CN103267497A - Method based on optical fiber coupling for measuring included angle of mechanical axis and optical axis of optical fiber rotating collimator - Google Patents
Method based on optical fiber coupling for measuring included angle of mechanical axis and optical axis of optical fiber rotating collimator Download PDFInfo
- Publication number
- CN103267497A CN103267497A CN2013101943130A CN201310194313A CN103267497A CN 103267497 A CN103267497 A CN 103267497A CN 2013101943130 A CN2013101943130 A CN 2013101943130A CN 201310194313 A CN201310194313 A CN 201310194313A CN 103267497 A CN103267497 A CN 103267497A
- Authority
- CN
- China
- Prior art keywords
- optical fiber
- angle
- optical
- axis
- plane mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Optical Couplings Of Light Guides (AREA)
Abstract
基于光纤耦合的光纤旋转准直器机械轴和光轴夹角的测量方法,属于光纤传感领域。解决了现有光纤准直器无法测量-光纤旋转准直器机械轴和光轴的夹角的问题。其方法:将平面反射镜调节至光功率计接收到光信号的功率最大Pmax,多次调节平面反射镜的方位角或俯仰角,并采用光功率计测量每次的光功率Pi;计算Pi/Pmax的值,绘制Pi/Pmax随光纤准直器光轴与平面反射镜法线夹角的变化曲线;再次调整平面反射镜使光纤准直器的机械轴垂直于平面反射镜,测量此时的光功率P,计算功率比值P/Pmax,在所述变化曲线中寻找比值P/Pmax对应的光纤准直器光轴与平面反射镜法线的夹角,此夹角即为机械轴和光轴夹角。本发明适用于光纤旋转准直器机械轴和光轴夹角的测量。
The invention relates to a method for measuring the angle between the mechanical axis and the optical axis of an optical fiber rotary collimator based on optical fiber coupling, and belongs to the field of optical fiber sensing. It solves the problem that the existing optical fiber collimator cannot measure the angle between the mechanical axis and the optical axis of the optical fiber rotating collimator. The method: adjust the plane reflector to the maximum power P max of the optical signal received by the optical power meter, adjust the azimuth or elevation angle of the plane reflector several times, and use the optical power meter to measure the optical power P i each time; calculate The value of P i /P max , draw the change curve of P i /P max with the angle between the optical axis of the fiber collimator and the normal line of the plane mirror; adjust the plane mirror again so that the mechanical axis of the fiber collimator is perpendicular to the plane reflection Mirror, measure the optical power P at this time, calculate the power ratio P/P max , and find the angle between the optical axis of the fiber collimator corresponding to the ratio P/P max and the normal line of the plane mirror in the change curve. The angle is the angle between the mechanical axis and the optical axis. The invention is suitable for measuring the angle between the mechanical axis and the optical axis of the optical fiber rotary collimator.
Description
技术领域technical field
本发明属于光纤传感领域,具体涉及光纤旋转准直器机械轴和光轴夹角的测量方法。The invention belongs to the field of optical fiber sensing, and in particular relates to a method for measuring the angle between the mechanical axis and the optical axis of an optical fiber rotary collimator.
背景技术Background technique
光纤准直器是近年来发展起来的光纤器件,其作用是对光纤出射的光进行准直,减小光束的发散角,由光纤准直器发射的光束约为0.25度。当光纤传感技术应用在旋转设备上时,由于测试设备不能跟随旋转设备一起旋转,因此需要实现光纤与光纤间的非接触光传输。为了减小非接触光传输损耗,需要使用光纤准直器对光纤出射的光进行准直。将一个光纤准直器固定在旋转设备上,组成光纤旋转准直器。光纤准直器到光纤准直器间的非接触光传输损耗依赖于光纤旋转准直器光轴和机械轴夹角的大小,夹角越大,损耗越大,因此需要将光纤旋转准直器的光轴与机械轴调为同轴。调试光轴与机械轴同轴的方法通常可以使用自准直的方法,此方法需要将可调节平面反射镜固定在旋转设备上,并且需要借助外部光源将平面反射镜与旋转机械轴调垂直,并无法测试光纤旋转准直器机械轴和光轴的夹角。Fiber collimator is a fiber optic device developed in recent years. Its function is to collimate the light emitted by the fiber and reduce the divergence angle of the beam. The beam emitted by the fiber collimator is about 0.25 degrees. When optical fiber sensing technology is applied to rotating equipment, since the test equipment cannot rotate with the rotating equipment, it is necessary to realize non-contact optical transmission between optical fibers. In order to reduce the loss of non-contact light transmission, it is necessary to use a fiber collimator to collimate the light emitted from the fiber. Fix a fiber collimator on the rotating device to form a fiber rotating collimator. The non-contact optical transmission loss between the fiber collimator and the fiber collimator depends on the angle between the optical axis of the fiber rotating collimator and the mechanical axis. The larger the angle, the greater the loss. Therefore, the fiber rotating collimator needs to be The optical axis and the mechanical axis are adjusted to be coaxial. The method of adjusting the coaxiality of the optical axis and the mechanical axis can usually use the method of self-collimation. This method needs to fix the adjustable plane reflector on the rotating device, and needs to use an external light source to make the plane reflector perpendicular to the rotating mechanical axis. The angle between the mechanical axis and the optical axis of the optical fiber rotary collimator cannot be tested.
