CN103539445A - Low-temperature sinterable microwave dielectric ceramic Zn2V3Bi3O14 and its preparation method - Google Patents
Low-temperature sinterable microwave dielectric ceramic Zn2V3Bi3O14 and its preparation method Download PDFInfo
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Abstract
本发明公开了一种可低温烧结的微波介电陶瓷Zn2V3Bi3O14及其制备方法。可低温烧结的微波介电陶瓷的化学组成为Zn2V3Bi3O14。(1)将分析纯的ZnO、V2O5和Bi2O3的原始粉末按Zn2V3Bi3O14化学式称量配料。(2)将步骤(1)原料与蒸馏水混合湿式球磨12小时,烘干后在800℃大气气氛中预烧6小时。(3)在步骤(2)制得的粉末中添加粘结剂并造粒后,再压制成型,最后在870~900℃大气气氛中烧结4小时;所述的粘结剂采用质量浓度为5%的聚乙烯醇溶液,剂量占粉末总质量的3%。本发明制备的陶瓷在870~900℃烧结良好,其介电常数达到15~16,品质因数Qf值高达78000-86000GHz,谐振频率温度系数小,在工业上有着极大的应用价值。The invention discloses a low-temperature sinterable microwave dielectric ceramic Zn 2 V 3 Bi 3 O 14 and a preparation method thereof. The chemical composition of low-temperature sinterable microwave dielectric ceramics is Zn 2 V 3 Bi 3 O 14 . (1) Weigh the raw powders of analytically pure ZnO, V 2 O 5 and Bi 2 O 3 according to the chemical formula of Zn 2 V 3 Bi 3 O 14 . (2) Mix the raw materials in step (1) with distilled water and wet ball mill for 12 hours, dry them and pre-fire them in an atmosphere at 800°C for 6 hours. (3) Add a binder to the powder prepared in step (2) and granulate it, then press it into shape, and finally sinter it in the air atmosphere at 870-900°C for 4 hours; the binder is used at a mass concentration of 5 % polyvinyl alcohol solution, the dosage accounts for 3% of the total mass of the powder. The ceramic prepared by the invention is well sintered at 870-900°C, its dielectric constant reaches 15-16, its quality factor Qf value is as high as 78000-86000 GHz, and the temperature coefficient of resonance frequency is small, so it has great application value in industry.
Description
技术领域 technical field
本发明涉及介电陶瓷,特别是涉及在微波频率使用的介质基板、谐振器和滤波器等微波元器件的微波介电陶瓷及其制备方法。 The present invention relates to dielectric ceramics, in particular to microwave dielectric ceramics for microwave components used at microwave frequencies, such as dielectric substrates, resonators and filters, and a preparation method thereof.
背景技术 Background technique
微波介电陶瓷是指应用于微波频段(主要是UHF、SHF频段)电路中作为介质材料并完成一种或多种功能的陶瓷,在现代通讯中被广泛用作谐振器、滤波器、介质基片和介质导波回路等元器件,是现代通信技术的关键基础材料,已在便携式移动电话、汽车电话、无绳电话、电视卫星接受器和军事雷达等方面有着十分重要的应用,在现代通讯工具的小型化、集成化过程中正发挥着越来越大的作用。 Microwave dielectric ceramics refer to ceramics that are used as dielectric materials in circuits in the microwave frequency band (mainly UHF and SHF bands) and perform one or more functions. They are widely used as resonators, filters, and dielectric substrates in modern communications. Components such as chips and dielectric waveguide circuits are the key basic materials of modern communication technology. They have been used in portable mobile phones, car phones, cordless phones, TV satellite receivers and military radars. They are used in modern communication tools. It is playing an increasingly important role in the process of miniaturization and integration.
