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CN103486960A - Ultrasonic, vortex and EMAT integrated lossless thickness tester and method thereof - Google Patents

Ultrasonic, vortex and EMAT integrated lossless thickness tester and method thereof Download PDF

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CN103486960A
CN103486960A CN201310164583.7A CN201310164583A CN103486960A CN 103486960 A CN103486960 A CN 103486960A CN 201310164583 A CN201310164583 A CN 201310164583A CN 103486960 A CN103486960 A CN 103486960A
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emat
module
eddy current
circuit
ultrasonic
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CN103486960B (en
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王悦民
吴昕
朱龙翔
陈萍
伍文君
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Naval University of Engineering PLA
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Abstract

本发明涉及一种超声波、涡流和EMAT一体化无损测厚仪及其方法,其包括激励模块、接收预处理模块、模拟开关、A/D转换器、自校验模块、微控制器MCU、CPU模块、供电模块、CPU外围显示存储,所述激励模块与接收预处理模块连接,所述接收预处理模块与模拟开关连接,所述模拟开关与A/D转换器连接、所述A/D转换器与微控制器MCU连接,所述自校验模块与微控制器MCU连接,所述激励模块包括超声波激励模块、涡流激励模块和EMAT激励模块;所述接收预处理模块包括超声波接收预处理模块、涡流接收预处理模块和EMAT接收预处理模块。本发明通过超声波、涡流和EMAT三者结合,增加了测量结果的可比性,减低了单一方法测量时的误判率,同时克服了单一方法测量的局限性。

Figure 201310164583

The invention relates to an ultrasonic, eddy current and EMAT integrated non-destructive thickness gauge and method thereof, which includes an excitation module, a receiving preprocessing module, an analog switch, an A/D converter, a self-checking module, a microcontroller MCU, and a CPU Module, power supply module, CPU peripheral display storage, the excitation module is connected with the receiving preprocessing module, the receiving preprocessing module is connected with the analog switch, the analog switch is connected with the A/D converter, and the A/D conversion The device is connected with the microcontroller MCU, the self-checking module is connected with the microcontroller MCU, the excitation module includes an ultrasonic excitation module, an eddy current excitation module and an EMAT excitation module; the receiving preprocessing module includes an ultrasonic receiving preprocessing module , Eddy current receiving preprocessing module and EMAT receiving preprocessing module. The invention increases the comparability of the measurement results by combining the ultrasonic wave, the eddy current and the EMAT, reduces the misjudgment rate in the single-method measurement, and simultaneously overcomes the limitation of the single-method measurement.

Figure 201310164583

Description

一种超声波、涡流和EMAT一体化无损测厚仪及其方法An ultrasonic, eddy current and EMAT integrated non-destructive thickness gauge and method thereof

技术领域technical field

本发明属于无损检测技术领域,涉及一种超声、涡流和EMAT一体化无损测厚仪及其方法。The invention belongs to the technical field of nondestructive testing, and relates to an ultrasonic, eddy current and EMAT integrated nondestructive thickness gauge and a method thereof.

背景技术Background technique

长期使用的带包覆层的铁磁性承压管道、容器等会因腐蚀产生壁厚减薄,当壁厚减薄达到一定程度时,可能会失效从而导致巨大的经济损失,甚至导致人员伤亡事故发生。因此,对油、水、气等介质的运输管道等设备产品的厚度测量至关重要。同时在工业生产和应用中,需要对设备或者产品的厚度进行快捷的、随机的测量,大型设备或在线系统难以满足要求,这就需要便携式测厚仪来完成,以实现高精度、安全可靠的无损测量。The long-term use of ferromagnetic pressure-bearing pipes and containers with cladding layers will cause wall thickness reduction due to corrosion. When the wall thickness reduction reaches a certain level, it may fail, resulting in huge economic losses, and even casualties. occur. Therefore, it is very important to measure the thickness of equipment products such as pipelines for oil, water, gas and other media. At the same time, in industrial production and application, it is necessary to quickly and randomly measure the thickness of equipment or products. Large-scale equipment or online systems are difficult to meet the requirements. This requires a portable thickness gauge to achieve high precision, safety and reliability. Non-destructive measurement.

目前的测厚仪均有着各自优缺点和适用范围,超声波测厚技术方向性好、穿透能力强、波长短、绕射现象小、能量高、有聚焦与发散作用、应用广泛、适应性强,但测量时需要耦合剂(水、甘油等),易造成环境污染,同时要求超声波传感器和金属本体间耦合良好,需要打磨掉金属腔体外壁的防腐涂,拆除外包覆层,易造成原包覆结构损坏,操作不便,影响了超声测厚效率,限制了应用领域。实际应用中,适用于金属、非金属、复合材料等多种材料的测厚。如中国专利申请号为201020274870.5的实用新型专利《超声测厚仪》,中国专利申请号为201120306354.05的实用新型专利《超声波涂层测厚仪》,中国专利申请号为201120225836.3的实用新型专利《一种超声测厚仪》,中国专利申请号为200920246432.5的实用新型专利《一种超声波测厚仪》。The current thickness gauges have their own advantages and disadvantages and scope of application. Ultrasonic thickness measurement technology has good directionality, strong penetrating ability, short wavelength, small diffraction phenomenon, high energy, focusing and diverging effects, wide application and strong adaptability. , but a coupling agent (water, glycerin, etc.) is required for measurement, which is likely to cause environmental pollution. At the same time, a good coupling between the ultrasonic sensor and the metal body is required. The coating structure is damaged and the operation is inconvenient, which affects the efficiency of ultrasonic thickness measurement and limits the application field. In practical applications, it is suitable for thickness measurement of various materials such as metals, non-metals, and composite materials. For example, the Chinese patent application number is 201020274870.5 for the utility model patent "ultrasonic thickness gauge", the Chinese patent application number is 201120306354.05 for the utility model patent "ultrasonic coating thickness gauge", the Chinese patent application number is 201120225836.3 for the utility model patent "a Ultrasonic Thickness Gauge”, the Chinese patent application number is 200920246432.5 utility model patent “An Ultrasonic Thickness Gauge”.

