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CN103805949A - Molybdenum disulfide self-lubricating composite coating and piston ring coated with coating - Google Patents

Molybdenum disulfide self-lubricating composite coating and piston ring coated with coating Download PDF

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CN103805949A
CN103805949A CN201410052608.9A CN201410052608A CN103805949A CN 103805949 A CN103805949 A CN 103805949A CN 201410052608 A CN201410052608 A CN 201410052608A CN 103805949 A CN103805949 A CN 103805949A
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molybdenum
molybdenum disulfide
piston ring
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CN103805949B (en
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田灿鑫
万强
杨兵
付德君
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Wuhan University WHU
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Abstract

本发明公开了一种二硫化钼自润滑复合涂层及覆有该复合涂层的活塞环,该二硫化钼自润滑复合涂层包括覆于活塞环基体上的氮化钼基础镀层和覆于氮化钼基础镀层上的二硫化钼自润滑层,所述的二硫化钼自润滑层为硫含量沿厚度方向连续变化的梯度层,且梯度层与氮化钼基础镀层接触面的硫含量最小。本发明二硫化钼自润滑复合涂层具有合适硬度、低自润滑摩擦系数和强附着力,应用了该二硫化钼自润滑复合涂层的活塞环在表面耐磨自润滑方面表现出很大的优势,具有良好的耐磨性和自润滑性,可有效解决活塞环和气缸间的摩擦磨损问题。

The invention discloses a molybdenum disulfide self-lubricating composite coating and a piston ring covered with the composite coating. Molybdenum disulfide self-lubricating layer on the molybdenum nitride basic coating, the molybdenum disulfide self-lubricating layer is a gradient layer with sulfur content continuously changing along the thickness direction, and the sulfur content of the contact surface between the gradient layer and the molybdenum nitride basic coating is the smallest . The molybdenum disulfide self-lubricating composite coating of the present invention has suitable hardness, low self-lubricating friction coefficient and strong adhesion, and the piston ring applied with the molybdenum disulfide self-lubricating composite coating shows great performance in surface wear resistance and self-lubricating Advantages, good wear resistance and self-lubrication, can effectively solve the problem of friction and wear between the piston ring and the cylinder.

Description

二硫化钼自润滑复合涂层及覆有该复合涂层的活塞环Molybdenum disulfide self-lubricating composite coating and piston ring covered with the composite coating

  the

技术领域 technical field

本发明属于薄膜材料技术领域,涉及一种二硫化钼自润滑复合涂层及覆有该复合涂层的活塞环。 The invention belongs to the technical field of thin film materials, and relates to a molybdenum disulfide self-lubricating composite coating and a piston ring covered with the composite coating.

背景技术 Background technique

活塞环作为燃油发动机的关键零部件,和活塞、气缸共同构成摩擦系统,活塞环与气缸壁的摩擦是影响发动机摩擦损失的主要因素之一,因此对活塞环的耐磨性要求比较高。特别是新的欧IV排放标准对活塞环的耐磨性提出了更高的要求。 As a key component of a fuel engine, the piston ring constitutes a friction system together with the piston and cylinder. The friction between the piston ring and the cylinder wall is one of the main factors affecting the friction loss of the engine. Therefore, the wear resistance of the piston ring is relatively high. In particular, the new Euro IV emission standards put forward higher requirements on the wear resistance of piston rings.

目前一般通过在活塞环上涂覆耐磨图层的方法来提高活塞环的耐磨性。传统喷涂工艺、电刷镀等不适合活塞环镀层,电镀铬处理方法存在污染环境、镀铬层蹭性能不能满足新排放标准等问题。在活塞环上采用物理气相沉积方法(PVD)涂镀氮化铬耐磨涂层可有效提高活塞环的耐磨性能,但是PVD氮化铬涂层摩擦系数偏高,摩擦系数大于0.4。 At present, the wear resistance of the piston ring is generally improved by coating the wear-resistant layer on the piston ring. The traditional spraying process and electric brush plating are not suitable for piston ring coating, and the electrochrome plating treatment method has problems such as polluting the environment and the rubbing performance of the chrome plating layer cannot meet the new emission standards. Coating chromium nitride wear-resistant coating on the piston ring by physical vapor deposition (PVD) can effectively improve the wear resistance of the piston ring, but the friction coefficient of the PVD chromium nitride coating is relatively high, and the friction coefficient is greater than 0.4.

钼系化合物润滑材料是一种摩擦学性能优良的润滑材料,被广泛应用于航空、航天、航海、机械等领域。二硫化钼能明显改善润滑脂的承载能力和抗磨性能,在高负荷下的抗磨效果尤为明显。近年来随着涂层技术发展,科研人员开发了二硫化钼自润滑涂层,二硫化钼固体自润滑涂层具有较高的承载能力,干摩擦条件下适用于低速、重载工况,在高温条件下其性能指标优于石墨等固体润滑剂。将二硫化钼自润滑涂层涂覆于活塞环表面将大大提高活塞环的耐磨性能,从而提高活塞环使用寿命。 Molybdenum compound lubricating material is a kind of lubricating material with excellent tribological properties, which is widely used in aviation, aerospace, navigation, machinery and other fields. Molybdenum disulfide can significantly improve the bearing capacity and anti-wear performance of grease, especially under high load. In recent years, with the development of coating technology, researchers have developed molybdenum disulfide self-lubricating coatings. Molybdenum disulfide solid self-lubricating coatings have high load-bearing capacity and are suitable for low-speed and heavy-duty conditions under dry friction conditions. Under high temperature conditions, its performance index is better than solid lubricants such as graphite. Coating the molybdenum disulfide self-lubricating coating on the surface of the piston ring will greatly improve the wear resistance of the piston ring, thereby increasing the service life of the piston ring.

发明内容 Contents of the invention

针对现有技术存在的不足,本发明提供了一种二硫化钼自润滑复合涂层、覆有该复合涂层的活塞环及制备方法,以进一步提高活塞环的耐磨性能。 Aiming at the deficiencies in the prior art, the invention provides a molybdenum disulfide self-lubricating composite coating, a piston ring covered with the composite coating and a preparation method, so as to further improve the wear resistance of the piston ring.

本发明提供的一种二硫化钼自润滑复合涂层,包括覆于活塞环基体上的氮化钼基础镀层和覆于氮化钼基础镀层上的二硫化钼自润滑层,所述的二硫化钼自润滑层为硫含量沿厚度方向连续变化的梯度层,且梯度层与氮化钼基础镀层接触面的硫含量最小。  A molybdenum disulfide self-lubricating composite coating provided by the present invention comprises a molybdenum nitride basic coating on the piston ring base and a molybdenum disulfide self-lubricating layer on the molybdenum nitride basic coating. The molybdenum self-lubricating layer is a gradient layer whose sulfur content changes continuously along the thickness direction, and the sulfur content of the contact surface between the gradient layer and the molybdenum nitride basic coating is the smallest. the

上述氮化钼基础镀层厚度为3~6微米。 The molybdenum nitride basic coating has a thickness of 3-6 microns.

上述二硫化钼自润滑层厚度为0.3~4微米。 The molybdenum disulfide self-lubricating layer has a thickness of 0.3-4 microns.

将上述二硫化钼自润滑复合涂层涂覆于活塞环基体上,可显著提高活塞环的耐磨性性。所述的活塞环基体为钢质基体或铸铁基体。 Coating the molybdenum disulfide self-lubricating composite coating on the piston ring substrate can significantly improve the wear resistance of the piston ring. The piston ring matrix is a steel matrix or a cast iron matrix.

本发明还提供了在活塞环上沉积上述二硫化钼自润滑复合涂层的方法,在真空沉积腔内沉积二硫化钼自润滑复合涂层,包括:在氮气环境中电弧蒸发钼靶,在活塞环基体上沉积氮化钼基础镀层;在硫化氢气体环境中电弧蒸发钼靶,在氮化钼基础镀层上沉积二硫化钼自润滑层。 The present invention also provides a method for depositing the molybdenum disulfide self-lubricating composite coating on the piston ring. Depositing the molybdenum disulfide self-lubricating composite coating in the vacuum deposition chamber includes: arc evaporating the molybdenum target in a nitrogen environment, and depositing the molybdenum disulfide self-lubricating composite coating on the piston ring. The molybdenum nitride basic coating is deposited on the ring substrate; the molybdenum target is arc evaporated in the hydrogen sulfide gas environment, and the molybdenum disulfide self-lubricating layer is deposited on the molybdenum nitride basic coating.

