CN103484859B - The manufacture method of metallic plate, metallic heating body - Google Patents

Abstract

The invention provides a method for manufacturing a metal plate and a metal heating element, which can make the product shape of the protrusion close to the design value when the metal plate with the protrusion is formed by wet etching. The amount of resist shifting at the front end (72A) of the cutout (72) is set to be smaller than the amount of resist shifting at the straight line (72B) based on the radius of curvature of the front end (72A). Thereby, the product shape of the notch (72) formed by wet etching can be made close to the design value.

Description

Manufacturing method of metal plate, metal heating element

technical field

The invention relates to a method for manufacturing a metal plate and a metal heating element.

Background technique

Patent Document 1 describes a technique of forming a resist pattern on the surface of a metal material, and then using the resist pattern as a mask to etch the metal material to produce an etched product. In this etching treatment method, A control resist is placed at a predetermined position near the resist pattern, and etching is performed.

Patent Document 1: Japanese Patent Application Laid-Open No. 09-128430

Contents of the invention

The object of the present invention is to obtain the same product shape as the design value in the case of forming a metal plate having an arcuate shape by wet etching.

The method for manufacturing a metal plate according to claim 1 of the present invention is characterized in that it includes a step of forming a resist in order to wet-etch the metal plate from the surface of the metal plate. A notch is formed in which the front end is arc-shaped and has a straight line extending linearly from the front end to the base end side, and a resist covering the notch is formed on the surface of the metal plate to cover the notch. When preventing the slit from being corroded by wet etching, the resist is formed on the surface of the metal plate based on the radius of curvature of the front end so that the resist at the front end an amount of resist offset between an edge of the resist and the front end portion is smaller than an amount of resist offset between an edge of the resist at the straight portion and the straight portion; and and an etching step of etching the metal plate by causing an etchant to act on the metal plate on which the resist is formed in the resist forming step.

The method for manufacturing a metal plate according to claim 2 of the present invention is characterized in that it includes a step of forming a resist in order to wet-etch the metal plate from the surface of the metal plate. And the arc-shaped protrusion is formed, and the protrusion is deviated inward by the same amount relative to the protrusion, and is composed of an arc-shaped front end portion and a straight line portion extending linearly from the front end portion to the base end side position. slits, and when forming a resist covering the slits and the protrusions on the surface of the metal plate so that the protrusions and the slits are not corroded by wet etching, based on the curvature of the front end At least one of the radius of curvature and the radius of curvature of the arc portion, the resist is formed on the plate surface of the metal plate so that the edge of the resist at the front end and the front end The amount of resist offset between is smaller than the amount of resist offset between the edge of the resist at the linear portion and the linear portion, and makes the arc at the protrusion The resist offset between the edge of the resist at the arc portion and the arc portion is greater than the edge of the resist at the straight portion and the straight portion the offset amount of the resist between them is large; and an etching step in which an etchant is made to act on the metal plate on which the resist is formed by the resist forming step, to the The metal plate is etched.

The method of manufacturing a metal plate according to claim 3 of the present invention is characterized in that it includes a step of forming a resist: Forming arc-shaped protrusions and arc-shaped cutouts deviated inwardly by the same amount relative to the protrusions, and forming a resist covering the cutouts and the protrusions on the surface of the metal plate. agent so that the protrusion and the notch are not corroded by wet etching, based on at least one of the radius of curvature of the notch and the radius of curvature of the protrusion, the metal plate is formed on the surface of the metal plate. the resist such that the resist offset between the edge of the resist at the cutout and the cutout is larger than the edge of the resist at the protrusion and the cutout. the amount of offset of the resist between the protrusions is small; and an etching step in which an etchant is made to act on the metal plate on which the resist is formed by the resist forming step, for The metal plate is etched.

The metal heating element according to claim 4 of the present invention is characterized in that it has an arc shape and is manufactured using the method for manufacturing a metal plate described in any one of claims 1 to 3 .

The effect of the invention

According to the method of manufacturing a metal plate according to claim 1 of the present invention, compared with the case where the amount of resist shifting at the arc-shaped front end portion and the amount of resist shifting at the straight portion are the same, it is more effective in molding by wet etching. In the case of an arc-shaped metal plate, a product shape equal to the design value can be obtained.