涡流测厚技术有着速度快、非接触、频谱宽、信息丰富、易于制造、检测线路简单等优点,但受趋肤效应影响,不易检测到试件较深层次的信息,受涡流传感器激励线圈的限制,对大面积大壁厚试件厚度检测尚存在不足。涡流测厚根据覆层材料和基体材料的不同分为复合镀层厚度测量、非磁性金属上非导电层厚度测量和磁性金属上非磁性覆层厚度测量三种。实际应用中,主要用于测量铝型材、铝板、铝管、铝塑板、铝工件表面的氧化物或涂层测厚。如中国专利申请号为201120184897.X的实用新型专利《一种新型电涡流传感器测厚仪》,中国专利申请号为201120184916.9的实用新型专利《一种脉冲电涡流测厚仪》。Eddy current thickness measurement technology has the advantages of fast speed, non-contact, wide spectrum, rich information, easy manufacturing, and simple detection circuit. However, due to the skin effect, it is difficult to detect the deeper information of the test piece. However, there are still deficiencies in the thickness detection of large-area and large-wall-thickness specimens. Eddy current thickness measurement is divided into three types according to the difference of coating material and base material: composite coating thickness measurement, non-conductive layer thickness measurement on non-magnetic metal and non-magnetic coating thickness measurement on magnetic metal. In practical applications, it is mainly used to measure the oxide or coating thickness on the surface of aluminum profiles, aluminum plates, aluminum tubes, aluminum-plastic plates, and aluminum workpieces. For example, the Chinese patent application number is 201120184897.X utility model patent "a new type of eddy current sensor thickness gauge", the Chinese patent application number is 201120184916.9 utility model patent "a pulse eddy current thickness gauge".

EMAT(电磁声换能器)是一种磁性材料中激励和检测超声波的器件,它利用电磁感应的原理,直接在被检测体内激发超声波。该技术不需要耦合剂,也无需与金属表面紧密接触,实现了非接触测量,简化了操作,检测灵敏度高,同时EMAT能灵活地改变所激发和接收的波模,能对高温、高速、涂覆状态下的材料进行检测。EMAT主要基于洛伦兹力和磁致伸缩效应两种机理研制。洛伦兹力机理适用于金属材料,对于铁磁性材料而言,磁致伸缩效应机理居于主导地位。所以基于洛伦兹力机理的EMAT一般应用于非铁磁性材料(铝、铜等),铁磁性材料的检测主要采用磁致伸缩效应机理的EMAT。目前该技术已在国内进行了阶段性研究,如中国专利申请号为92222396.3《便携式测厚仪》和中国专利申请号为200810226405.1《电磁超声测厚方法》采用了永磁铁提供磁场,不便于对铁磁性材料的厚度进行测量。中国专利申请号为93206367.5《电磁超声测厚仪》中的EMAT使用了U形软铁,换能器尺寸较大,使用不便。EMAT (Electromagnetic Acoustic Transducer) is a device that excites and detects ultrasonic waves in a magnetic material. It uses the principle of electromagnetic induction to directly excite ultrasonic waves in the detected body. This technology does not require couplant or close contact with the metal surface. It realizes non-contact measurement, simplifies operation, and has high detection sensitivity. At the same time, EMAT can flexibly change the excited and received wave modes. The material in the covered state is tested. EMAT is mainly developed based on two mechanisms: Lorentz force and magnetostrictive effect. The Lorentz force mechanism is suitable for metallic materials, and for ferromagnetic materials, the magnetostrictive effect mechanism is dominant. Therefore, the EMAT based on the Lorentz force mechanism is generally applied to non-ferromagnetic materials (aluminum, copper, etc.), and the detection of ferromagnetic materials mainly uses the EMAT of the magnetostrictive effect mechanism. At present, this technology has been studied in stages in China. For example, the Chinese patent application number is 92222396.3 "portable thickness gauge" and the Chinese patent application number is 200810226405.1 "electromagnetic ultrasonic thickness measurement method". Permanent magnets are used to provide magnetic fields, which is not convenient for iron The thickness of magnetic materials is measured. The EMAT in the Chinese patent application No. 93206367.5 "Electromagnetic Ultrasonic Thickness Gauge" uses U-shaped soft iron, and the size of the transducer is relatively large, which is inconvenient to use.

随着现代技术的飞速发展,对于航空航天、核电、船舶、石油、化工、天然气、桥梁等重要工业领域构件的检测要求也越来越高,单一功能的测厚技术已不能满足社会需要,因此,需要一种多功能的测厚系统,采用多种不同测厚方法同时测厚,使测量结果更具有说服力,避免仅采用一种测厚方法而导致的误测,同时弥补单一功能检测的不足。With the rapid development of modern technology, the detection requirements for components in important industrial fields such as aerospace, nuclear power, ships, petroleum, chemical industry, natural gas, bridges, etc. are getting higher and higher. Single-function thickness measurement technology can no longer meet social needs. , a multi-functional thickness measurement system is needed, which uses multiple different thickness measurement methods to measure thickness at the same time, making the measurement results more convincing, avoiding mismeasurement caused by only one thickness measurement method, and making up for the shortcomings of single function detection. insufficient.

发明内容Contents of the invention

本发明的主要目的是在现有无损检测的理论基础上,结合当今的主流测厚技术,提出一种超声波、涡流和EMAT一体化无损测厚仪及其测厚方法,通过超声波、涡流和EMAT三者结合,对同一试件厚度进行无损测量时,提供三种测量方法,增加了测量结果的可比性,减低了单一方法测量时的误判率,同时克服了单一方法测量的局限性,对测量结果偏差较大方法实现主动自校验(效正)功能,克服了现有技术中存在的不足。The main purpose of the present invention is to propose an ultrasonic, eddy current and EMAT integrated non-destructive thickness gauge and its thickness measurement method based on the existing theory of nondestructive testing, combined with today's mainstream thickness measurement technology, through ultrasonic, eddy current and EMAT The combination of the three provides three measurement methods for non-destructive measurement of the thickness of the same specimen, which increases the comparability of measurement results, reduces the misjudgment rate of single-method measurement, and overcomes the limitations of single-method measurement. The method with large deviation of measurement results realizes the function of active self-checking (correction), which overcomes the shortcomings in the prior art.