作为优选,在活塞环基体上沉积氮化钼基础镀层前,对活塞环基体进行等离子体刻蚀,以去除活塞环基体表面污染物。 Preferably, before depositing the molybdenum nitride basic coating on the piston ring base, the piston ring base is subjected to plasma etching, so as to remove the surface pollutants of the piston ring base.

上述方法的一种具体实施方式是: A kind of specific implementation manner of above-mentioned method is:

采用电弧蒸发在活塞环基体上沉积氮化钼基础镀层和在氮化钼基础镀层上沉积二硫化钼自润滑层,其中,在活塞环基体上沉积氮化钼基础镀层过程中,沉积腔真空度为0.5~3.0Pa,沉积腔温度为200~300℃,偏压条件为-40~-400V;在氮化钼基础镀层上沉积二硫化钼自润滑层过程中,沉积腔真空度为0.5~5.0Pa,沉积腔温度为200~400℃,偏压条件为-40~-200V。 The molybdenum nitride basic coating and the molybdenum disulfide self-lubricating layer are deposited on the molybdenum nitride basic coating by arc evaporation. In the process of depositing the molybdenum nitride basic coating on the piston ring substrate, the vacuum degree of the deposition chamber is 0.5~3.0Pa, the deposition chamber temperature is 200~300℃, and the bias condition is -40~-400V; during the process of depositing molybdenum disulfide self-lubricating layer on the molybdenum nitride basic coating, the vacuum degree of the deposition chamber is 0.5~5.0 Pa, the temperature of the deposition chamber is 200~400°C, and the bias condition is -40~-200V.

在氮化钼基础镀层上沉积二硫化钼自润滑层过程中,使硫化氢气体流量连续增加,以获得硫含量沿厚度方向连续变化的二硫化钼自润滑层。 During the process of depositing the molybdenum disulfide self-lubricating layer on the molybdenum nitride basic coating, the hydrogen sulfide gas flow rate is continuously increased to obtain the molybdenum disulfide self-lubricating layer whose sulfur content continuously changes along the thickness direction.

作为优选,在氮化钼基础镀层上沉积二硫化钼自润滑层过程中,通入的硫化氢气体为离化的硫化氢。获得离化的硫化氢的一种具体方法为:通过空心阴极离子源向真空腔通入硫化氢,以提高硫化氢气体的离化率,获得离化的硫化氢。 Preferably, during the process of depositing the molybdenum disulfide self-lubricating layer on the molybdenum nitride basic coating, the hydrogen sulfide gas introduced is ionized hydrogen sulfide. A specific method for obtaining ionized hydrogen sulfide is: introducing hydrogen sulfide into the vacuum chamber through a hollow cathode ion source to increase the ionization rate of hydrogen sulfide gas and obtain ionized hydrogen sulfide.

本发明方法通过电弧蒸发钼靶获得金属钼,在沉积腔内通入N2并对N2电离以获得氮元素;在沉积腔内通入H2S并对H2S电离以获得硫元素;并通过逐渐增加硫化氢气体流量,在氮化钼基础镀层上沉积由缺硫的二硫化钼层逐渐过度到纯二硫化钼层的梯度层,实现具有梯度结构的硫含量沿厚度方向连续变化的二硫化钼自润滑层。 The method of the present invention obtains metal molybdenum by arc evaporating a molybdenum target, passes N2 into the deposition chamber and ionizes N2 to obtain nitrogen element; passes H2S into the deposition chamber and ionizes H2S to obtain sulfur element; And by gradually increasing the hydrogen sulfide gas flow rate, a gradient layer from a sulfur-deficient molybdenum disulfide layer to a pure molybdenum disulfide layer is deposited on the molybdenum nitride basic coating layer, realizing the continuous change of sulfur content with a gradient structure along the thickness direction Molybdenum disulfide self-lubricating layer.

  the

本发明具有如下特点: The present invention has following characteristics:

氮化钼基础镀层可有效提高活塞环基体硬度,同时给予二硫化钼自润滑层以良好的支撑;梯度结构的二硫化钼自润滑层解决了氮化钼基础镀层到二硫化钼自润滑层过度的突兀,避免了应力过大造成的脱膜问题,具有良好的附着力,且有效增强了活塞环的耐磨性。 The molybdenum nitride basic coating can effectively improve the hardness of the piston ring substrate, and at the same time provide good support for the molybdenum disulfide self-lubricating layer; the gradient structure of the molybdenum disulfide self-lubricating layer solves the problem of excessive The abruptness avoids the stripping problem caused by excessive stress, has good adhesion, and effectively enhances the wear resistance of the piston ring.

