CN103456743A - Array substrate, manufacturing method of array substrate, flexible display device and electronic device - Google Patents
Array substrate, manufacturing method of array substrate, flexible display device and electronic device Download PDFInfo
- Publication number
- CN103456743A CN103456743A CN2013103980613A CN201310398061A CN103456743A CN 103456743 A CN103456743 A CN 103456743A CN 2013103980613 A CN2013103980613 A CN 2013103980613A CN 201310398061 A CN201310398061 A CN 201310398061A CN 103456743 A CN103456743 A CN 103456743A
- Authority
- CN
- China
- Prior art keywords
- data wire
- signal transmission
- transmission line
- length
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 239000000758 substrate Substances 0.000 title abstract description 22
- 230000008054 signal transmission Effects 0.000 claims abstract description 99
- 230000005540 biological transmission Effects 0.000 claims abstract description 13
- 239000010409 thin film Substances 0.000 claims abstract description 12
- 239000010408 film Substances 0.000 claims description 32
- 239000002184 metal Substances 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 23
- 230000015572 biosynthetic process Effects 0.000 claims description 11
- 230000000694 effects Effects 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims description 4
- 238000005516 engineering process Methods 0.000 claims description 4
- 230000001133 acceleration Effects 0.000 claims description 3
- 230000005684 electric field Effects 0.000 claims description 3
- 239000011261 inert gas Substances 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 6
- 238000005452 bending Methods 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 4
- 238000003491 array Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 101100214497 Solanum lycopersicum TFT5 gene Proteins 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- ZOMSMJKLGFBRBS-UHFFFAOYSA-N bentazone Chemical compound C1=CC=C2NS(=O)(=O)N(C(C)C)C(=O)C2=C1 ZOMSMJKLGFBRBS-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
Images
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
The embodiment of the invention provides an array substrate, a manufacturing method of the array substrate, a flexible display device and an electronic device. The array substrate comprises a flexible substrate body and an array layer formed on the flexible substrate body and is characterized in that the array layer comprises a plurality of grid lines, a plurality of data lines and thin film transistors, wherein the grid lines and the data lines are mutually intersected to form a plurality of sub-pixel-regions on the flexible substrate body, the thin film transistors are arranged in the sub-pixel-regions and connected with the corresponding data lines and the corresponding grid lines, the data lines/the grid lines comprise first signal transmission lines and second signal transmission lines, the lengths of the second signal transmission lines are larger than the lengths of the first signal transmission lines, and the cross section areas of the second signal transmission lines are larger than the cross section areas of the first signal transmission lines. Therefore, the first transmission delay inequality between one first signal transmission line and one second signal transmission line which are different in cross section area is smaller than the second transmission delay inequality between one first signal transmission line and one second signal transmission line which are the same in cross section area. According to the array substrate, the manufacturing method of the array substrate, the flexible display device and the electronic device, the delay inequality between the signal transmission lines is reduced.
Description
Technical field
The present invention relates to flexible demonstration the, particularly a kind of array base palte and preparation method thereof, flexible display device and electronic equipment.
Background technology
Adagio shows that (Flexible displays) refers to that a class used flexible base, board, can manufacture ultra-thin, super large, flexible display device or Display Technique.The flexible main characteristics that show can be described with three words: thin, light, gentle.
The flexible base, board of prior art generally is divided into two zones: a part is non-bending zone, a part is bent zone, as shown in Figure 1, array base palte 1 is wherein arranging the position that drives chip 4 for can not bent area, this drives chip 4 to be connected with data wire 2 and grid line 3, drives the thin-film transistor TFT5 arranged in panel.
As shown in Figure 1, in prior art, data wire 2 and grid line 3 are to arrange in the mode of the side perpendicular to flexible base, board, and and the cross section of data wire/grid line is all identical.
In mode shown in Fig. 1, the cross section of data wire/grid line is identical, is applicable to the identical situation of length of data wire/grid line, and the time delay that now signal transmits on data wire/grid line is also identical.But the wire laying mode of this data wire/grid line is only applicable to the situation shown in Fig. 1, all can causes in other cases the propagation delay time difference of different data wires, and then cause display performance to reduce.
Summary of the invention
The purpose of the embodiment of the present invention is to provide a kind of array base palte and preparation method thereof, flexible display device and electronic equipment, can improve display performance.
