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CN103684184B - A kind of linear motor initial phase determination method - Google Patents

A kind of linear motor initial phase determination method Download PDF

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CN103684184B
CN103684184B CN201310594864.6A CN201310594864A CN103684184B CN 103684184 B CN103684184 B CN 103684184B CN 201310594864 A CN201310594864 A CN 201310594864A CN 103684184 B CN103684184 B CN 103684184B
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initial phase
mover
acceleration
linear motor
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CN103684184A (en
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胡金春
朱煜
高阵雨
陈龙敏
尹文生
成荣
徐登峰
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Tsinghua University
U Precision Tech Co Ltd
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Abstract

一种直线电机初始相位确定方法,该方法将具有三种不同电角度相位且每个相位下方向相反的六个电流依次通入到作为电机动子的线圈阵列中,使动子运动,利用传感器测量每种电流下动子加速度,通过一定算法计算电机初始相位值。本发明只需要电机动子进行短距运动,利用传感器所测加速度经简单运算即可求解出高精度的初始相位。本发明构思巧妙、操作方便,能在不增加硬件的前提下,依靠简单算法确定直线电机初始相位。

A method for determining the initial phase of a linear motor. This method sequentially passes six currents with three different electrical angle phases and opposite directions under each phase into the coil array as the motor mover to make the mover move. Using a sensor Measure the acceleration of the mover under each current, and calculate the initial phase value of the motor through a certain algorithm. The invention only needs the motor mover to perform short-distance movement, and the acceleration measured by the sensor can be used to solve the high-precision initial phase through simple calculation. The invention has ingenious conception and convenient operation, and can determine the initial phase of the linear motor by means of a simple algorithm without adding hardware.

Description

一种直线电机初始相位确定方法A method for determining the initial phase of a linear motor

技术领域technical field

本发明涉及一种直线电机初始相位确定方法,特别涉及一种利用电机动子位移求解定子磁场空间相位的方法。The invention relates to a method for determining the initial phase of a linear motor, in particular to a method for solving the spatial phase of a stator magnetic field by using the displacement of a motor mover.

背景技术Background technique

直线电机具有结构简单、动态响应快、速度和加速度大、精度高、振动和噪声小等一系列优点,成为各类高速、精密机床以及集成电路制造装备的理想传动方式。传统直线电机包括利用柔性铰链、压电堆、丝杆滑动以及气浮运动工作台等方式。随着微纳制造技术的发展,近些年来磁浮直线电机得到迅猛发展,它具有非接触、无摩擦、无磨损等优点,易于实现纳米级的定位精度和获得大行程的运动。这使得直线电机在半导体光刻、精密加工、微型装配、纳米技术和精细运动控制领域有了更为广阔的应用前景。Linear motors have a series of advantages such as simple structure, fast dynamic response, high speed and acceleration, high precision, low vibration and noise, etc., and become an ideal transmission method for various high-speed, precision machine tools and integrated circuit manufacturing equipment. Traditional linear motors include the use of flexible hinges, piezoelectric stacks, screw sliding, and air-floating motion workbenches. With the development of micro-nano manufacturing technology, the magnetic levitation linear motor has developed rapidly in recent years. It has the advantages of non-contact, friction-free, and wear-free, and it is easy to achieve nano-level positioning accuracy and large-stroke motion. This makes linear motors have broader application prospects in the fields of semiconductor lithography, precision machining, micro-assembly, nanotechnology and fine motion control.

为了提高控制效果,获得良好的动态调速特性,矢量控制技术成为直线电机重要控制手段。在基于矢量控制技术的控制系统中,初始相位确定是影响系统性能的关键之一。如果系统上电时无法精确测定初始相位,系统将无法正确完成直线矢量控制的一系列算法,导致直线电机运动混乱,甚至无法启动。基于此,很多学者展开直线电机初始相位确定方面的研究。在研究论文“永磁同步直线电机矢量控制系统中初始寻相和电角度的测定,微电机,2009,42(11),1~6”中提出了一种初始相位确定方法,即在直线电机端部安装一个接近开关,并保证在接近开关能检测到的范围内光栅尺有一个Z轴脉冲。将光栅尺的Z轴脉冲和接近开关的输出信号进行逻辑与,用此信号控制计数器的复位。系统上电后直线电机以一定的速度向零点运动,当系统检测到电机端部的Z轴脉冲时,计数器复位信号有效,计数器清零,此时电机所在的位置即为零点。研究论文“H型直线电机工作台控制技术研究,机床与液压,2007,35(10),130~132”中提出了一种基于增量式编码器实现双边同步寻相的实现途径。以上研究虽然在一定应用场合中,在一定程度上解决了初始相位高精度确定的问题,但它们或者采用了额外的装置造成机构复杂、成本增加;或者由于使用了精度较低的传感器以及求解算法造成寻相精度较低。In order to improve the control effect and obtain good dynamic speed regulation characteristics, vector control technology has become an important control method for linear motors. In the control system based on vector control technology, the determination of the initial phase is one of the keys that affect the system performance. If the initial phase cannot be accurately determined when the system is powered on, the system will not be able to correctly complete a series of algorithms of linear vector control, resulting in chaotic motion of the linear motor, or even failure to start. Based on this, many scholars have carried out research on the initial phase determination of linear motors. In the research paper "Initial Phase Finding and Measurement of Electric Angle in Permanent Magnet Synchronous Linear Motor Vector Control System, Micro Motors, 2009, 42 (11), 1~6", a method for initial phase determination is proposed, that is, in the linear motor Install a proximity switch at the end, and ensure that the grating scale has a Z-axis pulse within the range that the proximity switch can detect. Logically AND the Z-axis pulse of the grating ruler and the output signal of the proximity switch, and use this signal to control the reset of the counter. After the system is powered on, the linear motor moves toward the zero point at a certain speed. When the system detects the Z-axis pulse at the end of the motor, the counter reset signal is valid, and the counter is cleared. At this time, the position of the motor is the zero point. In the research paper "Research on Control Technology of H-type Linear Motor Workbench, Machine Tool and Hydraulics, 2007, 35(10), 130-132", a method to realize bilateral synchronous phase finding based on incremental encoder was proposed. Although the above studies have solved the problem of high-precision determination of the initial phase to a certain extent in certain applications, they either use additional devices to cause complex mechanisms and increase costs; or due to the use of low-precision sensors and solving algorithms Cause phase finding accuracy is low.

发明内容Contents of the invention

考虑到以上方案方法存在的缺陷,本发明提出一种直线电机的初始相位确定方法:将具有三种不同电角度相位且每个相位下方向相反的六个电流依次通入到电机动子的线圈阵列中,使动子运动,利用传感器测量每种电流下动子的加速度,通过一定算法计算电机初始相位值。该方法不增加任何硬件成本,且操作简单,通用性较强,在直线电机初始相位确定中具有巨大的应用潜力。Considering the defects of the above solutions, the present invention proposes a method for determining the initial phase of a linear motor: six currents with three different electrical angle phases and opposite directions in each phase are sequentially passed into the coil of the motor mover In the array, move the mover, use the sensor to measure the acceleration of the mover under each current, and calculate the initial phase value of the motor through a certain algorithm. This method does not increase any hardware cost, is simple to operate, and has strong versatility. It has great application potential in determining the initial phase of a linear motor.

本发明的技术方案如下:Technical scheme of the present invention is as follows:

一种直线电机初始相位确定方法,该直线电机包括电机定子和电机动子,其特征在于所述方法包括如下步骤:A method for determining the initial phase of a linear motor, the linear motor includes a motor stator and a motor mover, characterized in that the method includes the following steps:

1)对线圈阵列首先通入幅值和相位为(Im,0)的电流;1) First pass a current with amplitude and phase (I m ,0) to the coil array;

2)利用位移传感器作为电机动子控制系统的闭环反馈传感器,使电机动子的位移为电机极距τ的整数倍;2) Use the displacement sensor as the closed-loop feedback sensor of the motor mover control system, so that the displacement of the motor mover is an integer multiple of the motor pole pitch τ;

3)利用加速度传感器测量电机动子开始运动时刻的加速度a113) Use the acceleration sensor to measure the acceleration a 11 at the moment when the motor mover starts to move;

4)重复步骤(1)~(3),分别通入幅值和相位分别为(-Im,0)、(Im,π/2)、(-Im,π/2)、(Im,-π/2)和(-Im,π/2)的电流,分别测得电机动子开始运动时刻的加速度a12、a21、a22、a31和a32,通过这六个加速度利用下列公式:4) Repeat steps (1) to (3), respectively input the amplitude and phase as (-I m ,0), (I m ,π/2), (-I m ,π/2), (I The currents of m ,-π/2) and (-I m ,π/2) respectively measure the accelerations a 12 , a 21 , a 22 , a 31 and a 32 at the moment when the motor mover starts to move. Through these six Acceleration uses the following formula:

计算出初始相位其中a1、a2和a3为中间变量;a1=a11-a12,a2=a21-a22,a3=a31-a32Calculate the initial phase Where a 1 , a 2 and a 3 are intermediate variables; a 1 =a 11 -a 12 , a 2 =a 21 -a 22 , a 3 =a 31 -a 32 .

采用以上技术方案可使得本发明取得以下技术效果:Adopting above technical scheme can make the present invention obtain following technical effect:

①操作简便,只需要在线圈阵列中通入六种电流,通过检测每种电流下加速度值,利用简单运算即可计算出初始相位值;①Easy to operate, only need to pass six kinds of currents into the coil array, by detecting the acceleration value under each current, the initial phase value can be calculated by simple calculation;

②整个系统可不需要增加额外传感器,节省硬件成本。②The whole system does not need to add additional sensors, saving hardware costs.

附图说明Description of drawings

图1是以动圈式磁悬浮直线电机为例采用本发明所述方法的初始相位测量装置整体结构示意图。Fig. 1 is a schematic diagram of the overall structure of an initial phase measuring device using a moving coil magnetic levitation linear motor as an example using the method of the present invention.

其中,1-电机定子;2-磁钢阵列;3-位移传感器;4-线圈阵列;5-电机动子;6-信号线;7-信号处理电路;8-驱动器;9-驱动器线;10-加速度传感器。Among them, 1-motor stator; 2-magnetic steel array; 3-displacement sensor; 4-coil array; 5-motor mover; 6-signal line; 7-signal processing circuit; 8-driver; 9-driver line; 10 -Accelerometer.

具体实施方式detailed description

下面结合附图和实施例对本发明进行进一步的说明。The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

图1为本发明以动圈式磁悬浮直线电机为例采用所述初始相位确定方法的各部件安装结构示意图,包括:电机定子1,磁钢阵列2,位移传感器3,线圈阵列4,电机动子5,信号线6,信号处理电路7,驱动器8,驱动器线9以及加速度传感器10。Fig. 1 is a schematic diagram of the installation structure of each component of the present invention, taking the moving coil type magnetic levitation linear motor as an example and adopting the initial phase determination method, including: motor stator 1, magnetic steel array 2, displacement sensor 3, coil array 4, motor mover 5. Signal line 6, signal processing circuit 7, driver 8, driver line 9 and acceleration sensor 10.

设电机初始相位为电机极距为τ,某一时刻m电机动子5位移为xm,则电机磁角度相位为设此时电机动子5上的线圈阵列4通入幅值为Im、相位为的电流,据电机推力模型得到在m时刻的电机动子5加速度模型为:Let the initial phase of the motor be The pole pitch of the motor is τ, and the displacement of the mover 5 of the m motor is x m at a certain moment, then the magnetic angle phase of the motor is Assume that the coil array 4 on the motor mover 5 has an input amplitude of I m and a phase of current, according to the motor thrust model, the acceleration model of the motor mover 5 at time m is:

其中k为常数,af为摩擦力对应的加速度值;Where k is a constant, a f is the acceleration value corresponding to the friction force;

所述方法包括以下步骤:The method comprises the steps of:

(1)令驱动器8通过驱动器线9对线圈阵列4首先通入幅值和相位为(Im,0)的电流;(1) Make the driver 8 pass a current with amplitude and phase (I m ,0) to the coil array 4 through the driver line 9;

(2)利用位移传感器3作为电机动子5控制系统的闭环反馈传感器,使其位移为电机极距τ的整数倍;(2) Use the displacement sensor 3 as the closed-loop feedback sensor of the control system of the motor mover 5, so that its displacement is an integer multiple of the pole distance τ of the motor;

(3)利用加速度传感器10测量电机动子5开始运动时刻的加速度a11(3) Using the acceleration sensor 10 to measure the acceleration a 11 at the moment when the motor mover 5 starts to move;

(4)重复步骤(1)~(3),通入幅值和相位分别为(-Im,0)、(Im,π/2)、(-Im,π/2)、(Im,-π/2)和(-Im,π/2)的电流,分别测得电机动子5开始运动时刻的加速度a12、a21、a22、a31和a32。根据加速度模型,可得这六个加速度的表达式分别为:(4) Repeat steps (1) to (3), and input the amplitude and phase as (-I m ,0), (I m ,π/2), (-I m ,π/2), (I The currents of m ,-π/2) and (-I m ,π/2) respectively measure the accelerations a 12 , a 21 , a 22 , a 31 and a 32 at the moment when the electric mover 5 starts to move. According to the acceleration model, the expressions of these six accelerations can be obtained as follows:

(Ι)式与(Ⅱ)式相减,可得:(Ι) formula and (II) formula are subtracted, can get:

(Ⅲ)式与(Ⅳ)式相减,可得:Subtracting formula (Ⅲ) and formula (Ⅳ), we can get:

(Ⅴ)式与(Ⅵ)式相减,可得:(Ⅴ) formula and (Ⅵ) formula subtraction, can get:

(Ⅷ)式与(Ⅸ)式相减,可得:Subtract the formula (Ⅷ) from the formula (IX) to get:

由(Ⅶ)式~(Ⅸ)式可得:From (Ⅶ) formula~(Ⅸ) formula can get:

由(Ⅹ)式与(ⅩⅠ)式可解得 From (X) formula and (XI) formula can be solved

其中a1、a2和a3为中间变量,分别由式(Ⅶ)、(Ⅷ)和(Ⅸ)确定。Wherein a 1 , a 2 and a 3 are intermediate variables, which are respectively determined by formulas (VII), (VIII) and (IX).

此外,电机动子5加速度可由位移传感器3所得,即可由位移传感器3所测位移值,二次求导之后得到加速度值。In addition, the acceleration of the motor mover 5 can be obtained by the displacement sensor 3 , that is, the displacement value measured by the displacement sensor 3 can be obtained after the second derivation.

实施例Example

参考图1,以更好地理解本发明。Reference is made to Figure 1 for a better understanding of the present invention.

所述系数k=100m·s-2·A-1,每次通入所述电机动子5上的线圈阵列4的电流幅值Im=1A,所述摩擦力对应的加速度值af=1m·s-2The coefficient k=100m·s -2 ·A -1 , the current amplitude I m =1A that passes through the coil array 4 on the motor mover 5 each time, and the acceleration value a f corresponding to the friction force = 1m·s -2 .

1)令驱动器8通过驱动器线9对线圈阵列4首先通入幅值和相位为(1,0)的电流;1) Make the driver 8 pass a current with amplitude and phase (1,0) to the coil array 4 through the driver line 9;

2)利用位移传感器3作为电机动子5控制系统的闭环反馈传感器,使其位移为电机极距τ的2倍;2) Use the displacement sensor 3 as the closed-loop feedback sensor of the control system of the motor mover 5, so that its displacement is twice the pole distance τ of the motor;

3)利用加速度传感器10测量电机动子5开始运动时刻的加速度a11=49m·s-23) Use the acceleration sensor 10 to measure the acceleration a 11 =49m·s −2 at the moment when the motor mover 5 starts to move;

4)重复步骤(1)~(3),分别通入幅值和相位分别为(-1,0)、(1,π/2)、(-1,π/2)、(1,-π/2)和(-1,π/2)的电流,分别测得电机动子5开始运动时刻的加速度分别为a12=-49m·s-2,a21=-87.6m·s-2,a22=87.6m·s-2,a31=85.6m·s-2,a32=-85.6m·s-2,根据(Ⅶ)~(Ⅸ)式,可解得a1=a11-a12=98m·s-2,a2=a21-a22=-175.2m·s-2,a3=a31-a32=171.2m·s-2,根据(ⅩⅡ)式,可解得 4) Repeat steps (1) to (3), respectively input the amplitude and phase as (-1,0), (1,π/2), (-1,π/2), (1,-π /2) and (-1, π/2), the measured accelerations at the moment when the motor mover 5 starts to move are respectively a 12 =-49m·s -2 , a 21 =-87.6m·s -2 , a 22 =87.6m·s -2 , a 31 =85.6m·s -2 , a 32 =-85.6m·s -2 , according to formulas (Ⅶ)~(Ⅸ), a 1 =a 11 - a 12 =98m·s -2 , a 2 =a 21 -a 22 =-175.2m·s -2 , a 3 =a 31 -a 32 =171.2m·s -2 , according to formula (ⅩⅡ), it can be solved have to

通过上述步骤,在硬件方面,不需增加额外的传感器,只需要利用电机本身伺服闭环反馈的位移传感器即可;在具体操作方面,只需对线圈连续通入特定电流并使电机动子连续进行短距运动并连续采集每次运动起始时刻的加速度,采用简单算法即可精确地求解出电机的初始相位。Through the above steps, in terms of hardware, there is no need to add additional sensors, only the displacement sensor that uses the servo closed-loop feedback of the motor itself; Short-distance motion and continuous collection of the acceleration at the beginning of each motion, the initial phase of the motor can be accurately calculated by using a simple algorithm.

Claims (1)

1. a linear motor initial phase determination method, these linear electric motors include motor stator (1) and electric mover (5), it is characterised in that described method comprises the steps:
1) coil array (4) is passed first into amplitude and phase place for (Im, 0) electric current;
2) utilize displacement transducer (3) to control the closed loop feedback sensor of system as electric mover (5), make the integral multiple that displacement is motor pole span τ of electric mover (5);
3) acceleration transducer (10) is utilized to measure the acceleration a in electric mover (5) setting in motion moment11
4) step 1 is repeated)~3), each lead into amplitude and phase place respectively (-Im,0)、(Im,π/2)、(-Im,π/2)、(Im,-pi/2) and (-Im, pi/2) electric current, record the acceleration a in electric mover (5) setting in motion moment respectively12、a21、a22、a31And a32, utilize following equation by these six acceleration:
Calculate initial phaseWherein a1、a2And a3For intermediate variable;A1=a11-a12, a2=a21-a22, a3=a31-a32
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CN102969969A (en) * 2012-12-14 2013-03-13 北京精雕科技有限公司 Automatic phase hunting method used for permanent magnet synchronous servo motor

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