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CN103684035A - Multilayer high power nano friction generator - Google Patents

Multilayer high power nano friction generator Download PDF

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Publication number
CN103684035A
CN103684035A CN201210350828.0A CN201210350828A CN103684035A CN 103684035 A CN103684035 A CN 103684035A CN 201210350828 A CN201210350828 A CN 201210350828A CN 103684035 A CN103684035 A CN 103684035A
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film
alloy
electrode
high molecular
insulating barrier
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CN103684035B (en
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范凤茹
徐传毅
刘军锋
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Nano New Energy Tangshan Co Ltd
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Nano New Energy Tangshan Co Ltd
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Priority to PCT/CN2013/079288 priority patent/WO2014044077A1/en
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/04Friction generators

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Abstract

The invention discloses a nano friction generator which comprises an electrode, a polymer insulating layer and a friction electrode, wherein the electrode, the polymer insulating layer and the friction electrode are sequentially overlapped. A micro nano concave convex structure is arranged on at least one surface in two surfaces, which are oppositely arranged, of the polymer insulating layer and the friction electrode. The electrode and the friction electrode are voltage and current output electrodes of the friction generator. According to the invention, the friction of a conductive (metal) film and polymer is used; and metal is easy to lose electrons, thus the friction electrode and the polymer insulating layer form an induction electric field.

Description

Multilayer high power nano friction generator
Technical field
The present invention relates to a kind of triboelectricity machine, especially relate to a kind of utilization conduction (metal) material as the multilayer high power nano friction generator of friction electrode.
Background technology
Along with modern life level improves constantly, rhythm of life is constantly accelerated, and has occurred convenient, low to the environment dependency degree self power generation equipment of application.Existing self power generation equipment utilizes the piezoelectric property of material conventionally.For example 2006, the professor Wang Zhonglin of the georgia ,u.s.a Institute of Technology etc. successfully converted mechanical energy to electric energy within the scope of nanoscale, developed minimum in the world generator-nano generator.The basic principle of nano generator is: when nano wire (NWs) during dynamic tensile, generates piezoelectricity electromotive force under external force in nano wire, corresponding transient current flows with balance Fermi level at two ends.
Between object and object, mutually rub, will make negative electricity on side's band, the opposing party becomes positively charged, because fricative electricity between object is friction electricity.Friction electricity is one of modal phenomenon of nature, but utilizes and be left in the basket because be difficult to collection.If friction electricity can be applied in self power generation equipment, bring more facility will certainly to people's life.
Summary of the invention
The technical problem that the present invention solves is: overcome the not high defect of existing triboelectricity machine power output, a kind of multilayer high power nano friction generator is provided, utilize conduction (metal) material and polymer friction, produce induction field, thereby complete self-powered.Because triboelectricity machine of the present invention has used conduction (metal) material, improved the power output of electric energy.In addition, the products such as existing touch-screen are all on metal, directly to cover high molecular polymer, can be combined with the present invention.
In order to solve the problems of the technologies described above, the first technical scheme provided by the invention is that a kind of nano friction generator, comprises the electrode being cascading, high molecular polymer insulating barrier, and friction electrode; On at least one face in two faces that high molecular polymer insulating barrier and friction electrode are oppositely arranged, be provided with micro-nano concaveconvex structure; Described electrode and friction electrode are triboelectricity machine voltage and current output electrode.
Preferably, described electrode material therefor is indium tin oxide, Graphene, nano silver wire film, metal or alloy, and wherein metal is Au Ag Pt Pd, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten or vanadium; Alloy is aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy, copper alloy, kirsite, manganese alloy, nickel alloy, lead alloy, ashbury metal, cadmium alloy, bismuth alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or tantalum alloy; Described friction electrode material therefor is metal or alloy, and wherein metal is Au Ag Pt Pd, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten or vanadium; Alloy is aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy, copper alloy, kirsite, manganese alloy, nickel alloy, lead alloy, ashbury metal, cadmium alloy, bismuth alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or tantalum alloy.
Preferably, described high molecular polymer insulating barrier material therefor is selected from polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber (regeneration) sponge film, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, polymethyl methacrylate film, polyvinyl alcohol film, polyisobutene film, pet film, polyvinyl butyral film, formaldehyde phenol condensation polymer film, neoprene film, butadiene-propylene copolymer film, natural rubber film, polyacrylonitrile film, any one in acrylonitrile vinyl chloride copolymer film.
Preferably, the micro-nano concaveconvex structure arranging on described high molecular polymer surface of insulating layer is extremely micron-sized concaveconvex structure of nanoscale, preferably the nano concavo-convex structure of height of projection 50nm-300nm.
Preferably, the micro-nano concaveconvex structure arranging on described friction electrode surface is extremely micron-sized concaveconvex structure of nanoscale, preferably the nano concavo-convex structure of height of projection 300nm-1 μ m.
The second technical scheme provided by the invention is, a kind of nano friction generator, and described nano friction generator comprises the first electrode being cascading, the first high molecular polymer insulating barrier, the second high molecular polymer insulating barrier and the second electrode; Wherein, between the first high molecular polymer insulating barrier and the second high molecular polymer insulating barrier, be provided with friction electrode; On at least one face in the first high molecular polymer insulating barrier and two opposite faces of friction electrode, be provided with micro-nano concaveconvex structure; On at least one face in the second high molecular polymer insulating barrier and two opposite faces of friction electrode, be provided with micro-nano concaveconvex structure; Described the first electrode and the series connection of the second electrode are an output electrode of triboelectricity machine voltage and current; Described friction electrode is another output electrode of triboelectricity machine voltage and current.
Preferably, described friction electrode material therefor is to select conductive film, conducting polymer, metal material, metal material comprises simple metal and alloy, simple metal is selected from gold, silver, platinum, palladium, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten, vanadium etc., alloy can be selected from light-alloy (aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy etc.), heavy non-ferrous alloy (copper alloy, kirsite, manganese alloy, nickel alloy etc.), low-melting alloy (lead, tin, cadmium, bismuth, indium, gallium and alloy thereof), refractory alloy (tungsten alloy, molybdenum alloy, niobium alloy, tantalum alloy etc.).
Preferably, described the first high molecular polymer insulating barrier is identical with described the second high molecular polymer insulating barrier material.
