CN103278928B - Refraction type high-power semiconductor laser array beam shaping device - Google Patents

Abstract

The invention provides a refraction type high-power semiconductor laser array optical shaping device, which can double the thickness of each step glass in the shaping element while realizing beam shaping, reduce the error accumulation by half, and greatly reduce the The difficulty of processing improves the accuracy and reduces loss, while compressing the width of the laser beam in the fast axis direction and reducing the focal length of the focusing lens, making the system more compact. The advantages of this component can be better reflected in multi-bar and stacked optical fiber coupling, and when the number of cuts is large.

Description

Refractive high power semiconductor laser array beam shaping device

technical field

This patent relates to a beam shaping device for a high-power semiconductor laser array, which belongs to the scope of the application field of laser technology.

Background technique

Due to the advantages of small size, high photoelectric conversion efficiency, long working life, and low cost, semiconductor lasers are widely used in material processing, laser medical treatment, and pump sources for solid-state lasers.

However, compared with other lasers, the biggest defect of semiconductor lasers is that the beam quality is poor. The use of conventional lenses and optical systems to couple light beams into optical fibers seriously restricts the development of semiconductor lasers. In order to make the beam emitted by the semiconductor laser can be smoothly coupled into the optical fiber, the beam must be collimated and beam transformed and shaped.

Semiconductor laser arrays are divided into one-dimensional arrays and two-dimensional arrays. Among them, the one-dimensional array is called bar (bar), which is generally composed of 5 to 75 light-emitting points. The common bar is 19 light-emitting points. direction) is generally 50 μm to 200 μm, and the width perpendicular to the p-n junction direction (referred to as the fast axis direction) is only 1 μm, while the arrangement period of the light-emitting points in the slow axis direction varies from 120 μm to 1000 μm. A two-dimensional array is also called a stack, which is composed of multiple one-dimensional arrays arranged at the same interval along the fast axis. The beam emitted by the semiconductor laser has a divergence angle of 90% energy in the fast axis direction of about 60°-80°, and a divergence angle of about 9°-16° in the slow axis direction.

In order to evaluate the quality of the semiconductor laser beam, the optical parameter product (BPP) is usually used as the evaluation function. BPP is the product of the beam half-divergence angle and the beam waist radius, and the unit is mm*mrad. After the commonly used semiconductor lasers are collimated, the BPP value of the fast axis is about 1mm*mrad, the BPP value of the slow axis is about 300mm*mrad, and the optical parameter product of the slow axis is 300 times that of the fast axis. The condition for the beam to be coupled into the fiber is that the optical parameter product of the beam is smaller than the optical parameter product of the fiber, and for a common fiber with a numerical aperture of 0.22 and a core diameter of 200 μm, its BPP value is only 22.3mm*mrad, and the slow axis of the semiconductor laser is The BPP value is much larger than the BPP value of the optical fiber, so the beam must be shaped to make the BPP value meet the coupling requirements.

At present, optical elements used for beam shaping of semiconductor laser arrays are mainly divided into refractive optical elements, reflective optical elements and catadioptric optical elements.

The main principle of reflective optical components is to achieve cutting and re-

Row. At present, the V-STACK stepped mirror group is widely used, which is composed of two stepped metal mirrors. When the beam passes through the first stepped mirror, the direction of the slow axis is divided into N equal parts. And the propagation direction of the beam is changed by 90°, and the rearrangement of the beam is realized after the beam passes through the second stepped reflector.

The main principle of refractive optical elements is to use multiple refraction to achieve the purpose of beam cutting and rearrangement. The main components are parallel plate stacks, prism combinations, etc. After the light beam is refracted by such optical elements once, it can be divided into N equal parts in the direction of the slow axis; when it is refracted by such optical elements for the second time, it can realize Rearrangement of beams along the fast axis.

The main principle of the catadioptric optical element is to use the refraction of the prism stack to achieve cutting dislocation, and use the total reflection of the prism stack or the reflection of the mirror stack to realize rearrangement.

For the above-mentioned existing optical shaping elements, all belong to one division. In order to realize the coupling of common semiconductor laser arrays into optical fibers with a core diameter of 200 μm, it is basically necessary to control the thickness of each step glass in the shaping element below 1mm. It is still relatively difficult for my country's current glass processing. In addition, as the number of cutting parts increases, the accumulation of assembly errors of the shaping components will be quite serious, thus affecting the coupling efficiency.