发明内容Contents of the invention
本发明为了解决现有光纤准直器无法测量光纤旋转准直器机械轴和光轴的夹角的问题,提出了基于光纤耦合的光纤旋转准直器机械轴和光轴夹角的测量方法。In order to solve the problem that the existing optical fiber collimator cannot measure the angle between the mechanical axis and the optical axis of the optical fiber rotating collimator, the invention proposes a method for measuring the angle between the mechanical axis and the optical axis of the optical fiber rotating collimator based on optical fiber coupling.
本发明所述的基于光纤耦合的光纤旋转准直器机械轴和光轴夹角的测量方法,该方法包括基于光纤耦合的光纤旋转准直器,该光纤旋转准直器包括光功率计1、激光器2、一号光纤3、二号光纤4、光耦合器5、三号光纤6、机械旋转装置7、两组调节螺栓8和光纤准直器9;The method for measuring the angle between the mechanical axis and the optical axis of a fiber-optic rotary collimator based on fiber-optic coupling according to the present invention comprises a fiber-optic rotary collimator based on fiber-optic coupling, the fiber rotary collimator includes an
所述激光器2的激光信号输出端连接一号光纤3的一端,一号光纤3的另一端连接光耦合器5的激光信号输入端,所述光功率计1的激光信号输入端连接二号光纤4的一端,二号光纤4的另一端连接光耦合器5的一个激光信号输出端,所述光耦合器5的激光信号输入输出端连接三号光纤6的一端,所述机械旋转装置7包括轴承和旋转头7-3,所述轴承包括固定部7-1和活动部7-2,所述旋转头7-3为圆筒形,该旋转头7-3位于轴承沿轴向的一侧,且该旋转头7-3与轴承同轴设置,该旋转头7-3的一端与轴承的活动部7-2固定连接,所述旋转头7-3的筒壁上设置2组调节螺栓,每组调节螺栓8包含四根调节螺栓,该四根调节螺栓的轴线位于同一平面且相交于轴承的轴线,任意两个相邻的调节螺栓的轴线夹角为90度,每根调节螺栓的螺杆长度均等于旋转头的半径,所述光纤准直器9嵌入在旋转头内,且通过两组调节螺栓8固定,光纤准直器9与旋转头同轴,三号光纤6的另一端穿过轴承和旋转头7-3与光纤准直器9的一端连接;The laser signal output end of the
基于光纤耦合的光纤旋转准直器的机械轴和光轴的夹角的测量方法,该方法的具体步骤为:A method for measuring the angle between the mechanical axis and the optical axis of a fiber-optic rotary collimator based on fiber coupling, the specific steps of the method are:
步骤一、在光纤准直器的激光出射方向,距离光纤准直器L处设置一个平面反射镜,其中,1mm≤L≤5mm,开启激光器2,旋转旋转头7-3直至·检测光功率计接收到该光信号;
步骤二、调节平面反射镜的方位角和俯仰角直到光功率计接收到的激光信号的功率最大,此时光纤准直器9的光轴与平面反射镜垂直,记录光功率的最大值Pmax,并记录此时平面反射镜的方位角α1与俯仰角β1;
步骤三、单独调节平面反射镜的方位角或俯仰角N次,每次调节后的方位角或俯仰角即为光纤准直器的光轴与平面反射镜法线的夹角Φ,调节步长为1-2μrad,N为大于或等于100的正整数,利用功率计1测量每次调节平面反射镜对应的光功率Pi;计算出Pi/Pmax的值,根据所测数据结合数值插值的方法绘制光功率计1接收的光功率与光功率最大值的比值Pi/Pmax随光纤准直器光轴与平面反射镜法线夹角的变化曲线;
步骤四、将旋转头7-3旋转180度,调节平面反射镜的方位角和俯仰角直至光功率计1接收到的激光信号的功率最大,此时光纤准直器9的光轴与平面反射镜再次垂直;记录平面反射镜调节的方位角α2与俯仰角β2;Step 4: Rotate the rotating head 7-3 by 180 degrees, adjust the azimuth and elevation angles of the plane reflector until the power of the laser signal received by the
步骤五、在步骤四获得的平面镜方位角的基础上,调节平面反射镜的方位角为(α1-α2)/2,在步骤四获得的平面镜俯仰角的基础上,调节平面反射镜的俯仰角为(β1-β2)/2,此时光纤准直器的机械轴和平面反射镜垂直;此时光纤准直器的光轴与机械轴的夹角与光纤准直器光轴与平面反射镜法线的夹角相等,记录此时光功率计1测得的光功率P;
