CN101078615A

CN101078615A - Precision determination method for angle between optical axis and mechanical axis of optical system

Info

Publication number: CN101078615A
Application number: CN 200710072380
Authority: CN
Inventors: 马晶; 谭立英; 刘剑峰; 韩琦琦; 于思源
Original assignee: Harbin Institute of Technology Shenzhen
Current assignee: Harbin Institute of Technology Shenzhen
Priority date: 2007-06-22
Filing date: 2007-06-22
Publication date: 2007-11-28
Anticipated expiration: 2027-06-22
Also published as: CN100462674C

Abstract

A method for accurately measuring the angle between an optical axis and a mechanical axis in an optical system relates to the technical field of measuring the angle between an optical axis and a mechanical axis in an optical system. Its purpose is to solve the problem that the existing technology cannot strictly measure the angle between the optical axis and the mechanical axis in the satellite optical communication system. Its steps are: the first step: adjust the optical axis of the high-precision flat mirror (3) to coincide with the optical axis of the measured optical system (2) by means of the interferometer (1); the second step: the autocollimator (4) The angle α value between the optical axis and the optical axis of the high-precision flat mirror (3); the third step: the second high-precision measurement of the optical axis of the autocollimator (4) and the mechanical reference plane of the measured optical system (2) The angle β of the optical axis of the plane mirror (5); the fourth step: calculate the angle Δ between the optical axis and the mechanical axis according to the formula Δ=β-α. The invention can strictly measure the angle between the optical axis and the mechanical axis in the satellite optical communication system, and the measurement accuracy of the angle between the optical axis and the mechanical axis is 0.2μrad.

Description

Accurate Measurement Method of Angle Between Optical Axis and Mechanical Axis in Optical System

技术领域technical field

本发明涉及的是光学系统中的光学轴与机械轴之间夹角的测量技术领域。The invention relates to the technical field of measuring the angle between an optical axis and a mechanical axis in an optical system.

背景技术Background technique

光学系统中的光学器件需要机械结构支撑，由于光学器件与机械结构的加工精度存在较大大差异，光学系统的光学轴与机械轴存在角度偏差。大多数光学系统对光学轴与机械轴间的角度差要求并不严格，不需要对其间的差异进行测量。但在卫星光通信系统中，光学轴与机械轴间的夹角需要严格精确测出，目前并无方法对其进行测量。The optical devices in the optical system need to be supported by a mechanical structure. Due to the large difference in the processing accuracy of the optical device and the mechanical structure, there is an angular deviation between the optical axis and the mechanical axis of the optical system. Most optical systems are not critical about the angular difference between the optical axis and the mechanical axis, and do not need to measure the difference. However, in the satellite optical communication system, the angle between the optical axis and the mechanical axis needs to be strictly and accurately measured, and there is currently no way to measure it.

发明内容Contents of the invention

本发明的目的是为了解决现有技术无法对卫星光通信系统中的光学轴与机械轴间的夹角进行严格精确测量的问题，进而提供了一种光学系统中的光学轴与机械轴之间夹角的精确测量方法。The purpose of the present invention is to solve the problem that the existing technology cannot strictly and accurately measure the angle between the optical axis and the mechanical axis in the satellite optical communication system, and then provide a kind of angle between the optical axis and the mechanical axis in the optical system Accurate method of measuring angles.

本发明的方法步骤为：Method steps of the present invention are:

第一步骤：干涉仪1发射的激光光束通过被测光学系统2后出入射到高精度平面镜3中，激光光束由高精度平面镜3反射后通过被测光学系统2入射干涉仪1中；调整高精度平面镜3方位角、俯仰角，使干涉仪1的条纹左右、上下对称，即高精度平面镜3的光轴与被测光学系统2的光轴相重合；The first step: the laser beam emitted by the interferometer 1 enters the high-precision flat mirror 3 after passing through the measured optical system 2, and the laser beam is reflected by the high-precision flat mirror 3 and enters the interferometer 1 through the measured optical system 2; adjust the height The azimuth angle and pitch angle of the precision plane mirror 3 make the fringes of the interferometer 1 symmetrical from left to right and up and down, that is, the optical axis of the high-precision plane mirror 3 coincides with the optical axis of the measured optical system 2;

