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CN103484859A - Method for manufacturing metal plate and metal heating element - Google Patents

Method for manufacturing metal plate and metal heating element Download PDF

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Publication number
CN103484859A
CN103484859A CN201210526140.3A CN201210526140A CN103484859A CN 103484859 A CN103484859 A CN 103484859A CN 201210526140 A CN201210526140 A CN 201210526140A CN 103484859 A CN103484859 A CN 103484859A
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China
Prior art keywords
resist
metal plate
etching
arc
amount
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Granted
Application number
CN201210526140.3A
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Chinese (zh)
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CN103484859B (en
Inventor
冈田纯二
川上公之
村上裕纪
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Fujifilm Business Innovation Corp
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Fuji Xerox Co Ltd
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Abstract

The invention provides a method for manufacturing a metal plate and a metal heating element. When the metal plate with projections is formed through wet etching, the shape of the projections is approximate to the design value. The etch-resisting offset of a front end (71A) of a notch (72), based on the curvature radius of the front end (72A), is set to be less than the etch-resisting offset of a straight part (72B). Thus, the shape of the notch (72) formed through wet etching is approximate to the design value.

Description

The manufacture method of metal sheet, metallic heating body
Technical field
The present invention relates to manufacture method and the metallic heating body of metal sheet.
Background technology
Put down in writing following technology in patent documentation 1,, after metal material surface forms corrosion-resisting pattern, make this corrosion-resisting pattern become mask, metallic substance is carried out to etching, manufacture etching products, in this etching processing method, resist is controlled near prescribed position configuration corrosion-resisting pattern, carries out etching.
Patent documentation 1: Japanese kokai publication hei 09-128430 communique
Summary of the invention
Problem of the present invention, be in the situation that have the metal sheet of circular-arc shape by the wet etching moulding, obtains the shape of product identical with design load.
The manufacture method of the metal sheet that technical scheme 1 of the present invention is related is characterised in that, have following operation: resist forms operation, in this operation, carry out wet etching at the plate for from metal sheet in the face of described metal sheet and to form leading section be circular-arc and have from described leading section until the otch of the line part that base end side extends with linearity, and form to coat the resist of described otch so that described otch can not be etched because of wet etching the time on the plate face of described metal sheet, radius-of-curvature based on leading section, form described resist on the plate face of described metal sheet, so that the resist side-play amount between the edge of the described resist of described front end and described leading section, less than the edge of the described resist at described line part place and the resist side-play amount between described line part, and etching work procedure, in this operation, etching solution is acted on by described resist formation operation and be formed with on the described metal sheet of described resist, described metal sheet is carried out to etching.
The manufacture method of the metal sheet that technical scheme 2 of the present invention is related is characterised in that, have following operation: resist forms operation, in this operation, carry out wet etching and form circular-arc projection in the face of described metal sheet at the plate for from metal sheet, form with respect to described projection, departing to the inside identical amount and reached from described leading section until the otch that the line part that extend with linearity the base end side position forms by circular-arc leading section, and form to coat the resist of described otch and described projection so that described projection and described otch be not can be etched because of wet etching the time on the plate face of described metal sheet, at least one in radius-of-curvature based on leading section and the radius-of-curvature of arc sections, form described resist on the plate face of described metal sheet, so that the resist side-play amount between the edge of the described resist of described front end and described leading section, less than the edge of the described resist at described line part place and the resist side-play amount between described line part, and make the edge of described resist of circular-arc arc sections of described prominence and the resist side-play amount between described arc sections, larger than the edge of the described resist at described line part place and the resist side-play amount between described line part, and etching work procedure, in this operation, etching solution is acted on by described resist formation operation and be formed with on the described metal sheet of described resist, described metal sheet is carried out to etching.
The manufacture method of the metal sheet that technical scheme 3 of the present invention is related is characterised in that, have following operation: resist forms operation, in this operation, carry out etching in the face of described metal sheet and form circular-arc projection and depart to the inside identical amount and the circular-arc otch that forms with respect to described projection at the plate for from metal sheet, and form to coat the resist of described otch and described projection so that described projection and described otch be not can be etched because of wet etching the time on the plate face of described metal sheet, at least one party in radius-of-curvature based on described otch and the radius-of-curvature of described projection, form described resist on the plate face of described metal sheet, so that the resist side-play amount between the edge of the described resist of described incision and described otch, less than the resist side-play amount between the edge of the described resist of described prominence and described projection, and etching work procedure, in this operation, etching solution is acted on by described resist formation operation and be formed with on the described metal sheet of described resist, described metal sheet is carried out to etching.
