CN103411931B - Based on the long-range LIBS quantitative elementary analysis method that weighting multiline is demarcated - Google Patents
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Abstract
Description
技术领域technical field
本专利涉及一种激光光谱元素定量分析方法,尤其涉及一种基于加权多谱线标定的远程激光诱导击穿光谱(Laser-induced breakdown spectroscopy,简称LIBS)定量分析方法。This patent relates to a quantitative analysis method of laser spectral elements, in particular to a remote laser-induced breakdown spectroscopy (LIBS) quantitative analysis method based on weighted multispectral calibration.
背景技术Background technique
在一些测试人员无法接近的场合,如化学污染区域;岩壁、河谷、溶洞等地形复杂区域,进行物质化学元素组成及含量分析是一个难题,因为测试人员无法采集目标样本进行化学分析。在这种情况下,可利用远程激光诱导击穿光谱(LIBS)探测技术解决。In some places where testers cannot approach, such as chemically polluted areas; areas with complex terrain such as rock walls, river valleys, and caves, it is a difficult problem to analyze the chemical element composition and content of substances, because testers cannot collect target samples for chemical analysis. In this case, remote laser-induced breakdown spectroscopy (LIBS) detection technology can be used to solve the problem.
远程激光诱导击穿光谱(LIBS)探测技术是利用高能量脉冲激光,经过聚焦透镜聚焦到远程的目标表面,在聚焦点上获得瞬时高功率密度的激光脉冲,可使目标表面聚焦点烧蚀、蒸发和电离形成高温、高压、高电子密度的等离子体火花,辐射出包含原子和离子特征谱线的光谱,可用于探测物质的元素组成。Long-range laser-induced breakdown spectroscopy (LIBS) detection technology uses high-energy pulsed laser to focus on a remote target surface through a focusing lens, and obtains instantaneous high-power-density laser pulses at the focal point, which can ablate the focal point on the target surface, Evaporation and ionization form a high-temperature, high-pressure, high-electron-density plasma spark, which radiates a spectrum containing characteristic spectral lines of atoms and ions, which can be used to detect the elemental composition of substances.
远程LIBS探测技术的一个重要问题是如何准确分析目标组成元素的含量。由于测试人员无法接近目标,且没有目标元素组成的先验知识,使得定量分析成为一个难题。An important issue in remote LIBS detection technology is how to accurately analyze the content of target constituent elements. Quantitative analysis is a challenge due to the inaccessibility of the tester and the lack of prior knowledge of the elemental composition of the target.
为解决远程LIBS元素定量分析问题,本专利提出一种基于加权多谱线标定的远程LIBS元素定量分析方法。首先完成测试现场远距离目标LIBS光谱采集,在该过程中定性获得远距离待测目标的主要元素组成及待测元素多条谱线的谱线强度;第二步完成实验室样品定标,获得待测元素多条谱线强度与百分比含量之间的关系拟合方程;最后根据多谱线加权法定量计算待测元素的百分比含量。In order to solve the problem of remote LIBS element quantitative analysis, this patent proposes a remote LIBS element quantitative analysis method based on weighted multispectral calibration. First, complete the LIBS spectrum acquisition of the long-distance target at the test site. In this process, the main element composition of the long-distance target to be measured and the spectral line intensities of multiple spectral lines of the target to be measured are obtained qualitatively; the second step is to complete the calibration of the laboratory sample, and obtain The relationship fitting equation between the intensity of multiple spectral lines of the analyte and the percentage content; finally, the percentage content of the analyte is quantitatively calculated according to the multi-spectrum weighting method.
发明内容Contents of the invention
本专利的目的在于提供一种基于加权多谱线标定的远程LIBS元素定量分析方法,解决远程LIBS元素定量分析问题。The purpose of this patent is to provide a remote LIBS element quantitative analysis method based on weighted multispectral calibration, and solve the problem of remote LIBS element quantitative analysis.
本专利是这样来实现的,其方法步骤为:This patent is realized like this, and its method step is:
步骤一、完成测试现场远距离目标LIBS光谱采集Step 1. Complete the LIBS spectrum acquisition of the long-distance target at the test site
在测试现场架设远程LIBS测试设备,在远程LIBS测试设备与远距离目标之间的区域测试人员是无法进入的(例如化学污染区域,崖壁等险恶地理环境等)。利用远程LIBS测试设备获得远距离目标的LIBS光谱数据同时用测试设备上携带的激光测距仪测量远距离目标的距离L,为了提高可靠性并消除扰动,对激光脉冲诱导出的若干次LIBS光谱数据进行平均,获得远距离目标的平均LIBS光谱数据。根据平均LIBS光谱曲线,得到远距离目标的主要元素组成以及待测元素X若干条谱线对应的谱线强度。Set up remote LIBS test equipment at the test site, and testers cannot enter the area between the remote LIBS test equipment and the remote target (such as chemically polluted areas, dangerous geographical environments such as cliffs, etc.). Use the remote LIBS test equipment to obtain the LIBS spectrum data of the long-distance target and measure the distance L of the long-distance target with the laser rangefinder carried on the test equipment. In order to improve the reliability and eliminate the disturbance, several LIBS spectra induced by the laser pulse The data are averaged to obtain average LIBS spectral data for distant targets. According to the average LIBS spectral curve, the main element composition of the long-distance target and the spectral line intensity corresponding to several spectral lines of the analyte X are obtained.
步骤二、实验室样品标定Step 2. Calibration of laboratory samples
根据步骤一得到的远距离目标的主要元素组成,选择含有待测元素X及目标主要组成元素的若干种化合物,并将这若干种化合物以不同的比列配制若干个样品,用天平测出样品中各化合物的质量,根据分子式分别计算每个样品中元素X的百分比含量。According to the main element composition of the long-distance target obtained in step 1, select several compounds containing the element X to be measured and the main constituent elements of the target, and prepare several samples of these compounds in different ratios, and measure the samples with a balance According to the mass of each compound, calculate the percentage content of element X in each sample according to the molecular formula.
在实验室中,与测试现场一样的方式安装好远程LIBS测试设备,此时测试人员可在距离远程LIBS测试设备L远的位置上放置样品,对每个样品采集的多次LIBS光谱数据进行平均,分别获得元素X的与步骤一相同的若干条谱线的谱线强度。In the laboratory, the remote LIBS test equipment is installed in the same way as the test site. At this time, the tester can place the sample at a position far away from the remote LIBS test equipment L, and average the multiple LIBS spectral data collected by each sample. , obtain the spectral line intensities of the same several spectral lines of the element X as in step 1, respectively.
以谱线强度为纵坐标,元素X的百分比含量为横坐标,进行线性拟合,获得元素X若干条谱线的拟合直线方程。Take the spectral line intensity as the ordinate, and the percentage content of element X as the abscissa, and perform linear fitting to obtain the fitting linear equations of several spectral lines of element X.
步骤三、多谱线加权法定量计算待测元素X的百分比含量K。Step 3: Quantitatively calculate the percentage content K of the element X to be measured by the multispectral weighting method.
根据步骤一得到的元素X若干条谱线对应的谱线强度以及步骤二得到的这些谱线的拟合直线方程,可分别得到待测元素X的基于这些谱线所得的百分比含量。According to the spectral line intensities corresponding to several spectral lines of element X obtained in step 1 and the fitting linear equations of these spectral lines obtained in step 2, the percentage content of the element X to be measured based on these spectral lines can be obtained respectively.
这些基于元素X不同谱线所得的百分比含量的置信度与这些谱线的谱线强度的权重成正比,根据这些百分比含量的加权平均计算得到待测元素X的百分比含量K。The confidence of the percentage content obtained based on the different spectral lines of element X is proportional to the weight of the spectral line intensity of these spectral lines, and the percentage content K of the element X to be measured is calculated according to the weighted average of these percentage contents.
该方法在实验室条件下,在与现场测试目标相同的距离放置配制的定标样品,并且利用了待测元素的多条谱线进行标定,最后计算的时候依据每条谱线的光谱强度作为权重,利用加权多谱线标定得到待测元素的百分比含量,可解决远程LIBS元素定量分析的难题。In this method, under laboratory conditions, the prepared calibration sample is placed at the same distance as the field test target, and multiple spectral lines of the element to be measured are used for calibration, and the final calculation is based on the spectral intensity of each spectral line as Weight, using weighted multi-spectral calibration to obtain the percentage content of the element to be measured, which can solve the problem of remote LIBS element quantitative analysis.
附图说明Description of drawings
图1为本专利的原理图,图中:1——固体脉冲激光器;2——远程LIBS光电系统;3——光纤光谱仪;4——激光测距仪;5——测试现场;6——远距离目标;7——样品A;8——样品B;9——样品C;10——实验室。Figure 1 is the schematic diagram of this patent, in the figure: 1—solid-state pulsed laser; 2—remote LIBS photoelectric system; 3—fiber optic spectrometer; 4—laser range finder; 5—test site; 6— Long-distance target; 7—sample A; 8—sample B; 9—sample C; 10—laboratory.
具体实施方式Detailed ways
本专利的原理如图1所示,远程LIBS测试设备包括固体脉冲激光器1、远程LIBS光电系统2、光纤光谱仪3及激光测距仪4。The principle of this patent is shown in Figure 1. The remote LIBS test equipment includes a solid-state pulsed laser 1, a remote LIBS photoelectric system 2, a fiber optic spectrometer 3 and a laser rangefinder 4.
步骤一、完成测试现场远距离目标LIBS光谱采集Step 1. Complete the LIBS spectrum acquisition of the long-distance target at the test site
在测试现场5架设远程LIBS测试设备,在远程LIBS测试设备与远距离目标6之间的区域测试人员是无法进入的(例如化学污染区域,崖壁等险恶地理环境等)。固体脉冲激光器1发出的激光脉冲经远程LIBS光电系统2聚焦激发远距离目标6诱导形成LIBS光谱信号经远程LIBS光电系统2接收并保存在光纤光谱仪3中。同时用测试装置上携带的激光测距仪4测量远距离目标6离远程LIBS测试设备的距离L,为了提高可靠性并消除扰动,对激光脉冲诱导出的100次LIBS光谱数据进行平均,获得远距离目标6的平均LIBS光谱数据。根据平均LIBS光谱曲线,得到远距离目标6的主要元素组成以及待测元素X谱线I,II,III对应的谱线强度TI,TII,TIII。Remote LIBS test equipment is set up at the test site 5, and the area between the remote LIBS test equipment and the remote target 6 is inaccessible to test personnel (such as chemically polluted areas, dangerous geographical environments such as cliffs, etc.). The laser pulse emitted by the solid-state pulsed laser 1 is focused and excited by the remote LIBS photoelectric system 2 to excite the remote target 6 to induce the formation of LIBS spectrum signals, which are received by the remote LIBS photoelectric system 2 and stored in the fiber optic spectrometer 3 . At the same time, the distance L between the long-distance target 6 and the long-distance LIBS test equipment is measured by the laser rangefinder 4 carried on the test device. In order to improve reliability and eliminate disturbances, the 100 times of LIBS spectral data induced by laser pulses are averaged to obtain the distance L. Average LIBS spectral data at distance target 6. According to the average LIBS spectrum curve, the main element composition of the long-distance target 6 and the spectral line intensities T I , T II , T III corresponding to the X spectral lines I, II , and III of the analyte are obtained.
步骤二、实验室样品标定Step 2. Calibration of laboratory samples
根据步骤一得到的远距离目标6的主要元素组成,选择含有待测元素X及远距离目标6主要组成元素的三种化合物,并将这三种化合物以不同的比列配制三个样品A,B,C,用天平测出样品中各化合物的质量,根据分子式分别计算A,B,C中待测元素的百分比含量KA,KB,KC。According to the main element composition of the long-distance target 6 obtained in step 1, three compounds containing the element X to be measured and the main constituent elements of the long-distance target 6 are selected, and three samples A are prepared with these three compounds in different ratios, B, C, use a balance to measure the mass of each compound in the sample, and calculate the percentage content K A , K B , K C of the element to be measured in A , B , and C respectively according to the molecular formula.
在实验室10中,与测试现场5一样的方式安装好远程LIBS测试设备,此时测试人员可在距离远程LIBS测试设备L远的位置上放置样品A7。对样品A7采集的100次LIBS光谱数据进行平均,获得待测元素X谱线I,II,III的谱线强度TIA,TIIA,TIIIA。In the laboratory 10 , the remote LIBS testing equipment is installed in the same manner as the testing site 5 , and the tester can place the sample A7 at a position far from the remote LIBS testing equipment L at this time. The 100 LIBS spectral data collected for sample A7 were averaged to obtain the spectral line intensities T IA , T IIA , and T IIIA of X spectral lines I, II, and III of the analyte.
类似地,用同样的方法,对样品B8获得待测元素X谱线I,II,III的谱线强度TIB,TIIB,TIIIB;对样品C9获得待测元素X谱线I,II,III的谱线强度TIC,TIIC,TIIIC。Similarly, use the same method to obtain the spectral line intensity T IB of the analyte X spectral line I, II, III for the sample B8, T IIB , T IIIB ; obtain the analyte X spectral line I, II, for the sample C9 III's line intensities T IC , T IIC , T IIIC .
以谱线强度为纵坐标,待测元素X的百分比含量为横坐标,根据坐标点(KA,TIA),(KB,TIB),(KC,TIC)进行线性拟合,绘制待测元素X谱线I的拟合直线方程T(K)I;用类似的方法,得到待测元素X谱线II的拟合直线方程T(K)II及谱线III的拟合直线方程T(K)III。Take the spectral line intensity as the ordinate, and the percentage content of the element X to be measured as the abscissa, and perform linear fitting according to the coordinate points (K A , T IA ), (K B , T IB ), (K C , T IC ), Draw the fitting straight line equation T (K) I of analyte element X spectral line I; With similar method, obtain the fitting straight line equation T (K) II of analyte element X spectral line II and the fitting straight line of spectral line III Equation T(K) III .
步骤三、多谱线加权法定量计算待测元素X的百分比含量K。Step 3: Quantitatively calculate the percentage content K of the element X to be measured by the multispectral weighting method.
根据步骤一得到的TI以及步骤二得到的谱线I的拟合直线方程T(K)I,可得到待测元素X的基于谱线I所得的百分比含量KI。类似地,根据TII与T(K)II,可得到待测元素X的基于谱线II所得的百分比含量KII;根据TIII与T(K)III,可得到待测元素X的基于谱线III所得的百分比含量KIII。According to T I obtained in step 1 and the fitting line equation T(K) I of line I obtained in step 2, the percentage content K I of the analyte X based on line I can be obtained. Similarly, according to T II and T(K) II , the percentage content K II of the analyte X based on the spectral line II can be obtained; according to T III and T(K) III , the analyte X can be obtained based on the spectrum The percentage content K III obtained from line III.
KI,KII,KIII的置信度与三条谱线强度TI,TII,TIII的权重成正比,根据下式定量计算待测元素X的百分比含量K:The confidence of K I , K II , K III is proportional to the weight of the three spectral line intensities T I , T II , T III , and the percentage content K of the element X to be measured is quantitatively calculated according to the following formula:
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CN107340284B (en) * | 2017-07-06 | 2018-04-13 | 湖北工程学院 | A kind of quantitative elementary analysis method and device |
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CN108444981B (en) * | 2018-01-30 | 2020-06-26 | 中国科学院上海技术物理研究所 | Quantitative solution method of LIBS based on MART multiplicative reconstruction |
CN108414475B (en) * | 2018-01-30 | 2020-06-26 | 中国科学院上海技术物理研究所 | A LIBS Analysis Method Based on Simultaneous Iterative Reconstruction of Optical Tomography |
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