[go: up one dir, main page]

CN103901234A - In-situ integration representation device of multiferroic material nanoscale domain structure - Google Patents

In-situ integration representation device of multiferroic material nanoscale domain structure Download PDF

Info

Publication number
CN103901234A
CN103901234A CN201410151249.2A CN201410151249A CN103901234A CN 103901234 A CN103901234 A CN 103901234A CN 201410151249 A CN201410151249 A CN 201410151249A CN 103901234 A CN103901234 A CN 103901234A
Authority
CN
China
Prior art keywords
domain structure
situ
multiferroic
original position
domain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201410151249.2A
Other languages
Chinese (zh)
Other versions
CN103901234B (en
Inventor
赵坤宇
曾华荣
于会珠
殷庆瑞
李国荣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Institute Of Advanced Inorganic Materials
Original Assignee
Shanghai Institute of Ceramics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Institute of Ceramics of CAS filed Critical Shanghai Institute of Ceramics of CAS
Priority to CN201410151249.2A priority Critical patent/CN103901234B/en
Publication of CN103901234A publication Critical patent/CN103901234A/en
Application granted granted Critical
Publication of CN103901234B publication Critical patent/CN103901234B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)

Abstract

The invention discloses an in-situ integration representation device of a multiferroic material nanoscale domain structure. The in-situ integration representation device comprises an atomic force microscopy in-situ incentive platform and an in-situ detection platform, the atomic force microscopy in-situ incentive platform is used for multiferroic structure in-situ incenting on detected multiferroic materials to enable an incenting point of the detected multiferroic materials to generate domain structure imaging signals, and the in-situ detection platform carries out in-situ real-time detection and data processing on the domain structure imaging signals and displays the in-situ imaging representation result of the multiferroic domain structure in real time. Through the device, in-situ, lossless, real-time, dynamic and integrated representation of a multiferroic material nanoscale ferroelectric domain and a ferromagnetic domain can be achieved.

Description

多铁性材料纳米尺度畴结构的原位集成表征装置In situ integrated characterization device for nanoscale domain structure of multiferroic materials

技术领域 technical field

本发明属于仪器研制领域,具体地,涉及一种多铁性材料纳米尺度畴结构的原位集成表征装置。 The invention belongs to the field of instrument development, and in particular relates to an in-situ integrated characterization device for nanoscale domain structures of multiferroic materials.

背景技术 Background technique

多铁性材料是指在一定温度下同时存在铁电性、铁磁性和铁弹性中两种或者两种以上有序态的一类化合物。其中,最有研究意义和使用价值的是同时具有铁电性和铁磁性的多铁性材料。 Multiferroic materials refer to a class of compounds that exist in two or more ordered states of ferroelectricity, ferromagnetism and ferroelasticity at a certain temperature. Among them, the most research significance and application value are multiferroic materials with both ferroelectricity and ferromagnetism.

这两种有序态的同时存在会使材料体系产生独特的磁电耦合效应,使多铁性材料具有丰富的物理性质。同时,两种有序子系统在体系内部引起的自发磁电耦合效应使得材料能够通过电场来控制其自发磁化,通过磁场来控制其自发极化,从而具有巨大的应用前景。 The simultaneous existence of these two ordered states will produce a unique magnetoelectric coupling effect in the material system, making multiferroic materials have rich physical properties. At the same time, the spontaneous magnetoelectric coupling effect caused by the two ordered subsystems inside the system enables the material to control its spontaneous magnetization through an electric field and its spontaneous polarization through a magnetic field, which has great application prospects.

而兼具铁电性和铁磁性的功能材料在信息存储、微波领域、高压输电线路电流测量、多功能电子设备等多方面都有很大的发展潜力。由于多铁性材料蕴含着丰富的材料科学与物理研究课题、以及可预期的广阔应用前景,近年来引起了国内外广大科学工作者的密切关注,是当前无机材料学界最为活跃的研究领域之一,而纳米尺度多铁性能的测量和表征亦日益成为该领域急需解决的挑战性课题。 Functional materials with both ferroelectricity and ferromagnetism have great potential for development in information storage, microwave fields, current measurement of high-voltage transmission lines, and multifunctional electronic devices. Because multiferroic materials contain rich materials science and physics research topics, as well as broad application prospects, they have attracted the attention of many scientists at home and abroad in recent years, and are currently one of the most active research fields in the field of inorganic materials. , and the measurement and characterization of the properties of nanoscale multiferroics has increasingly become a challenging issue that needs to be solved urgently in this field.

包括(铁)电畴与(铁)磁畴等的畴结构是多铁性材料中重要的微观结构,是多铁性材料宏观物理现象和物理性能的基础,电畴和磁畴结构的原位观察对研究磁电耦合效应意义重大。 The domain structure including (ferro) electric domain and (ferro) magnetic domain is an important microstructure in multiferroic materials, and it is the basis of macroscopic physical phenomena and physical properties of multiferroic materials. The observation is of great significance to the study of the magnetoelectric coupling effect.

目前铁电畴与铁磁畴的表征方法具有如下局限性:铁电畴、铁磁畴结构的表征是采用多套分立装置完成的,无法达到实时、同步检测。因此,多铁性材料的畴结构的传统表征方法难以实现多铁性材料纳米尺度电畴、磁畴的原位、实时、集成表征。 The current characterization methods of ferroelectric domains and ferromagnetic domains have the following limitations: the characterization of ferroelectric domains and ferromagnetic domain structures is completed by multiple sets of discrete devices, which cannot achieve real-time and synchronous detection. Therefore, the traditional characterization methods of the domain structure of multiferroic materials are difficult to realize the in-situ, real-time and integrated characterization of the nanoscale electric and magnetic domains of multiferroic materials.

针对以上局限性,本发明希望建立能实现多铁性材料纳米尺度电畴、磁畴的原位、无损、实时、动态、定量表征的表征装置,以满足当前迅猛发展的多铁性材料表征之急需。 In view of the above limitations, the present invention hopes to establish a characterization device that can realize the in-situ, non-destructive, real-time, dynamic, and quantitative characterization of multiferroic material nanoscale electric domains and magnetic domains, so as to meet the current rapid development of multiferroic material characterization. urgent need.

发明内容 Contents of the invention

鉴于以上所述,本发明所要解决的技术问题在于提供一种多铁性材料纳米尺度畴结构的原位集成表征装置,能够有效进行多铁性材料纳米尺度铁电畴、铁磁畴的原位、无损、实时、动态、集成表征。 In view of the above, the technical problem to be solved by the present invention is to provide an in-situ integrated characterization device for the nanoscale domain structure of multiferroic materials, which can effectively perform in-situ , lossless, real-time, dynamic, and integrated characterization.

为了解决上述技术问题,本发明的一种多铁性材料纳米尺度畴结构的原位集成表征装置,包括:用于对被测多铁性材料进行多铁性畴结构的原位激发以使该被测多铁性材料的激励点产生畴结构成像信号的原子力显微镜原位激励平台;对所述畴结构成像信号进行原位实时检测和数据处理并实时显示所述多铁性畴结构的原位成像表征结果的原位检测平台。 In order to solve the above-mentioned technical problems, an in-situ integrated characterization device for the nanoscale domain structure of multiferroic materials according to the present invention includes: an in-situ excitation for multiferroic materials to be tested to make the multiferroic materials An atomic force microscope in-situ excitation platform for generating domain structure imaging signals at the excitation point of the measured multiferroic material; perform in-situ real-time detection and data processing of the domain structure imaging signals and display the in-situ state of the multiferroic domain structure in real time Platform for in situ detection of imaging characterization results.