为了实现上述目的,本发明的技术方案为:一种超声波、涡流和EMAT一体化无损测厚仪,其不同之处在于:其包括激励模块、接收预处理模块、模拟开关、A/D转换器、自校验模块、微控制器MCU、CPU模块、供电模块、CPU外围显示存储,所述激励模块与接收预处理模块连接,所述接收预处理模块与模拟开关连接,所述模拟开关与A/D转换器连接、所述A/D转换器与微控制器MCU连接,所述自校验模块与微控制器MCU连接,所述微控制器MCU与CPU模块连接,所述CPU模块分别与显示屏、通信接口、报警模块、数据存储模块连接,所述激励模块包括超声波激励模块、涡流激励模块和EMAT激励模块;所述接收预处理模块包括超声波接收预处理模块、涡流接收预处理模块和EMAT接收预处理模块。In order to achieve the above object, the technical solution of the present invention is: an ultrasonic, eddy current and EMAT integrated nondestructive thickness gauge, the difference is that it includes an excitation module, a receiving preprocessing module, an analog switch, and an A/D converter , self-verification module, microcontroller MCU, CPU module, power supply module, CPU peripheral display storage, the excitation module is connected with the receiving preprocessing module, and the receiving preprocessing module is connected with the analog switch, and the analog switch is connected with A The /D converter is connected, the A/D converter is connected with the microcontroller MCU, the self-checking module is connected with the microcontroller MCU, the microcontroller MCU is connected with the CPU module, and the CPU module is connected with the microcontroller MCU respectively. The display screen, communication interface, alarm module, and data storage module are connected, and the excitation module includes an ultrasonic excitation module, an eddy current excitation module and an EMAT excitation module; the receiving preprocessing module includes an ultrasonic receiving preprocessing module, an eddy current receiving preprocessing module and EMAT receives the preprocessing module.

按以上方案,所述超声波激励模块由信号发生器、驱动电路、高压开关电路、超声波传感器组成,所述超声波信号接收预处理模块由前置放大电路、带通滤波电路、程控自动增益电路组成,所述信号发生器与驱动电路连接,所述驱动电路与高压开关电路连接,所述高压开关电路与超声波传感器连接,所述超声波传感器与前置放大电路连接,所述前置放大电路与带通滤波电路连接,所述带通滤波电路与程控自动增益电路连接。According to the above scheme, the ultrasonic excitation module is composed of a signal generator, a drive circuit, a high-voltage switch circuit, and an ultrasonic sensor, and the ultrasonic signal receiving preprocessing module is composed of a preamplifier circuit, a band-pass filter circuit, and a program-controlled automatic gain circuit. The signal generator is connected to a drive circuit, the drive circuit is connected to a high-voltage switch circuit, the high-voltage switch circuit is connected to an ultrasonic sensor, the ultrasonic sensor is connected to a preamplifier circuit, and the preamplifier circuit is connected to a bandpass The filter circuit is connected, and the band-pass filter circuit is connected with the program-controlled automatic gain circuit.

按以上方案,所述涡流激励模块由信号发生器、功率放大器、涡流传感器组成,涡流信号接收预处理模块由检波电路、平衡滤波电路和可调增益放大电路组成,所述信号发生器与功率放大器连接,所述功率放大器与涡流传感器连接,所述涡流传感器与检波电路连接,所述检波电路与平衡滤波电路连接,所述平衡滤波电路与可调增益放大电路连接。According to the above scheme, the eddy current excitation module is composed of a signal generator, a power amplifier, and an eddy current sensor, and the eddy current signal receiving preprocessing module is composed of a detection circuit, a balanced filter circuit and an adjustable gain amplifier circuit. The power amplifier is connected to the eddy current sensor, the eddy current sensor is connected to the detection circuit, the detection circuit is connected to the balance filter circuit, and the balance filter circuit is connected to the adjustable gain amplifier circuit.

按以上方案,所述EMAT激励模块由信号发生器、驱动电路、D类功率放大电路、匹配电路、电磁声换能器EMAT组成,所述EMAT信号接收预处理模块由匹配电路、前置放大电路、带通滤波电路、程控自动增益电路组成,所述信号发生器与驱动电路连接,所述驱动电路与D类功率放大电路连接,所述D类功率放大电路与匹配电路连接,所述匹配电路与电磁声换能器EMAT连接,所述电磁声换能器EMAT与匹配电路连接,所述匹配电路与前置放大电路连接,所述前置放大电路与带通滤波电路连接,所述带通滤波电路与程控自动增益电路连接。According to the above scheme, the EMAT excitation module is composed of a signal generator, a drive circuit, a class D power amplifier circuit, a matching circuit, and an electromagnetic acoustic transducer EMAT, and the EMAT signal receiving preprocessing module is composed of a matching circuit, a preamplifier circuit , a band-pass filter circuit, and a program-controlled automatic gain circuit, the signal generator is connected to a driving circuit, the driving circuit is connected to a class D power amplifier circuit, the class D power amplifier circuit is connected to a matching circuit, and the matching circuit It is connected with the electromagnetic acoustic transducer EMAT, and the electromagnetic acoustic transducer EMAT is connected with a matching circuit, and the matching circuit is connected with a preamplifier circuit, and the preamplifier circuit is connected with a bandpass filter circuit, and the bandpass The filter circuit is connected with the program-controlled automatic gain circuit.

按以上方案,所述超声波传感器设置在超声探头内,所述超声探头为收发一体式,超声波传感器由双压电晶片构成,一个晶片用于发射超声波,另一个晶片用于接受超声波。According to the above scheme, the ultrasonic sensor is arranged in the ultrasonic probe, the ultrasonic probe is an integrated transceiver, the ultrasonic sensor is composed of bimorph chips, one chip is used to transmit ultrasonic waves, and the other chip is used to receive ultrasonic waves.

按以上方案,所述涡流传感器设置在涡流探头内,所述涡流探头为收发一体式,涡流传感器的外部均采用屏蔽式结构,涡流传感器由两组线圈绕组构成,一组线圈绕组为发射线圈绕组,另一组为接收线圈绕组,所述发射线圈绕组的输入端与激励模块的输出连接,所述接收线圈绕组与接受预处理模块的输入连接。According to the above scheme, the eddy current sensor is arranged in the eddy current probe, the eddy current probe is a transceiver integrated type, the outside of the eddy current sensor adopts a shielded structure, the eddy current sensor is composed of two sets of coil windings, and one set of coil windings is the transmitting coil winding , the other group is the receiving coil winding, the input end of the transmitting coil winding is connected to the output of the excitation module, and the receiving coil winding is connected to the input of the receiving preprocessing module.

按以上方案,所述电磁声换能器EMAT设置在EMAT探头内,所述EMAT探头为收发一体式,电磁声换能器EMAT的外部均采用屏蔽式结构,电磁声换能器EMAT由两组线圈绕组构成,一组线圈绕组为发射线圈绕组,另一组为接收线圈绕组,所述发射线圈绕组的输入端与激励模块的输出连接,所述接收线圈绕组与接受预处理模块的输入连接。According to the above scheme, the electromagnetic acoustic transducer EMAT is arranged in the EMAT probe, and the described EMAT probe is a transceiver integrated type, and the outside of the electromagnetic acoustic transducer EMAT adopts a shielded structure, and the electromagnetic acoustic transducer EMAT consists of two groups Composed of coil windings, one set of coil windings is a transmitting coil winding, and the other set is a receiving coil winding, the input end of the transmitting coil winding is connected to the output of the excitation module, and the receiving coil winding is connected to the input of the receiving preprocessing module.