第二步骤：将自准直仪4设置在高精度平面镜3的前方，自准直仪4向高精度平面镜3发射激光光束，激光光束经高精度平面镜3反射后入射自准直仪4中，自准直仪4根据入射光点位置计算其光轴与高精度平面镜3光轴的夹角α值，即自准直仪4光轴与光学系统光轴夹角α值；The second step: the autocollimator 4 is arranged in front of the high-precision flat mirror 3, and the autocollimator 4 emits a laser beam to the high-precision flat mirror 3, and the laser beam is incident on the autocollimator 4 after being reflected by the high-precision flat mirror 3, The autocollimator 4 calculates the angle α value between its optical axis and the optical axis of the high-precision flat mirror 3 according to the position of the incident light point, that is, the angle α value between the 4 optical axes of the autocollimator and the optical axis of the optical system;

第三步骤：在被测光学系统2的机械支撑的机械基准面上粘接第二高精度平面镜5，即第二高精度平面镜5的光轴与被测光学系统2的机械轴平行，自准直仪4以步骤二中的位置向第二高精度平面镜5发射激光光束，激光光束经第二高精度平面镜5反射后入射自准直仪4中，自准直仪4根据入射光点位置计算其光轴与第二高精度平面镜5光轴的夹角β值，即自准直仪4的光轴与被测光学系统2的机械轴夹角β值；The third step: bonding the second high-precision flat mirror 5 on the mechanical reference plane of the mechanical support of the measured optical system 2, that is, the optical axis of the second high-precision flat mirror 5 is parallel to the mechanical axis of the measured optical system 2, and is self-aligning The collimator 4 emits a laser beam to the second high-precision plane mirror 5 at the position in step 2, and the laser beam is incident on the autocollimator 4 after being reflected by the second high-precision plane mirror 5, and the autocollimator 4 calculates according to the position of the incident light spot The angle β value between its optical axis and the optical axis of the second high-precision plane mirror 5, that is, the angle β value between the optical axis of the autocollimator 4 and the mechanical axis of the measured optical system 2;

第四步骤：将步骤二中的夹角α值、步骤三中的夹角β值带入公式Δ＝β-α中，即得出被测光学系统2的光轴与机械轴之间夹角Δ值。The fourth step: Bring the value of the angle α in step 2 and the value of the angle β in step 3 into the formula Δ=β-α, that is, the angle between the optical axis and the mechanical axis of the optical system 2 under test is obtained Δ value.

本发明能对卫星光通信系统中的光学轴与机械轴间之间的夹角进行严格精确的测量，其光学轴与机械轴之间夹角测量的精度为0.2μrad，并具有步骤简单、容易实现的优点。The invention can strictly and accurately measure the angle between the optical axis and the mechanical axis in the satellite optical communication system, the angle measurement accuracy between the optical axis and the mechanical axis is 0.2μrad, and has simple steps and easy realized advantages.

附图说明Description of drawings

图1是本发明的第一步骤的结构示意图，图2是本发明的第二步骤的结构示意图，图3是本发明的第三步骤的结构示意图。Fig. 1 is a structural schematic diagram of the first step of the present invention, Fig. 2 is a structural schematic diagram of the second step of the present invention, and Fig. 3 is a structural schematic diagram of the third step of the present invention.

具体实施方式Detailed ways

具体实施方式一：结合图1、图2、图3说明本实施方式，本具体实施方式的方法步骤为：Specific embodiment one: illustrate this embodiment in conjunction with Fig. 1, Fig. 2, Fig. 3, the method step of this specific embodiment is:

第一步骤：干涉仪1发射的激光光束通过被测光学系统2后出入射到高精度平面镜3中，激光光束由第一高精度平面镜3反射后通过被测光学系统2入射干涉仪1中；调整第一高精度平面镜3方位角、俯仰角，使干涉仪1的条纹左右、上下对称，即第一高精度平面镜3的光轴与被测光学系统2的光轴相重合；The first step: the laser beam emitted by the interferometer 1 enters the high-precision flat mirror 3 after passing through the measured optical system 2, and the laser beam is reflected by the first high-precision flat mirror 3 and enters the interferometer 1 through the measured optical system 2; Adjust the azimuth and elevation angles of the first high-precision flat mirror 3 so that the fringes of the interferometer 1 are left-right and up-down symmetrical, that is, the optical axis of the first high-precision flat mirror 3 coincides with the optical axis of the measured optical system 2;

第二步骤：将自准直仪4设置在高精度平面镜3的前方，自准直仪4向第一高精度平面镜3发射激光光束，激光光束经第一高精度平面镜3反射后入射自准直仪4中，自准直仪4根据入射光点位置计算其光轴与第一高精度平面镜3光轴的夹角α值，即自准直仪4光轴与光学系统光轴夹角α值；The second step: the autocollimator 4 is arranged in front of the high-precision flat mirror 3, and the autocollimator 4 emits a laser beam to the first high-precision flat mirror 3, and the laser beam is incident on the autocollimator after being reflected by the first high-precision flat mirror 3 In the instrument 4, the autocollimator 4 calculates the angle α value between its optical axis and the optical axis of the first high-precision flat mirror 3 according to the position of the incident light point, that is, the angle α value between the 4 optical axes of the autocollimator and the optical axis of the optical system ;

第一高精度平面镜3、第二高精度平面镜5都选用口径为φ300的平面镜，面型精度为RMS为1/70λ。干涉仪1选用美国ZYGO公司生产的GHI-4”HS型干涉仪发射参考光束，并探测反射波阵面与参考波阵面的干涉条纹；ZYGO干涉仪具有CCD探测器，可将干涉条纹图像直接输入带有数据采集卡的计算机，进行图像处理；ZYGO干涉仪主要参数为：口径φ300mm，工作波长632.8nm。自准直仪4选用德国ELCCMAT公司生产的ELCCMAT3000自准直仪，测角精度为0.2μrad。采用方位、俯仰二维高精度调整架对第一高精度平面镜3角度进行调整。Both the first high-precision plane mirror 3 and the second high-precision plane mirror 5 are plane mirrors with a caliber of φ300, and the surface precision is 1/70λ in RMS. Interferometer 1 uses the GHI-4”HS interferometer produced by ZYGO Company of the United States to emit the reference beam and detect the interference fringes between the reflected wavefront and the reference wavefront; Input the computer that has data acquisition card, carry out image processing; The main parameter of ZYGO interferometer is: caliber φ 300mm, working wavelength 632.8nm.Autocollimator 4 selects the ELCCMAT3000 autocollimator that German ELCCMAT company produces, and measuring angle precision is 0.2 μrad. Adjust the angle of the first high-precision flat mirror 3 by using a two-dimensional high-precision adjustment frame for azimuth and pitch.

Claims

1. The method for accurately measuring the angle between the optical axis and the mechanical axis in the optical system is characterized in that its method steps are:

The first step: the laser beam emitted by the interferometer (1) passes through the optical system under test (2) and then enters the high-precision flat mirror (3). The laser beam is reflected by the high-precision flat mirror (3) and passes through the optical system under test ( 2) In the incident interferometer (1); adjust the azimuth and elevation angles of the high-precision flat mirror (3), so that the fringes of the interferometer (1) are left-right and up-down symmetrical, that is, the optical axis of the high-precision flat mirror (3) is in line with the measured optical axis. The optical axes of the system (2) coincide;

The second step: set the autocollimator (4) in front of the high-precision flat mirror (3), the autocollimator (4) emits a laser beam to the high-precision flat mirror (3), and the laser beam passes through the high-precision flat mirror (3) In the incident autocollimator (4) after reflection, the autocollimator (4) calculates the angle α value between its optical axis and the optical axis of the high-precision flat mirror (3) according to the position of the incident light point, that is, the autocollimator (4 ) the value of the angle α between the optical axis and the optical axis of the optical system;

The third step: bonding the second high-precision flat mirror (5) on the mechanical reference plane of the mechanical support of the measured optical system (2), that is, the optical axis of the second high-precision flat mirror (5) is aligned with the measured optical system (2) ), the autocollimator (4) emits a laser beam to the second high-precision flat mirror (5) at the position in step 2, and the laser beam is incident on the autocollimator after being reflected by the second high-precision flat mirror (5) In (4), the autocollimator (4) calculates the angle β value between its optical axis and the optical axis of the second high-precision flat mirror (5) according to the position of the incident light point, that is, the optical axis of the autocollimator (4) and The mechanical axis angle β value of the measured optical system (2);

The fourth step: Bring the value of the angle α in step 2 and the value of the angle β in step 3 into the formula Δ=β-α, that is, the distance between the optical axis and the mechanical axis of the optical system under test (2) can be obtained Angle Δ value.