CN103456743B - Array base palte and preparation method thereof, flexible display device and electronic equipment - Google Patents
Array base palte and preparation method thereof, flexible display device and electronic equipment Download PDFInfo
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- CN103456743B CN103456743B CN201310398061.3A CN201310398061A CN103456743B CN 103456743 B CN103456743 B CN 103456743B CN 201310398061 A CN201310398061 A CN 201310398061A CN 103456743 B CN103456743 B CN 103456743B
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Abstract
Embodiments provide a kind of array base palte and preparation method thereof, flexible display device and electronic equipment, this array base palte includes flexible base board and the array layer formed on described flexible base board, it is characterized in that, array layer includes: a plurality of grid line and a plurality of data lines, intersects and forms multiple sub-pixel area on flexible substrates;The thin film transistor (TFT) being arranged in sub-pixel area, connects with corresponding data wire and grid line;Wherein, a plurality of data lines/grid line includes the first signal transmssion line and the length secondary signal transmission line more than the length of the first signal transmssion line, the area of section of secondary signal transmission line is more than the area of section of the first signal transmssion line so that the second transmission time delay difference between the first signal transmssion line and secondary signal transmission line that the first transmission time delay difference between the first signal transmssion line and secondary signal transmission line that area of section is different is identical less than area of section.Present invention reduces the delay inequality between signal transmssion line.
Description
Technical field
The present invention relates to Flexible Displays, particularly a kind of array base palte and preparation method thereof, flexible display device and electronics
Equipment.
Background technology
Adagio shows that (Flexible displays) refers to that a class uses flexible base board, can be made into ultra-thin, super large,
Flexible display device or Display Technique.The main feature of Flexible Displays can describe with three words: thin, light, soft.
The flexible base board of prior art is generally divided into two regions: a part is non-bending region, and a part is bent
Region, as it is shown in figure 1, array base palte 1 wherein arrange the position of driving chip 4 for can not bent area, this driving chip 4 and number
Connect according to line 2 and grid line 3, drive the thin film transistor (TFT) TFT 5 arranged in panel.
As it is shown in figure 1, in prior art, data wire 2 and grid line 3 are the sides of the side being perpendicular to flexible base board
Formula and arrange, and and the cross section of data wire/grid line is all identical.
In mode shown in Fig. 1, the cross section of data wire/grid line is identical, it is adaptable to the feelings that the length of data wire/grid line is identical
Condition, the time delay that now signal transmits on data wire/grid line is the most identical.But the wire laying mode of this data wire/grid line is the most applicable
In the situation shown in Fig. 1, the propagation delay time that the most all can cause different data wires is different, and then causes display property
Can reduce.
Summary of the invention
The purpose of the embodiment of the present invention is to provide a kind of array base palte and preparation method thereof, flexible display device and electronics
Equipment, it is possible to increase display performance.
To achieve these goals, a kind of array base palte is embodiments provided, including flexible base board with in flexibility
The array layer formed on substrate, wherein, described array layer includes:
A plurality of grid line and a plurality of data lines, intersect and form multiple sub-pixel area on described flexible base board;
It is arranged at the thin film transistor (TFT) in described sub-pixel area, connects with corresponding data wire and grid line;
Wherein, described a plurality of data lines/grid line includes that the first signal transmssion line and length are more than the first signal transmssion line
The secondary signal transmission line of length, the area of section of described secondary signal transmission line cutting more than described first signal transmssion line
Face area so that the first transmission time delay difference between the first signal transmssion line and secondary signal transmission line that area of section is different is little
The second transmission time delay difference between the first signal transmssion line and secondary signal transmission line that area of section is identical.
Above-mentioned array base palte, wherein, data wire/grid line that any two length are different, data wire/grid that length is longer
The area of section of data wire/grid line that the area of section of line is shorter more than length.
Above-mentioned array base palte, wherein, described first signal transmssion line is identical with the cross-sectional width of secondary signal transmission line,
The section thickness of secondary signal transmission line is more than the section thickness of the first signal transmssion line.
Above-mentioned array base palte, wherein, described data wire and/or grid line are relative to any one side of described flexible base board
The angle on limit is not equal to 90 degree.