一种超声波、涡流和EMAT一体化无损测厚方法,其不同之处在于:其方法包括以下步骤:An integrated non-destructive thickness measurement method of ultrasonic wave, eddy current and EMAT, the difference is that the method comprises the following steps:

步骤A)、在超声波、涡流和EMAT三种无损测量模式中选择一种所要检测的模式,将对应探头置于被测试件上;Step A), select one of the three non-destructive measurement modes of ultrasonic, eddy current and EMAT to be detected, and place the corresponding probe on the test piece;

步骤B)、通过微控制器MCU控制信号发生器产生所需特定频率的激励信号,经功率放大后激励探头发射端;Step B), the signal generator is controlled by the microcontroller MCU to generate the excitation signal of the required specific frequency, and the transmitter end of the probe is excited after the power is amplified;

步骤C)、根据超声波、涡流和EMAT各自的激励原理,在探头接收端感应出电压信号,电压信号经接收预处理模块进行拾取信号的处理;Step C), according to the respective excitation principles of ultrasonic wave, eddy current and EMAT, a voltage signal is induced at the receiving end of the probe, and the voltage signal is processed by the receiving preprocessing module to pick up the signal;

步骤D)、将处理后得到的模拟信号经模拟开关送入A/D转换器转换为数字信号,通过CPU模块运算处理后将测量的试件厚度值显示并存储;Step D), the analog signal obtained after processing is sent to the A/D converter through the analog switch to be converted into a digital signal, and the measured thickness value of the test piece is displayed and stored after being processed by the CPU module;

步骤E)、当对同一试件分别采用超声波、涡流、EMAT三种方法均测量完成时,启动自校验程序,通过自校验模块对三种无损测厚方法的测量结果彼此分别比对,实现对测量结果偏差较大方法的主动自校验功能。Step E), when the three methods of ultrasonic, eddy current and EMAT are used to measure the same test piece respectively, start the self-verification program, and compare the measurement results of the three non-destructive thickness measurement methods with each other through the self-verification module, Realize the active self-calibration function for methods with large deviations in measurement results.

本发明通过微控制器MCU控制信号发生器产生超声测厚、涡流测厚、EMAT测厚所需特定频率的激励信号,该信号经功率放大后激励探头线圈,将探头线圈接收到的信号送入相应的检测通道,使信号加载到相应的超声波、涡流、EMAT传感器上,使各传感器完成含有关被检试件厚度信息信号的拾取。信息拾取后送入超声、涡流、EMAT的接收预处理模块进行拾取信号的处理,将处理后得到的模拟信号经模拟开关,送入A/D转换器,将表示试件厚度的模拟信号转换为数字信号,应CPU需求将测量数据送入CPU模块。CPU模块将测量的试件厚度值在显示器上显示出来并存储,并与阈值作比较,若超出范围则启动报警单元。每当对同一试件分别采用超声波、涡流、EMAT三种方法的测量完毕后,启动自校验程序,将三个测量数据送入自校验电路进行校验,同时校验器对自校验电路输出值进行两两比较判别,若三个测量数据在误差范围内,则不作处理;若某个测量数据偏差较大,校验器给出差错指示,送入微控制器MCU进行误差通道的校准处理。该自校验过程产生的差错指示、误差通道和校准完成指令同步送入CPU模块,在显示器显示通知用户。In the present invention, the signal generator is controlled by a microcontroller MCU to generate an excitation signal of a specific frequency required for ultrasonic thickness measurement, eddy current thickness measurement, and EMAT thickness measurement. The signal is amplified by power to excite the probe coil, and the signal received by the probe coil is sent into The corresponding detection channel loads the signal to the corresponding ultrasonic, eddy current, and EMAT sensors, so that each sensor can complete the pickup of the signal containing the information about the thickness of the test piece. After the information is picked up, it is sent to the receiving preprocessing module of ultrasonic, eddy current, and EMAT to process the picked up signal, and the processed analog signal is sent to the A/D converter through the analog switch, and the analog signal representing the thickness of the test piece is converted into Digital signal, the measurement data is sent to the CPU module according to the CPU demand. The CPU module displays and stores the measured thickness value of the test piece on the display, and compares it with the threshold value, and starts the alarm unit if it exceeds the range. Whenever the same test piece is measured by the three methods of ultrasonic, eddy current and EMAT, the self-calibration program is started, and the three measurement data are sent to the self-calibration circuit for calibration. At the same time, the calibrator performs self-calibration The output value of the circuit is compared and judged in pairs. If the three measurement data are within the error range, no processing will be performed; if a certain measurement data has a large deviation, the calibrator will give an error indication and send it to the microcontroller MCU for error channel calibration. deal with. The error indication, error channel and calibration completion command generated during the self-checking process are sent to the CPU module synchronously, and are displayed on the display to notify the user.

基于以上技术方案,本发明有如下的优点:Based on the above technical scheme, the present invention has the following advantages:

1、本发明综合超声波、涡流和EMAT检测为一体,对同一试件厚度进行测量时,三种方法可供选择,降低了单一方法测量时的误判率,提高了测量的准确率与可信度;1. The present invention integrates ultrasonic, eddy current and EMAT detection into one. When measuring the thickness of the same test piece, three methods can be selected, which reduces the misjudgment rate when measuring with a single method, and improves the accuracy and credibility of the measurement. Spend;

2、本发明通过自校验模块对三种无损测厚方法的测量结果彼此任意比对,实现对测量结果偏差较大方法的主动自校验(效正)功能,极大地提高了测量结果的准确性;2. The present invention compares the measurement results of the three non-destructive thickness measurement methods with each other arbitrarily through the self-verification module, and realizes the active self-verification (validation) function of the method with a large deviation in the measurement results, which greatly improves the accuracy of the measurement results. accuracy;

3、本发明综合超声波、涡流和EMAT检测为一体,相较于各自分离的超声波测厚仪、涡流测厚仪、EMAT测厚仪,采用一套CPU模块、存储芯片、显示屏、供电系统、数据处理系统及机壳等,大大节省了设备的成本,实现了资源的共享和技术之间的优势互补;3. The present invention integrates ultrasonic, eddy current and EMAT detections. Compared with the separate ultrasonic thickness gauges, eddy current thickness gauges, and EMAT thickness gauges, a set of CPU modules, memory chips, display screens, power supply systems, The data processing system and casing, etc., greatly save the cost of equipment, realize the sharing of resources and the complementary advantages between technologies;

