CN103252804A - Groove processing tool and groove processing apparatus for substrate - Google Patents

Abstract

The substrate groove processing tool and groove processing device provided by the present invention can perform groove processing with high precision without adjusting the processing position even when the tool is replaced. The groove machining tool (2) of the present invention is held by the holder (17), and is relatively moved together with the holder (17) on the substrate as the processing object to form a groove on the substrate. A tool body (36) and a blade tip (37) are arranged. The tool body (36) has a contact surface (36a) that contacts the holder (17), and is held by the holder (17). The cutting edge portion (37) is formed on the front end portion of the tool body (36), and has a reference surface (37a) which is continuous from the contact surface (36a) and formed on the same plane as the contact surface (36a), and The surface (37a) has a predetermined width.

Description

Grooving tool and groove processing device for substrate

technical field

The present invention relates to a grooving tool, and more particularly to a grooving tool for a substrate that is held by a holder and relatively moves together with the holder on a substrate to be processed to form a groove on the substrate. . Furthermore, the present invention relates to a groove processing device including the above groove processing tool.

Background technique

A thin film solar cell is manufactured by the method shown below, for example. That is, first, a lower electrode film made of a Mo film is formed on a substrate such as glass, and then the lower electrode film is divided into short rectangular shapes by forming grooves in the lower electrode film. Next, a compound semiconductor film including a chalcopyrite structure compound semiconductor film such as a CIGS (Copper Indium Gallium Selenide) film is formed on the lower electrode film. Then, a part of the above-mentioned semiconductor film is removed in a strip shape by trench processing to be divided into short rectangular shapes, and an upper electrode film is formed so as to cover the above-mentioned. Finally, a part of the upper electrode film was stripped off in a strip shape by grooving and divided into short rectangular shapes.

A grooving tool used in the above method is disclosed in Patent Document 1. The grooving tool disclosed in this patent document 1 has a tool body held by a holder, and a cutting edge portion formed on a front end portion of the tool body and having a cutting edge for grooving.

Patent Document 1: Japanese Patent Laid-Open No. 2011-142235

As is known from FIG. 3 of Patent Document 1, a tool used in a conventionally known groove processing device has a cutting edge formed only at the central portion in the width direction perpendicular to the moving direction of the tool. That is, there is a space between the mounting surface of the tool to the holder and the cutting edge. This interval varies according to the machining error of the tool itself.

In such a situation, when the tool is replaced due to wear of the tool or the like, the distance from the tool mounting surface of the holder to the cutting edge of the tool may change due to the aforementioned machining error. If this distance changes, the groove cannot be machined with high precision. Therefore, it is necessary to adjust the machining position whenever the tool is changed.

Contents of the invention

The object of the present invention is to overcome the problems existing in the existing groove processing device, and provide a substrate groove processing tool and groove processing device with a new structure. The technical problems to be solved include, even if the tool is replaced When it is used, there is no need to adjust the processing position, and the groove processing can be performed with high precision.

The groove machining tool for a substrate according to the first invention is held by a holder, moves relatively together with the holder on a substrate to be processed to form a groove on the substrate, and includes a tool body and a cutting edge portion. . The tool body has an abutting surface that abuts against the holder, and is held by the holder. The cutting edge portion is formed at the front end portion of the tool body, has a reference plane that is continuous from the contact surface and is formed on the same plane as the contact surface, and has a predetermined width from the reference surface.

Here, the cutting edge portion has a reference plane that is flush with the contact surface of the tool body attached to the holder, and is formed with a predetermined width from the reference plane. Therefore, there is no situation where the distance between the abutting surface of the tool body and the cutting edge differs from tool to tool due to machining errors. Therefore, when the tool is changed, the groove can be machined with high precision without adjusting the machining position.

In the substrate grooving tool of the second invention, in the groove machining tool of the first invention, a blade is formed at the tip of the blade edge, and the tip of the blade edge including the blade is square when viewed from the moving direction.

Here, since the cutting edge including the cutting edge is square, the groove width to be machined is constant even if the cutting edge of the tool is worn.

In the groove machining tool for a substrate according to the third invention, in the groove machining tool according to the second invention, an inclined surface inclined toward the upstream side in the moving direction as the distance from the blade is formed is formed on the side of the blade on which the edge portion is formed.

