CN103779489A - Light-emitting diode with light guiding hole structure - Google Patents
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Abstract
本发明公开了一种具有导光孔结构的发光二极管,所述发光二极管的发光芯片的上表面形成有导光层,所述导光层包括与发光芯片接触的下层薄膜、以及处于上方的上层薄膜,所述上层薄膜中贯穿形成有多个导光孔,每个导光孔中均填充有折射率大于上层薄膜、下层薄膜的光学材料填充。本发明提供的具有导光孔结构的发光二极管,利用光以一定角度射入光疏介质膜时,斜射光在导光层结构膜中发生多次全反射,最终经过导光孔均匀的从芯片正面透出,在不降低光强的前提下,解决了LED芯片正面光效较低的难题,提高了芯片封装亮度。
The invention discloses a light-emitting diode with a light-guiding hole structure. A light-guiding layer is formed on the upper surface of a light-emitting chip of the light-emitting diode, and the light-guiding layer includes a lower film in contact with the light-emitting chip and an upper layer above A film, wherein a plurality of light guide holes are formed through the upper film, and each light guide hole is filled with an optical material having a higher refractive index than the upper film and the lower film. In the light-emitting diode with a light-guide hole structure provided by the present invention, when the light is injected into the light-thinning medium film at a certain angle, the oblique light will undergo multiple total reflections in the structure film of the light-guide layer, and finally pass through the light-guide hole uniformly from the chip The front side sees through, without reducing the light intensity, it solves the problem of low light efficiency on the front side of the LED chip, and improves the brightness of the chip package.
Description
技术领域 technical field
本发明涉及一种导光层,具体涉及一种具有导光孔结构的发光二极管。 The invention relates to a light guiding layer, in particular to a light emitting diode with a light guiding hole structure.
背景技术 Background technique
LED因其具有节能、环保、高可靠性以及高寿命等诸多优点,被广泛应用于照明等领域。正装LED芯片,其外延层全角度出光的特性决定了只有极小的一部分光垂直于芯片正面透射,而大部分光透射出芯片后与正面垂直方向存在很大的角度,大大降低了芯片正面出光效率,虽然后期封装通过增加侧面反光结构改变了光路,但常常伴随大量光效的损失。正面光效较低的缺点现已严重制约LED照明芯片在下游工段的发展与应用。 LED is widely used in lighting and other fields because of its many advantages such as energy saving, environmental protection, high reliability and long life. For front-mounted LED chips, the full-angle light emission characteristics of the epitaxial layer determine that only a very small part of the light is transmitted perpendicular to the front of the chip, while most of the light is transmitted from the chip and has a large angle to the vertical direction of the front, which greatly reduces the front light emission of the chip. Efficiency. Although the later packaging changes the light path by adding side reflective structures, it is often accompanied by a large loss of light efficiency. The disadvantage of low front light efficiency has seriously restricted the development and application of LED lighting chips in downstream sections.
发明内容 Contents of the invention
本发明提供一种具有导光孔结构的发光二极管,利用光以一定角度射入光疏介质膜时,斜射光在导光层结构膜中发生多次全反射,最终经过导光孔均匀的从芯片正面透出,在不降低光强的前提下,解决了LED芯片正面光效较低的难题,提高了芯片封装亮度。 The invention provides a light-emitting diode with a light guide hole structure. When the light is injected into the light-thinning medium film at a certain angle, the obliquely incident light will undergo multiple total reflections in the structure film of the light guide layer, and finally pass through the light guide hole uniformly from the The front side of the chip is exposed, and without reducing the light intensity, it solves the problem of low light efficiency on the front side of the LED chip and improves the brightness of the chip package.
本发明提供一种具有导光孔结构的发光二极管,所述发光二极管的发光芯片的上表面形成有导光层,所述导光层包括与发光芯片接触的下层薄膜、以及处于上方的上层薄膜,所述上层薄膜中贯穿形成有多个导光孔,每个导光孔中均填充有折射率大于上层薄膜、下层薄膜的光学材料填充。 The invention provides a light-emitting diode with a light-guiding hole structure. A light-guiding layer is formed on the upper surface of a light-emitting chip of the light-emitting diode, and the light-guiding layer includes a lower film in contact with the light-emitting chip and an upper film on top. A plurality of light guide holes are formed through the upper film, and each light guide hole is filled with an optical material having a higher refractive index than the upper film and the lower film.