根据本发明,通过设置原子力显微镜原位激励平台,提供纳米尺度电畴、磁畴激发所需的基本硬件平台,并实现原位激发多铁性材料纳米尺度多铁性畴结构(铁电畴、铁磁畴)的成像信号;并通过设置原位检测平台,用于实现多铁性材料纳米尺度畴结构的原位实时检测及数据处理,实时显示畴结构的成像表征结果。 According to the present invention, by setting the in-situ excitation platform of the atomic force microscope, the basic hardware platform required for nanoscale electric domain and magnetic domain excitation is provided, and the nanoscale multiferroic domain structure (ferroelectric domain, ferroelectric domain, Ferromagnetic domain) imaging signal; and by setting up an in-situ detection platform, it is used to realize the in-situ real-time detection and data processing of the nanoscale domain structure of multiferroic materials, and display the imaging characterization results of the domain structure in real time.

本发明将原子力显微镜(AFM)纳米检测功能与畴结构成像信号激励相结合,基于商用AFM纳米检测平台,建立起兼具纳米级畴结构成像信号激励与检测特性的纳米原位评价技术,有效解决了多铁性材料纳米尺度畴结构原位表征这一关键技术难点。本发明的表征装置不仅具有纳米尺度多铁性畴结构原位激发、原位同步表征的独特功能,而且具有高分辨率、高灵敏度、高信噪比等优点。且本发明的表征装置结构简单、兼容性强、适用于与不同商用AFM相结合,是一项易于推广和应用的新技术,且拓展了现有商用原子力显微镜所不具有的纳米多铁性材料物性评价功能,为深入研究纳米多铁性材料的磁电耦合机制以及纳米多铁性材料与器件的深入发展提供了重要的原位、纳米尺度表征装置。 The present invention combines the atomic force microscope (AFM) nano-detection function with domain structure imaging signal excitation, and based on a commercial AFM nano-detection platform, establishes a nano-scale in-situ evaluation technology with both nano-scale domain structure imaging signal excitation and detection characteristics, effectively solving the problem. The key technical difficulty of in-situ characterization of the nanoscale domain structure of multiferroic materials is solved. The characterization device of the present invention not only has the unique functions of in-situ excitation and in-situ synchronous characterization of nanoscale multiferroic domain structures, but also has the advantages of high resolution, high sensitivity, high signal-to-noise ratio, and the like. Moreover, the characterization device of the present invention has simple structure, strong compatibility, and is suitable for combining with different commercial AFMs. It is a new technology that is easy to popularize and apply, and expands the nanometer multiferroic materials that the existing commercial atomic force microscopes do not have. The physical property evaluation function provides an important in-situ and nanoscale characterization device for in-depth research on the magnetoelectric coupling mechanism of nano-multiferroic materials and the in-depth development of nano-multiferroic materials and devices.

又,在本发明中,也可以是,所述原子力显微镜原位激励平台包括:具备载置所述被测多铁性材料的磁性底座的原子力显微镜平台;用于对所述被测多铁性材料进行扫描以检测其激励点所产生的所述畴结构成像信号的探针;用于产生分别施加于所述磁性底座及探针上以进行所述原位激发的激励信号的信号发生单元;用于将从所述探针检测到的所述畴结构成像信号发送至所述原位检测平台的信号输出单元。 Moreover, in the present invention, it is also possible that the in-situ excitation platform of the atomic force microscope includes: an atomic force microscope platform equipped with a magnetic base on which the multiferroic material to be tested is placed; A probe for scanning the material to detect the domain structure imaging signal generated by its excitation point; a signal generating unit for generating an excitation signal respectively applied to the magnetic base and the probe for the in-situ excitation; A signal output unit for sending the domain structure imaging signal detected from the probe to the in-situ detection platform.

根据本发明,可以使原子力显微镜原位激励平台有效地实现对被测多铁性材料进行多铁性畴结构的原位激发以使该被测多铁性材料的激励点产生畴结构成像信号,并将该畴结构成像信号输出至原位检测平台。 According to the present invention, the in-situ excitation platform of the atomic force microscope can effectively realize the in-situ excitation of the multiferroic domain structure on the multiferroic material to be tested, so that the excitation point of the multiferroic material to be tested can generate domain structure imaging signals, And output the domain structure imaging signal to the in-situ detection platform.

又,在本发明中,也可以是,所述原子力显微镜原位激励平台还包括:将所述探针的扫描模式在接触式扫描模式与非接触式扫描模式之间进行切换的切换模块。 Moreover, in the present invention, the in-situ excitation platform of the atomic force microscope may also include: a switching module for switching the scanning mode of the probe between a contact scanning mode and a non-contact scanning mode.

根据本发明,可以通过切换模块使探针的扫描模式在电畴成像过程中的接触式扫描模式与磁畴成像过程中的非接触式扫描模式之间进行直接、实时切换,提高了本发明的表征装置的可靠性,保证了扫描定位的准确性,实现了多铁性畴结构的原位成像。 According to the present invention, the scanning mode of the probe can be switched directly and in real time between the contact scanning mode in the electric domain imaging process and the non-contact scanning mode in the magnetic domain imaging process through the switching module, which improves the performance of the present invention. The reliability of the characterization device ensures the accuracy of scanning positioning and realizes the in-situ imaging of the multiferroic domain structure.

又,在本发明中,也可以是,所述切换模块包括:用于在电畴成像过程中开启所述接触式扫描模式而在磁畴成像过程中关闭所述接触式扫描模式的接触式扫描开关控制单元;和用于在所述磁畴成像过程中开启所述非接触式扫描模式而在所述电畴成像过程中关闭所述非接触式扫描模式的非接触式扫描开关控制单元。 Moreover, in the present invention, it is also possible that the switching module includes: a contact scanning mode for turning on the contact scanning mode during the electric domain imaging process and closing the contact scanning mode during the magnetic domain imaging process. a switch control unit; and a non-contact scanning switch control unit for turning on the non-contact scanning mode during the magnetic domain imaging process and turning off the non-contact scanning mode during the electrical domain imaging process.

根据本发明,通过该接触式扫描开关控制单元和非接触式扫描开关控制单元可以有效地实现在电畴成像过程中的接触式扫描模式与磁畴成像过程中的非接触式扫描模式之间的直接、实时切换。 According to the present invention, the contact scanning mode in the electric domain imaging process and the non-contact scanning mode in the magnetic domain imaging process can be effectively realized through the contact scanning switch control unit and the non-contact scanning switching control unit. Direct, real-time switching.

又,在本发明中,也可以是,还包括设于所述信号发生单元与所述探针之间的压电双晶片。 In addition, in the present invention, a piezoelectric bimorph provided between the signal generating unit and the probe may be further included.

根据本发明,通过设置压电双晶片,可以有利于实现被测多铁性材料的磁畴结构成像信号的原位激发。 According to the present invention, by setting the piezoelectric bimorph, it can be beneficial to realize the in-situ excitation of the magnetic domain structure imaging signal of the multiferroic material to be tested.