Here, since the inclined surface is formed on the side of the tool on which the cutting edge is formed, the ejectability of a part of the removed substrate becomes good. Therefore, it is possible to suppress the peeling of the film and the like around the trench.

In the substrate groove machining tool of the fourth invention, in the groove machining tool of the first or second invention, the holder moves back and forth. Moreover, the blade edge part has the 1st blade formed in the front-end|tip on the forward side of a moving direction, and the 2nd blade formed in the front-end|tip on the reverse side. In addition, slopes inclined toward the upstream side in the moving direction are formed on the first side portion where the edge portion of the first blade is formed and the second side portion where the edge portion of the second blade is formed.

Here, by reciprocating the holder, it is possible to perform groove processing with the first cutting edge of the tool during the forward movement, and to perform groove processing with the second cutting edge of the tool during the backward movement. In addition, as in the third invention, since slopes are formed on both side portions of the tool on which the cutting edges are formed, the ejectability of a part of the removed substrate becomes good. Therefore, it is possible to suppress the peeling of the film and the like around the trench.

A substrate groove processing apparatus according to a fifth invention is an apparatus for forming a groove along a pattern line of a substrate, comprising a stage on which the substrate is placed, a head for mounting any one of the groove processing tools of the first to fourth inventions, and A moving mechanism used to move the platform relative to the head in the horizontal plane. Furthermore, the head has a vertically movable holder, and a pressing member for pressing the grooving tool held by the holder against the substrate with a predetermined pressing force.

In this device, the groove machining tool presses the substrate with a predetermined pressing force by a pressing member and moves back and forth. Furthermore, grooves are formed on the substrate during the forward movement and the backward movement.

According to the sixth invention, in the apparatus of the fifth invention, the holder holds a groove processing tool, and has a swing axis perpendicular to the movement direction as a fulcrum for swinging, obtaining a forward position, and a return position. Swing member in swing position.

As above, the present invention has at least the following advantages and beneficial effects: Even in the case of changing tools, groove machining can be performed with high precision without adjusting the machining position.

To sum up, the present invention has significant technical progress, and has obvious positive technical effects. It is a novel, progressive and practical new design.

The above description is only an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention, it can be implemented according to the contents of the description, and in order to make the above and other purposes, features and advantages of the present invention more obvious and understandable , the following preferred embodiments are cited in detail, and in conjunction with the accompanying drawings, the detailed description is as follows.

Description of drawings

FIG. 1 is an external perspective view of a groove machining device equipped with a groove machining tool according to an embodiment of the present invention.

Fig. 2 is a front view of the head of the groove machining device.

FIG. 3( a ) and FIG. 3( b ) are diagrams showing the side surface and the front surface of the groove processing tool.

FIG. 4( a ), FIG. 4( b ) and FIG. 4( c ) are schematic diagrams for explaining operations during grooving.

[Description of main component symbols]

1 Platform 2 Tools

3 head 6 mobile support mechanism

17 Holder 18 Swing member

19 Cylinder 22 Holder body

36 Tool body 37 Blade tip

38a, 38b blade 40a, 40b bevel

Detailed ways

In order to further explain the technical means adopted by the present invention to achieve the intended purpose of the invention and its effects, the specific implementation of the substrate groove processing tool and groove processing device according to the present invention will be described below in conjunction with the accompanying drawings and preferred embodiments. , structure, feature and effect thereof, detailed description is as follows.

FIG. 1 shows an external perspective view of a groove machining device to which a groove machining tool according to an embodiment of the present invention is attached.

[Overall configuration of groove processing device]

This device includes a stage 1 on which a substrate W is placed, a head 3 on which a groove machining tool (hereinafter, simply referred to as tool) 2 is mounted, and two cameras 4 and monitors 5 each.

The platform 1 is movable in the Y direction of FIG. 1 within the horizontal plane. In addition, the platform 1 can rotate at any angle in the horizontal plane. 1 shows a schematic appearance of the head 3, but the details of the head 3 will be described below.

