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CN103545224A - Resin molding apparatus and resin molding method - Google Patents

Resin molding apparatus and resin molding method Download PDF

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Publication number
CN103545224A
CN103545224A CN201310285428.0A CN201310285428A CN103545224A CN 103545224 A CN103545224 A CN 103545224A CN 201310285428 A CN201310285428 A CN 201310285428A CN 103545224 A CN103545224 A CN 103545224A
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China
Prior art keywords
mold
cavity
release film
resin
mentioned
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CN201310285428.0A
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Chinese (zh)
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CN103545224B (en
Inventor
齐藤高志
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Yamada Most Advanced Science & Technology Co Ltd
Apic Yamada Corp
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Yamada Most Advanced Science & Technology Co Ltd
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Priority claimed from JP2012153826A external-priority patent/JP5953601B2/en
Priority claimed from JP2012155531A external-priority patent/JP5953602B2/en
Priority claimed from JP2012235909A external-priority patent/JP6019471B2/en
Priority claimed from JP2013101621A external-priority patent/JP6089260B2/en
Application filed by Yamada Most Advanced Science & Technology Co Ltd filed Critical Yamada Most Advanced Science & Technology Co Ltd
Publication of CN103545224A publication Critical patent/CN103545224A/en
Application granted granted Critical
Publication of CN103545224B publication Critical patent/CN103545224B/en
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/565Moulds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/565Moulds
    • H01L21/566Release layers for moulds, e.g. release layers, layers against residue during moulding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/26Moulds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/561Batch processing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/93Batch processes
    • H01L24/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L24/97Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14065Positioning or centering articles in the mould
    • B29C2045/14155Positioning or centering articles in the mould using vacuum or suction
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/146Mixed devices
    • H01L2924/1461MEMS
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/156Material
    • H01L2924/15786Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
    • H01L2924/15787Ceramics, e.g. crystalline carbides, nitrides or oxides
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • H01L2924/1815Shape

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)

Abstract

The resin-molding apparatus improving further more, the filling ability and molding quality of the epoxy molded compound the work is resin-molded using the release film and resin-molding method of the long person shape are provided. The possible to squirt air and alienate the release film (F) from the molding clamp plane multiple vent holes (12c, 12e, 18a, 18b) inhaling air and absorbs the release film (F) in the avoirdupois clamp side or are installed in the avoirdupois (7). And in the type (6), as long as the width direction both sides of the release film (F) of the long person shape which is faced with the work mounting side and is returned suffers in the width direction both sides of the release film (F) of the long person shape and it is pressed down with the release film (F) and the tension is applied to not only the longitudinal direction but also the width direction and the film wrinkle is removed the film wrinkle correcting member (32) of pair is installed.

Description

Resin molding apparatus and resin molding method
Technical field
The present invention relates to utilize release film to carry out resin moulded resin molding apparatus and resin molding method to workpiece.
Background technology
In the past, in order to reduce mold repair, improve productivity, shaping quality, will utilize release film (Japanese: リ リ ー ス Off ィ Le system) cover the mould holding face of molding die and to carry out resin moulded resin molding apparatus practical.For example, film processor is installed to molding die or resin molding apparatus, and the release film of strip is wound on winding reel via die surface from supplying with volume.
As an example, proposed to utilize release film to carry out resin moulded resin molding apparatus to be equipped with the workpiece of light-emitting component on substrate.Utilize the transparent resin that adherence is high (silicon is that resin, epoxy are that resin, ammonia ester are resin, acrylic resin etc.) to carry out resin moulded to the formed products of the depth-to-width ratio of the convex form of lens component high (degree of depth of the die cavity recess suitable with lens component is dark).Particularly, in release film absorption, be held under the state of patrix clamping face, clamping is loaded the workpiece in counterdie.Now, the lower surface of movable pin is dropped to the lower surface of die cavity unit and be positioned at same plane, in the mode that does not enter lens recess with release film, support under the state of release film, moulding resin is filled into and is shaped with in recess.When the moulding resin of filling surpasses lens recess, make movable pin increase, rise to internal side diameter lens recess and outside diameter lens recess is each the position of continuous surface and forms lens recess.Moulding resin makes release film bloat and fill in lens recess, makes moulding resin hot curing come molded lens portion (with reference to patent documentation 1).
In addition, as carry out the device of compression molding to semiconductor element workpiece is installed on substrate, such resin encapsulation equipment has been proposed: to the counterdie die cavity recess being covered by release film, supply with tabular resin, absorption of workpieces is held in to patrix, and is provided with for pressing the release film pressing mechanism of release film.While utilizing molding die holding workpiece, form confined space, by decompression to lower than atmospheric pressure by the Bas Discharged being rolled in resin, form thus the expansion (with reference to patent documentation 2) that state that height reduces pressure suppresses resin.
In the situation that be shaped and carry out resin moulded to the workpiece of semiconductor device etc. by transfer modling, the distribution that resin stream by molding die has (Japanese: エ ジ ェ Network タ ピ Application) match with die sinking action and outstanding from mould holding face, thereby make the formed products demoulding.
Or, in order to simplify mold repair, in order to omit distribution, also to simplify mold structure and release film is adsorbed in comprise the mould holding face of die cavity recess, carries out resin moulded mode afterwards and be also practical.
In addition, separated with release film in order to promote utilizing release film to carry out resin moulded formed products, thus also proposed after resin moulded, across release film ejection compressed air, make formed products from molding die and the resin molding method (with reference to patent documentation 3) of the demoulding of die cavity recess.
In addition, because the only ejection of gas without foundation, the demoulding of formed products is very difficult, so thereby also having proposed to use forms the thin plate of die cavity bottom, form ,Cong Gai gap, gap while carrying out die sinking after resin moulded between patrix and thin plate imports compressed air and utilize the strain of air pressure and thin plate to make molding die and the resin molding method (with reference to patent documentation 4) of the products formed demoulding.
Patent documentation 1: TOHKEMY 2007-230212 communique
Patent documentation 2: TOHKEMY 2008-302535 communique
Patent documentation 3: Japanese kokai publication hei 11-40593 communique
Patent documentation 4: TOHKEMY 2000-280293 communique
But, in the situation that use from supplying with volume, via die surface, the release film of strip is wound in to the film processor of winding reel, although length direction (release film throughput direction) effect at release film has tension force, at Width (release film Width), do not have tension mechanism to be just difficult to effect and have tension force.Therefore, the easy broad ways of release film that covers die surface produces ripple, forms the film fold (longitudinal fold) extending along its length.The not open structure that forms film fold for correcting such generation ripple of the Width along release film in patent documentation 1,2.
In addition, die cavity unit for the patrix of above-mentioned patent documentation 1, because be thereby that the shaping that makes to be formed at this die cavity unit is combined molded lens recess with the internal side diameter lens recess of being located at movable pin to form the mode of continuous surface with the outside diameter lens recess of recess, thus formed products easily produce because of the gap between die cavity unit and movable pin cause concavo-convex.
In addition, while filling moulding resin to being shaped with recess, in mobile unit enters outside diameter lens recess and by release film supporting for not enter under the state of lens recess, filling moulding resin.Now, discontinuous state lower support release film between the internal side diameter lens recess of die cavity unit and outside diameter lens recess, even fill moulding resin under this state, at discontinuity surface place, be also easily involved in air, and, when mobile unit rises, due to the lax of release film, easily produce fold, therefore easily reduce the shaping quality of lens section.In addition, when the quantity of lens section increases, it is unstable that the positional precision of a plurality of movable pins also likely becomes.
In addition, utilizing transfer modling to be shaped carries out when resin moulded the lensed LED of for example tool, the transparent resin using (silicon is that resin, epoxy are that resin, ammonia ester are resin, acrylic resin etc.) makes the surface of formed products in solidifying the state that is also attended by viscosity (adherence) completely under the effect that just completes the mold temperature after resin moulded, and the surface temperature of formed products does not drop to and approaches normal temperature and just can not promote to solidify.In transfer modling is shaped, molding die die sinking and to take out formed products be in being heated to the state of forming temperature, the demoulding under the state of heating is the state that mould holding face and release film, release film and formed products are pasted respectively, the demoulding is difficult.
In addition, also have to use and promote the method for carrying out the demoulding, still, in the situation that the moulding resin of tool elastic system springy, stripping result is insufficient, likely only makes to promote periphery fracture.Especially, for the lensed LED of tool, while remaining the physical damnifications such as indenture at resin surface, easily become defective item.
Summary of the invention
The object of the invention is to, solve the problem of above-mentioned prior art, provide a kind of and with release film, workpiece is being carried out when resin moulded, can correct resin molding apparatus and resin molding method that the film fold producing of film and the fillibility that can make moulding resin and shaping quality improve on Width.
In addition, the present invention also aims to provide a kind of after resin moulded, can under the prerequisite of not damaging shaping quality, make formed products swimmingly from resin molding apparatus and the resin molding method of the molding die demoulding.
To achieve these goals, the present invention has following technical scheme.
, it is resin moulded for the workpiece being clamped by molding die is carried out, and it is characterized in that, and above-mentioned molding die has: a mould, it is for loading above-mentioned workpiece, another mould, on its mould holding face, be formed with die cavity recess, utilize release film to cover the mould holding face that comprises this die cavity recess, on above-mentioned another mould, be provided with a plurality of air vent holes, the plurality of air vent hole is used for aspirating air and can makes above-mentioned release film be adsorbed in above-mentioned mould holding face or for spraying air, can make above-mentioned release film and above-mentioned mould holding face separate, on an above-mentioned mould, be provided with paired film fold straightening members, this film fold straightening members presses on this release film in the Width both sides of the above-mentioned release film of the strip of the mode conveyance to face mutually with above-mentioned workpiece mounting surface, thereby, for this release film, not only on its length direction effect have tension force and also on its Width also effect have the tension force membrane removal fold of making a return journey.
Adopt said structure, when molding die matched moulds, in the Width both sides that cover the release film of another die surface, press the paired film fold straightening members that is arranged on a mould, therefore, can correct the film fold that release film produces on Width, make release film keep being adsorbed on another die surface.
A kind of resin molding method, it is to utilize molding die clamping to be supplied to the workpiece coming and to carry out resin moulded method, it is characterized in that, this resin molding method has: the mould holding face to a mould of the molding die of die sinking is supplied with above-mentioned workpiece, prepares for to being formed with the operation of the release film of the strip that the mould holding face of another mould of die cavity recess covers; Start the mould assembling action of above-mentioned molding die, the paired film fold straightening members that utilization is located at the mould holding face of an above-mentioned mould and is positioned at the Width both sides of above-mentioned release film is pressed into above-mentioned release film the recess of accommodating of above-mentioned another mould of facing mutually with this film fold straightening members, and utilize the air vent hole ejection air of the regulation of the mold insert of being located at above-mentioned another mould, carry out above-mentioned release film to remove the operation of film fold; Make the above-mentioned release film that above-mentioned film fold has been corrected act on tension force along its length and make this release film along the mould holding face of above-mentioned another mould, afterwards, utilize the suction of all air vent holes of this another mould, above-mentioned release film maintenance is adsorbed in to the operation of the mould holding face of comprising of above-mentioned another mould of above-mentioned die cavity recess; By above-mentioned molding die matched moulds, moulding resin is filled into the operation of above-mentioned die cavity recess.
Thus, in the situation that utilize film processor, to die surface, automatically supply with the release film of strip, can correct the film fold of the broad ways generation of release film, release film absorption is held in to the mould holding face of another mould that comprises die cavity recess, therefore, be no matter that transfer modling is shaped, or compression molding can make the shaping quality of workpiece improve to carry out resin moulded.
, it utilizes molding die to be clamped in the workpiece that is equipped with electronic component on base material, the formed products that comprises protuberance is carried out resin moulded, it is characterized in that, and this resin molding apparatus has: a mould, it is for loading above-mentioned workpiece, another mould, it has die cavity core, this die cavity core is formed with the 1st die cavity recess and in the bottom of the 1st die cavity recess, is formed with respectively for the 2nd die cavity recess of the raised part that is shaped with at the 3rd air vent hole of the die cavity bottom opening of above-mentioned the 1st die cavity recess at the mould holding face of this another mould, utilize release film to cover the mould holding face of the bottom of comprising of this another mould of above-mentioned the 1st die cavity recess, above-mentioned another mould and mounting have an above-mentioned mould matched moulds of above-mentioned workpiece, utilize the suction of above-mentioned the 3rd air vent hole that above-mentioned release film is adsorbed to maintenance in the mode of the tension force of regulation and the height in being limited by the die cavity of above-mentioned the 1st die cavity recess bottom, under this state, in above-mentioned the 1st die cavity recess, fill moulding resin, apply than the large final resin pressure of the tension force of above-mentioned release film and make this release film in above-mentioned the 2nd die cavity recess in-draw on one side, to above-mentioned the 2nd die cavity recess, fill above-mentioned moulding resin on one side.In addition, base material comprises that resin substrate, metal (such as aluminium, copper etc.) substrate, ceramic substrate, lead frame, carrier etc. are for the member of mounting electronic parts.
Adopt above-mentioned resin molding apparatus, can utilize the mould tracing ability that the stretching of release film produces to fill moulding resins to dark a plurality of the 2nd die cavity recesses of the degree of depth of the die cavity bottom of depth ratio the 1st die cavity recess, therefore, for example, even the formed products that comprises the protuberance that for example depth-to-width ratio is high (lens section), also can make resin filling improve.