According to the method of manufacturing a metal plate according to claim 2 of the present invention, the amount of resist offset from the arc-shaped front end portion, the resist offset amount of the straight line portion, and the resist offset of the arc-shaped protrusion portion Compared with the case where the amount of offset is the same, when a metal plate having an arcuate shape is formed by wet etching, a product shape equal to the design value can be obtained.

According to the method of manufacturing a metal plate according to claim 3 of the present invention, compared with the case where the amount of resist shifting at the arc-shaped front end is the same as the amount of resist shifting at the arc-shaped protrusion, the In the case of forming a metal plate having an arcuate shape by wet etching, a product shape equal to the design value can be obtained.

According to the metal heating element of claim 4 of the present invention, heat generation uniformity can be improved compared with a metal heating element manufactured by a manufacturing method other than the manufacturing method of the metal plate described in any one of claims 1 to 3 .

Description of drawings

1(A) and (B) are explanatory diagrams showing a zigzagging pattern and a product shape used in the method of manufacturing a metal heating element according to an embodiment of the present invention.

2(A) and (B) are explanatory diagrams showing meandering patterns and product shapes used in the method of manufacturing a metal heating element according to the comparative form of the embodiment of the present invention.

Fig. 3 is a perspective view showing the metal heating element according to the embodiment of the present invention.

Fig. 4 is a plan view showing the metal heating element according to the embodiment of the present invention.

FIG. 5 is a graph showing the results of a simulation used to determine a resist shift amount in the method of manufacturing a metal heating element according to the embodiment of the present invention.

FIG. 6 is a graph showing the results of a simulation used to determine a resist shift amount in the method of manufacturing a metal heating element according to the embodiment of the present invention.

7(A), (B), (C), (D), (E), and (F) are explanatory diagrams showing each step of the method of manufacturing the metal heating element according to the embodiment of the present invention.

8(A), (B), and (C) are schematic diagrams used in the description of determining the amount of offset of the resist in the method of manufacturing the metal heating element according to the embodiment of the present invention.

9 is a side view showing a fixing device using the metal heating element according to the embodiment of the present invention.

10(A) and (B) are a perspective view and a front view showing a fixing belt of a fixing device using a metal heating element according to an embodiment of the present invention.

FIG. 11 is an image forming apparatus using a metal heating element according to an embodiment of the present invention.

12(A) and (B) are a plan view and an enlarged plan view showing modified examples of the metal heating element according to the embodiment of the present invention.

13(A) and (B) are a plan view and an enlarged plan view showing modified examples of the metal heating element according to the embodiment of the present invention.

Explanation of labels

64 metal heating element

70 protrusions

70A arc part

70B straight line department

72 cuts

72A front end

72B straight line department

88 metal heating element

90 protrusions

92 cuts

92A front end

92B straight line department

98 metal heating element

100 protrusions

100A arc part

102 cuts

102A front end

150 sheets (an example of sheet metal)

152 photoresist (resist)

detailed description

An example of a method of manufacturing a metal plate and a metal heating element according to an embodiment of the present invention will be described with reference to FIGS. 1 to 3 . First, an image forming apparatus having a metal heating element manufactured by the method of manufacturing a metal plate according to this embodiment will be described. In addition, the arrow UP shown in a figure has shown the upward direction of a vertical direction.

(image forming device)

〔Image Formation Department〕

As shown in FIG. 11 , image forming apparatus 10 has: image holder 12; charging member 14, which charges the surface of image holder 12; laser, forming an electrostatic latent image; developing device 18, which visualizes the electrostatic latent image as a toner image; transfer roller 22; which transfers the image to a sheet member P as a recording medium supplied along the transport path 20 and holds the toner image on the surface of the body 12; the fixing device 24, which heats and pressurizes the transferred toner image to fix it on the paper member P; The toner on the image holder 12 after printing is cleaned.

In addition, the image forming apparatus 10 is covered by a main body side cover 10B and a top plate 10A. In addition, a shaft 10C is provided at an upper corner portion of the main body side cover 10B to rotatably couple the top plate 10A to the main body side cover 10B. As a result, the interior of the image forming apparatus 10 is opened by rotating the top plate 10A in the direction of the arrow A about the axis 10C. In addition, the fixing device will be described in detail later.