4、本发明集成度高、体积小、重量轻、操作简便、便于携带,针对不同试件,有三种无损检测方法可供选择,具有较为广泛的应用,克服了单一方法无损检测的局限性,适用于各种恶劣环境下使用;4. The present invention has high integration, small size, light weight, easy operation and portability. For different test pieces, there are three non-destructive testing methods to choose from, which has a wide range of applications and overcomes the limitations of a single non-destructive testing method. Suitable for use in various harsh environments;

5、本发明通过本地和远程数据库进行数据存档存储,可随时调用数据对试件的健康状况进行评估,进行寿命预测等性能分析;5. The present invention archives and stores data through local and remote databases, and can call data at any time to evaluate the health status of the test piece and perform performance analysis such as life prediction;

常规的测厚仪只采用一种测厚技术:如传统的压电超声测厚技术,需要耦合剂,易造成环境污染,同时需要进行打磨等操作,影响了效率,限制了应用领域。涡流测厚技术受趋肤效应影响,不易检测到试件较深层次的信息,受涡流传感器激励线圈的限制,对大面积壁厚检测尚有不足。这些测厚仪测量方法单一,测量结果没有可比性,因此,准确度难以定量化。基于此,本发明将超声、涡流、EMAT三种技术融为一体,通过三种方法对试件进行检测,增加了测量结果的可比性,减低了单一方法测量时的误判率,对测量结果偏差较大方法实现主动自校验(效正)功能,实现了资源的共享和技术之间的优势互补,较好地避免了漏检和误检,极大提高了测厚的准确性与可靠性。是一种更为高效、可靠、安全的无损测厚方法。Conventional thickness gauges only use one thickness measurement technology: for example, the traditional piezoelectric ultrasonic thickness measurement technology requires coupling agent, which is easy to cause environmental pollution, and requires grinding and other operations, which affects the efficiency and limits the application field. The eddy current thickness measurement technology is affected by the skin effect, and it is difficult to detect the deeper information of the specimen. Due to the limitation of the excitation coil of the eddy current sensor, it is still insufficient for large-area wall thickness detection. The measurement methods of these thickness gauges are single, and the measurement results are not comparable, so the accuracy is difficult to quantify. Based on this, the present invention integrates the three technologies of ultrasound, eddy current and EMAT, and detects the test piece through the three methods, which increases the comparability of the measurement results, reduces the misjudgment rate when the single method is measured, and the measurement results The large deviation method realizes the active self-calibration (correction) function, realizes the sharing of resources and the complementary advantages of technologies, better avoids missed detection and false detection, and greatly improves the accuracy and reliability of thickness measurement sex. It is a more efficient, reliable and safe non-destructive thickness measurement method.

附图说明Description of drawings

图1为本发明实施例的系统框图;Fig. 1 is a system block diagram of an embodiment of the present invention;

图2为本发明实施例自校验算法流程图;Fig. 2 is the flowchart of the self-verification algorithm of the embodiment of the present invention;

图3为本发明实施例一种超声波、涡流和EMAT一体化无损测厚方法的流程说明图;Fig. 3 is an explanatory flow diagram of an integrated non-destructive thickness measurement method of ultrasonic wave, eddy current and EMAT according to an embodiment of the present invention;

图4为本发明实施例超声波测厚原理框图;Fig. 4 is a schematic block diagram of ultrasonic thickness measurement according to an embodiment of the present invention;

图5为本发明实施例涡流测厚原理框图;Fig. 5 is a principle block diagram of eddy current thickness measurement according to an embodiment of the present invention;

图6为本发明实施例EMAT测厚原理框图。Fig. 6 is a block diagram of the principle of EMAT thickness measurement according to the embodiment of the present invention.

具体实施方式Detailed ways

下面结合附图对本发明做进一步的详细说明。The present invention will be described in further detail below in conjunction with the accompanying drawings.

如图1-图6所示,包括激励模块1、接收预处理模块2、模拟开关3、A/D转换器4、自校验模块5、微控制器MCU6、CPU模块7、供电模块8等。激励模块1与接收预处理模块2连接,接收预处理模块2与模拟开关3连接,模拟开关3与A/D转换器4连接、A/D转换器4与微控制器MCU6连接,自校验模块5与微控制器MCU6连接,微控制器MCU6与CPU模块7连接,CPU模块7与数据存储模块9、显示屏10、通信接口11、报警模块12等外围模块连接。其中,超声波激励模块、涡流激励模块和EMAT激励模块;接收预处理模块包括超声波接收预处理模块、涡流接收预处理模块和EMAT接收预处理模块;自校验模块包括自校验电路和校验器。As shown in Figure 1-6, it includes excitation module 1, receiving preprocessing module 2, analog switch 3, A/D converter 4, self-checking module 5, microcontroller MCU6, CPU module 7, power supply module 8, etc. . The excitation module 1 is connected to the receiving preprocessing module 2, the receiving preprocessing module 2 is connected to the analog switch 3, the analog switch 3 is connected to the A/D converter 4, and the A/D converter 4 is connected to the microcontroller MCU6, self-checking Module 5 is connected with microcontroller MCU6, microcontroller MCU6 is connected with CPU module 7, and CPU module 7 is connected with data storage module 9, display screen 10, communication interface 11, alarm module 12 and other peripheral modules. Among them, ultrasonic excitation module, eddy current excitation module and EMAT excitation module; receiving preprocessing module includes ultrasonic receiving preprocessing module, eddy current receiving preprocessing module and EMAT receiving preprocessing module; self-checking module includes self-checking circuit and calibrator .

如图3所示,一种超声波、涡流和EMAT一体化无损测厚方法,其方法包括以下步骤:步骤A)、在超声波、涡流和EMAT三种无损测量模式中选择一种所要检测的模式,将对应探头置于被测试件上;As shown in Figure 3, a kind of ultrasonic, eddy current and EMAT integrated nondestructive thickness measurement method, its method comprises the following steps: Step A), select a mode to be detected in three kinds of nondestructive measurement modes of ultrasonic wave, eddy current and EMAT, Place the corresponding probe on the tested piece;

步骤B)、通过微控制器MCU控制信号发生器产生所需特定频率的激励信号,经功率放大后激励探头发射端;Step B), the signal generator is controlled by the microcontroller MCU to generate the excitation signal of the required specific frequency, and the transmitter end of the probe is excited after the power is amplified;

步骤C)、根据超声波、涡流和EMAT各自的激励原理,在探头接收端感应出电压信号,电压信号经接收预处理模块进行拾取信号的处理;Step C), according to the respective excitation principles of ultrasonic wave, eddy current and EMAT, a voltage signal is induced at the receiving end of the probe, and the voltage signal is processed by the receiving preprocessing module to pick up the signal;

步骤D)、将处理后得到的模拟信号经模拟开关送入A/D转换器转换为数字信号,通过CPU模块运算处理后将测量的试件厚度值显示并存储;Step D), the analog signal obtained after processing is sent to the A/D converter through the analog switch to be converted into a digital signal, and the measured thickness value of the test piece is displayed and stored after being processed by the CPU module;

步骤E)、当对同一试件分别采用超声波、涡流、EMAT三种方法均测量完成时,启动自校验程序,通过自校验模块对三种无损测厚方法的测量结果彼此分别比对,实现对测量结果偏差较大方法的主动自校验功能。Step E), when the three methods of ultrasonic, eddy current and EMAT are used to measure the same test piece respectively, start the self-verification program, and compare the measurement results of the three non-destructive thickness measurement methods with each other through the self-verification module, Realize the active self-calibration function for methods with large deviations in measurement results.