又,在本发明中,也可以是,所述探针为磁电检测探针,在所述接触式扫描模式下,所述探针作为反馈参量的微悬臂形变量为0.1-2nm,与所述被测多铁性材料互作用的接触面积直径为10-20nm;在所述非接触式扫描模式下,所述探针与所述被测多铁性材料之间的距离为50nm-150nm。 Moreover, in the present invention, it is also possible that the probe is a magnetoelectric detection probe, and in the contact scanning mode, the micro-cantilever deformation of the probe as a feedback parameter is 0.1-2 nm, which is consistent with the The diameter of the contact area where the multiferroic material to be tested interacts is 10-20nm; in the non-contact scanning mode, the distance between the probe and the multiferroic material to be tested is 50nm-150nm.

根据本发明,磁电检测探针同时具有微区压电、磁力信号激励源及检测源的功能;该磁电检测探针的工作模式包括接触式扫描模式与非接触式扫描模式。在接触式扫描模式下,探针作为反馈参量的微悬臂形变量为0.1-2nm,与被测多铁性材料互作用的接触面积直径为10-20nm,从而有利于实现电畴成像的高分辨率。在非接触式扫描模式下,探针与被测多铁性材料之间的距离为50nm-150nm,可以有利于减小样品形貌起伏对磁畴信号的影响,保持磁畴成像信号的稳定性。 According to the present invention, the magnetoelectric detection probe has the functions of micro-area piezoelectricity, magnetic signal excitation source and detection source; the working mode of the magnetoelectric detection probe includes a contact scanning mode and a non-contact scanning mode. In the contact scanning mode, the micro-cantilever deformation of the probe as the feedback parameter is 0.1-2nm, and the contact area interacting with the measured multiferroic material has a diameter of 10-20nm, which is conducive to the realization of high-resolution electric domain imaging Rate. In the non-contact scanning mode, the distance between the probe and the measured multiferroic material is 50nm-150nm, which can help reduce the influence of sample shape fluctuations on the magnetic domain signal and maintain the stability of the magnetic domain imaging signal .

又,在本发明中,也可以是,所述探针的工作频率范围为2kHz-70kHz。 Moreover, in the present invention, it is also possible that the working frequency range of the probe is 2kHz-70kHz.

根据本发明,探针的工作频率范围为2kHz-70kHz,有利于获得较大幅度的电畴和磁畴有效成像信号,减小噪声干扰。 According to the present invention, the working frequency range of the probe is 2kHz-70kHz, which is beneficial to obtain effective imaging signals of relatively large electric and magnetic domains and reduce noise interference.

又,在本发明中,也可以是,其特征在于,所述原位检测平台包括:用于接收所述原子力显微镜原位激励平台输出的所述畴结构成像信号并提高该信号幅度的信号处理单元;对所述信号处理单元输出的信号进行检测的锁相放大器单元;对所述锁相放大器单元输出的信号进行数据处理并显示所述多铁性畴结构的原位成像表征结果的处理及显示单元。 Furthermore, in the present invention, it may also be characterized in that the in-situ detection platform includes: a signal processing device for receiving the domain structure imaging signal output by the in-situ excitation platform of the atomic force microscope and increasing the signal amplitude unit; a lock-in amplifier unit that detects the signal output by the signal processing unit; performs data processing on the signal output by the lock-in amplifier unit and displays the processing of the in-situ imaging characterization result of the multiferroic domain structure and Display unit.

根据本发明,可以有效地实现对畴结构成像信号进行原位实时检测和数据处理并实时显示多铁性畴结构的原位成像表征结果。 According to the invention, in-situ real-time detection and data processing of domain structure imaging signals can be effectively realized, and in-situ imaging characterization results of multiferroic domain structures can be displayed in real time.

本发明可包含权利要求书和/或说明书和/或附图中公开的至少两个结构的任意组合。尤其是,本发明包含权利要求书的各项权利要求的两个以上的任意组合。 The present invention may comprise any combination of at least two structures disclosed in the claims and/or the description and/or the drawings. In particular, the present invention includes any combination of two or more of the respective claims of the claims.

根据下述具体实施方式并参考附图,将更好地理解本发明的上述及其他目的、特征和优点。 The above and other objects, features and advantages of the present invention will be better understood from the following detailed description with reference to the accompanying drawings.

附图说明 Description of drawings

图1示意性地示出根据本发明的多铁性材料纳米尺度畴结构的原位集成表征装置的结构框图; Fig. 1 schematically shows the structural block diagram of the in-situ integrated characterization device of the multiferroic material nanoscale domain structure according to the present invention;

图2示意性地示出图1所示的表征装置中的原子力显微镜原位激励平台的结构框图; Fig. 2 schematically shows a structural block diagram of the atomic force microscope in-situ excitation platform in the characterization device shown in Fig. 1;

图3示意性地示出图1所示的表征装置中的原位检测平台的结构框图; Fig. 3 schematically shows a structural block diagram of the in-situ detection platform in the characterization device shown in Fig. 1;

图4(a)~图4(d)示出了根据本发明的表征装置得到的测试结果,其中图4(a)是被测的多铁性材料表面形貌的AFM像,图4(b)是采用根据本发明的表征装置在该被测多铁性材料的对应区域原位获得的铁电畴结构的图像,图4(c)是采用根据本发明的表征装置在该被测多铁性材料的对应区域原位获得的铁磁畴结构的图像,以及图4(d)是采用根据本发明的表征装置在具有不同自发极化取向的微区进行压电响应测试而获得的微区压电响应回线。 Figure 4(a) to Figure 4(d) show the test results obtained by the characterization device according to the present invention, wherein Figure 4(a) is an AFM image of the surface topography of the tested multiferroic material, and Figure 4(b ) is an image of the ferroelectric domain structure obtained in situ in the corresponding region of the tested multiferroic material using the characterization device according to the present invention, and Fig. 4(c) is an image of the measured multiferroic material using the characterization device according to the present invention The image of the ferromagnetic domain structure obtained in situ in the corresponding region of the magnetic material, and Fig. 4(d) is the micro-domain obtained by the piezoelectric response test of the micro-domain with different spontaneous polarization orientations using the characterization device according to the present invention Piezoelectric response loop.

具体实施方式 Detailed ways

以下结合附图和实施例详细地说明本发明的多铁性材料纳米尺度畴结构的原位集成表征装置。 The in-situ integrated characterization device of the multiferroic material nanoscale domain structure of the present invention will be described in detail below with reference to the accompanying drawings and examples.

以下实施例均是采用根据本发明的多铁性材料纳米尺度畴结构的原位集成表征装置对多铁性材料纳米尺度铁电畴结构和铁磁畴结构的表征结果,以进一步说明本发明的效果,但并非仅限于下述实施例。 The following examples are all the characterization results of the nanoscale ferroelectric domain structure and ferromagnetic domain structure of multiferroic materials using the in-situ integrated characterization device for multiferroic material nanoscale domain structure according to the present invention, to further illustrate the present invention effects, but are not limited to the following examples.

