CN103553612B - Low-temperature sinterable microwave dielectric ceramic Ba6W2V2O17 and its preparation method - Google Patents
Low-temperature sinterable microwave dielectric ceramic Ba6W2V2O17 and its preparation method Download PDFInfo
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Abstract
本发明公开了一种可低温烧结的微波介电陶瓷Ba6W2V2O17及其制备方法。可低温烧结的微波介电陶瓷的组成为Ba6W2V2O17。(1)将纯度为99.9%以上的BaCO3、WO3和V2O5的原始粉末按Ba6W2V2O17化学式称量配料。(2)将步骤(1)原料混合湿式球磨12小时,溶剂为蒸馏水,烘干后在830℃大气气氛中预烧6小时。(3)在步骤(2)制得的粉末中添加粘结剂并造粒后,再压制成型,最后在890~920℃大气气氛中烧结4小时;所述的粘结剂采用质量浓度为5%的聚乙烯醇溶液,剂量占粉末总质量的3%。本发明制备的陶瓷在890~920℃烧结良好,其介电常数达到25~26,品质因数Qf值高达88000-94000GHz,谐振频率温度系数小,可以与Ag电极低温共烧,在工业上有着极大的应用价值。The invention discloses a low-temperature sinterable microwave dielectric ceramic Ba 6 W 2 V 2 O 17 and a preparation method thereof. The composition of the low-temperature sinterable microwave dielectric ceramic is Ba 6 W 2 V 2 O 17 . (1) The raw powders of BaCO 3 , WO 3 and V 2 O 5 with a purity of more than 99.9% are weighed and compounded according to the chemical formula Ba 6 W 2 V 2 O 17 . (2) The raw materials in step (1) were mixed and wet-type ball milled for 12 hours, the solvent was distilled water, dried and pre-fired in an atmosphere at 830°C for 6 hours. (3) Add a binder to the powder prepared in step (2) and granulate it, then press it into shape, and finally sinter it in the air atmosphere at 890-920°C for 4 hours; the binder is used at a mass concentration of 5 % polyvinyl alcohol solution, the dosage accounts for 3% of the total mass of the powder. The ceramic prepared by the present invention is well sintered at 890-920°C, its dielectric constant reaches 25-26, its quality factor Qf value is as high as 88000-94000 GHz, and its resonant frequency temperature coefficient is small. Great application value.
Description
技术领域 technical field
本发明涉及介电陶瓷材料,特别是涉及在微波频率使用的介质基板、谐振器和滤波器等微波元器件的微波介电陶瓷材料及其制备方法。 The invention relates to a dielectric ceramic material, in particular to a microwave dielectric ceramic material for microwave components used at microwave frequencies, such as a dielectric substrate, a resonator, and a filter, and a preparation method thereof.
背景技术 Background technique
微波介电陶瓷是指应用于微波频段(主要是UHF、SHF频段)电路中作为介质材料并完成一种或多种功能的陶瓷,在现代通讯中被广泛用作谐振器、滤波器、介质基片和介质导波回路等元器件,是现代通信技术的关键基础材料,已在便携式移动电话、汽车电话、无绳电话、电视卫星接受器和军事雷达等方面有着十分重要的应用,在现代通讯工具的小型化、集成化过程中正发挥着越来越大的作用。 Microwave dielectric ceramics refer to ceramics that are used as dielectric materials in circuits in the microwave frequency band (mainly UHF and SHF bands) and perform one or more functions. They are widely used as resonators, filters, and dielectric substrates in modern communications. Components such as chips and dielectric waveguide circuits are the key basic materials of modern communication technology. They have been used in portable mobile phones, car phones, cordless phones, TV satellite receivers and military radars. They are used in modern communication tools. It is playing an increasingly important role in the process of miniaturization and integration.