To achieve these goals, the embodiment of the present invention provides a kind of array base palte, comprises flexible base, board and the array layer formed on flexible base, board, and wherein, described array layer comprises:
Many grid lines and many data wires, mutually intersect on described flexible base, board and form a plurality of sub-pixel area;
Be arranged at the thin-film transistor in described sub-pixel area, be connected with grid line with corresponding data wire;
Wherein, described many data wire/grid lines comprise that first signal transmission line and length are greater than the secondary signal transmission line of the length of first signal transmission line, the area of section of described secondary signal transmission line is greater than the area of section of described first signal transmission line, makes the different first signal transmission line of area of section and the first transmission time delay difference between the secondary signal transmission line be less than first signal transmission line that area of section is identical and the second transmission time delay difference between the secondary signal transmission line.
Above-mentioned array base palte, wherein, any two data wire/grid lines that length is different, the area of section of data wire/grid line that length is longer is greater than the area of section of the shorter data wire/grid line of length.
Above-mentioned array base palte, wherein, described first signal transmission line is identical with the cross-sectional width of secondary signal transmission line, and the section thickness of secondary signal transmission line is greater than the section thickness of first signal transmission line.
Above-mentioned array base palte, wherein, described data wire and/or grid line are not equal to 90 degree with respect to the angle of any one side of described flexible base, board.
Above-mentioned array base palte, wherein, described data wire is mutually vertical with grid line, and the angle of a side of data wire and described flexible base, board at 30 degree between 60 degree.
Above-mentioned array base palte, wherein, the angle of a side of data wire and described flexible base, board is 45 degree.
Above-mentioned array base palte, wherein,
According to the orientation of described data wire/grid line, described data wire/grid line is divided into two parts;
According to the orientation of described data wire/grid line, wherein in the data wire/grid line of a part, the length of data wire formerly be less than after the length of data wire, in the data wire of another part, the length of data wire formerly be greater than after the length of data wire.
In order better to realize above-mentioned purpose, the embodiment of the present invention also provides a kind of flexible display device, comprises above-mentioned array base palte arbitrarily.
In order better to realize above-mentioned purpose, the embodiment of the present invention also provides a kind of electronic equipment, comprises above-mentioned flexible display device.
In order better to realize above-mentioned purpose, the embodiment of the present invention also provides a kind of manufacture method of array base palte, and described manufacture method comprises:
Form metal film layer;
Described metal film layer is carried out to etch processes, form many data wire/grid lines;
Wherein, described many data wire/grid lines comprise that first signal transmission line and length are greater than the secondary signal transmission line of the length of first signal transmission line, the area of section of described secondary signal transmission line is greater than the area of section of described first signal transmission line, makes the different first signal transmission line of area of section and the first transmission time delay difference between the secondary signal transmission line be less than first signal transmission line that area of section is identical and the second transmission time delay difference between the secondary signal transmission line.
The manufacture method of above-mentioned array base palte, wherein, any two data wire/grid lines that length is different, the area of section of data wire/grid line that length is longer is greater than the area of section of the shorter data wire/grid line of length.
The manufacture method of above-mentioned array base palte, wherein, the step of described formation metal film layer is made by sputtering technology.
The manufacture method of above-mentioned array base palte, wherein, the step of described formation metal film layer specifically comprises:
Forming a magnetic field, in the orientation of data wire/grid line to be produced, the magnetic field intensity in described magnetic field diminishes after first becoming greatly;
The plasma inert gas of utilization after by electric field acceleration clashes into target, clashes into atom and deposit the described metal film layer of formation under the effect in described magnetic field;
Wherein, the metal film layer that deposition forms under the effect in described magnetic field, according to the orientation of data wire/grid line to be produced, be divided into two parts;
In the orientation of described data wire/grid line, wherein the thickness of a part of metal film layer increases gradually, and the thickness of another part metal film layer reduces gradually.
The embodiment of the present invention has following beneficial effect:
In the embodiment of the present invention, for many data wire/grid lines, larger than its corresponding area of section of long data line/grid line, so its resistance is corresponding reduces, and has therefore made up due to the long time delay of bringing of length, has improved display performance.
The accompanying drawing explanation
Fig. 1 means the structural representation of the flexible array substrate of prior art;
Fig. 2 a-2c means to cause the schematic diagram of data wire/a kind of situation that grid line length is different;
Fig. 3 means to cause the schematic diagram of data wire/another kind of situation that grid line length is different;
Fig. 4 a-4b means the signal transmssion line of the embodiment of the present invention and the schematic diagram of flexible base, board side angle;
The effect of the array base palte that Fig. 5 is the embodiment of the present invention is schematic diagram relatively;
Fig. 6 means that the data wire of the flexible array substrate of the embodiment of the present invention is divided into two-part schematic diagram;
Fig. 7 means the schematic diagram of formation technique of the metal film layer of the embodiment of the present invention;
The structural representation of the metal film layer that Fig. 8 is the variable thickness that forms in the embodiment of the present invention;
The structural representation of the signal transmssion line that Fig. 9 is the variable thickness of utilizing the metal film layer of Fig. 8 to form in the embodiment of the present invention.