Preferably, described the first high molecular polymer insulating barrier and the second high molecular polymer insulating barrier are selected from polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber (regeneration) sponge film, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, methacrylic acid ester film, polyvinyl alcohol film, polyisobutene film, polyurethane flexible sponge film, pet film, polyvinyl butyral film, formaldehyde phenol film, neoprene film, butadiene-propylene copolymer film, natural rubber film, polyacrylonitrile film, any one in acrylonitrile vinyl chloride film.
Preferably, described friction electrode comprises the third electrode layer being cascading, third high Molecularly Imprinted Polymer layer and the 4th electrode layer; On at least one face in two opposite face of the first high molecular polymer insulating barrier and third electrode layer, be provided with micro-nano concaveconvex structure; On at least one face in the second high molecular polymer insulating barrier and two opposite faces of the 4th electrode layer, be provided with micro-nano concaveconvex structure; Described the first electrode and the series connection of the second electrode are an output electrode of triboelectricity machine voltage and current; The third electrode layer of described friction electrode and the series connection of the 4th electrode layer are another output electrode of triboelectricity machine voltage and current.
Preferably, described the first high molecular polymer insulating barrier and described the second high molecular polymer insulating barrier material are identical or different; Described third electrode layer and the 4th electrode layer material are identical or different.
Preferably, described the first high molecular polymer insulating barrier and the second high molecular polymer insulating barrier are independently selected from respectively polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber (regeneration) sponge film, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, methacrylic acid ester film, polyvinyl alcohol film, polyisobutene film, polyurethane flexible sponge film, pet film, polyvinyl butyral film, formaldehyde phenol film, neoprene film, butadiene-propylene copolymer film, natural rubber film, polyacrylonitrile film, any one in acrylonitrile vinyl chloride film.
Preferably, described third electrode layer and the 4th electrode layer material therefor are independently selected from respectively preferably, described friction electrode material therefor is to select conductive film, conducting polymer, metal material, metal material comprises simple metal and alloy, simple metal is selected from gold, silver, platinum, palladium, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten, vanadium etc., alloy can be selected from light-alloy (aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy etc.), heavy non-ferrous alloy (copper alloy, kirsite, manganese alloy, nickel alloy etc.), low-melting alloy (lead, tin, cadmium, bismuth, indium, gallium and alloy thereof), refractory alloy (tungsten alloy, molybdenum alloy, niobium alloy, tantalum alloy etc.).
Preferably, third high Molecularly Imprinted Polymer layer material used is different with the second high polymer layer from the first high polymer layer, be selected from polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber (regeneration) sponge film, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, polymethyl methacrylate film, polyvinyl alcohol film, polyisobutene film, pet film, polyvinyl butyral film, formaldehyde phenol condensation polymer film, neoprene film, butadiene-propylene copolymer film, natural rubber film, polyacrylonitrile film, any one in acrylonitrile vinyl chloride copolymer film.
Preferably, the micro-nano concaveconvex structure arranging on described the first high molecular polymer insulating barrier and the second high molecular polymer surface of insulating layer is extremely micron-sized concaveconvex structure of nanoscale, preferably the nano concavo-convex structure of height of projection 50nm-300nm.
Preferably, the micro-nano concaveconvex structure arranging on described friction electrode surface is extremely micron-sized concaveconvex structure of nanoscale, preferably the nano concavo-convex structure of height of projection 300nm-1 μ m.
Preferably, described the first electrode layer and the second electrode lay material therefor are independently selected from respectively indium tin oxide, Graphene electrodes, nano silver wire film, and metal or alloy, wherein metal is Au Ag Pt Pd, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten or vanadium; Alloy is aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy, copper alloy, kirsite, manganese alloy, nickel alloy, lead alloy, ashbury metal, cadmium alloy, bismuth alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or tantalum alloy.
Preferably, described the first high molecular polymer insulating barrier, the second high molecular polymer insulating barrier, third high Molecularly Imprinted Polymer insulating barrier are transparent material.Described the first high molecular polymer insulating barrier, the second high molecular polymer insulating barrier, third high Molecularly Imprinted Polymer layer material therefor are independently selected from respectively any one in following transparent high polymer: PETG (PET), dimethyl silicone polymer (PDMS), polystyrene (PS), polymethyl methacrylate (PMMA), Merlon (PC) and polymeric liquid crystal copolymer (LCP).Described the first electrode, the second electrode, third electrode and the 4th electrode are independently selected in respectively any one in indium tin oxide (ITO), Graphene electrodes and nano silver wire film.Adopt after above-mentioned preferred material, at this moment whole triboelectricity machine is a full transparent and soft device.
The 3rd technical scheme provided by the invention is: a kind of nano friction generating set, comprises the nano friction generator as above of a plurality of serial or parallel connections.
The 4th technical scheme provided by the invention is: nano friction generator described above or the application of nano friction generating set in diaphragm pressure sensor.
The present invention adopts conductivity (metal) film and polymer friction, because metal easily loses electronics, friction electrode and high molecular polymer insulating barrier (comprising the first high molecular polymer insulating barrier and/or the second high molecular polymer insulating barrier) form induction field.Because metal is than the easy electronics that loses of polymer, in metallic film and polymer friction process, can form larger electrical potential difference in theory.Triboelectricity machine output of the present invention reaches crest voltage 150V, electric current 27 μ A.
Accompanying drawing explanation
Fig. 1 is the generalized section of a kind of embodiment of nano friction generator of the present invention.
Fig. 2 is the structural representation of Fig. 1 nano friction generator of the present invention.
Fig. 3 is the generalized section of the another kind of embodiment of nano friction generator of the present invention.
Fig. 4 is the structural representation of Fig. 3 nano friction generator of the present invention.
Fig. 5 is the generalized section of the another kind of embodiment of nano friction generator of the present invention.
Fig. 6 is the structural representation of Fig. 5 nano friction generator of the present invention.
Fig. 7 is silicon template schematic diagram of the present invention.
Fig. 8 is the thin polymer film schematic diagram of band micro-nano bulge-structure of the present invention.。
Embodiment
For fully understanding the present invention's object, feature and effect, by following concrete execution mode, the present invention is elaborated.
The present invention is a kind of nano friction generator, adopt conductivity (metal) film and polymer friction, because metal easily loses electronics, friction electrode and high molecular polymer insulating barrier (comprising the first high molecular polymer insulating barrier and/or the second high molecular polymer insulating barrier) form induction field.