In addition, can utilize the deviation of thickness that the thickness of release film absorbs workpiece, the 2nd concavo-convex and for example, with protuberance (lens section) the suitable die cavity recess of surface of the work is continuous surface, therefore, can on formed products, not form concavo-convexly, can make the quality-improving that is shaped.
A kind of resin molding apparatus, it is can be from the resin molding apparatus of the molding die demoulding when the die sinking to utilizing the workpiece of molding die clamping to carry out formed products after resin moulded, resin moulded, it is characterized in that, above-mentioned molding die has: a mould, and it is for loading above-mentioned workpiece; Another mould, at its mould holding face, be formed with die cavity recess, utilize release film to cover the mould holding face that comprises this die cavity recess, above-mentioned another mould is provided with a plurality of the 2nd air vent holes, the plurality of the 2nd air vent hole is used for aspirating air and can makes above-mentioned release film be adsorbed in mould holding face or for spraying air, can make above-mentioned release film and above-mentioned mould holding face separate, and an above-mentioned mould is provided with the 5th air vent hole that makes air to ejection between above-mentioned release film and formed products, above-mentioned formed products and above-mentioned release film be separated.
Adopt said structure, use molding die and to formed products carry out resin moulded after, the 2nd air vent hole ejection air by arranging on another mould can make release film and mould holding face separate when die sinking.
In addition, molding die starts after die sinking, by from the 5th air vent hole ejection air, can make release film and formed products separate.
Further carry out die sinking, by air is ejected between unnecessary resin and mould holding face from the 5th air vent hole, can make formed products from a die surface demoulding.
Under the prerequisite that therefore, can decline in the quality that do not make to be shaped by the formed products that comprises the lens section that adopts the transparent resin that for example adherence is high from the molding die demoulding.
A kind of resin molding apparatus, it is that formed products to utilizing the workpiece of molding die clamping to carry out after resin moulded, resin moulded when the die sinking can be from the resin molding apparatus of the molding die demoulding, it is characterized in that, above-mentioned molding die has: a mould, and it is for keeping above-mentioned workpiece, another mould, on its mould holding face, be formed with die cavity recess, utilize release film to cover the mould holding face that comprises this die cavity recess, on above-mentioned another mould, be provided with a plurality of the 1st air vent holes and a plurality of the 2nd air vent hole, the plurality of the 1st air vent hole is at all groove inner openings to surround above-mentioned die cavity recess and to form with mode that above-mentioned workpiece is faced mutually, the plurality of the 2nd air vent hole is used for aspirating air and can makes above-mentioned release film be adsorbed in above-mentioned mould holding face or for spraying air, can make above-mentioned release film and above-mentioned mould holding face separate, the plurality of the 2nd air vent hole is in the upper shed of mould holding face, the outstanding film supporting member that is provided with on an above-mentioned mould, this film supporting member is biased as pressing to above-mentioned release film under conventional state.
Adopt said structure, with molding die to formed products carry out resin moulded after, from being located at the 1st air vent hole suction air of another mould and release film being adsorbed in to all grooves, at this state lower open die, can make release film peel off from formed products.In addition, when molding die die sinking, at release film, be adsorbed under the state of all grooves from the 2nd air vent hole ejection air, thereby can make release film be expanded to sacculus shape and peel off from the mould holding face of another mould.Further carry out die sinking, even if the release film of having peeled off from another die surface is lax, also can utilize the film supporting member to press to support to release film.
Under the prerequisite that therefore, can decline in the quality that do not make to be shaped by the formed products that comprises the lens section that adopts the transparent resin that for example adherence is high from the molding die demoulding.
, it is characterized in that, this resin molding method has: mounting is had to a mould and another mould matched moulds that the mould holding face that comprises die cavity recess is covered by release film of workpiece, formed products is carried out to resin moulded operation; During the die sinking of above-mentioned resin moulded rear beginning molding die, the operation that above-mentioned release film and this mould holding face is separated from the mould holding face ejection air of above-mentioned another mould; Further carry out the die sinking of above-mentioned molding die, thus the operation that makes air towards ejection between above-mentioned release film and formed products, above-mentioned release film and formed products be separated from the mould holding of an above-mentioned mould; Further carry out again the die sinking of above-mentioned molding die, from an above-mentioned mould, make to promote to unnecessary resin outstanding, and air is sprayed between this unnecessary resin and the mould holding face of an above-mentioned mould, and make above-mentioned formed products from the operation of the surperficial demoulding of an above-mentioned mould.
Adopt above-mentioned resin molding method, formed products is carried out resin moulded after, by the mould holding face ejection air from another mould, when die sinking, make release film and mould holding face separate, then molding die starts die sinking, under the state that release film is applied to tension force, make air from the mould holding face ejection of a mould, thereby can make release film and formed products separate, further carry out die sinking, from a mould, make to promote to unnecessary resin outstanding, and making air make to promote abutting part to ejection between this unnecessary resin and the mould holding face of a mould solidifies, therefore, easily make to peel away between unnecessary resin and distribution, can easily form the demoulding of product.
, it is characterized in that, this resin molding method has: by maintaining a mould and another mould matched moulds that the mould holding face that comprises die cavity recess is covered by release film of workpiece, formed products is carried out to resin moulded operation; Above-mentioned resin moulded after, before starting the die sinking of molding die, the operation that the tension force of above-mentioned release film is increased; Before carrying out the die sinking of above-mentioned molding die, in all grooves that the mode that makes above-mentioned release film be adsorbed in to surround the above-mentioned die cavity recess of above-mentioned another mould forms, the operation of carrying out die sinking under this state; Above-mentioned release film is adsorbed under the state in above-mentioned all grooves, from the mould holding face ejection air of above-mentioned another mould, is making that this release film expands, the operation of the sur-face peeling of this another mould certainly; Further carry out the die sinking of above-mentioned molding die, from the outstanding supporting member of the mould holding face of an above-mentioned mould with the state support that is connected to above-mentioned release film from the sur-face peeling of above-mentioned another mould the operation of this release film.
Adopt above-mentioned resin molding method, formed products is carried out resin moulded after, before starting die sinking, molding die make the tension force of release film increase, in all grooves that the mode that makes release film be adsorbed in to surround the die cavity recess of another mould forms, under this state, carry out die sinking, therefore, can utilize die sinking action that release film is peeled off from formed products.And, under the state in release film is adsorbed in all grooves, from the mould holding face ejection air of another mould and this release film is expanded, therefore, can peel off reliably release film from the mould holding face that comprises die cavity recess of another mould.And then, further carry out the die sinking of molding die, from the outstanding film supporting member of the mould holding face of a mould with the state support that is connected to release film from the sur-face peeling of another mould this release film, therefore, can be suppressed at and while reeling used release film, produce fold, lax.
Under the prerequisite that therefore, can decline in the quality that do not make to be shaped reliably by the formed products that comprises the lens section that adopts the transparent resin that for example adherence is high from the molding die demoulding.
the effect of invention
Adopt resin molding apparatus and resin molding method, when carrying out workpiece resin moulded with release film, can correct the film fold producing of film on its Width, and can improve fillibility and the shaping quality of moulding resin.
In addition, formed products is carried out resin moulded after, can under the prerequisite of not damaging shaping quality, make formed products swimmingly from the molding die demoulding.
Accompanying drawing explanation
Fig. 1 be die opening state molding die analyse and observe key diagram.
Fig. 2 is the key diagram of analysing and observe of molding die after mould assembling action starts.
Fig. 3 follows the key diagram of analysing and observe that Fig. 2 represents mould assembling action molding die midway.
Fig. 4 follows the key diagram of analysing and observe that Fig. 3 represents mould assembling action molding die midway.
Fig. 5 follows the key diagram of analysing and observe that Fig. 4 represents mould assembling action molding die midway.
Fig. 6 follows the key diagram of analysing and observe that Fig. 5 represents mould assembling action molding die midway.
Fig. 7 is that then Fig. 6 represents the key diagram of analysing and observe of molding die after release film absorption has kept.
Fig. 8 is the vertical view of resin moulded front patrix.
Fig. 9 means the vertical view of the counterdie that keeps the workpiece after resin moulded.
Figure 10 means the vertical view of the monomer of formed products.
Figure 11 is the vertical view about the counterdie of other examples.
Figure 12 mean resin molding apparatus resin moulded action analyse and observe key diagram.
Figure 13 be then Figure 12 represent resin molding apparatus resin moulded action analyse and observe key diagram.
Figure 14 be then Figure 13 represent resin molding apparatus resin moulded action analyse and observe key diagram.
Figure 15 be then Figure 14 represent resin molding apparatus resin moulded action analyse and observe key diagram.
Figure 16 be then Figure 15 represent resin molding apparatus resin moulded action analyse and observe key diagram.
Figure 17 is the vertical view of patrix clamping face.
Figure 18 mean other examples resin molding apparatus resin moulded action analyse and observe key diagram.
Figure 19 be then Figure 18 represent resin molding apparatus resin moulded action analyse and observe key diagram.
Figure 20 be then Figure 19 represent resin molding apparatus resin moulded action analyse and observe key diagram.
Figure 21 be then Figure 20 represent resin molding apparatus resin moulded action analyse and observe key diagram.
Figure 22 be matched moulds state molding die analyse and observe key diagram.
Figure 23 is the key diagram of analysing and observe that die sinking action has just started molding die afterwards.
Figure 24 follows the key diagram of analysing and observe that Figure 23 represents die sinking action molding die midway.
Figure 25 follows the key diagram of analysing and observe that Figure 24 represents die sinking action molding die midway.
Figure 26 follows the key diagram of analysing and observe that Figure 25 represents die sinking action molding die midway.
Figure 27 is the key diagram of analysing and observe of the demoulding after die sinking action (Japanese: エ ジ ェ Network ト Move does) molding die midway.
Figure 28 is that then Figure 27 represents the key diagram of analysing and observe of molding die after demoulding action.
Figure 29 means that mounting has the key diagram of air blast action of the counterdie of the formed products after resin moulded.
(A) of Figure 30 is the vertical view of the 5th air vent hole, and (B) of Figure 30 is the front view of the 5th air vent hole.
(A) of Figure 31 means the flow chart of the demoulding action of formed products, and (B) of Figure 31 means the sequential chart of the time example of air blast.
Figure 32 be matched moulds state molding die analyse and observe key diagram.
Figure 33 is the key diagram of analysing and observe that die sinking action has just started molding die afterwards.
Figure 34 follows the key diagram of analysing and observe that Figure 33 represents die sinking action molding die midway.
Figure 35 follows the key diagram of analysing and observe that Figure 34 represents die sinking action molding die midway.
Figure 36 follows the key diagram of analysing and observe that Figure 35 represents die sinking action molding die midway.
Embodiment
Below, together with accompanying drawing, describe the preferred implementation of resin molding apparatus of the present invention and resin molding method in detail.Below, illustrate utilize transparent resin (silicon is that resin, epoxy are that resin, ammonia ester are resin, acrylic resin etc.), especially after the fold that produces by acting on the tension force of release film is removed, the resin molding apparatus and the resin molding method that the light-emitting device that comprises lens section (protuberance) (LED) of the example as workpiece W are carried out to transfer modling shaping.In order to tackle high brightness, weather-proofization, heat-resistingization, cost degradation etc., can from filler, diffusant, pigment, fluorescent material, reflecting material etc., select more than at least a kind material to be mixed into heat-curing resin.In addition, moulding resin can utilize the resin of various forms such as liquid resin, particulate resins, coccoid resin (powdex), thin slice resin, fritter resin, and below the example of liquid resin is used in explanation.In addition also can have for preventing the reflecting element (Japanese: リ Off レ Network タ) (not shown) of the irradiation light diffusion that self-emission device 1 irradiates.
Figure 10 means the vertical view of the formed products monomer being shaped on substrate 2.As shown in figure 10, LED in present embodiment has light-emitting component 1(with reference to Fig. 1), for loading the substrate 2(base material of light-emitting component 1), from the outstanding lens section 4 arranging of resin base portion 3 of covering luminous element 1, this LED is shaped as for example surface-mount light-emitting device.Above resin base portion 3, in the position of facing mutually with light-emitting component 1, be formed with hemispheric lens section 4.In the present embodiment, at each die cavity, utilize resin base portion 3 and 5 light-emitting component 1(of lens section 4 encapsulation with reference to Fig. 1).
In Fig. 1, workpiece W adopts the structure that for example connects (or wire bonding connection) light-emitting component 1 on substrate 2 with ranks shape upside-down method of hull-section construction.In addition, the substrate 2 using as base material can adopt the various tabular members such as resin substrate, metal (such as aluminium, copper etc.) substrate, ceramic substrate, lead frame, carrier.In addition, as workpiece W also can adopt be formed with the wafer of projection, by bondingly fixing, the carrier of electronic component mounting etc.
Then, resin molding apparatus is described.Below, centered by the structure of molding die, describe.Fig. 1 be molding die 5 omission Port ッ ト), defective material portion (Japanese: カ Le), the schematic cross sectional views of runner, cast gate etc. (in Fig. 2 to Fig. 7 too) filler chamber's (Japanese:.In addition, formed products is to series connection shape ground on substrate 2 and is connected between two and carries out resin-encapsulated in Fig. 9, Fig. 1 schematically shows for encapsulating the profile construction of the molding die 5 of 1 formed products.
In Fig. 1, molding die 5 has counterdie 6(mono-mould for holding workpiece W), for another mould of patrix 7(of holding workpiece W).In the present embodiment, using patrix 7 as fixed die, counterdie 6 describes as But moving die.Pressure-driven mechanism adopts a kind of known mechanism, that is, utilize drive source (servomotor etc.) via driving transport sector (toggle link etc.) to make to be supported on counterdie 6 lifting under the guiding of connecting rod of template.It should be noted that, can be also using patrix as But moving die, counterdie is as the pressure-driven mechanism of fixed die.