应用于微波频段的介电陶瓷,应满足如下介电特性的要求:(1)系列化介电常数εr以适应不同频率及不同应用场合的要求;(2)高的品质因数Q值或介质损耗tanδ以降低噪音,一般要求Qf≥3000 GHz;(3) 谐振频率的温度系数τƒ尽可能小以保证器件具有好的热稳定性,一般要求-10/℃≤τƒ ≤+10 ppm/℃。国际上从20世纪30年代末就有人尝试将电介质材料应用于微波技术。 Dielectric ceramics used in the microwave frequency band should meet the following requirements for dielectric properties: (1) Serialized dielectric constant ε r to meet the requirements of different frequencies and different applications; (2) High quality factor Q value or dielectric Loss tanδ to reduce noise, generally requires Qf≥3000 GHz; (3) The temperature coefficient τ ƒ of the resonant frequency should be as small as possible to ensure good thermal stability of the device, generally requires -10/℃≤τ ƒ ≤+10 ppm/ ℃. Internationally, since the late 1930s, there have been attempts to apply dielectric materials to microwave technology.
根据相对介电常数εr的大小与使用频段的不同,通常可将已被开发和正在开发的微波介电陶瓷分为4类。 According to the relative permittivity ε r and the frequency band used, the microwave dielectric ceramics that have been developed and are being developed can usually be divided into 4 categories.
(1)超低介电常数微波介电陶瓷,主要代表是Al2O3-TiO2、Y2BaCuO5、MgAl2O4和Mg2SiO4等,其εr≤20,品质因数Q×f≥50000GHz,τƒ≤10 ppm/°C。主要用于微波基板以及高端微波元器件。 (1) Ultra-low dielectric constant microwave dielectric ceramics, mainly represented by Al 2 O 3 -TiO 2 , Y 2 BaCuO 5 , MgAl 2 O 4 and Mg 2 SiO 4 , etc., whose ε r ≤ 20, quality factor Q× f≥50000GHz, τ ƒ ≤10 ppm/°C. Mainly used for microwave substrates and high-end microwave components.
(2)低εr和高Q值的微波介电陶瓷,主要是BaO-MgO-Ta2O5, BaO-ZnO-Ta2O5或BaO-MgO-Nb2O5, BaO-ZnO-Nb2O5系统或它们之间的复合系统MWDC材料。其εr=25~30, Q=(1~2)×104(在f≥10 GHz下), τƒ≈0。主要应用于f≥8 GHz的卫星直播等微波通信机中作为介质谐振器件。 (2) Microwave dielectric ceramics with low ε r and high Q value, mainly BaO-MgO-Ta 2 O 5 , BaO-ZnO-Ta 2 O 5 or BaO-MgO-Nb 2 O 5 , BaO-ZnO-Nb 2 O 5 system or composite system MWDC materials between them. Its ε r =25~30, Q=(1~2)×10 4 (at f≥10 GHz), τ ƒ ≈0. It is mainly used as a dielectric resonator device in microwave communication devices such as satellite broadcasting with f≥8 GHz.
(3)中等εr和Q值的微波介电陶瓷,主要是以BaTi4O9、Ba2Ti9O20和(Zr、Sn)TiO4等为基的MWDC材料,其εr=35~40,Q=(6~9)×103(在f=3~-4GHz下),τƒ≤5 ppm/°C。主要用于4~8 GHz 频率范围内的微波军用雷达及通信系统中作为介质谐振器件。 (3) Microwave dielectric ceramics with medium ε r and Q value, mainly MWDC materials based on BaTi 4 O 9 , Ba 2 Ti 9 O 20 and (Zr, Sn) TiO 4 , whose ε r = 35~ 40, Q=(6~9)×10 3 (at f=3~-4GHz), τ ƒ ≤5 ppm/°C. It is mainly used as a dielectric resonant device in microwave military radar and communication systems in the frequency range of 4-8 GHz.
