CN103293862B - Silicon wafer edge protection device - Google Patents

Abstract

The invention discloses a silicon wafer edge protection device comprising a pedestal, a bearing, an air cylinder, an eccentric cam disc, at least three cam followers, at least three protection claws, at least three wire rails, at least three stop dogs and at least three guide threaded rods. The bearing comprises an outer ring and an inner ring, wherein the outer ring and the inner ring can move relatively, and the inner ring and the pedestal keep stationary relatively. The air cylinder comprises a fixed end and a moving end, wherein the fixed end is fixed on the pedestal. The eccentric cam disc and the outer ring keep stationary relatively, the eccentric cam disc is rotationally arranged on the pedestal and connected with the moving end, the eccentric cam disc comprises at least three uniformly distributed eccentric grooves, the eccentric grooves respectively comprise an eccentric arc, and the center of the arc is not coincident with the center of circle of the eccentric cam disc. The cam followers can be movably arranged corresponding to the eccentric grooves. The protection claws are arranged in a manner of being correspondingly connected with the cam followers. The silicon wafer edge protection device converts linear displacement into multiple equal radial displacements so as to finish multiple radial synchronous forces by one power source, and the silicon wafer edge protection device is simple in structure, low in friction force, high in precision and high in synchronism.

Description

Silicon Wafer Edge Protector

technical field

The invention relates to the field of integrated circuit manufacturing, in particular to a silicon chip edge protection device.

Background technique

Lithography equipment is mainly used in the manufacture of integrated circuits IC or other micro-devices. With a photolithographic apparatus, a mask pattern can be imaged on a photoresist-coated wafer, such as a semiconductor or an LCD panel. The lithography device exposes through the projection objective lens, and transfers the designed mask pattern to the photoresist. As the core component of the lithography device, the edge protection of the silicon wafer is important to realize the function of the edge protection device of the silicon wafer during the exposure process of the negative resist process. Influence.

In order to obtain the imaging effect, the photoresist is coated on the silicon wafer, and a photosensitive material that can produce corrosion patterns after exposure is also called photoresist (abbreviated as resist) or photosensitive adhesive, also known as photoresist or photoresist. Photoresist. It can be divided into positive photoresist (positive photoresist) and negative photoresist (negative photoresist). The photoresist whose exposed part is dissolved by developer is called positive photoresist, and the photoresist whose non-exposed part is dissolved by developer is called positive photoresist. The resist is called a negative photoresist. The silicon wafer edge protection device is a device produced for the negative photolithography process.

Known negative-resist lithography methods are a stand-alone product on a lithography production line, rather than integrated into a lithography apparatus. Doing so will increase the manufacturing time of the product, and at the same time lead to an increase in the purchase cost of the equipment and the cost of the manufacturing plant. A separate edge protection machine will greatly reduce the accuracy of the silicon wafer edge protection device, which will result in a high scrap rate and low efficiency.

The silicon wafer edge protection device system mainly completes the negative rubber exposure process, and the core component of the silicon wafer edge protection device is the silicon wafer edge protection device. Regarding this point, the applicant has briefly explained it in the document with the application number 200910195190.6 filed in China on September 4, 2009, so it will not be repeated here. This application is mainly optimization and innovation based on the foregoing.

Contents of the invention

The object of the present invention is to provide a silicon chip edge protection device to improve the deficiencies of the prior art.

In order to solve the above technical problems, the silicon chip edge protection device provided by the present invention includes a base, a bearing, a cylinder, an eccentric cam disc, at least three cam followers, at least three protective claws, at least three line rails, at least three stop and at least three lead screws. The bearing has an outer ring and an inner ring that can move relatively, and the inner ring and the base remain relatively stationary. The cylinder has a fixed end and a movable end, and the fixed end is fixed on the base. The eccentric cam disc and the outer ring of the bearing remain relatively stationary, and the eccentric cam disc is rotatably arranged on the base and connected to the movable end. The eccentric cam disc has at least three evenly distributed eccentric slots, and each eccentric slot includes an eccentric arc, and the center of the eccentric arc is not consistent with the center of the eccentric cam disc. The three cam followers are movably arranged respectively corresponding to the three eccentric grooves. The three protective pawls are respectively connected and arranged correspondingly to the three cam followers. At least three line rails are correspondingly arranged on the three protection claws respectively. At least three blocks are fixed on the base. At least three lead screws are correspondingly installed in the three stoppers respectively. When the movable end of the cylinder performs telescopic swing, it drives the eccentric cam disc to make a circular motion with the outer cylindrical surface of the bearing as the sliding axis, and the three eccentric grooves perform synchronous eccentric motion respectively, so that the three cam followers drive the three protective claws respectively. Make synchronous radial movement along the three guide screws, and the three line rails move synchronously with the three protective claws.