步骤六、计算步骤六光功率计1测得的光功率P与Pmax的比值P/Pmax,在步骤三绘制的光功率计1接收的光功率与光功率最大值的比值Pi/Pmax随光纤准直器光轴与平面反射镜法线夹角的变化曲线中寻找比值P/Pmax对应的光纤准直器光轴与平面反射镜法线的夹角,此夹角即为机械轴和光轴夹角。
本发明所述方法与现有的自准直的方法相比,无需外加光源,应用平面反射镜与光功率计配合及能够实现机械轴和光轴同轴的调试,并能够实现对纤旋转准直器机械轴和光轴的夹角的测量。Compared with the existing self-collimation method, the method of the present invention does not need an external light source, and uses a plane reflector to cooperate with an optical power meter, and can realize coaxial debugging of the mechanical axis and the optical axis, and can realize rotational alignment of the fiber Measurement of the angle between the mechanical axis and the optical axis of the device.
附图说明Description of drawings
图1是具体实施方式一步骤二所述的基于光纤耦合的光纤旋转准直器的光轴与平面反射镜的夹角为Φ时,基于光纤耦合的光纤旋转准直器的结构示意图;Fig. 1 is when the angle between the optical axis of the fiber-optic rotating collimator based on fiber-optic coupling described in
图2是具体实施方式一步骤二所述的基于光纤耦合的光纤旋转准直器的光轴与平面反射镜垂直时,基于光纤耦合的光纤旋转准直器的结构示意图;Fig. 2 is when the optical axis of the optical fiber rotating collimator based on fiber coupling described in the second step of the specific embodiment is perpendicular to the plane reflector, the structural schematic diagram of the fiber rotating collimator based on fiber coupling;
图3是具体实施方式一步骤三所述的绘制光功率计接收光功率与光功率最大值的比值Pi/Pmax随光纤准直器光轴与平面反射镜法线夹角的变化曲线图;Fig. 3 is a plot of the ratio P i /P max of the received optical power of the optical power meter to the maximum value of the optical power described in
图4是具体实施方式一步骤五所述的基于光纤耦合的光纤旋转准直器的光轴与平面反射镜再次垂直时,基于光纤耦合的光纤旋转准直器结构示意图;Fig. 4 is a schematic structural diagram of a fiber-optic coupling-based rotating collimator when the optical axis of the optical fiber-coupling-based rotating collimator described in
图5是具体实施方式一步骤六所述的光纤准直器的机械轴和平面反射镜垂直时,基于光纤耦合的光纤旋转准直器的结构示意图。Fig. 5 is a schematic structural diagram of a fiber-optic rotating collimator based on fiber coupling when the mechanical axis of the fiber-optic collimator described in
具体实施方式一:结合图1,图2,图3,图4,图5说明本实施方式,本实施方式所述基于光纤耦合的光纤旋转准直器机械轴和光轴夹角的测量方法,该方法包括基于光纤耦合的光纤旋转准直器,该光纤旋转准直器包括光功率计1、激光器2、一号光纤3、二号光纤4、光耦合器5、三号光纤6、机械旋转装置7、两组调节螺栓8和光纤准直器9;Specific embodiment 1: This embodiment is described in conjunction with Fig. 1, Fig. 2, Fig. 3, Fig. 4, and Fig. 5. The method for measuring the angle between the mechanical axis and the optical axis of a fiber-optic rotary collimator based on fiber coupling described in this embodiment, the The method includes an optical fiber rotating collimator based on fiber coupling, and the optical fiber rotating collimator includes an