所述导光孔的截面形状为等腰倒梯形结构。 The cross-sectional shape of the light guide hole is an isosceles inverted trapezoidal structure.
所述下层薄膜和下层薄膜的材料相同。 The material of the lower film is the same as that of the lower film.
所述下层薄膜和下层薄膜的材料不相同,所述上层薄膜与下层薄膜之间还包含一层中间层薄膜,且中间层薄膜的材料与导光孔中填充的导光材料相同。 The materials of the lower film and the lower film are different, and there is an intermediate film between the upper film and the lower film, and the material of the intermediate film is the same as the light guide material filled in the light guide hole.
所述导光层通过以下过程制备:首先在发光二极管的发光芯片的上表面制备下层薄膜,然后在下层薄膜的上表面制备一层与导光孔中材料相同的导光孔薄膜层,然后采用刻蚀或腐蚀方式在导光孔薄膜层上间断性贯穿刻蚀,刻蚀或腐蚀的深度为该导光孔薄膜层的厚度,未被刻蚀或腐蚀的部分形成多个导光孔,然后在刻蚀或腐蚀去除的位置沉积上层薄膜材料,沉积厚度等于导光孔的深度,进而最终形成导光层。 The light-guiding layer is prepared through the following process: first, a lower film is prepared on the upper surface of the light-emitting chip of the light-emitting diode, and then a light-guiding hole film layer of the same material as that in the light-guiding hole is prepared on the upper surface of the lower film, and then Etching or etching is carried out intermittently on the light guide hole film layer, the depth of etching or corrosion is the thickness of the light guide hole film layer, and a plurality of light guide holes are formed on the unetched or corroded part, and then Deposit the upper layer of thin film material at the position removed by etching or etching, the deposition thickness is equal to the depth of the light guide hole, and finally form the light guide layer.
所述导光层的上层薄膜和下层薄膜的材料为SiO2,导光孔中沉积的材料为ITO。 The material of the upper film and the lower film of the light guide layer is SiO 2 , and the material deposited in the light guide hole is ITO.
所述导光层通过以下过程制备:首先在正装LED发光芯片表面下层薄膜,然后在下层薄膜的表面制备中间层薄膜,并中间层薄膜上使用刻蚀或腐蚀方法间断性加工出截面为正等腰梯形结构的多个凹槽,刻蚀或腐蚀深度小于该中间层薄膜的厚度,在相应被刻蚀或腐蚀的部分填充入上层薄膜材料,构成上层薄膜,对应未被刻蚀或腐蚀的间断性部分则形成导光孔,进而最终形成导光层。 The light guide layer is prepared through the following process: first, the lower layer film is formed on the surface of the LED light-emitting chip, and then the intermediate layer film is prepared on the surface of the lower layer film, and the cross-section of the intermediate layer film is processed intermittently by etching or etching. Multiple grooves in the waist trapezoidal structure, the etching or corrosion depth is less than the thickness of the middle layer film, and the upper layer film material is filled in the corresponding etched or corroded part to form the upper layer film, corresponding to the discontinuity that has not been etched or corroded The permanent part forms a light guide hole, and finally forms a light guide layer.
所述导光层通过以下过程制备:所述上层薄膜的材料为SiO2;所述中间层薄膜及导光孔的材料为Si3N4;所述下层薄膜的材料为ITO。 The light guiding layer is prepared through the following process: the material of the upper layer film is SiO 2 ; the material of the middle layer film and the light guide hole is Si 3 N 4 ; the material of the lower layer film is ITO.
所述射入导光层的光线的入射角为α;所述导光孔的等腰倒梯形结构的上底角为β,所述下层薄膜的折射率为n1,所述下层薄膜的折射率为n3,所述导光孔以及中间层薄膜的折射率为n2,进入导光孔中的光线与垂直于导光孔的侧壁方向之间的夹角为i,所述其中α≥arc sin(n3/n2),且α≥arc sin(n1/n2)。 The incident angle of the light entering the light guide layer is α; the upper base angle of the isosceles inverted trapezoidal structure of the light guide hole is β, the refractive index of the lower film is n 1 , and the refractive index of the lower film is n 3 , the refractive index of the light guide hole and the interlayer film is n 2 , the angle between the light entering the light guide hole and the direction perpendicular to the side wall of the light guide hole is i, where α ≥arc sin(n 3 /n 2 ), and α≥arc sin(n 1 /n 2 ).
