is between this resonance plate and this piezoelectric actuator a gap form one first chamber, when this piezoelectric actuator is driven, gas is entered by this inlet plate, flow through this runner plate and this resonance plate, transmit downwards again to enter in this first chamber; And

One micro valve device, comprising:

One gas collection plate, has at least two penetration holes and at least two chambers;

One valve sheet, has a valve opening; And

One exit plate, has at least two penetration holes and at least two chambers;

Wherein, above-mentioned gas collection plate, valve sheet and exit plate sequentially correspondence stack and arrange location, a gas collection chamber is formed between this minitype gas transmitting set and this micro valve device, when gas transfers to this gas collection chamber downwards from this minitype gas transmitting set, be passed in this micro valve device again, at least two penetration holes had respectively through this gas collection plate, this exit plate and at least two chambers, this valve opening correspondence of this valve sheet is made to open or close with the one-way flow in response to gas, in order to do carrying out collection pressure or release operation.

12. micro pressure power plant as described in claims 11, it is characterized in that this minitype gas transmitting set, this inlet plate has at least one inlet hole, for importing gas; This runner plate has at least one round and center hole of confluxing, this inlet hole of this round that confluxes this inlet plate corresponding, and guides the gas of this inlet hole to conflux to this center hole; This resonance plate has a hollow bore, to should this center hole of runner plate; And this piezoelectric actuator has a suspension board and a housing, connect with at least one support between this suspension board and this housing, and attach a piezoelectric ceramic plate in a surface of this suspension board.

13. micro pressure power plant as described in claims 11, it is characterized in that this gas collection plate of this micro valve device has one first penetration hole, one second penetration hole, one first release chamber and one first outlet chamber, this first penetration hole is connected with this first release chamber, and this second penetration hole is connected with the first outlet chamber.

14. micro pressure power plant as described in claims 13, is characterized in that this exit plate of this micro valve device has one the 3rd penetration hole, one the 4th penetration hole, one second pressure-releasing cavity and one second outlet chamber and wherein has a connection runner between this second release chamber and this second outlet chamber.

15. micro pressure power plant as described in claims 14, it is characterized in that this valve sheet is arranged between this gas collection plate and this exit plate, and the valve opening correspondence of this valve sheet is arranged between this second penetration hole and the 4th penetration hole, gas is when this minitype gas transmitting set transfers to downwards in this micro valve device, enter in this first release chamber and this first outlet chamber by this first penetration hole and this second penetration hole, and import gas by this valve opening of this valve sheet flow in the 4th penetration hole carry out collection press operation, when collecting body of calming the anger and being greater than importing gas, collect body of calming the anger to flow towards this second outlet chamber from the 4th penetration hole, to make this valve sheet displacement, and make this valve opening of this valve sheet be resisted against this gas collection plate and close, collect body of calming the anger simultaneously and can flow to this second pressure-releasing cavity indoor along connection runner in this second outlet chamber, now in this valve sheet displacement indoor of the second pressure-releasing chamber, collect body of calming the anger to be flowed out by the 3rd penetration hole, carry out release operation.

16. 1 kinds of micro pressure power plant, is characterized in that comprising:

One minitype gas transmitting set, comprise sequentially stacking and an inlet plate, a runner plate, a resonance plate and a piezoelectric actuator are set, wherein there is between this resonance plate and this piezoelectric actuator a gap and form one first chamber, when this piezoelectric actuator is driven, gas is entered by this inlet plate, flow through this runner plate and this resonance plate, transmit again to enter in this first chamber; And

One micro valve device, comprises sequentially stacking and arranges a gas collection plate, a valve sheet and an exit plate, and this valve sheet has a valve opening;

Wherein, when gas transfers in this micro valve device from this minitype gas transmitting set, in order to do carrying out collection pressure or release operation.

17. micro pressure power plant as described in claims 16, it is characterized in that forming a gas collection chamber between this minitype gas transmitting set and this micro valve device, make this gas transfer to this gas collection chamber from this minitype gas transmitting set, then be passed in this micro valve device.

18. micro pressure power plant as described in claims 16, it is characterized in that this gas collection plate, this exit plate of this micro valve device have at least two penetration holes and at least two chambers respectively, make with the one-way flow in response to gas this valve opening correspondence of this valve sheet open or close.