Embodiment
The purpose of the embodiment of the present invention is to provide a kind of array base palte and preparation method thereof, flexible display device and electronic equipment, can improve display performance.In the embodiment of the present invention, for many data wire/grid lines, larger than its corresponding area of section of long data line/grid line, so its resistance is corresponding reduces, and has therefore made up due to the long time delay of bringing of length, has improved display performance.
Be understandable that, in the specific embodiment of the invention, " first " and " second " means unequal when comparing numerical relation, in the mutual alignment relation, is comparatively speaking, not refers in particular to.For example: the first quantity is not equal to the second quantity; As claimed that a data wire A is the first data wire, and another data wire B can be called the second data wire, and comparatively speaking, data wire B also can be called the first data wire, and data wire A can be called the second data wire; In addition, the first data wire (or first grid line) can refer to a wherein data wire (or grid line), the essentially identical data wires of function (or grid line) such as (as identical in connected equal number thin-film transistor or length) that also can refer to have same characteristic features.
To achieve these goals, the embodiment of the present invention provides a kind of array base palte, comprises flexible base, board and the array layer formed on flexible base, board, and wherein, described array layer comprises:
Many grid lines and many data wires, mutually intersect on described flexible base, board and form a plurality of sub-pixel area;
Be arranged at the thin-film transistor in described sub-pixel area, be connected with grid line with corresponding data wire;
Wherein, described many data wire/grid lines comprise that first signal transmission line and length are greater than the secondary signal transmission line of the length of secondary signal transmission line, the area of section of described secondary signal transmission line is greater than the area of section of described first signal transmission line, makes the different first signal transmission line of area of section and the first transmission time delay difference between the secondary signal transmission line be less than first signal transmission line that area of section is identical and the second transmission time delay difference between the secondary signal transmission line.
At this, at first should be noted that the implication that " described many data wire/grid lines comprise that first signal transmission line and length are greater than the secondary signal transmission line of the length of secondary signal transmission line " show is to say in data wire/grid line the data wire/grid line that exists length different.
In the described array base palte of the embodiment of the present invention, when having the different signal transmssion line of length, difference according to the two length, the area of section of the signal transmssion line that the length that control generates in manufacturing process is different, the area of section of longer signal transmssion line is larger, so its impedance effect is corresponding reduces, and therefore can make up due to the long time delay of bringing of its length, reduce the delay inequality between the unlike signal transmission line, improved display performance.
In specific embodiments of the invention, the different reason of length that forms different pieces of information line/grid line differs, below first with regard to two kinds of situations, illustrate as follows.
In Fig. 2 a-2c, wherein signal transmssion line vertical distribution, and along continuous straight runs is arranged in parallel, and can find, because the shape of display base plate is not the length difference that rectangle will cause signal transmssion line.
Fig. 3 is another kind of situation.
As shown in Figure 3, can find, flexible base, board 6 wherein is rectangular, but because signal transmssion line (comprising data wire 2 and grid line 3 in Fig. 3) is not equal to 90 degree (that is to say the side arranged askew with respect to flexible base, board) with respect to the angle of any one side of described flexible base, board 6, although so array base palte regular shape, but with respect to the flexible base, board arranged askew, now just there will be the different situation of length of signal transmssion line due to signal transmssion line.
Being understandable that, is the structural relation of having simplified thin-film transistor and data wire, grid line in the embodiment of the present invention; Ordinary circumstance: the grid of thin-film transistor is connected with grid line, and the source electrode of thin-film transistor (or drain electrode) is connected with data wire, and the drain electrode of thin-film transistor (or source electrode) is connected with the pixel electrode (not shown); Because drain electrode and the source electrode of thin-film transistor are basic identical in manufacture craft, can exchange nominally.
Front is mentioned, a key character of the embodiment of the present invention is: described many data wire/grid lines comprise that first signal transmission line and length are greater than the secondary signal transmission line of the length of first signal transmission line, and the area of section of described secondary signal transmission line is greater than the area of section of described first signal transmission line.
Above-mentioned feature is divided into multiple situation, is respectively described below.
<situation one >
When the length of data wire/grid line is different, the display performance of system determines by the maximum transmitted time delay, and when the area of section of data wire/grid line is identical, maximum delay is by the data wire/grid line of length maximum and the data wire of length minimum/grid line decision.