所述激光器2的激光信号输出端连接一号光纤3的一端,一号光纤3的另一端连接光耦合器5的激光信号输入端,所述光功率计1的激光信号输入端连接二号光纤4的一端,二号光纤4的另一端连接光耦合器5的一个激光信号输出端,所述光耦合器5的激光信号输入输出端连接三号光纤6的一端,所述机械旋转装置7包括轴承和旋转头7-3,所述轴承包括固定部7-1和活动部7-2,所述旋转头7-3为圆筒形,该旋转头7-3位于轴承沿轴向的一侧,且该旋转头7-3与轴承同轴设置,该旋转头7-3的一端与轴承的活动部7-2固定连接,所述旋转头7-3的筒壁上设置2组调节螺栓,每组调节螺栓8包含四根调节螺栓,该四根调节螺栓的轴线位于同一平面且相交于轴承的轴线,任意两个相邻的调节螺栓的轴线夹角为90度,每根调节螺栓的螺杆长度均等于旋转头的半径,所述光纤准直器9嵌入在旋转头内,且通过两组调节螺栓8固定,光纤准直器9与旋转头同轴,三号光纤6的另一端穿过轴承和旋转头7-3与光纤准直器9的一端连接;The laser signal output end of the
基于光纤耦合的光纤旋转准直器的机械轴和光轴的夹角的测量方法,该方法的具体步骤为:A method for measuring the angle between the mechanical axis and the optical axis of a fiber-optic rotary collimator based on fiber coupling, the specific steps of the method are:
步骤一、在光纤准直器的激光出射方向,距离光纤准直器L处设置一个平面反射镜,其中,1mm≤L≤5mm,开启激光器2,旋转旋转头7-3直至检测光功率计接收到该光信号;
步骤二、调节平面反射镜的方位角和俯仰角直到光功率计接收到的激光信号的功率最大,此时光纤准直器9的光轴与平面反射镜垂直,记录光功率的最大值Pmax,并记录此时平面反射镜的方位角α1与俯仰角β1;
步骤三、单独调节平面反射镜的方位角或俯仰角N次,每次调节后的方位角或俯仰角即为光纤准直器的光轴与平面反射镜法线的夹角Φ,调节步长为1-2μrad,N为大于或等于100的正整数,利用功率计1测量每次调节平面反射镜对应的光功率Pi;计算出Pi/Pmax的值,根据所测数据结合数值插值的方法绘制光功率计1接收的光功率与光功率最大值的比值Pi/Pmax随光纤准直器光轴与平面反射镜法线夹角的变化曲线;
步骤四、将旋转头7-3旋转180度,调节平面反射镜的方位角和俯仰角直至光功率计1接收到的激光信号的功率最大,此时光纤准直器9的光轴与平面反射镜再次垂直;记录平面反射镜调节的方位角α2与俯仰角β2;Step 4: Rotate the rotating head 7-3 by 180 degrees, adjust the azimuth and elevation angles of the plane reflector until the power of the laser signal received by the
步骤五、在步骤四获得的平面镜方位角的基础上,调节平面反射镜的方位角为(α1-α2)/2,在步骤四获得的平面镜俯仰角的基础上,调节平面反射镜的俯仰角为(β1-β2)/2,此时光纤准直器的机械轴和平面反射镜垂直;此时光纤准直器的光轴与机械轴的夹角与光纤准直器光轴与平面反射镜法线的夹角相等,记录此时光功率计1测得的光功率P;
步骤六、计算步骤六光功率计1测得的光功率P与Pmax的比值P/Pmax,在步骤三绘制的光功率计1接收的光功率与光功率最大值的比值Pi/Pmax随光纤准直器光轴与平面反射镜法线夹角的变化曲线中寻找比值P/Pmax对应的光纤准直器光轴与平面反射镜法线的夹角,此夹角即为机械轴和光轴夹角。
具体实施方式二:本实施方式是对具体实施方式一所述的基于光纤耦合的光纤旋转准直器的机械轴和光轴的夹角的测量方法,步骤一中所述的L=3mm。Embodiment 2: This embodiment is a method for measuring the angle between the mechanical axis and the optical axis of the fiber-optic rotary collimator based on fiber coupling described in
具体实施方式三:本实施方式是对具体实施方式一所述的基于光纤耦合的光纤旋转准直器的机械轴和光轴的夹角的测量方法,步骤三中所述的N的取值为100。Specific embodiment three: This embodiment is a method for measuring the angle between the mechanical axis and the optical axis of the fiber-optic rotary collimator based on fiber coupling described in specific embodiment one, and the value of N described in step three is 100 .