First, the structure of patrix 7 is described with reference to Fig. 1 and Fig. 8.In patrix 7, at upper die base 8 upper supports, there is patrix latch segment (Japanese: チ ェ イ ス Block ロ ッ Network) 9.In patrix latch segment 9, in the both sides of patrix central authorities inserts 10, patrix cavity insert 11 is installed respectively.Many (for example 6) patrix runner 10b that are carved into respectively the patrix defective material 10a of portion and are connected with the patrix defective material 10a of portion on patrix central authorities inserts 10.In addition, in patrix cavity insert 11, for example, with the patrix runner cast gate 11a that is connected with each patrix runner 10b and a plurality of (2) the 1st die cavity recess 12a, by the mode that is communicated with runner 11b and connects into series connection shape, scribe respectively.
In Fig. 8, patrix terminal guide vane end stop 13 is located at the length direction both sides at patrix central authorities inserts 10 in the mode facing with each other.In addition, patrix terminal guide vane end stop 14 is located at the length direction both sides in each patrix cavity insert 11 in the mode facing with each other.On patrix terminal guide vane end stop 13,14, be formed with the position surplus (Japanese: escape げ) for the blasting unit of counterdie 6 described later.
In addition, in upper die base 8 to comprise the outer circumferential side of the patrix latch segment 9(die cavity recess of patrix cavity insert 11) mode be formed with all grooves 15.In the bottom of this week groove 15, be provided with a plurality of air vent hole 15a across predetermined distance opening.Air vent hole 15a is connected (with reference to Fig. 6) with the air pumping exhaust device 16a that can spray air or suction air.The outer circumferential side of all grooves 15 that arrange in upper die base 8 embeds patrix sealing ring 17.Patrix sealing ring 17 and the aftermentioned counterdie sealing ring 31 1 interior formation confined space of molding die 5 that coexists, and can make to reduce pressure this confined space in.
In Fig. 8, on the clamping face of patrix cavity insert 11, be ranks shape and be formed with the 1st die cavity recess 12a overlooking as circle.On the bottom of each the 1st die cavity recess 12a, for example, to be carved into a plurality of (5) 2nd die cavity recess 12b corresponding with lens section 4 than the dark mode in bottom of the 1st die cavity recess 12a, the 2nd die cavity recess 12b is hemispheric recess.The 1st die cavity recess 12a is used for being housed in and on substrate 2, is dispersed and is equipped with a plurality of (for example 5) light-emitting component 1(with reference to Fig. 1) the workpiece W that forms carry out resin moulded.
In addition, in the bottom of the 1st die cavity recess 12a and at the 2nd die cavity recess 12b around, offer a plurality of (for example 4) air vent hole 12c(the 2nd air vent hole).Each air vent hole 12c with can spray air or suction air air pumping exhaust device 16b(with reference to Fig. 3) be connected.
In addition, at the 1st die cavity recess 12a from the patrix defective material 10a of portion configured in series around, be formed with respectively the separated groove 12d of these cascaded structures.In the bottom of this groove 12d, offer a plurality of air vent hole 12e.Each air vent hole 12e with can spray air or suction air air pumping exhaust device 16b(with reference to Fig. 3) be connected.
In addition, as shown in Figure 8, on the clamping face of patrix central authorities inserts 10, be provided with a plurality of air vent hole 18a, these air vent holes 18a can make release film F be adsorbed in patrix clamping face or ejection air and release film F and patrix clamping face are separated.In addition, patrix defective material portion 10a, the patrix runner 10b suitable with resin stream, patrix runner cast gate 11a, be communicated with and on runner 11b, also offer air vent hole 18b. Air vent hole 18a, 18b with can spray air or suction air air pumping exhaust device 16b(with reference to Fig. 3) be connected.As shown in Figure 1, utilize release film F to cover the patrix clamping face that comprises the 1st die cavity recess 12a and the 2nd die cavity recess 12b.
In addition; in Fig. 8; the film adsorption plane of patrix 7, in the position in the outer part of the patrix sealing ring 17 than upper die base 8; with with film fold straightening members described later practise physiognomy to mode be formed with and accommodate recess 19, it is for accommodating the slack of the release film F being pressed by this film fold straightening members.This is accommodated recess 19 and arranges along film Width both sides.
The structure of counterdie 6 is then described with reference to Fig. 1 and Fig. 9.In Fig. 9, in counterdie 6, counterdie latch segment 21 is supported on to lower die base 20.In counterdie latch segment 21, in the both sides of counterdie central authorities inserts 22, be respectively equipped with counterdie inserts 23.On counterdie central authorities inserts 22, be provided with the 24a(of filler chamber for supplying with moulding resin with reference to Figure 11).In the 24a of filler chamber, be provided with liftable plunger 24b(with reference to Figure 11).
In addition; in Fig. 9; on four jiaos of lower die base 20 and counterdie central authorities inserts 22, be provided with through hole, the outstanding film fulcrum post 34(film supporting member that is provided with in this through hole), this film fulcrum post 34 is set under conventional state by the state to the release film F application of force.The force application component application of forces such as helical spring that film fulcrum post 34 is arranged in through hole.As an example, film fulcrum post 34 is arranged at four jiaos of counterdie 6, also along film throughput direction, is arranged on 4 positions, place on the counterdie central authorities inserts 22 that is equivalent to central portion.
The upper surface part of counterdie inserts 23 becomes the workpiece maintaining part of mounting workpiece W this workpiece of absorption maintenance W.In addition, counterdie terminal guide vane end stop 25 is arranged on the length direction both sides of counterdie central authorities inserts 22 in mode respect to one another.In addition, counterdie terminal guide vane end stop 26 is arranged on the length direction both sides of each counterdie inserts 23 in mode respect to one another.
Blasting unit 27 is arranged on above-mentioned paired counterdie terminal guide vane end stop 25 in mode respect to one another, and blasting unit 28 is arranged on paired counterdie terminal guide vane end stop 26 in mode respect to one another.Opposite face side at each blasting unit 27,28 is respectively equipped with air vent hole described later.Each air vent hole so that air towards the mode of the direction parallel with workpiece W diffusion, ejection, form.The height and position of the opening of each air vent hole of each unit is made as the height roughly the same with the upper surface of base plate of workpiece W.During die sinking, from this air vent hole, to spraying air between release film F and formed products, release film F and formed products are separated.In addition, from air vent hole, between unnecessary resin 29 and counterdie surface, spray air, unnecessary resin 29 be easy to from promoting 30(with reference to Figure 11) peel off.
In addition, also can be for air vent hole 12c, 12e, 18a, 18b(the 2nd air vent hole) in each air vent hole utilize the opening and closing operations of valve to carry out the switching of air suction and air blast.In addition, although blasting unit 27,28 all in the mode of facing mutually, configure, also can be only in a side setting.In addition, although blasting unit 27,28 is arranged on counterdie terminal guide vane end stop 25,26, also can be arranged on side's side or both sides of the Width of counterdie latch segment 21.
In addition, in Fig. 9, in lower die base 20, to surround the mode of the surrounding of counterdie latch segment 21, be provided with counterdie sealing ring 31.When patrix 7 and counterdie 6 matched moulds, patrix sealing ring 17 butts of this counterdie sealing ring 31 and upper die base 8, and at the interior formation confined space of molding die 5.Thus, can, at the interior formation pressure reduction space of molding die 5 (or pressurization space), can remove the resin moulded of inner air.
In Fig. 9; in lower die base 20, be provided with paired film fold straightening members 32; this paired film fold straightening members 32 presses on this release film F in the Width both sides of the release film F of the strip of carrying in the mode of facing mutually with workpiece mounting surface; thereby for this release film F, not only in length direction effect, there is tension force, at Width, also acted on the tension force membrane removal fold of making a return journey.As shown in Figure 1, the tip side of film fold straightening members 32 forms the smooth press surface 32a of tapered, and film fold straightening members 32 is formed with the taper surface 32b that the outside skew back of self-pressing face 32a below tilts with predetermined angular.It is tabular that each film fold straightening members 32 forms continuous one of length direction along release film F, by helical spring 33 towards the top application of force be supported on lower die base 20.33 pairs of film fold straightening members 32 application of forces of this helical spring, press release film F, thereby remove film fold, in addition, can also absorb because of the excessive pressing force of matched moulds to release film F effect by strain.
To mounting, there are the counterdie 6 of workpiece W and patrix 7 to carry out matched moulds, utilize film fold straightening members 32 that the release film F that covers the die surface of patrix 7 is pressed to accommodating recess 19 on one side, make on one side air from regulation air vent hole 12c, 12e, 18a, 18b ejection, at film fold, stop the ejection of air under by the state after correcting.And, length direction working tension along release film F, by comfortable the 1st inner side of die cavity recess 12a and the air vent hole 16a of outer openings, 12c, 12e, 18a, 18b carry out air suction, with the state according to patrix die joint, release film F is kept along the patrix clamping face absorption that comprises the bottom of the 1st die cavity recess 12a.
An example of the remedial action of the film fold that adopts above-mentioned molding die 5 then, is described referring to figs. 1 through the holding action of the molding die of Fig. 7.
First, in Fig. 1, the counterdie inserts 23 of the counterdie 6 in the molding die 5 of die sinking loads workpiece W, utilizes the moulding resin of syringe Deng Xiang filler chamber feed fluid shape.In addition, prepare for covering the release film F of strip of the mould holding face that is formed with die cavity recess 12a, 12b of patrix 7.Release film F utilizes not shown film processor to emit from supplying with volume, through patrix clamping face, is wound on winding reel.In addition, at this stage release film F, be not adsorbed in patrix clamping face.
Then, start the mould assembling action of molding die 5, make to rise with respect to the patrix 7 as fixed die as the counterdie 6 of But moving die.As shown in Figure 2, when counterdie 6 rises, be set to than the clamping face of counterdie 6 upward outstanding film fold straightening members 32 in the Width both sides of release film F, press on this release film F, start release film F press and release film F is launched to Width both sides.In addition, now, utilize release film processor to apply tension force along its length to release film F and produce longitudinal fold F1(with reference to Fig. 3).
In Fig. 3, when film fold straightening members 32 is pressed release film F, make air from being located at the air vent hole 12c of the bottom of the 1st die cavity recess 12a, air vent hole 18a, the 18b ejection of being located at the air vent hole 12e of groove 12d and being located at counterdie central authorities inserts 22, resin stream, and release film F is pushed to the patrix 7 faced mutually with it accommodate recess 19, thereby remove film fold (longitudinally fold F1).
As shown in Figure 4, now, release film F utilizes the pressure of air in the mode of protruding, to expand to correct the film fold of Width downwards temporarily.It should be noted that, make release film F form the shape of die cavity recess 12b if produce at release film F under the state have fold, release film F can be sucked into die surface under generation has the state of fold sometimes, and result fails to remove completely fold.Therefore,, by release film F is temporarily expanded, can eliminate the fold that this release film F produces.
When the rectification of film fold finishes, as shown in Figure 5, further carry out mould holding action, thereby film fold straightening members 32 enters, accommodate recess 19 and along the Width stretching release film F of release film F, meanwhile, stop the air spray action from the 2nd air vent hole 12c, 12e, 18a, 18b.
Then, as shown in Figure 6, the suction of the inner side of the 1st die cavity recess 12a of patrix clamping face and the 1st air vent hole 15a of outer openings and the 2nd air vent hole 12c, 12e, 18a, 18b is being located in utilization, and the release film F absorption of having corrected film fold is held in to the patrix clamping face that comprises the 1st die cavity recess 12a.
Then, as shown in Figure 7, utilize counterdie 6 and patrix 7 holding workpiece W(substrates 2), matched moulds finishes.Then, make plunger 24b(with reference to Figure 11) action and fill the moulding resin in the 24a of filler chamber to the 1st die cavity recess 12a.Now, release film F adsorbs and is held in patrix clamping face in the mode of the height in being limited by the die cavity of the 1st die cavity recess 12a bottom, under this state, fill, further apply the final resin pressure larger than the tension force of release film F, and make release film F in the 2nd die cavity recess 12b in-draw on one side, to 2nd die cavity recess 12b fill moulding resin on one side.Now, the air being easily closed in the 2nd die cavity recess 12b is escaped via air vent hole 12, thereby can not produce hole.Therefore the formed products mass-energy that, is equipped with the lens section 4 of the workpiece W that light-emitting component 1 forms on substrate 2 is enough configured as high-quality.It should be noted that, in the situation that due to the 2nd size of die cavity recess 12b, the tension force of release film F, suction force etc. and can carry out good suction, release film F stretches along die cavity recess 12b, according to this die cavity recess 12b adsorb keep after potting resin.
In above-described embodiment, the form of film fold straightening members 32 form with release film F mutually in the face of and of being connected on the length direction of release film F is tabular, but be not limited thereto.For example, as shown in figure 11, film fold straightening members 32 also can be configured to be divided into the tabular of multiple along the length direction of release film F.In addition, the height of divided each film fold straightening members 32 can change according to the production of fold.And, also can change the intensity to the helical spring 33 of film fold straightening members 32 application of force supportings upward.