与现有技术相比,本发明可带来如下有益效果: Compared with prior art, the present invention can bring following beneficial effect:

1、本发明二硫化钼自润滑复合涂层具有合适的硬度(硬度约2000Hv),不会因过高硬度对气缸造成不必要的刮擦损伤;具有低的自润滑摩擦系数(约0.3),从而可快速适应与气缸间的摩擦工况。 1. The molybdenum disulfide self-lubricating composite coating of the present invention has a suitable hardness (hardness about 2000Hv), and will not cause unnecessary scratch damage to the cylinder due to excessive hardness; it has a low self-lubricating friction coefficient (about 0.3), Therefore, it can quickly adapt to the frictional conditions with the cylinder.

2、涂覆有本发明二硫化钼自润滑复合涂层的活塞环在表面耐磨自润滑方面表现出很大的优势,具有良好的耐磨性和自润滑性,可有效解决活塞环和气缸间的摩擦磨损问题,可显著提高活塞环使用寿命,降低发动机运行故障发生率,提高发动机运行性能,从而带来巨大的经济效益和社会效益。 2. The piston ring coated with the molybdenum disulfide self-lubricating composite coating of the present invention has great advantages in surface wear resistance and self-lubrication, has good wear resistance and self-lubrication, and can effectively solve the problem of piston ring and cylinder The problem of friction and wear between them can significantly increase the service life of piston rings, reduce the incidence of engine failures, and improve engine performance, thereby bringing huge economic and social benefits.

附图说明 Description of drawings

图1为本发明二硫化钼自润滑复合涂层厚度测试光学显微镜图片; Fig. 1 is the optical microscope picture of the thickness test of molybdenum disulfide self-lubricating composite coating of the present invention;

图2为本发明二硫化钼自润滑复合涂层典型摩擦系数随摩擦时间的变化曲线;  Fig. 2 is the variation curve of the typical coefficient of friction of molybdenum disulfide self-lubricating composite coating of the present invention along with friction time;

图3为本发明二硫化钼自润滑复合涂层纳米硬度随压入深度的变化曲线图; Fig. 3 is the change graph of the nanohardness of molybdenum disulfide self-lubricating composite coating with the indentation depth of the present invention;

图中,1-活塞环基体;2-氮化钼基础镀层;3-二硫化钼自润滑层;4-二硫化钼自润滑复合涂层表面。 In the figure, 1-piston ring base; 2-molybdenum nitride basic coating; 3-molybdenum disulfide self-lubricating layer; 4-molybdenum disulfide self-lubricating composite coating surface.

具体实施方式 Detailed ways

下面结合具体实施例对本发明作进一步的说明,但本发明的保护内容不局限于以下实施例。 The present invention will be further described below in conjunction with specific examples, but the protection content of the present invention is not limited to the following examples.

下述实施例中,以电弧离子镀设备为沉积设备,并辅以空心阴极离子源离化硫化氢气体,靶材为钼靶,靶材和工件架设置于电弧离子镀设备的真空沉积腔内。 In the following embodiments, the arc ion plating equipment is used as the deposition equipment, supplemented by a hollow cathode ion source to ionize hydrogen sulfide gas, the target material is a molybdenum target, and the target material and the workpiece holder are arranged in the vacuum deposition chamber of the arc ion plating equipment .

实施例1 Example 1

清洗活塞环后装夹于工件架上,对真空腔体抽真空,当真空度高于5×10-3Pa时,开始加热除气,温度控制于200℃。当真空度5×10-3Pa时,通入Ar气,温度控制在200℃,开偏压电源,对活塞环基体进行等离子体刻蚀。 After the piston ring is cleaned, it is clamped on the workpiece frame, and the vacuum chamber is evacuated. When the vacuum degree is higher than 5×10 -3 Pa, start heating and degassing, and the temperature is controlled at 200°C. When the vacuum degree is 5×10 -3 Pa, Ar gas is introduced, the temperature is controlled at 200°C, and the bias voltage power supply is turned on to perform plasma etching on the piston ring substrate.