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310194313.0A CN103267497B (en) | 2013-05-23 | 2013-05-23 | Based on the fiber spinning collimating apparatus mechanical axis of coupling fiber and the measuring method of optical axis included angle |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310194313.0A CN103267497B (en) | 2013-05-23 | 2013-05-23 | Based on the fiber spinning collimating apparatus mechanical axis of coupling fiber and the measuring method of optical axis included angle |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103267497A true CN103267497A (en) | 2013-08-28 |
CN103267497B CN103267497B (en) | 2015-12-02 |
Family
ID=49011138
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310194313.0A Expired - Fee Related CN103267497B (en) | 2013-05-23 | 2013-05-23 | Based on the fiber spinning collimating apparatus mechanical axis of coupling fiber and the measuring method of optical axis included angle |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN103267497B (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108802841A (en) * | 2018-06-20 | 2018-11-13 | 中国计量科学研究院 | Light path regulating device, method and gravimeter |
CN112230342A (en) * | 2020-11-06 | 2021-01-15 | 飞秒光电科技(西安)有限公司 | High return loss coaxial collimator and assembling process thereof |
CN116990982A (en) * | 2023-09-26 | 2023-11-03 | 中国科学院长春光学精密机械与物理研究所 | Space optical transmission device for laser communication and adjustment method |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5659645A (en) * | 1994-05-13 | 1997-08-19 | Mitsubishi Cable Industries, Ltd. | Collimator with adjusting mechanism for improved alignment between optical fiber and lens |
US6263133B1 (en) * | 1999-03-29 | 2001-07-17 | Scimed Life Systems, Inc. | Optical focusing, collimating and coupling systems for use with single mode optical fiber |
CN1434340A (en) * | 2002-01-25 | 2003-08-06 | 台达电子工业股份有限公司 | Fiber collimator and manufacturing method thereof |
CN101078615A (en) * | 2007-06-22 | 2007-11-28 | 哈尔滨工业大学 | Precision determination method for angle between optical axis and mechanical axis of optical system |
JP2009042521A (en) * | 2007-08-09 | 2009-02-26 | Fdk Corp | Reflective variable optical attenuator |
CN102141386A (en) * | 2010-12-29 | 2011-08-03 | 哈尔滨工业大学 | Method for measuring included angle between optical axis and reference plane of satellite optical communication terminal |
-
2013
- 2013-05-23 CN CN201310194313.0A patent/CN103267497B/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5659645A (en) * | 1994-05-13 | 1997-08-19 | Mitsubishi Cable Industries, Ltd. | Collimator with adjusting mechanism for improved alignment between optical fiber and lens |
US6263133B1 (en) * | 1999-03-29 | 2001-07-17 | Scimed Life Systems, Inc. | Optical focusing, collimating and coupling systems for use with single mode optical fiber |
CN1434340A (en) * | 2002-01-25 | 2003-08-06 | 台达电子工业股份有限公司 | Fiber collimator and manufacturing method thereof |
CN101078615A (en) * | 2007-06-22 | 2007-11-28 | 哈尔滨工业大学 | Precision determination method for angle between optical axis and mechanical axis of optical system |
JP2009042521A (en) * | 2007-08-09 | 2009-02-26 | Fdk Corp | Reflective variable optical attenuator |
CN102141386A (en) * | 2010-12-29 | 2011-08-03 | 哈尔滨工业大学 | Method for measuring included angle between optical axis and reference plane of satellite optical communication terminal |
Non-Patent Citations (1)
Title |
---|
俞建杰: "卫星通信光学系统优化设计及性能评测方法研究", 《中国博士学位论文全文数据库 信息科技辑》 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108802841A (en) * | 2018-06-20 | 2018-11-13 | 中国计量科学研究院 | Light path regulating device, method and gravimeter |
CN112230342A (en) * | 2020-11-06 | 2021-01-15 | 飞秒光电科技(西安)有限公司 | High return loss coaxial collimator and assembling process thereof |
CN116990982A (en) * | 2023-09-26 | 2023-11-03 | 中国科学院长春光学精密机械与物理研究所 | Space optical transmission device for laser communication and adjustment method |
CN116990982B (en) * | 2023-09-26 | 2023-12-15 | 中国科学院长春光学精密机械与物理研究所 | A space optical transmission device and assembly method for laser communication |
Also Published As
Publication number | Publication date |
---|---|
CN103267497B (en) | 2015-12-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN105698713B (en) | A kind of device and scaling method of calibrating precise shafting axis of rotation | |
CN103278109B (en) | Angle measurement precision detection device of satellite scanning angle monitor | |
CN103235389B (en) | Optical fiber coupling-based optical fiber rotating collimator and coaxial debugging method for mechanical axis and optical axis of optical fiber rotating collimator | |
CN105784335B (en) | The fill-in light calibration device and method of a kind of reference-calibrating mirror normal direction | |
CN102954869B (en) | A kind of polarization maintaining optical fibre High Extinction Ratio calibrating installation and calibration steps thereof | |
CN100442010C (en) | Single photodetector confocal laser triangulation setup | |
CN103791860A (en) | Tiny angle measuring device and method based on vision detecting technology | |
CN203375935U (en) | Tunnel convergence displacement and vault settlement measurement device | |
CN102607472B (en) | Measuring device and measuring method for large-range flatness | |
CN103499355A (en) | Laser demarcation device calibration system | |
CN105737741A (en) | Integrated interference type micro-displacement optical fiber sensor, calibration device thereof and calibration method thereof | |
CN103267497B (en) | Based on the fiber spinning collimating apparatus mechanical axis of coupling fiber and the measuring method of optical axis included angle | |
CN202189012U (en) | Experimental device for measure flat transparent medium refracting index | |
CN102589484A (en) | Autocollimation indication error detection method and device using same | |
CN110132160A (en) | A bridge deflection measurement method using fiber optic light source | |
CN100485313C (en) | Photo-electric autocollimation microscopic measuring instrument for three-dimensional detection and position of space object | |
CN101799303A (en) | Reflection type inclined optical fiber sensor based on monomode optical fiber radiation | |
CN204301699U (en) | The visual integrated autocollimator of photoelectricity | |
CN106940174A (en) | The sensor with displacement is reversed in a kind of measurement based on optical fiber acousto-optic modulation | |
CN104677596A (en) | Optical autocorrelator with unbalanced Mach-Zehnder type optical path scanner embedded in Sagnac annular light path | |
CN104515474A (en) | Real-time monitoring blade tip clearance measuring method | |
CN104457622B (en) | Device and method for detecting straightness of long shaft inner hole | |
CN108507501A (en) | Lightweight cannon multibarrel axis parallel degree detector | |
CN104515592B (en) | A kind of quick characterization apparatus of three-dimensional far field intensity for semiconductor light source | |
CN107063134A (en) | Deep Hole Straightness Test Device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB03 | Change of inventor or designer information |
Inventor after: Yang Yuqiang Inventor after: Yang Qun Inventor after: Ge Wei Inventor after: Cao Guiyuan Inventor after: Zhao Hong Inventor after: Sun Feifei Inventor before: Yang Yuqiang Inventor before: Cao Guiyuan Inventor before: Zhao Hong Inventor before: Sun Feifei |
|
COR | Change of bibliographic data | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151202 Termination date: 20200523 |
|
CF01 | Termination of patent right due to non-payment of annual fee |