实际操作时,通过微控制器MCU6控制信号发生器产生超声波测厚、涡流测厚、EMAT测厚所需特定频率的激励信号——方波、正弦波和脉冲信号,该信号经功率放大后激励探头线圈,将探头线圈接收到的信号送入相应的检测通道,使信号加载到相应的超声波、涡流、EMAT传感器上,使各传感器完成含有关被检试件厚度信息信号的拾取。信息拾取后送入超声、涡流、EMAT的接收预处理模块进行拾取信号的处理,将处理后得到的模拟信号经模拟开关,送入A/D转换器4,将表示试件厚度的模拟信号转换为数字信号,应CPU需求将测量数据送入CPU模块7。CPU模块7将测量的试件厚度值在显示器上显示出来并存储,并与阈值作比较,若超出范围则启动报警单元。每当对同一试件分别采用超声波、涡流、EMAT三种方法的测量完毕后,启动自校验程序,将三个测量数据送入自校验电路进行校验,同时校验器对自校验电路输出值进行两两比较判别,若三个测量数据在误差范围内,则不作处理;若某个测量数据偏差较大,校验器给出差错指示,送入微控制器MCU6进行误差通道的校准处理。该自校验过程产生的差错指示、误差通道和校准完成指令同步送入CPU模块7,在显示器显示通知用户。测量结果可通过USB接口传送到计算机中保存,从而实现超声、涡流、EMAT一体化无损测厚仪的操作。In actual operation, the microcontroller MCU6 controls the signal generator to generate excitation signals of specific frequencies required for ultrasonic thickness measurement, eddy current thickness measurement, and EMAT thickness measurement—square wave, sine wave and pulse signal, which are amplified by power and then excited The probe coil sends the signal received by the probe coil into the corresponding detection channel, so that the signal is loaded on the corresponding ultrasonic, eddy current, and EMAT sensors, so that each sensor completes the pickup of the signal containing information about the thickness of the tested specimen. After the information is picked up, it is sent to the receiving preprocessing module of ultrasonic, eddy current, and EMAT to process the picked up signal, and the analog signal obtained after processing is sent to the A/D converter 4 through the analog switch, and the analog signal representing the thickness of the test piece is converted to It is a digital signal, and the measurement data is sent to the CPU module 7 according to the CPU requirement. The CPU module 7 displays and stores the measured thickness value of the test piece on the display, and compares it with the threshold value, and starts the alarm unit if it exceeds the range. Whenever the same test piece is measured by the three methods of ultrasonic, eddy current and EMAT, the self-calibration program is started, and the three measurement data are sent to the self-calibration circuit for calibration. At the same time, the calibrator performs self-calibration The output value of the circuit is compared and judged in pairs. If the three measurement data are within the error range, no processing will be performed; if a certain measurement data has a large deviation, the calibrator will give an error indication and send it to the microcontroller MCU6 to calibrate the error channel. deal with. The error indication, error channel and calibration completion command generated during the self-checking process are synchronously sent to the CPU module 7 and displayed on the display to notify the user. The measurement results can be transmitted to the computer for storage through the USB interface, so as to realize the operation of the ultrasonic, eddy current, and EMAT integrated non-destructive thickness gauge.

进一步的,如图4所示,超声波激励模块由信号发生器、驱动电路、高压开关电路、超声波传感器(又称超声换能器)组成。实际工作时,微控制器MCU6提供低压可调脉宽信号,给信号发生器产生方波脉冲信号,由于该信号功率很小、电压幅值低,需经驱动电路放大后,驱动激励换能器产生超声波,再由高压开关电路将其转换为高压窄脉冲激励信号,形成的高压窄脉冲激励信号加到换能器上产生超声波。Further, as shown in FIG. 4 , the ultrasonic excitation module is composed of a signal generator, a drive circuit, a high-voltage switch circuit, and an ultrasonic sensor (also called an ultrasonic transducer). In actual work, the microcontroller MCU6 provides a low-voltage adjustable pulse width signal to generate a square wave pulse signal for the signal generator. Since the signal power is small and the voltage amplitude is low, it needs to be amplified by the drive circuit to drive the excitation transducer Ultrasonic waves are generated, and then converted into high-voltage narrow-pulse excitation signals by a high-voltage switch circuit, and the resulting high-voltage narrow-pulse excitation signals are applied to the transducer to generate ultrasonic waves.

进一步的,如图4所示,超声波信号接收预处理模块由前置放大电路、带通滤波电路、程控自动增益电路组成。将信号送入前置放大电路进行信号放大,并抑制其它的噪声和干扰,达到最大的信噪比。初步放大后的信号经过一个带通滤波器做选频处理以选择在激励频率附近的频率,过滤干扰噪声。再将过滤后信号送入程控增益放大器,将信号按时间进行增益调节,使放大后的信号的幅度保持在同一数量级,同时满足数据采集电路的电平要求。将输出信号送至A/D转换器4进行高速采集,再传送到微控制器MCU做数字化运算处理,然后应CPU需求将所得厚度值送至CPU模块7,将测量的厚度值显示存储。Further, as shown in FIG. 4 , the ultrasonic signal receiving preprocessing module is composed of a preamplifier circuit, a bandpass filter circuit, and a program-controlled automatic gain circuit. Send the signal to the preamplifier circuit for signal amplification, and suppress other noise and interference to achieve the maximum signal-to-noise ratio. The pre-amplified signal passes through a band-pass filter for frequency selection processing to select frequencies near the excitation frequency and filter out interference noise. Then the filtered signal is sent to the program-controlled gain amplifier, and the signal is adjusted according to time to keep the amplitude of the amplified signal at the same order of magnitude, and at the same time meet the level requirements of the data acquisition circuit. The output signal is sent to the A/D converter 4 for high-speed acquisition, and then sent to the microcontroller MCU for digital operation processing, and then the obtained thickness value is sent to the CPU module 7 according to the CPU demand, and the measured thickness value is displayed and stored.