等离子体刻蚀结束后,将偏压调节为-40V,关闭Ar气通道,通入N2气,并将沉积腔真空度调节到0.5Pa,温度200℃,电弧蒸发钼靶,在活塞环基体上沉积厚度为3微米的氮化钼基础镀层。 After the plasma etching is finished, adjust the bias voltage to -40V, close the Ar gas channel, feed N2 gas, and adjust the vacuum degree of the deposition chamber to 0.5Pa, and the temperature is 200°C, and the arc evaporates the molybdenum target. Deposit a molybdenum nitride base coating with a thickness of 3 microns.

氮化钼基础镀层沉积结束后,关闭N2通道,通过空心阴极离子源通入H2S,将沉积腔真空度逐渐调节到0.5Pa,保持偏压-40V,温度200℃,连续增大通入H2S的流量,在氮化钼基础镀层上沉积厚度0.3微米的梯度结构的二硫化钼自润滑层。二硫化钼自润滑层沉积结束后,自然冷却至室温后取出活塞环,即得到沉积有二硫化钼自润滑复合涂层的活塞环。 After the molybdenum nitride basic coating is deposited, close the N 2 channel, feed H 2 S through the hollow cathode ion source, gradually adjust the vacuum degree of the deposition chamber to 0.5Pa, keep the bias voltage -40V, and the temperature 200°C, continuously increase the input The flow of H 2 S deposits a self-lubricating layer of molybdenum disulfide with a thickness of 0.3 microns on the molybdenum nitride basic coating. After the molybdenum disulfide self-lubricating layer is deposited, the piston ring is naturally cooled to room temperature and then the piston ring is taken out to obtain the piston ring deposited with the molybdenum disulfide self-lubricating composite coating.

  the

实施例2 Example 2

清洗活塞环后装夹于工件架上,对真空腔体抽真空,当真空度高于5×10-3Pa时,开始加热除气,温度控制于300℃。当真空度5×10-3Pa时,通入Ar气,温度控制在300℃,开偏压电源,对活塞环基体进行等离子体刻蚀。 After cleaning the piston ring, clamp it on the workpiece frame, and evacuate the vacuum chamber. When the vacuum degree is higher than 5×10 -3 Pa, start heating and degassing, and the temperature is controlled at 300°C. When the vacuum degree is 5×10 -3 Pa, Ar gas is introduced, the temperature is controlled at 300°C, and the bias voltage power supply is turned on to perform plasma etching on the piston ring base.

等离子体刻蚀结束后,将偏压调节为-400V,关闭Ar气通道,通入N2气,并将沉积腔真空度调节到3.0Pa,温度300℃,电弧蒸发钼靶,在活塞环基体上沉积厚度为6微米的氮化钼基础镀层。 After the plasma etching is finished, adjust the bias voltage to -400V, close the Ar gas channel, feed N2 gas, and adjust the vacuum degree of the deposition chamber to 3.0Pa, and the temperature is 300°C, and the arc evaporates the molybdenum target. A molybdenum nitride base coating with a thickness of 6 microns is deposited on it.

氮化钼基础镀层沉积结束后,关闭N2通道,通过空心阴极离子源通入H2S,将沉积腔真空度逐渐调节到5Pa,保持偏压-200V,温度300℃,连续增大通入H2S的流量,在氮化钼基础镀层上沉积厚度4微米的梯度结构的二硫化钼自润滑层。二硫化钼自润滑层沉积结束后,自然冷却至室温后取出活塞环,即得到沉积有二硫化钼自润滑复合涂层的活塞环。 After the molybdenum nitride basic coating is deposited, the N2 channel is closed, H2S is introduced through the hollow cathode ion source, the vacuum degree of the deposition chamber is gradually adjusted to 5Pa, the bias voltage is kept at -200V, the temperature is 300°C, and the H2S is continuously increased. The flow rate of 2 S was used to deposit a self-lubricating layer of molybdenum disulfide with a thickness of 4 microns on the molybdenum nitride basic coating. After the molybdenum disulfide self-lubricating layer is deposited, the piston ring is naturally cooled to room temperature and then the piston ring is taken out to obtain the piston ring deposited with the molybdenum disulfide self-lubricating composite coating.