〔Manual paper feed part〕

Also, on the side of the image forming apparatus 10 is a manual sheet feed table 32 that can manually feed the sheet member P to the image transfer unit 31 formed by the image holder 12 and the transfer roller 22 . A delivery roller 34 having a half-moon shape is provided on the manual feed table 32 . Further, a separation roller 36 is provided on a side opposite to the delivery roller 34 with the paper member P interposed therebetween, and separates the paper members P sent out from the manual feed deck 32 one by one.

The separation roller 36 is axially supported by unillustrated support members provided at both ends, and is biased toward the delivery roller 34 by a bias force of a coil spring provided inside the support member. With this configuration, when the delivery roller 34 rotates, the sheet members P placed on the manual feed table 32 are conveyed one by one to the image transfer unit 31 by the delivery roller 34 and the separation roller 36 .

〔Paper supply part〕

A paper feeding device 40 for feeding paper members P one by one to the image transfer unit 31 is provided on the lower side in the image forming apparatus 10 . The paper feeding device 40 has a paper feeding member 41 on which a plurality of paper members P are placed, and the paper members P stacked on the paper feeding member 41 are sequentially taken out by the take-out roller 42 . Then, the paper members P are conveyed one by one by the rotationally driven paper feed roller 44 and the separation roller 46 provided on the paper feed member 41 .

〔other〕

In addition, a plurality of conveying rollers 48 are arranged to convey the paper member P along the conveyance path 20 of the paper member P to the downstream side of the conveyance direction of the paper member P along the conveyance path 20 (hereinafter simply referred to as “the downstream side in the conveyance direction”). Feed the paper unit P.

Further, on the downstream side of the image transfer unit 31 in the transport direction, there is a discharge roller 38 that discharges the paper member P on which the toner image has been fixed by the fixing device 24 to the upper surface of the top cover 10A.

(The role of the image forming device)

In the image forming apparatus 10 configured as described above, an image is formed as follows.

First, the charging member 14 to which a voltage is applied charges the surface of the image holder 12 in the same manner. Then, the exposure device 16 exposes the charged surface of the image holder 12 to form an electrostatic latent image on the surface of the image holder 12 based on image data read by a scanning device (not shown) or image data input from the outside. This electrostatic latent image is visualized as a toner image with toner supplied from the developing device 18 .

As a result, the paper member P taken out from the paper feeding member 41 by the take-out roller 42 or the paper member P manually fed from the manual paper feed table 32 is output to the transport path 20 . The sheet member P output to the transport path 20 transfers the toner image onto the sheet member P by the image transfer portion 31 formed between the image holder 12 and the transfer roller 22 . This transferred toner image is fixed on the paper member P by the fixing device 24 , and the paper member P is discharged to the upper surface of the top cover 10A by the discharge roller 38 .

(fixing unit)

Next, the fixing device 24 will be described.

As shown in FIG. 9 , the fixing device 24 has: a cylindrical fixing belt 50 having a heat generating layer (not shown) that generates heat due to an eddy current generated when a magnetic field is applied; The paper member P is conveyed between them, and the paper member P is pressed against the fixing belt 50; the pressure pad 54 presses the fixing belt 50 from the inner peripheral surface of the fixing belt 50 toward the pressing roller 52; and the electromagnetic induction heating device 56 , which applies a magnetic field to the heat generating layer of the fixing belt 50 by flowing an alternating current.

At one end of the fixing belt 50 , as shown in FIGS. 10(A)(B) , a drive gear 58 for rotating the fixing belt 50 in the circumferential direction of the fixing belt 50 is attached.

Further, a flange member 59 is integrally formed on the fixing belt 50 side of the drive gear 58 so as to be in surface contact with the inner peripheral surface of the fixing belt 50 . The outer peripheral surface of the flange member 59 and the inner peripheral surface of the fixing belt 50 are fixed by an adhesive or the like. Further, the drive gear 58 , which is rotated by receiving a rotational force from a motor (not shown), transmits rotational force to the fixing belt 50 via the flange member 59 .