As depicted in figs. 1 and 2, nano friction generator of the present invention comprises the electrode 11 being cascading, high molecular polymer insulating barrier 12, and friction electrode 13; On at least one face in two faces that high molecular polymer insulating barrier 12 and friction electrode 13 are oppositely arranged, be provided with micro-nano concaveconvex structure (not shown); Described electrode 11 and friction electrode 13 are triboelectricity machine voltage and current output electrode.。
In a specific embodiment of the present invention, nano friction generator is nontransparent layer flexible slab construction, and crooked or distortion causes triboelectrification between high molecular polymer insulating barrier 12 and friction electrode 13 arbitrarily.
11 pairs of material therefors of electrode do not have particular provisions, can form the material of conductive layer all within protection scope of the present invention, for example indium tin oxide, Graphene electrodes, nano silver wire film, and metal or alloy, wherein metal is Au Ag Pt Pd, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten or vanadium; Alloy is aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy, copper alloy, kirsite, manganese alloy, nickel alloy, lead alloy, ashbury metal, cadmium alloy, bismuth alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or tantalum alloy.
The electrode 13 that rubs in present embodiment can be selected conductive film, conducting polymer, metal material, metal material comprises simple metal and alloy, simple metal is selected from gold, silver, platinum, palladium, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten, vanadium etc., alloy can be selected from light-alloy (aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy etc.), heavy non-ferrous alloy (copper alloy, kirsite, manganese alloy, nickel alloy etc.), low-melting alloy (lead, tin, cadmium, bismuth, indium, gallium and alloy thereof), refractory alloy (tungsten alloy, molybdenum alloy, niobium alloy, tantalum alloy etc.).The preferred 100 μ m-500 μ m of thickness of friction electrode 13, more preferably 200 μ m, the surface of friction electrode 13 relative high molecular polymer insulating barriers 12 is provided with micro-nano concaveconvex structure (not shown).This micro-nano concaveconvex structure is extremely micron-sized concaveconvex structure of nanoscale, the preferably concaveconvex structure of height of projection 300nm-1 μ m.
High molecular polymer insulating barrier 12 is selected from polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber (regeneration) sponge film, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, methacrylic acid ester film, polyvinyl alcohol film, polyisobutene film, polyurethane flexible sponge film, pet film, polyvinyl butyral film, formaldehyde phenol film, neoprene film, butadiene-propylene copolymer film, natural rubber film, polyacrylonitrile film, any one in acrylonitrile vinyl chloride film.Preferably, the thickness of high molecular polymer insulating barrier 12 is 100 μ m-500 μ m.
High molecular polymer insulating barrier 12 arranges micro-nano concaveconvex structure (not shown) on a surface, then adopts the conventional methods such as radio frequency sputter, does not arrange on the face of micro-nano concaveconvex structure electrode 11 is set at high molecular polymer insulating barrier 12.This micro-nano concaveconvex structure (not shown) is extremely micron-sized concaveconvex structure of nanoscale, the preferably concaveconvex structure of height of projection 50-300nm.
The surface with micro-nano concaveconvex structure of high molecular polymer insulating barrier 12 stacks formation duplexer with the relative contact of friction electrode 13, and interlayer is without any binding.The edge of this triboelectricity machine seals with common adhesive plaster, guarantees that polymer insulation layer contacts with the appropriateness of friction electrode.
In a specific embodiment of the present invention, on the surface of the relative friction electrode 13 of high molecular polymer insulating barrier 12, micro-nano concaveconvex structure is not set, the surface of the electrode 13 that only rubs is provided with micro-nano concaveconvex structure.
In another embodiment of the present invention, the high molecular polymer insulating barrier 12 relatively surface of friction electrode 13 is provided with micro-nano concaveconvex structure, and on the surface of friction electrode 13, micro-nano concaveconvex structure is not set.
As shown in Figure 3 and Figure 4, in the preferred embodiments of the disclosure, nano friction generator comprises the first electrode 21, the first high molecular polymer insulating barrier 22, the second high molecular polymer insulating barriers 23 and the second electrodes 24 that are cascading; Wherein, between the first high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23, be provided with friction electrode 25; On at least one face that the first high molecular polymer insulating barrier 22 rubs in the face of electrode 25 and the face of relative the first high molecular polymer insulating barrier 22 of friction electrode 25 relatively, be provided with micro-nano concaveconvex structure (not shown); On at least one face that the second high molecular polymer insulating barrier 23 rubs in the face of electrode 25 and the face of relative the second high molecular polymer insulating barrier 23 of friction electrode 25 relatively, be provided with micro-nano concaveconvex structure (not shown); Described the first electrode 21 and the second electrode 24 series connection are an output electrode of triboelectricity machine voltage and current; Described friction electrode 25 is another output electrode of triboelectricity machine voltage and current.
In a specific embodiment of the present invention, nano friction generator is nontransparent layer flexible slab construction, crooked or distortion causes between the first high molecular polymer insulating barrier 22 and friction electrode 25 arbitrarily, triboelectrification between friction electrode 25 and the second high molecular polymer insulating barrier 23.This triboelectricity machine comprises the first electrode 21, the first high molecular polymer insulating barriers 22 that are cascading, friction electrode 25, the second high molecular polymer insulating barriers 23 and the second electrode 24.
The first electrode 21 and 24 pairs of material therefors of the second electrode do not have particular provisions, can form the material of conductive layer all within protection scope of the present invention, for example indium tin oxide, Graphene electrodes, nano silver wire film, and metal or alloy, wherein metal is Au Ag Pt Pd, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten or vanadium; Alloy is aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy, copper alloy, kirsite, manganese alloy, nickel alloy, lead alloy, ashbury metal, cadmium alloy, bismuth alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or tantalum alloy.
The electrode 25 that rubs in present embodiment can be selected conductive film, conducting polymer, metal material, metal material comprises simple metal and alloy, simple metal is selected from gold, silver, platinum, palladium, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten, vanadium etc., alloy can be selected from light-alloy (aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy etc.), heavy non-ferrous alloy (copper alloy, kirsite, manganese alloy, nickel alloy etc.), low-melting alloy (lead, tin, cadmium, bismuth, indium, gallium and alloy thereof), refractory alloy (tungsten alloy, molybdenum alloy, niobium alloy, tantalum alloy etc.).The thickness of friction electrode 25 is 100 μ m-500 μ m preferably, and more preferably 200 μ m, are equipped with micro-nano concaveconvex structure on two surfaces of friction electrode 25.The nanoscale that this micro-nano concaveconvex structure is regular array structure is to micron-sized concaveconvex structure or irregular nanoscale to micron-sized concaveconvex structure, preferably the concaveconvex structure of height of projection 300nm-1 μ m.