In one embodiment of the present invention, the inner ring of the bearing is fixed on the base, and the outer ring of the bearing is fixed on the eccentric cam disc.

In an embodiment of the present invention, each eccentric groove further includes two concentric arcs connected to two ends of the eccentric arc respectively, and the centers of the two concentric arcs coincide with the centers of the eccentric cam disc.

In an embodiment of the present invention, each protective claw is C-shaped, and a through hole is provided at one end thereof, and an inclined surface or a straight surface is formed at the other end.

In an embodiment of the present invention, the silicon wafer edge protection device further includes an air blowing mechanism disposed on the base.

In an embodiment of the present invention, the silicon chip edge protection device further includes at least three springs, which are respectively sleeved on the three lead screws, and respectively supported by the three protection claws.

In an embodiment of the present invention, the silicon wafer edge protection device further includes at least three centering mechanisms, which are respectively arranged on the three protection claws and move synchronously with the three protection claws.

In an embodiment of the present invention, the silicon chip edge protection device further includes a sensor disposed on the base.

In an embodiment of the present invention, the silicon wafer edge protection device further includes a dust cover and steel balls, the dust cover is fixed on the base and pressed above the eccentric cam disc, and the steel ball is disposed in the dust cover.

In an embodiment of the present invention, the silicon wafer edge protection device further includes a pressing cover, which is pressed and bonded to the steel ball.

To sum up, in the silicon wafer edge protection device of the present invention, the telescopic swing of the cylinder will drive the eccentric cam disc to make a circular motion, and at this time the vector is converted from a linear swing to an axial motion. At the same time, the circular motion of the eccentric cam disk will make the three eccentric slots on it move synchronously, so that the three cam followers will respectively drive the three protective claws to make synchronous radial movement. At this time, the vector is converted from axial movement to radial movement. Therefore, the present invention can convert a linear displacement into multiple equally divided radial displacements, so as to realize multiple radial synchronous forces through one power source. The silicon chip edge protection device provided by the invention has the advantages of simple structure, small friction, high precision, good reliability and high synchronization.

Description of drawings

Fig. 1 is a schematic front view of a silicon wafer edge protection device;

Fig. 2 is a schematic top view of a silicon wafer edge protection device;

Fig. 3 is a schematic diagram of a right side view of a silicon wafer edge protection device;

Fig. 4 is a vector conversion schematic diagram of converting the linear swing of the silicon wafer edge protection device into circular motion;

Fig. 5 is a schematic diagram of converting one circular motion of the silicon wafer edge protection device into multiple synchronous eccentric motions;

Fig. 6 is a schematic diagram of converting multiple synchronous eccentric movements of the silicon wafer edge protection device into synchronous radial movements.

Detailed ways

The idea, specific structure and technical effects of the present invention will be further described below in conjunction with the accompanying drawings, so as to fully understand the purpose, features and effects of the present invention.

Fig. 1 is a schematic front view of a silicon wafer edge protection device. Fig. 2 is a schematic top view of a silicon wafer edge protection device. Fig. 3 is a schematic diagram of a right side view of a silicon wafer edge protection device. Please refer to Figure 1 to Figure 3. The silicon wafer edge protection device 30 provided in this embodiment can be used to operate the protection ring 24 to realize the silicon wafer edge protection during the exposure process of the negative resist process. Here, the silicon chip edge protection device 30 may include a cylinder 1, a hexagon socket head cap screw 2, an adjusting pressure block 3, an air blowing mechanism 4, a sensor 5, a short head screw 6, a dust cover 7, a base 8, and an eccentric cam Disk 9, steel ball 10, bearing 11, adjusting base 12, bearing cover plate 13, small short head screw 14, camshaft follower 15, square nut 16, centering mechanism 17, protective claw 18, spring 19, stopper 20. Line rail 21, cover plate 22, guide screw 23, bearing pressure plate 25, gland screw 26, adjustment washer 27, steel ball 28 and gland 29. However, the present invention does not impose any limitation thereto. In other embodiments, when the silicon wafer edge protection device 30 is applied to pick and place different objects in other different occasions, it may also only include the base 8, the cylinder 1, the eccentric cam disc 9, the cam follower 15 and the protection claw 18 .

In this embodiment, the hexagon socket head cap screw 2 , the adjustment pressing block 3 and the adjustment base 12 can realize the position adjustment of the silicon wafer edge protection device 30 in the horizontal plane along the up and down direction. Specifically, the adjusting pressing block 3 can be fixed on the adjusting base 12 , and the adjusting pressing block 3 can have an elongated through hole extending along the vertical direction in the horizontal plane. The hexagon socket head cap screw 2 is slidably arranged in the elongated through hole, and is fixed on the base 8 to drive it to slide along the elongated through hole, so as to realize the upward and downward movement of the silicon chip edge protection device 30 in the horizontal plane. position adjustment. However, the present invention does not impose any limitation thereto.

In this embodiment, the blowing mechanism 4 can be disposed on the base 8 . Here, the blowing mechanism 4 may include pipeline accessories and air pipes. The pipeline accessories are arranged on the base 8, and there are several evenly distributed U-shaped grooves under the base 8. The gas pipe will distribute it to the U-shaped groove of the base 8 after receiving the gas. Here, the protection ring 24 can be disposed directly under the base 8 . Therefore, the upper part of the protective ring 24 is subjected to the gas force of the blowing mechanism 4 , so that the protective ring 24 is easily separated from the silicon wafer edge protection device 30 . However, the present invention does not impose any limitation thereto.

In this embodiment, the sensor 5 is disposed on the base 8 . When the protection claw 18 completes the pick-and-place action, the sensor 5 can detect whether the protection ring 24 is in place. After the protection ring 24 is in place, the silicon wafer edge protection device 30 can proceed to the next step. However, the present invention does not impose any limitation thereto.

In this embodiment, the air cylinder 1 has a fixed end and a movable end, the fixed end is fixed on the base 8, and the movable end can perform telescopic swing.

In this embodiment, the eccentric cam disc 9 can be circular, and there are at least three evenly distributed eccentric grooves in the circular ring. The eccentric groove can be through groove or non-through groove. Here, three eccentric grooves in the form of through grooves are taken as an example for illustration, and the distance between adjacent eccentric grooves is 120 degrees. However, the present invention does not impose any limitation thereto. In other embodiments, in order to ensure the reliability of picking and placing the protection ring 24, there may also be more eccentric grooves. Here, each eccentric groove further includes two concentric arcs and one eccentric arc, and the two concentric arcs are respectively connected to two ends of the eccentric arc. The centers of the two concentric arcs coincide with the centers of the eccentric cam disc 9, but the centers of the eccentric arcs are inconsistent with the center of the eccentric cam disc 9, that is, there is a certain amount of offset from the center of the eccentric cam disc 9. However, the present invention does not impose any limitation on the number of concentric arcs and eccentric arcs. In other embodiments, each eccentric groove may only have one eccentric arc.

In this embodiment, the eccentric cam plate 9 can be connected to the movable end of the cylinder 1, and can be rotatably arranged on the base 8 through the bearing 11, so as to play the role of damping and reducing friction. Specifically, the inner ring of the eccentric cam disc 9 may have a circular concave table surface for mounting the bearing 11 . The bearing cover plate 13 and the bearing pressing plate 25 can be disposed above the bearing 11 . The bearing 11 has an outer ring and an inner ring that can move relatively. Wherein, the outer ring of the bearing 11 can keep relatively stationary with the eccentric cam disc 9 . Here, the upper end surface of the eccentric cam disc 9 can be provided with a plurality of threaded holes, and the fixing screws can be fixed in the threaded holes of the eccentric cam disc 9 through the bearing plate 25 and the outer ring of the bearing 11 in sequence, so that the bearing 11 The outer ring is fixed to the eccentric cam disc 9 . However, the present invention does not impose any limitation thereto. In other embodiments, the outer ring of the bearing 11 and the eccentric cam plate 9 can be kept relatively stationary by setting a shaft sleeve or other means. In addition, in this embodiment, the inner ring of the bearing 11 can keep relatively stationary with the base 8 . For example, the inner ring of the bearing 11 may be fixed to the base 8 . However, the present invention does not impose any limitation thereto. In other embodiments, the inner ring of the bearing 11 and the base 8 can also be kept relatively stationary by setting a shaft sleeve or other means. In addition, small short-head screws 14 can be used to fix the bearing cover plate 13 to the base 8, and maintain a certain distance from the eccentric cam plate 9, so that the eccentric cam plate 9 can float within a certain range relative to the base 8, To reduce the frictional force of the eccentric cam disc 9 to ensure the high efficiency of operation. However, the present invention does not impose any limitation thereto. In addition, in this embodiment, steel balls 10 may be arranged in the lower end surface of the eccentric cam disc 9 .

In this embodiment, there may be three cam followers 15 , which are movably arranged corresponding to the three eccentric grooves of the eccentric cam disc 9 . However, the present invention does not impose any limitation on this, and it can be adjusted according to the number of eccentric grooves of the eccentric cam disc 9 . Here, when the movable end of the cylinder 1 performs telescopic swing, the eccentric cam disc 9 is driven to perform circular motion with the outer cylindrical surface of the bearing 11 as the sliding axis, and the three cam followers 15 will perform synchronous radial motion.

In this embodiment, the number of protection claws 18 can also be three correspondingly, which are respectively connected and arranged correspondingly to the three cam followers 15 . Each protection claw 18 can be C-shaped, and one end is provided with a through hole, and the other end is inclined or straight. However, the present invention does not impose any limitation on this, and it can be adjusted according to the number of cam followers 15 . Here, when the three cam followers 15 make synchronous radial movements, they respectively drive the three protective claws 18 to make synchronous radial movements, so as to realize the pick-and-place of the protective ring 24 .

In this embodiment, the numbers of the springs 19 , the stoppers 20 and the lead screws 23 may also correspond to three respectively. However, the present invention does not impose any limitation on this, and it can be adjusted according to the number of the protection claws 18 . Here, the three stoppers 20 are all fixed on the base 8, the three guide screws 23 are correspondingly installed in the three stoppers 20, the three springs 19 are respectively sleeved on the three guide screws 23, and respectively Hold against three protective claws 18 . The three protection claws 18 can move synchronously and radially along the three lead screws 23 respectively, and the spring 19 can buffer and overload the protection claws 18 . However, the present invention does not impose any limitation thereto.

In this embodiment, the number of wire rails 21 can also be three, which are respectively arranged on the three protection claws 18 and move synchronously with the three protection claws 18 to reduce the frictional force of the protection claws 18 . However, the present invention does not impose any limitation on this, and the number of wire rails 21 can be adjusted accordingly according to the number of protection claws 18 . Specifically, in this embodiment, the upper end of the wire rail 21 can be fixed to the cover plate 22 by screws, that is, the upper end of the wire rail 21 remains stationary relative to the cover plate 22, while the lower end of the wire rail 21 can be fixed to the protective claw 18, to keep relatively stationary with protection claw 18. However, the present invention does not impose any limitation thereto.

In this embodiment, the number of centering mechanisms 17 can also be three, which are respectively arranged on the three protection claws 18 and move synchronously with the three protection claws 18 . However, the present invention does not impose any limitation on this, and the centering mechanism 17 can be adjusted according to the number of the protection claws 18 . The centering mechanism 17 can center the protective ring 24 . As the three centering mechanisms 17 move toward the center of the protection ring 24 simultaneously, the original eccentric protection ring 24 can return to the center position. Here, the centering mechanism 17 can be a ball head screw, which can be fixed into a through hole at one end of the protection claw 18 through a square nut 16 . However, the present invention does not impose any limitation thereto.

In this embodiment, after the dust cover 7 and the adjusting washer 27 are aligned, the gland screw 26 can pass through the dust cover 7 and the adjusting washer 27 and be fixed on the base 8 to fix the dust cover 7 to the base 8 And press fit on the top of the eccentric cam disc 9. Here, the steel ball 28 is arranged in the dustproof cover 7, and the gland 29 is fixed on the top of the dustproof cover 7 by the short head screw 6, and the gland 29 is pressed against the steel ball 28 to prevent the eccentric cam disc 9 from moving in the horizontal direction. Tilting ensures that the entire edge protector 30 runs smoothly.

The working principle of the silicon wafer edge protection device 30 provided by the preferred embodiment of the present invention will be described in detail below with reference to FIGS. 4 to 6 .

Fig. 4 is a schematic diagram of the vector conversion of the linear swing of the silicon wafer edge protection device into circular motion. Fig. 5 is a schematic diagram of converting one circular motion of the silicon wafer edge protection device into multiple synchronous eccentric motions. Fig. 6 is a schematic diagram of converting multiple synchronous eccentric movements of the silicon wafer edge protection device into synchronous radial movements. Please refer to Figure 4 to Figure 6.

In this embodiment, the action flow of the silicon wafer edge protection device 30 is: the telescopic swing of the cylinder 1 --> the action of the eccentric cam disc 9 --> the action of the cam follower 15 --> the action of the protection claw 18 --> the action of the protection ring 24 were picked up or put down. Thus, the process of transforming a linear motion into multiple equal-divided synchronous radial motions can be completed in the form of vector conversion. Specifically, the following three steps may be included.

The first step: the linear swing is converted into the vector conversion of circular motion.

As shown in FIG. 4 , the silicon wafer edge protection device 30 is rotated at a small angle around the C axis by the cylinder 1 and stretched or shortened. The length of cylinder 1 is changed from L1 to L2 after stretching. Cylinder 1 will move circularly with eccentric cam disc 9, and the motion track is B1 to B2. The eccentric cam disc 9 drives the inner ring of the bearing 11 to perform circular motion. The motion trajectory is from B1 to B2 to form the initial position angle Φ1 of cylinder 1, Cylinder 1 end position angle Φ2, Cylinder 1 working swing angle d is the length of AC, r is the length of AB, L1 is the original length of cylinder 1, and L2 is the extended length of cylinder 1. It is the swing angle of the cylinder 1 at the center A after the linear swing is converted into a circular motion, because the swing angle of the cylinder 1 at the center A is the same as the swing angle of the eccentric cam disc 9 at the center A. Therefore, the cylinder 1 will drive the eccentric cam disc 9 to make a circular motion, and the swing angle is

Step 2: One circular motion is transformed into multiple synchronous eccentric motions.

As shown in Figure 5 and Figure 6, the coordinates of the centers of the three eccentric grooves of the eccentric cam disc 9 relative to the origin of the Cartesian coordinates are o1 (a1, b1), o2 (a2, b2), o3 (a3, b3). Here, each eccentric groove consists of three circular arcs. When the cylinder 1 makes a circular motion with the eccentric cam disc 9, the swing angle is , the three eccentric grooves will also make circular motion around the center of the circle.

Because the D2<->D3 arc grooves of the three eccentric grooves are centered on o1, o2, and o3, which are eccentric relative to the center of the circle. When the eccentric cam disc 9 rotates, the arc movement trajectory of D2<->D3 is an involute curve relative to the center o, and its trajectory equation is

The D1<->D2 arc groove is an arc groove with o as the center and a radius of r1. When the eccentric cam disc 9 rotates, the D1<->D2 arc groove is an arc trajectory curve with o as the center of the circle. , and its trajectory equation is ρ=r1, (117°≤θ≤122°).

The arc groove of D3<->D4 is an arc groove with o as the center and radius r1. When the eccentric cam disc 9 rotates, the D3<->D4 arc groove is an arc track curve with o as the center of the circle, and its track equation is ρ=r2, (149°≤θ≤154°).

D1<->D4 The trajectory of the entire arc groove movement is the arc with o as the center --> involute --> the compound curve of the arc. Here, because there are three circular arc grooves on the eccentric cam disk 9, when the eccentric cam disk 9 moves, there will be three circular arc groove motion tracks.

Therefore, one circular motion can be transformed into multiple synchronous eccentric motions through three or more eccentric grooves of the eccentric cam disc 9 .

Step 3: Multiple synchronous eccentric movements are transformed into synchronous radial movements.

As shown in Figure 5, the cylinder 1 will move in a circle with the eccentric cam disc 9, the movement track of the cylinder 1 is from B1 to B2, and the eccentric groove of the eccentric cam disc 9 moves from the position D1 to the position D4. Moreover, the eccentric cam disc 9 respectively drives the three cam followers 15 for radial movement, and the three cam followers 15 respectively drive the three protection pawls 18 for radial movement. Due to the working swing angle of cylinder 1 How much it rotates, how much the corresponding eccentric cam disc 9 will rotate, that is, the working swing angle of cylinder 1 It is synchronous with the eccentric cam disc 9. That is, the working swing angle of cylinder 1 Exactly the rotation angle of eccentric cam disc 9. From this, we can know the trajectory equation of any point of the eccentric groove, that is, we can know the trajectory of each eccentric groove, that is, we can know the working swing angle of cylinder 1 When how much it rotates, the distance from the cam follower 15 to the center o is the change value of ρ, and the coordinates (x1, y1), (x2, y2), (x3, y3) of the three cam followers 15 at any time can be known at the same time , where x1=ρcos(θ1), y1=ρsin(θ1), x2=ρcos(θ1+120), y2=ρsin(θ1+120), x3=ρcos(θ1+240), y3=ρsin(θ1+240 ), the Cartesian coordinate equation of the known three-point circle is

$\left|\begin{array}{cccc}{\mathrm{<span\; class="notranslate">\; x</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; +</span>{\mathrm{<span\; class="notranslate">\; the\; y</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}& \mathrm{<span\; class="notranslate">\; x</span>}& \mathrm{<span\; class="notranslate">\; the\; y</span>}& \mathrm{<span\; class="notranslate">\; 1</span>}\\ {\mathrm{<span\; class="notranslate">\; x</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; +</span>{\mathrm{<span\; class="notranslate">\; the\; y</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}& {\mathrm{<span\; class="notranslate">\; x</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}& {\mathrm{<span\; class="notranslate">\; the\; y</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}& \mathrm{<span\; class="notranslate">\; 1</span>}\\ {\mathrm{<span\; class="notranslate">\; x</span>}}_{\mathrm{<span\; class="notranslate">\; 2</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; +</span>{\mathrm{<span\; class="notranslate">\; the\; y</span>}}_{\mathrm{<span\; class="notranslate">\; 2</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}& {\mathrm{<span\; class="notranslate">\; x</span>}}_{\mathrm{<span\; class="notranslate">\; 2</span>}}& {\mathrm{<span\; class="notranslate">\; the\; y</span>}}_{\mathrm{<span\; class="notranslate">\; 2</span>}}& \mathrm{<span\; class="notranslate">\; 1</span>}\\ {\mathrm{<span\; class="notranslate">\; x</span>}}_{\mathrm{<span\; class="notranslate">\; 3</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; +</span>{\mathrm{<span\; class="notranslate">\; the\; y</span>}}_{\mathrm{<span\; class="notranslate">\; 3</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}& {\mathrm{<span\; class="notranslate">\; x</span>}}_{\mathrm{<span\; class="notranslate">\; 3</span>}}& {\mathrm{<span\; class="notranslate">\; the\; y</span>}}_{\mathrm{<span\; class="notranslate">\; 3</span>}}& \mathrm{<span\; class="notranslate">\; 1</span>}\end{array}\right|<span\; class="notranslate">\; =</span>\mathrm{<span\; class="notranslate">\; 0</span>}$

Therefore, it can be seen that the three protective pawls 18 make synchronous radial movement.

To sum up, in the silicon wafer edge protection device provided by the preferred embodiment of the present invention, the telescopic swing of the cylinder will drive the eccentric cam disc to make a circular motion, and the vector is converted from a linear swing to an axial motion. At the same time, the circular motion of the eccentric cam disk will make the three eccentric slots on it move synchronously, so that the three cam followers will respectively drive the three protective claws to make synchronous radial movement. At this time, the vector is converted from axial movement to radial movement. Therefore, the present invention can convert a linear displacement into multiple equally divided radial displacements, so as to realize multiple radial synchronous forces through one power source. The silicon chip edge protection device provided by the invention has the advantages of simple structure, small friction force, high precision, good reliability and high synchronization.

The preferred specific embodiments of the present invention have been described in detail above. It should be understood that those skilled in the art can make many modifications and changes according to the concept of the present invention without creative efforts. Therefore, all technical solutions that can be obtained by those skilled in the art based on the concept of the present invention through logical analysis, reasoning or limited experiments on the basis of the prior art shall be within the scope of protection defined by the claims.

Claims (10)

1. A silicon chip edge protection device, characterized in that, comprising: base; The bearing has an outer ring and an inner ring that can move relatively, and the inner ring and the base remain relatively stationary; The cylinder has a fixed end and a movable end, and the fixed end is fixed to the base; The eccentric cam disc keeps relatively stationary with the outer ring of the bearing, the eccentric cam disc is rotatably arranged on the base and connected to the movable end, and the eccentric cam disc has at least three evenly distributed Eccentric grooves, and each of the eccentric grooves includes an eccentric arc, and the center of the eccentric arc is not consistent with the center of the eccentric cam disc; At least three cam followers are movably arranged correspondingly to the three eccentric grooves; At least three protective claws are respectively connected and arranged correspondingly to the three cam followers; At least three line rails are correspondingly arranged on the three protective claws; at least three stops, all fixed to the base; and At least three lead screws are correspondingly installed in the three stoppers; Wherein, when the movable end of the cylinder performs telescopic swing, it drives the eccentric cam disc to perform circular motion with the outer cylindrical surface of the bearing as the sliding axis, and the three eccentric grooves perform synchronous eccentric motion respectively, so that all The three cam followers respectively drive the three protective claws to move synchronously along the three guide screws in a radial direction, and the three line rails move synchronously with the three protective claws. 2 . The silicon wafer edge protection device according to claim 1 , wherein the inner ring of the bearing is fixed to the base, and the outer ring of the bearing is fixed to the eccentric cam disc. 3 . 3. The silicon chip edge protection device according to claim 1, wherein each said eccentric groove further comprises two concentric arcs, respectively connected to two ends of said eccentric arcs, said two concentric arcs The center of the arc coincides with the center of the eccentric cam disc. 4 . The silicon wafer edge protection device according to claim 1 , wherein each of the protection claws is C-shaped, and a through hole is provided at one end thereof, and a slope or a straight surface is formed at the other end. 5 . The silicon wafer edge protection device according to claim 1 , further comprising an air blowing mechanism disposed on the base. 6 . 6. The silicon wafer edge protection device according to claim 1, characterized in that, the silicon wafer edge protection device further comprises at least three springs, which are respectively sleeved on the three lead screws correspondingly, and respectively resist on the three protective claws. 7. The silicon wafer edge protection device according to claim 1, characterized in that, the silicon wafer edge protection device further comprises at least three centering mechanisms, respectively correspondingly arranged on the three protection claws, and following the The three protective claws move synchronously. 8. The silicon wafer edge protection device according to claim 1, further comprising a sensor disposed on the base. 9. The silicon wafer edge protection device according to claim 1, characterized in that, the silicon wafer edge protection device further comprises a dust cover and steel balls, the dust cover is fixed on the base and pressed against the Above the eccentric cam disc, the steel ball is arranged in the dust cover. 10. The silicon wafer edge protection device according to claim 9, characterized in that, the silicon wafer edge protection device further comprises a pressing cover, which is pressed onto the steel ball.