In addition, as shown in FIG. 9 , the heat generating device 56 facing a part of the fixing belt 50 is arranged on the side facing the pressing roller 52 across the fixing belt 50 . The heating device 56 has an electromagnetic induction coil (excitation coil) 56A, and changes a magnetic field generated by applying an alternating current to the electromagnetic induction coil 56A in the excitation circuit to generate an eddy current in the heat generation layer of the fixing belt 50 . This eddy current is converted into heat (Joule heat) due to the resistance of the heat generating layer, thereby heating a portion of the fixing belt 50 that faces the heat generating device 56 . That is, in this form, a part of the fixing belt 50 that faces the electromagnetic induction coil 56A in the circumferential direction generates heat. Furthermore, before the paper member P is conveyed by the fixing device 24 , the fixing belt 50 is rotated in advance so that the entire fixing belt 50 reaches a fixing temperature for fixing the toner image on the paper member P.

In addition, an arc-shaped heat generating member 60 (auxiliary heater) for heating the fixing belt 50 is disposed so as to face the inner peripheral surface of the fixing belt 50 at the heat generating portion passed by the heat generating device 56 .

By heating the fixing belt 50 by heating the heat generating member 60 , the fixing belt 50 can reach the fixing temperature in a shorter time than when the heat generating member 60 is not provided.

(Minor method)

Next, the heat generating component 60 will be described.

As shown in Fig. 3 and Fig. 4, the heating element 60 has: a pair of insulating films 62 extending in one direction (arrow B direction in the figure) and molded from polyimide resin; and a metal heating element 64 made of the A pair of insulating films 62 are sandwiched. In addition, the film thickness of each insulating thin film 62 is 50 [μm].

In addition, in each figure, in order to understand the structure of the heat generating member 60 easily, it describes as the plate-shaped heat generating member 60 before being formed into an arc shape. In the description below, the heat generating member 60 is also described as having a flat plate shape.

In addition, when arranging the heat-generating member 60 on the fixing device 24, the heat-generating device 60 is arranged on the fixing device 24 so that the above-mentioned one direction becomes the device back direction (the back direction of the paper in FIG. 9 ). .

〔Metal heating element〕

Next, the metal heating element 64 will be described.

The metal heating element 64 is formed using SUS304 (stainless steel plate) with a thickness of 50 μm. And, as shown in FIG. 3, the metal heating element 64 has: a meandering part 66, which forms an S-shape in one direction; And it is exposed to the outside of the insulating film 62 (for example, a polyimide film). The metal heating element 64 generates heat by applying a voltage to the voltage applying member 68 by a voltage applying member not shown.

As shown in FIG. 1(B), the snaking portion 66 has: a convex protrusion 70; and a notch 72 that deviates inwardly by the same amount relative to the protrusion 70 (the offset is the same amount: 70 in this embodiment). [μm]) and constituted. Furthermore, a cutout area 73 is formed so as to be surrounded by the cutout 72 .

Further, the notch 72 has an arc-shaped distal end portion 72A and a pair of linear portions 72B extending linearly from the distal end portion 72A to the base end side (lower side in the figure).

In addition, the inner diameter (R1 shown in the figure) of the front end portion 72A is 80 [μm], and the pair of linear portions 72B are oriented in an orthogonal direction (arrow B direction in the figure) perpendicular to the above-mentioned one direction (arrow B direction in the figure). Arrow C direction) extends.

[Manufacturing method of metal heating element]

Next, a method of manufacturing a metal heating element will be described as an example of a method of manufacturing a metal plate.

As shown in FIG. 7(A)(B), first, in the resist coating process, a thickness of 1[ μm] A positive photoresist 152 is applied.

Then, as shown in FIG. 7(C), in the exposure process, the film master 154 formed with the etching pattern is brought into close contact with the plate 150 coated with the photoresist 152 and fixed. Then, exposure is performed to the film master 154 to burn the zigzag pattern 160 (see FIG. 1(A) ) into the photoresist 152 . In addition, the zigzag pattern 160 will be described in detail later.

Then, as shown in FIG. 7(D) , in the developing step, the sheet material 150 on which the serpentine pattern 160 is transferred and exposed on the photoresist 152 is developed using a developing solution. As a result, the photoresist 152 in the exposed region is dissolved in the developer, and the photoresist 152 is formed in an S-shape.

Then, as shown in FIG. 7(E), in the etching process, the plate 150 is immersed in an etching solution (in this embodiment, as an example, ferrous chloride solution), or sprayed on the plate 150 (spraying ) etchant to etch the exposed portion of the plate 150 exposed by the image development.