In addition, the real of above stating is executed example and is not only applicable to the workpiece W with ranks shape configuration on substrate 2 to carry out resin moulded situation at each die cavity, also can be applicable to utilize the goods of the type that moulding resin forms a unified one to the formed products that comprises protuberance.In addition, illustrated light-emitting device (LED) has been carried out to resin moulded situation, but be not limited thereto, so long as there is the formed products of protuberance, also can be used in the situation of semiconductor element being carried out to resin-encapsulated.
In addition, the situation that die cavity recess is set at patrix, at counterdie workpiece W is set is illustrated, but can is also the situation that at counterdie, die cavity recess is set, workpiece W is set at patrix.
And, although embodiment is patrix, be the situation that fixed die, counterdie are But moving die, can be both counterdie is that fixed die, patrix are But moving die, can be also upper and lower mould both sides are But moving die.
In addition, resin molding apparatus can be both transfer modling device, can be also compression molding apparatus.
As described above, thus can provide a kind of release film F adopting strip to workpiece W carry out when resin moulded, the film fold producing on its Width that can correct film makes to be shaped resin molding apparatus and the resin molding method that quality improves.Especially, while utilizing film processor automatically to supply with the release film of strip to die surface, can correct the film fold that broad ways produces, afterwards release film absorption is held in to the mould holding face that comprises die cavity recess, therefore be, no matter that transfer modling is shaped or compression molding can make the shaping quality of workpiece improve to carry out resin moulded.In addition, in the present embodiment, to adopting the release film F of strip to be illustrated, but the present invention is also applicable to the release film F of rectangle (length is shorter), in the present embodiment, to release film F on Width, carried out tension force rectification, but also can carry out in the longitudinal direction tension force rectification.
The 2nd embodiment
The situation that release film is sucked in die cavity, resin molding apparatus and resin molding method are elaborated.The member identical with the 1st embodiment marked identical Reference numeral and quote the explanation above.In Figure 12, molding die 5 is identical with the 1st embodiment with pressure-driven mechanism.In the present embodiment, also using patrix 7 as fixed die, counterdie 6 describes as But moving die.On the patrix clamping face of die cavity core (cavity insert) 11 of being located at patrix 7, be formed with the 1st die cavity recess 12a.
The 1st die cavity recess 12a is equipped with the workpiece W of light-emitting component 1 and carries out molding with ranks shape for whole being housed on substrate 2.In addition, at the position of facing mutually with light-emitting component 1 of the bottom of the 1st die cavity recess 12a, be formed with dark a plurality of the 2nd die cavity recess 12b of the degree of depth of this die cavity bottom of depth ratio.In the bottom of the 1st die cavity recess 12a, the 2nd die cavity recess 12b forms the hemispheric recess corresponding with lens section profile.In addition, be formed with the patrix runner cast gate 11a being connected with the 1st die cavity recess 12a.In addition, on the clamping face of the patrix central authorities inserts 10 of patrix 7, be formed with the patrix defective material 10a of portion being connected with patrix runner cast gate 11a.The patrix clamping face that comprises above-mentioned the 1st die cavity recess 12a, patrix runner cast gate 11a, the patrix defective material 10a of portion is covered by release film F.
As an example, in Figure 17, describe the situation of the 2nd die cavity recess 12b with 3 row 3 row in detail.It should be noted that, the situation that the formed products shown in Figure 10 of the 1st embodiment is formed is also the same.The die cavity bottom of the 1st die cavity recess 12a of die cavity core 11 offers air vent hole 12f(the 3rd air vent hole).Air vent hole 12f is used when release film F absorption is held in to the patrix clamping face that comprises the 1st die cavity recess 12a.In addition, in the bottom of the 1st die cavity recess 12a, excavate and be formed with the connectivity slot 12g being connected with the 2nd die cavity recess 12b.In this connectivity slot 12g, offer air vent hole 12h(the 4th air vent hole).To it should be noted that, in the 1st embodiment, in order simplifying, to be recited as air vent hole 12c(the 2nd air vent hole), but specifically, by the 3rd air vent hole 12f of the present embodiment and the 4th air vent hole 12h, the two forms.Equally, in order to simplify, air pumping exhaust device is also only recited as to 16b.
In Figure 17, the 2nd die cavity recess 12b of adjacency is communicated with each other in length and breadth by the connectivity slot 12g that connects its outer circumferential side, and each connectivity slot 12g is connected with air vent hole 12h.Air vent hole 12h is used for draining air or suction air, and this air is the air being easily closed when the 2nd die cavity recess 12b fills moulding resin as described later.Air vent hole 12f with air pumping exhaust device 16c(with reference to Figure 13) be connected, air vent hole 12h with air pumping exhaust device 16d(with reference to Figure 16) be connected.Utilize this air pumping exhaust device 16c, 16d, can not only be from air vent hole 12f and air vent hole 12h suction air, can also spray compressed air as required and make release film F peel off, promote solidifying of package surface from die surface.
In addition, in Figure 17, in the periphery edge of the 2nd die cavity recess 12b, be formed with the step groove 12i being connected with connectivity slot 12g.Air can be from this step groove 12i via connectivity slot 12g to air vent hole 12h escape (with reference to Figure 12).In addition, also can omit step groove 12i and connectivity slot 12g is directly communicated in to the 2nd die cavity recess 12b.In addition, air flue 12j is set to be connected in the limit (limit of facing mutually) of the contrary side in the limit that is connected with the 1st die cavity recess 12a with patrix runner cast gate 11a.
In Figure 12, in counterdie 6, counterdie inserts 23 is supported on counterdie latch segment 21.The upper surface of counterdie inserts 23 becomes for carrying the lift-launch face of workpiece W.In addition, on counterdie central authorities inserts 22, be provided with the 24a of filler chamber.In the 24a of this filler chamber, be inserted with the plunger 24b of energy lifting.Plunger 24b is made as and can utilizes known transmission mechanism lifting.
The resin moulded action of resin molding apparatus then, is described with reference to Figure 12 to Figure 16.First, in Figure 12, in the molding die 5 of die sinking, on the counterdie inserts 23 of counterdie 6, load workpiece W, utilize the moulding resin R of the syringe Deng Xiang 24a of filler chamber feed fluid shape.
And, as shown in figure 13, make air pumping exhaust device 16c work, utilization is located at air vent hole 12f(on the die cavity core 11 of the patrix 7 of facing mutually with counterdie 6 with reference to Figure 17) start to aspirate air, release film F is adsorbed under the state that has been applied in tension force and be held in the patrix clamping face that comprises the 1st die cavity recess 12a, the 2nd die cavity recess 12b, patrix runner cast gate 11a, the patrix defective material 10a of portion.It should be noted that, dotted line shown in this Fig represents: utilize air pumping exhaust device 16c autogamy be placed in air vent hole 12h on the paper left and right directions of this figure for the position of same position and at the not shown air vent hole 12f(of this section with reference to Figure 17) suction air (Figure 14, Figure 15, Figure 19, Figure 20 are too).Now, by the release film F keeping according to patrix clamping face absorption in such state: the die cavity bottom absorption by the tension force with regulation according to the 1st die cavity recess 12a keeps, and not penetration depth than the 2nd dark die cavity recess 12b of the degree of depth bottom the die cavity of the 1st die cavity recess 12a.
Then, in Figure 14, molding die 5 matched moulds.Utilize known clasp mould mechanism to make counterdie template increase, by counterdie 6 and patrix 7 holding workpiece W.In addition, can be also that the not shown movable clamping element that utilizes patrix 7 to have is airtight by the die space that comprises the 1st die cavity recess 12a, the 2nd die cavity recess 12b forming between patrix 7 and counterdie 6, forms pressure reduction space.
Then, as shown in figure 15, make not shown transmission mechanism work and lift plunger 24b, the moulding resin R heating in the state Xia,Jiang 24a of filler chamber of the height at release film F in being limited by the die cavity of the 1st die cavity recess 12a bottom is filled into the whole space of the 1st die cavity recess 12a.In this case, utilize less than the tension force of release film F, not make the longer degree of release film F stretching the 1st lower resin pressure filling moulding resin R.It should be noted that, in the figure, although it is also concordant with the 1st die cavity recess 12a to be illustrated as the part that is positioned at the 2nd die cavity recess 12b of release film F, in fact also can becomes release film and be pressed into a little the state in the 2nd die cavity recess 12b.
Now, because release film F is not pasted on the surface of the 2nd die cavity recess 12b, so can successfully fill moulding resin R along concavo-convex little release film F.In addition, the air in the 1st die cavity recess 12a is escaped from the air flue 12j that is located at a side contrary with patrix runner cast gate 11a, therefore, and can be by air seal in mould (with reference to Figure 17).
Finally, as shown in figure 16, further lift plunger 24b, apply the final resin pressure larger than the tension force of release film F, Yi Bian make this release film F in the 2nd die cavity recess 12b in-draw, Yi Bian fill moulding resin R to the 2nd die cavity recess 12b.Now, remain in air in the 2nd die cavity recess 12b via connectivity slot 12g(or step groove 12i and connectivity slot 12g) to air vent hole 12h, escape, and moulding resin R is filled into the 2nd die cavity recess 12b.
Or, also can be, to the 2nd die cavity recess 12b, fill moulding resin R on one side, utilize air pumping exhaust device 16d from the air vent hole 12h suction air being connected with the 2nd die cavity recess 12b on one side, under this state, make release film F in the 2nd die cavity recess 12b in-draw, Yi Bian fill moulding resin R on one side.
Adopt above-mentioned resin molding apparatus and resin molding method, can utilize the mould tracing ability that the stretching of release film F produces and fill moulding resin R to dark a plurality of the 2nd die cavity recess 12b of the degree of depth of the die cavity bottom than the 1st die cavity recess 12a, therefore, even the formed products that comprises the lens section that for example depth-to-width ratio is high, also can improve resin filling.In addition, can utilize the deviation of thickness that the thickness of release film absorbs workpiece, the 2nd concavo-convex and suitable with the lens section die cavity recess 12b of surface of the work is continuous surface, therefore, can on formed products, not form concavo-convexly, can improve shaping quality.
In addition, the air that is easily closed in the 2nd die cavity recess 12b is escaped reliably via connectivity slot 12g to air vent hole 12h, thereby can prevent the not filling, the hole that produce moulding resin R in the 2nd die cavity recess 12b.
In addition, from air vent hole 12h suction air, apply final resin pressure on one side on one side, thereby make release film F in the 2nd die cavity recess 12b in-draw on one side, to the 2nd die cavity recess 12b, fill moulding resin R on one side, in this case, can promote to residue in the discharge of the air in the 2nd die cavity recess 12b.In addition, moulding resin R is filled into after the 1st die cavity recess 12a, all the 2nd die cavity recess 12b in a plurality of the 2nd die cavity recess 12b is filled simultaneously, therefore, the homogeneous heating of moulding resin R in the 2nd die cavity recess 12b can be made, the uniform forming lens of state can be cured.It should be noted that, in the present embodiment, the suction time of the 3rd air vent hole 12f and the 4th air vent hole 12h staggers, but also can aspirate simultaneously.
Other examples of resin molding apparatus then, are described.
Although above-mentioned resin molding apparatus adopts the molding die of transfer modling shaping use, the molding die that also can adopt compression molding to use.In addition, the member identical with above-mentioned resin molding apparatus marks identical Reference numeral and quotes the explanation above.In Figure 18, patrix 7 is provided with the movable clamping element 35 of patrix that surrounds die cavity core 11.The movable clamping element 35 of patrix utilizes the hanger bearings such as helical spring in not shown upper die base.Die cavity core 11 is fixed on upper die base (not shown).The connectivity slot 12g(that is formed with the 2nd die cavity recess 12b and these the 2nd die cavity recesses 12b is communicated with on die cavity core 11 comprises step groove 12i).
On die cavity core 11, be respectively equipped with in its bottom air vent hole 12f(the 3rd air vent hole of (the die cavity bottom that is equivalent to the 1st die cavity recess 12a) opening; With reference to Figure 17) and at the air vent hole 12h(of the connectivity slot 12g split shed that the 2nd die cavity recess 12b is communicated with each other the 4th air vent hole).
In addition, in Figure 18, in counterdie 6, at lower die base 20 upper supports, there is counterdie inserts 23.In lower die base 20 to surround counterdie inserts 23 and to be provided with lower module 36 with the mode that the movable clamping element 35 of patrix is faced mutually.In addition, although do not form at die cavity core 11 recess that is equivalent to the 1st die cavity recess 12a, the recess being formed by the internal face of lower module 36 and the bottom (lower surface) of die cavity core 11 by molding die 5 is clamped is equivalent to the 1st die cavity recess 12a.That is, the die cavity of the lower surface of die cavity core 11 and the 1st die cavity recess 12a bottom quite.
The resin moulded action of above-mentioned resin molding apparatus then, is described with reference to Figure 18 to Figure 21.In Figure 18, the workpiece W that is equipped with resin is moved into and loads to the counterdie inserts 23 of the counterdie 6 in the molding die 5 of die sinking, utilize air SS (not shown) the absorption workpiece W that is located at counterdie inserts 23.In addition, can be also workpiece W to be moved into the rear supply of the central portion to substrate 2 of molding die 5 moulding resin R(liquid resin).And, as shown in figure 19, make air pumping exhaust device 16c work, although utilize air vent hole 12f(Figure 17 on the die cavity core 11 of the patrix 7 of facing mutually with counterdie 6 to illustrate the die cavity of transfer modling shaping use, but the movable die cavity of using with the compression molding that there is no cast gate 11a is identical, therefore as reference) start to aspirate air, under the state of tension force that release film F has been applied to regulation, make release film F absorption be held in patrix clamping face.
Then, by molding die 5 matched moulds.Utilize known clasp mould mechanism to make not shown counterdie template increase, as shown in Figure 20, utilize counterdie 6 and patrix 7 above workpiece W, to form the 1st die cavity recess 12a, utilize die cavity core 11 and workpiece W clamping moulding resin R.Now, by the release film F keeping according to patrix clamping face absorption with the tension force of regulation according to the bottom of die cavity core 11 (with the die cavity bottom of the 1st die cavity recess 12a quite) be adsorbed maintenance, and in not entering the state of the 2nd die cavity recess 12b.At release film F, by the bottom of die cavity core 11 (suitable with the die cavity bottom of the 1st die cavity recess 12a), defined under the state of height, utilize and do not make the 1st lower resin pressure of the longer degree of release film F stretching to the integral-filled moulding resin R of the 1st die cavity recess 12a.In the present embodiment, because release film F is not pasted on the inner surface of the 2nd die cavity recess 12b yet, so can successfully fill moulding resin R along concavo-convex little release film F.In addition, can be also, the movable clamping element 35 of patrix is connected to lower module 36 and the die space (the 1st die cavity recess 12a and the 2nd die cavity recess 12b) that forms carries out airtightly, form pressure reduction space.
Finally, as shown in figure 21, the state that is connected to lower module 36 from the movable clamping element 35 of patrix further lifts counterdie 6, apply than the large final resin pressure of the tension force of release film F and make this release film F in the 2nd die cavity recess 12b in-draw on one side, to 2nd die cavity recess 12b fill moulding resin R on one side.Now, remain in the air of the 2nd die cavity recess 12b via connectivity slot 12g(or via step groove 12i and connectivity slot 12g) to air vent hole 12h, escape, and moulding resin R is filled into the 2nd die cavity recess 12b.
Or, also can be, to the 2nd die cavity recess 12b, fill moulding resin R on one side, make air pumping exhaust device 16d work on one side and utilize the air vent hole 12h suction air being connected with the 2nd die cavity recess 12b, thereby make release film F in the 2nd die cavity recess 12b in-draw, Yi Bian fill moulding resin R on one side.
At the movable clamping element 35 of patrix, be connected under the state of lower module 36, patrix 7 and counterdie 6 be positioned at final clip position, can maintain final resin pressure while being die cavity core 11 with the approaching position of workpiece W.Also the formed products that comprises the lens section that for example depth-to-width ratio is high adopts such compression molding, even also can improve the fillibility of moulding resin R and improve shaping quality.
In addition, also can be, after making moulding resin R be heating and curing in molding die, to make air pumping exhaust device 16c, 16d work, from air vent hole 12f and air vent hole 12h, carry out air blast, thereby when die sinking, promote the demoulding of release film F or make the surface cure of lens section and promote the demoulding.
The 3rd embodiment
Resin molding apparatus and the method for the demoulding are also used in the air blast describing in detail after being shaped.The member identical with the 1st embodiment marked identical Reference numeral and quote the explanation above.
In Figure 11, workpiece W adopts the structure that connects (or wire bonding connection) light-emitting component 1 on substrate 2 with ranks shape upside-down method of hull-section construction.Figure 9 illustrates the situation for the substrate 2 of rectangle (length is shorter), the example of a plurality of (for example installing 18) formed products is installed.In addition, the substrate 2 using as base material can adopt the various tabular members such as resin substrate, metal (such as aluminium, copper etc.) substrate, ceramic substrate, lead frame, carrier.In addition, as workpiece W can adopt be formed with projection wafer, by being adhesively fixed, be equipped with the carrier of electronic component etc.
Then, resin molding apparatus is described.In addition, because the general configuration of the molding die 5 that resin molding apparatus has, pressure-driven mechanism are identical with the 1st embodiment, so describe centered by the structure of the stripper apparatus being had by molding die 5.Figure 22 has omitted the schematic cross sectional views (in Figure 23 to Figure 25 too) of filler chamber, defective material portion, runner, cast gate etc. from molding die 5.In addition, in Fig. 9, formed products 37 is series connection shape ground and is connected and resin-encapsulated between two on substrate 2, and Figure 22 schematically shows for encapsulating the cross-section structure of the molding die 5 of 1 formed products 37.Molding die 5 has for loading counterdie 6(mono-mould of workpiece W) and for another mould of patrix 7(of holding workpiece W).It should be noted that, because be to describe the demoulding that utilizes air blast to carry out in detail, so Figure 22 to Figure 25 has omitted all grooves 15 as the necessary structure before being shaped, release film has been carried out to the film fold straightening members 32 that fold flattens, the diagram of accommodating recess 19.
First, the structure of patrix 7 is described with reference to Fig. 8.In the bottom of the 1st die cavity recess 12a and in the surrounding of the 2nd die cavity recess 12b, offer a plurality of (for example 4) air vent hole 12c(the 2nd air vent hole).Air vent hole 12c is connected (with reference to Figure 22) with the air pumping exhaust device 16b that can spray air or suction air.
In Fig. 8, on the clamping face (workpiece bearing surface) of patrix central authorities' inserts 10 and patrix cavity insert 11, offer a plurality of for adsorbing air vent hole 18a(the 2nd air vent hole that keeps release film F).In addition, patrix defective material portion 10a, the patrix runner 10b suitable with resin stream, patrix runner cast gate 11a, be communicated with on runner 11b, offer air vent hole 18b(the 2nd air vent hole).The 2nd air vent hole 18a, 18b with can spray air or suction air air pumping exhaust device 16f(with reference to Figure 27 and Figure 28) be connected.As shown in figure 22, the patrix clamping face that comprises the bottom of the 1st die cavity recess 12a utilizes release film F to cover.
The structure of counterdie 6 then, is described with reference to Figure 11 and Fig. 9.In Figure 11, in the filler chamber neighboring area of counterdie central authorities inserts 22, with defective material (Japanese: the position that formed products カ Le) runner on 29a and formed products (Japanese: formed products ラ Application Na) 29b(is with reference to Fig. 9) is corresponding is provided with through hole, is provided with exsertile distribution 30 in this through hole on formed products.Promote 30 settings and be arranged at not shown distribution plate.Molding die 5 is when matched moulds state, promoting 30 keeps out of the way from counterdie clamping face, after carrying out die sinking, promoted plate and pressed, outstanding and make defective material 29a on unnecessary resin 29(formed products and the runner 29b on formed products from counterdie clamping face (counterdie central authorities inserts 22); With reference to Fig. 9) demoulding.
Blasting unit 27 is located at paired counterdie terminal guide vane end stop 25 in the mode facing with each other, and blasting unit 28 is located at paired counterdie terminal guide vane end stop 26 in the mode facing with each other.In the side with each blasting unit 27,28 opposite faces, be respectively equipped with air vent hole 27a, 28a(the 5th air vent hole; With reference to Figure 27 and Figure 28).(A) of Figure 30 and (B) of Figure 30 represent blasting unit 28(27) structure example.In addition, the structure of blasting unit 27 too.In order to make air towards the direction parallel with workpiece W diffusion, ejection, air vent hole 28a(27a) unit opening 28b(27b) form and be roughly 90 ° and open.Unit opening 28b(27b) height and position is made as the height roughly the same with the upper surface of base plate of workpiece W.From air vent hole 28a, between release film F and formed products 37, spray air and make release film F and formed products 37 separate (with reference to Figure 25).In addition, as described later, from air vent hole 27a, between unnecessary resin 29 and counterdie surface, spray air, and make the defective material 29a on unnecessary resin 29(formed products) becoming is easy to peel off (with reference to Figure 27) from promoting 30.
Air vent hole 27a, 28a are connected (with reference to Figure 23, Figure 24, Figure 25) with the air pumping exhaust device 16f that can aspirate air or energy air blast.In addition, for air vent hole 18a, 18b(the 2nd air vent hole), air vent hole 27a, 28a(the 5th air vent hole) and air vent hole 12c(the 2nd air vent hole), although in the present embodiment each air vent hole is carried out to the opening and closing operations of valve, by each air pumping exhaust device, aspirate the switching of air and air blast, also can use total air pumping exhaust device.
Then, on one side with reference to the sequential chart of the flow chart of (A) of Figure 31 and the air blast of Figure 31 (B), an example of the demoulding action that adopts above-mentioned molding die 5 is described on one side.First, in (A) of Figure 31, on the counterdie inserts 23 of the molding die 5 of die sinking, load workpiece W, to the 24a of filler chamber, supply with after moulding resin R, counterdie 6 is moved up, and holding workpiece W together with the patrix 7 being covered by release film F with the patrix clamping face that comprises the bottom of the 1st die cavity recess 12a makes the formed products 37 that comprises lens section be heating and curing to carry out resin moulded (step S1).In (B) of Figure 31 because as the counterdie 6 of But moving die just with patrix 7 matched moulds, so pressure-driven mechanism is positioned at the position moving up.In addition, air pumping exhaust device 16b work and make air vent hole 18a, 18b(the 2nd air vent hole at the clamping face opening of patrix 7) state (absorption ON state) in suction release film F.In addition, Figure 22 represents just to complete the state after resin moulded.The temperature that is heating and curing of moulding resin R shown in this figure is different due to the difference of resin, but is 140 ℃~180 ℃.
Then,, in (A) of Figure 31, after the curing time of moulding resin R, start the die sinking of molding die 5.The work of Ji,Shi pressure-driven mechanism, makes counterdie 6 declines (step S2).Then, stop the film absorption action of air pumping exhaust device 16b, utilize air vent hole 18a, 18b(the 2nd air vent hole) beginning air blast action (step S3).In (B) of Figure 31, utilize air vent hole 18a, 18b(the 2nd air vent hole) ejection air, and make release film F and patrix 7 separate (with reference to Figure 23).Preferably, now, make air pumping exhaust device 16b work, from air vent hole 12c(the 2nd air vent hole) spray air, across release film F, make the surface cure (with reference to Figure 23) of the formed products 37 that the protuberance high with depth-to-width ratio is suitable.In addition, although continue by air vent hole 18a, 18b(the 2nd air vent hole) the air blast action carried out, also can also after the stipulated time, make air blast release.For air vent hole 12c(the 2nd air vent hole), be also the same.
Then, in (A) of Figure 31, further carry out the die sinking of molding die 6, make air pumping exhaust device 16f work, and make air from air vent hole 27a, 28a(the 5th air vent hole) be ejected between release film F and formed products 37, thereby release film F and formed products 37 are separated (with reference to Figure 24, Figure 25; Step S4).
Particularly, in (B) of Figure 31, make on one side counterdie 6 further declines, from starting die sinking t after second (>0) air pumping exhaust device 16f is worked, from air vent hole 27a, 28a(the 5th air vent hole) gap along substrate 2 to release film F and between formed products 37 ejection air, this gap is (with reference to the Figure 25) having formed under the state of tension force release film F has been applied.The blasting unit 27,28 that Figure 29 schematically shows from configuration relatively sprays the state of air along substrate 2 to formed products 37.As shown in Figure 30 (A), be formed at blasting unit 28(27) air vent hole 28a(27a; The 5th air vent hole) unit opening 28b(27b) so that air to workpiece W blow air, therefore, can carry out cooling to formed products 37 in the mode of angular spread of 90 ° roughly effectively.
Thus, while increasing the tension force of release film F, from air vent hole 28a(27a; The 5th air vent hole) spray air and promote easily from substrate 2 and formed products 37, to peel off solidifying of formed products surface thereby release film F is become.In addition, the surface temperature of preferred formed products 37 is now cooled to 100 ℃ of left and right.In addition, although continue air vent hole 28a(27a; The 5th air vent hole) the air blast action of carrying out, but also can after the stipulated time, make air blast release.
As shown in figure 26, although patrix 7 separates respectively with formed products 37 with release film F, release film F, the defective material 29a on formed products and the runner 29b on formed products still stick on counterdie clamping face (counterdie central authorities inserts 22) and the not demoulding.Especially the transparent resin that LED uses, as long as uncolled solidify of formed products will, in adherence still very high state, therefore, be difficult to separate with counterdie clamping face under heated condition.By the way, as shown in Figure 9, the unnecessary resin 29 after resin moulded, be defective material 29a and the runner 29b on formed products and the counterdie 6(counterdie central authorities inserts 22 on formed products) between contact area large, so be difficult to peel off.
Therefore, in (A) of Figure 31, more further carry out the die sinking of molding die 5, start lower moulding/demoulding action (step S5).That is,, as shown in Figure 31 (B), make to promote 30 from counterdie 6(counterdie central authorities inserts 22) the defective material 29a on formed products and the runner 29b jack-up (with reference to Figure 27) on formed products.In addition, from air vent hole 27a(the 5th air vent hole) to spraying air between the runner 29b between defective material 29a and counterdie clamping face on formed products, on formed products and counterdie clamping face, make defective material 29a on formed products and the distribution abutting part with promoting 30 butts of the runner 29b on formed products solidify (step S6; With reference to Figure 28).Figure 29 schematically show air from the blasting unit 27 of relatively configuration to the defective material 29a on formed products and the state of the ejection of the runner 29b on formed products.
In addition, in Figure 28, although the height of unit opening 27b is made as than the defective material 29a on formed products and the interface between counterdie clamping face, the position that runner 29b on formed products and the interface between counterdie clamping face are high, but as shown in Figure 31 (B), when counterdie 6 moves to die sinking position, promote 30 and be projected into maximum extrusion position, so the defective material 29a on formed products and the runner 29b on formed products are by jack-up upward and can be via between defective material 29a and counterdie surface on formed products, air blast is carried out in the gap forming between runner 29b on formed products and counterdie surface.
Thus, make to promote 30 defective material 29a on formed products and the runner 29b jack-up on formed products, and ejection air, the distribution abutting part with promoting 30 butts is carried out cooling, thereby make unnecessary resin 29 solidify and be easy to, from promoting 30, peel off.In addition, there is no need defective material 29a on formed products and the runner 29b on formed products and all arrange and promote 30, also can be arranged at wherein any one.In addition, in the present embodiment, although continue air vent hole 12c(the 2nd air vent hole) the air blast action carried out, also can also after the stipulated time, make air blast release.
As mentioned above, the demoulding release (step S7) of formed products 37.
Adopt said structure, use 5 pairs of formed products that contain lens section 4 of molding die 37 carry out resin moulded after, be certainly located at air vent hole 18a, the 18b ejection air of patrix 7, thereby can make release film F and patrix clamping face separate.
In addition, molding die 5 starts after die sinking, makes air from air vent hole 27a, 28a ejection, thereby can make formed products 37 and release film F separate.
Further carry out die sinking, make air from air vent hole 27a(the 5th air vent hole) to defective material 29a, the runner 29b on formed products on unnecessary resin 29(formed products) and mould holding face between spray, thereby can make formed products 37 from the mould holding emaciated face mould of counterdie 6.
Under the prerequisite that therefore, can decline in the quality that do not make to be shaped by the formed products that comprises the lens section that adopts the transparent resin that for example adherence is high from the molding die demoulding.
In addition, utilize the die sinking action of molding die 5, make to produce gap between release film F and formed products 37, under this state, from air vent hole 28a(the 5th air vent hole) ejection air, therefore, utilize increase and the ejection air of the tension force of release film F to make formed products surface cool, formed products 37 is easily peeled off from release film F.
Similarly, making to promote 30 defective material 29a, runner 29b on formed products on formed products gives prominence to, presses, and make air from air vent hole 27a(the 5th air vent hole) ejection, the formed products abutting part that makes to promote top is cooling, thereby makes unnecessary resin 29 solidify and easily from promoting 30, peel off.
The 4th embodiment
Resin molding apparatus and the method for type are also used in the film fulcrum post and the air blast that describe in detail after being shaped.The member identical with the 1st embodiment marked identical Reference numeral and quote the explanation above.In Figure 32, the schematic configuration of molding die 5 and pressure-driven mechanism are identical with the 1st embodiment~3rd embodiment, centered by different structures, describe.It should be noted that, because describe the demoulding of using film fulcrum post to carry out in detail, so Figure 32 to Figure 36 has omitted all grooves 15 as the necessary structure before being shaped, release film has been carried out to the film fold straightening members 32 that fold flattens, the diagram of accommodating recess 19 and blasting unit 27,28.
First, the structure of patrix 7 is described with reference to Fig. 8.In upper die base 8 to comprise the outer circumferential side of the patrix latch segment 9(die cavity recess of patrix cavity insert 11) mode be formed with all grooves 15.Bottom at this week groove 15 offers a plurality of air vent hole 15a(the 1st air vent holes with predetermined distance).Air vent hole 15a is connected (with reference to Figure 33) with the air pumping exhaust device 16a that can spray air or can aspirate air.On the outer circumferential side of all grooves 15 of being located at upper die base 8, embed and have patrix sealing ring 17.Patrix sealing ring 17 can reduce pressure at the interior formation confined space of molding die 5 together with counterdie sealing ring 31.
In Figure 33, in the bottom of the 1st die cavity recess 12a and in the surrounding of the 2nd die cavity recess 12b, offer a plurality of (for example 4) air vent hole 12c(the 2nd air vent hole).Air vent hole 12c is connected (with reference to Figure 34) with the air pumping exhaust device 16b that can spray air or can aspirate air.
In addition, at the 1st die cavity recess 12a from the patrix defective material 10a of portion configured in series around, be formed with respectively the separated groove 12d of these cascaded structures.In the bottom of this groove 12d, offer air vent hole 12e(the 2nd air vent hole).Air vent hole 12e with the air pumping exhaust device 16b(that can spray air or can aspirate air with reference to Figure 34) be connected.
In addition, as shown in Figure 8, on the clamping face (workpiece bearing surface) of patrix central authorities' inserts 10 and patrix cavity insert 11, be provided with a plurality of air vent hole 18a(the 2nd air vent holes), these air vent holes 18a can make release film F be adsorbed in patrix clamping face or for spraying air, make release film F and patrix clamping face separate.In addition, patrix defective material portion 10a, the patrix runner 10b suitable with resin stream, patrix runner cast gate 11a, be communicated with on runner 11b, also offer air vent hole 18b(the 2nd air vent hole).The 2nd air vent hole 18a, 18b are connected (with reference to Figure 34) with the air pumping exhaust device 16b that can spray air or can aspirate air.Shown in figure 32, utilize release film F to cover the patrix clamping face that comprises the 1st die cavity recess 12a and the 2nd die cavity recess 12b.
The structure of counterdie 6 then, is described with reference to Figure 11 and Fig. 9.In Figure 11, the schematic configuration of counterdie 6 is identical with the 1st embodiment.The filler chamber neighboring area of counterdie central authorities inserts 22, with formed products on defective material 29a and the unnecessary resin 29 of the runner 29b(on formed products; With reference to Fig. 9) corresponding position is provided with a plurality of through holes, is provided with the distribution 30 that can give prominence in this through hole, and this is also identical with the 1st embodiment.
In addition,, as an example, film fulcrum post 34(film supporting member the same with Fig. 9) be arranged at four jiaos of counterdie 6, also along film throughput direction, be arranged on 4 positions, place on the counterdie central authorities inserts 22 that is equivalent to central portion.Film fulcrum post 34 is arranged on the force application component application of forces such as helical spring in through hole.
The upper surface part of counterdie inserts 23 is as for loading and adsorb the workpiece maintaining part of holding workpiece W.In addition, counterdie terminal guide vane end stop 25 is located at the length direction both sides of counterdie central authorities inserts 22 in the mode of facing mutually each other.In addition, counterdie terminal guide vane end stop 26 is located at the length direction both sides of each counterdie inserts 23 in the mode of facing mutually each other.
On counterdie terminal guide vane end stop 25,26, be equipped with blasting unit 27,28, be provided with air vent hole (27a, 28a the samely with Figure 30 (B) with Figure 30 (A) of the 3rd embodiment; The 5th air vent hole), this air vent hole so that air towards the mode of the direction parallel with workpiece W diffusion, ejection, form.During die sinking, make air to ejection between release film F and formed products, make release film F and formed products separate (with reference to Figure 36) from air vent hole 28a.In addition, from above-mentioned air vent hole 28a, between unnecessary resin 29 and counterdie surface, spray air, and unnecessary resin 29 is become, be easy to peel off from promoting 30.
Then, with reference to the on-off action of the molding die of Figure 32 to Figure 36 to adopting an example of the demoulding action of above-mentioned molding die 5 to describe.
First, the resin moulded action as prerequisite is described.In Figure 32, on the counterdie inserts 23 of the molding die 5 of die sinking, adsorb holding workpiece W, to the 24a of filler chamber, supply with (with reference to Figure 11) after moulding resin, counterdie 6 is moved up and the patrix 7(that covered by release film F with the patrix clamping face that comprises the bottom of the 1st die cavity recess 12a, the 2nd die cavity recess 12b with reference to Fig. 8) together with holding workpiece W carry out resin moulded.Although different due to the difference of moulding resin, the formed products 37 that comprises lens section is heating and curing at 110 ℃~180 ℃.In addition, in molding die 5, because being forms confined space by patrix sealing ring 17 and counterdie sealing ring 31, so can utilize not shown degasser to carry out vacuum draw, in pressure reduction space, carry out resin moulded action.In addition, air pumping exhaust device 16a, 16b work, and make air vent hole 15a(the 1st air vent hole at the clamping face opening of patrix 7), air vent hole 12c, 12e, 18a, 18b(the 2nd air vent hole) state (absorption ON state) in suction release film F.In addition, as the counterdie 6 of But moving die in upper end position (pressing position).In addition, film fulcrum post 34 is outstanding from counterdie 6, and is pressed against the release film F on the patrix 7 of facing mutually with counterdie 6.
Then, before the several seconds finishing the curing time of moulding resin, first utilize air pumping exhaust device 16a destroy release film F by air vent hole 15a(the 1st air vent hole) state in all grooves 15 that is adsorbed in that forms, utilize air pumping exhaust device 16b destruction release film F by air vent hole 12c, 12e, 18a, 18b(the 2nd air vent hole) adsorbed state that forms.
Then, as shown in figure 33, before closing to an end curing time, the release film F that utilizes air pumping exhaust device 16a to start to be undertaken by air vent hole 15a is adsorbed in the action in all grooves 15.In addition, also utilize air pumping exhaust device 16b to carry out the action of the absorption release film F that undertaken by air vent hole 12c, 12e, 18a, 18b.In addition, meanwhile, for the conveying device of carrying release film F between spool, in the mode of coiling release film F, at throughput direction upstream side and downstream, improve tension force (with reference to Figure 33).And the pressure reduction space that the vacuum suction apparatus by not shown in the molding die of matched moulds 5 is formed destroys.
While finishing, start the die sinking of molding die 5 curing time.Ji,Shi pressure-driven mechanism works and counterdie 6 is declined.That now, utilizes that air pumping exhaust device 16a still proceeds to be undertaken by air vent hole 15a is adsorbed in release film F the action in all grooves 15.Therefore, release film F is being adsorbed under the state of patrix 7, is accompanied by the decline of counterdie 6 and peels off from formed products 37.
Then, as shown in figure 34, start the air spray action of being undertaken by air pumping exhaust device 16b.On one side continue to utilize air pumping exhaust device 16a to carry out the 1st air vent hole via air vent hole 15a() air suction action, Yi Bian utilize air pumping exhaust device 16b to carry out via air vent hole 12c, 12e, 18a, 18b(the 2nd air vent hole) air spray action.Therefore, release film F is from comprising that the patrix clamping face of the 1st die cavity recess 12a, the 2nd die cavity recess 12b starts to peel off.
Then, as shown in figure 35, further make the die sinking of molding die 5, make air from the patrix clamping face ejection that comprises the 1st die cavity recess 12a, the 2nd die cavity recess 12b, and make release film F peeling off from patrix clamping face.
Then, in Figure 36, the deflection tunicle fulcrum post 34 of peeling off and be expanded to sacculus shape release film F from patrix 7 is by hydraulic support.Follow the decline of counterdie 6 and from the outstanding film fulcrum post 34 of counterdie clamping face, release film F pressed towards upper die face, thereby can suppress the sagging of release film F.
In addition, as shown in Figure 9, when molding die 5 die sinking, be certainly located at air vent hole 27a, 28a(that the blasting unit 27,28 of counterdie 6 is provided with reference to (A) of Figure 30 and (B) of Figure 30; The 5th air vent hole) towards formed products 37 and coupled unnecessary resin 29 ejection air (with reference to Figure 29).Thus, during molding die 5 die sinking, be not only formed products 37, also to comprising the unnecessary resin 29 of defective material 29a on formed products and the runner 29b on formed products to spray air respectively, carry out coolingly, therefore can promote the demoulding of formed products 37.
Proceed the air ejection from patrix 7, from the air spray action of the blasting unit 27,28 of counterdie 6 until die sinking finish and finish.In addition, utilize the suction action via air vent hole 15a that air pumping exhaust device 16a carries out also can after the air spray action of being undertaken by air pumping exhaust device 16b starts, after the stipulated time, stop.
As mentioned above, the demoulding release of formed products 37.
Adopt said structure, with molding die 5 to formed products carry out resin moulded after, be certainly located at air vent hole 15a(the 1st air vent hole of patrix 7) suction air, thereby make release film F be adsorbed in all grooves 15, at this state lower open die, can make release film F peel off from formed products 37.
In addition, when molding die 5 die sinking, under the state in release film F is adsorbed in all grooves 15, make air from air vent hole 12c, 12e, 18a, 18b(the 2nd air vent hole) ejection, thus can make release film F be expanded to sacculus shape and peel off from upper die face.
Further carry out die sinking, even if the release film F peeling off from upper die face is sagging, also can utilize film fulcrum post 34 that lax release film F is pressed, supported towards upper die face.
Under the prerequisite that therefore, can decline in the quality that do not make to be shaped by the formed products that comprises the lens section that adopts the transparent resin that for example adherence is high from the molding die demoulding.
Above-mentioned molding die be patrix 7 for fixed die, counterdie 6 for But moving die or in contrast to this any one, can set arbitrarily any one party in patrix 7 and counterdie 6 is fixed die, the opposing party is But moving die.In addition, molding die 5 is at counterdie 6 mounting workpiece W and is provided with the 24a of filler chamber, on patrix 7, be provided with die cavity recess 12a and utilize release film F to cover patrix clamping face, but can be also on counterdie 6, be provided with die cavity recess 12a and with release film F covering counterdie clamping face, the molding die of the 24a of filler chamber is set at patrix 7.And, also substrate 2 can be held in to patrix 7, and form the 1st die cavity 12a, the 2nd die cavity 12b at counterdie 6.