(4)高εr而Q值较低的微波介电陶瓷,主要用于0.8~4GHz 频率范围内民用移动通讯系统,这也是微波介电陶瓷研究的重点。80年代以来,Kolar、Kato等人相继发现并研究了类钙钛矿钨青铜型BaO—Ln2O3—TiO2系列(Ln=La、 Sm、 Nd或Pr等,简称BLT系)、复合钙钛矿结构CaO—Li2O—Ln2O3—TiO2系列、铅基系列材料、Ca1-xLn2x/3TiO3系等高εr微波介电陶瓷,其中BLT体系的BaO—Nd2O3—TiO2材料介电常数达到90,铅基系列 (Pb,Ca)ZrO3介电常数达到105。 (4) Microwave dielectric ceramics with high ε r and low Q value are mainly used in civil mobile communication systems in the frequency range of 0.8-4GHz, which is also the focus of research on microwave dielectric ceramics. Since the 1980s, Kolar, Kato and others have successively discovered and studied perovskite-like tungsten bronze BaO—Ln 2 O 3 —TiO 2 series (Ln=La, Sm, Nd or Pr, etc., referred to as BLT series), composite calcium Titanite structure CaO—Li 2 O—Ln 2 O 3 —TiO 2 series, lead-based series materials, Ca 1-x Ln 2x/3 TiO 3 series and other high ε r microwave dielectric ceramics, among which BaO—Nd of BLT system The dielectric constant of 2 O 3 —TiO 2 materials reaches 90, and the dielectric constant of lead-based series (Pb, Ca)ZrO 3 reaches 105.
以上这些材料体系的烧结温度一般高于1300°C,不能直接与Ag和Cu 等低熔点金属共烧形成多层陶瓷电容器。近年来,随着器件小型化与集成化发展,微波介质陶瓷需要与成本较Au、Pd等金属低的Ag或Cu电极(熔点分别为961℃及1042℃)共烧获得片式多层结构,这就要求材料不仅具有好的微波介电性能,而且其烧结温度要低于Cu、Ag的熔点。我们对组成为Zn2V3Bi3O14的陶瓷进行了烧结特性与微波介电性能研究,结果发现该类陶瓷具有优异的综合微波介电性能同时烧结温度低于900°C,可实现与Ag的低温共烧,可广泛用于各种谐振器和滤波器等微波器件的制造,可满足低温共烧技术及微波多层器件的需要。 The sintering temperature of the above material systems is generally higher than 1300°C, and cannot be directly co-fired with low melting point metals such as Ag and Cu to form multilayer ceramic capacitors. In recent years, with the development of miniaturization and integration of devices, microwave dielectric ceramics need to be co-fired with Ag or Cu electrodes (melting points are 961°C and 1042°C, respectively) that are lower in cost than metals such as Au and Pd to obtain a chip multilayer structure. This requires that the material not only has good microwave dielectric properties, but also that its sintering temperature should be lower than the melting point of Cu and Ag. We have studied the sintering characteristics and microwave dielectric properties of ceramics composed of Zn 2 V 3 Bi 3 O 14 , and found that this type of ceramics has excellent comprehensive microwave dielectric properties and the sintering temperature is lower than 900 ° C. The low-temperature co-firing of Ag can be widely used in the manufacture of microwave devices such as various resonators and filters, and can meet the needs of low-temperature co-firing technology and microwave multilayer devices.
发明内容 Contents of the invention
本发明的目的是提供一种具有低损耗与良好的热稳定性,同时烧结温度低的微波介电陶瓷。 The object of the present invention is to provide a microwave dielectric ceramic with low loss, good thermal stability and low sintering temperature.
本发明的微波介电陶瓷的化学组成式为:Zn2V3Bi3O14。 The chemical composition formula of the microwave dielectric ceramic of the present invention is: Zn 2 V 3 Bi 3 O 14 .
所述微波介电陶瓷的制备方法具体步骤为: The specific steps of the preparation method of the microwave dielectric ceramic are:
(1)将分析纯的ZnO、V2O5和Bi2O3的原始粉末按Zn2V3Bi3O14化学式称量配料。 (1) Weigh the raw powders of analytically pure ZnO, V 2 O 5 and Bi 2 O 3 according to the chemical formula of Zn 2 V 3 Bi 3 O 14 .