The head 3 can move in X and Y directions above the platform 1 by means of the moving supporting mechanism 6 . In addition, as shown in FIG. 1 , the X direction is a direction perpendicular to the Y direction within the horizontal plane. The movement support mechanism 6 has a pair of support columns 7a, 7b, a guide rod 8 provided across the pair of support columns 7a, 7b, and a motor 10 that drives a guide 9 formed on the guide rod 8. The head 3 can move in the X direction along the guide 9 as described above.

The two cameras 4 are respectively fixed on the base 12 . Each base 12 can move along a guide 14 extending in the X direction provided on the support table 13 . The two cameras 4 can move up and down, and the images captured by each camera 4 are displayed on the corresponding monitor 5 .

[head]

In FIG. 2 , the head 3 is extracted and shown. The head 3 has a plate-shaped base 16 , a holder 17 and an air cylinder 19 .

The holder 17 is slidably supported in the vertical direction with respect to the base 16 via rails not shown. The holder 17 has a holder body 22 , a support member 23 fixed to the surface of the holder body 22 , and a swing member 18 .

The holder body 22 is formed in a plate shape, and has an opening 22a at an upper portion. The support member 23 is a long rectangular member in the lateral direction, and has a through-hole 23a through which the swing member 18 is inserted.

The swing member 18 is swingably supported by the holder main body 22 and the support member 23 . The swing member 18 has a lower tool attachment portion 24 and an extension portion 25 formed to extend upward from the tool attachment portion 24 .

A groove is formed in the tool mounting portion 24, and the tool 2 is inserted into the groove, and the tool 2 is fixed in the groove by the fixing plate 24a.

In the lower portion of the extension portion 25, a hole 25a penetrating in the horizontal direction and in a direction perpendicular to the groove forming direction is formed. And the swing member 18 is swingable centering on the pin 26 which penetrates this hole 25a. The pin 26 is supported by the holder body 22 and the supporting member 23 .

On the left and right sides of the upper end portion 25b of the extension portion 25, a pair of restricting members 27a and 27b are provided. As shown in FIG. 4, each restricting member 27a, 27b has the cylindrical member 28a, 28b fixed to the holder main body 22, and the spring 29a, 29b inserted in the cylindrical member 28a, 28b. And, the front end of each spring 29a, 29b abuts against the upper end portion 25b of the extension portion 25, whereby the swing member 18 is maintained at the neutral position as shown in FIG. 2 and FIG. 4(b). Further, the swing member 18 swings to press one of the springs 29a, 29b, and the upper end portion 25b of the extension part 25 abuts against the cylindrical members 28a, 28b, thereby restricting the swing angle.

The air cylinder 19 is fixed on the upper surface of the air cylinder supporting member 30 . The cylinder supporting member 30 is disposed on the upper portion of the holder 17 and fixed to the base 16 . A hole penetrating in the vertical direction is formed in the cylinder supporting member 30 , and a piston rod (not shown) of the air cylinder 19 penetrates the through hole, and the end of the rod is connected to the holder 17 .

Furthermore, a spring supporting member 31 is provided on the upper portion of the base 16 . A spring 32 is provided between the spring supporting member 31 and the holder 17 , and the holder 17 is biased upward by the spring 32 . The weight of the holder 17 can be substantially offset by the spring 32 .

On both left and right sides of the holder 17, a pair of gas supply parts 34a, 34b are provided. A pair of gas supply parts 34a, 34b has the same structure, and has the joint 35 and the air nozzle 36, respectively.

[tool]

Details of the tool 2 are shown in FIG. 3 . FIG. 3( a ) is a side view of the tool 2 viewed from the moving direction, and the figure ( b ) is the front view. The moving direction M of the tool 2 is shown in FIG. 3( b ).

The tool 2 has a tool body held by the holder 17 , and a blade edge portion 37 formed at the front end portion of the tool body 36 . In FIG. 3( a ), one surface 36 a of the tool body 36 is a contact surface that contacts the tool mounting portion 24 .

The cutting edge portion 37 is formed within the range of the height h (see FIG. 3( b )) at the front end portion of the tool body 36 . As can be seen from FIG. 3( a ), one surface 37 a of the blade edge portion 37 is continuous with the contact surface 36 a of the tool body 36 and serves as a reference surface formed on the same surface. The blade edge portion 37 is formed to have a predetermined width from the reference plane 37a, and is formed in a square shape when viewed from the moving direction.