应用于微波频段的介电陶瓷,应满足如下介电特性的要求:(1)系列化介电常数εr以适应不同频率及不同应用场合的要求;(2)高的品质因数Q值或介质损耗tanδ以降低噪音,一般要求Qf≥3000 GHz;(3) 谐振频率的温度系数τ?尽可能小以保证器件具有好的热稳定性,一般要求-10/℃≤τ?≤+10 ppm/℃。国际上从20世纪30年代末就有人尝试将电介质材料应用于微波技术。 Dielectric ceramics used in the microwave frequency band should meet the following requirements for dielectric properties: (1) Serialized dielectric constant ε r to meet the requirements of different frequencies and different applications; (2) High quality factor Q value or dielectric Loss tanδ to reduce noise, generally requires Qf ≥ 3000 GHz ; (3) The temperature coefficient τ of the resonant frequency ? ℃. Internationally, since the late 1930s, there have been attempts to apply dielectric materials to microwave technology.
根据相对介电常数εr的大小与使用频段的不同,通常可将已被开发和正在开发的微波介电陶瓷分为4类。 According to the relative permittivity ε r and the frequency band used, the microwave dielectric ceramics that have been developed and are being developed can usually be divided into 4 categories.
(1)超低介电常数微波介电陶瓷,主要代表是Al2O3-TiO2、Y2BaCuO5、MgAl2O4和Mg2SiO4等,其εr≤20,品质因数Q×f≥50000GHz,τ?≤10 ppm/°C。主要用于微波基板以及高端微波元器件。 (1) Ultra-low dielectric constant microwave dielectric ceramics, mainly represented by Al 2 O 3 -TiO 2 , Y 2 BaCuO 5 , MgAl 2 O 4 and Mg 2 SiO 4 , etc., whose ε r ≤ 20, quality factor Q× f≥50000GHz, τ ≤ 10 ppm/°C. Mainly used for microwave substrates and high-end microwave components.
(2)低εr和高Q值的微波介电陶瓷,主要是BaO-MgO-Ta2O5, BaO-ZnO-Ta2O5或BaO-MgO-Nb2O5, BaO-ZnO-Nb2O5系统或它们之间的复合系统MWDC材料。其εr=25~30, Q=(1~2)×104(在f≥10 GHz下), τ?≈0。主要应用于f≥8 GHz的卫星直播等微波通信机中作为介质谐振器件。 (2) Microwave dielectric ceramics with low ε r and high Q value, mainly BaO-MgO-Ta 2 O 5 , BaO-ZnO-Ta 2 O 5 or BaO-MgO-Nb 2 O 5 , BaO-ZnO-Nb 2 O 5 system or composite system MWDC materials between them. Its ε r =25~30, Q=(1~2)×10 4 (at f≥10 GHz), τ ? ≈0. It is mainly used as a dielectric resonator device in microwave communication devices such as satellite broadcasting with f≥8 GHz.
(3)中等εr和Q值的微波介电陶瓷,主要是以BaTi4O9、Ba2Ti9O20和(Zr、Sn)TiO4等为基的MWDC材料,其εr=35~40,Q=(6~9)×103(在f=3~-4GHz下),τ?≤5 ppm/°C。主要用于4~8 GHz 频率范围内的微波军用雷达及通信系统中作为介质谐振器件。 (3) Microwave dielectric ceramics with medium ε r and Q value, mainly MWDC materials based on BaTi 4 O 9 , Ba 2 Ti 9 O 20 and (Zr, Sn) TiO 4 , whose ε r = 35~ 40, Q=(6~9)×10 3 (at f=3~-4GHz), τ ≤ 5 ppm/°C. It is mainly used as a dielectric resonant device in microwave military radar and communication systems in the frequency range of 4-8 GHz.
