[go: up one dir, main page]

CN106841171A - The combined spectral detection method of detection is imported and exported for large and valuable kinds of goods - Google Patents

The combined spectral detection method of detection is imported and exported for large and valuable kinds of goods Download PDF

Info

Publication number
CN106841171A
CN106841171A CN201710010261.5A CN201710010261A CN106841171A CN 106841171 A CN106841171 A CN 106841171A CN 201710010261 A CN201710010261 A CN 201710010261A CN 106841171 A CN106841171 A CN 106841171A
Authority
CN
China
Prior art keywords
libs
mirror
raman
laser
goods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201710010261.5A
Other languages
Chinese (zh)
Other versions
CN106841171B (en
Inventor
万雄
王建宇
王泓鹏
袁汝俊
张铭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Institute of Technical Physics of CAS
Original Assignee
Shanghai Institute of Technical Physics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Institute of Technical Physics of CAS filed Critical Shanghai Institute of Technical Physics of CAS
Priority to CN201710010261.5A priority Critical patent/CN106841171B/en
Publication of CN106841171A publication Critical patent/CN106841171A/en
Application granted granted Critical
Publication of CN106841171B publication Critical patent/CN106841171B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/71Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
    • G01N21/718Laser microanalysis, i.e. with formation of sample plasma
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/07Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076X-ray fluorescence

Landscapes

  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

The invention discloses a kind of combined spectral detection method that detection is imported and exported for large and valuable kinds of goods, the method is realized on combined spectral detector.The whole machine of instrument of combined spectral detector includes master controller, user mutual display screen, integrated multipath voltage-stabilized power supply, LIBS subsystems, range finding subsystem, cassette telescope, XRF subsystems and BLR subsystems.Combined spectral detection method includes two steps of long-range LIBS Rough Inspections and short range integrated spectral accurate measurement.The beneficial effects of the invention are as follows it realizes being detected while weight element;By LIBS, XRF and BLR combination, detected while realizing atom with macromolecular structure, while BLR and LIBS multiplexing spectrum channels can save the nonmetalloids such as hardware resource, the measurable sulphur of spectrum analysis of LIBS covering near-infrared sections.This instrument and method can solve the problem of cross-border kinds of goods determinand element and molecular characterization identification and joint inspection, realize hazardous material Site Detection in the cross-border typical kinds of goods quick discriminating such as large, valuable and kinds of goods.

Description

用于大宗及贵重货品进出口检测的联合光谱检测方法Combined Spectral Detection Method for Import and Export Inspection of Bulk and Valuable Goods

技术领域technical field

本发明涉及一种激光光谱探测方法,尤其涉及一种采用原子分子联合检测的光谱检测方法,适用于大宗货物及贵重物品进出口现场无损,属于光电探测领域。The invention relates to a laser spectrum detection method, in particular to a spectrum detection method using combined detection of atoms and molecules, which is suitable for non-destructive on-site import and export of bulk goods and valuables, and belongs to the field of photoelectric detection.

背景技术Background technique

目前,在跨境货品的检测当中,对于大宗、贵重等典型货品的防伪报侦检以及有害元素现场无损检测缺乏有力的快速测量手段。防伪报侦检及有害物质检测涉及到元素与分子结构的联合检测识别,以及基本元素的较高精度全覆盖检测,需要综合多种测量分析手段及技术。At present, in the detection of cross-border goods, there is a lack of powerful and rapid measurement methods for the anti-counterfeiting inspection of typical goods such as bulk and valuables and the on-site non-destructive testing of harmful elements. Anti-counterfeiting detection and detection of harmful substances involves the joint detection and identification of elements and molecular structures, as well as the high-precision full-coverage detection of basic elements, which requires a combination of various measurement and analysis methods and technologies.

在可选择的检测技术当中,激光诱导击穿光谱(简称LIBS)是一种典型的物质元素探测方法,已在各领域的元素检测中得到应用。它的特点是可进行轻元素及非金属元素的检测,缺点是受化学基质效应的影响,定量分析的精度不太高。激光拉曼技术尤其是双波长激光拉曼(Bi-wavelength laser Raman,简称BLR)技术可有效地去除荧光基底的影响,特别适合高分子化合物的分子结构测定。X射线荧光光谱(简称XRF)技术是一种可精确测量元素尤其是重元素的技术,特别适合贵重商品的元素含量测定。Among the optional detection techniques, laser-induced breakdown spectroscopy (abbreviated as LIBS) is a typical detection method for material elements, which has been applied in various fields of element detection. Its characteristic is that it can detect light elements and non-metallic elements. The disadvantage is that it is affected by the chemical matrix effect, and the accuracy of quantitative analysis is not very high. Laser Raman technology, especially bi-wavelength laser Raman (BLR for short) technology can effectively remove the influence of fluorescent substrates, and is especially suitable for molecular structure determination of polymer compounds. X-ray fluorescence spectroscopy (XRF for short) technology is a technology that can accurately measure elements, especially heavy elements, and is especially suitable for the determination of elemental content of valuable commodities.

本发明针对跨境货物防伪报侦检及有害物质检测的需求,提出一种联合光谱检测仪器及方法,将LIBS与XRF联用,实现轻重元素的同时检测;将LIBS、XRF与BLR联用,实现原子与高分子结构的同时检测,可解决跨境货品待测物元素和分子结构特征识别和联检的难题,实现大宗、贵重等跨境典型货品快速鉴别和货品中危害物现场检测。Aiming at the needs of cross-border cargo anti-counterfeiting inspection and detection of harmful substances, the present invention proposes a combined spectrum detection instrument and method, combining LIBS and XRF to realize simultaneous detection of light and heavy elements; combining LIBS, XRF and BLR, Simultaneous detection of atomic and polymer structures can solve the problem of identification and joint inspection of elements and molecular structure features of cross-border goods, and realize rapid identification of bulk and valuable cross-border typical goods and on-site detection of hazardous substances in goods.

发明内容Contents of the invention

本发明的目的在于提供一种联合光谱检测方法,实现轻重元素以及原子与高分子的同步检测,用以解决海关口岸大宗货物的防伪报及贵重物品的快速检测难题。The purpose of the present invention is to provide a combined spectral detection method to realize the synchronous detection of light and heavy elements, atoms and polymers, so as to solve the problem of anti-counterfeiting of bulk cargo and rapid detection of valuables at customs ports.

本发明是这样来实现的:The present invention is achieved like this:

大宗及贵重货品进出口检测的联合光谱仪的仪器整机主要包括主控制器、用户交互显示屏、集成多路稳压电源、LIBS子系统、测距子系统、卡式望远镜、XRF子系统及BLR子系统。The instrument of the combined spectrometer for the import and export detection of bulk and valuable goods mainly includes the main controller, user interactive display screen, integrated multi-channel regulated power supply, LIBS subsystem, ranging subsystem, cassette telescope, XRF subsystem and BLR subsystem.

其中,LIBS子系统由LIBS信号采集镜、尾纤、LIBS双色镜、LIBS扩束镜、时序控制器、LIBS激光器及四通道光谱仪组成;测距子系统由测距激光器、测距扩束镜、半反镜及测距多色镜组成;卡式望远镜由主镜、次镜及次镜驱动机构组成;XRF子系统由X射线管、X射线聚焦镜、采集通道、X射线探测器、前置放大器及频谱分析器组成;BLR子系统由808nm拉曼激光器、785nm拉曼激光器、785nm拉曼探头、808nm拉曼探头、双波长拉曼反射镜、拉曼透镜、785nm拉曼接收光纤、808nm拉曼接收光纤、785nm拉曼发射光纤、808nm拉曼发射光纤及光纤合束器组成,BLR子系统复用四通道光谱仪的第4通道;Among them, the LIBS subsystem consists of LIBS signal acquisition mirror, pigtail, LIBS dichroic mirror, LIBS beam expander, timing controller, LIBS laser and four-channel spectrometer; the ranging subsystem consists of ranging laser, ranging beam expander, Composed of a half mirror and a range-finding polychromatic mirror; the cassette telescope is composed of a primary mirror, a secondary mirror and a secondary mirror drive mechanism; the XRF subsystem consists of an X-ray tube, an X-ray focusing mirror, an acquisition channel, an X-ray detector, a front Amplifier and spectrum analyzer; BLR subsystem consists of 808nm Raman laser, 785nm Raman laser, 785nm Raman probe, 808nm Raman probe, dual-wavelength Raman mirror, Raman lens, 785nm Raman receiving fiber, 808nm Raman Composed of Mann receiving fiber, 785nm Raman emitting fiber, 808nm Raman emitting fiber and fiber combiner, the BLR subsystem multiplexes the fourth channel of the four-channel spectrometer;

集成多路稳压电源含有可充电的锂电池,具有交直流二种工作方式,直流工作方式下无需外接市电,由内部锂电池进行多路集中供电;交流工作方式下可连接市电接口,用于对内部锂电池充电,同时由集成多路稳压电源提供多路集中供电;The integrated multi-channel regulated power supply contains a rechargeable lithium battery, and has two working modes of AC and DC. In the DC working mode, no external mains power is needed, and the internal lithium battery provides multiple centralized power supplies; in the AC working mode, it can be connected to the mains interface. It is used to charge the internal lithium battery, and the integrated multi-channel regulated power supply provides multiple centralized power supplies;