图1示意性地示出根据本发明的多铁性材料纳米尺度畴结构的原位集成表征装置的结构框图。如图1所示,本发明的多铁性材料纳米尺度畴结构的原位集成表征装置包括用于对被测多铁性材料进行多铁性畴结构的原位激发以使该被测多铁性材料的激励点产生畴结构成像信号的原子力显微镜原位激励平台1;和对畴结构成像信号进行原位实时检测和数据处理并实时显示多铁性畴结构的原位成像表征结果的原位检测平台2。 Fig. 1 schematically shows a structural block diagram of an in-situ integrated characterization device for nanoscale domain structures of multiferroic materials according to the present invention. As shown in Figure 1, the in-situ integrated characterization device for multiferroic material nanoscale domain structure of the present invention includes an in-situ excitation for the multiferroic material to make the multiferroic material In situ excitation platform 1 for atomic force microscopy to generate domain structure imaging signals at excitation points of ferromagnetic materials; Detection platform 2.

由于原子力显微镜是当前开展纳米科学研究的重要工具之一,它具有高精度控制、纳米级分辨率等独特优点,已成为一种成熟的纳米检测平台,并为在其基础上发展新技术、拓展新功能提供了重要平台基础。 Since the atomic force microscope is one of the important tools for conducting nanoscience research, it has unique advantages such as high-precision control and nanoscale resolution. New features provide an important platform foundation.

本发明针对目前纳米尺度多铁性材料表征的迫切需求,基于AFM纳米检测平台的检测成熟性、功能齐全性及结构完善性等特点,建立了纳米尺度多铁性畴结构的原位集成表征装置,实现了纳米尺度铁电畴和铁磁畴的原位、实时、动态成像,为深入研究纳米尺度多铁性材料的磁电耦合机制、纳米尺度多铁性材料及其器件的深入发展提供了重要的原位纳米表征方法。 Aiming at the urgent demand for the characterization of nanoscale multiferroic materials, the present invention establishes an in-situ integrated characterization device for nanoscale multiferroic domain structures based on the characteristics of the AFM nanometer detection platform, such as detection maturity, complete functions, and structural perfection. , realized the in-situ, real-time, and dynamic imaging of nanoscale ferroelectric domains and ferromagnetic domains, and provided a basis for in-depth research on the magnetoelectric coupling mechanism of nanoscale multiferroic materials and the in-depth development of nanoscale multiferroic materials and their devices. Important in situ nano-characterization method.

本发明的多铁性材料纳米尺度畴结构的原位集成表征装置中的AFM原位激励平台1,用以提供发展纳米尺度多铁性畴结构原位表征新技术的AFM平台基础,并基此实现多铁性材料纳米尺度铁电畴、铁磁畴等多铁性畴结构的原位激发;而原位检测平台2,用以实现多铁性材料纳米尺度铁电畴、铁磁畴等多铁性畴结构的原位实时检测和处理,显示纳米尺度多铁性畴结构的原位成像表征结果。 The AFM in-situ excitation platform 1 in the in-situ integrated characterization device for the nanoscale domain structure of multiferroic materials of the present invention is used to provide the AFM platform basis for developing new technologies for the in-situ characterization of nanoscale multiferroic domain structures, and based on this Realize the in-situ excitation of multiferroic domain structures such as nanoscale ferroelectric domains and ferromagnetic domains in multiferroic materials; while the in-situ detection platform 2 is used to realize nanoscale ferroelectric domains and ferromagnetic domains in multiferroic materials In situ real-time detection and processing of ferroic domain structures, showing results of in situ imaging characterization of nanoscale multiferroic domain structures.

本发明的多铁性材料纳米尺度畴结构的原位集成表征装置的更详细的构造如图2和图3所示。其中,图2示意性地示出图1所示的表征装置中的原子力显微镜原位激励平台的结构框图;图3示意性地示出图1所示的表征装置中的原位检测平台的结构框图。 The more detailed structure of the in-situ integrated characterization device of the multiferroic material nanoscale domain structure of the present invention is shown in Fig. 2 and Fig. 3 . Wherein, Fig. 2 schematically shows a structural block diagram of the in-situ excitation platform of the atomic force microscope in the characterization device shown in Fig. 1; Fig. 3 schematically shows the structure of the in-situ detection platform in the characterization device shown in Fig. 1 block diagram.

参照图2,该表征装置中的原子力显微镜原位激励平台1包括:具备磁性底座19的原子力显微镜平台11,被测多铁性材料18置于该磁性底座19上,且该被测多铁性材料18与磁性底座19之间可采用导电胶粘结,从而有效地保证了该被测多铁性材料18的机械稳定性和信号的有效传输。该原子力显微镜原位激励平台1包括用于对被测多铁性材料18进行扫描以检测其激励点所产生的畴结构成像信号的探针12。 Referring to Fig. 2, the in-situ excitation platform 1 of the atomic force microscope in the characterization device includes: an atomic force microscope platform 11 with a magnetic base 19, on which the measured multiferroic material 18 is placed, and the measured multiferroic material Conductive glue can be used to bond the material 18 and the magnetic base 19, thereby effectively ensuring the mechanical stability of the tested multiferroic material 18 and the effective transmission of signals. The in-situ excitation platform 1 of the atomic force microscope includes a probe 12 for scanning the measured multiferroic material 18 to detect domain structure imaging signals generated by its excitation points.

该原子力显微镜原位激励平台1还包括用于产生分别施加于磁性底座19及探针12上以进行原位激发的激励信号的信号发生单元和用于将从探针12检测到的畴结构成像信号发送至原位检测平台2的信号输出单元。在本实施形态中,该信号发生单元可以是可产生交变电压信号的信号发生器14,而该信号输出单元可以是与探针12相连的畴结构成像信号输出端口111。 The in-situ excitation platform 1 of the atomic force microscope also includes a signal generating unit for generating excitation signals respectively applied to the magnetic base 19 and the probe 12 for in-situ excitation and for imaging the domain structure detected from the probe 12 The signal is sent to the signal output unit of the in-situ detection platform 2 . In this embodiment, the signal generating unit may be a signal generator 14 capable of generating alternating voltage signals, and the signal output unit may be a domain structure imaging signal output port 111 connected to the probe 12 .

且,该原子力显微镜原位激励平台1还包括将探针12的扫描模式在接触式扫描模式与非接触式扫描模式之间进行切换的切换模块15,可以通过该切换模块15使探针12的扫描模式在电畴成像过程中的接触式扫描模式与磁畴成像过程中的非接触式扫描模式之间进行直接、实时切换,提高了本发明的表征装置的可靠性,保证了扫描定位的准确性,实现了多铁性畴结构的原位成像。 Moreover, the in-situ excitation platform 1 of the atomic force microscope also includes a switching module 15 for switching the scanning mode of the probe 12 between a contact scanning mode and a non-contact scanning mode, through which the switching module 15 can make the probe 12 The scanning mode is directly and real-time switched between the contact scanning mode in the electrical domain imaging process and the non-contact scanning mode in the magnetic domain imaging process, which improves the reliability of the characterization device of the present invention and ensures the accuracy of scanning positioning In situ imaging of multiferroic domain structures has been realized.

