CN103707426A - 一种硅片切割机 - Google Patents
一种硅片切割机 Download PDFInfo
- Publication number
- CN103707426A CN103707426A CN201310746209.8A CN201310746209A CN103707426A CN 103707426 A CN103707426 A CN 103707426A CN 201310746209 A CN201310746209 A CN 201310746209A CN 103707426 A CN103707426 A CN 103707426A
- Authority
- CN
- China
- Prior art keywords
- steel wire
- protective layer
- silicon wafer
- silicon chip
- wafer cutting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 31
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 31
- 239000010703 silicon Substances 0.000 title claims abstract description 31
- 239000011241 protective layer Substances 0.000 claims abstract description 25
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 6
- 239000000956 alloy Substances 0.000 claims abstract description 6
- 229910000831 Steel Inorganic materials 0.000 claims description 43
- 239000010959 steel Substances 0.000 claims description 43
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 229910052700 potassium Inorganic materials 0.000 claims description 5
- 239000011591 potassium Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 abstract description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 229910000617 Mangalloy Inorganic materials 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910001297 Zn alloy Inorganic materials 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
Images
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310746209.8A CN103707426B (zh) | 2013-12-30 | 2013-12-30 | 一种硅片切割机 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310746209.8A CN103707426B (zh) | 2013-12-30 | 2013-12-30 | 一种硅片切割机 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103707426A true CN103707426A (zh) | 2014-04-09 |
CN103707426B CN103707426B (zh) | 2016-04-13 |
Family
ID=50400958
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310746209.8A Expired - Fee Related CN103707426B (zh) | 2013-12-30 | 2013-12-30 | 一种硅片切割机 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN103707426B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108327104A (zh) * | 2018-02-08 | 2018-07-27 | 宁波鄞州义旺电子科技有限公司 | 一种半导体集成圆片制造设备 |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101704276A (zh) * | 2009-11-09 | 2010-05-12 | 南京航空航天大学 | 磨料呈螺旋形有序排布的钎焊金刚石线锯及其制作工艺 |
CN101879696A (zh) * | 2010-04-14 | 2010-11-10 | 厦门致力金刚石工具有限公司 | 一种金刚石线锯 |
CN101905491A (zh) * | 2010-07-19 | 2010-12-08 | 厦门致力金刚石工具有限公司 | 一种金刚石线锯及其制备方法 |
CN201900687U (zh) * | 2010-12-06 | 2011-07-20 | 常州得一新材料科技有限公司 | 一种改进型切割钢丝 |
CN201960674U (zh) * | 2010-12-06 | 2011-09-07 | 常州得一新材料科技有限公司 | 一种具有磨料涂层的多股切割钢丝 |
CN102380915A (zh) * | 2011-11-21 | 2012-03-21 | 镇江耐丝新型材料有限公司 | 一种扭转形态的切割用金属丝及其制作装置和制作方法 |
CN102481647A (zh) * | 2009-08-14 | 2012-05-30 | 圣戈班磨料磨具有限公司 | 包括粘结到长形本体上的磨料颗粒的磨料物品 |
CN202428048U (zh) * | 2011-11-15 | 2012-09-12 | 李园 | 具有绞合芯线的金刚石线锯 |
CN203110162U (zh) * | 2013-03-12 | 2013-08-07 | 厦门致力金刚石科技股份有限公司 | 防止串珠转动的金刚石绳锯 |
CN203697272U (zh) * | 2013-12-30 | 2014-07-09 | 镇江市港南电子有限公司 | 一种硅片切割机 |
-
2013
- 2013-12-30 CN CN201310746209.8A patent/CN103707426B/zh not_active Expired - Fee Related
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102481647A (zh) * | 2009-08-14 | 2012-05-30 | 圣戈班磨料磨具有限公司 | 包括粘结到长形本体上的磨料颗粒的磨料物品 |
CN101704276A (zh) * | 2009-11-09 | 2010-05-12 | 南京航空航天大学 | 磨料呈螺旋形有序排布的钎焊金刚石线锯及其制作工艺 |
CN101879696A (zh) * | 2010-04-14 | 2010-11-10 | 厦门致力金刚石工具有限公司 | 一种金刚石线锯 |
CN101905491A (zh) * | 2010-07-19 | 2010-12-08 | 厦门致力金刚石工具有限公司 | 一种金刚石线锯及其制备方法 |
CN201900687U (zh) * | 2010-12-06 | 2011-07-20 | 常州得一新材料科技有限公司 | 一种改进型切割钢丝 |
CN201960674U (zh) * | 2010-12-06 | 2011-09-07 | 常州得一新材料科技有限公司 | 一种具有磨料涂层的多股切割钢丝 |
CN202428048U (zh) * | 2011-11-15 | 2012-09-12 | 李园 | 具有绞合芯线的金刚石线锯 |
CN102380915A (zh) * | 2011-11-21 | 2012-03-21 | 镇江耐丝新型材料有限公司 | 一种扭转形态的切割用金属丝及其制作装置和制作方法 |
CN203110162U (zh) * | 2013-03-12 | 2013-08-07 | 厦门致力金刚石科技股份有限公司 | 防止串珠转动的金刚石绳锯 |
CN203697272U (zh) * | 2013-12-30 | 2014-07-09 | 镇江市港南电子有限公司 | 一种硅片切割机 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108327104A (zh) * | 2018-02-08 | 2018-07-27 | 宁波鄞州义旺电子科技有限公司 | 一种半导体集成圆片制造设备 |
Also Published As
Publication number | Publication date |
---|---|
CN103707426B (zh) | 2016-04-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102001056B (zh) | 一种钎焊-热压烧结金刚石工具及其制造方法 | |
WO2011017607A3 (en) | Highly wear resistant diamond insert with improved transition structure | |
RU2012108942A (ru) | Абразивное изделие (варианты) и способ резания сапфира с его использованием | |
WO2013049204A4 (en) | Abrasive articles including abrasive particles bonded to an elongated substrate body having a barrier layer, and methods of forming thereof | |
CN101879696A (zh) | 一种金刚石线锯 | |
MY185161A (en) | Fixed abrasive grain wire saw, its manufacturing method, and method of cutting workpiece by using it | |
CN202097468U (zh) | 一种金钢线 | |
CN203697273U (zh) | 一种硅片切割钢丝 | |
CN103707426A (zh) | 一种硅片切割机 | |
CN203697272U (zh) | 一种硅片切割机 | |
CN103722626B (zh) | 一种硅片切割钢丝 | |
CN101502945B (zh) | 新型线锯 | |
CN103273579A (zh) | 小直径金刚石绳锯结构及切割方法 | |
CN203636998U (zh) | 一种钢丝股绳与复合金刚石磨料的金刚石切割绳锯 | |
CN203712891U (zh) | 一种钢丝与复合金刚石磨料钢丝交替分布捻制成的金刚绳 | |
CN102765141B (zh) | 一种带有螺旋波形旋转弯曲部的切割金属丝 | |
CA2973673C (en) | Drill bit insert and drill bit | |
GB201219301D0 (en) | Polycrystalline diamond construction and method for making same | |
CN102581383B (zh) | 超硬磨料线锯的制造方法以及制造设备 | |
CN204054379U (zh) | 一种带有储液囊绞合形态复合金刚石钢丝 | |
CN208215131U (zh) | 加强型树脂砂轮 | |
CN203471599U (zh) | 一种切割刀片 | |
CN202846727U (zh) | 一种带有螺旋波形旋转弯曲部的切割金属丝 | |
CN202788629U (zh) | 石油勘探及采矿用金刚石硬质合金复合齿 | |
CN201979390U (zh) | 一种线锯 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
C41 | Transfer of patent application or patent right or utility model | ||
GR01 | Patent grant | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20160321 Address after: On the south side of the 223600 Suqian city of Jiangsu province in Shuyang County risound Road on the eastern side of Cixi Road Applicant after: ZHENJIANG GANGNAN ELECTRONICS CO., LTD. Address before: 212132 Dongfang Road, Dagang mechanical and Electrical Industrial Park, Dagang District, Zhenjiang, Jiangsu Applicant before: Zhenjiang Gangnan Electric Co., Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160413 Termination date: 20191230 |
|
CF01 | Termination of patent right due to non-payment of annual fee |