(4)高εr而Q值较低的微波介电陶瓷,主要用于0.8~4GHz 频率范围内民用移动通讯系统,这也是微波介电陶瓷研究的重点。80年代以来,Kolar、Kato等人相继发现并研究了类钙钛矿钨青铜型BaO—Ln2O3—TiO2系列(Ln=La、 Sm、 Nd或Pr等,简称BLT系)、复合钙钛矿结构CaO—Li2O—Ln2O3—TiO2系列、铅基系列材料、Ca1-xLn2x/3TiO3系等高εr微波介电陶瓷,其中BLT体系的BaO—Nd2O3—TiO2材料介电常数达到90,铅基系列 (Pb,Ca)ZrO3介电常数达到105。 (4) Microwave dielectric ceramics with high ε r and low Q value are mainly used in civil mobile communication systems in the frequency range of 0.8-4GHz, which is also the focus of research on microwave dielectric ceramics. Since the 1980s, Kolar, Kato and others have successively discovered and studied perovskite-like tungsten bronze BaO—Ln 2 O 3 —TiO 2 series (Ln=La, Sm, Nd or Pr, etc., referred to as BLT series), composite calcium Titanite structure CaO—Li 2 O—Ln 2 O 3 —TiO 2 series, lead-based series materials, Ca 1-x Ln 2x/3 TiO 3 series and other high ε r microwave dielectric ceramics, among which BaO—Nd of BLT system The dielectric constant of 2 O 3 —TiO 2 materials reaches 90, and the dielectric constant of lead-based series (Pb,Ca)ZrO 3 reaches 105.
以上这些材料体系的烧结温度一般高于1300°C,不能直接与Ag和Cu 等低熔点金属共烧形成多层陶瓷电容器。近年来,随着低温共烧陶瓷技术(Low Temperature Co-fired Ceramics, LTCC)的发展和微波多层器件发展的要求,国内外的研究人员对一些低烧体系材料进行了广泛的探索和研究,主要是采用微晶玻璃或玻璃-陶瓷复合材料体系,因低熔点玻璃相具有相对较高的介质损耗,玻璃相的存在大大提高了材料的介质损耗。因此研制无玻璃相的可低温烧结的微波介电陶瓷是当前研究的重点。我们对组成为Ba6W2V2O17、Ba6W2Nb2O17、Sr6W2Nb2O17和Sr6W2V2O17陶瓷进行了烧结特性与微波介电性能研究,结果发现以上陶瓷烧结温度低于950°C,但是仅Ba6W2V2O17具有优异的综合微波介电性能,可广泛用于各种谐振器和滤波器等微波器件的制造,可满足低温共烧技术及微波多层器件的需要。 The sintering temperature of the above material systems is generally higher than 1300°C, and cannot be directly co-fired with low melting point metals such as Ag and Cu to form multilayer ceramic capacitors. In recent years, with the development of low temperature co-fired ceramics (Low Temperature Co-fired Ceramics, LTCC) and the requirements of the development of microwave multilayer devices, researchers at home and abroad have carried out extensive exploration and research on some low-temperature co-fired materials, mainly It adopts glass-ceramic or glass-ceramic composite material system, because the low melting point glass phase has a relatively high dielectric loss, the existence of the glass phase greatly improves the dielectric loss of the material. Therefore, the development of low-temperature sinterable microwave dielectric ceramics without glass phase is the focus of current research. We studied the sintering characteristics and microwave dielectric properties of ceramics with compositions of Ba 6 W 2 V 2 O 17 , Ba 6 W 2 Nb 2 O 17 , Sr 6 W 2 Nb 2 O 17 and Sr 6 W 2 V 2 O 17 , it was found that the sintering temperature of the above ceramics is lower than 950 ° C, but only Ba 6 W 2 V 2 O 17 has excellent comprehensive microwave dielectric properties, and can be widely used in the manufacture of microwave devices such as various resonators and filters. It meets the needs of low-temperature co-firing technology and microwave multilayer devices.
发明内容 Contents of the invention
本发明的目的是提供一种具有低损耗与良好的热稳定性,烧结温度低,可以与Ag低温共烧的微波介电陶瓷及其制备方法。 The object of the present invention is to provide a microwave dielectric ceramic with low loss, good thermal stability, low sintering temperature, and co-fired with Ag at low temperature and its preparation method.