具体地,如图2所示,该切换模块15包括用于在电畴成像过程中开启接触式扫描模式而在磁畴成像过程中关闭接触式扫描模式的接触式扫描开关控制单元151;和用于在磁畴成像过程中开启非接触式扫描模式而在电畴成像过程中关闭非接触式扫描模式的非接触式扫描开关控制单元152。通过该接触式扫描开关控制单元151和非接触式扫描开关控制单元152可以有效地实现在电畴成像过程中的接触式扫描模式与磁畴成像过程中的非接触式扫描模式之间的直接、实时切换。 Specifically, as shown in FIG. 2, the switching module 15 includes a contact scan switch control unit 151 for turning on the contact scan mode during the electric domain imaging process and closing the contact scan mode during the magnetic domain imaging process; and The non-contact scanning switch control unit 152 is used to enable the non-contact scanning mode during the magnetic domain imaging process and to disable the non-contact scanning mode during the electrical domain imaging process. Through the contact scan switch control unit 151 and the non-contact scan switch control unit 152, the direct, Switch in real time.

还如图2所示,在信号发生单元14与探针12之间还设有压电双晶片13。通过设置压电双晶片13,可以有利于实现被测多铁性材料的磁畴结构成像信号的原位激发。 Also as shown in FIG. 2 , a piezoelectric bimorph 13 is further provided between the signal generating unit 14 and the probe 12 . By arranging the piezoelectric bimorph 13, the in-situ excitation of the imaging signal of the magnetic domain structure of the multiferroic material to be tested can be facilitated.

此外,上述探针12为磁电检测探针,磁电检测探针同时具有微区压电、磁力信号激励源及检测源的功能;该磁电检测探针的工作模式包括接触式扫描模式与非接触式扫描模式。在接触式扫描模式下,探针12作为反馈参量的微悬臂形变量为0.1-2nm,与被测多铁性材料18互作用的接触面积直径为10-20nm;在非接触式扫描模式下,探针12与被测多铁性材料18之间的距离为50nm-150nm。且,该探针12的工作频率范围为2kHz-70kHz。 In addition, the above-mentioned probe 12 is a magnetoelectric detection probe, and the magnetoelectric detection probe has the functions of micro-area piezoelectric, magnetic signal excitation source and detection source; the working mode of the magnetoelectric detection probe includes contact scanning mode and Non-contact scanning mode. In the contact scanning mode, the microcantilever deformation of the probe 12 as the feedback parameter is 0.1-2nm, and the diameter of the contact area interacting with the measured multiferroic material 18 is 10-20nm; in the non-contact scanning mode, The distance between the probe 12 and the measured multiferroic material 18 is 50nm-150nm. Moreover, the working frequency range of the probe 12 is 2kHz-70kHz.

本发明的表征装置中的AFM原位激励平台1之所以具有原位激发纳米尺度铁电畴和铁磁畴成像信号的功能主要源于多铁性材料特有的逆压电效应以及磁电检测探针12与被测多铁性材料18直接的磁力互作用。以下结合图2进行详细说明。 The reason why the AFM in-situ excitation platform 1 in the characterization device of the present invention has the function of in-situ excitation of nanoscale ferroelectric domains and ferromagnetic domain imaging signals is mainly due to the unique inverse piezoelectric effect of multiferroic materials and the magnetoelectric detection probe. The needle 12 interacts directly with the multiferroic material 18 under test. The details will be described below in conjunction with FIG. 2 .

对于微区铁电畴成像信号,其激发的物理过程可表述如下:信号发生器14施加周期性激励电压信号通过电畴激励信号传输端16作用于磁电检测探针12和被测多铁性材料18的下表面之间,磁电检测探针12由切换模块15的接触式扫描开关控制单元151所控制在被测多铁性材料18表面进行接触式扫描,当磁电检测探针12与被测多铁性材料18接触时,由于多铁性材料特有的逆压电效应,被测多铁性材料18产生与激励电压同频的振动,该振动被磁电检测探针12探测并转化为电信号,并通过畴结构成像信号输出端口111输出,该输出信号与被测微区电畴结构信息直接相关。由此,实现了微区铁电畴结构成像信号的原位激发。 For the micro-area ferroelectric domain imaging signal, the physical process of its excitation can be expressed as follows: the signal generator 14 applies a periodic excitation voltage signal to act on the magnetoelectric detection probe 12 and the measured multiferroic material through the electric domain excitation signal transmission terminal 16 Between the lower surface of the material 18, the magnetoelectric detection probe 12 is controlled by the contact scanning switch control unit 151 of the switching module 15 to perform contact scanning on the surface of the multiferroic material 18 to be tested. When the magnetoelectric detection probe 12 and When the tested multiferroic material 18 is in contact, due to the unique inverse piezoelectric effect of the multiferroic material, the tested multiferroic material 18 generates a vibration with the same frequency as the excitation voltage, and the vibration is detected and converted by the magnetoelectric detection probe 12 It is an electrical signal, which is output through the domain structure imaging signal output port 111, and the output signal is directly related to the electrical domain structure information of the measured micro-region. Thus, the in-situ excitation of the imaging signal of the micro-region ferroelectric domain structure is realized.

对于微区铁磁畴成像信号,其激发的物理过程可表述如下:当信号发生器14施加的周期性激励电压信号通过磁畴激励信号传输端17作用于压电双晶片13时,由于压电效应导致磁电检测探针12产生振动。磁电检测探针12由切换模块15的非接触式扫描开关控制单元152所控制在被测多铁性材料18表面进行非接触式扫描,当磁电检测探针12与被测多铁性材料18接近至一定距离时,会产生长程的磁性相互作用力,该作用力梯度将引起磁电检测探针12的振动状态发生变化,该振动被转化为电信号,并通过畴结构成像信号输出端口111输出,该输出信号与被测微区磁畴结构信息直接相关。由此,亦实现了微区铁磁畴结构成像信号的原位激发。 For micro-area ferromagnetic domain imaging signals, the physical process of its excitation can be expressed as follows: when the periodic excitation voltage signal applied by the signal generator 14 acts on the piezoelectric bimorph 13 through the magnetic domain excitation signal transmission end 17, due to the piezoelectric The effect causes the magnetoelectric detection probe 12 to vibrate. The magnetoelectric detection probe 12 is controlled by the non-contact scanning switch control unit 152 of the switching module 15 to perform non-contact scanning on the surface of the multiferroic material 18 to be tested. When the magnetoelectric detection probe 12 and the multiferroic material to be tested When 18 approaches to a certain distance, a long-range magnetic interaction force will be generated, and the force gradient will cause the vibration state of the magnetoelectric detection probe 12 to change, and the vibration is converted into an electrical signal, which is transmitted through the domain structure imaging signal output port 111 output, the output signal is directly related to the magnetic domain structure information of the measured micro-region. Thus, the in-situ excitation of the imaging signal of the micro-region ferromagnetic domain structure is also realized.

另外,如图3所示,本发明的表征装置中的原位检测平台2包括:用于接收上述原子力显微镜原位激励平台1输出的畴结构成像信号并提高该信号幅度的信号处理单元。在图3所示的实施形态中,该信号处理单元为可提高畴结构成像信号幅度,并具有保护功能,防止信号畸变时产生过载而损坏下一级电路和仪器的前端回路处理模块21。 In addition, as shown in FIG. 3 , the in-situ detection platform 2 in the characterization device of the present invention includes: a signal processing unit for receiving the domain structure imaging signal output by the above-mentioned atomic force microscope in-situ excitation platform 1 and increasing the signal amplitude. In the embodiment shown in FIG. 3 , the signal processing unit is a front-end loop processing module 21 that can increase the domain structure imaging signal amplitude and has a protection function to prevent overloading of the next-level circuits and instruments caused by signal distortion.