The related metallic heating body of technical scheme 4 of the present invention is characterised in that, it has circular shape, the manufacture method manufacture of the metal sheet of any one record in operation technique scheme 1 to 3.
The effect of invention
Manufacture method according to the metal sheet of technical scheme 1 of the present invention, the situation identical with the resist side-play amount of the resist side-play amount of circular-arc leading section and line part compared, in the situation that there is the metal sheet of circular-arc shape by the wet etching moulding, can obtain the shape of product identical with design load.
Manufacture method according to the metal sheet of technical scheme 2 of the present invention, the situation identical with the resist side-play amount of the resist side-play amount of the resist side-play amount of circular-arc leading section, line part and circular-arc jut compared, in the situation that there is the metal sheet of circular-arc shape by the wet etching moulding, can obtain the shape of product identical with design load.
Manufacture method according to the metal sheet of technical scheme 3 of the present invention, the situation identical with the resist side-play amount of the resist side-play amount of circular-arc leading section and circular-arc jut compared, in the situation that there is the metal sheet of circular-arc shape by the wet etching moulding, can obtain the shape of product identical with design load.
According to the metallic heating body of technical scheme 4 of the present invention, with the metallic heating body of manufacture method manufacture the manufacture method of utilizing the metal sheet of any one record in technical scheme 1 to 3, compare, can improve the heating homogeneity.
The accompanying drawing explanation
Fig. 1 (A), (B) mean the pattern that crawls used in the manufacture method of the metallic heating body that embodiments of the present invention are related, the explanatory view of shape of product.
Fig. 2 (A), (B) mean the pattern that crawls used in the manufacture method of the metallic heating body that the way of contrast of embodiments of the present invention is related, the explanatory view of shape of product.
Fig. 3 means the oblique drawing of the metallic heating body that embodiments of the present invention are related.
Fig. 4 means the vertical view of the metallic heating body that embodiments of the present invention are related.
Fig. 5 uses in the manufacture method of the curve representation metallic heating body related in embodiments of the present invention, the figure of the result of the simulation of using while determining the resist side-play amount.
Fig. 6 uses in the manufacture method of the curve representation metallic heating body related in embodiments of the present invention, the figure of the result of the simulation of using while determining the resist side-play amount.
Fig. 7 (A), (B), (C), (D), (E), (F) mean the explanatory view of each operation of the manufacture method of the metallic heating body that embodiments of the present invention are related.
Fig. 8 (A), (B), (C) are in the manufacture method of the metallic heating body related in embodiments of the present invention, the schematic diagram used for the explanation of determining the resist side-play amount.
Fig. 9 means the side-view of the fixing device that uses the related metallic heating body of embodiments of the present invention.
Figure 10 (A), (B) mean oblique drawing and the front view of the fixing band of the fixing device that uses the related metallic heating body of embodiments of the present invention.
Figure 11 is the image processing system that uses the related metallic heating body of embodiments of the present invention.
Figure 12 (A), (B) mean vertical view and the amplification plan view of the variation of the metallic heating body that embodiments of the present invention are related.
Figure 13 (A), (B) mean vertical view and the amplification plan view of the variation of the metallic heating body that embodiments of the present invention are related.
The explanation of label
64 metallic heating bodies
70 projections
The 70A arc sections
The 70B line part
72 otch
The 72A leading section
The 72B line part
88 metallic heating bodies
90 projections
92 otch
The 92A leading section
The 92B line part
98 metallic heating bodies
100 projections
The 100A arc sections
102 otch
The 102A leading section
150 sheet materials (example of metal sheet)
152 photo-resists (resist)
Embodiment
According to Fig. 1 to Fig. 3, to embodiments of the present invention, the manufacture method of related metal sheet and metallic heating body example describes.At first, the image processing system of the metallic heating body of manufacture method manufacture with metal sheet related by present embodiment described.In addition, the arrow UP shown in figure means the top of vertical.