The first high molecular polymer insulating barrier 22 is identical with the second high molecular polymer insulating barrier 23 materials, be selected from polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber (regeneration) sponge film, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, methacrylic acid ester film, polyvinyl alcohol film, polyisobutene film, polyurethane flexible sponge film, pet film, polyvinyl butyral film, formaldehyde phenol film, neoprene film, butadiene-propylene copolymer film, natural rubber film, polyacrylonitrile film, any one in acrylonitrile vinyl chloride film.Preferably, the thickness of the first high molecular polymer insulating barrier 2 and the second high molecular polymer insulating barrier 23 is 100 μ m-500 μ m.
The first high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23 arrange micro-nano concaveconvex structure respectively on their surface, then adopt the conventional methods such as radio frequency sputter, at the first high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23, do not arrange on the face of micro-nano concaveconvex structure the first electrode 21 and the second electrode 24 are set.Micro-nano concaveconvex structure is extremely micron-sized concaveconvex structure of nanoscale, the preferably concaveconvex structure of height of projection 50-300nm.
The surface with micro-nano concaveconvex structure of the first high molecular polymer insulating barrier 22 stacks with the relative contact of friction electrode 25, then the surface with micro-nano concaveconvex structure of the second high molecular polymer insulating barrier 23 stacks on friction electrode 25 and forms duplexer, and interlayer is without any binding.The edge of this triboelectricity machine seals with common adhesive plaster, guarantees that polymer insulation layer contacts with the appropriateness of friction electrode.
In a specific embodiment of the present invention, on the surface of the relative friction electrode 25 of the first high molecular polymer insulating barrier 22, on the surface of friction electrode 25 relative to the second high molecular polymer insulating barrier 23, micro-nano concaveconvex structure is not all set, two surfaces of the electrode 25 that only rubs are provided with micro-nano concaveconvex structure.
In another embodiment of the present invention, on the surface of the relative friction electrode 25 of the first high molecular polymer insulating barrier 22, the surface of friction electrode 25 relative to the second high molecular polymer insulating barrier 23 is provided with micro-nano concaveconvex structure, and on two surfaces of friction electrode 25, micro-nano concaveconvex structure is not set.
As shown in Figure 5 and Figure 6, in a specific embodiment of the present invention, nano friction generator is nontransparent layer flexible slab construction, crooked or distortion causes between the first high molecular polymer insulating barrier 22 and friction electrode 25 arbitrarily, triboelectrification between friction electrode 25 and the second high molecular polymer insulating barrier 23.This triboelectricity machine comprises the first electrode 21, the first high molecular polymer insulating barriers 22 that are cascading, friction electrode 25, the second high molecular polymer insulating barriers 23 and the second electrode 24.Friction electrode 25 comprises the third electrode layer 251 being cascading, third high Molecularly Imprinted Polymer layer 252 and the 4th electrode layer 253.On the surface of third electrode layer 251 and the 4th electrode layer 253, be provided with micro-nano concaveconvex structure (not shown).This micro-nano concaveconvex structure is nanoscale to micron-sized concaveconvex structure, preferably more preferably 350-500nm of height of projection 300nm-1 μ m() concaveconvex structure.
The first electrode 21 and 24 pairs of material therefors of the second electrode do not have particular provisions, can form the material of conductive layer all within protection scope of the present invention, for example indium tin oxide, Graphene electrodes, nano silver wire film, and metal or alloy, wherein metal is Au Ag Pt Pd, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten or vanadium; Alloy is aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy, copper alloy, kirsite, manganese alloy, nickel alloy, lead alloy, ashbury metal, cadmium alloy, bismuth alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or tantalum alloy.。
The first high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23 materials can be the same or different, independently be selected from polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber (regeneration) sponge film, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, methacrylic acid ester film, polyvinyl alcohol film, polyisobutene film, polyurethane flexible sponge film, pet film, polyvinyl butyral film, formaldehyde phenol film, neoprene film, butadiene-propylene copolymer film, natural rubber film, polyacrylonitrile film, any one in acrylonitrile vinyl chloride film.Preferably, the thickness of the first high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23 is 100 μ m-500 μ m.
The first high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23 arrange micro-nano concaveconvex structure respectively on their surface, then adopt the conventional methods such as radio frequency sputter, at the first high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23, do not arrange on the face of micro-nano concaveconvex structure the first electrode 21 and the second electrode 24 are set.Micro-nano concaveconvex structure is extremely micron-sized concaveconvex structure of nanoscale, the preferably concaveconvex structure of height of projection 50-300nm.
Third high Molecularly Imprinted Polymer layer 252 material used are different with the second high polymer layer from the first high polymer layer, are selected from polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber (regeneration) sponge film, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, polymethyl methacrylate film, polyvinyl alcohol film, polyisobutene film, pet film, polyvinyl butyral film, formaldehyde phenol condensation polymer film, neoprene film, butadiene-propylene copolymer film, natural rubber film, polyacrylonitrile film, any one in acrylonitrile vinyl chloride copolymer film, preferably its thickness is 100 μ m-500 μ m, more preferably 200 μ m.
Third electrode layer 251 and 253 pairs of material therefors of the 4th electrode layer do not have particular provisions, can form the material of conductive layer all within protection scope of the present invention, for example can select conductive film, conducting polymer, metal material, metal material comprises simple metal and alloy, simple metal is selected from gold, silver, platinum, palladium, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten, vanadium etc., alloy can be selected from light-alloy (aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy etc.), heavy non-ferrous alloy (copper alloy, kirsite, manganese alloy, nickel alloy etc.), low-melting alloy (lead, tin, cadmium, bismuth, indium, gallium and alloy thereof), refractory alloy (tungsten alloy, molybdenum alloy, niobium alloy, tantalum alloy etc.).
The surface with micro-nano concaveconvex structure of the first high molecular polymer insulating barrier 22 stacks with the relative contact of third electrode layer 251 of friction electrode 5, then the surface with micro-nano concaveconvex structure of the second high molecular polymer insulating barrier 23 stack friction electrode 25 the 4th electrode layer 253 on form duplexer, interlayer is without any binding.The edge of this triboelectricity machine seals with common adhesive plaster, guarantees that polymer insulation layer contacts with the appropriateness of friction electrode.The first electrode 21 and the second electrode 24 series connection are an output electrode of triboelectricity machine voltage and current; The third electrode layer 251 of friction electrode and the 4th electrode layer 253 series connection are another output electrode of triboelectricity machine voltage and current.
In a specific embodiment of the present invention, on the surface of the relative friction electrode of the first high molecular polymer insulating barrier 22 25 third electrode layers 251, on the surface of friction electrode 25 relative to the second high molecular polymer insulating barrier 23 the 4th electrode layer 253, micro-nano concaveconvex structure is not all set, only the surface of third electrode layer 251 and the 4th electrode layer 253 is provided with micro-nano concaveconvex structure.
In another embodiment of the present invention, on the surface of the relative friction electrode of the first high molecular polymer insulating barrier 22 25 third electrode layers 251, the surface of friction electrode 25 relative to the second high molecular polymer insulating barrier 23 the 4th electrode layer 253 is provided with micro-nano concaveconvex structure, and on the surface of third electrode layer 251 and the 4th electrode layer 253, micro-nano concaveconvex structure is not set.
As shown in Figure 5 and Figure 6, in a specific embodiment of the present invention, nano friction generator is transparent layer flexible slab construction, crooked or distortion causes between the first high molecular polymer insulating barrier 22 and friction electrode 25 arbitrarily, triboelectrification between friction electrode 25 and the second high molecular polymer insulating barrier 23.This triboelectricity machine comprises the first electrode 21, the first high molecular polymer insulating barriers 22 that are cascading, friction electrode 25, the second high molecular polymer insulating barriers 23 and the second electrode 24.Friction electrode 25 comprises the third electrode layer 251 being cascading, third high Molecularly Imprinted Polymer layer 252 and the 4th electrode layer 253.On at least one face in the face of the face first high molecular polymer insulating barrier 22 relative to third electrode layer 251 of the first high molecular polymer insulating barrier 22 relative third electrode layers 251, be provided with micro-nano concaveconvex structure (not shown); The face of relative the 4th electrode layer 253 of the second high molecular polymer insulating barrier 23 is provided with micro-nano concaveconvex structure with at least one face in the face of relative the second high molecular polymer insulating barrier 23 of the 4th electrode layer 253.Described the first electrode 21 and the second electrode 24 series connection are an output electrode of triboelectricity machine voltage and current; The third electrode layer 251 of described friction electrode and the 4th electrode layer 253 series connection are another output electrode of triboelectricity machine voltage and current.
The first electrode 21, the second electrode 24, third electrode layer 251 and the 4th electrode layer 253 are independently selected from respectively any one in indium tin oxide (ITO), Graphene electrodes and nano silver wire film.The first high molecular polymer insulating barrier 22, the second high molecular polymer insulating barrier 23, third high Molecularly Imprinted Polymer layer 252 are independently selected from respectively any one in following transparent high polymer: PETG (PET), dimethyl silicone polymer (PDMS), polystyrene (PS), polymethyl methacrylate (PMMA), Merlon (PC) and polymeric liquid crystal copolymer (LCP).Adopt after above-mentioned preferred material, at this moment whole triboelectricity machine is a full transparent and soft device.
Micro-nano concaveconvex structure can adopt several different methods to be prepared, for example, with the silicon template compacting that has ad hoc rules bulge-structure, with sand papering metal surface and additive method.Below with reference to Fig. 7 and Fig. 8, describe a kind of preparation method of micro-nano concaveconvex structure 6 in detail.
S1 makes silicon template.Silicon chip is made to regular figure by the method for photoetching on surface.Carry out the technique anisotropic etching of wet etching for the silicon chip of figure, can carve the rectangular pyramid array structure of spill, or also can carve the cube array structure of spill with the dry technique isotropic etching of carving.Carve good template afterwards and clean up with acetone and isopropyl alcohol, then all templates are all carried out the processing of surface silicon alkanisation in the atmosphere of trim,ethylchlorosilane, and the silicon template of handling well is stand-by.
S2 makes the polymer membrane with micro-nano relief structured surface.First polymer paste is coated on to silicon template surface, vacuum degassing, removes the unnecessary mixture of silicon chip surface by the mode of rotary coating, forms the polymeric liquid film of thin layer.Whole template is solidified, then peel off, obtain having uniformly the polymer film of specific microstructure array.
Introduce in detail the electricity generating principle of above-mentioned triboelectricity machine below.When each layer of triboelectricity machine of the present invention is bent downwardly, due to the micro-nano concaveconvex structure existing, friction electrode and high molecular polymer insulating barrier in triboelectricity machine (comprise high molecular polymer insulating barrier 12, or first high molecular polymer insulating barrier 22 and/or the surperficial phase mutual friction of the second high molecular polymer insulating barrier 23 produce electrostatic charge, the generation of electrostatic charge can make the electric capacity between electrode and friction electrode change, thereby causes occurring electrical potential difference between electrode and friction electrode.Due to the existence of electrical potential difference between electrode and friction electrode, free electron by by external circuit by the low effluent of electromotive force to the high side of electromotive force, thereby in external circuit, form electric current.When each layer of triboelectricity machine of the present invention returns to original state, at this moment the built-in potential being formed between electrode and friction electrode disappears, now between Balanced electrode and friction electrode, will again produce reverse electrical potential difference, free electron forms reverse current by external circuit.By repeatedly rubbing and recovering, just can in external circuit, form periodic ac signal.
Below by specific embodiment, set forth the enforcement of method of the present invention, one skilled in the art will appreciate that this should not be understood to the restriction to the claims in the present invention scope.
Embodiment 1
As illustrated in fig. 1 and 2, the present embodiment nano friction generator is nontransparent multi-layer film type, is of a size of 4.5cm * 1.2cm, and gross thickness is approximately 250 μ m.This triboelectricity machine comprises the electrode 11 being cascading, high molecular polymer insulating barrier 12, friction electrode 13.
Adopt (4.5cm * 1.2cm) polyimide film (thickness 125 μ m, the 500HN of Du Pont) of rectangle as high molecular polymer insulating barrier 12.High molecular polymer insulating barrier 12 arranges the micro-nano concaveconvex structure 6(of height of projection 150nm referring to Fig. 7 and 8 on a surface), the gold thin film of the upper plating in another surface thickness 100nm, this gold thin film is electrode 11.
Adopt the Copper Foil of thickness 100 μ m as friction electrode 13, two surfaces of this Copper Foil adopt the method for fine sandpaper polishing that the micro-nano concaveconvex structure of irregular height of projection within the scope of 350-500nm is set.
Friction electrode 13, with the surface with micro-nano concaveconvex structure 6 facing to high molecular polymer insulating barrier 12 of micro-nano concaveconvex structure, stacks friction electrode 13 on high molecular polymer insulating barrier 12, obtains triboelectricity machine 1#.The edge of this triboelectricity machine seals with common adhesive plaster.
Triboelectricity machine 1# is at I-V(current-voltage) measurement in show typical open circuit feature.The stepping motor of life cycle vibration (0.33Hz and 0.13% deformation) makes the crooked of triboelectricity machine 1# generating period and discharges, and the maximum output voltage of triboelectricity machine 1# and current signal have reached respectively 70V and 18 μ A(please supplement).
Embodiment 2
As shown in Figure 3 and Figure 4, the present embodiment nano friction generator is nontransparent multi-layer film type, is of a size of 4.5cm * 1.2cm, and gross thickness is approximately 500 μ m.This triboelectricity machine comprises the first electrode 21, the first high molecular polymer insulating barriers 22 that are cascading, friction electrode 25, the second high molecular polymer insulating barriers 23 and the second electrode 24.
Adopt (4.5cm * 1.2cm) polyimide film (thickness 125 μ m, the 500HN of Du Pont) of rectangle as the first high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23.The first high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23 arrange respectively the micro-nano concaveconvex structure of height of projection 150nm on a surface, the aluminium film of the upper plating in another surface thickness 100nm, this aluminium film is the first electrode 21 and the second electrode 24.
Adopt the Copper Foil of thickness 100 μ m as friction electrode 25, two surfaces of this Copper Foil adopt the method for fine sandpaper polishing that the micro-nano concaveconvex structure of irregular height of projection within the scope of 350-500nm is set respectively.
Friction electrode 25 stacks on the surface with micro-nano concaveconvex structure of the first high molecular polymer insulating barrier 22, then the second high molecular polymer insulating barrier 23 has relatively (towards) friction electrode 25 of micro-nano concaveconvex structure face, stack on friction electrode 25, obtain triboelectricity machine 2#.The edge of this triboelectricity machine seals with common adhesive plaster.
Triboelectricity machine 2# is at I-V(current-voltage) measurement in show typical open circuit feature.The stepping motor of life cycle vibration (0.33Hz and 0.13% deformation) makes the crooked of triboelectricity machine 2# generating period and discharges, and the maximum output voltage of triboelectricity machine 2# and current signal have reached respectively 80V and 16 μ A.
Embodiment 3
The structure of the present embodiment is substantially the same manner as Example 2, and difference is only to rub on two surfaces of electrode 25 micro-nano concaveconvex structure is not set, and the first high molecular polymer insulating barrier 22 material therefors are polyformaldehyde.Adopt the method identical with embodiment 2 to test, the maximum output voltage of triboelectricity machine 3# and current signal have reached respectively 50V and 10 μ A.
Embodiment 4
As shown in Figure 5 and Figure 6, the present embodiment nano friction generator is nontransparent multi-layer film type, is of a size of 4.5cm * 1.2cm, and gross thickness is approximately 650 μ m.This triboelectricity machine comprises the first electrode 21, the first high molecular polymer insulating barriers 22 that are cascading, friction electrode 25, the second high molecular polymer insulating barriers 23 and the second electrode 24.Friction electrode 25 comprises the third electrode layer 251 being cascading, third high Molecularly Imprinted Polymer layer 252 and the 4th electrode layer 253.
Adopt (4.5cm * 1.2cm) polyimide film (thickness 125 μ m, the 500HN of Du Pont) of rectangle as the first high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23.The first high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23 arrange respectively the micro-nano concaveconvex structure of height of projection 300nm on a surface, the molybdenum alloy film of the upper plating in another surface thickness 100nm, this molybdenum alloy film is the first electrode 21 and the second electrode 24.
Adopt the PETG (PET) of thickness 200 μ m as third high Molecularly Imprinted Polymer insulating barrier 252, adopt gold thin film that the method with magnetron sputtering or evaporation arranges thickness 1 μ m on two surfaces of PETG as third electrode layer 251 and the 4th electrode layer 253.。
Third electrode layer 251 is relative with the face with micro-nano concaveconvex structure of the first high molecular polymer insulating barrier 22, friction electrode 25 is stacked on the first high molecular polymer insulating barrier 22, then the second high molecular polymer insulating barrier 23 has relative the 4th electrode layer 253 of micro-nano concaveconvex structure face, the second high molecular polymer insulating barrier 23 is stacked on friction electrode 25, obtain triboelectricity machine 4#.The edge of this triboelectricity machine seals with common adhesive plaster.
Adopt the method identical with embodiment 1 to test, the maximum output voltage of triboelectricity machine 4# and current signal have reached respectively 150V and 27 μ A.
Embodiment 5
As shown in Figure 5 and Figure 6, the present embodiment nano friction generator is nontransparent multi-layer film type, is of a size of 4.5cm * 1.2cm, and gross thickness is approximately 650 μ m.This triboelectricity machine comprises the first electrode 21, the first high molecular polymer insulating barriers 22 that are cascading, friction electrode 25, the second high molecular polymer insulating barriers 23 and the second electrode 24.Friction electrode 25 comprises the third electrode layer 251 being cascading, third high Molecularly Imprinted Polymer layer 252 and the 4th electrode layer 253.
Adopt (4.5cm * 1.2cm) styrene-acrylonitrile copolymer copolymer film (thickness 125 μ m) of rectangle as the first high molecular polymer insulating barrier 22, adopt the polymethyl methacrylate of thickness 220 μ m as the second high molecular polymer insulating barrier 23.The first high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23 arrange respectively the micro-nano concaveconvex structure of height of projection 50nm on a surface, the gold thin film of the upper plating in another surface thickness 100nm, this gold thin film is the first electrode 21 and the second electrode 24.