Then, as shown in FIG. 7(F), in the resist stripping step, the photoresist 152 coated on the plate 150 is removed using a sodium hydroxide solution. Thus, the metal heating element 64 is manufactured.

〔Snake pattern〕

Next, the serpentine pattern 160 baked into the photoresist 152 will be described.

In FIG. 1 , the curved portion of the meandering pattern 160 is shown. The serpentine pattern 160 (etching pattern) used to form the protrusion 70 and the notch 72 shown by the two-dot chain line in FIG. The outer edge of the edge is offset. Thus, the meandering pattern 160 has: an inner meandering pattern 160A shifted inwardly compared with the edge of the cutout 72; Wire).

In the etching step, the etchant penetrates into the serpentine pattern 160 to etch the plate 150 (so-called side etching). Accordingly, the notches 72 are formed larger than the inner meandering pattern 160A, and the protrusions 70 are formed smaller than the outer meandering pattern 160B. In addition, the amount by which the photoresist deviates from the edge of the designed product (the two-dot chain line shown in FIG. 1(A) ) is referred to as a resist shift amount.

In addition, in the present embodiment, the amount of resist deviation (dimension E in the figure) at the front end portion 72A of the notch 72 is different from the amount of resist deviation (dimension F in the figure) at the straight line portion 72B, based on the The radius of curvature of the portion 72A is set to be smaller than the resist offset of the straight portion 72B. This is because the side etching penetrates (progresses) while spreading to the periphery, and therefore, the amount of penetration of the side etching in the front end portion 72A is smaller than that in the straight portion 72B.

That is, as shown in FIG. 2(A), if the amount of resist offset is the same amount (distance) at the front end portion 72A and the straight portion 72B, as shown in FIG. 2(B), after the etching process The resulting notch at the tip (solid line) will be smaller than the designed notch at the tip (dotted line).

On the other hand, as shown in FIG. 1(A), the amount of resist offset (dimension G in the drawing) of the arc-shaped arc portion 70A of the protrusion 70 is different from that of the linear portion 70B of the protrusion 70 . The amount of resist shift (dimension H in the figure) differs, and is larger than that of the straight portion 70B based on the radius of curvature of the arc portion 70A.

The reason for this is that since the side etching penetrates from the surroundings, the amount of penetration of the side etching in the arc portion 70A is larger than that in the straight portion 70B.

That is, as shown in FIG. 2(A), if the offset amount of the resist is made to be the same amount (distance) at the arc portion 70A and the straight portion 70B, as shown in FIG. 2(B), in the etching process The amount of protrusion (solid line) of the arc portion obtained later is smaller than the amount of protrusion (dotted line) of the tip portion in design.

In addition, as shown in FIG. 1(A), the amount of resist shift (dimension H in the figure) of the straight line portion 70B of the protrusion 70 and the resist shift amount of the straight line portion 72B of the cutout 72 (dimension H in the figure) F dimension) is the same condition for the penetration of side etching, so it becomes the same amount.

Here, the reason why the penetration amount of the side etching is different will be specifically described.

In Fig. 8, the shape of the product is represented by a solid line, and the photoresist is represented by a two-dot chain line. Let the line length of the edge portion of the photoresist be the total length L, and when molding the straight portion (see FIG. In the case of forming a convex fillet (see FIG. 8(C)), the penetration amount of the side etching varies. This is because the amount of erosion of the base material by etching (hatched area S shown in each figure) is the same.

As mentioned above, since the amount of erosion of the base material (shaded area S shown in each figure) is the same, the intrusion amount of side etching in the concave fillet portion (dimension Q in Fig. 8(B)) is the same as that in the straight portion The amount of intrusion (dimension P in Fig. 8(A)) of the side etching is relatively small.

On the other hand, the penetration amount of the side etching in the convex fillet portion (dimension R in FIG. 8(C) ) is larger than the penetration amount of the side etching in the straight portion (dimension P in FIG. 8(A )).

Next, the procedure for determining the amount of resist shifting at the front end portion 72A of the notch 72 and the amount of resist shifting at the arc portion 70A of the protrusion 70 will be described.

First, the graph shown in FIG. 6 will be described. In FIG. 6 , the relationship between the radius of curvature of the front end portion 72A of the simulation notch 72 and the underreach amount at the front end position (the position where the cut is the most) is simulated, and the result is shown in a graph.