(image processing system)
(image forming part)
As shown in figure 11, image processing system 10 has: as holder 12; Live parts 14, it makes the surface charging of picture holder 12; Exposure apparatus 16, it to the surface irradiation laser of charged picture holder 12, forms electrostatic latent image based on view data; Display 18, it is using this electrostatic latent image as toner image and visual; Transfer roll 22; It is the toner image as holder 12 surfaces to the parts of the paper as the recording medium P transfer printing of supplying with along transport path 20; Fixing device 24, its toner image to transfer printing is heated, is pressurizeed and is fixed on paper parts P; And cleaning device 26, it is cleaned remaining in the toning agent as on holder 12 carried out after the toner image transfer printing.
In addition, image processing system 10 is coated by main body side cover 10B and top board 10A.And, partly thering is axle 10C in the upper corners of main body side cover 10B, it rotatably links top board 10A with main body side cover 10B.Thus, by make top board 10A centered by axle 10C along the arrow A direction rotation, thereby the inside of image processing system 10 is opened.In addition, about fixing device as described later in detail.
(manually sheet feed section)
In addition, have manual feedboard for paper 32 in the side of this image processing system 10, it can manually supply with paper parts P to the image transfer section 31 formed by picture holder 12 and transfer roll 22.Be provided with the outlet roller 34 of first quarter moon shape on this manual feedboard for paper 32.And, being provided with separate roller 36 across paper parts P with outlet roller 34 opposite sides, its paper parts P that will send from manual feedboard for paper 32 separates one by one.
These separate roller 36 axles are supported on the not shown support component that is arranged at both ends, and the helical spring preliminary tension by being arranged on support component inside is to outlet roller 34 pretensions.By this structure, if outlet roller 34 rotations, the paper parts P loaded on manual feedboard for paper 32 is carried to image transfer section 31 one by one by outlet roller 34 and separate roller 36.
(sheet feed section)
Downside in image processing system 10 is provided with paper feed 40, and it is supplied with paper parts P one by one to image transfer section 31.Paper feed 40 has the paper supply parts 41 of multiple paper parts P of mounting, is stacked in the paper parts P on paper supply parts 41, by taking out roller 42, takes out successively.And, by the paper feed roller 44 that rotarilys actuate be arranged on the separate roller 46 on paper supply parts 41, conveyance of sheets parts P one by one.
(other)
And, dispose a plurality of conveying rollers 48, its transport path along paper parts P 20 conveyance of sheets parts P, the downstream side along transport path 20 to the throughput direction of paper parts P (following brief note is " conveyance direction downstream side ") conveyance of sheets parts P.
In addition, in the conveyance direction downstream side of image transfer section 31, have distributing roller 38, this distributing roller 38 will carry out the upper surface that paper parts P after toner image is expelled to top cover 10A by fixing device 24.
(effect of image processing system)
In the image processing system 10 of said structure, form in the following manner image.
At first, the live parts 14 that is applied with voltage makes the surface of picture holder 12 similarly charged.Then, the view data of the bar coded based on by not shown or the view data of inputting from outside, exposure apparatus 16 makes the face exposure of charged picture holder 12, on the surface of picture holder 12, forms electrostatic latent image.This electrostatic latent image utilizes the toning agent supplied with from display 18 as toner image and visual.
Thus, by taking out roller 42 from the paper parts P of paper supply parts 41 taking-ups or manually from the paper parts P of manual feedboard for paper 32 supplies, to transport path 20, export.To the paper parts P of transport path 20 outputs, the image transfer section 31 by forming between picture holder 12 and transfer printing rod 22, be transferred to toner image on paper parts P.It is upper that the toner image of this transfer printing is fixed on paper parts P by fixing device 24, and paper parts P is expelled to the upper surface of top cover 10A by distributing roller 38.
(fixing device)
Below, for fixing device 24, describe.
As shown in Figure 9, fixing device 24 has: the fixing band 50 of tubular, and it has the heating layer (omitting diagram) that the eddy current by producing when applying magnetic field is generated heat; Press pressure roller 52, conveyance of sheets parts P between itself and fixing band 50, and paper parts P is pressed to fixing band 50; Pressure pad 54, its by fixing band 50 from the inner peripheral surface of fixing band 50 towards pressing by pressure roller 52; And the electro-heat equipment 56 of way of electromagnetic induction, by mobile alternating current, the heating layer to fixing band 50 applies magnetic field for it.
In an end of fixing band 50, as Figure 10 (A) (B) as shown in, be equipped with and make the driving gear 58 of fixing band 50 at all direction rotations of fixing band 50.
And, in fixing band 50 sides of driving gear 58, the mode contacted with the inner peripheral surface face with fixing band 50 has formed vibrating part 59.The inner peripheral surface of the periphery of this vibrating part 59 and fixing band 50 is fixing by caking agent etc.And never illustrated electric motor is subject to revolving force and the driving gear 58 that rotates, via this vibrating part 59, to fixing band 50, transmit revolving forces.
In addition, as shown in Figure 9, across fixing band 50 and with press the relative side of pressure roller 52, dispose the described electro-heat equipment 56 relative with the part of fixing band 50.Electro-heat equipment 56 has electromagnetic induction coil (magnet coil) 56A, makes to change in exciting circuit by apply the magnetic field that alternating current produces to electromagnetic induction coil 56A, makes the heating layer of fixing band 50 produce eddy current.This eddy current is because the resistance of heating layer is transformed to heat (joule heating), thereby makes the part heating relative with electro-heat equipment 56 in fixing band 50.That is, in this mode, the part of the fixing band 50 relative with electromagnetic induction coil 56A heating on Zhou Fangxiang.And, before by fixing device 24 conveyance of sheets parts P, make in advance fixing band 50 rotations, so that the integral body of fixing band 50 reaches for making the fixing temperature of toner image on paper parts P.
And, the relative mode with the inner peripheral surface of the fixing band 50 with by electro-heat equipment 56 heating parts, the circular-arc heat generating components 60(auxiliary heater that configuration is heated fixing band 50).
By making these heat generating components 60 heatings, fixing band 50 is heated, thereby compared with the situation that does not there is heat generating components 60, can make fixing band 50 arrive at short notice fixing temperature.
(wanting section's method)
Below, heat generating components 60 is described.
As shown in Figure 3, Figure 4, heat generating components 60 has: a pair of insulation film 62, and it extends to a direction (arrow B direction in figure), by the polyimide resin moulding; And metallic heating body 64, it is by these a pair of insulation film 62 clampings.And the thickness of each insulation film 62 is 50[μ m].
In addition, in each figure, for ease of understanding the structure of heat generating components 60, be recited as the flat heat generating components 60 be shaped to before circular-arc.In the explanation of back, the heat generating components 60 of also take describes as tabular.
In addition, by heat generating components 60 when configuring on fixing device 24 so that a described direction becomes the mode of the inboard direction of device (the inboard direction of the paper of Fig. 9), electro-heat equipment 60 is configured on fixing device 24.
(metallic heating body)
Below, metallic heating body 64 is described.
Metallic heating body 64, the SUS304(stainless-steel sheet of used thickness 50 μ m) form.And as shown in Figure 3, this metallic heating body 64 has: the position 66 of crawling, it forms S shape to a direction; And voltage application portion position 68, it is formed on the both end sides at snakelike position 66, extends, and to insulation film 62(for example the polyimide made membrane to direction) outside expose.By utilizing not shown voltage application portion part to apply voltage to this voltage application portion part 68, thereby make metallic heating body 64 heatings.
As shown in Fig. 1 (B), the position 66 of crawling has: the projection 70 of convex; And otch 72, it departs to the inside identical amount (side-play amount is same amount: be 70[μ m in the present embodiment]) with respect to projection 70 and forms.And, in the mode of being surrounded by this otch 72, form incision tract 73.
And otch 72 has: circular-arc leading section 72A; And a pair of line part 72B, its from this leading section 72A until base end side (downside figure) with linearity, extend.
And the internal diameter of this leading section 72A (R1 shown in figure) is 80[μ m], a pair of line part 72B extends to the orthogonal directions (arrow C direction in figure) with a described direction (arrow B direction in figure) quadrature.
(manufacture method of metallic heating body)
Below, as an example of the manufacture method of metal sheet, the manufacture method of metallic heating body is described.
As Fig. 7 (A) (B) as shown in, at first, in the resist working procedure of coating, at thickness 50[μ m] the example of sheet material 150(metal sheet of SUS304) two surfaces, with thickness 1[μ m] coating positive photoresist 152.