In addition, in the above-described embodiments, to carry out resin moulded situation with the workpiece W of ranks shape configuration at each die cavity on substrate 2, be illustrated, but for example, be effective to the situation of manufacturing the product of the type of the formed products that utilizes moulding resin to form a unified one to comprise protuberance, being difficult to as workpiece W LED lens section on substrate 2 the LED light-emitting device that arranges with the air escape path of for example intensive configuration in 0.2mm interval.In addition, although clear, light-emitting device (LED) is carried out to resin moulded situation, but so long as there is the formed products of protuberance, be not limited thereto, the inventive example, can also be for the situation of resin encapsulated semiconductor element as also can be for the lens of optical pickup apparatus, photomoduel (MEMS product) are carried out to resin moulded situation.

Claims (26)

1.一种树脂模塑装置,其用于对被模塑模具夹持的工件进行树脂模塑,其特征在于,1. A resin molding apparatus for resin molding a workpiece held by a molding die, characterized in that, 上述模塑模具具有:The above molded mold has: 一模具,其用于载置上述工件;A mold, which is used to place the above-mentioned workpiece; 另一模具,在其模具夹持面上形成有模腔凹部,利用离型膜覆盖包括该模腔凹部在内的模具夹持面,Another mold is formed with a mold cavity concave portion on its mold clamping surface, and utilizes a release film to cover the mold clamping surface including the mold cavity concave portion, 在上述另一模具上设有多个通气孔,该多个通气孔用于抽吸空气而能够使上述离型膜吸附于上述模具夹持面或者用于喷出空气而能够使上述离型膜与上述模具夹持面分开,The other mold is provided with a plurality of ventilation holes, and the plurality of ventilation holes are used for sucking air so that the above-mentioned release film can be adsorbed on the above-mentioned mold clamping surface or for ejecting air to make the above-mentioned release film separated from the above mold clamping face, 在上述一模具上设有成对的膜褶皱矫正构件,该膜褶皱矫正构件在以与上述工件载置面相面对的方式搬送的上述离型膜的宽度方向两侧按压于该离型膜,从而,对于该离型膜,不仅在其长度方向上作用有张力、而且在其宽度方向上也作用有张力来去除膜褶皱。A pair of film wrinkle correcting members are provided on the above-mentioned mold, and the film wrinkle correcting members press the release film on both sides in the width direction of the release film conveyed so as to face the workpiece placement surface, Therefore, tension acts not only in the longitudinal direction but also in the width direction of the release film to remove film wrinkles. 2.根据权利要求1所记载的树脂模塑装置,其中,2. The resin molding apparatus according to claim 1, wherein: 在上述另一模具的膜吸附面上以与上述膜褶皱矫正构件相面对的方式形成有用于收容被该膜褶皱矫正构件按压的上述离型膜的松弛部分的收容凹部。An accommodation recess for accommodating a slack portion of the release film pressed by the film wrinkle correcting member is formed on the film suction surface of the other mold so as to face the film wrinkle correcting member. 3.根据权利要求1或2所记载的树脂模塑装置,其中,3. The resin molding apparatus according to claim 1 or 2, wherein: 对上述另一模具和载置有上述工件的上述一模具进行合模,一边利用上述膜褶皱矫正构件向上述收容凹部按压将上述另一模具的表面覆盖的上述离型膜,一边自规定的上述通气孔喷出空气,在膜褶皱被校正的状态下停止上述空气的喷出,利用在上述模腔凹部的内侧和外侧开口的通气孔抽吸空气,从而以依照上述模具的分型面的状态将上述离型膜沿着包括上述模腔凹部的底部在内的上述另一模具的模具夹持面吸附保持。Clamping the other mold and the one mold on which the workpiece is placed, pressing the release film covering the surface of the other mold to the housing recess by the film wrinkle correcting member, The air is ejected from the vent hole, and the ejection of the above air is stopped when the film wrinkles are corrected, and the air is sucked by the vent holes opened on the inside and outside of the concave part of the above-mentioned cavity, so that the state of the parting surface of the above-mentioned mold is followed. The release film is adsorbed and held along the mold clamping surface of the other mold including the bottom of the concave portion of the cavity. 4.一种树脂模塑装置,其利用模塑模具夹持在基材上搭载有电子零件的工件,对包含凸部的成形品进行树脂模塑,其特征在于,4. A resin molding device for clamping a workpiece with electronic components mounted on a base material by a molding die, and resin-molding a molded product including a convex portion, characterized in that, 该树脂模塑装置具有:The resin molding unit has: 一模具,其用于载置上述工件;A mold, which is used to place the above-mentioned workpiece; 另一模具,其具有模腔芯模,该模腔芯模在该另一模具的模具夹持面形成有第1模腔凹部且在该第1模腔凹部的底部分别形成有用于成形上述凸部的第2模腔凹部和在上述第1模腔凹部的模腔底部开口的第3通气孔,利用离型膜覆盖该另一模具的包括上述第1模腔凹部的底部在内的模具夹持面,Another mold, which has a mold cavity core mold, the mold cavity core mold is formed with a first mold cavity concave part on the mold clamping surface of the other mold, and is respectively formed on the bottom of the first mold cavity concave part for forming the above-mentioned protrusions. The second cavity recess of the first cavity and the third air hole opened at the cavity bottom of the first cavity cavity, and the mold holder including the bottom of the first cavity cavity of the other mold is covered with a release film. holding face, 上述另一模具与载置有上述工件的上述一模具合模,利用上述第3通气孔的抽吸将上述离型膜以规定的张力且处于被上述第1模腔凹部的模腔底部限定的高度的方式吸附保持,在该状态下,向上述第1模腔凹部内填充模塑树脂,施加比上述离型膜的张力大的最终树脂压力而一边使该离型膜在上述第2模腔凹部内拉伸,一边向上述第2模腔凹部填充上述模塑树脂。The other mold is clamped with the first mold on which the workpiece is placed, and the release film is held at a predetermined tension by the suction of the third vent hole at the bottom of the cavity defined by the concave portion of the first cavity. In this state, the molding resin is filled into the concave portion of the first cavity, and the release film is placed in the second cavity while applying a final resin pressure greater than the tension of the release film. Stretching in the concave portion fills the molding resin into the concave portion of the second cavity. 5.根据权利要求4所记载的树脂模塑装置,其中,5. The resin molding apparatus according to claim 4, wherein: 在上述第1模腔凹部的底部设有第4通气孔,该第4通气孔开口于与上述第2模腔凹部相连的连通槽,在上述第1模腔凹部填充了模塑树脂后,施加最终树脂压力而一边使上述离型膜在上述第2模腔凹部内拉伸,一边使封闭在该第2模腔凹部内的空气经由上述连通槽向上述第4通气孔逃逸,一边向上述第2模腔凹部填充模塑树脂。A fourth vent hole is provided at the bottom of the concave portion of the first cavity, and the fourth vent hole is opened in a communication groove connected to the concave portion of the second cavity. After filling the concave portion of the first cavity with molding resin, apply The final resin pressure stretches the release film in the concave portion of the second cavity while allowing the air trapped in the concave portion of the second cavity to escape to the fourth vent hole through the communication groove and flow to the fourth vent hole. 2 The concave part of the cavity is filled with molding resin. 6.根据权利要求5所记载的树脂模塑装置,其中,6. The resin molding apparatus according to claim 5, wherein: 一边自上述第4通气孔抽吸空气,一边施加最终树脂压力,使上述离型膜在上述第2模腔凹部内拉伸,一边向该第2模腔凹部填充模塑树脂。The molding resin is filled into the second cavity concave portion while drawing the release film in the concave portion of the second cavity while applying a final resin pressure while sucking air through the fourth vent hole. 7.根据权利要求1至6中任意一项所记载的树脂模塑装置,其特征在于,7. The resin molding apparatus according to any one of claims 1 to 6, wherein: 通过使上述模塑模具夹紧而在上述另一模具的模腔芯模与上述一模具之间形成第1模腔凹部,在上述模腔芯模的底部形成有第2模腔凹部和第3通气孔,设有在与该第2模腔凹部相连的连通槽中开口的第4通气孔,上述另一模具与载置有上述工件的上述一模具合模,利用第3通气孔的抽吸将上述离型膜以规定的张力且处于被上述另一模具的模具夹持面限定的高度的方式吸附保持,在该状态下,在上述工件上填充模塑树脂,施加比上述离型膜的张力大的最终树脂压力,一边使该离型膜在上述第2模腔凹部内拉伸,一边向上述第2模腔凹部填充上述模塑树脂。By clamping the molding die, a first cavity recess is formed between the cavity core of the other mold and the first mold, and a second cavity recess and a third cavity are formed at the bottom of the cavity core. The air hole is provided with a fourth air hole opened in the communication groove connected to the concave part of the second cavity. The other mold is clamped with the first mold on which the workpiece is placed, and the suction of the third air hole is used. The above-mentioned release film is sucked and held at a predetermined tension and at a height defined by the mold clamping surface of the other mold. The mold resin is filled into the second cavity cavity while stretching the release film in the second cavity cavity due to the final resin pressure with high tension. 8.一种树脂模塑方法,其是利用模塑模具夹持被供给来的工件而进行树脂模塑的方法,其特征在于,8. A resin molding method, which is a method of clamping a supplied workpiece with a molding die and performing resin molding, characterized in that, 该树脂模塑方法具有:This resin molding method has: 向开模的模塑模具的一模具的模具夹持面供给上述工件,准备用于对形成有模腔凹部的另一模具的模具夹持面进行覆盖的离型膜的工序;The process of supplying the above-mentioned workpiece to the mold clamping surface of one mold of the mold opening mold, and preparing a release film for covering the mold clamping surface of the other mold in which the cavity concave portion is formed; 开始上述模塑模具的合模动作,利用被设于上述一模具的模具夹持面且位于上述离型膜的宽度方向两侧的成对的膜褶皱矫正构件将上述离型膜压入与该膜褶皱矫正构件相面对的上述另一模具的收容凹部,并且一边利用设于上述另一模具的模具嵌件的通气孔喷出空气,一边对上述离型膜去除膜褶皱的工序;Start the mold clamping operation of the above-mentioned mold, and use the paired film wrinkle correction members that are arranged on the mold clamping surface of the above-mentioned one mold and are located on both sides of the width direction of the above-mentioned release film to press the above-mentioned release film into the mold. A step of removing film wrinkles from the release film while the film wrinkle correcting member faces the receiving recess of the other mold, and blowing air through the vent hole of the mold insert provided in the other mold; 利用该另一模具的所有通气孔的抽吸,将上述膜褶皱被矫正了的上述离型膜吸附保持于上述另一模具的包括上述模腔凹部在内的模具夹持面的工序;A process of absorbing and holding the release film with the film wrinkles corrected on the mold clamping surface of the other mold including the cavity recess by suction through all the vent holes of the other mold; 将上述模塑模具合模,将模塑树脂填充到上述模腔凹部的工序。The step of closing the above-mentioned molding die and filling the concave portion of the above-mentioned cavity with molding resin. 9.根据权利要求8所记载的树脂模塑方法,其中,9. The resin molding method according to claim 8, wherein, 在上述另一模具的模具夹持面上形成有第1模腔凹部和深度比该第1模腔凹部的模腔底部的深度深的多个第2模腔凹部,A first cavity recess and a plurality of second cavity recesses having a depth deeper than the depth of the cavity bottom of the first cavity recess are formed on the mold clamping surface of the other mold, 以处于被上述第1模腔凹部的模腔底部限定的高度的方式将上述离型膜吸附保持于上述另一模具的模具夹持面的状态下,施加比该离型膜的张力大的最终树脂压力而一边使该离型膜在上述第2模腔凹部内拉伸一边向上述第2模腔凹部填充上述模塑树脂。In the state where the above-mentioned release film is adsorbed and held on the mold clamping surface of the above-mentioned other mold at a height defined by the cavity bottom of the first cavity concave portion, a final tension force greater than the tension of the release film is applied. The molding resin is filled into the second cavity concave portion while stretching the release film in the concave portion of the second cavity under the pressure of the resin. 10.一种树脂模塑方法,其是利用模塑模具夹持在基材上搭载有电子零件的工件而对包含透镜部的成形品进行树脂模塑的方法,其特征在于,10. A resin molding method, which is a method of resin-molding a molded product including a lens portion by clamping a workpiece on which an electronic component is mounted on a base material by a molding die, wherein: 该树脂模塑方法具有:This resin molding method has: 在开模的模塑模具的一模具的模具夹持面载置上述工件,在形成有第1模腔凹部和深度比该第1模腔凹部的模腔底部的深度深的多个第2模腔凹部的另一模具的模具夹持面上,借助在上述模腔底部开口的第3通气孔的抽吸,使离型膜以规定的张力且处于被上述第1模腔凹部的模腔底部限定的高度的方式吸附保持于上述另一模具的模具夹持面的工序;The above-mentioned workpiece is placed on the mold clamping surface of one mold of the mold opening mold, and a plurality of second molds formed with a first cavity concave portion and a cavity bottom deeper than the first cavity concave portion are formed. On the mold clamping surface of the other mold in the concave part of the cavity, by means of the suction of the third vent hole opened at the bottom of the cavity, the release film is placed at the bottom of the cavity of the concave part of the first cavity with a specified tension. The process of adsorbing and holding on the mold clamping surface of the other mold mentioned above in a limited height manner; 将上述模塑模具合模,在上述离型膜处于被上述第1模腔凹部的模腔底部限定的高度的状态下,向上述第1模腔凹部填充模塑树脂的工序;Clamping the mold, filling the first cavity cavity with molding resin while the release film is at a height defined by the cavity bottom of the first cavity cavity; 施加比上述离型膜的张力大的最终树脂压力,而一边使该离型膜在上述第2模腔凹部内拉伸,一边向该第2模腔凹部填充上述模塑树脂的工序。A step of filling the second cavity cavity with the molding resin while stretching the release film in the second cavity cavity by applying a final resin pressure higher than the tension of the release film. 11.根据权利要求10所记载的树脂模塑方法,其中,11. The resin molding method according to claim 10, wherein, 设有在将上述第1模腔凹部与上述第2模腔凹部连接起来的连通槽中开口的第4通气孔,在上述第1模腔凹部填充了模塑树脂后,施加最终树脂压力而一边使上述离型膜在上述第2模腔凹部内拉伸,一边使封闭在该第2模腔凹部的空气经由上述连通槽向上述第4通气孔逃逸,一边向上述第2模腔凹部填充模塑树脂。A fourth air hole opened in a communication groove connecting the first cavity concave portion and the second cavity concave portion is provided, and after the molding resin is filled in the first cavity concave portion, the final resin pressure is applied while Stretching the release film in the concave portion of the second cavity, filling the mold into the concave portion of the second cavity while allowing the air enclosed in the concave portion of the second cavity to escape to the fourth vent hole through the communication groove. plastic resin. 12.根据权利要求11所记载的树脂模塑方法,其中,12. The resin molding method according to claim 11, wherein, 一边自上述第4通气孔抽吸空气,一边施加最终树脂压力,从而使上述离型膜在上述第2模腔凹部内拉伸,并向该第2模腔凹部填充模塑树脂。By applying a final resin pressure while sucking air through the fourth vent hole, the release film is stretched in the concave portion of the second cavity, and the molding resin is filled into the concave portion of the second cavity. 13.一种树脂模塑装置,其是对利用模塑模具夹持的工件进行树脂模塑、树脂模塑后的成形品在开模时能自模塑模具脱模的树脂模塑装置,其特征在于,13. A resin molding device, which is a resin molding device that performs resin molding on a workpiece held by a molding die, and that a molded product after resin molding can be released from the molding die when the mold is opened, wherein characterized in that, 上述模塑模具具有:The above molded mold has: 一模具,其用于载置上述工件;A mold, which is used to place the above-mentioned workpiece; 另一模具,在其模具夹持面形成有模腔凹部,利用离型膜覆盖包括该模腔凹部在内的模具夹持面,Another mold is formed with a mold cavity concave portion on its mold clamping surface, and uses a release film to cover the mold clamping surface including the mold cavity concave portion, 上述另一模具上设有多个第2通气孔,该多个第2通气孔用于抽吸空气而能够使上述离型膜吸附于模具夹持面或者用于喷出空气而能够使上述离型膜与上述模具夹持面分开,The above-mentioned other mold is provided with a plurality of second vent holes, and the plurality of second vent holes are used for sucking air so that the above-mentioned release film can be adsorbed on the mold clamping surface or used for ejecting air to make the above-mentioned release film The pattern film is separated from the above-mentioned mold clamping surface, 上述一模具上设有使空气向上述离型膜与成形品之间喷出而使上述成形品与上述离型膜分开的第5通气孔。The one die is provided with a fifth vent hole for blowing air between the release film and the molded product to separate the molded product from the release film. 14.根据权利要求13所记载的树脂模塑装置,其中,14. The resin molding apparatus according to claim 13, wherein: 一边对上述模塑模具进行开模,一边使空气自上述第5通气孔向上述离型膜与成形品之间的因对该离型膜施加张力而形成的间隙喷出。While opening the molding die, air is blown out from the fifth vent hole into a gap between the release film and the molded article formed by applying tension to the release film. 15.根据权利要求13或14所记载的树脂模塑装置,其中,15. The resin molding device according to claim 13 or 14, wherein: 在上述一模具上设有在开模时自模具夹持面向多余树脂突出而使多余树脂脱模的推销,一边利用该推销将上述多余树脂顶起,一边使空气自上述第5通气孔向上述多余树脂与模具夹持面之间的间隙喷出。The above-mentioned one mold is provided with a push pin protruding from the mold clamping surface for excess resin during mold opening to release the excess resin. Excess resin is ejected from the gap between the clamping surface of the mold. 16.根据权利要求13至15中任意一项所记载的树脂模塑装置,其中,16. The resin molding apparatus according to any one of claims 13 to 15, wherein: 在上述另一模具的模具夹持面的周围、在多处位置设有第5通气孔,上述第5通气孔用于在不同的时间分别向成形品和与该成形品相连的多余树脂喷出空气。Around the mold clamping surface of the other mold, fifth vent holes are provided at multiple positions, and the fifth vent holes are used to eject the excess resin connected to the molded product and the molded product at different times. Air. 17.一种树脂模塑装置,其是对利用模塑模具夹持的工件进行树脂模塑、在开模时树脂模塑后的成形品能自模塑模具脱模的树脂模塑装置,其特征在于,17. A resin molding device, which is a resin molding device that performs resin molding on a workpiece held by a molding die, and that the resin-molded molded product can be released from the molding die when the mold is opened, wherein characterized in that, 上述模塑模具具有:The above molded mold has: 一模具,其用于保持上述工件;a mold, which is used to hold the above-mentioned workpiece; 另一模具,在其模具夹持面上形成有模腔凹部,利用离型膜覆盖包括该模腔凹部在内的模具夹持面,Another mold is formed with a mold cavity concave portion on its mold clamping surface, and utilizes a release film to cover the mold clamping surface including the mold cavity concave portion, 在上述另一模具上设有多个第1通气孔和多个第2通气孔,该多个第1通气孔在以包围上述模腔凹部且与上述工件相面对的方式形成的周槽内开口,该多个第2通气孔用于抽吸空气而能够使上述离型膜吸附于上述模具夹持面或者用于喷出空气而能够使上述离型膜与上述模具夹持面分开,该多个第2通气孔在模具夹持面上开口,The other mold is provided with a plurality of first ventilation holes and a plurality of second ventilation holes, and the plurality of first ventilation holes are formed in a peripheral groove that surrounds the concave portion of the cavity and faces the workpiece. The plurality of second air holes are used for sucking air so that the above-mentioned release film can be adsorbed on the above-mentioned mold clamping surface or used for ejecting air so that the above-mentioned release film can be separated from the above-mentioned mold clamping surface. A plurality of second ventilation holes are opened on the mold clamping surface, 上述一模具上突出设有膜支承构件,该膜支承构件在常规状态下被施力为向上述离型膜按压。A film support member protrudes from the one mold, and the film support member is urged to press against the release film in a normal state. 18.根据权利要求17所记载的树脂模塑装置,其中,18. The resin molding apparatus according to claim 17, wherein: 使上述离型膜的张力增大,自上述第1通气孔抽吸空气而使上述离型膜吸附于周槽内,在该状态下对上述模塑模具进行开模,开模动作开始后,使空气自上述第2通气孔喷出而使该离型膜自上述另一模具的表面剥离。Increase the tension of the above-mentioned release film, suck air from the above-mentioned first vent hole to make the above-mentioned release film adsorb in the peripheral groove, and open the above-mentioned molding mold in this state. After the mold opening operation starts, Air was blown out from the second air hole to peel the release film from the surface of the other mold. 19.根据权利要求17或18所记载的树脂模塑装置,其中,19. The resin molding device according to claim 17 or 18, wherein: 上述模塑模具的开模动作开始后,自设于上述模腔凹部内和上述模腔凹部外的膜吸附面的多个第2通气孔喷出空气而使上述离型膜膨胀、自上述另一模具的表面剥离。After the mold opening operation of the above-mentioned molding die is started, air is blown out from the plurality of second air holes provided on the film adsorption surface inside the concave portion of the cavity and outside the concave portion of the cavity to expand the release film. The surface of a mold is peeled off. 20.根据权利要求17至19中任意一项所记载的树脂模塑装置,其中,20. The resin molding apparatus according to any one of claims 17 to 19, wherein: 开模在上述膜支承构件与上述离型膜抵接的状态下进行,随着开模的进行,上述膜支承构件的突出量增加而对自上述另一模具的表面和上述成形品剥离下来的该离型膜进行支承。The mold opening is carried out in a state where the film supporting member is in contact with the release film, and as the mold opening progresses, the amount of protrusion of the film supporting member increases, and the molded product peeled off from the surface of the other mold and the molded product are removed. The release film is used for support. 21.根据权利要求17至20中任意一项所记载的树脂模塑装置,其中,21. The resin molding apparatus according to any one of claims 17 to 20, wherein: 在上述另一模具的模具夹持面上在多处位置设有第3通气孔,在开模时,上述第3通气孔与开模动作同步地向成形品和与该成形品相连的多余树脂喷出空气。The mold clamping surface of the above-mentioned other mold is provided with third ventilation holes at multiple positions. When the mold is opened, the above-mentioned third ventilation holes are released to the molded product and the excess resin connected to the molded product synchronously with the mold opening action. Blow out the air. 22.一种树脂模塑方法,其特征在于,22. A resin molding method characterized in that, 该树脂模塑方法具有:This resin molding method has: 将载置有工件的一模具和包括模腔凹部在内的模具夹持面被离型膜覆盖的另一模具合模,对成形品进行树脂模塑的工序;A process of resin molding molded products by clamping a mold on which a workpiece is placed and another mold whose clamping surface including the concave portion of the cavity is covered with a release film; 上述树脂模塑后开始模塑模具的开模时,自上述另一模具的模具夹持面喷出空气而使上述离型膜与该模具夹持面分开的工序;A step of separating the release film from the mold clamping surface by blowing air from the mold clamping surface of the other mold when the mold opening of the molding mold is started after the above-mentioned resin molding; 进一步进行上述模塑模具的开模,使空气自上述一模具的模具夹持面向上述离型膜与成形品之间喷出从而使上述离型膜与成形品分开的工序;Further performing the mold opening of the above-mentioned molding mold, allowing air to be ejected from the mold clamping surface of the above-mentioned one mold between the above-mentioned release film and the molded product to separate the above-mentioned release film from the molded product; 再进一步进行上述模塑模具的开模,自上述一模具使推销向多余树脂突出,并且使空气向该多余树脂与上述一模具的模具夹持面之间喷出,而使上述成形品自上述一模具的表面脱模的工序。Further, the mold opening of the above-mentioned molding mold is carried out, and the push pin is protruded from the above-mentioned one mold to the excess resin, and air is sprayed between the excess resin and the mold clamping surface of the above-mentioned one mold, so that the above-mentioned molded product is released from the above-mentioned mold. A process of demoulding the surface of the mold. 23.根据权利要求22所记载的树脂模塑方法,其中,23. The resin molding method according to claim 22, wherein, 在使空气向上述成形品喷出的状态下,一边使推销将形成于中央嵌件的多余树脂顶起,一边进一步使空气向该推销抵接部喷出,从而使上述成形品脱模。In the state where the air is blown toward the molded product, the push pin pushes up excess resin formed on the center insert, and air is further blown to the push pin abutting portion to release the molded product. 24.一种树脂模塑方法,其特征在于,24. A resin molding method characterized in that, 该树脂模塑方法具有:This resin molding method has: 将保持有工件的一模具和包括模腔凹部在内的模具夹持面被离型膜覆盖的另一模具合模,对成形品进行树脂模塑的工序;A process of resin molding a molded product by clamping a mold holding a workpiece with another mold whose clamping surface including the concave part of the cavity is covered with a release film; 在上述树脂模塑后,开始模塑模具的开模之前,使上述离型膜的张力增大的工序;A step of increasing the tension of the release film after the above-mentioned resin molding and before starting the mold opening of the molding mold; 在进行上述模塑模具的开模之前,使上述离型膜吸附于以包围上述另一模具的上述模腔凹部的方式形成的周槽内,在该状态下进行开模的工序;Before performing the mold opening of the above-mentioned molding mold, the process of making the above-mentioned release film adsorbed in the peripheral groove formed so as to surround the above-mentioned mold cavity concave part of the above-mentioned other mold, and performing mold opening in this state; 在使上述离型膜吸附于上述周槽内的状态下,自上述另一模具的模具夹持面喷出空气而使该离型膜膨胀、自该另一模具的表面剥离的工序;In a state where the release film is adsorbed in the peripheral groove, air is blown from the mold clamping surface of the other mold to expand the release film and peel off from the surface of the other mold; 进一步进行上述模塑模具的开模,自上述一模具的模具夹持面突出的支承构件以抵接于上述离型膜的状态支承自上述另一模具的表面剥离了的该离型膜的工序。Further, the mold opening of the above-mentioned molding mold is performed, and the support member protruding from the mold clamping surface of the above-mentioned one mold supports the release film peeled from the surface of the other mold in a state of being in contact with the above-mentioned release film. . 25.根据权利要求24所记载的树脂模塑方法,其中,25. The resin molding method according to claim 24, wherein, 在进行上述模塑模具的开模之前,使上述离型膜吸附于上述另一模具的上述周槽和上述模腔凹部内,在该状态下进行开模。Before opening the molding die, the release film is sucked into the peripheral groove and the concave portion of the cavity of the other mold, and the mold is opened in this state. 26.根据权利要求24或25所记载的树脂模塑方法,其中,26. The resin molding method according to claim 24 or 25, wherein, 一边进行上述模塑模具的开模,一边使空气自设于上述模腔凹部内和上述模腔凹部外的膜吸附面的多个第2通气孔喷出,使上述离型膜膨胀并自上述另一模具的模具夹持面剥离。While the mold opening of the above-mentioned molding mold is being performed, air is ejected from a plurality of second air holes provided on the film adsorption surface inside the concave portion of the cavity and outside the concave portion of the cavity, so that the release film is expanded and released from the cavity. The mold clamping surface of the other mold peeled off.
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