Adopt the PETG (PET) of thickness 200 μ m as third high Molecularly Imprinted Polymer insulating barrier 252, the gold thin film that the method for employing magnetron sputtering or evaporation arranges thickness 1 μ m on two surfaces of PETG is as third electrode layer 251 and the 4th electrode layer 253.
Third electrode layer 251 is relative with the face with micro-nano concaveconvex structure of the first high molecular polymer insulating barrier 22, friction electrode 25 is stacked on the first high molecular polymer insulating barrier 22, then the second high molecular polymer insulating barrier 23 has relative the 4th electrode layer 253 of micro-nano concaveconvex structure face, the second high molecular polymer insulating barrier 23 is stacked on friction electrode 25, obtain triboelectricity machine 5#.The edge of this triboelectricity machine seals with common adhesive plaster.
Adopt the method identical with embodiment 1 to test, the maximum output voltage of triboelectricity machine 5# and current signal have reached respectively 130V and 22 μ A.
Embodiment 6
As shown in Figure 5 and Figure 6, the present embodiment nano friction generator is transparent multi-layer film type, is of a size of 4.5cm * 1.2cm, and gross thickness is approximately 650 μ m.This triboelectricity machine comprises the first electrode 21, the first high molecular polymer insulating barriers 22 that are cascading, friction electrode 25, the second high molecular polymer insulating barriers 23 and the second electrode 24.Friction electrode 25 comprises the third electrode layer 251 being cascading, third high Molecularly Imprinted Polymer layer 252 and the 4th electrode layer 253.
Adopt the dimethyl silicone polymer of thickness 220 μ m as the first high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23.The first high molecular polymer insulating barrier 22 and the second high molecular polymer insulating barrier 23 arrange respectively the micro-nano concaveconvex structure of height of projection 150nm on a surface, another surface is upper adopts conventional vacuum sputtering technology to form indium tin oxide (ITO) conductive film, and this conductive film is the first electrode 21 and the second electrode 24.
Adopt the PETG (PET) of thickness 200 μ m as third high Molecularly Imprinted Polymer insulating barrier 252, adopt conventional vacuum sputtering technology on two surfaces of third high Molecularly Imprinted Polymer insulating barrier 252, to form respectively indium tin oxide (ITO) conductive film, this conductive film is third electrode layer 251 and the 4th electrode layer 253.
Relative with the face with micro-nano concaveconvex structure of the first high molecular polymer insulating barrier 22 according to third electrode layer 251, friction electrode 25 is stacked on the first high molecular polymer insulating barrier 22, then according to the second high molecular polymer insulating barrier 23, there is relative the 4th electrode layer 253 of micro-nano concaveconvex structure face, the second high molecular polymer insulating barrier 23 is stacked on friction electrode 25, obtain triboelectricity machine 6#.The edge of this triboelectricity machine seals with common adhesive plaster.
Adopt the method identical with embodiment 1 to test, the maximum output voltage of triboelectricity machine 6# and current signal have reached respectively 80V and 18 μ A.
Embodiment 7
The present embodiment nano friction generator is nontransparent multi-layer film type, 4.5cm * 1.2cm, and gross thickness is approximately 400 μ m.This triboelectricity machine comprises the first electrode being cascading, the first high molecular polymer insulating barrier, the second high molecular polymer insulating barrier and the second electrode.
Adopt (4.5cm * 1.2cm) polyimide film (thickness 125 μ m of rectangle, the 500HN of Du Pont), as the first high molecular polymer insulating barrier, PETG (PET) film of thickness 220 μ m is as the second high molecular polymer insulating barrier.The first high molecular polymer insulating barrier and the second high molecular polymer insulating barrier arrange respectively the micro-nano concaveconvex structure of height of projection 150nm on a surface, the gold thin film of the upper plating in another surface thickness 100nm, and this gold thin film is the first electrode and the second electrode.The edge of this triboelectricity machine seals with common adhesive plaster, obtains triboelectricity machine 7#.
Adopt the method identical with embodiment 1 to test, the maximum output voltage of triboelectricity machine 7# and current signal have reached respectively 18V and 1 μ A.
Triboelectricity machine of the present invention can be applied to various self-driven systems as touch-screen, electronic console, and have in potential using value field in other personal electric product, it has the effect that production cost is low, generating efficiency is high.The triboelectricity machine of embodiment 2-6 has used friction electrode as electrode between two parties, is equivalent to two generators to integrate together, can effectively improve the power output of generator.The triboelectricity machine maximum output voltage of embodiment 1-6 and current signal have reached 80V and more than 16 μ A, thereby can in diaphragm pressure sensor, apply.
Such scheme comprises first-selected embodiment and during the optimal mode of this invention known for inventor while putting on record, above-described embodiment only provides as illustrative example.Many alienation to the specific embodiment disclosing in this explanation, do not depart from the spirit and scope of this invention, will be easily to differentiate.Therefore, this scope of invention is determined the claim by appended, and the special embodiment describing above being not limited to.

Claims (17)

1. a nano friction generator, comprises the electrode being cascading, high molecular polymer insulating barrier, and friction electrode;
On at least one face in two faces that high molecular polymer insulating barrier and friction electrode are oppositely arranged, be provided with micro-nano concaveconvex structure;
Described electrode and friction electrode are triboelectricity machine voltage and current output electrode.
2. nano friction generator according to claim 1, it is characterized in that, described electrode material therefor is indium tin oxide, Graphene, nano silver wire film, metal or alloy, and wherein metal is Au Ag Pt Pd, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten or vanadium; Alloy is aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy, copper alloy, kirsite, manganese alloy, nickel alloy, lead alloy, ashbury metal, cadmium alloy, bismuth alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or tantalum alloy; Described friction electrode material therefor is metal or alloy, and wherein metal is Au Ag Pt Pd, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten or vanadium; Alloy is aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy, copper alloy, kirsite, manganese alloy, nickel alloy, lead alloy, ashbury metal, cadmium alloy, bismuth alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or tantalum alloy.
3. nano friction generator according to claim 1 and 2, it is characterized in that, described high molecular polymer insulating barrier material therefor is selected from polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber (regeneration) sponge film, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, polymethyl methacrylate film, polyvinyl alcohol film, polyisobutene film, pet film, polyvinyl butyral film, formaldehyde phenol condensation polymer film, neoprene film, butadiene-propylene copolymer film, natural rubber film, polyacrylonitrile film, any one in acrylonitrile vinyl chloride copolymer film.