Then, as shown in Fig. 7 (C), in exposure process, make the film base plate 154 that is formed with etched pattern be close on the sheet material 150 that is coated with photo-resist 152 and fix.And exposed to film base plate 154, the pattern 160(that will crawl is with reference to Fig. 1 (A)) photo-resist 152 is burned.In addition, about crawling pattern 160 as described later in detail.
Then, as shown in Fig. 7 (D), in the video picture operation, use image-developing liquor to carry out the video picture processing to the crawl sheet material 150 of pattern 160 of exposure transfer printing on photo-resist 152.Thus, the photo-resist 152 in the zone of having exposed is dissolved in image-developing liquor, and photo-resist 152 forms in the mode of S shape.
Then, as shown in Fig. 7 (E), in etching work procedure, sheet material 150 is immersed in to etching solution (in the present embodiment, as an example, be solution of ferrous chloride) in, or spray (spray) etching solutions to sheet material 150, thereby the exposed portions serve of the sheet material 150 that exposes by video picture is carried out to etching.
Then, as shown in Fig. 7 (F), in the resist stripping process, utilize sodium hydroxide solution, the photo-resist 152 be coated on sheet material 150 is removed.Thus, manufacture metallic heating body 64.
(pattern crawls)
Below, for the crawl pattern 160 burned to photo-resist 152, describe.
In Fig. 1, the crooked position of the pattern 160 that crawls is shown.For by wet etching, forming the pattern 160(etched pattern that crawls by the projection 70 shown in the two dot chain line of Fig. 1 (A) and otch 72), must be to the inboard skew of the edge of otch 72, and be offset to the outside of the edge of projection 70.Thus, the pattern 160 that crawls has: the inboard pattern 160A that crawls, and skew is to the inside compared in its edge with otch 72; And the outside pattern 160B that crawls, skew (solid line in figure) is laterally compared in its edge with projection 70.
In etching work procedure, etching solution is invaded the inside of the pattern 160 that crawls, and sheet material 150 is carried out to etching (so-called side etching method).Thus, otch 72 forms greatlyr with respect to the inboard pattern 160A that crawls, and in addition, projection 70 forms littlely with respect to the outside pattern 160B that crawls.In addition, photo-resist is called to the resist side-play amount with respect to the amount of edge (two dot chain line shown in Fig. 1 (the A)) skew of the product in design.
And, in the present embodiment, the resist side-play amount of the leading section 72A in otch 72 (E size in figure) is different from the resist side-play amount (F size in figure) of line part 72B, radius-of-curvature based on leading section 72A, be made as less than the resist side-play amount of line part 72B.Its reason is, Yi Bian, Yi Bian side etching spreads intrusion (carrying out) towards periphery, therefore, in leading section 72A, the intrusion amount of side etching is compared less with line part 72B.
; as shown in Figure 2 (A) shows, if make the resist side-play amount, at leading section 72A and line part 72B place, be identical amount (distance), as shown in Fig. 2 (B); the otch amount (solid line) of the leading section obtained after etching work procedure, will be less than the otch amount (dotted line) of the leading section in design.
On the other hand, as shown in Fig. 1 (A), the resist side-play amount of circular-arc arc sections 70A in projection 70 (G size in figure) is different from the resist side-play amount (H size in figure) of the line part 70B of linearity in projection 70, radius-of-curvature based on arc sections 70A, its side-play amount of resist than line part 70B is large.
Its reason is, due to side etching, from invading on every side, therefore at arc sections 70A place, the intrusion amount of side etching is compared many with line part 70B.
; as shown in Figure 2 (A) shows; if make the resist side-play amount become identical amount (distance) at arc sections 70A and line part 70B place,, as shown in Fig. 2 (B), the overhang of the arc sections obtained after etching work procedure (solid line) is less than the overhang (dotted line) of the leading section in design.
In addition, as shown in Fig. 1 (A), the resist side-play amount (F size in figure) of the line part 72B of the resist side-play amount of the line part 70B of projection 70 (H size in figure) and described otch 72 is identical condition for the intrusion of side etching, therefore becomes identical amount.
Measuring different reasons for the intrusion of side etching here, describes particularly.
Mean shape of product with solid line in Fig. 8, with two dot chain line, mean photo-resist.The line length of the edge of photo-resist is made as to overall length L, in the situation that to line part (with reference to Fig. 8 (A)) carry out moulding situation, to recessed fillet part (with reference to Fig. 8 (B)) carry out moulding situation, dome bight (with reference to Fig. 8 (C)) carried out to moulding, the intrusion amount of side etching can produce difference.Its reason is, the amount (the oblique line area S shown in each figure) that corrodes mother metal by etching is identical.
As mentioned above, because the erosion amount (the oblique line area S shown in each figure) of mother metal is identical, therefore, the intrusion amount of the side etching in recessed fillet part (the size Q of Fig. 8 (B)), compare little with the intrusion amount (the size P of Fig. 8 (A)) of side etching in line part.
On the other hand, the intrusion amount of the side etching in the dome bight (the size R of Fig. 8 (C)), compare greatly with the intrusion amount (the size P of Fig. 8 (A)) of side etching in line part.
Then, to the resist side-play amount of the leading section 72A that determines otch 72, and the order of the resist side-play amount of the arc sections 70A of projection 70 describe.
At first, the curve shown in Fig. 6 is described.In Fig. 6, the relation between the radius-of-curvature of the leading section 72A of simulation otch 72 and the amount of not reaching of locating in front position (cutting maximum positions), illustrate this result with curve.
The transverse axis of the curve shown in Fig. 6 means the radius-of-curvature [μ m] of the leading section 72A of otch 72, and the longitudinal axis is illustrated in thickness of slab 50[μ m] the situation of sheet material of SUS304 under, side etching do not arrive the not arrival amount [μ m] of product end.
Specifically, in the situation that the resist side-play amount is 35[μ m], mean with respect to this 35[μ m], the not arrival amount at leading section 72A place [μ m].That is, not arrival amount 10[μ m] the intrusion amount of side etching in situation is, from resist side-play amount 35[μ m] deduct the amount of not reaching 10[μ m], be 25[μ m].Known according to this curve, [μ m] is less for the radius-of-curvature of leading section 72A, and the amount of not reaching is larger.
In the present embodiment, the resist side-play amount of line part 72B is made as to 35[μ m].For leading section 72A, because radius-of-curvature is 80[μ m], therefore, according to Fig. 6, the amount of not reaching is 12.1[μ m].Thus, in front position (the position Y shown in Fig. 1 (A)), locate, the resist side-play amount of leading section 72A becomes 22.9[μ m] (35-12.1).
Below, the curve shown in Fig. 5 is described.Relation between the radius-of-curvature of the arc sections 70A of projection 70 and the amount of retreating that front position (the most outstanding position) is located is simulated, and Fig. 5 illustrates this result with curve.
The transverse axis of the curve shown in Fig. 5 is made as the radius-of-curvature [μ m] of the arc sections 70A of projection 70, and the longitudinal axis is made as in the situation that thickness of slab 50[μ m] the sheet material of SUS304, the amount of retreating that the product end retreats due to side etching [μ m].
Specifically, in the situation that the resist side-play amount is made as to 35[μ m], mean with respect to this 35[μ m], the amount of retreating at arc sections 70A place [μ m].That is, the amount of retreating 10[μ m] situation under the intrusion amount of side etching be, by resist side-play amount 35[μ m] add the amount of retreating 10[μ m], be 45[μ m].Known according to this curve, [μ m] is less for the radius-of-curvature of arc sections 70A, and the amount of retreating is larger.
In the present embodiment, with line part 72B similarly, the resist side-play amount of line part 70B is made as to 35[μ m].For arc sections 70A, because radius-of-curvature is 150[μ m], therefore, according to Fig. 5, the amount of retreating is 6.4[μ m].Thus, for the resist side-play amount of arc sections 70A, in front position (the position Z shown in Fig. 1 (A)), locating, is 41.4[μ m] (35+6.4).
(wanting the effect of section's method)
As mentioned above, the manufacture method of related metallic heating body according to present embodiment, the resist side-play amount of the arc sections 70A in projection 70, the radius-of-curvature based on arc sections 70A, be made as larger than the resist side-play amount of line part 70B.The shape of product of the projection 70 formed by wet etching thus, approaches design load.In addition, the resist side-play amount of the leading section 72A of otch 72, the radius-of-curvature based on leading section 72A, be made as less than the resist side-play amount of line part 72B.The shape of product of the otch 72 formed by wet etching thus, approaches design load.
In a word, because the shape of product of metallic heating body 64 approaches design load, therefore can reduce due to the different fraction defectives that cause of shape.
In addition, because the shape of product of metallic heating body 64 approaches design load, therefore can be had good uniformity and be approached the thermal value of the metallic heating body 64 of prescribed value (design objective value).
In addition, for specific embodiment, at length describe the present invention, but the present invention being not limited to embodiment, within the scope of the invention, can realizing other numerous embodiments, is clearly to those skilled in the art.For example, in the above-described embodiment, manufacture method for the metallic heating body with projection 70 and otch 72 is illustrated, but as Figure 12 (A) (B) as shown in, sometimes in the projection 90 of metallic heating body 88, do not form the arc sections shown in present embodiments, and form as shown in the embodiment circular-arc leading section 92A and line part 92B at otch 92.In this case, can only to otch 92, use the thought of present embodiment.
Specifically, the resist side-play amount of the leading section 92A of otch 92 (J size in figure), different from the resist side-play amount (K size in figure) of line part 92B, the radius-of-curvature based on leading section 92A, be made as less than the resist side-play amount of line part 92B.
In addition, in the above-described embodiment, for the manufacture method of metallic heating body that there is projection 70 and be formed with the otch 72 of line part 72B, be illustrated, but as Figure 13 (A) (B) as shown in, existence does not form the line part shown in present embodiment at the otch 102 of metallic heating body 98, but only form the circular-arc leading section 102A shown in present embodiment at otch 102, and only form the situation of arc sections 100A in projection 100.In this case, can use to the arc sections 100A of the leading section 102A of otch 102 and projection 100 thought of present embodiment.
Specifically, the resist side-play amount of the leading section 102A of otch 102 (L size in figure) is different from the resist side-play amount (M size in figure) of arc sections 100A, the radius-of-curvature of radius-of-curvature based on leading section 102A or arc sections 100A, be made as less than the resist side-play amount of arc sections 100A.
In addition, in the above-described embodiment, the manufacture method of metallic heating body with circular shape of take is illustrated as example, but the manufacture method of metal sheet that also can present embodiment is related is for the manufacture method of other metal sheets with circular shape.
In addition, in the above-described embodiment, the sheet material of the SUS304 of used thickness 30 μ m is illustrated, but also can use the metal sheet of other thickness and material.

Claims (4)

1.一种金属板的制造方法,具有:1. A method of manufacturing a metal plate, comprising: 抗蚀剂形成工序,在该工序中,在为了从金属板的板面对所述金属板进行湿蚀刻而形成前端部为圆弧状且具有从所述前端部直至基端侧以直线状延伸的直线部的切口,而在所述金属板的板面上形成包覆所述切口的抗蚀剂以使所述切口不会因湿蚀刻而被侵蚀时,基于前端部的曲率半径,在所述金属板的板面上形成所述抗蚀剂,以使得所述前端部处的所述抗蚀剂的缘部和所述前端部之间的抗蚀剂偏移量,比所述直线部处的所述抗蚀剂的缘部和所述直线部之间的抗蚀剂偏移量小;以及A resist forming step in which the front end portion is formed in an arc shape and has a linear shape extending from the front end portion to the base end side in order to wet-etch the metal plate from the plate surface of the metal plate. When forming a cutout covering the cutout on the surface of the metal plate so that the cutout will not be corroded by wet etching, based on the radius of curvature of the front end, the The resist is formed on the surface of the metal plate so that the offset amount of the resist between the edge of the resist at the front end and the front end is larger than that at the straight line. A resist offset amount between an edge portion of the resist at and the straight line portion is small; and 蚀刻工序,在该工序中,使蚀刻液作用在通过所述抗蚀剂形成工序形成有所述抗蚀剂的所述金属板上,对所述金属板进行蚀刻。and an etching step of etching the metal plate by causing an etchant to act on the metal plate on which the resist is formed in the resist forming step. 2.一种金属板的制造方法,具有:2. A method of manufacturing a metal plate, comprising: 抗蚀剂形成工序,在该工序中,在为了从金属板的板面对所述金属板进行湿蚀刻而形成圆弧状的突起、和相对于所述突起向内侧偏离相同的量而构成且由圆弧状的前端部及从所述前端部直至基端侧位置以直线状延伸的直线部构成的切口,而在所述金属板的板面上形成包覆所述切口及所述突起的抗蚀剂以使得所述突起及所述切口不会因湿蚀刻而被侵蚀时,基于前端部的曲率半径及圆弧部的曲率半径中的至少一个,在所述金属板的板面上形成所述抗蚀剂,以使得所述前端部处的所述抗蚀剂的缘部和所述前端部之间的抗蚀剂偏移量,比所述直线部处的所述抗蚀剂的缘部和所述直线部之间的抗蚀剂偏移量小,且使得所述突起处的圆弧状的圆弧部的所述抗蚀剂的缘部和所述圆弧部之间的抗蚀剂偏移量,比所述直线部处的所述抗蚀剂的缘部和所述直线部之间的抗蚀剂偏移量大;以及A resist forming step in which arc-shaped protrusions are formed for wet etching the metal plate from the surface of the metal plate, and the protrusions are deviated inwardly by the same amount, and a notch formed by an arc-shaped front end portion and a linear portion extending linearly from the front end portion to a position on the base end side; A resist is formed on the surface of the metal plate based on at least one of the radius of curvature of the front end portion and the radius of curvature of the arc portion when the protrusion and the cutout are not corroded by wet etching. the resist such that the amount of offset of the resist between the edge of the resist at the front end and the front end is larger than that of the resist at the straight line The offset amount of the resist between the edge portion and the straight line portion is small, and the distance between the edge portion of the resist and the arc portion of the arc-shaped arc portion at the protrusion is a resist offset greater than a resist offset between an edge portion of the resist at the straight line portion and the straight line portion; and 蚀刻工序,在该工序中,使蚀刻液作用在通过所述抗蚀剂形成工序形成有所述抗蚀剂的所述金属板上,对所述金属板进行蚀刻。and an etching step of etching the metal plate by causing an etchant to act on the metal plate on which the resist is formed in the resist forming step. 3.一种金属板的制造方法,其特征在于,具有:3. A method of manufacturing a metal plate, characterized in that it has: 抗蚀剂形成工序,在该工序中,在为了从金属板的板面对所述金属板进行蚀刻而形成圆弧状的突起和相对于所述突起向内侧偏离相同的量而构成的圆弧状的切口,而在所述金属板的板面上形成包覆所述切口及所述突起的抗蚀剂以使得所述突起及所述切口不会因湿蚀刻而被侵蚀时,基于所述切口的曲率半径及所述突起的曲率半径中的至少一方,在所述金属板的板面上形成所述抗蚀剂,以使得所述切口处的所述抗蚀剂的缘部和所述切口之间的抗蚀剂偏移量,比所述突起处的所述抗蚀剂的缘部和所述突起之间的抗蚀剂偏移量小;以及A resist forming step in which an arc-shaped protrusion is formed to etch the metal plate from the surface of the metal plate and an arc formed by deviating inwardly from the protrusion by the same amount shaped cutouts, and when forming a resist covering the cutouts and the protrusions on the surface of the metal plate so that the protrusions and the cutouts will not be corroded by wet etching, based on the At least one of the radius of curvature of the notch and the radius of curvature of the protrusion, the resist is formed on the surface of the metal plate so that the edge of the resist at the notch and the an amount of resist offset between cutouts that is smaller than an amount of resist offset between the edge of the resist at the protrusion and the protrusion; and 蚀刻工序,在该工序中,使蚀刻液作用在通过所述抗蚀剂形成工序形成有所述抗蚀剂的所述金属板上,对所述金属板进行蚀刻。and an etching step of etching the metal plate by causing an etchant to act on the metal plate on which the resist is formed in the resist forming step. 4.一种金属发热体,4. A metal heating element, 其具有圆弧形状,使用权利要求1至3中任一项记载的金属板的制造方法制造。It has an arc shape, and is manufactured using the manufacturing method of the metal plate as described in any one of Claims 1-3.
CN201210526140.3A 2012-06-13 2012-12-07 The manufacture method of metallic plate, metallic heating body Active CN103484859B (en)

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