A first blade 38 a and a second blade 38 b are formed on both sides in the moving direction at the tip of the blade edge portion 37 . Here, the first blade 38a is a blade for performing grooving during forward movement, and the second blade 38b is a blade for performing grooving during backward movement.

In addition, as shown in FIG. 3( a ), in the blade edge portion 37 , the width W in the direction perpendicular to the moving direction is formed to be narrower than the width W in the same direction of the tool body 36 . As described above, since the blade edge portion 37 is formed in the moving direction, the width of the blade edge portion 37 in this direction is the same width W over the entire length. Furthermore, as can be seen from FIG. 3( a ), the portion of the tool body 36 on the blade edge portion 37 side is formed at an angle D such that the width in the direction perpendicular to the moving direction becomes narrower as it approaches the blade edge portion 37 . tilt.

In the tool 2 , a slope is formed on the side surface including the lower end portion of the cutting edge portion 37 . More specifically, as shown in FIG. 3( b ), when the tool 2 is viewed from the front (direction perpendicular to the moving direction), the first side portion including the cutting edge portion 37 formed with the first blade 38a and the On the second side portion of the blade edge portion 37 on which the second blade 38b is formed, slopes 40a, 40b are formed that incline toward the inner side (upstream side in the moving direction of each blade) as the blades 38a, 38b go upward. .

[Groove processing action]

When using the above device to perform groove processing on a thin-film solar cell substrate, the head 3 is moved by moving the support mechanism 6, and the platform 1 is moved, and the tool 2 is positioned at the position using the camera 4 and the display 5. Form the trench on the predetermined line.

After performing the above positioning, the air cylinder 19 is driven to lower the holder 17 and the swing member 18 so that the tip of the tool 2 comes into contact with the film. The pressure applied to the film by the tool 2 at this time is adjusted by the air pressure supplied to the air cylinder 19 .

Next, the motor 10 is driven to scan the head 3 along the line to be grooved. In FIG. 4 , the postures of the swing member 18 and the tool 2 at this time are schematically shown.

As shown in Figure 4 (a), when moving forward (when moving to the right in Figure 4), the swing member 18 is driven by the pin 26 by the contact resistance of the first blade 38a and the film on the substrate. Swing clockwise from the center. This swing is restricted by the upper end portion 25b of the swing member 18 abutting against the right cylindrical member 28a. Therefore, the tool 2 maintains the inclined posture as shown in FIG. 4( a ), and moves in the +M direction with the first blade 38 a in contact with the thin film on the substrate and the second blade 38 b not in contact with the surface of the substrate. to form grooves.

Thereafter, the head 3 is relatively moved with respect to the substrate, and the tool 2 is moved to the line on which the groove processing is planned to be lowered next. Then, in the same manner as above, the tool 2 is pressed against the thin film on the substrate to move the head 3 in the opposite direction to the above.

As shown in Figure 4(c), during this return movement (when moving to the left in Figure 4), the swinging member 18 uses the pin 26 as a function of the contact resistance between the second blade 38b and the film on the substrate. The center swings counterclockwise. This swing is restricted by the upper end portion 25b of the swing member 18 abutting against the left cylindrical member 28b. Therefore, the tool 2 maintains the inclined posture as shown in FIG. 4( c ), and moves in the −M direction in a state where the second blade 38 b is in contact with the thin film on the substrate and the first blade 38 a is not in contact with the surface of the substrate. , forming grooves.

In the grooving process as described above, the inclined surfaces 40a, 40b are formed on the front end portion including the cutting edge portion 37 of the tool 2, so the removed film can be smoothly discharged to the upper side of the substrate by the cutting edges 38a, 38b. . Therefore, film peeling at the peripheral portion of the trench can be suppressed.

In addition, when the groove processing or the groove processing is completed, air is blown from the air nozzles 36 of the respective gas supply parts 34a and 34b to remove the film peeled off from the substrate.

When the cutting edge portion 37 of the tool 2 is worn, the tool 2 needs to be replaced. When replacing the tool 2 , it is only necessary to attach the contact surface 36 a of the tool body 36 to the surface of the holder body 22 . Since the cutting edge portion 37 is formed with a predetermined width from the same reference plane as the contact surface 36a, the positions of the cutting edges 38a, 38b do not change for each tool. Therefore, when the tool 2 is replaced, the positions of the blades 38a, 38b do not change before and after the replacement, so that no adjustment of the mounting position of the tool is required when the tool is replaced.

[feature]

(1) The blade edge portion 37 is formed with a predetermined width from the reference surface 37 a that is flush with the contact surface 36 a of the tool body 36 attached to the holder 17 . Therefore, the position of each cutting edge 38a, 38b with respect to the holder 17 does not differ from tool to tool, and adjustment of the machining position is not required when the tool is replaced.

(2) Since the cutting edge portion 37 has a square shape when viewed from the moving direction, even if the cutting edges 38a and 38b are worn, the groove width to be machined is constant.

(3) Since the slopes 40 a and 40 b are formed on the side of the tool 2 including the cutting edge portion 37 , the removal of the removed film can be improved, and film peeling around the groove can be suppressed.

[Other Embodiments]

The shape of the blade tip can be changed in various ways. For example, the width W shown in FIG. 3( a ) may be the same as the width of the tool body 36 or may be larger than the width of the tool body 36 . Moreover, the side part of a blade can also be formed in arbitrary angles.

The above is only a preferred embodiment of the present invention, and does not limit the present invention in any form. Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Anyone familiar with this field Those skilled in the art, without departing from the scope of the technical solution of the present invention, may use the method and technical content disclosed above to make some changes or modifications to equivalent embodiments with equivalent changes, but if they do not depart from the technical solution of the present invention, Any simple modifications, equivalent changes and modifications made to the above embodiments according to the technical essence of the present invention still fall within the scope of the technical solution of the present invention.

Claims (6)

1. the groove processing instrument of a substrate remains in the maintenance tool, and coexisting with above-mentioned maintenance tool one relatively moves on the substrate as processing object, and in order to form groove at substrate, it is characterized in that possessing:

Tool body has the bearing surface that is connected to above-mentioned maintenance tool, and remains in above-mentioned maintenance tool; And

Blade tip portion is formed at the leading section of above-mentioned tool body, and have from above-mentioned bearing surface form continuously and above-mentioned bearing surface with the datum level of one side, and have set width from the said reference face.

2. the groove processing instrument of substrate as claimed in claim 1 is characterized in that wherein, is formed with blade at the front end of above-mentioned blade tip portion, and the leading section that comprises the above-mentioned blade tip portion of above-mentioned blade is square when moving direction is observed.

3. the groove processing instrument of substrate as claimed in claim 2 is characterized in that wherein, at the sidepiece of the blade that is formed with above-mentioned blade tip portion, be formed with along with away from above-mentioned blade toward the inclined-plane that the moving direction upstream side tilts.

4. the groove processing instrument of substrate as claimed in claim 1 or 2 is characterized in that wherein, and above-mentioned maintenance tool comes and goes mobile;

Above-mentioned blade tip portion, have be formed at moving direction toward the 1st blade of the front end of moving side and the 2nd blade that is formed at the front end that returns side;

The 1st sidepiece of the above-mentioned blade tip portion that is formed with above-mentioned the 1st blade, with the 2nd sidepiece of the above-mentioned blade tip portion that is formed with above-mentioned the 2nd blade, be formed with along with away from above-mentioned each blade toward the inclined-plane that the moving direction upstream side tilts.

5. the groove processing apparatus of a substrate forms groove along the pattern lines of substrate, it is characterized in that possessing:

Platform, the mounting substrate;

Head is installed the described groove processing instrument of arbitrary claim in the claim 1 to 4; And

Travel mechanism uses so that above-mentioned platform and above-mentioned head relativity ground in horizontal plane is mobile; And

Above-mentioned head has:

Keep tool, can move up and down; And

Pressing member makes the groove processing instrument that remains in above-mentioned maintenance tool press substrate with set pressing force.

6. the groove processing apparatus of substrate as claimed in claim 5, it is characterized in that wherein, above-mentioned maintenance tool keeps above-mentioned groove processing instrument, and have with the swinging axle of above-mentioned moving direction quadrature for a spot wobble and obtain toward moving position and the oscillating structural member that returns the position.

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