本发明涉及的可低温烧结的微波介电陶瓷的化学组成为:Ba6W2V2O17。 The chemical composition of the low-temperature sinterable microwave dielectric ceramics involved in the present invention is: Ba 6 W 2 V 2 O 17 .
所述可低温烧结的微波介电陶瓷的制备方法具体步骤为: The specific steps of the preparation method of the low-temperature sinterable microwave dielectric ceramic are:
(1)将纯度为99.9%以上的BaCO3、WO3和V2O5的原始粉末按Ba6W2V2O17化学式称量配料。 (1) The raw powders of BaCO 3 , WO 3 and V 2 O 5 with a purity of more than 99.9% are weighed and compounded according to the chemical formula Ba 6 W 2 V 2 O 17 .
(2)将步骤(1)原料混合湿式球磨12小时,溶剂为蒸馏水,烘干后在830℃大气气氛中预烧6小时。 (2) The raw materials in step (1) were mixed and wet-type ball milled for 12 hours, the solvent was distilled water, dried and pre-fired in an atmosphere at 830°C for 6 hours.
(3)在步骤(2)制得的粉末中添加粘结剂并造粒后,再压制成型,最后在890~920℃大气气氛中烧结4小时;所述的粘结剂采用质量浓度为5%的聚乙烯醇溶液,剂量占粉末总质量的3%。 (3) Add a binder to the powder prepared in step (2) and granulate it, then press it into shape, and finally sinter it in the air atmosphere at 890-920°C for 4 hours; the binder is used at a mass concentration of 5 % polyvinyl alcohol solution, the dosage accounts for 3% of the total mass of the powder.
本发明制备的陶瓷在890~920℃烧结良好,其介电常数达到25~26,品质因数Qf值高达88000-94000GHz,谐振频率温度系数小,可以与Ag电极低温共烧,在工业上有着极大的应用价值。 The ceramic prepared by the present invention is well sintered at 890-920°C, its dielectric constant reaches 25-26, its quality factor Qf value is as high as 88000-94000 GHz, and its resonant frequency temperature coefficient is small. Great application value.
具体实施方式 Detailed ways
实施例: Example:
表1示出了构成本发明的不同烧结温度的4个具体实施例及其微波介电性能。其制备方法如上所述,用圆柱介质谐振器法进行微波介电性能的评价。将Ba6W2V2O17粉料与占粉料质量20%的Ag粉混合、压制成型后,在920℃下烧结4小时;X 射线衍射物相分析与扫描电镜观察都显示Ba6W2V2O17与Ag没发生化学反应,即Ba6W2V2O17可以与Ag电极低温共烧。 Table 1 shows four specific examples of different sintering temperatures constituting the present invention and their microwave dielectric properties. The preparation method is as above, and the microwave dielectric performance is evaluated by the cylindrical dielectric resonator method. Ba 6 W 2 V 2 O 17 powder was mixed with Ag powder accounting for 20% of the powder mass, pressed and molded, and then sintered at 920°C for 4 hours; X-ray diffraction phase analysis and scanning electron microscope observation showed that Ba 6 W 2 V 2 O 17 has no chemical reaction with Ag, that is, Ba 6 W 2 V 2 O 17 can be co-fired with Ag electrode at low temperature.
本发明决不限于以上实施例。烧结温度的上下限、区间取值都能实现本发明,在此不一一列举实施例。 The present invention is by no means limited to the above examples. The upper and lower limits and range values of the sintering temperature can all realize the present invention, and the examples are not listed one by one here.
本陶瓷可广泛用于各种介质基板、谐振器和滤波器等微波器件的制造,可满足移动通信、卫星通信等系统的技术需要。 The ceramics can be widely used in the manufacture of microwave devices such as various dielectric substrates, resonators and filters, and can meet the technical needs of mobile communication, satellite communication and other systems.
表1: Table 1:
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