Therefore, in specific embodiments of the invention, in situation one, the time delay that only need to reduce data wire/grid line of growing most just can reduce the time delay between data wire/grid line.Therefore in specific embodiments of the invention, increases the area of section of the longest data wire/grid line, can reduce the time delay of data wire/grid line of growing most, so reduce the delay inequality between data wire/grid line.
This is described as follows.
Suppose and have 2m data lines/grid line, its length is respectively:
l；
l+Δ；
l+2Δ；
…
l+(2m-2)Δ、
l+(2m-1)Δ。
In the situation that area of section is identical, the delay inequality that adjacent data wire/grid line is corresponding is respectively:
T；
T；
……
T。
Between data wire/grid line that prior art middle section area is identical maximum delay poor be (2m-1) T.
And utilize the method for the embodiment of the present invention:
The delay inequality that adjacent data wire/grid line is corresponding is respectively:
T；
T；
……
T-ΔT。
, between data wire/grid line maximum delay poor be (2m-1) T-Δ T.
<situation two >
In situation one, suppose and have 2m data lines/grid line, its length is respectively:
l；
l+Δ；
l+2Δ；
…
l+(2m-2)Δ、
l+(2m-1)Δ。
In this case, in order to reduce time delay, by this 2m data lines/grid line, according to length, order from small to large is divided into the n group (n is for being greater than 2 the embodiment of the present invention, be less than the integer of 2m), wherein in first group data wire/grid line length is the shortest, and the data wire in last group/grid line length is the longest, but the area of section of the data wire/grid line in each group is identical.
Simultaneously, the area of section minimum of the data wire/grid line in first group, and the area of section maximum of the data wire/grid line in last group.
Under this situation, from the form of expression, every a few data lines/grid lines, its area of section strengthens.
<situation three >
In two kinds of above-mentioned situations, all there is data wire/grid line that area of section is identical, but in the most extreme situation, any two data wire/grid lines that length is different, the area of section of data wire/grid line that length is longer is greater than the area of section of the shorter data wire/grid line of length.
In this case, the area of section of supposing the first data lines/grid line is same as the prior art, according to length, order is from small to large arranged, and the delay inequality between any two data lines/grid line all can reduce, and between data wire/grid line, maximum delay is poor also can reduce.
This is described as follows.
Suppose and have 2m data lines/grid line, its length is respectively:
l；
l+Δ；
l+2Δ；
…
l+(2m-2)Δ、
l+(2m-1)Δ。
In the situation that area of section is identical, the delay inequality that adjacent data wire/grid line is corresponding is respectively:
T；
T；
……
T。
Between data wire/grid line maximum delay poor be (2m-1) T.
And utilize the method for the embodiment of the present invention:
The delay inequality that adjacent data wire/grid line is corresponding is respectively:
T-ΔT
1；
T-ΔT
2；
……
T-ΔT
2m-1。
, between data wire/grid line maximum delay poor be (2m-1) T-(Δ T
1+ Δ T
2+ ... + Δ T
2m-1).
In specific embodiments of the invention, different with the area of section of secondary signal transmission line in order to guarantee the first signal transmission line, can be in the following way:
Section thickness is identical, and the cross-sectional width of secondary signal transmission line is greater than the cross-sectional width of first signal transmission line; Perhaps
Cross-sectional width is identical, and the section thickness of secondary signal transmission line is greater than the section thickness of first signal transmission line; Perhaps
Cross-sectional width and highly all not identical, the product of the cross-sectional width of secondary signal transmission line and height is greater than the cross-sectional width of first signal transmission line and the product of height.
Take signal transmssion line as data wire be example: in the orientation of data wire, the area of section of data wire can be the first increases and then decreases that concerns of equal difference or geometric ratio;
Further, the relative diagonal of the area of section of data wire is symmetric arrays.Fig. 9 for example.
Certainly, consider the complexity of making, in actual manufacturing process, can preferentially adopt the second way.
In the specific embodiment of the invention, first the angle of signal transmssion line and described flexible base, board side is described as follows.
At first, in the specific embodiment of the invention, the scope of the angle of the side of definition signal transmission line and flexible base, board is [0,90 degree], and all take viewing area data wire and flexible base, board side, to be equivalent to straight line (or line segment) be example.
As shown in Fig. 4 a, suppose the side that a is flexible base, board, the angle of signal transmssion line b and a is defined as the Theta1 in Fig. 4 a, and in Fig. 4 b, the angle of signal transmssion line b and a is defined as the Theta2 in Fig. 4 b, and when a is vertical with b, the angle of a and b is orientated 90 degree as, and a is parallel with b or while overlapping, the angle of a and b is orientated 0 degree as.