所述导光孔的等腰倒梯形结构的上底角为β,进入导光孔中的光线与垂直于导光孔的侧壁方向之间的夹角为i,从导光孔中射出的出射光线与竖直方向的夹角为α1,则i≤90°,α≥90°-β,且i≥arc sin(n3/n2),α≤180°-β-(arc sin(n3/n2)),β+(arc sin(n3/n2))-90°=arc sin(T/(L+(T/sinβ))),arc sin(T/(L+(T/sinβ)))=90°-α,其中T为导光孔的深度,L为倒梯形结构的下底的宽度。 The upper base angle of the isosceles inverted trapezoidal structure of the light guide hole is β, the angle between the light entering the light guide hole and the direction perpendicular to the side wall of the light guide hole is i, and the light emitted from the light guide hole The angle between the outgoing light and the vertical direction is α 1 , then i≤90°, α≥90°-β, and i≥arc sin(n 3 /n 2 ), α≤180°-β-(arc sin( n3/n2)), β+(arc sin(n 3 /n 2 ))-90°=arc sin(T/(L+(T/sinβ))), arc sin(T/(L+(T/sinβ) ))=90°-α, where T is the depth of the light guide hole, and L is the width of the bottom of the inverted trapezoidal structure.
本发明具有的优点在于: The present invention has the advantage that:
本发明提供一种具有导光孔结构的发光二极管,利用光以一定角度射入光疏介质膜时,斜射光在导光层结构膜中发生多次全反射,最终经过导光孔均匀的从芯片正面透出,在不降低光强的前提下,解决了LED芯片正面光效较低的难题,提高了芯片封装亮度。这种新型的LED因其正面聚光效果显著,且具有45°~135°(即α1=0-45°)正面出光、90°正面垂直出光两种出光方式,因而将在LED聚光灯、LED大型探照灯等领域获得广泛应用。 The invention provides a light-emitting diode with a light guide hole structure. When the light is injected into the light-thinning medium film at a certain angle, the obliquely incident light will undergo multiple total reflections in the structure film of the light guide layer, and finally pass through the light guide hole uniformly from the The front side of the chip is exposed, and without reducing the light intensity, it solves the problem of low light efficiency on the front side of the LED chip and improves the brightness of the chip package. This new type of LED has a remarkable effect of concentrating light from the front, and has two ways of emitting light from the front at 45° to 135° (that is, α 1 =0-45°) and vertically at 90°, so it will be used in LED spotlights, LED Widely used in fields such as large searchlights.
附图说明 Description of drawings
图1是本发明中第一种导光层的结构示意图; Fig. 1 is a schematic structural view of the first light guide layer in the present invention;
图2是本发明中第二种导光层的结构示意图。 Fig. 2 is a schematic structural diagram of the second light guiding layer in the present invention.
图中:1-下层薄膜 ;2-上层薄膜;3-导光孔;4-中间层薄膜。 In the figure: 1-lower film; 2-upper film; 3-light guide hole; 4-intermediate film.
具体实施方式 Detailed ways
下面结合附图和具体实施例对本发明作进一步说明,以使本领域的技术人员可以更好的理解本发明并能予以实施,但所举实施例不作为对本发明的限定。 The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, so that those skilled in the art can better understand the present invention and implement it, but the examples given are not intended to limit the present invention.