The horizontal axis of the graph shown in FIG. 6 represents the radius of curvature [μm] of the front end portion 72A of the notch 72, and the vertical axis represents the extent to which the side etching does not reach the end of the product in the case of a SUS304 plate with a plate thickness of 50 [μm]. Amount of arrival [μm].

Specifically, when the resist shift amount is 35 [μm], it shows the underreach amount [μm] at the front end portion 72A relative to the 35 [μm]. That is, the intrusion amount of side etching in the case of the underreach amount of 10 [μm] is 25 [μm] obtained by subtracting the underreach amount of 10 [μm] from the resist offset amount of 35 [μm]. From this graph, it can be seen that the smaller the curvature radius [μm] of the front end portion 72A, the larger the underreach amount.

In the present example, the amount of resist offset in the straight line portion 72B was set to 35 [μm]. For the front end portion 72A, since the radius of curvature is 80 [μm], the underreach amount is 12.1 [μm] according to FIG. 6 . Accordingly, at the tip position (position Y shown in FIG. 1(A) ), the resist shift amount of the tip portion 72A becomes 22.9 [μm] (35−12.1).

Next, the graph shown in FIG. 5 will be described. A simulation was performed on the relationship between the radius of curvature of the arc portion 70A of the protrusion 70 and the retraction amount at the front end position (the most protruding position), and the result is shown in a graph in FIG. 5 .

The horizontal axis of the graph shown in FIG. 5 is the radius of curvature [μm] of the arc portion 70A of the protrusion 70, and the vertical axis is the case of a SUS304 plate with a plate thickness of 50 [μm]. And the amount of retreat [μm].

Specifically, when the amount of resist offset is 35 [μm], it shows the amount of retreat [μm] at the arc portion 70A relative to the 35 [μm]. That is, the penetration amount of the side etching in the case of the retreat amount of 10 [μm] is 45 [μm] by adding the resist offset amount of 35 [μm] to the retreat amount of 10 [μm]. From this graph, it can be seen that the smaller the radius of curvature [μm] of the arc portion 70A, the larger the retraction amount.

In the present example, the amount of resist shift in the straight portion 70B was set to 35 [μm] similarly to the straight portion 72B. In the arc portion 70A, since the radius of curvature is 150 [μm], the amount of retreat is 6.4 [μm] according to FIG. 5 . Accordingly, the offset amount of the resist with respect to the arc portion 70A is 41.4 [μm] (35+6.4) at the front end position (position Z shown in FIG. 1(A) ).

(The role of the main method)

As described above, according to the method of manufacturing a metal heating element according to the present embodiment, the amount of resist offset of the arc portion 70A in the protrusion 70 is set to be larger than that of the straight portion 70B based on the radius of curvature of the arc portion 70A. The resist offset is large. Thus, the product shape of the protrusion 70 formed by wet etching is close to the design value. In addition, the amount of resist shifting at the tip portion 72A of the notch 72 is set to be smaller than the amount of resist shifting at the straight portion 72B based on the radius of curvature of the tip portion 72A. Thus, the product shape of the notch 72 formed by wet etching is close to the design value.

In short, since the product shape of the metal heating element 64 is close to the design value, the rate of defective products caused by different shapes can be reduced.

In addition, since the product shape of the metal heating element 64 is close to the design value, the heat generation value of the metal heating element 64 can be obtained with good uniformity and close to a predetermined value (design target value).

In addition, the present invention has been described in detail for a specific embodiment, but the present invention is not limited to the embodiment, and it is clear to those skilled in the art that other various embodiments can be realized within the scope of the present invention. . For example, in the above-mentioned embodiment, the method of manufacturing the metal heating element having the protrusion 70 and the notch 72 has been described, but as shown in FIG. Instead of the arc portion shown in the embodiment, the arc-shaped front end portion 92A and the straight portion 92B are formed in the cutout 92 as shown in the embodiment. In this case, the idea of this embodiment can be used only for the cutout 92 .

Specifically, the amount of resist offset (dimension J in the figure) at the front end portion 92A of the slit 92 is different from the amount of resist offset (dimension K in the figure) at the straight line portion 92B, based on the radius of curvature of the front end portion 92A. , is set to be smaller than the resist shift amount of the straight line portion 92B.