4. according to the nano friction generator described in claim 1-3 any one, it is characterized in that, the micro-nano concaveconvex structure arranging on described high molecular polymer surface of insulating layer is extremely micron-sized concaveconvex structure of nanoscale, preferably the nano concavo-convex structure of height of projection 50nm-300nm.
5. according to the nano friction generator described in claim 1-4 any one, it is characterized in that, the micro-nano concaveconvex structure arranging on described friction electrode surface is nanoscale to micron-sized concaveconvex structure, preferably more preferably 350-500nm of height of projection 300nm-1 μ m() nano concavo-convex structure.
6. a nano friction generator, comprises the first electrode being cascading, the first high molecular polymer insulating barrier, the second high molecular polymer insulating barrier and the second electrode; It is characterized in that, between the first high molecular polymer insulating barrier and the second high molecular polymer insulating barrier, be provided with friction electrode;
On at least one face in the first high molecular polymer insulating barrier and two opposite faces of friction electrode, be provided with micro-nano concaveconvex structure;
On at least one face in the second high molecular polymer insulating barrier and two opposite faces of friction electrode, be provided with micro-nano concaveconvex structure;
Described the first electrode and the series connection of the second electrode are an output electrode of triboelectricity machine voltage and current; Described friction electrode is another output electrode of triboelectricity machine voltage and current.
7. nano friction generator according to claim 6, is characterized in that, described friction electrode material therefor is metal or alloy, and wherein metal is Au Ag Pt Pd, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten or vanadium; Alloy is aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy, copper alloy, kirsite, manganese alloy, nickel alloy, lead alloy, ashbury metal, cadmium alloy, bismuth alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or tantalum alloy.
8. nano friction generator according to claim 7, is characterized in that, described the first high molecular polymer insulating barrier is identical with described the second high molecular polymer insulating barrier material, described the first high molecular polymer insulating barrier and the second high molecular polymer insulating barrier material therefor are selected from polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber (regeneration) sponge film, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, polymethyl methacrylate film, polyvinyl alcohol film, polyisobutene film, pet film, polyvinyl butyral film, formaldehyde phenol condensation polymer film, neoprene film, butadiene-propylene copolymer film, natural rubber film, polyacrylonitrile film, any one in acrylonitrile vinyl chloride copolymer film.
9. nano friction generator according to claim 6, is characterized in that, described friction electrode comprises the third electrode layer being cascading, third high Molecularly Imprinted Polymer layer and the 4th electrode layer;
On at least one face in two opposite face of the first high molecular polymer insulating barrier and third electrode layer, be provided with micro-nano concaveconvex structure;
On at least one face in the second high molecular polymer insulating barrier and two opposite faces of the 4th electrode layer, be provided with micro-nano concaveconvex structure;
Described the first electrode and the series connection of the second electrode are an output electrode of triboelectricity machine voltage and current; The third electrode layer of described friction electrode and the series connection of the 4th electrode layer are another output electrode of triboelectricity machine voltage and current.
10. nano friction generator according to claim 9, is characterized in that, described the first high molecular polymer insulating barrier and described the second high molecular polymer insulating barrier material are identical or different; Described third electrode layer and the 4th electrode layer material are identical or different.
11. nano friction generators according to claim 10, is characterized in that, described the first high molecular polymer insulating barrier and the second high molecular polymer insulating barrier are independently selected from respectively polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber (regeneration) sponge film, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, polymethyl methacrylate film, polyvinyl alcohol film, polyisobutene film, pet film, polyvinyl butyral film, formaldehyde phenol condensation polymer film, neoprene film, butadiene-propylene copolymer film, natural rubber film, polyacrylonitrile film, any one in acrylonitrile vinyl chloride copolymer film, described third electrode layer and the 4th electrode layer are independently selected from respectively metal or alloy, and wherein metal is Au Ag Pt Pd, aluminium, nickel, copper, titanium, chromium, selenium, iron, manganese, molybdenum, tungsten or vanadium, alloy is aluminium alloy, titanium alloy, magnesium alloy, beryllium alloy, copper alloy, kirsite, manganese alloy, nickel alloy, lead alloy, ashbury metal, cadmium alloy, bismuth alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or tantalum alloy.
12. according to the nano friction generator described in claim 6-11 any one, it is characterized in that, third high Molecularly Imprinted Polymer layer material used is different with the second high polymer layer from the first high polymer layer, is selected from polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, fiber (regeneration) sponge film, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, polymethyl methacrylate film, polyvinyl alcohol film, polyisobutene film, pet film, polyvinyl butyral film, formaldehyde phenol condensation polymer film, neoprene film, butadiene-propylene copolymer film, natural rubber film, polyacrylonitrile film, any one in acrylonitrile vinyl chloride copolymer film.
13. nano friction generators according to claim 6, described the first high molecular polymer insulating barrier, the second high molecular polymer insulating barrier, third high Molecularly Imprinted Polymer insulating barrier are transparent material; Described the first high molecular polymer insulating barrier, the second high molecular polymer insulating barrier, third high Molecularly Imprinted Polymer layer material therefor are independently selected from respectively any one in following transparent high polymer: PETG (PET), dimethyl silicone polymer (PDMS), polystyrene (PS), polymethyl methacrylate (PMMA), Merlon (PC) and polymeric liquid crystal copolymer (LCP).
14. according to the nano friction generator described in claim 6-13 any one, it is characterized in that, the micro-nano concaveconvex structure arranging on described the first high molecular polymer insulating barrier and the second high molecular polymer surface of insulating layer is extremely micron-sized concaveconvex structure of nanoscale, preferably the nano concavo-convex structure of height of projection 50nm-300nm.
15. according to the nano friction generator described in claim 6-14 any one, it is characterized in that, the micro-nano concaveconvex structure arranging on described friction electrode surface is extremely micron-sized concaveconvex structure of nanoscale, preferably the nano concavo-convex structure of height of projection 300nm-1 μ m.
16. 1 kinds of nano friction generating sets, comprise the nano friction generator as described in claim 1-5 or 6-15 any one of a plurality of serial or parallel connections.
The application of 17. nano friction generators as described in claim 1-5 or 6-15 any one in diaphragm pressure sensor.
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