且该原位检测平台2还可包括连接在前端回路处理模块21的输出端的锁相放大器单元。在图3所示的实施形态中,该锁相放大器单元可以是具有测量灵敏度高、抗干扰性强、具有线性、非线性检测功能、满足系统工作要求等优点,可实现微弱畴结构信号的高灵敏度检测的高灵敏度锁相放大器22。 Moreover, the in-situ detection platform 2 may also include a lock-in amplifier unit connected to the output end of the front-end loop processing module 21 . In the embodiment shown in Figure 3, the lock-in amplifier unit can have the advantages of high measurement sensitivity, strong anti-interference, linear and nonlinear detection functions, and meet the requirements of the system, and can realize high detection of weak domain structure signals. High sensitivity lock-in amplifier 22 for sensitivity detection.

此外,该原位检测平台2还可包括对锁相放大器单元输出的信号进行数据处理并显示多铁性畴结构的原位成像表征结果的处理及显示单元。该处理及显示单元23可包括基于计算机平台的信号处理模块和结果显示模块,用于实时显示微区铁电畴、铁磁畴结构的成像结果。 In addition, the in-situ detection platform 2 may also include a processing and display unit for performing data processing on the signal output by the lock-in amplifier unit and displaying the in-situ imaging characterization result of the multiferroic domain structure. The processing and display unit 23 may include a signal processing module and a result display module based on a computer platform, which are used to display the imaging results of micro-region ferroelectric domains and ferromagnetic domain structures in real time.

通过如上设置的原位检测平台2可以有效地实现微弱铁电畴和铁磁畴成像信号的原位实时检测、处理和显示微区铁电畴、铁磁畴等多铁性畴结构的原位表征结果。 The in-situ detection platform 2 set up above can effectively realize in-situ real-time detection, processing and display of micro-region ferroelectric domains, ferromagnetic domains and other multiferroic domain structures Characterize the results.

以下通过具体的实施例更详细说明本发明的多铁性材料纳米尺度畴结构的原位集成表征装置的工作过程及其表征结果。 The working process and characterization results of the in-situ integrated characterization device for multiferroic material nanoscale domain structure of the present invention will be described in detail below through specific examples.

实施例1 Example 1

采用根据本发明的多铁性材料纳米尺度畴结构的原位集成表征装置对铁酸铋多铁性材料(以下称为被测多铁性材料)的微区铁电畴、铁磁畴结构进行了表征,图4显示了测试结果。其中图4(a)是该被测多铁性材料的表面形貌的AFM像,图4(b)是采用根据本发明的表征装置在该被测多铁性材料的对应区域原位获得的铁电畴结构的图像,图4(c)是采用根据本发明的表征装置在该被测多铁性材料的对应区域原位获得的铁磁畴结构的图像,以及图4(d)是采用根据本发明的表征装置在具有不同自发极化取向的微区进行压电响应测试而获得的微区压电响应回线。 Using the in-situ integrated characterization device for the nanoscale domain structure of multiferroic materials according to the present invention, the micro-area ferroelectric domain and ferromagnetic domain structure of bismuth ferrite multiferroic materials (hereinafter referred to as tested multiferroic materials) For characterization, Figure 4 shows the test results. Wherein Fig. 4(a) is an AFM image of the surface topography of the tested multiferroic material, and Fig. 4(b) is obtained in situ in the corresponding region of the tested multiferroic material by using the characterization device according to the present invention The image of the ferroelectric domain structure, Figure 4(c) is the image of the ferromagnetic domain structure obtained in situ in the corresponding region of the measured multiferroic material using the characterization device according to the present invention, and Figure 4(d) is the image of the ferromagnetic domain structure using According to the characterization device of the present invention, micro-area piezoelectric response loops obtained by performing piezoelectric response tests on micro-areas with different spontaneous polarization orientations.

显然,图4(a)与图4(b)、图4(c)差异很大。表面形貌像图4(a)仅显示了被测多铁性材料表面晶粒晶界信息,而电畴结构像图4(b)清晰显示出电畴结构分布,图中的亮、暗衬度显示了电畴结构的不同自发极化取向,磁畴结构像图4(c)清晰显示出磁畴结构分布,图中的亮、暗衬度显示了磁畴结构的不同自发极化取向。 Obviously, Figure 4(a) is very different from Figure 4(b) and Figure 4(c). The surface topography image in Figure 4(a) only shows the grain boundary information on the surface of the tested multiferroic material, while the electrical domain structure image in Figure 4(b) clearly shows the distribution of the electrical domain structure, the bright and dark linings in the figure The degrees show the different spontaneous polarization orientations of the electric domain structure, and the magnetic domain structure as shown in Figure 4(c) clearly shows the distribution of the magnetic domain structure. The bright and dark contrasts in the figure show the different spontaneous polarization orientations of the magnetic domain structure.

上述结果表明本发明的多铁性材料纳米尺度畴结构的原位集成表征装置在该被测多铁性材料上成功实现了铁电畴、铁磁畴的原位成像。在对多铁性畴结构进行原位成像的同时,在铁电畴成像模式下,在探针与被测多铁性材料某局域相接触时通过对探针施加直流偏压并检测探针的纵向位移,即可实现被测多铁性材料微区压电性能的定量表征。图4(d)中两条压电响应回线分别对应图4(b)所标示的“A”、“B”区域,显示了具有不同自发极化取向的电畴结构其纳米尺度局域压电性能的差异。上述结果表明本发明的多铁性材料纳米尺度畴结构的原位集成表征装置在定量表征方面的可行性。 The above results show that the in-situ integrated characterization device for the nanoscale domain structure of multiferroic materials of the present invention successfully realizes in-situ imaging of ferroelectric domains and ferromagnetic domains on the tested multiferroic materials. While performing in-situ imaging of the multiferroic domain structure, in the ferroelectric domain imaging mode, when the probe is in contact with a certain region of the multiferroic material to be tested, by applying a DC bias to the probe and detecting the The longitudinal displacement of the measured multiferroic material can realize the quantitative characterization of the piezoelectric properties of the micro-area. The two piezoelectric response loops in Figure 4(d) correspond to the "A" and "B" regions marked in Figure 4(b), respectively, showing the nanoscale local pressure of the electric domain structure with different spontaneous polarization orientations. difference in electrical properties. The above results show the feasibility of the in-situ integrated characterization device for the nanoscale domain structure of multiferroic materials of the present invention in terms of quantitative characterization.

上述实施例表明了基于原子力显微镜所建立的纳米尺度多铁性畴结构原位集成表征技术解决了多铁性材料纳米尺度多铁性畴结构(铁电畴、铁磁畴)成像信号原位激发及同步检测这一重大技术难题。该新型纳米表征技术实现了纳米尺度多铁性畴结构的原位激发、原位表征,拓展了现有商用原子力显微镜所不具有的纳米多铁性原位评价功能,为深入研究纳米多铁性材料的磁电耦合理论,纳米多铁性材料及其器件的深入发展提供了重要的原位、定量、纳米表征方法。 The above examples show that the in-situ integrated characterization technology of nanoscale multiferroic domain structures based on atomic force microscopy solves the problem of in-situ excitation of imaging signals of nanoscale multiferroic domain structures (ferroelectric domains and ferromagnetic domains) in multiferroic materials. And the major technical problem of simultaneous detection. This new nano-characterization technology realizes the in-situ excitation and in-situ characterization of nanoscale multiferroic domain structures, and expands the in-situ evaluation function of nano-multiferroics that is not available in existing commercial atomic force microscopes. The magnetoelectric coupling theory of materials, the in-depth development of nano-multiferroic materials and their devices provide important in-situ, quantitative and nano-characterization methods.

综上所述,本发明将原子力显微镜纳米检测功能、多铁性材料的逆压电效应以及探针与多铁性被测材料的磁力相互作用相结合,建立起基于商用原子力显微镜并兼具纳米级电、磁激励和检测特性的纳米原位评价装置,该新型纳米压磁集成表征装置不仅具有纳米多铁性畴结构成像信号原位激发、原位表征等独特功能,而且具有高分辨率、高灵敏度、高信噪比等优点,且其结构简单、兼容性强,适宜广泛推广和应用。由此,本发明解决了多铁性材料中纳米铁电畴、铁磁畴的原位激发和检测这一重大技术难题,可在纳米材料、功能材料等战略新兴材料及其产业中获得重要应用。 In summary, the present invention combines the nano-detection function of the atomic force microscope, the inverse piezoelectric effect of the multiferroic material, and the magnetic interaction between the probe and the multiferroic material to be tested, and establishes a commercial atomic force microscope based on a nanometer Nano-scale in-situ evaluation device for electrical, magnetic excitation and detection characteristics. This new nano-piezomagnetic integrated characterization device not only has unique functions such as in-situ excitation and in-situ characterization of nano-multiferroic domain structure imaging signals, but also has high resolution, It has the advantages of high sensitivity, high signal-to-noise ratio, etc., and its simple structure and strong compatibility are suitable for wide promotion and application. Therefore, the present invention solves the major technical problem of in-situ excitation and detection of nano-ferroelectric domains and ferromagnetic domains in multiferroic materials, and can be used in strategic emerging materials such as nano-materials and functional materials and their industries. .

在不脱离本发明的基本特征的宗旨下,本发明可体现为多种形式,因此本发明中的实施形态是用于说明而非限制,由于本发明的范围由权利要求限定而非由说明书限定,而且落在权利要求界定的范围,或其界定的范围的等价范围内的所有变化都应理解为包括在权利要求书中。 The present invention can be embodied in various forms without departing from the essential characteristics of the present invention, so the embodiments in the present invention are for illustration rather than limitation, because the scope of the present invention is defined by the claims rather than by the description , and all changes within the range defined in the claims, or within the range equivalent to the range defined in the claims, should be construed as being included in the claims.

Claims (8)

1. the integrated characterization apparatus of the original position of multi-ferroic material nanoscale domain structure, is characterized in that, comprising:
Excite so that the point of excitation of this tested multi-ferroic material produces the atomic force microscope original position stimulating platform of domain structure imaging signal for tested multi-ferroic material being carried out to the original position of multiferroic domain structure;
Described domain structure imaging signal is carried out to the in situ detection platform of the in situ imaging characterization result of original position detection in real time and data processing the described multiferroic domain structure of demonstration in real time.
2. the integrated characterization apparatus of original position of multi-ferroic material nanoscale according to claim 1 domain structure, is characterized in that, described atomic force microscope original position stimulating platform comprises:
Possesses the atomic force microscope platform of the magnetic bases of the described tested multi-ferroic material of mounting;
For described tested multi-ferroic material being scanned to detect the probe of the described domain structure imaging signal that its point of excitation produces;
For generation of the signal generating unit putting on respectively on described magnetic bases and probe to carry out the pumping signal that described original position excites;
For by from described probe in detecting to described domain structure imaging signal be sent to the signal output unit of described in situ detection platform.
3. the integrated characterization apparatus of original position of multi-ferroic material nanoscale according to claim 2 domain structure, is characterized in that, described atomic force microscope original position stimulating platform also comprises:
The handover module that the scan pattern of described probe is switched between contact type scanning pattern and non-contact scanning pattern.
4. the integrated characterization apparatus of original position of multi-ferroic material nanoscale according to claim 3 domain structure, is characterized in that, described handover module comprises:
In magnetic domain imaging process, close the contact type scanning switch control unit of described contact type scanning pattern for opening described contact type scanning pattern in electricdomain imaging process; With
In described electricdomain imaging process, close the non-contact scanning switch control unit of described non-contact scanning pattern for opening described non-contact scanning pattern in described magnetic domain imaging process.
5. the integrated characterization apparatus of original position of multi-ferroic material nanoscale according to claim 4 domain structure, is characterized in that, also comprises the piezoelectric bimorph of being located between described signal generating unit and described probe.
6. the integrated characterization apparatus of original position of multi-ferroic material nanoscale according to claim 3 domain structure, it is characterized in that, described probe is magnetoelectricity detector probe, under described contact type scanning pattern, described probe is 0.1-2nm as the micro-cantilever deformation quantity of feedback parameters, with the contact area diameter of described tested multi-ferroic material interaction be 10-20nm; Under described non-contact scanning pattern, the distance between described probe and described tested multi-ferroic material is 50nm-150nm.
7. the integrated characterization apparatus of original position of multi-ferroic material nanoscale according to claim 6 domain structure, is characterized in that, the operating frequency range of described probe is 2kHz-70kHz.
8. according to the integrated characterization apparatus of original position of the multi-ferroic material nanoscale domain structure described in any one in claim 1 to 7, it is characterized in that, described in situ detection platform comprises:
The signal processing unit that is used for receiving the described domain structure imaging signal of described atomic force microscope original position stimulating platform output and improves this signal amplitude;
The lock-in amplifier unit that the signal of described signal processing unit output is detected;
The signal that described lock-in amplifier unit is exported carries out data processing and shows processing and the display unit of the in situ imaging characterization result of described multiferroic domain structure.
CN201410151249.2A 2014-04-16 2014-04-16 The original position of multi-ferroic material nanoscale domain structure integrates characterization apparatus Expired - Fee Related CN103901234B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410151249.2A CN103901234B (en) 2014-04-16 2014-04-16 The original position of multi-ferroic material nanoscale domain structure integrates characterization apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410151249.2A CN103901234B (en) 2014-04-16 2014-04-16 The original position of multi-ferroic material nanoscale domain structure integrates characterization apparatus

Publications (2)

Publication Number Publication Date
CN103901234A true CN103901234A (en) 2014-07-02
CN103901234B CN103901234B (en) 2018-01-09

Family

ID=50992691

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410151249.2A Expired - Fee Related CN103901234B (en) 2014-04-16 2014-04-16 The original position of multi-ferroic material nanoscale domain structure integrates characterization apparatus

Country Status (1)

Country Link
CN (1) CN103901234B (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104880577A (en) * 2015-05-22 2015-09-02 重庆科技学院 Device and method for in-situ observation of domain structure of ferroelectric material before and after electric field action
CN105137125A (en) * 2015-08-31 2015-12-09 电子科技大学 Double-frequency multichannel synchronization detection method for electric domain imaging
CN105510637A (en) * 2014-09-24 2016-04-20 中国科学院宁波材料技术与工程研究所 Micro-nano thermoelectric in-situ detection device and method based on scanning probe microscope
CN105510642A (en) * 2014-09-24 2016-04-20 中国科学院宁波材料技术与工程研究所 Nanometer magnetic-thermal in-situ detection apparatus based on scanning probe microscope, and detection method thereof
CN110907489A (en) * 2019-11-13 2020-03-24 中国科学院上海硅酸盐研究所 Nanoscale thermal conductivity-electric domain in-situ characterization device based on atomic force microscope
CN113092824A (en) * 2020-05-05 2021-07-09 台湾积体电路制造股份有限公司 Method for detecting ferroelectric signals and piezoelectric force microscope device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5856617A (en) * 1997-09-02 1999-01-05 International Business Machines Corporation Atomic force microscope system with cantilever having unbiased spin valve magnetoresistive strain gauge
WO2004102582A1 (en) * 2003-03-05 2004-11-25 University Of Florida Carbon nanotube-based probes, related devices and methods of forming the same
CN102107853A (en) * 2009-12-25 2011-06-29 中国科学院上海硅酸盐研究所 Etching device of micro-nano ferroelectric domain structure based on atomic force microscope acoustic microscopy system
CN102692524A (en) * 2012-06-20 2012-09-26 中国科学院上海硅酸盐研究所 Nano thermoelectric seebeck coefficient in-situ quantitative characterization device based on atomic force microscope

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5856617A (en) * 1997-09-02 1999-01-05 International Business Machines Corporation Atomic force microscope system with cantilever having unbiased spin valve magnetoresistive strain gauge
WO2004102582A1 (en) * 2003-03-05 2004-11-25 University Of Florida Carbon nanotube-based probes, related devices and methods of forming the same
CN102107853A (en) * 2009-12-25 2011-06-29 中国科学院上海硅酸盐研究所 Etching device of micro-nano ferroelectric domain structure based on atomic force microscope acoustic microscopy system
CN102692524A (en) * 2012-06-20 2012-09-26 中国科学院上海硅酸盐研究所 Nano thermoelectric seebeck coefficient in-situ quantitative characterization device based on atomic force microscope

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
互联网: ""原子力扫描探针显微镜"", 《原子力扫描探针显微镜 HTTP://CAM.HIT.EDU.CN/D1/90/C4672A119184/PAGE.HTM》 *
刘迎春: ""多铁性BiFeO3陶瓷中的应力与铁电铁磁畴相互作用机制研究"", 《中国优秀硕士学位论文全文数据库 工程科技I辑》, no. 3, 15 March 2014 (2014-03-15), pages 015 - 166 *
刘黎明等: ""PMN-PT单晶铁电畴的扫描探针显微术"", 《人工晶体学报》, vol. 39, 30 June 2010 (2010-06-30), pages 85 - 89 *

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105510637A (en) * 2014-09-24 2016-04-20 中国科学院宁波材料技术与工程研究所 Micro-nano thermoelectric in-situ detection device and method based on scanning probe microscope
CN105510642A (en) * 2014-09-24 2016-04-20 中国科学院宁波材料技术与工程研究所 Nanometer magnetic-thermal in-situ detection apparatus based on scanning probe microscope, and detection method thereof
CN105510642B (en) * 2014-09-24 2018-07-03 中国科学院宁波材料技术与工程研究所 Nano magnetic heating in-situ detector and detection method based on scanning probe microscopy
CN105510637B (en) * 2014-09-24 2018-10-19 中国科学院宁波材料技术与工程研究所 Micro-/ nano thermoelectricity in-situ detector based on scanning probe microscopy and detection method
CN104880577A (en) * 2015-05-22 2015-09-02 重庆科技学院 Device and method for in-situ observation of domain structure of ferroelectric material before and after electric field action
CN104880577B (en) * 2015-05-22 2018-09-14 重庆科技学院 The device and method of home position observation ferroelectric material domain structure before and after electric field action
CN105137125A (en) * 2015-08-31 2015-12-09 电子科技大学 Double-frequency multichannel synchronization detection method for electric domain imaging
CN105137125B (en) * 2015-08-31 2018-11-13 电子科技大学 A kind of double frequency multi-channel synchronous detection method for electricdomain imaging
CN110907489A (en) * 2019-11-13 2020-03-24 中国科学院上海硅酸盐研究所 Nanoscale thermal conductivity-electric domain in-situ characterization device based on atomic force microscope
CN113092824A (en) * 2020-05-05 2021-07-09 台湾积体电路制造股份有限公司 Method for detecting ferroelectric signals and piezoelectric force microscope device

Also Published As

Publication number Publication date
CN103901234B (en) 2018-01-09

Similar Documents

Publication Publication Date Title
CN103901234B (en) The original position of multi-ferroic material nanoscale domain structure integrates characterization apparatus
CN105137125B (en) A kind of double frequency multi-channel synchronous detection method for electricdomain imaging
US5319977A (en) Near field acoustic ultrasonic microscope system and method
Karatay et al. Fast time-resolved electrostatic force microscopy: Achieving sub-cycle time resolution
CN107430148B (en) Using scanning probe microscopy to the method for characteristic imaging
WO2013189112A1 (en) Nano-thermoelectric multi-parameter in-situ quantitative characterization device based on atomic force microscope
JP2012053020A (en) Magnetic field observation device and magnetic field observation method
WO2015184761A1 (en) Ultrahigh resolution magnetic resonance imaging method and apparatus
CN104849497A (en) Device for measuring subsurface structure characteristic and micro-area wideband dielectric property
CN103336151A (en) Magnetic microscope and measurement method thereof
Chen et al. High sensitivity piezomagnetic force microscopy for quantitative probing of magnetic materials at the nanoscale
CN105467160B (en) A kind of rf probe atomic force microscopy system
JP2012184959A (en) Displacement detection mechanism and scanning probe microscope having the same
La Rosa et al. Whispering-gallery acoustic sensing: Characterization of mesoscopic films and scanning probe microscopy applications
Impundu et al. Local magnetic characterization of 1D and 2D carbon nanomaterials with magnetic force microscopy techniques: a review
CN118112099B (en) Non-tip-sample surface-dependent subsurface feature super-resolution nondestructive imaging method
Zhou et al. Mapping nanoscale domain patterns in ferroelectric ceramics by atomic force acoustic microscopy and piezoresponse force microscopy
Flores-Ruiz et al. An alternative scheme to measure single-point hysteresis loops using piezoresponse force microscopy
US20090242764A1 (en) Spin-torque probe microscope
Zeng et al. Emerging multi-frequency surface strain force microscopy
Murillo‐Bracamontes et al. Contact resonance frequencies and their harmonics in scanning probe microscopy
CN105699705A (en) A measuring apparatus for nanometer magnetic materials and a method thereof
Boucher et al. A non-perturbative, low-noise surface coating for sensitive force-gradient detection of electron spin resonance in thin films
CN114942339A (en) Micro-area carrier concentration measurement method based on non-contact atomic force microscope
CN110907489A (en) Nanoscale thermal conductivity-electric domain in-situ characterization device based on atomic force microscope

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right

Effective date of registration: 20211220

Address after: 215400 No.6 Liangfu Road, Taicang City, Suzhou City, Jiangsu Province

Patentee after: Jiangsu Institute of advanced inorganic materials

Address before: 200050 No. 1295 Dingxi Road, Shanghai, Changning District

Patentee before: SHANGHAI INSTITUTE OF CERAMICS, CHINESE ACADEMY OF SCIENCES

TR01 Transfer of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20180109