In addition, in the above-mentioned embodiment, the method of manufacturing the metal heating element having the protrusion 70 and the slit 72 formed with the linear portion 72B has been described, but as shown in FIG. The cutout 102 of 98 does not form the straight portion shown in this embodiment, but only the arc-shaped front end portion 102A shown in this embodiment is formed in the cutout 102, and only the arcuate portion 100A is formed in the protrusion 100. In this case, the concept of this embodiment can be applied to the front end portion 102A of the notch 102 and the arc portion 100A of the protrusion 100 .

Specifically, the amount of resist offset (dimension L in the figure) at the front end 102A of the slit 102 is different from the amount of resist offset (dimension M in the figure) at the arc portion 100A, based on the radius of curvature of the front end 102A Alternatively, the radius of curvature of the arc portion 100A is set to be smaller than the resist shift amount of the arc portion 100A.

In addition, in the above-mentioned embodiment, the method of manufacturing a metal heating element having an arcuate shape has been described as an example, but the method for manufacturing a metal plate according to this embodiment can also be applied to other metals having an arcuate shape. The method of manufacturing the board.

In addition, in the above-mentioned embodiment, the SUS304 plate material with a thickness of 30 μm was used for the description, but metal plates with other thicknesses and materials may also be used.

Claims (4)

1. A method of manufacturing a metal plate, comprising: A resist forming step of forming a front end portion in an arc shape and having a straight line extending from the front end portion to the base end side in order to wet-etch the metal plate from the surface of the metal plate. When forming a resist covering the cutout on the surface of the metal plate so that the cutout will not be corroded by wet etching, based on the radius of curvature of the front end part, the metal The resist is formed on the plate surface of the board so that the offset amount of the resist between the edge of the resist at the front end and the front end is larger than that at the straight line. a resist offset amount between the edge portion of the resist and the straight line portion is small; and and an etching step of etching the metal plate by causing an etchant to act on the metal plate on which the resist is formed in the resist forming step. 2. A method of manufacturing a metal plate, comprising: The resist forming step is to form arc-shaped protrusions for wet etching the metal plate from the surface of the metal plate, and to deviate inwardly from the protrusions by the same amount, and is composed of An arc-shaped front end portion and a notch formed by a linear portion extending linearly from the front end portion to a position on the base end side, and a corrosion resist covering the notch and the protrusion is formed on the surface of the metal plate. agent so that the protrusion and the cutout will not be corroded by wet etching, based on at least one of the radius of curvature of the front end and the radius of curvature of the arc-shaped arc portion of the protrusion, in The resist is formed on the surface of the metal plate such that an offset amount of the resist between an edge of the resist at the front end and the front end is larger than that of the straight line The offset amount of the resist between the edge of the resist at the portion and the straight line is small, and makes the edge of the resist at the arc-shaped arc portion at the protrusion The amount of resist offset between the arc-shaped arc portion at the protrusion and the resist offset between the edge of the resist at the linear portion and the linear portion large displacement; and and an etching step of etching the metal plate by causing an etchant to act on the metal plate on which the resist is formed in the resist forming step. 3. A method of manufacturing a metal plate, characterized in that it has: A resist forming step in which arc-shaped protrusions are formed to etch the metal plate from the plate surface of the metal plate, and arc-shaped protrusions are deviated inwardly by the same amount relative to the protrusions. When the slit is formed on the surface of the metal plate to cover the slit and the protrusion so that the protrusion and the slit will not be corroded by wet etching, based on the slit At least one of the radius of curvature and the radius of curvature of the protrusion, the resist is formed on the surface of the metal plate such that the edge of the resist at the cutout and the gap between the cutout an amount of resist offset between the protrusions that is less than the amount of resist offset between the edge of the resist at the protrusion and the protrusion; and and an etching step of etching the metal plate by causing an etchant to act on the metal plate on which the resist is formed in the resist forming step. 4. A metal heating element, The metal heating element has: a serpentine portion forming an S shape in one direction; and a voltage application portion formed on both ends of the serpentine portion and extending in one direction, The snaking portion has: an arc-shaped protrusion; and a cutout formed by deviating inwardly by the same amount relative to the protrusion, The protrusion and the notch are manufactured using the method of manufacturing a metal plate described in claim 2 or 3 .