Above-mentioned array base palte, wherein, described data wire and grid line are mutually perpendicular to, and data wire and described flexible base board
The angle of one side is between 30 degree to 60 degree.
Above-mentioned array base palte, wherein, data wire is 45 degree with the angle of a side of described flexible base board.
Above-mentioned array base palte, wherein,
According to the orientation of described data wire/grid line, described data wire/grid line is divided into two parts;
According to the orientation of described data wire/grid line, in the data wire/grid line of a portion, data wire formerly
Length less than the length of posterior data wire, in the data wire of another part, the length of data wire formerly is more than posterior
The length of data wire.
In order to preferably realize above-mentioned purpose, the embodiment of the present invention additionally provides a kind of flexible display device, including above-mentioned
Arbitrary array base palte.
In order to preferably realize above-mentioned purpose, the embodiment of the present invention additionally provides a kind of electronic equipment, including above-mentioned soft
Property display device.
In order to preferably realize above-mentioned purpose, the embodiment of the present invention additionally provides the manufacture method of a kind of array base palte, institute
State manufacture method to include:
Form metal film layer;
It is etched described metal film layer processing, forms a plurality of data lines/grid line;
Wherein, described a plurality of data lines/grid line includes that the first signal transmssion line and length are more than the first signal transmssion line
The secondary signal transmission line of length, the area of section of described secondary signal transmission line cutting more than described first signal transmssion line
Face area so that the first transmission time delay difference between the first signal transmssion line and secondary signal transmission line that area of section is different is little
The second transmission time delay difference between the first signal transmssion line and secondary signal transmission line that area of section is identical.
The manufacture method of above-mentioned array base palte, wherein, data wire/grid line that any two length are different, length is longer
The area of section of data wire/grid line more than the area of section of the shorter data wire/grid line of length.
The manufacture method of above-mentioned array base palte, wherein, the step of described formation metal film layer passes through sputtering technology system
Make.
The manufacture method of above-mentioned array base palte, wherein, the step of described formation metal film layer specifically includes:
Forming a magnetic field, in the orientation of data wire/grid line to be produced, the magnetic field intensity in described magnetic field first becomes
Diminish after great;
Utilize and clashed into target by the plasma noble gas after electric field acceleration, knock out the atom effect in described magnetic field
Metal film layer described in lower formation of deposits;
Wherein, the metal film layer of formation of deposits under the effect in described magnetic field, according to data wire/grid line to be produced
Orientation, is divided into two parts;
In the orientation of described data wire/grid line, the thickness of a portion metal film layer is gradually increased, and another
The thickness of a part of metal film layer is gradually reduced.
The embodiment of the present invention has a following beneficial effect:
In the embodiment of the present invention, for a plurality of data lines/grid line, the face, cross section of relatively long data line/its correspondence of grid line
Long-pending relatively big, therefore its resistance reduces accordingly, therefore compensate for the time delay brought owing to length is longer, improves display performance.
Accompanying drawing explanation
Fig. 1 represents the structural representation of the flexible array substrate of prior art;
Fig. 2 a-2c represents the schematic diagram causing a kind of situation that data wire/grid line length is different;
Fig. 3 represents the schematic diagram causing another kind of situation that data wire/grid line length is different;
Fig. 4 a-4b represents the signal transmssion line of the embodiment of the present invention and the schematic diagram of flexible base board side angle;
Fig. 5 is the effectiveness comparison schematic diagram of the array base palte of the embodiment of the present invention;
Fig. 6 represents that the data wire of the flexible array substrate of the embodiment of the present invention is divided into two-part schematic diagram;
Fig. 7 represents the schematic diagram of the formation process of the metal film layer of the embodiment of the present invention;
Fig. 8 is the structural representation of the metal film layer of the variable thickness formed in the embodiment of the present invention;
Fig. 9 is the knot of the signal transmssion line of the variable thickness utilizing the metal film layer of Fig. 8 to be formed in the embodiment of the present invention
Structure schematic diagram.
Detailed description of the invention
The purpose of the embodiment of the present invention is to provide a kind of array base palte and preparation method thereof, flexible display device and electronics
Equipment, it is possible to increase display performance.In the embodiment of the present invention, for a plurality of data lines/grid line, relatively long data line/grid line
The area of section of its correspondence is relatively big, and therefore its resistance reduces accordingly, therefore compensate for the time delay brought owing to length is longer, improves
Display performance.