集成多路稳压电源的多路供电即为提供主控制器、用户交互显示屏、LIBS激光器、测距激光器、808nm拉曼激光器、785nm拉曼激光器及X射线管的工作电压;The multi-channel power supply integrated with multi-channel regulated power supply is to provide the working voltage of the main controller, user interactive display screen, LIBS laser, ranging laser, 808nm Raman laser, 785nm Raman laser and X-ray tube;

主控制器内有主控软件,用于对用户交互显示屏、时序控制器、测距激光器、808nm拉曼激光器、785nm拉曼激光器、X射线管及次镜驱动机构进行控制;通过接口对四通道光谱仪进行供电与接收及分析其输出光谱信号;接收并分析测距传感器与频谱分析器的输出数据;接收用户交互显示屏传送过来的用户指令及返回用户所需要的数据及图表等测试结果;There is main control software in the main controller, which is used to control the user interactive display screen, timing controller, ranging laser, 808nm Raman laser, 785nm Raman laser, X-ray tube and secondary mirror drive mechanism; The channel spectrometer supplies power and receives and analyzes its output spectral signal; receives and analyzes the output data of the ranging sensor and spectrum analyzer; receives user instructions transmitted from the user interactive display screen and returns the test results such as data and charts required by the user;

主光轴、LIBS光轴、测距光轴、测距次光轴、XRF发射光轴及XRF接收光轴均位于同一平面内;LIBS光轴与测距光轴两者平行,且垂直于主光轴;测距次光轴与测距光轴垂直,即与主光轴平行;XRF发射光轴及XRF接收光轴关于主光轴对称分布;The main optical axis, LIBS optical axis, ranging optical axis, ranging optical axis, XRF emitting optical axis and XRF receiving optical axis are all located in the same plane; LIBS optical axis and ranging optical axis are parallel and perpendicular to the main optical axis Optical axis; the ranging secondary optical axis is perpendicular to the ranging optical axis, that is, parallel to the main optical axis; the XRF emitting optical axis and XRF receiving optical axis are symmetrically distributed about the main optical axis;

卡式望远镜的主镜固定不动,次镜可在次镜驱动机构的带动下沿主光轴移动,其移动范围为有限距离,当次镜移动到与主镜的距离最近时,卡式望远镜的焦距最长,此时LIBS激光器发射出的激光经卡式望远镜聚焦会聚于远程测试点;反之,当次镜移动到与主镜的距离最远时,卡式望远镜的焦距最短,此时LIBS激光器发射出的激光经卡式望远镜聚焦会聚于近程测试点;近程测试点至远程测试点为LIBS测试范围,在该范围内,由测距子系统辅助实现LIBS自聚焦功能;XRF及BLR均为近程测试,即其测试点为近程测试点,也即LIBS、XRF、BLR近程测试均在同一目标点;近程测试点位置安装有近程测试点限位挡板,当货品测试对象贴合该挡板时,货品测试对象限位于近程测试点的位置,满足LIBS、XRF、BLR近程测试的要求;The primary mirror of the clip-on telescope is fixed, and the secondary mirror can move along the main optical axis driven by the driving mechanism of the secondary mirror. The focal length of the telescope is the longest, at this time the laser emitted by the LIBS laser is focused on the remote test point by the cassette telescope; on the contrary, when the secondary mirror moves to the farthest distance from the primary mirror, the focal length of the cassette telescope is the shortest, at this time LIBS The laser emitted by the laser is focused and converged on the short-range test point by the card-type telescope; the short-range test point to the long-range test point is the LIBS test range, and within this range, the ranging subsystem is assisted to realize the LIBS self-focusing function; XRF and BLR Both are short-range tests, that is, the test points are short-range test points, that is, LIBS, XRF, and BLR short-range tests are all at the same target point; the short-range test point is installed with a short-range test point limit baffle, when the goods When the test object fits the baffle, the product test object is limited to the position of the short-range test point, which meets the requirements of LIBS, XRF, and BLR short-range tests;

仪器整机正对主光轴的位置开有测试窗口,可使LIBS、XRF及BLR的发射光束及回波信号自由进出仪器整机;There is a test window at the position of the whole instrument facing the main optical axis, so that the emitted beams and echo signals of LIBS, XRF and BLR can freely enter and exit the whole instrument;

大宗及贵重货品进出口检测的联合光谱仪按以下步骤工作:The combined spectrometer for the import and export detection of bulk and valuable goods works in the following steps:

(1)远程LIBS粗检(1) Remote LIBS coarse inspection

主控制器发出控制指令启动测距激光器,测距激光器发出的连续激光沿测距光轴行进,通过测距扩束镜扩束,透过半反镜,经测距多色镜反射后沿主光轴方向穿进卡式望远镜的主镜的中心孔,经次镜反射,再由主镜反射并聚焦至远距离的货品测试对象,由于卡式望远镜的焦距与货品距离不匹配,因此此时为散焦状态。货品测试对象的后向散射回波沿主光轴反向行进,首先由主镜反射,再经次镜反射,穿出中心孔,经测距多色镜反射后沿测距光轴行进,再经半反镜反射后沿测距次光轴行进,由测距传感器接收,测距传感器的传感信号传送至主控制器进行分析,得出回波强度值。主控制器发出指令启动次镜驱动机构带动次镜沿主光轴连续移动,改变卡式望远镜的焦距,不断测试回波强度值,当回波强度达到峰值时,主控制器发出指令关闭次镜驱动机构,使次镜停止运动,此时达到精确聚焦状态;The main controller issues a control command to start the ranging laser, and the continuous laser light emitted by the ranging laser travels along the ranging optical axis, expands the beam through the ranging beam expander, passes through the half mirror, is reflected by the ranging polychromatic mirror, and then follows the main beam. The axial direction penetrates into the center hole of the primary mirror of the clip-on telescope, is reflected by the secondary mirror, and then reflected by the primary mirror and focused on the long-distance cargo test object. Since the focal length of the cassette telescope does not match the distance of the cargo, it is Defocus state. The backscattered echo of the goods test object travels in the opposite direction along the main optical axis. It is first reflected by the primary mirror, then reflected by the secondary mirror, passes through the center hole, and travels along the distance measuring optical axis after being reflected by the distance measuring polychromatic mirror. After being reflected by the half-mirror, it travels along the secondary optical axis of distance measurement, and is received by the distance measurement sensor. The sensing signal of the distance measurement sensor is sent to the main controller for analysis, and the echo intensity value is obtained. The main controller sends an instruction to start the secondary mirror driving mechanism to drive the secondary mirror to move continuously along the main optical axis, change the focal length of the cassette telescope, and continuously test the echo intensity value. When the echo intensity reaches the peak value, the main controller sends an instruction to close the secondary mirror. The driving mechanism stops the movement of the secondary mirror and achieves a precise focusing state at this time;

在精确聚焦状态下,主控制器设定时序控制器的延迟时间d,并由时序控制器首先启动LIBS激光器,然后在延迟d之后,启动四通道光谱仪曝光接收LIBS的回波信号;其工作过程为:In the state of precise focusing, the main controller sets the delay time d of the timing controller, and the timing controller first starts the LIBS laser, and then starts the four-channel spectrometer to expose and receive the echo signal of LIBS after the delay d; its working process for:

LIBS激光器发出的脉冲激光沿LIBS光轴行进,通过LIBS扩束镜扩束,再经LIBS双色镜反射后沿主光轴行进,透过测距多色镜后穿进卡式望远镜的主镜的中心孔,经次镜反射,再由主镜反射并聚焦至远距离的货品测试对象,货品测试对象被激发产生的LIBS信号沿主光轴反向行进,首先由主镜反射,再经次镜反射,穿出中心孔,透过测距多色镜后由LIBS信号采集镜收集,通过尾纤进入四通道光谱仪,经过光栅分光,光电转换后的光谱数据送入主控制器进行存储分析;The pulsed laser emitted by the LIBS laser travels along the LIBS optical axis, expands the beam through the LIBS beam expander, and then travels along the main optical axis after being reflected by the LIBS dichroic mirror. The central hole is reflected by the secondary mirror, and then reflected by the primary mirror and focused to the long-distance cargo test object. The LIBS signal generated by the cargo test object travels in the opposite direction along the main optical axis, first reflected by the primary mirror, and then passed by the secondary mirror. Reflected, passed through the central hole, passed through the distance measuring polychromatic mirror, collected by the LIBS signal acquisition mirror, entered the four-channel spectrometer through the pigtail, passed through the grating, and the photoelectrically converted spectral data was sent to the main controller for storage and analysis;

主控制器的LIBS物质分析软件程序对采集的远程LIBS光谱数据进行分析,得出货品测试对象的物质元素组成,及含量的粗检值,如果认为无问题,就可放行货物;反之,如果判断可疑则进入下一步近程精测;The LIBS material analysis software program of the main controller analyzes the collected remote LIBS spectral data, and obtains the material element composition of the test object of the goods and the rough inspection value of the content. If it is considered to be no problem, the goods can be released; otherwise, if it is judged If it is suspicious, enter the next step of short-range precise measurement;

(2)近程综合光谱精测(2) Short-range comprehensive spectrum precision measurement

将大宗及贵重货品进出口检测的联合光谱仪移近货品测试对象,使货品测试对象贴合近程测试点限位挡板,主控制器发出指令启动次镜驱动机构带动次镜沿主光轴移至主镜与次镜距离最远的位置,此时,卡式望远镜的焦距最短,LIBS激光器发射出的激光经卡式望远镜聚焦将会聚于近程测试点;Move the combined spectrometer for import and export detection of bulk and valuable goods closer to the goods test object, so that the goods test object fits the limit baffle of the short-range test point, and the main controller sends an instruction to start the secondary mirror driving mechanism to drive the secondary mirror to move along the main optical axis To the position where the distance between the primary mirror and the secondary mirror is the farthest, at this time, the focal length of the clip-on telescope is the shortest, and the laser emitted by the LIBS laser will be focused on the short-range test point through the clip-on telescope;

主控制器发出指令由时序控制器首先启动LIBS激光器,然后在延迟d之后,启动四通道光谱仪曝光接收LIBS的回波信号;The main controller sends an instruction, and the timing controller first starts the LIBS laser, and then after a delay d, starts the four-channel spectrometer to expose and receive the echo signal of LIBS;

主控制器的LIBS物质分析软件程序对采集的近程LIBS光谱数据进行分析,得出货品测试对象的包括轻、重元素、非金属、金属元素在内的元素组成,以及各元素的含量值;The LIBS material analysis software program of the main controller analyzes the collected short-range LIBS spectral data, and obtains the element composition of the goods test object, including light, heavy elements, non-metallic elements, and metal elements, as well as the content value of each element;

主控制器发出指令启动X射线管,X射线管发出的X射线沿XRF发射光轴行进,经X射线聚焦镜聚焦至近程测试点,货品测试对象产生的X射线荧光信号沿XRF接收光轴行进,经采集通道后被X射线探测器接收,再经前置放大器放大,进入频谱分析器分析,XRF光谱数据送入主控制器进行存储分析;The main controller sends an instruction to start the X-ray tube. The X-rays emitted by the X-ray tube travel along the XRF emission optical axis, and are focused to the short-range test point by the X-ray focusing mirror. The X-ray fluorescence signal generated by the goods test object travels along the XRF reception optical axis. , after being received by the X-ray detector through the acquisition channel, and then amplified by the preamplifier, it enters the spectrum analyzer for analysis, and the XRF spectrum data is sent to the main controller for storage and analysis;

主控制器的XRF物质分析软件程序对采集的近程XRF光谱数据进行分析,得出货品测试对象的重元素的组成及精确含量,并将元素组成及含量结果与LIBS近程检测结果进行综合,得到轻重元素的组成及含量,可对大宗货物和贵重货品进行组成含量测定,进行防伪报检测并建立相应的数据库;The XRF material analysis software program of the main controller analyzes the collected short-range XRF spectral data, obtains the composition and precise content of the heavy elements of the goods test object, and integrates the element composition and content results with the LIBS short-range detection results, Obtain the composition and content of light and heavy elements, measure the composition and content of bulk goods and valuable goods, carry out anti-counterfeiting detection and establish a corresponding database;

主控制器发出指令启动785nm拉曼激光器,785nm拉曼激光器发射出的785nm连续激光经785nm拉曼发射光纤进入785nm拉曼探头,经过其内部的785nm干涉滤光片形成窄线宽激光射出,经双波长拉曼反射镜反射后沿主光轴行进,经拉曼透镜会聚至近程测试点,货品测试对象产生的后向拉曼散射信号沿主光轴反向行进,透过拉曼透镜后进入785nm拉曼探头,经过其内部的785nm瑞利滤光片后进入785nm拉曼接收光纤,再通过光纤合束器后,进入四通道光谱仪的第4通道,经过光栅分光,光电转换后的785nm拉曼光谱数据送入主控制器进行存储分析;The main controller issues an instruction to start the 785nm Raman laser. The 785nm continuous laser emitted by the 785nm Raman laser enters the 785nm Raman probe through the 785nm Raman emitting fiber, and passes through its internal 785nm interference filter to form a narrow linewidth laser. After being reflected by the dual-wavelength Raman mirror, it travels along the main optical axis and converges to the short-range test point through the Raman lens. The 785nm Raman probe enters the 785nm Raman receiving fiber after passing through its internal 785nm Rayleigh filter, and then enters the fourth channel of the four-channel spectrometer after passing through the fiber combiner. The Mann spectral data is sent to the main controller for storage and analysis;

主控制器发出指令启动808nm拉曼激光器,808nm拉曼激光器发射出的808nm连续激光经808nm拉曼发射光纤进入808nm拉曼探头,经过其内部的808nm干涉滤光片形成窄线宽激光射出,经双波长拉曼反射镜反射后沿主光轴行进,经拉曼透镜会聚至近程测试点,货品测试对象产生的后向拉曼散射信号沿主光轴反向行进,透过拉曼透镜后进入808nm拉曼探头,经过其内部的808nm瑞利滤光片后进入808nm拉曼接收光纤,再通过光纤合束器后,进入四通道光谱仪的第4通道,经过光栅分光,光电转换后的808nm拉曼光谱数据送入主控制器进行存储分析;The main controller sends an instruction to start the 808nm Raman laser, and the 808nm continuous laser emitted by the 808nm Raman laser enters the 808nm Raman probe through the 808nm Raman emitting fiber, and passes through its internal 808nm interference filter to form a narrow linewidth laser. After being reflected by the dual-wavelength Raman mirror, it travels along the main optical axis and converges to the short-range test point through the Raman lens. The 808nm Raman probe enters the 808nm Raman receiving fiber after passing through its internal 808nm Rayleigh filter, and then enters the fourth channel of the four-channel spectrometer after passing through the fiber combiner. The Mann spectral data is sent to the main controller for storage and analysis;

主控制器的BLR物质分析软件程序对采集的近程785nm及808nm拉曼光谱数据进行分析,通过差分的方法去除荧光干扰,根据双波长拉曼频移量及强度,得出货品测试对象的高分子组成及含量,可进行有毒有害物分析。The BLR material analysis software program of the main controller analyzes the collected short-range 785nm and 808nm Raman spectral data, removes the fluorescence interference through the differential method, and obtains the high Molecular composition and content can be analyzed for toxic and harmful substances.

本发明的有益效果是,提供了一种联合光谱检测仪器及方法,将LIBS与XRF联用,实现轻重元素的同时检测;将LIBS、XRF与BLR联用,实现原子与高分子结构的同时检测,同时BLR与LIBS复用光谱通道可节省硬件资源,LIBS覆盖近红外段的光谱分析可测量硫等非金属元素。本仪器及方法可解决跨境货品待测物元素和分子结构特征识别和联检的难题,实现大宗、贵重等跨境典型货品快速鉴别和货品中危害物现场检测。The beneficial effect of the present invention is that it provides a combined spectrum detection instrument and method, combining LIBS and XRF to realize simultaneous detection of light and heavy elements; combining LIBS, XRF and BLR to realize simultaneous detection of atomic and polymer structures At the same time, BLR and LIBS multiplexing spectral channels can save hardware resources, and the spectral analysis of LIBS covering the near-infrared range can measure non-metallic elements such as sulfur. The instrument and method can solve the problem of identification and joint inspection of elements and molecular structure characteristics of cross-border goods to be tested, and realize rapid identification of bulk and valuable cross-border typical goods and on-site detection of hazardous substances in goods.

附图说明Description of drawings

图1为本发明设计的大宗及贵重货品进出口检测的联合光谱仪结构示意图,图中:1——仪器整机;2——四通道光谱仪;3——LIBS信号采集镜;4——主光轴;5——LIBS双色镜;6——LIBS扩束镜;7——LIBS光轴;8——LIBS激光器;9——测距激光器;10——测距光轴;11——测距扩束镜;12—半反镜;13——测距多色镜;14——光纤合束器;15——测距传感器;16——测距次光轴;17——主镜;18——808nm拉曼激光器;19——785nm拉曼激光器;20——中心孔;21——785nm拉曼探头;22——808nm拉曼探头;23——次镜;24——双波长拉曼反射镜;25——X射线管;26——X射线聚焦镜;27——XRF发射光轴;28——近程测试点;29——XRF接收光轴;30——远程测试点;31——测试窗口;32——采集通道;33——拉曼透镜;34——X射线探测器;35——前置放大器;36——频谱分析器;37——次镜驱动机构;38——主控制器;39——时序控制器;40——用户交互显示屏;41——集成多路稳压电源;42——市电接口;43——第4通道;44——785nm拉曼接收光纤;45——808nm拉曼接收光纤;46——785nm拉曼发射光纤;47——808nm拉曼发射光纤;48——尾纤;49——近程测试点限位挡板。Fig. 1 is the structural schematic diagram of the combined spectrometer designed for the import and export detection of bulk and valuable goods in the present invention, in the figure: 1—the complete instrument; 2—four-channel spectrometer; 3—LIBS signal collecting mirror; 4—main light Axis; 5—LIBS dichroic mirror; 6—LIBS beam expander; 7—LIBS optical axis; 8—LIBS laser; 9—range laser; 10—distance optical axis; 11—distance Beam expander; 12—half mirror; 13—ranging polychromatic mirror; 14—fiber beam combiner; 15—ranging sensor; 16—distance measuring secondary optical axis; 17—primary mirror; 18 - 808nm Raman laser; 19 - 785nm Raman laser; 20 - central hole; 21 - 785nm Raman probe; 22 - 808nm Raman probe; 23 - secondary mirror; 24 - dual wavelength Raman Reflector; 25—X-ray tube; 26—X-ray focusing mirror; 27—XRF emission axis; 28—short-range test point; 29—XRF reception optical axis; 30—long-distance test point; 31 ——test window; 32—acquisition channel; 33—Raman lens; 34—X-ray detector; 35—preamplifier; 36—spectrum analyzer; 37—secondary mirror driving mechanism; 38— —main controller; 39—sequence controller; 40—user interactive display; 41—integrated multi-channel regulated power supply; 42—mains interface; 43—the fourth channel; 44—785nm Raman Receiving fiber; 45—808nm Raman receiving fiber; 46—785nm Raman emitting fiber; 47—808nm Raman emitting fiber; 48—pigtail; 49—short-range test point limit baffle.

注:LIBS即Laser-induced breakdown spectroscopy,激光诱导击穿光谱;XRF即X-ray fluorescence,X射线荧光光谱。Note: LIBS is Laser-induced breakdown spectroscopy, laser-induced breakdown spectroscopy; XRF is X-ray fluorescence, X-ray fluorescence spectroscopy.

具体实施方式detailed description

本发明具体实施方式如图1所示。The specific embodiment of the present invention is shown in Fig. 1 .

本发明设计的大宗及贵重货品进出口检测的联合光谱仪的仪器整机1主要包括主控制器38、用户交互显示屏40、集成多路稳压电源41、LIBS子系统、测距子系统、卡式望远镜、XRF子系统及BLR子系统。The whole instrument 1 of the integrated spectrometer for the import and export detection of bulk and valuable goods designed by the present invention mainly includes a main controller 38, a user interactive display screen 40, an integrated multi-channel regulated power supply 41, a LIBS subsystem, a ranging subsystem, a card type telescope, XRF subsystem and BLR subsystem.

其中,LIBS子系统由LIBS信号采集镜3、尾纤48、LIBS双色镜5、LIBS扩束镜6、时序控制器39、LIBS激光器8及四通道光谱仪2组成;测距子系统由测距激光器9、测距扩束镜11、半反镜12及测距多色镜13组成;卡式望远镜由主镜17、次镜23及次镜驱动机构37组成;XRF子系统由X射线管25、X射线聚焦镜26、采集通道32、X射线探测器34、前置放大器35及频谱分析器36组成;BLR子系统由808nm拉曼激光器18、785nm拉曼激光器19、785nm拉曼探头21、808nm拉曼探头22、双波长拉曼反射镜24、拉曼透镜33、785nm拉曼接收光纤44、808nm拉曼接收光纤45、785nm拉曼发射光纤46、808nm拉曼发射光纤47及光纤合束器14组成,BLR子系统复用四通道光谱仪2的第4通道43;Among them, the LIBS subsystem is composed of LIBS signal acquisition mirror 3, pigtail 48, LIBS dichroic mirror 5, LIBS beam expander mirror 6, timing controller 39, LIBS laser 8 and four-channel spectrometer 2; the ranging subsystem consists of ranging laser 9. The range-finding beam expander 11, the half mirror 12 and the range-finding polychromatic mirror 13 are composed; the cassette telescope is composed of the primary mirror 17, the secondary mirror 23 and the secondary mirror driving mechanism 37; the XRF subsystem consists of the X-ray tube 25, X-ray focusing mirror 26, acquisition channel 32, X-ray detector 34, preamplifier 35 and spectrum analyzer 36; BLR subsystem consists of 808nm Raman laser 18, 785nm Raman laser 19, 785nm Raman probe 21, 808nm Raman probe 22, dual-wavelength Raman mirror 24, Raman lens 33, 785nm Raman receiving fiber 44, 808nm Raman receiving fiber 45, 785nm Raman emitting fiber 46, 808nm Raman emitting fiber 47 and fiber combiner Composed of 14, the BLR subsystem multiplexes the fourth channel 43 of the four-channel spectrometer 2;

集成多路稳压电源41含有可充电的锂电池,具有交直流二种工作方式,直流工作方式下无需外接市电,由内部锂电池进行多路集中供电;交流工作方式下可连接市电接口42,用于对内部锂电池充电,同时由集成多路稳压电源41提供多路集中供电;The integrated multi-channel regulated power supply 41 contains a rechargeable lithium battery, and has two working modes of AC and DC. In the DC working mode, no external mains power is needed, and the internal lithium battery provides multiple centralized power supplies; in the AC working mode, it can be connected to the mains interface 42, used to charge the internal lithium battery, while the integrated multi-channel regulated power supply 41 provides multiple centralized power supplies;

集成多路稳压电源41的多路供电即为提供主控制器38、用户交互显示屏40、LIBS激光器8、测距激光器9、808nm拉曼激光器18、785nm拉曼激光器19及X射线管25的工作电压;The multi-channel power supply integrated with the multi-channel stabilized power supply 41 is to provide the main controller 38, the user interactive display screen 40, the LIBS laser 8, the ranging laser 9, the 808nm Raman laser 18, the 785nm Raman laser 19 and the X-ray tube 25 working voltage;

主控制器38内有主控软件,用于对用户交互显示屏40、时序控制器39、测距激光器9、808nm拉曼激光器18、785nm拉曼激光器19、X射线管25及次镜驱动机构37进行控制;通过接口对四通道光谱仪2进行供电与接收及分析其输出光谱信号;接收并分析测距传感器15与频谱分析器36的输出数据;接收用户交互显示屏40传送过来的用户指令及返回用户所需要的数据及图表等测试结果;There is main control software in the main controller 38, which is used to interact with the user display screen 40, timing controller 39, ranging laser 9, 808nm Raman laser 18, 785nm Raman laser 19, X-ray tube 25 and secondary mirror drive mechanism 37 for control; through the interface, the four-channel spectrometer 2 is powered and received and analyzed for its output spectrum signal; receiving and analyzing the output data of the ranging sensor 15 and the spectrum analyzer 36; Return the test results such as data and charts required by the user;

主光轴4、LIBS光轴7、测距光轴10、测距次光轴16、XRF发射光轴27及XRF接收光轴29均位于同一平面内;LIBS光轴7与测距光轴10两者平行,且垂直于主光轴4;测距次光轴16与测距光轴10垂直,即与主光轴4平行;XRF发射光轴27及XRF接收光轴29关于主光轴4对称分布;Main optical axis 4, LIBS optical axis 7, ranging optical axis 10, ranging optical axis 16, XRF emitting optical axis 27 and XRF receiving optical axis 29 are all located in the same plane; LIBS optical axis 7 and ranging optical axis 10 The two are parallel and perpendicular to the main optical axis 4; the distance measuring secondary optical axis 16 is perpendicular to the distance measuring optical axis 10, that is, parallel to the main optical axis 4; the XRF emission optical axis 27 and XRF receiving optical axis 29 are about the main optical axis 4 symmetrical distribution;

卡式望远镜的主镜17固定不动,次镜23可在次镜驱动机构37的带动下沿主光轴4移动,其移动范围为有限距离,当次镜23移动到与主镜17的距离最近时,卡式望远镜的焦距最长,此时LIBS激光器8发射出的激光经卡式望远镜聚焦会聚于远程测试点30;反之,当次镜23移动到与主镜17的距离最远时,卡式望远镜的焦距最短,此时LIBS激光器8发射出的激光经卡式望远镜聚焦会聚于近程测试点28;近程测试点28至远程测试点30为LIBS测试范围,在该范围内,由测距子系统辅助实现LIBS自聚焦功能;XRF及BLR均为近程测试,即其测试点为近程测试点28,也即LIBS、XRF、BLR近程测试均在同一目标点;近程测试点28位置安装有近程测试点限位挡板49,当货品测试对象贴合该挡板时,货品测试对象限位于近程测试点28的位置,满足LIBS、XRF、BLR近程测试的要求;The primary mirror 17 of the cassette telescope is fixed, and the secondary mirror 23 can move along the primary optical axis 4 driven by the secondary mirror driving mechanism 37. The range of movement is a limited distance. At the nearest time, the focal length of the cassette telescope was the longest, and now the laser light emitted by the LIBS laser 8 was focused and converged on the remote test point 30 through the cassette telescope; otherwise, when the secondary mirror 23 moved to the farthest distance from the primary mirror 17, The focal length of the card-type telescope is the shortest. At this time, the laser light emitted by the LIBS laser 8 is focused and converged on the short-range test point 28 through the card-type telescope; the short-range test point 28 to the remote test point 30 is the LIBS test range. The ranging subsystem assists in realizing LIBS self-focusing function; both XRF and BLR are short-range tests, that is, the test point is short-range test point 28, that is, LIBS, XRF, and BLR short-range tests are all at the same target point; short-range tests A short-range test point limit baffle 49 is installed at point 28. When the product test object fits the baffle, the product test object is limited to the short-range test point 28, which meets the requirements of LIBS, XRF, and BLR short-range tests. ;

仪器整机1正对主光轴4的位置开有测试窗口31,可使LIBS、XRF及BLR的发射光束及回波信号自由进出仪器整机1;The complete instrument 1 has a test window 31 at the position facing the main optical axis 4, which allows the emission beams and echo signals of LIBS, XRF and BLR to freely enter and exit the complete instrument 1;

大宗及贵重货品进出口检测的联合光谱仪按以下步骤工作:The combined spectrometer for the import and export detection of bulk and valuable goods works in the following steps:

(1)远程LIBS粗检(1) Remote LIBS coarse inspection

主控制器38发出控制指令启动测距激光器9(在本实施例中为1550nm连续半导体激光器),测距激光器9发出的连续激光沿测距光轴10行进,通过测距扩束镜11扩束,透过半反镜12,经测距多色镜13反射后沿主光轴4方向穿进卡式望远镜的主镜17的中心孔20,经次镜23反射,再由主镜17反射并聚焦至远距离的货品测试对象,由于卡式望远镜的焦距与货品距离不匹配,因此此时为散焦状态。货品测试对象的后向散射回波沿主光轴4反向行进,首先由主镜17反射,再经次镜23反射,穿出中心孔20,经测距多色镜13反射后沿测距光轴10行进,再经半反镜12反射后沿测距次光轴16行进,由测距传感器15接收,测距传感器15的传感信号传送至主控制器38进行分析,得出回波强度值。主控制器38发出指令启动次镜驱动机构37带动次镜23沿主光轴4连续移动,改变卡式望远镜的焦距,不断测试回波强度值,当回波强度达到峰值时,主控制器38发出指令关闭次镜驱动机构17,使次镜23停止运动,此时达到精确聚焦状态;The main controller 38 sends a control instruction to start the ranging laser 9 (in this embodiment, a 1550nm continuous semiconductor laser), and the continuous laser light sent by the ranging laser 9 advances along the ranging optical axis 10, and is expanded by the ranging beam expander 11 , through the half-mirror 12, reflected by the ranging polychromatic mirror 13, and then penetrate the central hole 20 of the primary mirror 17 of the cassette telescope along the direction of the main optical axis 4, reflected by the secondary mirror 23, and then reflected and focused by the primary mirror 17 For the far-distance product test object, because the focal length of the cassette telescope does not match the distance of the product, it is in a defocused state at this time. The backscattered echo of the product test object travels in the opposite direction along the main optical axis 4, firstly reflected by the primary mirror 17, then reflected by the secondary mirror 23, passes through the central hole 20, is reflected by the ranging polychromatic mirror 13, and then along the ranging The optical axis 10 advances, and then travels along the ranging secondary optical axis 16 after being reflected by the half mirror 12, and is received by the ranging sensor 15, and the sensing signal of the ranging sensor 15 is sent to the main controller 38 for analysis to obtain the echo strength value. The main controller 38 issues an instruction to start the secondary mirror drive mechanism 37 to drive the secondary mirror 23 to move continuously along the main optical axis 4, to change the focal length of the cassette telescope, and to continuously test the echo intensity value. When the echo intensity reaches a peak value, the main controller 38 Issue an instruction to close the secondary mirror drive mechanism 17, so that the secondary mirror 23 stops moving, and at this time the state of precise focus is reached;

在精确聚焦状态下,主控制器38设定时序控制器39的延迟时间d(本实施例d设为10微秒),并由时序控制器39首先启动LIBS激光器8(本实施例为1064nm纳秒级脉冲激光器,重频1Hz,单脉冲能量100mJ),然后在延迟d之后,启动四通道光谱仪2曝光接收LIBS的回波信号;其工作过程为:Under the precise focusing state, the master controller 38 sets the delay time d of the timing controller 39 (d is set as 10 microseconds in this embodiment), and the LIBS laser 8 is first started by the timing controller 39 (1064nm nanoseconds in this embodiment). Second-level pulse laser, repetition frequency 1Hz, single pulse energy 100mJ), and after a delay d, start the four-channel spectrometer 2 to expose and receive the echo signal of LIBS; its working process is:

LIBS激光器8发出的脉冲激光沿LIBS光轴7行进,通过LIBS扩束镜6扩束,再经LIBS双色镜5反射后沿主光轴4行进,透过测距多色镜13后穿进卡式望远镜的主镜17的中心孔20,经次镜23反射,再由主镜17反射并聚焦至远距离的货品测试对象,货品测试对象被激发产生的LIBS信号沿主光轴4反向行进,首先由主镜17反射,再经次镜23反射,穿出中心孔20,透过测距多色镜13后由LIBS信号采集镜3收集,通过尾纤48进入四通道光谱仪2(本实施例为190-1100nm范围,分为190-350nm,350-550nm,550-750nm,750-1100nm四个通道,其中第4通道43为LIBS与BLR光谱复用通道),经过光栅分光,光电转换后的光谱数据送入主控制器38进行存储分析;The pulsed laser light emitted by the LIBS laser 8 travels along the LIBS optical axis 7, expands the beam through the LIBS beam expander 6, and then travels along the main optical axis 4 after being reflected by the LIBS dichroic mirror 5, and penetrates into the card after passing through the distance measuring polychromatic mirror 13. The central hole 20 of the primary mirror 17 of the type telescope is reflected by the secondary mirror 23, and then reflected by the primary mirror 17 and focused to the long-distance cargo test object. The LIBS signal generated by the cargo test object is excited and travels in the opposite direction along the main optical axis 4 , first reflected by the primary mirror 17, then reflected by the secondary mirror 23, passing through the central hole 20, passing through the ranging polychromatic mirror 13 and collected by the LIBS signal collecting mirror 3, and entering the four-channel spectrometer 2 through the pigtail 48 (this implementation For example, in the range of 190-1100nm, it is divided into four channels: 190-350nm, 350-550nm, 550-750nm, and 750-1100nm, of which the fourth channel 43 is the LIBS and BLR spectral multiplexing channel), after grating splitting and photoelectric conversion The spectral data sent to the master controller 38 for storage and analysis;

主控制器38的LIBS物质分析软件程序对采集的远程LIBS光谱数据进行分析,得出货品测试对象的物质元素组成,及含量的粗检值,如果认为无问题,就可放行货物;反之,如果判断可疑则进入下一步近程精测;The LIBS substance analysis software program of the main controller 38 analyzes the collected remote LIBS spectral data to obtain the material element composition of the goods test object and the rough inspection value of the content. If it is considered to be no problem, the goods can be released; otherwise, if If the judgment is suspicious, enter the next step of short-range precision measurement;

(2)近程综合光谱精测(2) Short-range comprehensive spectrum precision measurement

将大宗及贵重货品进出口检测的联合光谱仪移近货品测试对象,使货品测试对象贴合近程测试点限位挡板49,主控制器38发出指令启动次镜驱动机构37带动次镜23沿主光轴4移至主镜17与次镜23距离最远的位置,此时,卡式望远镜的焦距最短,LIBS激光器8发射出的激光经卡式望远镜聚焦将会聚于近程测试点28;Move the combined spectrometer for the import and export detection of bulk and valuable goods closer to the goods test object, so that the goods test object fits the short-range test point limit baffle 49, and the main controller 38 issues an instruction to start the secondary mirror drive mechanism 37 to drive the secondary mirror 23 along the The main optical axis 4 moves to the farthest position between the primary mirror 17 and the secondary mirror 23. At this time, the focal length of the clip-on telescope is the shortest, and the laser emitted by the LIBS laser 8 will be focused on the short-range test point 28 through the clip-on telescope;

主控制器38发出指令由时序控制器39首先启动LIBS激光器8,然后在延迟d之后,启动四通道光谱仪2曝光接收LIBS的回波信号;The main controller 38 sends an instruction and the timing controller 39 first starts the LIBS laser 8, and then after a delay d, starts the four-channel spectrometer 2 to expose and receive the echo signal of the LIBS;

主控制器38的LIBS物质分析软件程序对采集的近程LIBS光谱数据进行分析,得出货品测试对象的包括轻、重元素、非金属、金属元素在内的元素组成,以及各元素的含量值;The LIBS material analysis software program of the main controller 38 analyzes the collected short-range LIBS spectral data, and obtains the elemental composition of the goods test object including light, heavy elements, non-metallic elements, and metallic elements, as well as the content values of each element ;

主控制器38发出指令启动X射线管25,X射线管25发出的X射线沿XRF发射光轴27行进,经X射线聚焦镜26聚焦至近程测试点28,货品测试对象产生的X射线荧光信号沿XRF接收光轴29行进,经采集通道32后被X射线探测器34接收,再经前置放大器35放大,进入频谱分析器36分析,XRF光谱数据送入主控制器38进行存储分析;The main controller 38 issues an instruction to start the X-ray tube 25. The X-rays emitted by the X-ray tube 25 travel along the XRF emission optical axis 27, and are focused to the short-range test point 28 by the X-ray focusing mirror 26. The X-ray fluorescence signal generated by the goods test object Traveling along the XRF receiving optical axis 29, after passing through the acquisition channel 32, it is received by the X-ray detector 34, then amplified by the preamplifier 35, and then enters the spectrum analyzer 36 for analysis, and the XRF spectrum data is sent to the main controller 38 for storage and analysis;

主控制器38的XRF物质分析软件程序对采集的近程XRF光谱数据进行分析,得出货品测试对象的重元素的组成及精确含量,并将元素组成及含量结果与LIBS近程检测结果进行综合,得到轻重元素的组成及含量,可对大宗货物和贵重货品进行组成含量测定,进行防伪报检测并建立相应的数据库;The XRF material analysis software program of the main controller 38 analyzes the collected short-range XRF spectral data, obtains the composition and precise content of the heavy elements of the goods test object, and synthesizes the element composition and content results with the LIBS short-range detection results , to obtain the composition and content of light and heavy elements, to measure the composition and content of bulk goods and valuable goods, to carry out anti-counterfeiting detection and to establish a corresponding database;

主控制器38发出指令启动785nm拉曼激光器19,785nm拉曼激光器19发射出的785nm连续激光经785nm拉曼发射光纤46进入785nm拉曼探头21,经过其内部的785nm干涉滤光片形成窄线宽激光射出,经双波长拉曼反射镜24反射后沿主光轴4行进,经拉曼透镜33会聚至近程测试点28,货品测试对象产生的后向拉曼散射信号沿主光轴4反向行进,透过拉曼透镜33后进入785nm拉曼探头21,经过其内部的785nm瑞利滤光片后进入785nm拉曼接收光纤44,再通过光纤合束器14后,进入四通道光谱仪2的第4通道43,经过光栅分光,光电转换后的785nm拉曼光谱数据送入主控制器38进行存储分析;The main controller 38 sends an instruction to start the 785nm Raman laser 19, and the 785nm continuous laser light emitted by the 785nm Raman laser 19 enters the 785nm Raman probe 21 through the 785nm Raman emission fiber 46, and forms a narrow line through the 785nm interference filter inside it. The wide laser beam is emitted, reflected by the dual-wavelength Raman reflector 24, and travels along the main optical axis 4, and converges to the short-range test point 28 through the Raman lens 33, and the backward Raman scattering signal generated by the goods test object is reflected along the main optical axis 4. Go forward, enter the 785nm Raman probe 21 after passing through the Raman lens 33, enter the 785nm Raman receiving fiber 44 after passing through the 785nm Rayleigh filter inside it, and then enter the four-channel spectrometer 2 after passing through the fiber combiner 14 The 4th channel 43 of the 785nm Raman spectrum data after grating splitting, photoelectric conversion is sent to the main controller 38 for storage and analysis;

主控制器38发出指令启动808nm拉曼激光器18,808nm拉曼激光器18发射出的808nm连续激光经808nm拉曼发射光纤47进入808nm拉曼探头22,经过其内部的808nm干涉滤光片形成窄线宽激光射出,经双波长拉曼反射镜24反射后沿主光轴4行进,经拉曼透镜33会聚至近程测试点28,货品测试对象产生的后向拉曼散射信号沿主光轴4反向行进,透过拉曼透镜33后进入808nm拉曼探头22,经过其内部的808nm瑞利滤光片后进入808nm拉曼接收光纤45,再通过光纤合束器14后,进入四通道光谱仪2的第4通道43,经过光栅分光,光电转换后的808nm拉曼光谱数据送入主控制器38进行存储分析;The main controller 38 sends an instruction to start the 808nm Raman laser 18, and the 808nm continuous laser light emitted by the 808nm Raman laser 18 enters the 808nm Raman probe 22 through the 808nm Raman emitting fiber 47, and forms a narrow line through the 808nm interference filter inside it. The wide laser beam is emitted, reflected by the dual-wavelength Raman reflector 24, and travels along the main optical axis 4, and converges to the short-range test point 28 through the Raman lens 33, and the backward Raman scattering signal generated by the goods test object is reflected along the main optical axis 4. Go forward, enter the 808nm Raman probe 22 after passing through the Raman lens 33, enter the 808nm Raman receiving fiber 45 after passing through the 808nm Rayleigh filter inside it, and then enter the four-channel spectrometer 2 after passing through the fiber combiner 14 The 4th channel 43 of the 808nm Raman spectrum data after grating splitting, photoelectric conversion is sent to the main controller 38 for storage and analysis;

主控制器38的BLR物质分析软件程序对采集的近程785nm及808nm拉曼光谱数据进行分析,通过差分的方法去除荧光干扰,根据双波长拉曼频移量及强度,得出货品测试对象的高分子组成及含量,可进行有毒有害物分析。The BLR substance analysis software program of the main controller 38 analyzes the collected short-range 785nm and 808nm Raman spectral data, removes the fluorescence interference through the differential method, and obtains the product test object’s specificity according to the dual-wavelength Raman frequency shift and intensity. Macromolecular composition and content can be analyzed for toxic and harmful substances.

Claims (1)

1.一种用于大宗及贵重货品进出口检测的联合光谱检测方法,该方法是在联合光谱检测仪上实现的,所述的联合光谱检测仪的仪器整机(1)包括主控制器(38)、用户交互显示屏(40)、集成多路稳压电源(41)、LIBS子系统、测距子系统、卡式望远镜、XRF子系统及BLR子系统;其特征在于联合光谱方法包括以下步骤:1. A combined spectrum detection method for bulk and valuable goods import and export detection, the method is realized on a combined spectrum detector, and the instrument complete machine (1) of the combined spectrum detector includes a main controller ( 38), user interactive display screen (40), integrated multi-channel regulated power supply (41), LIBS subsystem, ranging subsystem, cassette telescope, XRF subsystem and BLR subsystem; it is characterized in that the joint spectrum method includes the following step: 1)远程LIBS粗检1) Remote LIBS rough check 主控制器发出控制指令启动测距激光器,测距激光器发出的连续激光沿测距光轴行进,通过测距扩束镜扩束,透过半反镜,经测距多色镜反射后沿主光轴方向穿进卡式望远镜的主镜的中心孔,经次镜反射,再由主镜反射并聚焦至远距离的货品测试对象,由于卡式望远镜的焦距与货品距离不匹配,因此此时为散焦状态。货品测试对象的后向散射回波沿主光轴反向行进,首先由主镜反射,再经次镜反射,穿出中心孔,经测距多色镜反射后沿测距光轴行进,再经半反镜反射后沿测距次光轴行进,由测距传感器接收,测距传感器的传感信号传送至主控制器进行分析,得出回波强度值;主控制器发出指令启动次镜驱动机构带动次镜沿主光轴连续移动,改变卡式望远镜的焦距,不断测试回波强度值,当回波强度达到峰值时,主控制器发出指令关闭次镜驱动机构,使次镜停止运动,此时达到精确聚焦状态;The main controller issues a control command to start the ranging laser, and the continuous laser light emitted by the ranging laser travels along the ranging optical axis, expands the beam through the ranging beam expander, passes through the half mirror, is reflected by the ranging polychromatic mirror, and then follows the main beam. The axial direction penetrates into the center hole of the primary mirror of the clip-on telescope, is reflected by the secondary mirror, and then reflected by the primary mirror and focused on the long-distance cargo test object. Since the focal length of the cassette telescope does not match the distance of the cargo, it is Defocus state. The backscattered echo of the goods test object travels in the opposite direction along the main optical axis. It is first reflected by the primary mirror, then reflected by the secondary mirror, passes through the center hole, and travels along the distance measuring optical axis after being reflected by the distance measuring polychromatic mirror. After being reflected by the half mirror, it travels along the secondary optical axis of distance measurement, and is received by the distance measurement sensor. The sensing signal of the distance measurement sensor is sent to the main controller for analysis, and the echo intensity value is obtained; the main controller issues an instruction to start the secondary mirror The driving mechanism drives the secondary mirror to move continuously along the main optical axis, changes the focal length of the cassette telescope, and continuously tests the echo intensity value. When the echo intensity reaches the peak value, the main controller sends an instruction to turn off the secondary mirror driving mechanism to stop the secondary mirror from moving. , at this time the precise focus state is reached; 在精确聚焦状态下,主控制器设定时序控制器的延迟时间d,并由时序控制器首先启动LIBS激光器,然后在延迟d之后,启动四通道光谱仪曝光接收LIBS的回波信号;其工作过程为:In the state of precise focusing, the main controller sets the delay time d of the timing controller, and the timing controller first starts the LIBS laser, and then starts the four-channel spectrometer to expose and receive the echo signal of LIBS after the delay d; its working process for: LIBS激光器发出的脉冲激光沿LIBS光轴行进,通过LIBS扩束镜扩束,再经LIBS双色镜反射后沿主光轴行进,透过测距多色镜后穿进卡式望远镜的主镜的中心孔,经次镜反射,再由主镜反射并聚焦至远距离的货品测试对象,货品测试对象被激发产生的LIBS信号沿主光轴反向行进,首先由主镜反射,再经次镜反射,穿出中心孔,透过测距多色镜后由LIBS信号采集镜收集,通过尾纤进入四通道光谱仪,经过光栅分光,光电转换后的光谱数据送入主控制器进行存储分析;The pulsed laser emitted by the LIBS laser travels along the LIBS optical axis, expands the beam through the LIBS beam expander, and then travels along the main optical axis after being reflected by the LIBS dichroic mirror. The central hole is reflected by the secondary mirror, and then reflected by the primary mirror and focused to the long-distance cargo test object. The LIBS signal generated by the cargo test object travels in the opposite direction along the main optical axis, first reflected by the primary mirror, and then passed by the secondary mirror. Reflected, passed through the central hole, passed through the distance measuring polychromatic mirror, collected by the LIBS signal acquisition mirror, entered the four-channel spectrometer through the pigtail, passed through the grating, and the photoelectrically converted spectral data was sent to the main controller for storage and analysis; 主控制器的LIBS物质分析软件程序对采集的远程LIBS光谱数据进行分析,得出货品测试对象的物质元素组成,及含量的粗检值,如果认为无问题,就可放行货物;反之,如果判断可疑则进入下一步近程精测;The LIBS material analysis software program of the main controller analyzes the collected remote LIBS spectral data, and obtains the material element composition of the test object of the goods and the rough inspection value of the content. If it is considered to be no problem, the goods can be released; otherwise, if it is judged If it is suspicious, enter the next step of short-range precise measurement; 2)近程综合光谱精测2) Short-range comprehensive spectrum precision measurement 将大宗及贵重货品进出口检测的联合光谱仪移近货品测试对象,使货品测试对象贴合近程测试点限位挡板,主控制器发出指令启动次镜驱动机构带动次镜沿主光轴移至主镜与次镜距离最远的位置,此时,卡式望远镜的焦距最短,LIBS激光器发射出的激光经卡式望远镜聚焦将会聚于近程测试点;Move the combined spectrometer for import and export detection of bulk and valuable goods closer to the goods test object, so that the goods test object fits the limit baffle of the short-range test point, and the main controller sends an instruction to start the secondary mirror driving mechanism to drive the secondary mirror to move along the main optical axis To the position where the distance between the primary mirror and the secondary mirror is the farthest, at this time, the focal length of the clip-on telescope is the shortest, and the laser emitted by the LIBS laser will be focused on the short-range test point through the clip-on telescope; 主控制器发出指令由时序控制器首先启动LIBS激光器,然后在延迟d之后,启动四通道光谱仪曝光接收LIBS的回波信号;The main controller sends an instruction, and the timing controller first starts the LIBS laser, and then after a delay d, starts the four-channel spectrometer to expose and receive the echo signal of LIBS; 主控制器的LIBS物质分析软件程序对采集的近程LIBS光谱数据进行分析,得出货品测试对象的包括轻、重元素、非金属、金属元素在内的元素组成,以及各元素的含量值;The LIBS material analysis software program of the main controller analyzes the collected short-range LIBS spectral data, and obtains the element composition of the goods test object, including light, heavy elements, non-metallic elements, and metal elements, as well as the content value of each element; 主控制器发出指令启动X射线管,X射线管发出的X射线沿XRF发射光轴行进,经X射线聚焦镜聚焦至近程测试点,货品测试对象产生的X射线荧光信号沿XRF接收光轴行进,经采集通道后被X射线探测器接收,再经前置放大器放大,进入频谱分析器分析,XRF光谱数据送入主控制器进行存储分析;The main controller sends an instruction to start the X-ray tube. The X-rays emitted by the X-ray tube travel along the XRF emission optical axis, and are focused to the short-range test point by the X-ray focusing mirror. The X-ray fluorescence signal generated by the goods test object travels along the XRF reception optical axis. , after being received by the X-ray detector through the acquisition channel, and then amplified by the preamplifier, it enters the spectrum analyzer for analysis, and the XRF spectrum data is sent to the main controller for storage and analysis; 主控制器的XRF物质分析软件程序对采集的近程XRF光谱数据进行分析,得出货品测试对象的重元素的组成及精确含量,并将元素组成及含量结果与LIBS近程检测结果进行综合,得到轻重元素的组成及含量,可对大宗货物和贵重货品进行组成含量测定,进行防伪报检测并建立相应的数据库;The XRF material analysis software program of the main controller analyzes the collected short-range XRF spectral data, obtains the composition and precise content of the heavy elements of the goods test object, and integrates the element composition and content results with the LIBS short-range detection results, Obtain the composition and content of light and heavy elements, measure the composition and content of bulk goods and valuable goods, carry out anti-counterfeiting detection and establish a corresponding database; 主控制器发出指令启动785nm拉曼激光器,785nm拉曼激光器发射出的785nm连续激光经785nm拉曼发射光纤进入785nm拉曼探头,经过其内部的785nm干涉滤光片形成窄线宽激光射出,经双波长拉曼反射镜反射后沿主光轴行进,经拉曼透镜会聚至近程测试点,货品测试对象产生的后向拉曼散射信号沿主光轴反向行进,透过拉曼透镜后进入785nm拉曼探头,经过其内部的785nm瑞利滤光片后进入785nm拉曼接收光纤,再通过光纤合束器后,进入四通道光谱仪的第4通道,经过光栅分光,光电转换后的785nm拉曼光谱数据送入主控制器进行存储分析;The main controller issues an instruction to start the 785nm Raman laser. The 785nm continuous laser emitted by the 785nm Raman laser enters the 785nm Raman probe through the 785nm Raman emitting fiber, and passes through its internal 785nm interference filter to form a narrow linewidth laser. After being reflected by the dual-wavelength Raman mirror, it travels along the main optical axis and converges to the short-range test point through the Raman lens. The 785nm Raman probe enters the 785nm Raman receiving fiber after passing through its internal 785nm Rayleigh filter, and then enters the fourth channel of the four-channel spectrometer after passing through the fiber combiner. The Mann spectral data is sent to the main controller for storage and analysis; 主控制器发出指令启动808nm拉曼激光器,808nm拉曼激光器发射出的808nm连续激光经808nm拉曼发射光纤进入808nm拉曼探头,经过其内部的808nm干涉滤光片形成窄线宽激光射出,经双波长拉曼反射镜反射后沿主光轴行进,经拉曼透镜会聚至近程测试点,货品测试对象产生的后向拉曼散射信号沿主光轴反向行进,透过拉曼透镜后进入808nm拉曼探头,经过其内部的808nm瑞利滤光片后进入808nm拉曼接收光纤,再通过光纤合束器后,进入四通道光谱仪的第4通道,经过光栅分光,光电转换后的808nm拉曼光谱数据送入主控制器进行存储分析;The main controller sends an instruction to start the 808nm Raman laser, and the 808nm continuous laser emitted by the 808nm Raman laser enters the 808nm Raman probe through the 808nm Raman emitting fiber, and passes through its internal 808nm interference filter to form a narrow linewidth laser. After being reflected by the dual-wavelength Raman mirror, it travels along the main optical axis and converges to the short-range test point through the Raman lens. The 808nm Raman probe enters the 808nm Raman receiving fiber after passing through its internal 808nm Rayleigh filter, and then enters the fourth channel of the four-channel spectrometer after passing through the fiber combiner. The Mann spectral data is sent to the main controller for storage and analysis; 主控制器的BLR物质分析软件程序对采集的近程785nm及808nm拉曼光谱数据进行分析,通过差分的方法去除荧光干扰,根据双波长拉曼频移量及强度,得出货品测试对象的高分子组成及含量,可进行有毒有害物分析。The BLR material analysis software program of the main controller analyzes the collected short-range 785nm and 808nm Raman spectral data, removes the fluorescence interference through the differential method, and obtains the high Molecular composition and content can be analyzed for toxic and harmful substances.
CN201710010261.5A 2017-01-06 2017-01-06 Combined spectral detection method for the inlet and outlet detection of large and valuable kinds of goods Active CN106841171B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710010261.5A CN106841171B (en) 2017-01-06 2017-01-06 Combined spectral detection method for the inlet and outlet detection of large and valuable kinds of goods

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710010261.5A CN106841171B (en) 2017-01-06 2017-01-06 Combined spectral detection method for the inlet and outlet detection of large and valuable kinds of goods

Publications (2)

Publication Number Publication Date
CN106841171A true CN106841171A (en) 2017-06-13
CN106841171B CN106841171B (en) 2019-05-24

Family

ID=59118126

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710010261.5A Active CN106841171B (en) 2017-01-06 2017-01-06 Combined spectral detection method for the inlet and outlet detection of large and valuable kinds of goods

Country Status (1)

Country Link
CN (1) CN106841171B (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108780046A (en) * 2018-05-15 2018-11-09 深圳达闼科技控股有限公司 A kind of substance detecting method, system, device and computer readable storage medium
CN109270004A (en) * 2018-10-11 2019-01-25 南京信息工程大学 Atmospheric analysis detection system and detection method based on DOAS and LIBS technology
CN109358034A (en) * 2018-10-29 2019-02-19 中国科学院上海技术物理研究所 Urine detection method of astronauts based on liquid-core waveguide combined spectroscopy
CN109521000A (en) * 2019-01-24 2019-03-26 中国工程物理研究院流体物理研究所 Grating beam splitting formula while multiple spot laser induced breakdown spectroscopy measuring system and method
CN110873709A (en) * 2019-11-11 2020-03-10 中国科学院上海技术物理研究所 A LIBS active-passive dual-mode spectral detection method
EP3948241A1 (en) * 2019-03-28 2022-02-09 De.Tec.Tor S.r.l. An apparatus to operate a quality control in industrial production lines, corresponding method and computer program product
CN114488196A (en) * 2021-12-09 2022-05-13 山东国耀量子雷达科技有限公司 Highway distributed visibility remote sensing system
CN115574871A (en) * 2022-12-09 2023-01-06 津海威视技术(天津)有限公司 Quick screening system for solid waste of port

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101493416A (en) * 2009-03-10 2009-07-29 中国海洋大学 Underwater laser Raman spectrum/laser-induced breakdown spectroscopy combined detection device and method
CN102519918A (en) * 2011-12-08 2012-06-27 大连理工大学 A rapid detection method for waste oil based on laser-induced breakdown spectroscopy
CN103743719A (en) * 2013-12-11 2014-04-23 中国科学院西安光学精密机械研究所 Remote in-situ comprehensive test system for substances on surface of planet and atmosphere
CN104897626A (en) * 2015-06-02 2015-09-09 中国科学院上海技术物理研究所 Quantitative laser-induced breakdown spectroscopy method for synchronous analysis of primary and secondary elements of Mars
WO2015193850A1 (en) * 2014-06-20 2015-12-23 National Research Council Of Canada Method for laser-induced breakdown spectroscopy and calibration
US20150377805A1 (en) * 2014-06-25 2015-12-31 Sciaps, Inc. Combined handheld xrf and oes systems and methods
CN205246540U (en) * 2015-12-01 2016-05-18 中国科学院上海技术物理研究所 Dual multiplexing laser spectrum mars composition of mineral analytic system
CN105651742A (en) * 2016-01-11 2016-06-08 北京理工大学 Laser-induced breakdown spectroscopy based explosive real-time remote detection method

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101493416A (en) * 2009-03-10 2009-07-29 中国海洋大学 Underwater laser Raman spectrum/laser-induced breakdown spectroscopy combined detection device and method
CN102519918A (en) * 2011-12-08 2012-06-27 大连理工大学 A rapid detection method for waste oil based on laser-induced breakdown spectroscopy
CN103743719A (en) * 2013-12-11 2014-04-23 中国科学院西安光学精密机械研究所 Remote in-situ comprehensive test system for substances on surface of planet and atmosphere
WO2015193850A1 (en) * 2014-06-20 2015-12-23 National Research Council Of Canada Method for laser-induced breakdown spectroscopy and calibration
US20150377805A1 (en) * 2014-06-25 2015-12-31 Sciaps, Inc. Combined handheld xrf and oes systems and methods
CN104897626A (en) * 2015-06-02 2015-09-09 中国科学院上海技术物理研究所 Quantitative laser-induced breakdown spectroscopy method for synchronous analysis of primary and secondary elements of Mars
CN205246540U (en) * 2015-12-01 2016-05-18 中国科学院上海技术物理研究所 Dual multiplexing laser spectrum mars composition of mineral analytic system
CN105651742A (en) * 2016-01-11 2016-06-08 北京理工大学 Laser-induced breakdown spectroscopy based explosive real-time remote detection method

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
MAREK HOEHSE ET AL.: "Multicariate classfication of pigments and inks using combined Raman spectroscopy and LIBS", 《ANALYTICAL AND BIOANALYTICAL CHEMISTRY》 *
韩炜师 等: "光谱分析技术在彩绘文物颜料分析中的应用", 《光谱学与光谱分析》 *

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108780046A (en) * 2018-05-15 2018-11-09 深圳达闼科技控股有限公司 A kind of substance detecting method, system, device and computer readable storage medium
CN109270004A (en) * 2018-10-11 2019-01-25 南京信息工程大学 Atmospheric analysis detection system and detection method based on DOAS and LIBS technology
CN109270004B (en) * 2018-10-11 2023-09-12 南京信息工程大学 Atmospheric analysis and detection system and detection method based on DOAS and LIBS technology
CN109358034A (en) * 2018-10-29 2019-02-19 中国科学院上海技术物理研究所 Urine detection method of astronauts based on liquid-core waveguide combined spectroscopy
CN109521000A (en) * 2019-01-24 2019-03-26 中国工程物理研究院流体物理研究所 Grating beam splitting formula while multiple spot laser induced breakdown spectroscopy measuring system and method
CN109521000B (en) * 2019-01-24 2023-08-08 中国工程物理研究院流体物理研究所 Grating beam-splitting type simultaneous multi-point laser-induced breakdown spectroscopy measurement system and method
EP3948241A1 (en) * 2019-03-28 2022-02-09 De.Tec.Tor S.r.l. An apparatus to operate a quality control in industrial production lines, corresponding method and computer program product
US12181429B2 (en) 2019-03-28 2024-12-31 De.Tec.Tor S.R.L. Apparatus to operate a quality control in industrial production lines, corresponding method and computer program product
CN110873709A (en) * 2019-11-11 2020-03-10 中国科学院上海技术物理研究所 A LIBS active-passive dual-mode spectral detection method
CN110873709B (en) * 2019-11-11 2021-12-31 中国科学院上海技术物理研究所 LIBS active and passive dual-mode spectrum detection method
CN114488196A (en) * 2021-12-09 2022-05-13 山东国耀量子雷达科技有限公司 Highway distributed visibility remote sensing system
CN115574871A (en) * 2022-12-09 2023-01-06 津海威视技术(天津)有限公司 Quick screening system for solid waste of port

Also Published As

Publication number Publication date
CN106841171B (en) 2019-05-24

Similar Documents

Publication Publication Date Title
CN106841171A (en) The combined spectral detection method of detection is imported and exported for large and valuable kinds of goods
CN106596512B (en) Combined spectrum detector for detecting bulk and valuable goods import and export
CN103175808B (en) Laser-induced breakdown spectroscopy analysis system and method
EP3023771B1 (en) In-situ on-line detection device and method for long-distance metallurgical liquid metal component
CN105527274B (en) A kind of efficient multi-path laser probe analysis System and method for
CN103983619B (en) A kind of spatial discrimination Laser-induced Breakdown Spectroscopy analytic system and analytical approach thereof
JP4709947B2 (en) FRET measuring method and apparatus
CN109444111B (en) Optical fiber LIBS detection system and method with optional dual pulse mode
JP2007240424A (en) Method and device for detecting fret (fluorescence resonance energy transfer)
KR20120130772A (en) Fret measurement method and fret measurement device
CN105651759A (en) Surface-enhanced type Raman spectrum testing system
US11768147B2 (en) Quantum flow cytometer
CN206411012U (en) The combined spectral detector of detection is imported and exported for large and valuable kinds of goods
US20220333991A1 (en) Detector device and method for the remote analysis of materials, and mobile sensor system
CN104713866A (en) A Broadband CARS Detection 1Δ Oxygen Device and Its Application Method
CN112666128B (en) A multi-spectral detection system and detection method thereof
CN111999280B (en) Real-time detection system for heavy metals in surface water without sampling
ATE338945T1 (en) FLUORIMETRIC MULTI-PARAMETER ANALYSIS IN A PARALLEL MULTI-FOCUS ARRANGEMENT
CN103063622A (en) Portable rapid element composition analyzer
CN108152268A (en) LIBS spectrum investigating systems based on streak tube
CN108844929B (en) Method and device for detecting split pupil differential confocal split fluorescence spectrum and fluorescence life
CN113984204B (en) Raman spectrometer accessory and Raman spectrometer
CN206132625U (en) Remote measurement device based on LIBS technique
CN106442471A (en) A Remote Measuring Device Based on LIBS Technology
KR101348917B1 (en) Lidar system for remote sensing of radioactive materials using injection-seeded laser

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant