CN103364176A - Testing system for laser induced damage threshold - Google Patents

Abstract

The invention provides a laser damage threshold testing system, which includes a high-energy laser damage device, a high-resolution color CCD image damage judgment device, a CCD auxiliary light source device and a sample stage motion control device. The test system alternately uses CCD acquisition units equipped with low-magnification and high-magnification objective lens optical systems for preliminary rapid damage prediction and accurate measurement of the samples to be tested after high-energy laser irradiation. Adopting the present invention can not only effectively overcome the disadvantages of the existing phase contrast microscopy method, such as strong subjectivity, large measurement errors, and long measurement time, but also satisfy both 1-on-1 and R-on-1 measurements The mode not only takes into account the measurement error and test efficiency, but also has strong applicability and is convenient for industrial application.

Description

A Laser Damage Threshold Testing System

technical field

The invention relates to laser testing technology, in particular to a laser damage threshold testing system using phase contrast microscopy.

Background technique

With the continuous expansion of the application range of high-power lasers, the importance of the anti-laser damage performance of optical films or optical components has become increasingly prominent. Therefore, the laser damage threshold has become an indispensable performance index of optical films or optical components. To achieve high-performance, high laser damage threshold film preparation and research, the key is to accurately measure the laser damage threshold of optical components or films. Therefore, in the process of laser damage threshold testing, how to realize online, real-time, fast and accurate laser threshold damage discrimination, and on this basis, develop an intelligent laser threshold testing system with functions of automatic detection of laser threshold and data information processing. become a central part of the research.

In recent years, the International Standardization Committee has promulgated ISO11254-1 and ISO11254-2, which are international standards for damage to optical components caused by laser light. The recommended detection method is phase contrast microscopy, which uses a microscope with a magnification of 100 to 150 times to observe the surface of the optical element or optical film after laser irradiation to determine whether the film is damaged. However, this detection method needs to be carried out manually, and there are obvious deficiencies, which are mainly manifested in:

1. Using manual methods to directly observe the surface of the tested component is very subjective and the resolution is not high. In addition, due to the high magnification and the large number of test points, the work intensity is high;

2. It is necessary to manually control the movement of the sample to be tested between the clamping table and the test table, which will not only cause large system measurement errors, but also require a cleaner experimental environment to avoid measurement errors caused by sample contamination;

3. The manual detection method is inefficient, especially in the process of multi-point testing. In order to realize the focus positioning and measurement of each measurement point, the tester must have the skill of using the phase contrast microscope, so the measurement process is time-consuming. Long and unable to realize the automation of the complete machine.

Therefore, the existing laser damage testing methods have caused huge measurement errors, and it is difficult to ensure high-precision measurement of the damage threshold of optical components or optical films. In view of this, how to design an intelligent laser damage threshold testing system to effectively overcome the defects of large errors in existing measurement methods and long time-consuming measurement processes is an urgent task for relevant technical personnel to solve.

Contents of the invention

Aiming at the above defects in the laser damage threshold testing method in the prior art, the present invention provides a novel laser damage threshold testing system.

According to one aspect of the present invention, a laser damage threshold testing system is provided, wherein the laser damage threshold testing system includes:

A high-energy laser damage device includes a laser, an attenuator, a focusing lens, a beam splitter, and a high reflection mirror, wherein the laser light emitted by the laser passes through the attenuator, the focusing lens, the beam splitter, and the The high reflection mirror converges on the surface of the sample to be tested. The laser emits a high-energy laser beam with a wavelength of 1064nm and a pulse width of 12ns. The attenuator adjusts the emitted laser energy so that the adjusted laser energy is Change linearly in the range of 2-200mJ, the focusing lens performs focusing processing on the adjusted laser beam, and the beam splitter guides the laser light with small energy into the laser test and analysis unit for energy beam analysis according to the ratio of 100:1;

A high-resolution color CCD image damage discrimination device, including a first drive stepper motor, a Z-direction movement mechanism, a CCD acquisition unit equipped with a first magnification objective lens optical system, a CCD acquisition unit equipped with a second magnification objective lens optical system, and a CCD Rotate the clamping table, the second magnification is higher than the first magnification, wherein the CCD acquisition unit equipped with the first magnification objective lens optical system is used for the surface of the sample to be tested after being irradiated by the laser light from the high-energy laser damage device Rapid pre-judgment of the irradiated points on the screen to obtain the damaged test points, and then re-inspect and judge the screened undamaged test points through the CCD acquisition unit equipped with the second magnification objective lens optical system. The CCD rotating clamping table Used to realize the rotation of the CCD acquisition unit equipped with the first magnification objective lens optical system and the CCD acquisition unit equipped with the second magnification objective lens optical system at the same test position, the Z-direction motion mechanism drives the stepping motor at the first Under the effect of adjusting the optical path automatic focusing of the above two CCD acquisition units;

The CCD auxiliary light source device includes an angle-adjustable light source holder and a CCD auxiliary light source, and the angle-adjustable light source holder is used to control the focal length of the CCD auxiliary light source; and

The sample stage motion control device includes a second drive stepper motor, a sample tooling table and a two-dimensional translation platform in the XY direction, and the second drive stepper motor makes the two-dimensional translation platform in the XY direction work so as to automatically adjust the position of the sample to be tested. Work station, the sample tooling platform is used to place the sample to be tested.

Preferably, the laser damage threshold test system adopts 1-on-1 mode to test the sample to be tested, and first records i×j test points before irradiation through the CCD acquisition unit equipped with the first magnification objective lens optical system The initial image of the first magnification objective lens optical system is used to irradiate j test points with laser light at each energy level one by one according to i energy levels at a given step size, and the CCD acquisition unit equipped with the first magnification objective lens optical system is used again Collect the irradiated images of i×j test points on the surface of the sample to be tested, compare the images of the test points before and after irradiation to obtain the damage test points, and finally collect them through the CCD equipped with the second magnification objective lens optical system The unit performs re-inspection and judgment on the screened undamaged test points, where i and j are natural numbers.

Preferably, the laser damage threshold testing system uses the R-on-1 mode to test the sample to be tested, and first sets a constant laser output energy so that the laser beam performs the first test on the surface of the sample to be tested at the same time interval Points are irradiated multiple times, and then the CCD acquisition unit equipped with the first magnification objective lens optical system is used for real-time image acquisition of the first test point after each irradiation, and compared with the image collected when not irradiated For comparison, when the damage is determined according to the preset judgment standard, the irradiation is stopped and the number of irradiations N is counted, and then replaced to the second test point on the surface of the sample to be tested, and the laser beam uses the same parameters for the second test point. Points are irradiated for (N-1) times, and then the surface of the second test point is observed through the CCD acquisition unit equipped with the second magnification objective lens optical system. If there is no laser damage, it can be determined that the number of damages is N , if there is damage, replace the third test point again, and observe the surface of the third test point through the CCD acquisition unit equipped with the second magnification objective lens optical system after decreasing the number of laser irradiation times, so as to decrease After n times of irradiation until there is no laser damage phenomenon, the number of damages caused by the laser energy is recorded as (N-n) times, where N and n are natural numbers.

Preferably, the spot diameter of the laser beam is between 0.6 mm and 1 mm.

Preferably, the laser damage threshold of the sample to be tested is determined by the output laser energy and the spot size of the laser beam obtained from the energy beam analysis performed by the laser test and analysis unit.

Preferably, the laser damage threshold testing system also includes an airflow surface cleaning device, including a cleaning nozzle, a solenoid valve, a dry filter, an air valve and an air source, wherein the air source is nitrogen, and nitrogen enters the air after the air valve is opened. The drying filter is dehumidified, and then the air pressure and flow are adjusted through the solenoid valve, and the cleaning nozzle is used to irradiate the surface irradiation point of the sample to be tested.

Preferably, the sample to be tested is an optical element, a dielectric film, a metal film or a semiconductor film.

Adopting the laser damage threshold testing system of the present invention can not only effectively overcome the disadvantages of strong subjectivity, large measurement error and long measurement time of the existing phase contrast microscopy method, but also satisfy the 1-on-1 and R- On-1 two measurement modes. Specifically, the laser damage threshold testing system has at least the following advantages:

1. Taking into account the measurement error and test efficiency. Based on the phase-contrast microscopy method, the invention effectively overcomes the shortcomings of large random errors and low testing efficiency in the manual testing process under the premise of meeting international standards. In contrast, the existing technology uses a single CCD image acquisition system laser damage test method, which is limited by the focusing size of the high-magnification CCD image sensor objective system, and can only improve the test efficiency by sacrificing the magnification of the objective optical system. As a result, the value of the test result is too large. In addition, the present invention introduces an air-flow automatic cleaning system to clean the surface of the sample after laser irradiation, which can prevent measurement errors caused by optical films or component material powders caused by damage, and further improve measurement accuracy.

2. Strong applicability. The present invention can realize the laser damage threshold measuring method of two modes of 1-on-1 and R-on-1 at the same time, and adopt the high-resolution color CCD and the graphic acquisition system matching it to be able to visually monitor the laser damage threshold Observing the damage morphology of the optical film or optical element after irradiation can be used not only for the test of the anti-laser damage performance of the material, but also for the analysis of the laser damage of the material. In addition, the samples to be tested in the present invention can be various optical elements, various dielectric films, metal films or semiconductor films.

3. It is convenient for industrial application. The test system of the present invention can realize programmed control, has a high degree of automation, and at the same time, each functional module has a high degree of technical maturity, so it can be conveniently implemented as an instrument and used in actual industrial production.

Description of drawings

Readers will have a clearer understanding of various aspects of the present invention after reading the detailed description of the present invention with reference to the accompanying drawings. in,

FIG. 1 shows a schematic structural diagram of a laser damage threshold testing system of the present invention.

1-Nd:YAG laser, 2-controllable attenuator, 3-beam splitter, 4-focus lens, 5-45 degree high mirror, 6-laser test and analysis unit, 7-central processing unit, 8-CCD clip Holding stage stepping drive motor, 9-Z motion mechanism, 10-low magnification CCD image acquisition unit, 11-angle adjustable light source clamping platform, 12-auxiliary light source, 13-high magnification CCD image acquisition unit, 14-CCD Rotary clamping stage, 15-sample stage driving stepper motor, 16-sample tooling stage, 17-sample to be tested, 18-two-dimensional translation stage in XY direction, 19-cleaning nozzle, 20-solenoid valve, 21-gas drying and filtration Device, 22-air valve, 23-cleaning air source

Detailed ways

In order to make the technical content disclosed in this application more detailed and complete, reference may be made to the drawings and the following various specific embodiments of the present invention, and the same symbols in the drawings represent the same or similar components. However, those skilled in the art should understand that the examples provided below are not intended to limit the scope of the present invention. In addition, the drawings are only for schematic illustration and are not drawn according to their original scale.

Before specifically introducing the laser damage threshold testing system of the present invention, two testing methods for laser damage threshold, ie, the R-on-1 method and the 1-on-1 method, are first briefly described.

R-on-1 damage test method - for the same point on the sample to be tested, the sample is repeatedly irradiated with increasing laser energy until damage occurs. During the test, the initial laser energy is required to be much smaller than the damage threshold of the sample, and the pulse laser energy that causes sample damage is recorded, which is considered as the damage threshold of the point. Then the damage threshold of multiple points on the same sample is measured, and the average value is obtained as the damage threshold of the tested sample.

1-on-1 damage test method - also known as zero-probability damage method. Use a single pulse laser with the same energy to irradiate m points, and record the number of damage n. Then the damage probability P of each energy laser irradiation is equal to n/m. Change the laser energy, and then measure the damage probability under the changed laser energy, including the energy points where the damage probability is 0 and 100%. Taking the laser energy as the horizontal axis and the damage probability as the vertical axis, the distribution of the damage probability and the laser energy point is obtained, and then fitted with a straight line and extrapolated to zero damage probability, the corresponding laser energy value is the damage of the tested sample threshold.

The laser damage threshold testing system of the present invention mainly includes a high-energy laser damage device, a high-resolution color CCD image damage discrimination device, a CCD auxiliary light source device and a sample stage motion control device.

The high-energy laser damage device of the present invention comprises a Nd:YAG laser 1 , a controllable attenuator 2 , a beam splitter 4 , a focusing lens 5 and a 45° high reflection mirror 6 . Wherein, the laser light emitted by the laser 1 is converged on the surface of the sample to be measured via the controllable attenuator 2 , the focusing lens 5 , the beam splitter 4 and the high reflection mirror 6 in sequence. Wherein, the laser 1 emits a high-energy laser beam with a wavelength of 1064 nm and a pulse width of 12 ns. The controllable attenuator 2 adjusts the laser energy emitted by the laser 1, so that the adjusted laser energy changes linearly within the range of 2-200mJ. In view of the measurement problems that may be caused by the poor stability of the pulsed laser, the high-energy laser damage device measures the energy and beam spot size of the output laser in real time through the beam splitter 4 and the laser test analysis unit 3, and uses it as the final calculation of the sample to be tested Basis for Laser Damage Threshold. Afterwards, the laser beam is irradiated onto the surface of the sample to be measured through the focusing lens 5 and the 45° high reflection mirror 6 . Here, the focusing lens 5 performs focusing processing on the adjusted laser beam. The beam splitter guides the low-energy laser into the laser test and analysis unit 3 at a ratio of 100:1 for energy beam analysis.

The high-resolution color CCD image damage discrimination device of the present invention comprises a drive stepper motor 8, a Z-direction motion mechanism 9, a CCD acquisition unit 12 equipped with a low-magnification objective lens optical system, and a CCD acquisition unit 14 equipped with a high-magnification objective lens optical system , CCD rotary clamping table 13. Among them, the CCD acquisition unit 12 equipped with a low-magnification objective lens optical system can quickly predict the irradiation points on the surface of the sample to be tested after laser irradiation, screen out the damage test points, and then use the high-magnification objective lens optical The CCD acquisition unit 14 of the system performs re-examination and judgment on the screened undamaged test points. The CCD rotating clamping table 13 can quickly realize the rotation of the CCD acquisition unit 12 equipped with a low-magnification objective lens optical system and the CCD acquisition unit 14 equipped with a high-magnification objective lens optical system at the same test position. The Z-direction movement mechanism 9 can adjust the optical path auto-focusing of the above two CCD acquisition units under the action of driving the stepper motor 8 .

The CCD auxiliary light source device of the present invention includes an angle-adjustable light source clamping platform 10 and a CCD auxiliary light source 11 . The angle-adjustable light source holder 10 is used to control the focal length of the CCD auxiliary light source 11 . For example, the CCD auxiliary light source 11 is adjusted through a software system.

The sample stage motion control device of the present invention includes a sample stage driving stepping motor 15 , a sample tooling stage 16 and a two-dimensional translation stage 18 in the XY direction. The sample stage drives the stepper motor 15 to make the two-dimensional translation stage 18 in the XY direction work so as to automatically adjust the position of the sample to be tested. The sample tooling table 16 is used to place the sample to be tested. For example, the sample tooling table 16 is controlled by programming to accurately move the sample to be tested to the laser irradiation and CCD testing positions.

In a specific embodiment, the laser damage threshold testing system adopts 1-on-1 mode to test the sample to be tested, and first records i×j pieces of The initial image of the test point before irradiation, and then irradiate j test points with laser light at each energy level one by one according to i energy levels with a given step size, and use the optical system equipped with the first magnification objective lens The CCD acquisition unit collects again the images of the i×j test points on the surface of the sample to be tested after irradiation, compares the images of the test points before and after irradiation to screen the damage test points, and finally passes through the second magnification objective lens The CCD acquisition unit of the optical system performs re-inspection and judgment on the screened undamaged test points, where i and j are natural numbers.

In a specific embodiment, the laser damage threshold testing system uses the R-on-1 mode to test the sample to be tested. First, a constant laser output energy is set so that the laser beam is tested on the surface of the sample at the same time interval. The first test point is irradiated multiple times, and then the CCD acquisition unit equipped with the first magnification objective lens optical system is used for real-time image acquisition of the first test point after each irradiation, and compared with the unirradiated The images collected during the test are compared, and when the damage is determined according to the preset judgment standard, the irradiation is stopped and the number of irradiations N is counted, and then it is replaced to the second test point on the surface of the sample to be tested. The second test point is irradiated for (N-1) times, and then the surface of the second test point is observed through the CCD acquisition unit equipped with the second magnification objective lens optical system. If there is no laser damage, it can be determined The number of damages is N. If there is damage, replace the third test point again, and observe the surface of the third test point through the CCD acquisition unit equipped with the second magnification objective lens optical system after decreasing the number of laser irradiation , after reducing the number of times of irradiation n times until there is no laser damage phenomenon, the number of damages caused by the laser energy is recorded as (N-n) times, where N and n are natural numbers.

In addition, when the sample to be tested is tested in the R-on-1 mode or 1-on-1 mode, the spot diameter of the laser beam is between 0.6 mm and 1 mm.

In addition, the laser damage threshold of the sample to be tested is determined by the output laser energy and the spot size of the laser beam obtained from the energy beam analysis by the laser test and analysis unit.

In a specific embodiment, the laser damage threshold testing system further includes an airflow surface cleaning device. The airflow type surface cleaning device includes a cleaning nozzle 19 , a solenoid valve 20 , a dry filter 21 , an air valve 22 and an air source 23 . In more detail, the gas source is nitrogen. After opening the gas valve 22, the nitrogen gas enters the dry filter 21 for dehumidification, and then passes through the solenoid valve 20 to adjust the air pressure and flow rate, and uses the cleaning nozzle 19 to irradiate the surface of the sample to be tested. , so as to blow off the dust generated by the damage of the sample to be tested after laser irradiation, and prevent it from affecting the judgment of CCD image damage. For example, the sample to be tested may be an optical element, a dielectric film, a metal film or a semiconductor film.

Example 1:

As shown in Figure 1, the high-energy laser (wavelength 1064nm, pulse width 12ns, single pulse energy can be adjusted in the range of 200mJ) emitted by Nd:YAG laser 1 passes through attenuator 2, focusing lens 3, beam splitter 4 and high reflection The device 5 then converges on the sample to be tested. The output laser energy can be adjusted linearly within the range of 2-200mJ by using multiple sets of attenuation sheets combined with the attenuator 2 . Use a beam splitter to guide a small-energy laser into a laser test and analysis unit for energy beam analysis at a ratio of 100:1, and measure its parameters in real time.

According to the material properties of the test optical element or film sample, set the test laser energy range, and divide it into 10 equal parts, and irradiate 10 test points at each energy level in the order from high to low. Control the central processing unit 7 by programming, start the CCD clamping stage stepping drive motor and the sample stage driving stepping motor, make the two-dimensional translation stage 18 in the -XY direction work, automatically adjust the station of the sample to be tested, and make it convenient The ground moves back and forth between the irradiation position and the CCD test position. At the same time, the focusing system of the auxiliary light source and the CCD image acquisition unit is controlled by a software system through the Z-direction movement mechanism 9 and the angle-adjustable light source clamping table. First, use the low-magnification CCD image acquisition unit 10 to compare the morphology changes of the test points on the surface of the sample to be tested before and after laser irradiation, and screen out the obvious damage points, and then use the high-magnification CCD image acquisition unit 13 to measure the remaining damage points according to the radiation. According to the level of energy, the test is carried out one by one from high to low until there is no damage to 10 test points under a certain low energy level. Among them, the function of using low-magnification CCD image acquisition unit is to use the characteristics of the large space distance between the objective lens system and the sample surface to implement real-time image acquisition, and to increase the test speed in turn, and the purpose of using high-magnification CCD image acquisition unit is to ensure that all All damage points can be detected, so that the measurement results are consistent with the international standards for phase contrast microscopy measurement.

While the laser irradiation experiment is being carried out, the airflow type sample self-cleaning system is turned on, the gas valve 22 is opened, and the nitrogen in the cleaning gas source 23 passes through the gas drying filter 21, and the electromagnetic valve 20 enters the cleaning nozzle 19, and the dry nitrogen is A certain pressure is used to purge the irradiated surface of the sample for 3 to 5 seconds, so as to avoid the sensor misjudgment caused by the material powder pollution after damage (especially the powder pollution generated after damage to nearby test points). Among them, the solenoid valve is controlled by a program, which can control its flow, pressure and switch.

Example 2:

Select the appropriate laser energy according to the specific conditions of the sample to be tested. As shown in Figure 1, the software drives each console to adjust the focal length of the auxiliary light source and the CCD image acquisition unit. Use the same energy and the same time interval to perform multiple irradiation treatments on the same area of the sample to be tested (the number of irradiations is set at 5 to 100 times), and at the same time as each irradiation, use a low-magnification CCD image acquisition unit to implement Observe the irradiation area of the sample to be tested, stop the irradiation when obvious damage is found, and record the irradiation times as N. Drive the two-dimensional translation platform in the XY direction, move the irradiation area to another position, irradiate this area N-1 times with the same energy and the same time interval, and then switch the high-magnification CCD image acquisition unit to the observation position to observe the damage Whether the surface is damaged, if there is no damage, the test is over; if there is damage, replace the irradiation area on the sample surface again, irradiate N-1 at the same energy and time interval, and use a high-magnification CCD image acquisition unit. If there is still damage after the measurement, then change the test position, and carry out N-2 irradiation at the same energy and time interval, in this way, until no damage is found in the high-magnification CCD image unit measurement of the S-th measurement area on the surface of the component to be tested , it is finally determined that at this energy level, the number of repeated damages is N-S+1.

Under the above conditions, the airflow sample self-cleaning system can be controlled by software after each irradiation, and the CCD image acquisition should be done after cleaning. In addition, in this embodiment, if the anti-damage performance of the element to be tested is low, such as for some metal thin films or functional thin films such as diamond-like films, due to the small number of irradiation N, high-magnification CCD can also be directly used The image acquisition unit observes the morphology of the test point after irradiation, so that the test can be completed only at a certain point on the surface of the sample to be tested.

Adopting the laser damage threshold testing system of the present invention can not only effectively overcome the disadvantages of strong subjectivity, large measurement error and long measurement time of the existing phase contrast microscopy method, but also satisfy the 1-on-1 and R- On-1 two measurement modes. Specifically, the laser damage threshold testing system has at least the following advantages:

1. Taking into account the measurement error and test efficiency. Based on the phase-contrast microscopy method, the invention effectively overcomes the shortcomings of large random errors and low testing efficiency in the manual testing process under the premise of meeting international standards. In contrast, the existing technology uses a single CCD image acquisition system laser damage test method, which is limited by the focusing size of the high-magnification CCD image sensor objective system, and can only improve the test efficiency by sacrificing the magnification of the objective optical system. As a result, the value of the test result is too large. In addition, the present invention introduces an air-flow automatic cleaning system to clean the surface of the sample after laser irradiation, which can prevent measurement errors caused by optical films or component material powders caused by damage, and further improve measurement accuracy.

2. Strong applicability. The present invention can realize the laser damage threshold measuring method of two modes of 1-on-1 and R-on-1 at the same time, and adopt the high-resolution color CCD and the graphic acquisition system matching it to be able to visually monitor the laser damage threshold Observing the damage morphology of the optical film or optical element after irradiation can be used not only for the test of the anti-laser damage performance of the material, but also for the analysis of the laser damage of the material. In addition, the samples to be tested in the present invention can be various optical elements, various dielectric films, metal films or semiconductor films.

3. It is convenient for industrial application. The test system of the present invention can realize programmed control, has a high degree of automation, and at the same time, each functional module has a high degree of technical maturity, so it can be conveniently implemented as an instrument and used in actual industrial production.

Hereinbefore, specific embodiments of the present invention have been described with reference to the accompanying drawings. However, those skilled in the art can understand that without departing from the spirit and scope of the present invention, various changes and substitutions can be made to the specific embodiments of the present invention. These changes and substitutions all fall within the scope defined by the claims of the present invention.

Claims (7)

1. A laser damage threshold testing system, characterized in that, said laser damage threshold testing system comprises: A high-energy laser damage device includes a laser, an attenuator, a focusing lens, a beam splitter, and a high reflection mirror, wherein the laser light emitted by the laser passes through the attenuator, the focusing lens, the beam splitter, and the The high reflection mirror converges on the surface of the sample to be tested. The laser emits a high-energy laser beam with a wavelength of 1064nm and a pulse width of 12ns. The attenuator adjusts the emitted laser energy so that the adjusted laser energy is Change linearly in the range of 2-200mJ, the focusing lens performs focusing processing on the adjusted laser beam, and the beam splitter guides the laser light with small energy into the laser test and analysis unit for energy beam analysis according to the ratio of 100:1; A high-resolution color CCD image damage discrimination device, including a first drive stepper motor, a Z-direction movement mechanism, a CCD acquisition unit equipped with a first magnification objective lens optical system, a CCD acquisition unit equipped with a second magnification objective lens optical system, and a CCD Rotate the clamping table, the second magnification is higher than the first magnification, wherein the CCD acquisition unit equipped with the first magnification objective lens optical system is used for the surface of the sample to be tested after being irradiated by the laser light from the high-energy laser damage device Rapid pre-judgment of the irradiated points on the screen to obtain the damaged test points, and then re-inspect and judge the screened undamaged test points through the CCD acquisition unit equipped with the second magnification objective lens optical system. The CCD rotating clamping table Used to realize the rotation of the CCD acquisition unit equipped with the first magnification objective lens optical system and the CCD acquisition unit equipped with the second magnification objective lens optical system at the same test position, the Z-direction motion mechanism drives the stepping motor at the first Under the effect of adjusting the optical path automatic focusing of the above two CCD acquisition units; The CCD auxiliary light source device includes an angle-adjustable light source holder and a CCD auxiliary light source, and the angle-adjustable light source holder is used to control the focal length of the CCD auxiliary light source; and The sample stage motion control device includes a second drive stepper motor, a sample tooling table and a two-dimensional translation platform in the XY direction, and the second drive stepper motor makes the two-dimensional translation platform in the XY direction work so as to automatically adjust the position of the sample to be tested. Work station, the sample tooling platform is used to place the sample to be tested. 2. The laser damage threshold testing system according to claim 1, characterized in that, the laser damage threshold testing system uses a 1-on-1 mode to test the sample to be tested, first through the first The CCD acquisition unit of the magnification objective optical system records the initial images of i×j test points before irradiation, and then irradiates j test points with laser light at each energy level one by one according to i energy levels at a given step size , and use the CCD acquisition unit equipped with the first magnification objective lens optical system to collect again the images of the i×j test points on the surface of the sample to be tested after irradiation, and compare the images of the test points before and after irradiation to screen for damage The test points are finally re-inspected and judged by the CCD acquisition unit equipped with the second magnification objective lens optical system, where i and j are natural numbers. 3. The laser damage threshold testing system according to claim 1, wherein the laser damage threshold testing system adopts the R-on-1 mode to test the sample to be tested, first setting a constant laser output energy , the laser beam is irradiated multiple times at the same time interval on the first test point on the surface of the sample to be tested, and then through the CCD acquisition unit equipped with the first magnification objective lens optical system, the first test point after each irradiation is irradiated Real-time image acquisition at a test point, and comparison with the image collected when not irradiated, stop the irradiation when the damage is determined according to the preset criteria, and count the number of irradiation times N, and then replace it on the surface of the sample to be tested The second test point of the laser beam is irradiated (N-1) times with the same parameters on the second test point, and then the second test is performed by the CCD acquisition unit equipped with the second magnification objective lens optical system If there is no laser damage, it can be determined that the number of damages is N. If there is damage, replace the third test point again, and after decreasing the number of laser irradiations, pass through the optical system equipped with the second magnification objective lens. The CCD acquisition unit observes the surface of the third test point, so that the number of times of irradiation is reduced n times until there is no laser damage phenomenon, and the number of damages caused by the laser energy is recorded as (N-n) times, wherein, N, n is a natural number. 4. The laser damage threshold testing system according to claim 2 or 3, characterized in that the spot diameter of the laser beam is between 0.6 mm and 1 mm. 5. The laser damage threshold testing system according to claim 1, wherein the laser damage threshold of the sample to be tested is obtained by the output laser energy and the laser beam spot size obtained by the energy beam analysis by the laser test and analysis unit. Decide. 6. The laser damage threshold testing system according to claim 1, wherein the laser damage threshold testing system also includes an airflow surface cleaning device, including a cleaning nozzle, a solenoid valve, a dry filter, an air valve and an air source , wherein, the gas source is nitrogen, after opening the gas valve, nitrogen enters the dry filter for dehumidification, and then adjusts the air pressure and flow through the solenoid valve, and uses the cleaning nozzle to shoot at the sample to be tested surface irradiation point. 7. The laser damage threshold testing system according to claim 1, wherein the sample to be tested is an optical element, a dielectric thin film, a metal thin film or a semiconductor thin film.

Images