本发明提供一种具有导光孔结构的发光二极管,在LED发光芯片的表面具有导光层薄膜,所述导光层薄膜形成于所述发光二极管的发光芯片的表面,所述导光层薄膜为组合膜层,且该组合膜层在可见光波长范围内具有高透过率。如图1所示,所述导光层包括与发光芯片接触的下层薄膜1、以及处于上方的上层薄膜2,所述上层薄膜2中贯穿形成有多个导光孔3,导光孔3的深度与上层薄膜2的厚度相同。所述多个导光孔3中填充有折射率大于上层薄膜2、下层薄膜1的导光材料。其中,所述上层薄膜2和下层薄膜1的材料可以相同也可以不同。当二者材料不同时,当要求二者的折射率必须小于导光孔3中填充的光学材料。所述导光孔3的截面形状为倒梯形结构,且为等腰梯形。所述上层薄膜2、下层薄膜1以及导光孔中的填充材料选择可涵盖折射率为1.0~2.4范围内的所有光学材料,例如Al2O3薄膜、ITO薄膜、SiO2薄膜、Si3N4薄膜、GaN薄膜等各种适用本发明导光层的光学膜。所述导光孔的截面形状为等腰的倒梯形结构。
The invention provides a light-emitting diode with a light-guiding hole structure, which has a light-guiding layer film on the surface of the LED light-emitting chip, the light-guiding layer film is formed on the surface of the light-emitting chip of the light-emitting diode, and the light-guiding layer film It is a combined film layer, and the combined film layer has high transmittance in the visible light wavelength range. As shown in FIG. 1 , the light guide layer includes a lower film 1 in contact with the light-emitting chip, and an
当下层薄膜1和上层薄膜2的材料不同时,如图2所示,在上层薄膜2和下层薄膜1之间形成有一层中间层薄膜4,所述中间层薄膜4与导光孔3中填充的导光材料的折射率相同,且其具体厚度没有限制。
When the materials of the lower film 1 and the
综上,本发明中导光层薄膜的组合有如下两种方式: To sum up, the combination of the light guide layer film in the present invention has the following two methods:
1、两种不同折射率的薄膜材料组成的导光层,导光孔3中填充的为折射率较高的光学材料,下层薄膜1和上层薄膜2为折射率较低的相同薄膜。例如,SiO2-ITO-SiO2。在上层薄膜2中形成多个导光孔3,且导光孔3的截面形状为等腰倒梯形结构。
1. The light guide layer is composed of two thin film materials with different refractive indices. The light guide hole 3 is filled with an optical material with a higher refractive index, and the lower film 1 and the
2、三种不同折射率的薄膜材料组成的导光层,下层薄膜1和上层薄膜2为折射率较低的两种不同薄膜,上层薄膜2中具有多个导光孔3,且在下层薄膜1和上层薄膜2之间具有折射率较高的、与导光孔3中填充的材料相同的中间层薄膜4材料。例如,SiO2-GaN-ITO或SiO2-Si3N4-ITO,并且下层薄膜1和上层薄膜2的材料可以互换。所述导光孔3的截面形状为等腰倒梯形结构。
2. A light guide layer composed of three film materials with different refractive indices. The lower film 1 and the
本发明中导光孔3的尺寸以及导光孔3的深度与下层薄膜1、上层薄膜2、导光孔3中填充的光学材料的折射率满足一定关系,这样才能使从各个方向进入导光层中的光线全部被反射出去,具体关系如下:
In the present invention, the size of the light guide hole 3 and the depth of the light guide hole 3 meet a certain relationship with the refractive index of the optical material filled in the lower film 1, the
导光孔3的等腰倒梯形结构的上底角为β,入射光线与竖直方向的夹角为α,下层薄膜1的折射率为n1,下层薄膜1的折射率为n3,导光孔3的折射率为n2(当上层薄膜2和下层薄膜1的折射率不同时,还含有中间层薄膜4,其折射率也为n2),光线最终从导光孔3中射出的出射光线与竖直方向的夹角为α1,对于第二种结构来讲,需要光线在中间层发生多次全反射后进入导光孔3中,进入导光孔3后使光线全部射出。
The upper base angle of the isosceles inverted trapezoidal structure of the light guide hole 3 is β, the angle between the incident light and the vertical direction is α, the refractive index of the lower film 1 is n 1 , and the refractive index of the lower film 1 is n 3 , the guide The refractive index of the light hole 3 is n 2 (when the refractive index of the
要使入射角为α的入射光线在中间层薄膜4与上层薄膜2之间形成全反射,则α满足α≥arc sin(n3/n2);要使α在中间层与下层薄膜1之间形成全反射,则α≥arc sin(n1/n2)。
To make the incident light with an incident angle α form total reflection between the middle layer film 4 and the
当完成全反射后进入到导光孔3中后,需要在导光孔3中发生全反射,即进入导光孔3中的光线需要在导光孔3的侧壁上形成全反射。以下以第二种结构的形式为例进行说明,其第一种结构与第二种结构的角度设计方法相同,仅省略中间层薄膜4的厚度设计。对于第二种结构,需使进入导光孔3中的光线与垂直于导光孔3的侧壁的方向之间的夹角i(即进入导光孔3中的光纤相对于导光孔3侧壁的入射角)满足i≥arc sin(n3/n2)。需要使角度i小于导光孔3侧壁的角度时i<β,这样才能使进入导光孔3中的光线全部射出,导光孔3才有效,因此i≤90°,α≥90°-β。 After entering the light guide hole 3 after total reflection, total reflection needs to occur in the light guide hole 3 , that is, the light entering the light guide hole 3 needs to be totally reflected on the side wall of the light guide hole 3 . The second structure is taken as an example for illustration below. The angle design method of the first structure is the same as that of the second structure, and only the thickness design of the middle layer film 4 is omitted. For the second structure, it is necessary to make the angle i between the light entering the light guide hole 3 and the direction perpendicular to the side wall of the light guide hole 3 (that is, the optical fiber entering the light guide hole 3 relative to the light guide hole 3 The incident angle of the side wall) satisfies i≥arc sin(n 3 /n 2 ). It is necessary to make the angle i smaller than the angle of the side wall of the light guide hole 3 when i<β, so that all the light entering the light guide hole 3 can be emitted, and the light guide hole 3 is effective, so i≤90°, α≥90°- beta.
因此,根据以上角度关系,可以得到i-β≤α1≤β,即(arc sin(n3/n2))-β≤α1≤β。 Therefore, according to the above angle relationship, it can be obtained that i-β≤α 1 ≤β, that is, (arc sin(n 3 /n 2 ))-β≤α 1 ≤β.
若要α经过多次全反射后,仍能在导光孔3的侧壁上形成全反射角,则需满足:α=(90°-β)+(90°-i), i≥arc sin(n3/n2),即α≤180°-β-(arc sin(n3/n2)) If α can still form a total reflection angle on the side wall of the light guide hole 3 after multiple total reflections, it needs to satisfy: α=(90°-β)+(90°-i), i≥arc sin (n 3 /n 2 ), that is, α≤180°-β-(arc sin(n3/n2))
导光孔3中倒梯形结构的下底(相对长度较短的底)的长度为L,导光孔3的深度为T。 The length of the lower bottom of the inverted trapezoidal structure in the light guide hole 3 (the bottom with relatively short length) is L, and the depth of the light guide hole 3 is T.
入射角为α的入射光线与水平面之间的夹角为γ,γ=β+(arc sin(n3/n2))-90°,则sinγ=T/(L+(T/sinβ)),则β+(arc sin(n3/n2))-90°=arc sin(T/(L+(T/sinβ)))。 The angle between the incident light with an incident angle of α and the horizontal plane is γ, γ=β+(arc sin(n3/n2))-90°, then sinγ=T/(L+(T/sinβ)), then β +(arc sin(n 3 /n 2 ))-90°=arc sin(T/(L+(T/sinβ))).
又由于γ=90°-α,则arc sin(T/(L+(T/sinβ))}=90°-α。 And because γ=90°-α, then arc sin (T/(L+(T/sinβ))}=90°-α.
综上所述,arc sin(T/(L+(T/sinβ)))=90°-α。限定了α与α1、α与β、L与T的范围,且n2>n1、n2>n3,使本发明所有材料、角度以及长度被限定范围。若需斜射光从竖直面射出,只需使α1=0°可解;当然也可以使非竖直方向射出,α1可以为α1=0-45°。若需斜射光尽量多的从正面射出,只需根据所选材料折射率获得α角度范围,再根据α角度的范围换获得β、L与T的具体取值范围。 To sum up, arc sin(T/(L+(T/sinβ)))=90°-α. The ranges of α and α 1 , α and β, L and T are limited, and n 2 >n 1 , n 2 >n 3 , so that all materials, angles and lengths of the present invention are limited. If it is necessary to emit oblique light from a vertical surface, it is only necessary to make α 1 =0°; of course, it is also possible to emit light in a non-vertical direction, and α 1 can be α 1 =0-45°. If it is necessary to emit as much oblique light as possible from the front, it is only necessary to obtain the α angle range according to the refractive index of the selected material, and then obtain the specific value ranges of β, L and T according to the range of α angle.
针对以上不同折射率的导光孔,本发明还提供一种具有导光孔结构的发光二极管的制备方法,对于第一种结构,其制备方法为:首先在发光二极管的发光芯片的上表面制备下层薄膜1,然后在下层薄膜1的上表面制备一层与导光孔中材料相同的导光孔薄膜层,然后采用刻蚀或腐蚀方式在其上间断性贯穿刻蚀多余的部分,刻蚀或腐蚀的深度为该导光孔薄膜层的厚度,未被刻蚀或腐蚀的部分即形成多个导光孔,然后再在刻蚀或腐蚀去除的地方沉积上层薄膜2,其厚度等于导光孔的深度,进而形成第一种结构,例如SiO2-ITO-SiO2结构,其上下层薄膜SiO2的折射率范围为1.4-1.6,中间层薄膜4ITO的折射率范围为1.7-2.2。
For the above light guide holes with different refractive indices, the present invention also provides a method for preparing a light emitting diode with a light guide hole structure. For the first structure, the preparation method is as follows: firstly prepare a light-emitting diode on the upper surface of the light-emitting chip of the light-emitting diode. The lower film 1 is prepared on the upper surface of the lower film 1 with a light guide hole film layer of the same material as that in the light guide hole, and then the excess part is intermittently etched through by etching or etching. Or the depth of corrosion is the thickness of the film layer of the light guide hole, and the part that is not etched or corroded forms a plurality of light guide holes, and then deposits the
对于第二种结构,其制备方法为:在正装LED发光芯片表面制备厚度不限的下层薄膜1(如ITO薄膜),然后在下层薄膜1的表面制备一层不限厚度中间层薄膜4作为中间全反射层,如Si3N4薄膜,并下层薄膜1使用刻蚀或腐蚀方法间断性加工出截面视图为正等腰梯形结构的多个凹槽,刻蚀或腐蚀深度小于该中间层薄膜4的厚度,即保留一定未被刻蚀或腐蚀的深度,每个梯形结构可独立也可以在某一方向相连,最后在相应被刻蚀或腐蚀的部分填充入上层薄膜材料如SiO2薄膜即构成上层薄膜2,而未被刻蚀或腐蚀的间断性部分对应形成导光孔。所述上层薄膜2的厚度在制备时要求大于等于导光孔的高度,以满足将刻蚀或腐蚀掉的区域全部填充,但超出导光孔部分的多余的上层薄膜2需要再处理掉,进而形成第二种结构,例如SiO2-Si3N4-ITO结构,其上层薄膜2SiO2的折射率范围为1.4-1.6,中间层薄膜Si3N4的折射率范围为2.0-2.4,下层薄膜1ITO的折射率范围为1.7-2.2。通过以上结构形成高透过率的导光层,使垂直方向射入的光从导光层正面直接穿出;非垂直方向入射角度为α的光线能够在中间层薄膜4如Si3N4薄膜内经多次全反射后,自导光孔汇聚以近似竖直的方向射出。
For the second structure, the preparation method is as follows: prepare a lower layer film 1 (such as an ITO film) with an unlimited thickness on the surface of the front-mounted LED light-emitting chip, and then prepare an intermediate layer film 4 with an unlimited thickness on the surface of the lower film 1 as the middle layer. A total reflection layer, such as a Si 3 N 4 film, and the underlying film 1 is intermittently processed by etching or etching to produce multiple grooves with a cross-sectional view of a regular isosceles trapezoidal structure, and the etching or etching depth is smaller than that of the intermediate film 4 thickness, that is, to keep a certain depth that has not been etched or corroded. Each trapezoidal structure can be independent or connected in a certain direction. Finally, the corresponding etched or corroded part is filled with an upper layer of thin film material such as SiO 2 film. The discontinuous part of the
以上所述实施例仅是为充分说明本发明而所举的较佳的实施例,本发明的保护范围不限于此。本技术领域的技术人员在本发明基础上所作的等同替代或变换,均在本发明的保护范围之内。本发明的保护范围以权利要求书为准。 The above-mentioned embodiments are only preferred embodiments for fully illustrating the present invention, and the protection scope of the present invention is not limited thereto. Equivalent substitutions or transformations made by those skilled in the art on the basis of the present invention are all within the protection scope of the present invention. The protection scope of the present invention shall be determined by the claims.
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