(2)将步骤(1)原料与蒸馏水混合湿式球磨12小时,烘干后在800℃大气气氛中预烧6小时。 (2) Mix the raw materials in step (1) with distilled water and wet ball mill for 12 hours, dry them and pre-fire them in an atmosphere at 800°C for 6 hours.
(3)在步骤(2)制得的粉末中添加粘结剂并造粒后,再压制成型,最后在870~900℃大气气氛中烧结4小时;所述的粘结剂采用质量浓度为5%的聚乙烯醇溶液,剂量占粉末总质量的3%。 (3) Add a binder to the powder prepared in step (2) and granulate it, then press it into shape, and finally sinter it in the air atmosphere at 870-900°C for 4 hours; the binder is used at a mass concentration of 5 % polyvinyl alcohol solution, the dosage accounts for 3% of the total mass of the powder.
本发明制备的陶瓷在870~900℃烧结良好,其介电常数达到15~16,品质因数Qf值高达78000-86000GHz,谐振频率温度系数小,因此在工业上有着极大的应用价值。 The ceramic prepared by the invention is well sintered at 870-900°C, its dielectric constant reaches 15-16, its quality factor Qf value is as high as 78000-86000 GHz, and the temperature coefficient of resonance frequency is small, so it has great application value in industry.
具体实施方式 Detailed ways
实施例: Example:
表1示出了构成本发明的不同烧结温度的4个具体实施例及其微波介电性能。其制备方法如上所述,用圆柱介质谐振器法进行微波介电性能的评价;将Zn2V3Bi3O14粉料与占粉料质量20%的Ag粉混合、压制成型后,在900℃下烧结4小时;X 射线衍射物相分析与扫描电镜观察都显示Zn2V3Bi3O14与Ag没发生化学反应,即Zn2V3Bi3O14可以与Ag电极低温共烧。 Table 1 shows four specific examples of different sintering temperatures constituting the present invention and their microwave dielectric properties. The preparation method is as above, and the dielectric properties of the microwave are evaluated by the cylindrical dielectric resonator method; Zn 2 V 3 Bi 3 O 14 powder is mixed with Ag powder accounting for 20% of the powder mass, and after compression molding, it is heated at 900 Sintering at ℃ for 4 hours; X-ray diffraction phase analysis and scanning electron microscope observation both show that Zn 2 V 3 Bi 3 O 14 has no chemical reaction with Ag, that is, Zn 2 V 3 Bi 3 O 14 can be co-fired with Ag electrode at low temperature.
本发明决不限于以上实施例。烧结温度的上下限、区间取值都能实现本发明,在此不一一列举实施例。 The present invention is by no means limited to the above examples. The upper and lower limits and range values of the sintering temperature can all realize the present invention, and the examples are not listed one by one here.
本陶瓷可广泛用于各种介质基板、谐振器和滤波器等微波器件的制造,可满足移动通信、卫星通信等系统的技术需要。 The ceramics can be widely used in the manufacture of microwave devices such as various dielectric substrates, resonators and filters, and can meet the technical needs of mobile communication, satellite communication and other systems.
表1: Table 1:
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CN104261826A (en) * | 2014-09-19 | 2015-01-07 | 桂林理工大学 | Ultra-low dielectric constant microwave dielectric ceramic ZnY3VO8 |
CN105777105A (en) * | 2016-02-17 | 2016-07-20 | 桂林理工大学 | High quality factor ultra-low dielectric constant microwave dielectric ceramic Zn3BiVO7 |
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CN104261826A (en) * | 2014-09-19 | 2015-01-07 | 桂林理工大学 | Ultra-low dielectric constant microwave dielectric ceramic ZnY3VO8 |
CN104261826B (en) * | 2014-09-19 | 2016-01-13 | 桂林理工大学 | Ultra-low dielectric constant microwave dielectric ceramic ZnY3VO8 |
CN105777105A (en) * | 2016-02-17 | 2016-07-20 | 桂林理工大学 | High quality factor ultra-low dielectric constant microwave dielectric ceramic Zn3BiVO7 |
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