In array base palte as shown in Figure 3, data wire and grid line are not equal to 90 degree with respect to the angle of any one side of described flexible base, board.That is to say, data wire 2/ grid line 3 all meets following relation with the angle Φ of any one side of flexible base, board: 0 °<Φ<90 °.
In a specific embodiment, in above-mentioned array base palte, data wire 2 and grid line 3 is mutually vertical, and the angle of a side of data wire and described flexible base, board at 30 degree between 60 degree.Consider on flexible base, board more pixel can be set, in a kind of implementation of optimum, the angle of a side of data wire and described flexible base, board is 45 degree.
The angular relationship of the etween the lines that the embodiment of the present invention is mentioned, length, the comparisons of quantity etc., be all to take in viewing area as example to describe.
In specific embodiments of the invention, the data wire/grid line of above-mentioned oblique setting is conducive to improve the bending property of substrate, in conjunction with Fig. 5, is described as follows.
As shown in Figure 5, suppose in Fig. 5, the signal transmssion line that 51 side perpendicular to flexible base, board that are prior art are arranged, and the secondary signal transmission line of the 52 oblique layouts of side with respect to flexible base, board that are the embodiment of the present invention, from figure, can find, because the length of secondary signal transmission line 52 is greater than the length of first signal transmission line 51, in substrate bending situation as shown in Figure 5, secondary signal transmission line 52 has the radius of curvature R larger than the radius of curvature R of first signal transmission line 51 12, that is to say, the degree of crook of secondary signal transmission line 52 is lower than the degree of crook of first signal transmission line 81.
According to geometrical principle, if secondary signal transmission line 52 is 45 degree with respect to the angle of a side of flexible base, board, 1.4 times of left and right of the radius of curvature of the radius of curvature of secondary signal transmission line 52 the chances are secondary signal transmission line 81.
Therefore, the embodiment of the present invention, by with respect to the oblique signalization transmission line of a side of flexible base, board, has reduced in substrate bending situation, and therefore the degree of crook of signal transmssion line has improved the bending property of substrate.
Certainly, identical with the first signal transmission line material of prior art with the secondary signal transmission line in the invention process, and act on identical (for example, all as data wire) for example is introduced, but not as limit.
Consider the symmetry of substrate, in specific embodiments of the invention, according to the orientation of described data wire/grid line, described data wire/grid line is divided into two parts;
According to the orientation of described data wire/grid line, wherein in the data wire/grid line of a part, the length of data wire formerly be less than after the length of data wire, in the data wire of another part, the length of data wire formerly be greater than after the length of data wire.
Take signal transmssion line in conjunction with Fig. 6 is described as follows as data wire.
As shown in Figure 6, in specific embodiments of the invention, according to the orientation of described data wire, the diagonal 63 of flexible base, board is divided into first 61 and second portion 62 by described data wire;
Wherein in the included data wire of first 61, orientation according to described data wire, the length of data wire formerly be less than after the length of data wire, in the included data wire of second portion 62, according to the orientation of described data wire, the length of data wire formerly be less than after the length of data wire.
That is to say that, in the orientation of data wire, the length of data wire first increases, after reduce, be symmetric arrays.
The embodiment of the present invention also provides a kind of flexible display device, comprises above-mentioned array base palte arbitrarily.Wherein, the structure of array base palte and operation principle, with above-mentioned embodiment, do not repeat them here.In addition, the structure of other parts of flexible display device can, with reference to prior art, be not described in detail this this paper.This flexible display device can be: crystal liquid substrate, Electronic Paper, LCD TV, liquid crystal display, DPF, mobile phone, panel computer etc. have product or the parts of any Presentation Function.
The embodiment of the present invention also provides a kind of electronic equipment, comprises above-mentioned flexible display device.
In order better to realize above-mentioned purpose, the embodiment of the present invention also provides a kind of manufacture method of array base palte, and described manufacture method comprises:
Form metal film layer;
Described metal film layer is carried out to etch processes, form many data wire/grid lines;
Wherein, described many data wire/grid lines comprise that first signal transmission line and length are greater than the secondary signal transmission line of the length of first signal transmission line, and the area of section of described secondary signal transmission line is greater than the area of section of described first signal transmission line.
In specific embodiments of the invention, any two data wire/grid lines that length is different, the area of section of data wire/grid line that length is longer is greater than the area of section of the shorter data wire/grid line of length.
In a manner mentioned above, shown in Fig. 6, take data wire as example, on the direction in Fig. 6 shown in arrow, the length of data wire first increases, after reduce, according to the technical scheme of the embodiment of the present invention, if in etching process, the width of every data wire is identical,, in the orientation of data wire, the thickness of data wire first increases, and then reduces.