  the

实施例3 Example 3

清洗活塞环后装夹于工件架上,对真空腔体抽真空,当真空度高于5×10-3Pa时,开始加热除气,温度控制于250℃。当真空度5×10-3Pa时,通入Ar气,温度控制在250℃,开偏压电源,对活塞环基体进行等离子体刻蚀。 After cleaning the piston ring, clamp it on the workpiece frame, and evacuate the vacuum chamber. When the vacuum degree is higher than 5×10 -3 Pa, start heating and degassing, and the temperature is controlled at 250°C. When the vacuum degree is 5×10 -3 Pa, Ar gas is introduced, the temperature is controlled at 250°C, and the bias voltage power supply is turned on to perform plasma etching on the piston ring substrate.

等离子体刻蚀结束后,将偏压调节为-200V,关闭Ar气通道,通入N2气,并将沉积腔真空度调节到2Pa,温度250℃,电弧蒸发钼靶,在活塞环基体上沉积厚度为3微米的氮化钼基础镀层。 After the plasma etching is finished, adjust the bias voltage to -200V, close the Ar gas channel, pass in N2 gas, and adjust the vacuum degree of the deposition chamber to 2Pa, and the temperature is 250°C, and the arc evaporates the molybdenum target on the piston ring substrate Deposit a base layer of molybdenum nitride to a thickness of 3 microns.

氮化钼基础镀层沉积结束后,关闭N2通道,通过空心阴极离子源通入H2S,将沉积腔真空度逐渐调节到2.0Pa,保持偏压-200V,温度250℃,连续增大通入H2S的流量,在氮化钼基础镀层上沉积厚度2微米的梯度结构的二硫化钼自润滑层。二硫化钼自润滑层沉积结束后,自然冷却至室温后取出活塞环,即得到沉积有二硫化钼自润滑复合涂层的活塞环。 After the molybdenum nitride basic coating is deposited, close the N 2 channel, feed H 2 S through the hollow cathode ion source, gradually adjust the vacuum degree of the deposition chamber to 2.0Pa, keep the bias voltage -200V, and the temperature 250°C, continuously increase the input The flow of H 2 S deposits a self-lubricating layer of molybdenum disulfide with a gradient structure of 2 microns in thickness on the molybdenum nitride basic coating. After the molybdenum disulfide self-lubricating layer is deposited, the piston ring is naturally cooled to room temperature and then the piston ring is taken out to obtain the piston ring deposited with the molybdenum disulfide self-lubricating composite coating.

  the

采用销盘摩擦磨损试验机测试二硫化钼自润滑复合涂层摩擦系数及其随摩擦时间的变化曲线,见图2,从图中可以看出二硫化钼自润滑复合涂层摩擦系数约0.3。采用纳米硬度计测量二硫化钼自润滑复合涂层的纳米硬度及其随压入深度的变化曲线,见图3,从图中可看出二硫化钼自润滑复合涂层纳米硬度约22GPa。 The friction coefficient of the molybdenum disulfide self-lubricating composite coating and its variation curve with friction time are tested by a pin-on-disk friction and wear testing machine, as shown in Figure 2. It can be seen from the figure that the friction coefficient of the molybdenum disulfide self-lubricating composite coating is about 0.3. The nanohardness of the molybdenum disulfide self-lubricating composite coating and its change curve with the indentation depth were measured by a nanohardness meter, as shown in Figure 3. It can be seen from the figure that the nanohardness of the molybdenum disulfide self-lubricating composite coating is about 22GPa.

Claims (10)

1.一种二硫化钼自润滑复合涂层,其特征在于: 1. A molybdenum disulfide self-lubricating composite coating, characterized in that: 包括覆于活塞环基体上的氮化钼基础镀层和覆于氮化钼基础镀层上的二硫化钼自润滑层,所述的二硫化钼自润滑层为硫含量沿厚度方向连续变化的梯度层,且梯度层与氮化钼基础镀层接触面的硫含量最小。 It includes a molybdenum nitride basic coating on the piston ring base and a molybdenum disulfide self-lubricating layer on the molybdenum nitride basic coating. The molybdenum disulfide self-lubricating layer is a gradient layer with sulfur content continuously changing along the thickness direction , and the sulfur content of the interface between the gradient layer and the molybdenum nitride base coating is the smallest. 2.如权利要求1所述的二硫化钼自润滑复合涂层,其特征在于: 2. Molybdenum disulfide self-lubricating composite coating as claimed in claim 1, is characterized in that: 所述的氮化钼基础镀层厚度为3~6微米。 The thickness of the molybdenum nitride basic coating is 3-6 microns. 3.如权利要求1所述的二硫化钼自润滑复合涂层,其特征在于: 3. Molybdenum disulfide self-lubricating composite coating as claimed in claim 1, is characterized in that: 所述的二硫化钼自润滑层厚度为0.3~4微米。 The thickness of the molybdenum disulfide self-lubricating layer is 0.3-4 microns. 4.一种活塞环,其特征在于: 4. A piston ring, characterized in that: 涂覆有权利要求1所述的二硫化钼自润滑复合涂层。 Coated with the molybdenum disulfide self-lubricating composite coating according to claim 1. 5.如权利要求4所述的一种活塞环,其特征在于: 5. A piston ring according to claim 4, characterized in that: 所述的活塞环基体为钢质基体或铸铁基体。 The piston ring matrix is a steel matrix or a cast iron matrix. 6.在活塞环上沉积二硫化钼自润滑复合涂层的方法,其特征在于,在真空沉积腔内沉积二硫化钼自润滑复合涂层,包括: 6. The method for depositing a molybdenum disulfide self-lubricating composite coating on a piston ring is characterized in that, depositing a molybdenum disulfide self-lubricating composite coating in a vacuum deposition chamber, comprising: 在氮气环境中电弧蒸发钼靶,在活塞环基体上沉积氮化钼基础镀层;在硫化氢气体环境中电弧蒸发钼靶,在氮化钼基础镀层上沉积二硫化钼自润滑层。 The molybdenum target is arc-evaporated in a nitrogen environment, and the molybdenum nitride basic coating is deposited on the piston ring substrate; the molybdenum target is arc-evaporated in a hydrogen sulfide gas environment, and a molybdenum disulfide self-lubricating layer is deposited on the molybdenum nitride basic coating. 7.如权利要求6所述的方法,其特征在于: 7. The method of claim 6, wherein: 在活塞环基体上沉积氮化钼基础镀层前,对活塞环基体进行等离子体刻蚀。 Before depositing the molybdenum nitride basic coating on the piston ring base, the piston ring base is plasma etched. 8.如权利要求6所述的方法,其特征在于: 8. The method of claim 6, wherein: 采用电弧蒸发在活塞环基体上沉积氮化钼基础镀层和在氮化钼基础镀层上沉积二硫化钼自润滑层,其中,在活塞环基体上沉积氮化钼基础镀层过程中,沉积腔真空度为0.5~3.0Pa,沉积腔温度为200~300℃,偏压条件为-40~-400V;在氮化钼基础镀层上沉积二硫化钼自润滑层过程中,沉积腔真空度为0.5~5.0Pa,沉积腔温度为200~400℃,偏压条件为-40~-200V。 The molybdenum nitride basic coating and the molybdenum disulfide self-lubricating layer are deposited on the molybdenum nitride basic coating by arc evaporation. In the process of depositing the molybdenum nitride basic coating on the piston ring substrate, the vacuum degree of the deposition chamber is 0.5~3.0Pa, the deposition chamber temperature is 200~300℃, and the bias condition is -40~-400V; during the process of depositing molybdenum disulfide self-lubricating layer on the molybdenum nitride basic coating, the vacuum degree of the deposition chamber is 0.5~5.0 Pa, the temperature of the deposition chamber is 200~400°C, and the bias condition is -40~-200V. 9.如权利要求6所述的方法,其特征在于: 9. The method of claim 6, wherein: 在氮化钼基础镀层上沉积二硫化钼自润滑层过程中,使硫化氢气体流量连续增加。 In the process of depositing molybdenum disulfide self-lubricating layer on the molybdenum nitride basic coating, the hydrogen sulfide gas flow rate is continuously increased. 10.如权利要求6所述的方法,其特征在于: 10. The method of claim 6, wherein: 通过空心阴极离子源向真空沉积腔内体通入硫化氢。 The hydrogen sulfide is fed into the inner body of the vacuum deposition chamber through the hollow cathode ion source.
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