进一步的,如图5所示,涡流信号激励模块由信号发生器、功率放大器、涡流传感器组成。微控制器MCU6控制信号发生器产生正弦波激励信号,经功率放大器反馈给探头线圈,探头测量线圈的信号经放大后得到测量信号。Further, as shown in FIG. 5 , the eddy current signal excitation module is composed of a signal generator, a power amplifier, and an eddy current sensor. The microcontroller MCU6 controls the signal generator to generate a sine wave excitation signal, which is fed back to the probe coil through the power amplifier, and the signal of the probe measurement coil is amplified to obtain a measurement signal.

进一步的,如图5所示,涡流信号接收预处理模块由检波电路、平衡滤波和可调增益放大电路组成。实际工作时,将涡流激励单元得到的测量信号送入检波器,检测出直流信号,直流信号经平衡滤波过滤干扰噪声后,送入可调增益放大电路进行调零放大,放大后的直流信号送至A/D转换器4,A/D转换器4对送入模拟信号进行高速采样,将换后的数字信号送微控制器MCU6进行数字滤波处理、非线性校正和补偿,然后应CPU需求将有关数据送CPU模块7,将测量的厚度值显示存储。Further, as shown in FIG. 5 , the eddy current signal receiving preprocessing module is composed of a detection circuit, a balanced filter and an adjustable gain amplification circuit. In actual work, the measurement signal obtained by the eddy current excitation unit is sent to the detector to detect the DC signal. After the DC signal is filtered by the balance filter to filter the interference noise, it is sent to the adjustable gain amplifier circuit for zero adjustment and amplification. The amplified DC signal is sent to To the A/D converter 4, the A/D converter 4 performs high-speed sampling on the incoming analog signal, sends the converted digital signal to the microcontroller MCU6 for digital filtering processing, nonlinear correction and compensation, and then converts the Relevant data is sent to CPU module 7, and the measured thickness value is displayed and stored.

进一步的,如图6所示,EMAT激励模块由信号发生器、驱动电路、D类功率放大电路、匹配电路、电磁声换能器EMAT组成。实际工作时,在微控制器MCU6控制下使信号发生器产生窄脉冲信号,由于该信号功率很小、电压幅值低,需经驱动电路放大,然后送入D类功率放大电路放大单个调制脉冲,形成的高压窄脉冲激励信号有着较大的功率和较高的频率特性,再送入匹配电路中,以提高电路的能量传输效率,同时保护根据EMAT发射电路。根据电—磁—声转换原理,经过匹配电路的高压窄脉冲激励信号激励EMAT,在试件内产生电磁超声波。Further, as shown in FIG. 6 , the EMAT excitation module is composed of a signal generator, a driving circuit, a class D power amplifier circuit, a matching circuit, and an electromagnetic acoustic transducer EMAT. In actual work, under the control of the microcontroller MCU6, the signal generator generates a narrow pulse signal. Since the signal power is very small and the voltage amplitude is low, it needs to be amplified by the drive circuit, and then sent to the class D power amplifier circuit to amplify a single modulation pulse. , the formed high-voltage narrow-pulse excitation signal has greater power and higher frequency characteristics, and then sent to the matching circuit to improve the energy transmission efficiency of the circuit, and at the same time protect the transmission circuit according to EMAT. According to the principle of electro-magnetism-acoustic conversion, the high-voltage narrow-pulse excitation signal passed through the matching circuit excites EMAT to generate electromagnetic ultrasonic waves in the test piece.

进一步的,如图6所示,EMAT信号接收预处理模块由匹配电路、前置放大电路、带通滤波电路、程控自动增益电路组成。回波信号经过匹配电路进行阻抗匹配,以提高接收转化效率,由于EMAT换能效率较低,从匹配电路上接收的回波信号很微弱,同时信号中存在较大的噪声干扰,需将接收到的回波信号送入前置放大电路进行信号放大处理,并抑制噪声干扰,以达到最大的信噪比。初步放大后的信号经过一个带通滤波器做选频处理以选择有效频带的回波信号,过滤干扰噪声。由于超声声道的长度不同以及管道厚薄的不一致,致使每次测量时的回波信号幅值也不同,需将过滤后信号送入程控增益放大器,对不同时刻的回波信号的增益进行相应调节,使放大后信号的幅度保持在同一数量级。再将输出信号送至A/D转换器4进行高速采集,再传送到微控制器MCU做数字化运算处理,然后应CPU需求将有关数据送CPU模块7,将测量的厚度值显示存储。Further, as shown in FIG. 6 , the EMAT signal receiving preprocessing module is composed of a matching circuit, a preamplifier circuit, a band-pass filter circuit, and a program-controlled automatic gain circuit. The echo signal is impedance-matched through the matching circuit to improve the receiving conversion efficiency. Due to the low transduction efficiency of EMAT, the echo signal received from the matching circuit is very weak, and there is a large noise interference in the signal, so the received The echo signal is sent to the preamplifier circuit for signal amplification processing, and suppresses noise interference to achieve the maximum signal-to-noise ratio. The pre-amplified signal passes through a band-pass filter for frequency selection processing to select the echo signal in the effective frequency band and filter the interference noise. Due to the different lengths of the ultrasonic channels and the inconsistencies in the thickness of the pipes, the amplitude of the echo signal is also different in each measurement. It is necessary to send the filtered signal to the programmable gain amplifier to adjust the gain of the echo signal at different times. , so that the amplitude of the amplified signal remains at the same order of magnitude. Then the output signal is sent to the A/D converter 4 for high-speed acquisition, and then sent to the microcontroller MCU for digital operation processing, and then the relevant data is sent to the CPU module 7 in response to the CPU demand, and the measured thickness value is displayed and stored.