It is understood that in the specific embodiment of the invention, " first " and " second " represents when relatively numerical relation
Unequal, it is comparatively speaking in mutual alignment relation, not refers in particular to.Such as: the first quantity is not equal to the second quantity;As claimed
One data line A is the first data wire, and another data line B is properly termed as the second data wire, and comparatively speaking, data wire B is also
Being properly termed as the first data wire, data wire A is properly termed as the second data wire;Additionally, the first data wire (or first grid line) is permissible
Refer to a wherein data line (or grid line), it is also possible to refer to there is same characteristic features (as connected equal number thin film transistor (TFT) or length
Spend identical) etc. the essentially identical data wire (or grid line) of function.
To achieve these goals, a kind of array base palte is embodiments provided, including flexible base board with in flexibility
The array layer formed on substrate, wherein, described array layer includes:
A plurality of grid line and a plurality of data lines, intersect and form multiple sub-pixel area on described flexible base board;
It is arranged at the thin film transistor (TFT) in described sub-pixel area, connects with corresponding data wire and grid line;
Wherein, described a plurality of data lines/grid line includes that the first signal transmssion line and length are more than secondary signal transmission line
The secondary signal transmission line of length, the area of section of described secondary signal transmission line cutting more than described first signal transmssion line
Face area so that the first transmission time delay difference between the first signal transmssion line and secondary signal transmission line that area of section is different is little
The second transmission time delay difference between the first signal transmssion line and secondary signal transmission line that area of section is identical.
Here, first should be noted that " described a plurality of data lines/grid line includes the first signal transmssion line and length
The secondary signal transmission line of length more than secondary signal transmission line " show to be meant that in data wire/grid line and there is length
Different data wire/grid lines.
In array base palte described in the embodiment of the present invention, when there is the different signal transmssion line of length, long according to the two
The difference of degree, controls the area of section of the different signal transmssion line of length generated, longer signal transmission in manufacturing process
The area of section of line is relatively big, and therefore its impedance effect reduces accordingly, therefore, it is possible to make up the time delay brought owing to its length is longer,
Reduce the delay inequality between unlike signal transmission line, improve display performance.
In a particular embodiment of the present invention, form reason that different pieces of information line/length of grid line is different and differ, below first
Two kinds of situations are illustrated below.
In Fig. 2 a-2c, wherein signal transmssion line vertical distribution, and the most arranged in parallel, it is found that due to aobvious
Show that the shape of substrate is not that rectangle will result in the length of signal transmssion line different.
Fig. 3 is then another kind of situation.
As shown in Figure 3, it is found that flexible base board 6 therein is rectangular, but owing to signal transmssion line (includes in Fig. 3
Data wire 2 and grid line 3) relative to the angle of any one side of described flexible base board 6 be not equal to 90 degree (the most relative
Side arranged askew in flexible base board), thus while array base palte regular shape, but owing to signal transmssion line is relative to flexibility
Substrate arranged askew, now arises that the situation that the length of signal transmssion line is different.
It is understood that the embodiment of the present invention is a simplified thin film transistor (TFT) and data wire, the structural relation of grid line;
Ordinary circumstance: the grid of thin film transistor (TFT) is connected with grid line, the source electrode (or drain electrode) of thin film transistor (TFT) is connected with data wire, thin film
The drain electrode (or source electrode) of transistor is connected with pixel electrode (not shown);Owing to drain electrode and the source electrode of thin film transistor (TFT) are making work
Skill is essentially identical, can exchange nominally.
It has been mentioned hereinbefore that the embodiment of the present invention key character is: described a plurality of data lines/grid line includes
One signal transmssion line and length are more than the secondary signal transmission line of the length of the first signal transmssion line, described secondary signal transmission line
Area of section more than the area of section of described first signal transmssion line.
Above-mentioned feature is divided into multiple situation, is respectively described below.
<situation one>
When the length difference of data wire/grid line, the display performance of system is determined by maximum transmitted time delay, when data wire/
When the area of section of grid line is identical, maximum delay is determined by data wire/grid line that data wire/grid line that length is maximum is minimum with length
Fixed.
Therefore, in a particular embodiment of the present invention, in situation one, it is only necessary to reduce the longest data wire/grid line time
Prolong and just can reduce the time delay between data wire/grid line.The most in a particular embodiment of the present invention, the longest data are increased
The area of section of line/grid line, then can reduce the time delay of the longest data wire/grid line, therefore reduce between data wire/grid line
Delay inequality.
This is described as follows.
Assuming that there is 2m data lines/grid line, its length is respectively as follows:
l;
l+Δ;
l+2Δ;
…
l+(2m-2)Δ、
l+(2m-1)Δ。
In the case of area of section is identical, the delay inequality that adjacent data wire/grid line is corresponding is respectively as follows:
T;
T;
……
T。
Between data wire/grid line that then prior art middle section area is identical, maximum delay difference is (2m-1) T.
And the method utilizing the embodiment of the present invention, then:
The delay inequality that adjacent data wire/grid line is corresponding is respectively as follows:
T;
T;
……
T-ΔT。
Then, between data wire/grid line, maximum delay difference is (2m-1) T-Δ T.
<situation two>
In situation one, it is assumed that there is 2m data lines/grid line, its length is respectively as follows:
l;
l+Δ;
l+2Δ;
…
l+(2m-2)Δ、
l+(2m-1)Δ。
In this case, in order to reduce time delay, the embodiment of the present invention by this 2m data lines/grid line according to length from little to
Big order is divided into n group (n for more than 2, less than the integer of 2m), and wherein data wire/grid line the length in first group is the shortest, and
Data wire in later group/grid line length is the longest, but the area of section of the data wire/grid line in each group is identical.
Meanwhile, the area of section of the data wire/grid line in first group is minimum, and the data wire/grid line in last group
Area of section is maximum.
Under this situation, from the form of expression, every a few data lines/grid lines, its area of section strengthens.
<situation three>
In two kinds of above-mentioned situations, all there is data wire/grid line that area of section is identical, but the most extreme in the case of, appoint
Data wire/grid line that two length of anticipating is different, the data that the area of section of data wire/grid line that length is longer is shorter more than length
The area of section of line/grid line.
In this case, it is assumed that the area of section of the first data lines/grid line is same as the prior art, then according to length from
Little to big order arrangement, the delay inequality between any two data lines/grid line all can reduce, then between data wire/grid line
Long time delay difference also can reduce.
This is described as follows.
Assuming that there is 2m data lines/grid line, its length is respectively as follows:
l;
l+Δ;
l+2Δ;
…
l+(2m-2)Δ、
l+(2m-1)Δ。
In the case of area of section is identical, the delay inequality that adjacent data wire/grid line is corresponding is respectively as follows:
T;
T;
……
T。
Then between data wire/grid line, maximum delay difference is (2m-1) T.
And the method utilizing the embodiment of the present invention, then:
The delay inequality that adjacent data wire/grid line is corresponding is respectively as follows:
T-ΔT1;
T-ΔT2;
……
T-ΔT2m-1。
Then, between data wire/grid line, maximum delay difference is (2m-1) T-(Δ T1+ΔT2+…+ΔT2m-1)。
In a particular embodiment of the present invention, in order to ensure the face, cross section of the first signal transmssion line and secondary signal transmission line
Long-pending difference, can be in the following way:
Section thickness is identical, and the cross-sectional width of secondary signal transmission line is more than the cross-sectional width of the first signal transmssion line;Or
Person
Cross-sectional width is identical, and the section thickness of secondary signal transmission line is more than the section thickness of the first signal transmssion line;Or
Person
Cross-sectional width and height all differ, and the product of the cross-sectional width of secondary signal transmission line and height is more than the first letter
The cross-sectional width of number transmission line and the product of height.
As a example by signal transmssion line is as data wire: in the orientation of data wire, the area of section of data wire can in etc.
Difference or the relation first increases and then decreases of geometric ratio;
Further, the area of section opposite diagonals of data wire symmetrically arranges.Such as Fig. 9.
Certainly, it is contemplated that the complexity of making, the second way can preferentially be used in actual manufacturing process.
In the specific embodiment of the invention, first the angle of signal transmssion line with described flexible base board side is described as follows.
First, signal transmssion line defined in the specific embodiment of the invention and the side of flexible base board angle in the range of
[0,90 degree], is all equivalent to as a example by straight line (or line segment) by viewing area data wire and flexible base board side.
As shown in fig. 4 a, it is assumed that a is a side of flexible base board, then the angle of signal transmssion line b and a is defined as Fig. 4 a
In Theta 1, and in Fig. 4 b, the angle of signal transmssion line b and a is defined as the Theta 2 in Fig. 4 b, when a with b is vertical,
Then the angle of a and b orientates 90 degree as, and when a with b is parallel or overlaps, the angle of a and b orientates 0 degree as.
In array base palte as shown in Figure 3, data wire and grid line are relative to any one side of described flexible base board
Angle is not equal to 90 degree.It is to say, the angle Φ of any one side of data wire 2/ grid line 3 and flexible base board meets such as
Under relation: 0 ° < Φ < 90 °.
In a specific embodiment, in above-mentioned array base palte, data wire 2 and grid line 3 are mutually perpendicular to, and data wire with
The angle of one side of described flexible base board is between 30 degree to 60 degree.More in view of arranging on flexible substrates
Pixel, in the implementation of a kind of optimum, data wire is 45 degree with the angle of a side of described flexible base board.
Angular relationship between line and line that the embodiment of the present invention is mentioned, length, the comparison etc. of quantity, be all with
Illustrate as a example by viewing area.
In a particular embodiment of the present invention, above-mentioned angularly disposed data wire/grid line is conducive to improving the curved of substrate
Qu Xingneng, is described as follows in conjunction with Fig. 5.
As shown in Figure 5, it is assumed that in Fig. 5, the signal that the side being perpendicular to flexible base board that 51 is prior art is arranged
Transmission line, and 52 is the secondary signal transmission line diagonally disposed relative to flexible base board side of the embodiment of the present invention,
It is found that owing to the length of secondary signal transmission line 52 is more than the length of the first signal transmssion line 51 from figure, then such as Fig. 5
In the case of shown substrate bending, secondary signal transmission line 52 has bigger than the radius of curvature R 1 of the first signal transmssion line 51
Radius of curvature R 2, say, that the degree of crook of secondary signal transmission line 52 is wanted than the degree of crook of the first signal transmssion line 51
Low.
According to geometrical principle, if secondary signal transmission line 52 is 45 relative to the angle of a side of flexible base board
Degree, then about 1.4 times of the radius of curvature of the radius of curvature of secondary signal transmission line 52 the chances are the first signal transmssion line 51.
Therefore, the embodiment of the present invention, by relative to flexible base board angularly disposed signal transmssion line of side, reduces
In the case of substrate bending, the degree of crook of signal transmssion line, therefore improve the bending property of substrate.
Certainly, the present invention is identical with the first signal transmssion line material of prior art with secondary signal transmission line in implementing,
And be introduced as a example by acting on identical (the most all as data wire), but it is not limited thereto.
In view of the symmetry of substrate, in the specific embodiment of the present invention, according to the arrangement side of described data wire/grid line
To, described data wire/grid line is divided into two parts;
According to the orientation of described data wire/grid line, in the data wire/grid line of a portion, data wire formerly
Length less than the length of posterior data wire, in the data wire of another part, the length of data wire formerly is more than posterior
The length of data wire.
It is described as follows for data wire with signal transmssion line in conjunction with Fig. 6.
As shown in Figure 6, in a particular embodiment of the present invention, according to the orientation of described data wire, flexible base board
Described data wire is divided into Part I 61 and Part II 62 by diagonal 63;
Wherein in the data wire included by Part I 61, according to the orientation of described data wire, data wire formerly
Length less than the length of posterior data wire, in the data wire included by Part II 62, according to the arrangement of described data wire
Direction, the length of data wire formerly is more than the length of posterior data wire.
That is, in the orientation of data wire, the length of data wire first increases, and reduces afterwards, symmetrically arranges.
The embodiment of the present invention additionally provides a kind of flexible display device, including above-mentioned arbitrary array base palte.Wherein, array
The structure of substrate and the same above-described embodiment of operation principle, do not repeat them here.It addition, the knot of other parts of flexible display device
Structure is referred to prior art, is not described in detail this herein.This flexible display device can be: crystal liquid substrate, Electronic Paper,
LCD TV, liquid crystal display, DPF, mobile phone, panel computer etc. have product or the parts of any display function.
The embodiment of the present invention additionally provides a kind of electronic equipment, including above-mentioned flexible display device.
In order to preferably realize above-mentioned purpose, the embodiment of the present invention additionally provides the manufacture method of a kind of array base palte, institute
State manufacture method to include:
Form metal film layer;
It is etched described metal film layer processing, forms a plurality of data lines/grid line;
Wherein, described a plurality of data lines/grid line includes that the first signal transmssion line and length are more than the first signal transmssion line
The secondary signal transmission line of length, the area of section of described secondary signal transmission line cutting more than described first signal transmssion line
Face area.
In a particular embodiment of the present invention, data wire/grid line that any two length are different, the data that length is longer
The area of section of data wire/grid line that the area of section of line/grid line is shorter more than length.
In a manner mentioned above, shown in Fig. 6, as a example by data wire, in figure 6 on the direction shown in arrow, data
The length of line first increases, and reduces afterwards, according to the technical scheme of the embodiment of the present invention, if in etching process, and every data line
Width identical, then in the orientation of data wire, the thickness of data wire first increases, and then reduces.
In a particular embodiment of the present invention, the step of described formation metal film layer can be made by sputtering technology.
The manufacture method of above-mentioned array base palte, wherein, the step of described formation metal film layer is as it is shown in fig. 7, concrete
Including:
A magnetic field 703 is formed by magnetic stripe 705, in the orientation of data wire/grid line to be produced, described magnetic field
The magnetic field intensity of 703 diminishes after first becoming greatly;
Utilize and clashed into target 701 by the plasma noble gas after electric field acceleration, knock out atom 702 in described magnetic field
Effect under at metal film layer described in the surface formation of deposits of substrate 704.
In the embodiment of the present invention, by substrate oblique magnetic stripe 705 disposed behind, its orientation and number to be formed
Orientation according to line is identical, by forming magnetic field between magnetic stripe 705, high in the position of high-intensity magnetic field then plasma density, then
Film forming thickness is high.By by angularly disposed for the magnetic stripe 705 of substrate behind, thus can just correspond to the film on glass substrate
Thick rule, forms metal film thickness as shown in Figure 8.
As shown in Figure 8, the generalized section of the metal film layer for being formed after above-mentioned technical process, arrange at data wire
On direction, it is found that the thickness of the metal film layer 81 of formation first increases, and then reduces, symmetrically arranges.
Wherein, the metal film layer of formation of deposits, according to the orientation of data wire/grid line to be produced, it is divided into two
Part;
In the orientation of described data wire/grid line, the thickness of a portion metal film layer is gradually increased, and another
The thickness of a part of metal film layer is gradually reduced.
However, it is to be understood that above-mentioned data wire/grid line by printing or can also realize by the way of other,
The specific embodiment of the invention is not specifically limited.
This regular corrugated film forming thickness, after having etched, it is possible to achieve effect as shown in Figure 9, wherein
Long cabling has the thickness that comparison is thick, short cabling has the relatively thin thickness of ratio, thus realizes homogeneous signal delay.
The above is the preferred embodiment of the present invention, it is noted that for those skilled in the art
For, on the premise of without departing from principle of the present invention, it is also possible to make some improvements and modifications, these improvements and modifications are also
Should be regarded as protection scope of the present invention.
Claims (12)
1. an array base palte, including flexible base board and on described flexible base board formed array layer, it is characterised in that described
Array layer includes:
A plurality of grid line and a plurality of data lines, intersect and form multiple sub-pixel area on described flexible base board;
It is arranged at the thin film transistor (TFT) in described sub-pixel area, connects with corresponding data wire and grid line;
Wherein, described a plurality of data lines/grid line includes the first signal transmssion line and the length length more than the first signal transmssion line
The secondary signal transmission line of degree, the area of section of described secondary signal transmission line is more than the face, cross section of described first signal transmssion line
Long-pending so that the first transmission time delay difference between the first signal transmssion line and secondary signal transmission line that area of section is different is less than cutting
The second transmission time delay difference between the first signal transmssion line and secondary signal transmission line that face area is identical;Described data wire and/
Or grid line is not equal to 90 degree relative to the angle of any one side of described flexible base board.
Array base palte the most according to claim 1, it is characterised in that data wire/grid line that any two length are different, long
The area of section spending longer data wire/grid line is more than the area of section of the shorter data wire/grid line of length.
Array base palte the most according to claim 1 and 2, it is characterised in that described first signal transmssion line and secondary signal
The cross-sectional width of transmission line is identical, and the section thickness of secondary signal transmission line is more than the section thickness of the first signal transmssion line.
Array base palte the most according to claim 1, it is characterised in that described data wire and grid line are mutually perpendicular to, and described
The angle of one side of data wire and described flexible base board is between 30 degree to 60 degree.
Array base palte the most according to claim 4, it is characterised in that described data wire and a side of described flexible base board
The angle on limit is 45 degree.
Array base palte the most according to claim 1 and 2, it is characterised in that:
According to the orientation of described data wire/grid line, described data wire/grid line is divided into two portions by the diagonal of flexible base board
Point;
According to the orientation of described data wire/grid line, in the data wire/grid line of a portion, the length of data wire formerly
Degree is less than the length of posterior data wire, and in the data wire of another part, the length of data wire formerly is more than posterior data
The length of line.
7. a flexible display device, including the array base palte described in any one in claim 1-6.
8. an electronic equipment, including the flexible display device described in claim 7.
9. the manufacture method of an array base palte, it is characterised in that described manufacture method includes:
Form metal film layer;
It is etched described metal film layer processing, forms a plurality of data lines/grid line;
Wherein, described a plurality of data lines/grid line includes the first signal transmssion line and the length length more than the first signal transmssion line
The secondary signal transmission line of degree, the area of section of described secondary signal transmission line is more than the face, cross section of described first signal transmssion line
Long-pending so that the first transmission time delay difference between the first signal transmssion line and secondary signal transmission line that area of section is different is less than cutting
The second transmission time delay difference between the first signal transmssion line and secondary signal transmission line that face area is identical;Described data wire and/
Or grid line is not equal to 90 degree relative to the angle of any one side of flexible base board.
The manufacture method of array base palte the most according to claim 9, it is characterised in that the number that any two length is different
According to line/grid line, the area of section of data wire/grid line that the area of section of data wire/grid line that length is longer is shorter more than length.
11. according to the manufacture method of the array base palte described in claim 9 or 10, it is characterised in that described formation metallic film
The step of layer is made by sputtering technology.
The manufacture method of 12. array base paltes according to claim 11, it is characterised in that described formation metal film layer
Step specifically includes:
Forming a magnetic field, in the orientation of data wire/grid line to be produced, the magnetic field intensity in described magnetic field first becomes big rear change
Little;
Utilize and clashed into target by the plasma noble gas after electric field acceleration, knock out the atom effect in described magnetic field and sink
The described metal film layer of long-pending formation;
Wherein, the metal film layer of formation of deposits under the effect in described magnetic field, according to the arrangement of data wire/grid line to be produced
Direction, is divided into two parts;
In the orientation of described data wire/grid line, the thickness of a portion metal film layer is gradually increased, and another portion
The thickness dividing metal film layer is gradually reduced.
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CN103454821B (en) * | 2013-09-04 | 2016-06-15 | 京东方科技集团股份有限公司 | A kind of array base palte, flexible display device and electronic equipment |
CN103926774B (en) * | 2014-04-02 | 2016-11-16 | 京东方科技集团股份有限公司 | Array substrate, flexible display device and electronic equipment |
CN104090439B (en) * | 2014-06-27 | 2017-08-08 | 京东方科技集团股份有限公司 | Array base palte and its driving method, flexible display device and electronic equipment |
CN106711180B (en) * | 2016-12-29 | 2019-09-27 | 上海天马有机发光显示技术有限公司 | Display panel, display device and display panel manufacturing method |
WO2018191958A1 (en) * | 2017-04-21 | 2018-10-25 | 深圳市柔宇科技有限公司 | Tft array substrate, display panel and display device |
CN111653591B (en) * | 2020-06-09 | 2023-12-19 | 合肥京东方卓印科技有限公司 | Display substrate and display device |
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