In specific embodiments of the invention, the step of described formation metal film layer can be made by sputtering technology.
The manufacture method of above-mentioned array base palte, wherein, the step of described formation metal film layer as shown in Figure 7, specifically comprises:
Form a magnetic field 703 by magnetic stripe 705, in the orientation of data wire/grid line to be produced, the magnetic field intensity in described magnetic field 703 diminishes after first becoming greatly;
The plasma inert gas of utilization after by electric field acceleration clashes into target 701, clashes into atom 702 surface deposition at substrate 704 under the effect in described magnetic field and forms described metal film layer.
In the embodiment of the present invention, by the substrate back, oblique magnetic stripe 705 being set, its orientation is identical with the orientation of data wire to be formed, and by between magnetic stripe 705, forming magnetic field, in the position of high-intensity magnetic field, plasma density is high, and film forming thickness is high.The oblique setting of magnetic stripe 10 by by the substrate behind, so just can just in time correspond to the thickness rule on glass substrate, forms metal film thickness as shown in Figure 8.
As shown in Figure 8, for the generalized section of the metal film layer of formation after above-mentioned technical process, in the data wire orientation, can find, the thickness of the metal film layer 81 of formation first increases, and then reduces, and is symmetric arrays.
Wherein, the metal film layer that deposition forms, according to the orientation of data wire/grid line to be produced, be divided into two parts;
In the orientation of described data wire/grid line, wherein the thickness of a part of metal film layer increases gradually, and the thickness of another part metal film layer reduces gradually.
Certainly, should be understood that, above-mentioned data wire/grid line also can be realized by printing or other mode, be not specifically limited in the specific embodiment of the invention.
This regular corrugated film forming thickness, after etching completes, can realize effect as shown in Figure 9, wherein on long cabling, thicker thickness arranged, and thinner thickness arranged on short cabling, thereby realize the signal delay of homogeneous.
The above is the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the prerequisite that does not break away from principle of the present invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (13)
1. an array base palte, comprise flexible base, board and the array layer formed on described flexible base, board, it is characterized in that, described array layer comprises:
Many grid lines and many data wires, mutually intersect on described flexible base, board and form a plurality of sub-pixel area;
Be arranged at the thin-film transistor in described sub-pixel area, be connected with grid line with corresponding data wire;
Wherein, described many data wire/grid lines comprise that first signal transmission line and length are greater than the secondary signal transmission line of the length of first signal transmission line, the area of section of described secondary signal transmission line is greater than the area of section of described first signal transmission line, makes the different first signal transmission line of area of section and the first transmission time delay difference between the secondary signal transmission line be less than first signal transmission line that area of section is identical and the second transmission time delay difference between the secondary signal transmission line.
2. array base palte according to claim 1, is characterized in that, any two data wire/grid lines that length is different, and the area of section of data wire/grid line that length is longer is greater than the area of section of the shorter data wire/grid line of length.
3. array base palte according to claim 1 and 2, is characterized in that, described first signal transmission line is identical with the cross-sectional width of secondary signal transmission line, and the section thickness of secondary signal transmission line is greater than the section thickness of first signal transmission line.
4. array base palte according to claim 1 and 2, is characterized in that, described data wire and/or grid line are not equal to 90 degree with respect to the angle of any one side of described flexible base, board.
5. array base palte according to claim 4, is characterized in that, described data wire is mutually vertical with grid line, and the angle of a side of described data wire and described flexible base, board at 30 degree between 60 degree.
6. array base palte according to claim 5, is characterized in that, the angle of a side of described data wire and described flexible base, board is 45 degree.
7. array base palte according to claim 1 and 2 is characterized in that:
According to the orientation of described data wire/grid line, described data wire/grid line is divided into two parts by the diagonal of flexible base, board;
According to the orientation of described data wire/grid line, wherein in the data wire/grid line of a part, the length of data wire formerly be less than after the length of data wire, in the data wire of another part, the length of data wire formerly be greater than after the length of data wire.
8. a flexible display device, comprise the described array base palte of any one in claim 1-7.
9. an electronic equipment, comprise flexible display device claimed in claim 8.
10. the manufacture method of an array base palte, is characterized in that, described manufacture method comprises:
Form metal film layer;
Described metal film layer is carried out to etch processes, form many data wire/grid lines;
Wherein, described many data wire/grid lines comprise that first signal transmission line and length are greater than the secondary signal transmission line of the length of first signal transmission line, the area of section of described secondary signal transmission line is greater than the area of section of described first signal transmission line, makes the different first signal transmission line of area of section and the first transmission time delay difference between the secondary signal transmission line be less than first signal transmission line that area of section is identical and the second transmission time delay difference between the secondary signal transmission line.
11. the manufacture method of array base palte according to claim 10, is characterized in that, any two data wire/grid lines that length is different, and the area of section of data wire/grid line that length is longer is greater than the area of section of the shorter data wire/grid line of length.
12. the manufacture method according to claim 10 or 11 described array base paltes, is characterized in that, the step of described formation metal film layer is made by sputtering technology.
13. the manufacture method of array base palte according to claim 12, is characterized in that, the step of described formation metal film layer specifically comprises:
Form a magnetic field, in the orientation of data wire/grid line to be produced, the magnetic field intensity in described magnetic field diminishes after first becoming greatly;
The plasma inert gas of utilization after by electric field acceleration clashes into target, clashes into atom and deposit the described metal film layer of formation under the effect in described magnetic field;
Wherein, the metal film layer that deposition forms under the effect in described magnetic field, according to the orientation of data wire/grid line to be produced, be divided into two parts;
In the orientation of described data wire/grid line, wherein the thickness of a part of metal film layer increases gradually, and the thickness of another part metal film layer reduces gradually.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310398061.3A CN103456743B (en) | 2013-09-04 | 2013-09-04 | Array base palte and preparation method thereof, flexible display device and electronic equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310398061.3A CN103456743B (en) | 2013-09-04 | 2013-09-04 | Array base palte and preparation method thereof, flexible display device and electronic equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103456743A true CN103456743A (en) | 2013-12-18 |
| CN103456743B CN103456743B (en) | 2016-11-23 |
Family
ID=49738942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310398061.3A Active CN103456743B (en) | 2013-09-04 | 2013-09-04 | Array base palte and preparation method thereof, flexible display device and electronic equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103456743B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103926774A (en) * | 2014-04-02 | 2014-07-16 | 京东方科技集团股份有限公司 | Array substrate, flexible display device and electronic equipment |
| CN104090439A (en) * | 2014-06-27 | 2014-10-08 | 京东方科技集团股份有限公司 | Array substrate, driving method of array substrate, flexible display device and electronic device |
| WO2015032198A1 (en) * | 2013-09-04 | 2015-03-12 | 京东方科技集团股份有限公司 | Array substrate and manufacturing method therefor, flexible display, and electronic device |
| CN106711180A (en) * | 2016-12-29 | 2017-05-24 | 上海天马有机发光显示技术有限公司 | Display panel, display device and display panel manufacture method |
| CN108474987A (en) * | 2017-04-21 | 2018-08-31 | 深圳市柔宇科技有限公司 | TFT array substrate, display panel and display device |
| CN111653591A (en) * | 2020-06-09 | 2020-09-11 | 合肥京东方卓印科技有限公司 | Display substrate and display device |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1584956A (en) * | 2004-06-07 | 2005-02-23 | 友达光电股份有限公司 | Organic Light Emitting Diode Display Panel Provides Uniform Height |
| CN1658279A (en) * | 2004-01-09 | 2005-08-24 | 三星电子株式会社 | display device |
| CN1739056A (en) * | 2003-01-15 | 2006-02-22 | 皇家飞利浦电子股份有限公司 | Device comprising an array of electronic elements, based on diagonal line routing |
| JP2006119590A (en) * | 2004-09-24 | 2006-05-11 | Seiko Epson Corp | ELECTRO-OPTICAL DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC DEVICE |
| JP2009069768A (en) * | 2007-09-18 | 2009-04-02 | Toshiba Matsushita Display Technology Co Ltd | Liquid crystal display device |
| JP2012133302A (en) * | 2010-12-17 | 2012-07-12 | Samsung Mobile Display Co Ltd | Display device and organic light-emitting display device |
| CN203445121U (en) * | 2013-09-04 | 2014-02-19 | 京东方科技集团股份有限公司 | Array substrate, flexible display device and electronic device |
-
2013
- 2013-09-04 CN CN201310398061.3A patent/CN103456743B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1739056A (en) * | 2003-01-15 | 2006-02-22 | 皇家飞利浦电子股份有限公司 | Device comprising an array of electronic elements, based on diagonal line routing |
| CN1658279A (en) * | 2004-01-09 | 2005-08-24 | 三星电子株式会社 | display device |
| CN1584956A (en) * | 2004-06-07 | 2005-02-23 | 友达光电股份有限公司 | Organic Light Emitting Diode Display Panel Provides Uniform Height |