进一步的,微控制器MCU6与CPU模块7之间的通信应答由专门的通信逻辑电路负责。CPU模块7负责测量结果的显示、超限报警、数据存储、与后台控制终端的通信和电源电压监控等方面。供电模块8负责电源管理,一方面为系统各个部分提供所需大小电源电压,另一方面检测电池电压、温度、外电源的接入和电池充电等。同时,本发明实现实时在线检测,通过USB接口可实现对试件的健康状况即时监控。测量结果可通过USB接口传送到后台控制终端计算机中保存,从而实现超声、涡流、EMAT一体化无损测厚仪的操作,以分析试件性能,改进其生产工艺和流程,提高产品质量。Further, the communication response between the microcontroller MCU6 and the CPU module 7 is in charge of a special communication logic circuit. The CPU module 7 is responsible for the display of measurement results, over-limit alarm, data storage, communication with the background control terminal, and power supply voltage monitoring. The power supply module 8 is responsible for power management. On the one hand, it provides the required power supply voltage for each part of the system, and on the other hand, it detects the battery voltage, temperature, access of external power supply and battery charging. Simultaneously, the invention realizes real-time online detection, and real-time monitoring of the health status of the specimen can be realized through the USB interface. The measurement results can be transmitted to the background control terminal computer for storage through the USB interface, so as to realize the operation of the ultrasonic, eddy current and EMAT integrated non-destructive thickness gauge to analyze the performance of the test piece, improve its production process and process, and improve product quality.

本说明书中未作详细描述的内容属于本领域专业技术人员公知的现有技术。The content not described in detail in this specification belongs to the prior art known to those skilled in the art.

Claims (8)

1. a ultrasound wave, the integrated nondestructive thickness measuring instrument of eddy current and EMAT, it is characterized in that: it comprises stimulating module, receive pretreatment module, analog switch, A/D converter, the self checking module, microcontroller, the CPU module, supply module, the peripheral demonstration storage of CPU, described stimulating module is connected with the reception pretreatment module, described reception pretreatment module is connected with analog switch, described analog switch is connected with A/D converter, described A/D converter is connected with microcontroller, described self checking module is connected with microcontroller, described microcontroller is connected with the CPU module, described CPU module respectively with display screen, communication interface, alarm module, data memory module connects, described stimulating module comprises the ultrasonic exciting module, eddy current stimulating module and EMAT stimulating module, described reception pretreatment module comprises that ultrasound wave receives pretreatment module, eddy current receives pretreatment module and EMAT receives pretreatment module.
2. ultrasound wave according to claim 1, the integrated nondestructive thickness measuring instrument of eddy current and EMAT, it is characterized in that: described ultrasonic exciting module is by signal generator, driving circuit, high voltage switch circuit, ultrasonic sensor forms, described ultrasonic signal receives pretreatment module by pre-amplification circuit, bandwidth-limited circuit, the program controlled automatic gain circuitry forms, described signal generator is connected with driving circuit, described driving circuit is connected with high voltage switch circuit, described high voltage switch circuit is connected with ultrasonic sensor, described ultrasonic sensor is connected with pre-amplification circuit, described pre-amplification circuit is connected with bandwidth-limited circuit, described bandwidth-limited circuit is connected with the program controlled automatic gain circuitry.
3. ultrasound wave according to claim 1, the integrated nondestructive thickness measuring instrument of eddy current and EMAT, it is characterized in that: described eddy current stimulating module is by signal generator, power amplifier, eddy current sensor forms, eddy current signal receives pretreatment module by detecting circuit, balance filtering circuit and adjustable gain amplifying circuit form, described signal generator is connected with power amplifier, described power amplifier is connected with eddy current sensor, described eddy current sensor is connected with detecting circuit, described detecting circuit is connected with the balance filtering circuit, described balance filtering circuit is connected with the adjustable gain amplifying circuit.
4. ultrasound wave according to claim 1, the integrated nondestructive thickness measuring instrument of eddy current and EMAT, it is characterized in that: described EMAT stimulating module is by signal generator, driving circuit, D class power amplification circuit, match circuit, EMAT EMAT forms, described EMAT signal receives pretreatment module by match circuit, pre-amplification circuit, bandwidth-limited circuit, the program controlled automatic gain circuitry forms, described signal generator is connected with driving circuit, described driving circuit is connected with D class power amplification circuit, described D class power amplification circuit is connected with match circuit, described match circuit is connected with EMAT EMAT, described EMAT EMAT is connected with match circuit, described match circuit is connected with pre-amplification circuit, described pre-amplification circuit is connected with bandwidth-limited circuit, described bandwidth-limited circuit is connected with the program controlled automatic gain circuitry.
5. the integrated nondestructive thickness measuring instrument of ultrasound wave according to claim 2, eddy current and EMAT, it is characterized in that: described ultrasonic sensor is arranged in ultrasonic probe, described ultrasonic probe is transmitting-receiving integrated, ultrasonic sensor consists of bimorph, a wafer is for launching ultrasound wave, and another wafer is for accepting ultrasound wave.
6. the integrated nondestructive thickness measuring instrument of ultrasound wave according to claim 3, eddy current and EMAT, it is characterized in that: described eddy current sensor is arranged in eddy current probe, described eddy current probe is transmitting-receiving integrated, the outside of eddy current sensor all adopts shielding structure, eddy current sensor consists of two groups of coil winding, one group of coil winding is the transmitting coil winding, another group is the receiving coil winding, the input end of described transmitting coil winding is connected with the output of stimulating module, and described receiving coil winding is connected with the input of accepting pretreatment module.
7. the integrated nondestructive thickness measuring instrument of ultrasound wave according to claim 4, eddy current and EMAT, it is characterized in that: described EMAT EMAT is arranged in the EMAT probe, described EMAT probe is for transmitting-receiving integrated, the outside of EMAT EMAT all adopts shielding structure, EMAT EMAT consists of two groups of coil winding, one group of coil winding is the transmitting coil winding, another group is the receiving coil winding, the input end of described transmitting coil winding is connected with the output of stimulating module, and described receiving coil winding is connected with the input of accepting pretreatment module.
8. the integrated nondestructive thickness measuring method of ultrasound wave, eddy current and EMAT, it is characterized in that: its method comprises the following steps:
Steps A), select a kind of pattern that will detect in ultrasound wave, eddy current and tri-kinds of nondestructive measurement patterns of EMAT, the correspondence probe is placed on test specimen;
Step B), produce the pumping signal of required characteristic frequency, incentive probe transmitting terminal after power amplification by microcontroller control signal generator;
Step C), according to ultrasound wave, eddy current and EMAT exiting principle separately, induce voltage signal at the probe receiving end, voltage signal carries out the processing of pickoff signals through receiving pretreatment module;
Step D), the simulating signal obtained after processing sent into to A/D converter through analog switch be converted to digital signal, after processing by the CPU module arithmetic, the specimen thickness value of measuring is shown and stores;
Step e), when adopting respectively ultrasound wave, eddy current, tri-kinds of methods of EMAT all to measure to same test specimen, start self check program, by the self checking module, the measurement result of three kinds of nondestructive thickness measuring methods is compared separately from each other, realized the active self checking function to the larger method of measurement result deviation.
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