Contents of the invention

In order to overcome the shortcomings of difficult processing, serious error accumulation, difficult assembly and adjustment, and low precision in the above scheme, the present invention provides an optical shaping device for high-power semiconductor laser arrays, which can shape the beam while realizing beam shaping The thickness of each step glass in the component is doubled, and the accumulation of errors is reduced by half, which greatly reduces the difficulty of processing, improves the accuracy and reduces loss, and at the same time compresses the width of the laser beam in the fast axis direction and reduces the focal length of the focusing lens. make the system more compact. The advantages of this component can be better reflected in the coupling of multi-bar strips and stacked arrays, and when the number of cutting parts is large.

In order to achieve the above object, the present invention adopts the following technical solutions:

The high-power semiconductor laser array optical shaping device includes sequentially placing the first transmission optical glass group, the second transmission optical glass group along the light propagation direction, and reflective optics for rearranging the split beam along the fast axis direction of the laser beam. Glass group; the number of transmission optical glasses in the first transmission optical glass group is N/2, the number of transmission optical glasses in the second transmission optical glass group is (N/2)+1, and the number of optical glasses in the reflection optical glass group is N, The N should satisfy N=2K, K is a natural number, and N also needs to satisfy Wherein BPP _f and BPP _S are the optical parameter products of the fast axis and the slow axis calculated after the collimation of the one-dimensional array beam respectively; the dividing line of the kth piece and the k+1th glass in the second transmission glass group, Align with the centerline of the thickness of the kth piece of glass in the first rectangular trapezoidal glass group; the lengths of the glass lenses of the first transmission optical glass group are all different; the glass lenses of the first transmission optical glass group and the second transmission optical glass group The thicknesses are all equal, and the thickness is 2*(L/N). The L is the beam width of the semiconductor laser array in the direction of the slow axis; the first transmission optical glass group is used to perform N/2 on the incident light along the direction of the slow axis, etc. The parts are cut, and the position is staggered along the fast axis direction. After the light passes through the first transmission optical glass group, the width of the incident beam in the fast axis direction is compressed, and the propagation direction of the outgoing beam and the propagation direction of the incident beam form an angle δ, so The δ angle mentioned above should satisfy 0°<δ<90°; after the light beam passes through the second transmission optical glass group, the N/2 equal parts of the light beam are divided into two equal parts, and the outgoing beam of the second transmission optical glass group propagates The direction is restored to the same direction as the incident light beam propagation direction of the first transmission optical glass group, and the width of the outgoing beam of the second transmission optical glass group in the fast axis direction is further compressed; meanwhile, the length of the above-mentioned second transmission optical glass group satisfies The following relationship: (1) The lengths of the odd-numbered transparent glasses are equal; (2) The lengths of the even-numbered transparent glasses are equal; (3) The length difference between two adjacent pieces of transparent glass is a constant value.

Above-mentioned first transmissive optical glass group, the transmissive glass of the second transmissive optical glass group can be right-angled trapezoid, right-angled triangle or equilateral triangle etc. shape, preferably with right-angled trapezoid; Reflective glass in reflective optical glass group can be rectangular, right-angled Trapezoids, right-angled trapezoids, and equilateral triangles have straight sides, preferably rectangles.

The length of the glass lenses of the above-mentioned first lens optical glass group is preferably arranged in asymmetry; the arrangement order of the glass lenses can be chaotic, but when all the glass sheets are rearranged according to the size of the length, from small to large or from large to small Finally, their length difference must satisfy the arithmetic arrangement.

The X axis is consistent with the slow axis direction of the laser beam, the Y axis is consistent with the fast axis direction of the laser beam, and the Z axis is perpendicular to the plane formed by the slow axis direction and the fast axis direction of the laser beam; the first glass group The placement method is that the right-angled edge of the right-angled trapezoidal glass is along the Y-axis direction; the upper and lower bottoms of the right-angled trapezoidal glass are along the Z-axis direction, and the long bottom is the upper bottom, and the short bottom is the bottom; the thickness direction of the right-angled trapezoidal glass is Along the X-axis direction, and the direction of increasing thickness can be the positive direction of the X-axis or the negative direction of the X-axis, the center point of the right-angled trapezoidal transmission glass group A along the thickness direction is opposite to the center point of the laser light source along the slow axis direction; right angle The hypotenuse of the trapezoidal transmission glass is placed at the back, and the right-angled side is placed at the front; the second transmission glass group is placed above the front of the first transmission glass group, and the placement method is that the thickness direction of the right-angle trapezoidal glass is along the X-axis direction; the right-angle The trapezoidal glass is placed with the hypotenuse at the back and the right-angled side at the front. The short base of the right-angle transmission trapezoidal glass sheet is the upper base, and the long base is the lower base; and the angle between the upper and lower bases and the X-Z plane is δ=θ-arcsin(n·cosθ); the placement method of rectangular glass group C , the broad sides of all rectangular reflective glass sheets are aligned with one of the long sides.

The wide side of the above-mentioned rectangular reflective glass sheet is 45° to the positive direction of the Z-axis, and the long side of the rectangular glass sheet is 45° to the negative direction of the Z-axis; the direction of the thickness arrangement is consistent with the fast axis direction of the laser beam, along the thickness direction The center point of is equal to the center point of the straight hypotenuse of the second right-angled trapezoidal glass group B. Among them, under the condition of rectangular glass, the angle between the reflective glass group and the Z axis is 45°, which can facilitate subsequent processing.

The advantages of the present invention are:

This high-power semiconductor laser array beam shaping device utilizes the refraction principle of triangular lenses, and cleverly achieves secondary cutting through dislocation, so that the thickness of each piece of glass in each set of right-angled trapezoidal transmission glass groups increases compared with one-time cutting. At the same time, the number of glass sheets in each group of right-angled trapezoidal transmission glass is doubled, which effectively solves the problem that the glass thickness is too small and difficult to process, and avoids the problem of excessive glass sticking together. serious error accumulation.

Secondly, after the laser beam passes through the first right-angle trapezoidal transmission glass group A and the second right-angle trapezoidal transmission glass group B, the beam is compressed in the direction of the fast axis, which is beneficial to reduce the focal length of the fast-axis focusing lens, making the entire coupling system become compact. The invention is particularly suitable for shaping coupling of multiple bars or stacks. Experiments have proved that the device has high shaping efficiency, relatively small processing difficulty, and is easy to realize.

Description of drawings

Figure 1 High-power semiconductor laser array shaping principle 1;

Figure 2 High-power semiconductor laser array shaping principle II;

Fig. 3 When N=2k, the device diagram of the first rectangular trapezoidal transmission glass group A;

Fig. 4 When N=2k, the second right-angle trapezoidal transmission glass group B device diagram;

Figure 5, when N=2k, the device diagram of rectangular reflective glass group C;

Fig. 6 When N=2k, the two-dimensional side view of the optical shaping device;

Figure 7 is a two-dimensional top plan view of the optical shaping device when N=2k;

Figure 8 is a three-dimensional view of the optical shaping device when N=2k;

Figure 9 is a three-dimensional view of the one-dimensional array optical shaping system;

Fig. 10 One-dimensional array optical shaping spot change diagram;

Figure 11 is a two-dimensional plan view of the two-dimensional array optical shaping system;

Fig. 12 Variation diagram of two-dimensional array optical shaping spot;

Among them: 1. One-dimensional array light source; 2. One-dimensional array light source fast axis collimating lens; 3. One-dimensional array light source slow axis collimating lens; 4. One-dimensional array light source fast and slow axis collimated spot; 5. One-dimensional The light spot after the first cutting of the array light source; 6. The light spot after the second cutting of the one-dimensional array light source; 7. The light spot after the rearrangement of the one-dimensional array light source; 8. The two-dimensional array light source; Lens; 10. Two-dimensional array light source slow axis collimating lens; 11. Spot after the first cut of two-dimensional array light source; 12. Spot after the second cut of two-dimensional array light source; 13. Second cut of two-dimensional array light source Rear spot; 14. Spot after two-dimensional array light source rearrangement; A, first right-angle trapezoidal transmission glass group; B, second right-angle trapezoidal transmission glass group; C, rectangular reflective glass group; A1, first right-angle trapezoidal transmission glass group The kth piece of glass in B1, the kth piece and the k+1th piece of glass in the second right-angled trapezoidal transmissive glass group; C1, the two glass pieces in the rectangular reflective glass group.

Detailed ways

The principle on which the present invention is based is as follows:

High-power semiconductor laser array optical shaping device, including placing the first transmission optical glass group, the second transmission optical glass group and the reflection optical glass group sequentially along the light propagation direction. In actual operation, the first and second transmission optical glass groups are generally When choosing a right-angled trapezoidal lens, the reflective optical glass group is generally selected as rectangular glass, which is convenient for processing and subsequent optical path processing.

When the number of beams cut in the direction of the slow axis is N=2K (K is a natural number), the specific structures of the first rectangular trapezoidal transmissive glass group A, the second rectangular trapezoidal transmissive glass group B and reflective glass group C are as follows:

The first rectangular trapezoidal transmissive glass group A is composed of N/2 rectangular trapezoidal transmissive glass sheets. Referring to Figure 1 and Figure 2, the bottom angle of each right-angle transmission glass is θ, the height of the right-angle sides is d1, and the thickness is 2*(L/N) (L is the semiconductor laser array in the direction of the slow axis Beam width), but all have different lengths (along the upper and lower bases of the right-angled trapezoid). Referring to Figure 3 and Figure 6, the right-angled trapezoidal transmissive glass sheets described in block N/2 are closely arranged along the thickness direction according to the length from small to large, and all upper and lower bottoms and right-angled sides are aligned, and adjacent right-angled trapezoidal The length differences of the glass sheets are all L ₁ .

The second right-angled trapezoidal transmission glass group B is composed of (N/2+1) right-angled trapezoidal transmission glass sheets. Referring to Figure 1 and Figure 2, the bottom angle of each right-angled transmissive glass sheet is θ, the height of the right-angled sides is d ₂ , and the thickness is 2*(L/N). The sheets are closely packed along the thickness direction, and all upper and lower bases and right-angled edges are aligned. Referring to Figure 4 and Figure 6, the length of each right-angled trapezoidal glass satisfies the following relationship: (1) The lengths of right-angled trapezoidal transmission glasses with an odd number are equal; (2) The lengths of right-angled trapezoidal transmission glasses with an even number are equal; (3) The length difference between two adjacent pieces of right-angled trapezoidal transparent glass is always L ₂ .

Rectangular reflective glass group C is composed of N rectangular reflective glass sheets closely arranged along the thickness direction (laser fast axis direction), and the wide sides of all glass sheets are aligned with one of the long sides. Referring to Fig. 1 and Fig. 2, the thickness of each rectangular reflective glass sheet is d ₃ and the length is b, but the width of each rectangular reflective glass sheet is different.

The X axis is consistent with the slow axis direction of the laser beam, the Y axis is consistent with the fast axis direction of the laser beam, and the Z axis is perpendicular to the plane formed by the slow axis direction and the fast axis direction of the laser beam.

Referring to Figure 6 and Figure 7, the first right-angle trapezoidal glass group A is placed in such a way that the right-angled edge of the right-angled trapezoidal glass is along the Y-axis direction; the upper and lower bottoms of the right-angled trapezoidal glass are along the Z-axis direction, and the long bottom side is the upper bottom , the short bottom is the lower bottom; the thickness direction of the right-angled trapezoidal glass is along the X-axis direction, and the direction of increasing thickness can be the positive direction of the X-axis or the negative direction of the X-axis, and the center of the right-angled trapezoidal transmission glass group A along the thickness direction The point is opposite to the center point of the laser light source along the slow axis; the hypotenuse of the right-angled trapezoidal transmissive glass is placed behind (farther from the light source), and the right-angled side is placed in front (closer to the light source).

The second right-angled trapezoidal transmissive glass group B is placed behind and above the first right-angled trapezoidal transmissive glass group A in such a way that the thickness direction of the right-angled trapezoidal glass is along the X-axis direction; the hypotenuse of the right-angled trapezoidal glass is placed behind, Cartesian edge placed first. The short base of the right-angle transmission trapezoidal glass sheet is the upper base, and the long base is the lower base; and the angle between the upper and lower bases and the X-Z plane is satisfied.

At the same time, referring to Fig. 2, the following relative position relationship is satisfied: the mth (m is a natural number less than N) block and the m+1th right-angled trapezoidal glass in the second right-angled trapezoidal transmissive glass group B are aligned with the dividing line The midline of the thickness of the mth piece of right-angled trapezoidal glass in group A of right-angled trapezoidal glass.

Referring to Figure 2 and Figure 7, the rectangular glass group C is placed in such a way that the broad sides of all the rectangular reflective glass sheets are aligned with one of the long sides; The long side of the glass sheet is 45° to the negative direction of the Z axis; the direction of the thickness arrangement is consistent with the fast axis direction of the laser beam, and the center point along the thickness direction is the center of the straight hypotenuse of the second right-angled trapezoidal glass group B Point contour.

When the laser beam passes through the first right-angled trapezoidal transmissive glass A, the laser beam is refracted at N/2 transmissive glass slopes. Since the lengths of the transmissive glass are different, it is cut into N/2 equal parts in the direction of the slow axis, and in the fast Axis direction is separated, and the width of the laser beam in the fast axis direction is compressed; when the laser beam passes through the second right-angled trapezoidal transmission glass B, it is guaranteed that each of the N/2 laser beams will be equally divided into two parts, and half of them will pass through Half of the longer transmission glass in the second right-angled trapezoidal perspective glass B passes through the shorter transmission glass in the second right-angled trapezoidal perspective glass B, and refracts on different slopes, so N/2 beams are divided into two equal parts Cutting to form N beams, and the width of the beams in the fast axis direction is further compressed; when N laser beams are reflected by the reflective optical glass group C, the rearrangement of the beams in the fast axis direction is realized.

The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

Example 1:

In this embodiment, the light beam emitted by the one-dimensional array of semiconductor lasers is divided into N equal parts in the direction of the slow axis, where N=2K (K is a natural number), and N is obtained according to the product relationship between the optical parameters of the fast axis and the slow axis, its satisfying relationship BPP _f and BPP _S in the equation are the fast-axis and slow-axis optical parameter products calculated after the one-dimensional array beam is collimated, respectively. Assuming that N=6, referring to Fig. 9, the structure of the shaping system in this embodiment includes a semiconductor laser one-dimensional array light source 1, a fast-axis collimator lens 2, a slow-axis collimator lens 3, the first right-angle transmission trapezoidal glass group A, The second right-angle transmission trapezoidal glass group B and rectangular reflective glass group C.

The first right-angled trapezoidal transmission glass group A is composed of three right-angled trapezoidal transmission glass sheets, the bottom angle of each right-angled trapezoidal transmission glass sheet is θ, the height of the right-angled sides is d ₁ , and the thickness is Both are 2*(L/6) (L is the beam width in the direction of the slow axis after the one-dimensional array beam of the semiconductor laser is collimated), but the length of each right-angled trapezoidal transmissive glass sheet is not equal. In this embodiment, the three right-angled trapezoidal transmissive glass sheets are closely arranged along the thickness direction from small to large according to the length, and the increasing direction of thickness is the positive direction of the X-axis. The bottom and right-angled sides are all aligned, and the length difference between two adjacent right-angled trapezoidal transmissive glass pieces is constant as

(where h is the beam width in the direction of the fast axis after the one-dimensional array beam is collimated, and n is the glass refractive index of the first rectangular trapezoidal transmission glass group).

The second right-angled trapezoidal glass group B is composed of four pieces of right-angled trapezoidal glass, the base angle of each right-angled trapezoidal transmissive glass sheet is angle θ, the height of the right-angled sides is d ₂ , and the thickness is 2*(L /6). In this embodiment, the right-angled trapezoidal glasses are closely arranged along the thickness direction, and all the upper bottom, lower bottom and right-angle sides are aligned, and the length of each right-angled trapezoidal glass satisfies the following relationship: (1) The positive The direction is a sequential direction, and the length of the first right-angled trapezoidal glass is longer; (2) The lengths of the right-angled trapezoidal transmissive glass pieces arranged in an odd number are equal; (3) The lengths of the right-angled trapezoidal transmissive glass pieces arranged in an even number are equal ; (4) The length difference between two adjacent right-angled trapezoidal transmissive glass pieces is

${\mathrm{<span\; class="notranslate">\; L</span>}}_{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; =</span>\frac{\mathrm{<span\; class="notranslate">\; h</span>}<span\; class="notranslate">\; \&Center\; Dot;</span>{\mathrm{<span\; class="notranslate">\; cos</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; [</span>\mathrm{<span\; class="notranslate">\; arcsin</span>}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; no</span>}<span\; class="notranslate">\; \&CenterDot;</span>\mathrm{<span\; class="notranslate">\; cos</span>}\mathrm{<span\; class="notranslate">\; \&theta;</span>}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; ]</span>}{\mathrm{<span\; class="notranslate">\; sin</span>}<span\; class="notranslate">\; [</span>\mathrm{<span\; class="notranslate">\; arcsin</span>}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; no</span>}<span\; class="notranslate">\; \&CenterDot;</span>\mathrm{<span\; class="notranslate">\; cos</span>}\mathrm{<span\; class="notranslate">\; \&theta;</span>}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; +</span>\mathrm{<span\; class="notranslate">\; \&theta;</span>}<span\; class="notranslate">\; -</span>\mathrm{<span\; class="notranslate">\; 90</span>}<span\; class="notranslate">\; ]</span><span\; class="notranslate">\; \&Center\; Dot;</span>{\mathrm{<span\; class="notranslate">\; cos</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}\mathrm{<span\; class="notranslate">\; \&theta;</span>}}<span\; class="notranslate">\; .</span>$

The rectangular reflective glass group C is composed of 6 rectangular glass sheets, and the thickness of each rectangular glass sheet is In this embodiment, set the rectangular reflective glass group C as the order direction from top to bottom, and the width of the first rectangular reflective glass sheet is a, then the width of the ith (i is a natural number) rectangular reflective glass sheet is along the order The direction satisfies the following relationship: (1) When i=1+4j or i=2+4j (j is a natural number), the width of the rectangular reflective glass is (2) When i=3+4j, the width of the rectangular reflective glass is (3) When i=4+4j, the width of the rectangular reflective glass is Therefore, from top to bottom, the widths of the rectangular reflective glass sheets are:

$\mathrm{<span\; class="notranslate">\; a</span>}<span\; class="notranslate">\; -</span>\frac{\mathrm{<span\; class="notranslate">\; 3</span>}\mathrm{<span\; class="notranslate">\; L</span>}}{\mathrm{<span\; class="notranslate">\; 6</span>}\sqrt{\mathrm{<span\; class="notranslate">\; 2</span>}}}<span\; class="notranslate">\; ,</span>$ $\mathrm{<span\; class="notranslate">\; a</span>}<span\; class="notranslate">\; -</span>\frac{\mathrm{<span\; class="notranslate">\; 2</span>}\mathrm{<span\; class="notranslate">\; L</span>}}{\mathrm{<span\; class="notranslate">\; 6</span>}\sqrt{\mathrm{<span\; class="notranslate">\; 2</span>}}}<span\; class="notranslate">\; ,</span>$ $\mathrm{<span\; class="notranslate">\; a</span>}<span\; class="notranslate">\; -</span>\frac{\mathrm{<span\; class="notranslate">\; 4</span>}\mathrm{<span\; class="notranslate">\; L</span>}}{\mathrm{<span\; class="notranslate">\; 6</span>}\sqrt{\mathrm{<span\; class="notranslate">\; 2</span>}}}<span\; class="notranslate">\; ,</span>$ $\mathrm{<span\; class="notranslate">\; a</span>}<span\; class="notranslate">\; -</span>\frac{\mathrm{<span\; class="notranslate">\; 5</span>}\mathrm{<span\; class="notranslate">\; L</span>}}{\mathrm{<span\; class="notranslate">\; 6</span>}\sqrt{\mathrm{<span\; class="notranslate">\; 2</span>}}}<span\; class="notranslate">\; .</span>$

Referring to Figure 9 and Figure 10, in this embodiment, the function of the first rectangular trapezoidal glass group A is to cut the collimated one-dimensional light beam into three equal parts in the direction of the slow axis through dislocation and refraction, and the propagation direction of the light beam From along the positive direction of the Z-axis to a direction with an included angle of δ=θ-arcsin(n cosθ) with the positive direction of the Z-axis; The three-segment beam is divided into two, and the propagation direction of the beam is restored to the positive direction along the Z-axis through refraction; the function of the rectangular reflective glass group C is to realize the division of six equal beams along the fast axis through misalignment and reflection. direction rearrangement. Therefore, the principle of the optical shaping device is to use catadioptric reflection to achieve two cutting and rearrangement, so as to achieve the purpose of shaping.

Referring to Fig. 12, in this embodiment, the light beam emitted by the one-dimensional array of semiconductor lasers, after passing through the fast and slow axis collimating lens, becomes a slender spot 4 with a long slow axis and a short fast axis; when the light beam passes through the first rectangular trapezoidal transmission After the glass group A is refracted, the light beam is cut into three equal parts in the direction of the slow axis to form light 5; when the light beam is refracted by the second right-angled trapezoidal glass group B, each small part of the light beam on the slow axis is cut into two equal parts Parts, that is, the slow axis direction achieves a total of six equal parts of cutting, forming a spot 6, thus completing the purpose of cutting the beam, and at the same time the propagation direction of the beam is restored to the Z direction; when the beam is reflected by the rectangular glass group C, it is realized The rearrangement of the split beams in the direction of the fast axis is realized to form the spot 7, thereby completing the shaping of the beams.

Example 2

In this embodiment, the beams emitted by the two-dimensional array of semiconductor lasers are collimated along the fast and slow axes and compressed along the fast axes to form elongated spots, and then undergo beam shaping by the shaping device. Referring to Fig. 11, specifically, the light emitted by the semiconductor laser two-dimensional array 8 passes through the fast axis collimating cylindrical lens 9, the slow axis collimating microlens array 10, and then passes through the first rectangular trapezoidal glass group A, the second The beam shaping device composed of right-angled trapezoidal glass group B and rectangular glass group C.

In this embodiment, assuming that the number of cuts of the two-dimensional beam along the slow axis direction is N=6, the beam width H in the fast axis direction after the two-dimensional beam is collimated and compressed in the fast axis direction, the two-dimensional beam in the slow axis direction Divided width L/6, length a of the broad side of the first rectangular glass sheet in the rectangular reflective glass group C, the thickness of each piece of glass in the first rectangular trapezoidal glass group A can be calculated as 2L/6, adjacent The difference in length of the glass block is The thickness of each piece of glass in the second right-angled trapezoidal glass group B is 2L/6, and the length difference between adjacent glasses is The thickness of the rectangular glass sheet in the rectangular glass group C is The lengths of the broadsides from bottom to top are respectively a,

$\mathrm{<span\; class="notranslate">\; a</span>}<span\; class="notranslate">\; -</span>\frac{\mathrm{<span\; class="notranslate">\; L</span>}}{\mathrm{<span\; class="notranslate">\; 6</span>}\sqrt{\mathrm{<span\; class="notranslate">\; 2</span>}}}<span\; class="notranslate">\; ,</span>$ $\mathrm{<span\; class="notranslate">\; a</span>}<span\; class="notranslate">\; -</span>\frac{\mathrm{<span\; class="notranslate">\; 3</span>}\mathrm{<span\; class="notranslate">\; L</span>}}{\mathrm{<span\; class="notranslate">\; 6</span>}\sqrt{\mathrm{<span\; class="notranslate">\; 2</span>}}}<span\; class="notranslate">\; ,</span>$ $\mathrm{<span\; class="notranslate">\; a</span>}<span\; class="notranslate">\; -</span>\frac{\mathrm{<span\; class="notranslate">\; 2</span>}\mathrm{<span\; class="notranslate">\; L</span>}}{\mathrm{<span\; class="notranslate">\; 6</span>}\sqrt{\mathrm{<span\; class="notranslate">\; 2</span>}}}<span\; class="notranslate">\; ,</span>$ $\mathrm{<span\; class="notranslate">\; a</span>}<span\; class="notranslate">\; -</span>\frac{\mathrm{<span\; class="notranslate">\; 4</span>}\mathrm{<span\; class="notranslate">\; L</span>}}{\mathrm{<span\; class="notranslate">\; 6</span>}\sqrt{\mathrm{<span\; class="notranslate">\; 2</span>}}}<span\; class="notranslate">\; ,</span>$ $\mathrm{<span\; class="notranslate">\; a</span>}<span\; class="notranslate">\; -</span>\frac{\mathrm{<span\; class="notranslate">\; 5</span>}\mathrm{<span\; class="notranslate">\; L</span>}}{\mathrm{<span\; class="notranslate">\; 6</span>}\sqrt{\mathrm{<span\; class="notranslate">\; 2</span>}}}<span\; class="notranslate">\; .</span>$

Referring to Fig. 12, in this embodiment, the light beam emitted by the two-dimensional array of semiconductor lasers becomes a two-dimensional rectangular spot 11 after passing through the fast and slow axis collimating lens; The slow axis direction is cut into three equal parts to form a spot 12; when the beam is reflected by the second right-angled trapezoidal glass group B, each small part of the beam on the slow axis is cut into two equal parts again, that is, the slow axis direction realizes Six equal parts are cut to form a spot 13, thereby completing the purpose of cutting the beam, and at the same time the width of the beam in the fast axis direction is compressed; when the beam is reflected by the rectangular glass group C, the split beam is realized in the fast direction. The rearrangement of the axial direction forms the spot 14, thereby completing the shaping of the beam.

Claims (3)

1. A high-power semiconductor laser array optical shaping device is characterized in that: it includes placing the first transmission optical glass group successively along the light propagation direction, the second transmission optical glass group, and the light beam used to realize division along the laser light beam. The reflective optical glass group rearranged in the axis direction; the quantity of the transmissive optical glass of the first transmissive optical glass group is N/2, the quantity of the transmissive optical glass of the second transmissive optical glass group is (N/2)+1, the reflective optical glass group The number of optical glasses is N, and the N should satisfy N=2K, K is a natural number, and N also needs to satisfy Wherein BPP _f and BPP _S are respectively the optical parameter products of the fast axis and the slow axis calculated after the collimation of the one-dimensional array beam; , m is a natural number less than N, aligned with the midline of the thickness of the m-th glass in the first optical transmission glass group; the glass lenses of the first optical transmission glass group have different lengths; the first optical transmission glass group and the first optical transmission glass group The thickness of the glass lenses of the two transmission optical glass groups is equal, and the thickness is 2*(L/N), and the L is the beam width of the semiconductor laser array in the slow axis direction; the first transmission optical glass group is used for incident light along the Carry out N/2 equal cuts in the direction of the slow axis, and stagger the position along the direction of the fast axis. After the light passes through the first transmission optical glass group, the width of the incident beam in the direction of the fast axis is compressed, and the propagation direction of the outgoing beam is the same as that of the incident beam The propagation direction of the δ angle is δ angle, and the δ angle should satisfy 0°<δ<90°; after the beam passes through the second transmission optical glass group, the N/2 equal beams are divided into two equal parts, and the second The propagation direction of the outgoing light beam of the transmission optical glass group is restored to be the same as the propagation direction of the incident light beam of the first transmission optical glass group, and the width of the outgoing light beam in the direction of the fast axis is further compressed; The X axis is consistent with the slow axis direction of the semiconductor laser array beam, the Y axis is consistent with the fast axis direction of the semiconductor laser array beam, and the direction perpendicular to the plane formed by the slow axis direction and the fast axis direction of the semiconductor laser array beam is the Z axis The first transmission optical glass group and the second transmission optical glass group are respectively composed of a plurality of right-angled trapezoidal transmission glasses; the first transmission optical glass group is placed in such a way that the right-angled edges of the right-angled trapezoidal transmission glass are along the Y-axis direction; The upper and lower bases of the trapezoidal transmissive glass are along the Z axis, and the long base is the upper base, and the short base is the lower base; the thickness direction of the right-angled trapezoidal transmissive glass is along the X axis, and the direction of increasing thickness is selected from the X axis The positive direction of the positive direction or the negative direction of the X-axis, the center point of the first transmission optical glass group along the thickness direction is opposite to the center point of the laser light source along the slow axis direction; the hypotenuse of the right-angled trapezoidal transmission glass is placed behind, and the right-angled side is placed in front The second transmission optical glass group is placed on the rear top of the first transmission optical glass group, and its placement method is that the thickness direction of the right-angled trapezoidal transmission glass is along the X-axis direction; the hypotenuse of the right-angled trapezoidal transmission glass is placed behind, and the right-angle Placed in the front; the short base of the right-angle transmission trapezoidal glass sheet is the upper base, and the long base is the lower base; and the angle between the upper and lower bases and the X-Z plane is δ=θ-arcsin(n*cosθ), where θ is The included angle between the hypotenuse and the lower base of the right-angled trapezoid in the right-angled trapezoidal transmission glass; the placement of the reflective optical glass group is that the reflective optical glass group is composed of multiple rectangular reflective glass sheets, and the wide sides of all rectangular reflective glass sheets Align with one of the long sides; The wide side of the rectangular reflective glass sheet is 45° to the positive direction of the Z-axis, the long side of the rectangular glass sheet is 45° to the negative direction of the Z-axis; the reflective surface of the reflective glass sheet is 45° to the incident light beam; the thickness is arranged The direction is consistent with the fast axis direction of the laser beam, and the center point along the thickness direction is equal to the center point of the straight hypotenuse of the right-angled trapezoidal transmission glass of the second transmission optical glass group. 2. The high-power semiconductor laser array optical shaping device according to claim 1, characterized in that: the lengths of the transmission glass of the first lens optical glass group are in an equidifferential arrangement. 3. The high-power semiconductor laser array optical shaping device according to claim 1 or 2, characterized in that: the length of the second transmission optical glass group should satisfy that the lengths of the odd-numbered transmission glasses in the arrangement sequence are equal, and the arrangement sequence The lengths of even-numbered transparent glasses are equal, and the length difference between two adjacent pieces of transparent glasses is a constant value.