| JP2006119590A (en) * | 2004-09-24 | 2006-05-11 | Seiko Epson Corp | ELECTRO-OPTICAL DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC DEVICE |
| JP2009069768A (en) * | 2007-09-18 | 2009-04-02 | Toshiba Matsushita Display Technology Co Ltd | Liquid crystal display device |
| JP2012133302A (en) * | 2010-12-17 | 2012-07-12 | Samsung Mobile Display Co Ltd | Display device and organic light-emitting display device |
| CN203445121U (en) * | 2013-09-04 | 2014-02-19 | 京东方科技集团股份有限公司 | Array substrate, flexible display device and electronic device |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015032198A1 (en) * | 2013-09-04 | 2015-03-12 | 京东方科技集团股份有限公司 | Array substrate and manufacturing method therefor, flexible display, and electronic device |
| CN103926774A (en) * | 2014-04-02 | 2014-07-16 | 京东方科技集团股份有限公司 | Array substrate, flexible display device and electronic equipment |
| WO2015149478A1 (en) * | 2014-04-02 | 2015-10-08 | 京东方科技集团股份有限公司 | Array substrate, flexible display device and electronic device |
| US9570021B2 (en) | 2014-04-02 | 2017-02-14 | Boe Technology Group Co., Ltd. | Array substrate, flexible display device and electronic device |
| CN104090439A (en) * | 2014-06-27 | 2014-10-08 | 京东方科技集团股份有限公司 | Array substrate, driving method of array substrate, flexible display device and electronic device |
| CN104090439B (en) * | 2014-06-27 | 2017-08-08 | 京东方科技集团股份有限公司 | Array base palte and its driving method, flexible display device and electronic equipment |
| CN106711180A (en) * | 2016-12-29 | 2017-05-24 | 上海天马有机发光显示技术有限公司 | Display panel, display device and display panel manufacture method |
| US10418597B2 (en) | 2016-12-29 | 2019-09-17 | Shanghai Tianma AM-OLED Co., Ltd. | Display panel, display device, and fabrication method for display panel |
| CN106711180B (en) * | 2016-12-29 | 2019-09-27 | 上海天马有机发光显示技术有限公司 | Display panel, display device and display panel manufacturing method |
| CN108474987A (en) * | 2017-04-21 | 2018-08-31 | 深圳市柔宇科技有限公司 | TFT array substrate, display panel and display device |
| CN111653591A (en) * | 2020-06-09 | 2020-09-11 | 合肥京东方卓印科技有限公司 | Display substrate and display device |
| CN111653591B (en) * | 2020-06-09 | 2023-12-19 | 合肥京东方卓印科技有限公司 | Display substrate and display device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103456743B (en) | 2016-11-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103454821B (en) | A kind of array base palte, flexible display device and electronic equipment | |
| CN103926774B (en) | Array substrate, flexible display device and electronic equipment | |
| CN103456743A (en) | Array substrate, manufacturing method of array substrate, flexible display device and electronic device | |
| CN108711575B (en) | Display panel and display device | |
| CN103454822B (en) | Array base palte and driving method, flexible display device and electronic equipment | |
| CN107978293B (en) | A curved display panel and a manufacturing method of the curved display panel | |
| CN104380367A (en) | Display device | |
| WO2019128209A1 (en) | Touch panel, driving control method therefor and touch display device | |
| CN108646474A (en) | Array substrate, display panel and display device | |
| CN203519983U (en) | Array substrate, flexible display device and electronic device | |
| CN203445121U (en) | Array substrate, flexible display device and electronic device | |
| CN107742477B (en) | A flexible display substrate, flexible display panel and flexible display device | |
| CN105652531B (en) | Array substrate and planar conversion liquid crystal display panel | |
| CN102207656A (en) | Pixel array of fringe field switching liquid crystal display panel and driving method thereof | |
| CN110442259A (en) | Touch base plate and display panel | |
| CN114863860B (en) | Display panel and display device | |
| US9898116B2 (en) | Touch panel having multiple electrodes with reduced number of pins | |
| CN108807488A (en) | Display panel and display device | |
| CN106873225A (en) | Array base palte, display panel, display device and array base palte driving method | |
| CN108255350A (en) | Touch control display device | |
| CN111540297A (en) | Display panel and display device | |
| CN105117069A (en) | Array substrate, touch control display panel and touch control display device | |
| CN105259712A (en) | Curved liquid crystal panel, manufacturing method thereof and curved liquid crystal display device | |
| WO2022088077A1 (en) | Display module | |
| TW202022826A (en) | Pixel array substrate and method of driving the same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |