CN104749891B - A kind of silicon chip edge protection device of handgrip self-locking - Google Patents
A kind of silicon chip edge protection device of handgrip self-locking Download PDFInfo
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- CN104749891B CN104749891B CN201310734603.XA CN201310734603A CN104749891B CN 104749891 B CN104749891 B CN 104749891B CN 201310734603 A CN201310734603 A CN 201310734603A CN 104749891 B CN104749891 B CN 104749891B
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- conical surface
- silicon chip
- gripper
- edge protection
- push rod
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Abstract
The present invention proposes a kind of silicon chip edge protection device of handgrip self-locking, including servomotor, reducing gear, catenary motion mechanism and gripper equipment, it is characterised in that：The gripper equipment includes a downward conical surface cam and is close to the push rod of conical surface cam, and during catenary motion, the conical surface of the conical surface cam promotes lever drives gripper to open, close up by push rod to the gripper equipment.The silicon chip edge protection device of handgrip self-locking proposed by the present invention, simple structure, good manufacturability, easily, it is good to make disposition by oneself, strong adaptability, and has auto-lock function, and can prevent protection ring pinching deformation for processing and manufacturing.
Description
Technical field
The present invention relates to IC manufacturing equipment technology field, especially, is related to a kind of handgrip for litho machine certainly
The silicon chip edge protection device of lock.
Background technology
During silicon chip edge protection device is ic manufacturing technology field, it is to improve silicon chip production efficiency, to negative glue work
A kind of device protected to silicon chip edge while skill silicon wafer exposure processing and manufacturing, is to realize silicon wafer exposure and edge-protected
The necessary devices for synchronously carrying out, loaded on exposure sources（Litho machine）It is internal.Need to have and quickly and accurately capture edge-protected ring
Function, and complete to place a series of automatically workings that edge-protected ring leaves silicon chip in silicon chip top, the edge-protected ring of crawl.
Because edge-protected ring it is relatively thin, it is each to gap very little with silicon chip, place, the position of crawl silicon chip edge protection ring
Accuracy, the synchronicity of gripper motion, centering are to realize edge-protected key, its kinematic accuracy, work efficiency and its can
The scrappage of the quality, productivity ratio and silicon chip of silicon chip manufacture is directly affected by property.Also remote-effects the property of the whole machine of litho machine
Energy and safety.Therefore, how to improve efficiency, raising reliability becomes edge protection device problem demanding prompt solution.
A kind of silicon chip edge guard method disclosed in Chinese patent 200910055394.X and device and Chinese patent
201010102423.6 disclosed silicon chip edge protection device and its application process, mentioned edge protection device, in the presence of
Lieque point：
1. the three eccentricity linkage cam mechanism for referring in liang patent, is to realize protection ring crawl functional entity, and its structure is multiple
Miscellaneous, the groove manufacturability of particularly discontinuous eccentric arc is poor, foozle is big, debugs loaded down with trivial details so that gripper makes disposition by oneself
Difference.Protection ring and silicon chip decentraction are easily caused, silicon chip is in turn resulted in and is scrapped.
2. the cam face of three eccentricity linkage cam mechanism is positioned on roller, is rubbed little, in case of died suddenly, due to
The biasing of structure self gravitation, cam have the possibility for producing rotation, cause gripper to unclamp protection ring and come off, have damage silicon chip and light
Quarter machine work stage potential risk.
3. it is rigid grasp that gripper can only capture a kind of protection ring of specification, bad adaptability, and gripper, easily causes guarantor
Retaining ring deforms, and reduces Si wafer quality.
The content of the invention
In order to overcome deficiency of the prior art, the present invention to propose a kind of silicon chip edge protection device of handgrip self-locking, bag
Include servomotor, reducing gear, catenary motion mechanism and gripper equipment, it is characterised in that：The gripper equipment include one to
Under conical surface cam and be close to the push rod of conical surface cam, during catenary motion, the conical surface is convex for the gripper equipment
The conical surface of wheel promotes lever drives gripper to open, close up by push rod.
Preferably, the push rod also includes stage clip and the extension spring for connecting and acting on the push rod, by adjusting the pressure
The pressure of spring and extension spring is adjusting the clamping force of gripper equipment.
Preferably, the push rod is uniform three push rods circumferentially.
Preferably, the gripper equipment also includes the piston rod combined as a whole with conical surface cam, when compressed air-driven is lived
Stopper rod is moved upwards, drives conical surface cam to move upwards, and push rod is inwardly moved with the conical surface, promotes lever drives gripper outward turning；
When compressed air-driven piston rod is moved downward, conical surface cam is driven to move downward, push rod is moved out with the conical surface, promotes thick stick
Bar drives gripper inward turning.
Preferably, when the gripper equipment is in the state of gripping edge protection ring, in case of died suddenly, conical surface cam
In balance in the presence of push rod thrust and gravity, keep in situ motionless, make lever be still within current location and remain stationary as.
The silicon chip edge protection device of handgrip self-locking proposed by the present invention, is had the advantage that compared with prior art：
1. adopt conical surface cam drive gripper action, simple structure, good manufacturability, processing and manufacturing easily, to make disposition by oneself
It is good.
2. gripper equipment structure is the self-enclosed type of gravity, with auto-lock function, overcomes and is possible to grab due to dying suddenly
Pawl unclamps, and causes to damage the latent dangerous factor of silicon chip.
3. gripper is replaceable, strong adaptability.Gripper clamps protection ring using elastic damping simultaneously, eliminates protection ring clamping
Deformation.
Description of the drawings
Can be described in detail by invention below with regard to the advantages and spirit of the present invention and institute's accompanying drawings are obtained further
Solution.
Fig. 1 is that silicon chip edge protection device protection ring of the present invention joins structural representation；
Fig. 2 is gripper equipment structural representation in silicon chip edge protection device of the present invention.
Specific embodiment
Describe the specific embodiment of the present invention below in conjunction with the accompanying drawings in detail.
As shown in figure 1, the silicon chip edge protection device of handgrip self-locking of the present invention, by servomotor 1, reducing gear 2, vertical
Motion 3 and gripper equipment 4 are constituted.Servomotor 1 drives catenary motion machine by control system control by reducing gear 2
The rotary motion of motor is changed into linear motion, moves to predetermined delivery position so as to carry gripper equipment 4, put by structure 3
Put a series of automatically workings that edge-protected ring leaves silicon chip in silicon chip top, the edge-protected ring of crawl.
The gripper equipment 4 of the silicon chip edge protection device of handgrip self-locking of the present invention is as shown in Fig. 2 main by cylinder body 401, work
Stopper rod 402, cylinder cap 403, conical surface cam 404, push rod 405, stage clip 406, extension spring 407, body shell 408, lever 409, gripper 410,
Bearing pin 411 and gland 412 etc. are constituted.
1 location and installation of servomotor on reducing gear 2, reducing gear 2 be rigidly mounted to catenary motion mechanism 3 it
On, the rotary motion of servomotor 1 is transferred to catenary motion mechanism 3 by reducing gear 2.Catenary motion mechanism 3 is electric by servo
The rotary motion of machine 1 is changed into linear motion, drives gripper equipment 4 to do vertical upper and lower motion, moves to delivery position, by pacifying
The gripper equipment 4 of 3 lower end of catenary motion mechanism is mounted in, the crawl to edge protection ring is realized, is placed function, so as to realize silicon chip
Edge-protected ring is placed on into silicon chip top before exposure, is protected silicon chip edge not to be exposed, is captured after silicon wafer exposure edge-protected
Ring departs from silicon chip, to provide the space of transmission silicon chip.The entrance delivery position of gripper equipment 4, remove the action of delivery position by
Catenary motion mechanism 3 completes.Gripper equipment 4 passes through screw（Do not draw in figure）Rigidly it is bound up with catenary motion mechanism 3,
Realize that gripper equipment 4 is accurately located at the edge-protected ring delivery position on silicon chip top by catenary motion mechanism.
During work, start servomotor 1, the rotary motion of servomotor 1 is reached by catenary motion machine by reducing gear 2
The rotary motion of motor is changed into downward linear motion from catenary motion mechanism 3 by structure 3, so as to drive gripper equipment 4 (to press from both sides
Edge-protected ring) by initial position, move downwardly to the delivery position on silicon chip top.Now, compressed air is by under cylinder body 401
Portion's air inlet, drives piston rod 402 to move upwards, drives the conical surface cam 404 combined as a whole with piston rod 402 to move upwards.With
This simultaneously, the push rod 405 of three radial equipartitions in body shell 408 in the presence of extension spring 407, stage clip 406, all the time
It is close to the conical surface of conical surface cam 404, as the conical surface is synchronously inwardly moved along 408 gathering sill of body shell, while lever 409 is drawing
In the presence of spring 407, rotate around bearing pin 411, drive three 410 outward turnings of gripper, until piston rod 402 upper surface reach with
The upper extreme position of 401 cylinder bottom of cylinder body contact, motion stop.Now, extreme position is screwed into outside three grippers 410, gripper 410 is loose
Open silicon chip edge protection ring and edge-protected ring is placed on the top of silicon chip, complete placement action.Afterwards gripper equipment 4 by
Catenary motion mechanism 3 returns to initial position under the driving of servomotor 1.
Now start to silicon wafer exposure, edge-protected ring protection silicon chip edge is not exposed.
After the completion of silicon wafer exposure, gripper equipment 4 is moved to the handing-over of silicon chip top edge protection ring again by initial position
Position, now, top air inlet of the compressed air by cylinder body 401 is driven piston rod 402 to move downward, drives and led to piston rod 402
Cross packing ring, the conical surface cam 404 that nut combines as a whole is moved downward, by the conical surface of conical surface cam 404, promote three radial directions equal
The push rod 405 of cloth, it is synchronous to move out along the uniform gathering sill of body shell 408, make to be hinged on the lever 409 of body shell 408 around
Bearing pin 411 rotates, and drives three 410 inward turnings of gripper, under the damping action of extension spring 407, flexibly crawl, clamped edge protection
Ring, completes grasping movement.Gripper equipment 4 carries edge-protected ring and returns to initial position afterwards, and so far, device completes one
Place-protection exposure --- the circulation work of crawl.
The pressure that the pulling force and stage clip 406 of regulation extension spring 407 can be passed through adjusts the size to edge protection ring clamping force.Keep away
Exempt from clamping force excessive, cause edge-protected ring to be damaged.
When gripper equipment 4 is in the state of gripping edge protection ring, in case of died suddenly, as conical surface cam 404 is
Vertebral body is down-set, and the conical surface cam 404 that piston rod 402 and its underpart are installed is maintained at current location, oriented due to conducting oneself with dignity
The trend of lower motion, the effect without external force is which is moved upwards, self-locking when reaching motion upwards.Conical surface cam 404 exists
In balance in the presence of three 405 thrusts of push rod and gravity, keep in situ motionless, lever 409 is made in spring 407 and push rod
In the presence of 405, be still within current location and remain stationary as, so that clamped condition is kept to edge protection ring, solve suddenly
The security hidden trouble that protection ring of dying will not fall off.Once in addition, overlong time of dying, piston rod 402 can only be from by deadweight
Clamped position moves to the lower limit position that lower surface is fitted with cylinder cap 403, due to the distance between two positions very little ,≤
1.5mm, by the transmission of 404 inclined-plane of conical surface cam and lever 409, clamping force increase is less, does not also result in edge-protected ring
The danger of deformation.
The preferred embodiment of the simply present invention described in this specification, above example is only to illustrate the present invention
Technical scheme rather than limitation of the present invention.All those skilled in the art pass through logical analyses, reasoning under this invention's idea
Or the available technical scheme of limited experiment, all should be within the scope of the present invention.
Claims (4)
1. a kind of silicon chip edge protection device of handgrip self-locking, including servomotor, reducing gear, catenary motion mechanism and grab
Arm device, it is characterised in that：The gripper equipment includes a downward conical surface cam and is close to the push rod of conical surface cam, described
During catenary motion, the conical surface of the conical surface cam promotes lever drives gripper to beat opening and closing by push rod to gripper equipment
Hold together；The silicon chip edge protection device of the handgrip self-locking also includes stage clip and the extension spring for connecting and acting on the push rod, passes through
Adjust the pressure of the stage clip and extension spring to adjust the clamping force of gripper equipment.
2. the silicon chip edge protection device of handgrip self-locking as claimed in claim 1, it is characterised in that：The push rod is to be distributed on
Three push rods on circumference.
3. the silicon chip edge protection device of handgrip self-locking as claimed in claim 1, it is characterised in that：The gripper equipment is also wrapped
The piston rod combined as a whole with conical surface cam is included, when compressed air-driven piston rod is moved upwards, drives conical surface cam to transport upwards
Dynamic, push rod is inwardly moved with the conical surface, promotes lever drives gripper outward turning；When compressed air-driven piston rod is moved downward, band
Mantle face cam is moved downward, and push rod is moved out with the conical surface, promotes lever drives gripper inward turning.
4. the silicon chip edge protection device of handgrip self-locking as claimed in claim 1, it is characterised in that：At the gripper equipment
When the state of gripping edge protection ring, in case of died suddenly, conical surface cam is in the presence of push rod thrust and gravity in flat
Weighing apparatus, keeps in situ motionless, makes lever be still within current location and remain stationary as.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310734603.XA CN104749891B (en) | 2013-12-27 | 2013-12-27 | A kind of silicon chip edge protection device of handgrip self-locking |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310734603.XA CN104749891B (en) | 2013-12-27 | 2013-12-27 | A kind of silicon chip edge protection device of handgrip self-locking |
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| Publication Number | Publication Date |
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| CN104749891A CN104749891A (en) | 2015-07-01 |
| CN104749891B true CN104749891B (en) | 2017-03-29 |
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| CN201310734603.XA Active CN104749891B (en) | 2013-12-27 | 2013-12-27 | A kind of silicon chip edge protection device of handgrip self-locking |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110320758B (en) * | 2018-03-30 | 2021-06-29 | 上海微电子装备（集团）股份有限公司 | Substrate edge protection device, photoetching equipment and protection method |
| CN110609448B (en) * | 2018-06-14 | 2020-12-01 | 上海微电子装备（集团）股份有限公司 | Silicon chip edge protection device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101487990A (en) * | 2009-02-27 | 2009-07-22 | 上海微电子装备有限公司 | Work piece bench with edge exposure protection |
| CN101609193A (en) * | 2009-07-24 | 2009-12-23 | 上海微电子装备有限公司 | A kind of movable optical element adjusting and positioning device |
| CN102012639A (en) * | 2009-09-04 | 2011-04-13 | 上海微电子装备有限公司 | Method and device for protecting silicon wafer edge |
| CN102141735A (en) * | 2010-01-28 | 2011-08-03 | 上海微电子装备有限公司 | Silicon chip edge protection device and application method thereof |
| CN103293862A (en) * | 2012-02-22 | 2013-09-11 | 上海微电子装备有限公司 | Silicon wafer edge protection device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10314383A1 (en) * | 2003-03-28 | 2004-10-07 | Integrated Dynamics Engineering Gmbh | Fast exchange station for wafer transport |
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2013
- 2013-12-27 CN CN201310734603.XA patent/CN104749891B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101487990A (en) * | 2009-02-27 | 2009-07-22 | 上海微电子装备有限公司 | Work piece bench with edge exposure protection |
| CN101609193A (en) * | 2009-07-24 | 2009-12-23 | 上海微电子装备有限公司 | A kind of movable optical element adjusting and positioning device |
| CN102012639A (en) * | 2009-09-04 | 2011-04-13 | 上海微电子装备有限公司 | Method and device for protecting silicon wafer edge |
| CN102141735A (en) * | 2010-01-28 | 2011-08-03 | 上海微电子装备有限公司 | Silicon chip edge protection device and application method thereof |
| CN103293862A (en) * | 2012-02-22 | 2013-09-11 | 上海微电子装备有限公司 | Silicon wafer edge protection device |
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| CN104749891A (en) | 2015-07-01 |
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Address after: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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