CN103234535A - Quartz tuning-fork-type biaxial micro-gyroscope - Google Patents
Quartz tuning-fork-type biaxial micro-gyroscope Download PDFInfo
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- CN103234535A CN103234535A CN2013101351123A CN201310135112A CN103234535A CN 103234535 A CN103234535 A CN 103234535A CN 2013101351123 A CN2013101351123 A CN 2013101351123A CN 201310135112 A CN201310135112 A CN 201310135112A CN 103234535 A CN103234535 A CN 103234535A
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- 239000010453 quartz Substances 0.000 title claims abstract description 30
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 30
- 238000000034 method Methods 0.000 claims abstract description 9
- 238000001039 wet etching Methods 0.000 claims abstract description 5
- 238000006880 cross-coupling reaction Methods 0.000 abstract description 5
- 238000005259 measurement Methods 0.000 abstract description 4
- 238000000926 separation method Methods 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 description 13
- 238000005516 engineering process Methods 0.000 description 11
- 230000010355 oscillation Effects 0.000 description 8
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 230000005684 electric field Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000001914 filtration Methods 0.000 description 4
- 230000003321 amplification Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 238000012857 repacking Methods 0.000 description 2
- 238000010923 batch production Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
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Abstract
本发明涉及一种MEMS角速度传感器，特别涉及一种石英音叉式双轴微陀螺仪，属于惯性测量器件技术领域。本发明的双轴微陀螺仪由具有一定厚度的z向切割石英晶片经过湿法刻蚀工艺加工而成。具体包括：四个驱动叉指、四个敏感叉指、六边形框架、左横梁、右横梁、中心固支结构、多个驱动电极、y轴敏感电极和z轴敏感电极。能同时检测y轴向和z轴向的角速度，驱动叉指与敏感叉指的分离降低了轴间的交叉耦合，保证陀螺的测量精度。y轴敏感电极和z轴敏感电极分别布置在不同的叉指上，降低了电极的制作难度，保证了工艺的可实现性。六边形框架减小了陀螺的误差。中心固支结构保证了陀螺工作的稳定性。
The invention relates to a MEMS angular velocity sensor, in particular to a quartz tuning fork type dual-axis micro gyroscope, which belongs to the technical field of inertial measurement devices. The biaxial micro-gyroscope of the present invention is processed by a z-cut quartz wafer with a certain thickness through a wet etching process. It specifically includes: four driving fingers, four sensitive fingers, a hexagonal frame, a left beam, a right beam, a central fixed support structure, multiple driving electrodes, a y-axis sensitive electrode and a z-axis sensitive electrode. The angular velocity of the y-axis and the z-axis can be detected at the same time, and the separation of the driving finger and the sensitive finger reduces the cross-coupling between axes and ensures the measurement accuracy of the gyroscope. The y-axis sensitive electrodes and the z-axis sensitive electrodes are respectively arranged on different fingers, which reduces the difficulty of making the electrodes and ensures the feasibility of the process. The hexagonal frame reduces the error of the gyro. The central fixed support structure ensures the stability of the gyroscope.
Description
Technical field
The present invention relates to a kind of MEMS angular-rate sensor, particularly a kind of quartz tuning-fork formula twin shaft gyroscope belongs to the inertia measurement device technical field.
Background technology
Quartzy gyroscope is a kind of MEMS angular rate sensor, is the core devices of attitude control and inertial guidance, has that volume is little, in light weight, the reliability advantages of higher.Along with the development of Micrometer-Nanometer Processing Technology in recent years, quartzy gyroscope performance promotes steadily, presents characteristics such as structure variation, volume miniaturization, multiaxis measurement, circuit digitalization.
The quartzy gyroscope of U.S. CST company manufacturing is the most ripe, and the typical structure of its gyroscope chip is H type structure, is a kind of gyroscope of y axle sensitivity, as shown in Figure 1.Drive the interdigital and responsive interdigital upper and lower that is distributed in central frame respectively, two kinds of couplings between interdigital are little and highly sensitive.Quartzy little gyro of this structure is produced in batches, has high precision, high stability, low noise advantage.Simultaneously, the said firm also produces the gyroscope that multiaxis is measured, it is low in energy consumption, cost is low, have good temperature characterisitic and shock resistance characteristic, be mainly used in military aspect, but this gyroscope is the measuring unit that is formed by a plurality of single axis gyroscope assembled package, be not to use single GYROCHIP to carry out multiaxis to measure, this has limited the further miniaturization of device.
The quartzy gyroscope of the multi-fork syconoid single shaft of the EPSON company manufacturing of Japan has been applied to the fields such as stable and robot control of automobile brake system, image.The typical structure of its product is double-T shaped, is a kind of single axis gyroscope of z axle sensitivity, as shown in Figure 2.It is interdigital interdigital with two sensitivities that this structure has four drivings, and four drive the interdigital both sides that are distributed in middle square frame, two interdigital above and belows that are connected to square frame of sensitivity.Its advantage is the difficulty that has reduced manufacture craft, and volume can do very for a short time, is of a size of 5 * 3.2 * 1.3mm after the encapsulation
3, enlarged the application of this gyro.The multiaxis gyro product that the said firm produces also is to be combined by a plurality of single shaft gyros, still has the problem that is not easy to further miniaturization.
Aspect the making of electrode, domesticly can successfully produce the side and divide cube electrode.Chinese patent " the quartzy sensitive structure metallization process of a kind of three-dimensional method " (application publication number: CN102110771A), a kind of can be used in the batch process of quartzy micro element in the method for the side electrode of same side processing and fabricating opposed polarity, proposed.This method provides foundation for the technologic realizability of the quartzy gyroscope of single-chip.
In a word, the Micrometer-Nanometer Processing Technology relevant with quartzy gyroscope is more and more ripe, has possessed enough conditions at present and has produced the quartzy gyroscope that multiaxis is measured at one chip, makes the further miniaturization of device, enlarge its range of application, to satisfy the demand in market.But still there is following technical weak point in the quartzy gyroscope structure of at present known single-chip: arrangement of electrodes is comparatively complicated, is not easy on the technology realize; There is bigger cross-couplings in two between centers, have influenced the measuring accuracy of gyro.
Summary of the invention
The objective of the invention is in order to realize single-chip twin shaft gyroscope, reduce simultaneously its electrode manufacture difficulty, reduce the cross-couplings of two between centers, a kind of quartz tuning-fork formula twin shaft gyroscope is proposed.This gyroscope has been gathered the characteristics of U.S. H type tuning fork structure and Japanese double-T shaped tuning fork structure, has realized using a quartz chip can detect the function of two axial angle speed simultaneously.
A kind of quartz tuning-fork formula twin shaft gyroscope processes through wet-etching technology to the cutting quartz wafer by having certain thickness z.Specifically comprise: four drivings are interdigital, four sensitivities are interdigital, hexagonal-shaped frame, left crossbeam, right crossbeam, center fixed support structure, a plurality of drive electrode, y axle sensitive electrode and z axle sensitive electrode.Definite principle of described y axle and z axle is: be initial point by the center with hexagonal-shaped frame, right crossbeam is the x forward, determines according to the coordinate system that right hand principle is set up.
Described center fixed support structure comprises tie-beam, following tie-beam and fixed blocks.Fixed blocks is positioned at the hexagonal-shaped frame center, and last tie-beam, following tie-beam are drawn from y axle positive dirction, the negative direction of fixed blocks respectively, are connected to the mid point on the hexagonal-shaped frame up and down both sides parallel with the x axle.
Two symmetrical summits of described hexagonal-shaped frame are distributed in respectively on the positive dirction and negative direction of x axle, and left crossbeam is along x axle negative direction, be connected with the summit of hexagonal-shaped frame; Right crossbeam is along x axle positive dirction, be connected with the summit of hexagonal-shaped frame.
Described four to drive interdigital structures identical, be respectively first drive interdigital, second drive interdigital, the 3rd drive interdigital and 4 wheel driven moving interdigital.First drive interdigital, second drive interdigital symmetry be positioned at the both sides of x axle, perpendicular to left crossbeam; The 3rd drive interdigital, the moving interdigital symmetry of 4 wheel driven is positioned at the both sides of x axle, perpendicular to right crossbeam.First drives interdigital, interdigital, the 4 wheel driven moving interdigital relative hexagonal-shaped frame center symmetry interdigital with the 3rd driving of second driving.
Described four responsive interdigital structures are identical, are respectively first responsive interdigital, second responsive interdigital, the 3rd responsive interdigital and the 4th responsive interdigital.First is responsive interdigital, second responsive interdigital, the 3rd responsive interdigital responsive interdigital parallel with the y axle respectively with the 4th, first drive interdigital, second drive interdigital, the 3rd drive between the moving interdigital and hexagonal-shaped frame of interdigital, 4 wheel driven; And first responsive interdigital, second responsive interdigital, the four responsive interdigital relative hexagonal-shaped frame center symmetry responsive interdigital with the 3rd.
Described drive electrode is divided into the driving positive electrode and drives negative electrode.Drive positive electrode and be arranged in the interdigital upper and lower surface and the 3rd of first, second driving, the moving interdigital left and right side of 4 wheel driven; Drive negative electrode electrodes and be arranged in the interdigital left and right side and the 3rd of first, second driving, the moving interdigital upper and lower surface of 4 wheel driven.Wherein upper surface electrode is connected by interdigital top with lower surface electrode, and the left surface electrode is connected by lead-in wire with the right flank electrode.
Described y axle sensitive electrode is divided into the responsive positive electrode of y axle and the responsive negative electrode of y axle.The responsive positive electrode of y axle is arranged in the Lower Half of the 3rd responsive interdigital left surface and the first half and the first half of the 4th responsive interdigital left surface and the Lower Half of right flank of right flank; The responsive negative electrode of y axle is arranged in the first half of the 3rd responsive interdigital left surface and Lower Half and the Lower Half of the 4th responsive interdigital left surface and the first half of right flank of right flank.
Described z axle sensitive electrode is divided into the responsive positive electrode of z axle and the responsive negative electrode of z axle.The responsive positive electrode of z axle is arranged in the first responsive interdigital and second responsive interdigital upper and lower surface; The responsive negative electrode of z axle is arranged in the first responsive interdigital and second responsive interdigital left and right side.
The lead-in wire of above-mentioned a plurality of drive electrode and sensitive electrode comes together in the fixed blocks of center fixed support structure, and from then on draws.The above-mentioned electrode that is positioned at the side covers whole side; Be positioned at the electrode of upper and lower surface in the whole covering of interdigital length direction, leave certain distance at Width and side electrode, prevent from contacting with side electrode and cause short circuit.
The workflow of quartz tuning-fork formula twin shaft gyroscope of the present invention is: when respectively each positive and negative drive electrode being applied the opposite electric signal of phase place, make four to drive and interdigitally to do simple harmonic oscillation at the x direction of principal axis by inverse piezoelectric effect; When the y axle has the angular velocity input, four coriolis forces that drive interdigital generation z direction, and by left and right sides crossbeam with vibration be coupled to four sensitivities interdigital on, make four sensitivities interdigital along the vibration of z direction of principal axis, the electric charge of collecting by y axle sensitive electrode amplifies, filtering, demodulation can record the axial angular velocity of y; When the z axle has the angular velocity input, four coriolis forces that drive interdigital generation y direction, and by left and right sides crossbeam with vibration be coupled to four sensitivities interdigital on, make four sensitivities interdigital along the vibration of x direction of principal axis, the electric charge of collecting by z axle sensitive electrode amplifies, filtering, demodulation can record the axial angular velocity of z.
Beneficial effect
1, uses a quartz chip, can detect y simultaneously axially and the axial angular velocity of z.
2, drive the cross-couplings that interdigital and interdigital the separating of sensitivity have reduced between centers, guarantee the measuring accuracy of gyro.
3, y axle sensitive electrode and z axle sensitive electrode be arranged in different interdigital on, reduced the manufacture difficulty of electrode, guaranteed the realizability of technology.
4, hexagonal-shaped frame has effectively suppressed to drive interdigital and responsive mechanical couplings between interdigital, has reduced the error of gyro.
5, the center fixed support structure has effectively been isolated the influence of other mode of oscillations to operation mode, has guaranteed the stability of gyro work.
Description of drawings
Fig. 1 is the structure of H type quartz tuning-fork in the background technology;
Fig. 2 is the structure of double-T shaped quartz tuning-fork in the background technology;
Fig. 3 is the layout of quartz tuning-fork structure of the present invention and drive electrode and sensitive electrode; Wherein (a) is the quartz tuning-fork overall construction drawing, (b) for the structural drawing of the middle A-A section of figure (a), (c) is the structural drawing of B-B section among the figure (a), (d) for scheming the structural drawing of (a) middle C-C section;
Driving mode when Fig. 4 is quartz tuning-fork of the present invention work;
The responsive mode of y axle when Fig. 5 is quartz tuning-fork of the present invention work;
The responsive mode of z axle when Fig. 6 is quartz tuning-fork of the present invention work;
Fig. 7 is the interdigital Electric Field Distribution under different direction of vibration of quartz tuning-fork in the embodiment; Wherein (a) is interdigital distribution map of the electric field when vibrating along the z direction, (b) is interdigital distribution map of the electric field when vibrating along the x direction;
Label declaration: 110-first drives interdigital, 120-second drives interdigital, 130-the 3rd drives interdigital, the 140-4 wheel driven is moving interdigital, 201-left side crossbeam, the right crossbeam of 202-, 310-first is responsive interdigital, 320-second is responsive interdigital, 410-the 3rd is responsive interdigital, 420-the 4th is responsive interdigital, the 501-hexagonal-shaped frame, the last tie-beam of 502-, tie-beam under the 503-, the 504-fixed blocks, 111-first drives the interdigital surface electrode, 112-first drives interdigital left surface electrode, 113-first drives interdigital right flank electrode, 121-second drives the interdigital surface electrode, 122-second drives interdigital left surface electrode, 123-second drives interdigital right flank electrode, 131-the 3rd drives the interdigital surface electrode, 132-the 3rd drives interdigital right flank electrode, 133-the 3rd drives interdigital left surface electrode, the 141-4 wheel driven moves the interdigital surface electrode, the 142-4 wheel driven moves interdigital right flank electrode, the 143-4 wheel driven moves interdigital left surface electrode, the 311-first responsive interdigital surface electrode, the 312-first responsive interdigital right flank electrode, the 313-first responsive interdigital left surface electrode, the 321-second responsive interdigital surface electrode, the 322-second responsive interdigital left surface electrode, the 323-second responsive interdigital right flank electrode, 411-the 3rd responsive interdigital right flank first half electrode, 412-the 3rd responsive interdigital left surface first half electrode, 413-the 3rd responsive interdigital right flank Lower Half electrode, 414-the 3rd responsive interdigital left surface Lower Half electrode, 421-the 4th responsive interdigital right flank first half electrode, 422-the 4th responsive interdigital left surface first half electrode, 423-the 4th responsive interdigital right flank Lower Half electrode, 424-the 4th responsive interdigital left surface Lower Half electrode.
Embodiment
For objects and advantages of the present invention better are described, the present invention will be further described below in conjunction with drawings and Examples.
Tuning fork structure of the present invention is to process through wet-etching technology to the cutting quartz wafer by having certain thickness z.Fig. 3 is concrete structure of the present invention, comprising: four drivings interdigital, four sensitivities interdigital, two crossbeams, hexagonal-shaped frame and center fixed support structures.First drives interdigital 110, second drives the interdigital the 120, the 3rd and drives interdigital 130,4 wheel driven moving interdigital 140, and four sensitivities interdigital 310,320,410,420 are evenly distributed in the both sides of hexagonal-shaped frame 501, wherein first responsive interdigital 310 and second responsive interdigital 320 be for z repacking survey responsive interdigital, the 3rd the responsive the interdigital 410 and the 4th responsive interdigital 420 is responsive interdigital for y repacking survey; Left side crossbeam 201 drives interdigital and responsive two interdigital crossbeams with right crossbeam 202 for being connected, be connected in hexagonal-shaped frame 501 about two summits locate; Last tie-beam 502, following tie-beam 503 and fixed blocks 504 organization center fixed support structures.
The distribution of each drive electrode of the present invention is shown in Fig. 3 (a): first drives interdigital surface electrode 111, second drives interdigital surface electrode 121, the 3rd drives interdigital right flank electrode 132, the 3rd drives interdigital left surface electrode 133, the moving interdigital right flank electrode 142 of 4 wheel driven and the moving interdigital left surface electrode 143 of 4 wheel driven are to drive positive electrode, first drives interdigital left surface electrode 112, first drives interdigital right flank electrode 113, second drives interdigital left surface electrode 122, second drives interdigital right flank electrode 123, the moving interdigital surface electrode 141 of the 3rd driving interdigital surface electrode 131 and 4 wheel driven is to drive negative electrode, wherein first drive interdigital surface electrode 111, second drives interdigital surface electrode 121, the moving interdigital surface electrode 141 of the 3rd driving interdigital surface electrode 131 and 4 wheel driven is arranged in interdigital upper and lower surface, first drives interdigital left surface electrode 112, first drives interdigital right flank electrode 113, second drives interdigital left surface electrode 122, second drives interdigital right flank electrode 123, the 3rd drives interdigital right flank electrode 132, the 3rd drives interdigital left surface electrode 133, the moving interdigital left surface electrode 143 of the moving interdigital right flank electrode 142 of 4 wheel driven and 4 wheel driven is arranged in interdigital left and right side, at the sectional view in the yz plane shown in Fig. 3 (b); The first responsive interdigital surface electrode 311 and the second responsive interdigital surface electrode 321 are the responsive positive electrodes of z axle, be arranged in interdigital upper and lower surface, the first responsive interdigital right flank electrode 312, the first responsive interdigital left surface electrode 313, the second responsive interdigital left surface electrode 322 and the second responsive interdigital right flank electrode 323 are the responsive negative electrodes of z axle, be arranged in interdigital left and right side, the layout of this group electrode is arranged identical with drive electrode; The 3rd responsive interdigital left surface first half electrode the 412, the 3rd responsive interdigital right flank Lower Half electrode the 413, the 4th responsive interdigital right flank first half electrode the 421 and the 4th responsive interdigital left surface Lower Half electrode 424 is the responsive positive electrodes of y axle, the 3rd responsive interdigital right flank first half electrode the 411, the 3rd responsive interdigital left surface Lower Half electrode the 414, the 4th responsive interdigital left surface first half electrode the 422 and the 4th responsive interdigital right flank Lower Half electrode 423 is the responsive negative electrodes of y axle, in the layout of electrode in the yz plane as Fig. 3 (c) with (d).
As shown in Figure 4, respectively to driving positive electrode and drive negative electrode when applying the opposite periodic voltage signal of phase place, the inverse piezoelectric effect by quartz crystal makes to win and drives interdigital 110, second and drive the interdigital the 120, the 3rd and drive interdigital 130 and the 4 wheel driven moving interdigital 140 periodicity flexural vibrations that produce the x directions.When the frequency of the periodic voltage signal of input with drive interdigital eigenfrequency when identical, the reference that drives the interdigital x of generation direction is vibrated.
As shown in Figure 5, when first drives the reference vibration of interdigital the 120, the 3rd driving interdigital 130 of interdigital 110, second driving and the moving interdigital 140 generation x directions of 4 wheel driven, if the y axle has the angular velocity input, then drive the coriolis force of interdigital generation z direction, and generation is along the simple harmonic oscillation of z direction, left crossbeam 201 and right crossbeam 202 are done the opposite simple harmonic oscillation of direction along the z direction of principal axis simultaneously, this vibration is coupled on first responsive interdigital 310, second the responsive interdigital the 320, the 3rd the responsive the interdigital 410 and the 4th responsive interdigital 420, and produces the simple harmonic oscillation along the z direction.Because the piezoelectric effect of quartz crystal, at first responsive interdigital 310, second the responsive interdigital the 320, the 3rd the responsive the interdigital 410 and the 4th responsive interdigital 420 electric field that produces shown in Fig. 7 (a), the responsive positive electrode of z axle and the collected positive and negative charge of the responsive negative electrode of z axle neutralize mutually, are output as zero; The responsive positive electrode of y axle and the responsive negative electrode of y axle form differential charge simultaneously, can obtain the angular velocity of y axle input through amplification, filtering and demodulation.
As shown in Figure 6, when first drives the reference vibration of interdigital the 120, the 3rd driving interdigital 130 of interdigital 110, second driving and the moving interdigital 140 generation x directions of 4 wheel driven, if the z axle has the angular velocity input, then drive the coriolis force of interdigital generation y direction, and generation is along the simple harmonic oscillation of y direction, left crossbeam 201 and right crossbeam 202 are done the opposite simple harmonic oscillation of direction along the y direction of principal axis simultaneously, this vibration is coupled on first responsive interdigital 310, second the responsive interdigital the 320, the 3rd the responsive the interdigital 410 and the 4th responsive interdigital 420, and produces the vibration along the x direction.Because the piezoelectric effect of quartz crystal, at first responsive interdigital 310, second the responsive interdigital the 320, the 3rd the responsive the interdigital 410 and the 4th responsive interdigital 420 electric field that produces shown in Fig. 7 (b), the responsive positive electrode of y axle and the collected positive and negative charge of the responsive negative electrode of y axle neutralize mutually, are output as zero; The responsive positive electrode of z axle and the responsive negative electrode of z axle form differential charge simultaneously, can obtain the angular velocity of z axle input through amplification, filtering and demodulation.
More than, an example of the present invention is described in detail, the present invention also has following advantage in addition: drive interdigital and responsive interdigital separating and reduced by two between centers cross-couplings, guaranteed the measuring accuracy of gyro; The place, two summits that left side crossbeam 201 and right crossbeam 202 are connected to hexagonal-shaped frame 501 can effectively suppress to drive the interdigital mechanical couplings interdigital to sensitivity, reduces the error of gyro; The center fixed support structure can effectively be isolated the influence of other mode of oscillations, guarantees the stability of gyro work; Y axle sensitive electrode and z axle sensitive electrode be arranged in different interdigital on, reduced technology difficulty, guaranteed that this structure is in technologic realizability.But also there is weak point in the present invention, because the anisotropy of quartz crystal, through behind the wet-etching technology, still can there be coupling error to a certain degree in the responsive mode of y axle and the responsive mode of z axle, can reduce the influence that coupling error brings by the difference of optimizing arrangement of electrodes or increasing by two kinds of model frequencies, further improve the measuring accuracy of gyro.
The above is preferred embodiment of the present invention, and protection scope of the present invention not only is confined to this example.Utilize many interdigital structures that the operation mode of H type tuning fork and double-T shaped tuning fork is combined, to drive interdigital and responsive interdigital being separated, and realizing that at one chip the twin shaft angular velocity detection is basic thought of the present invention, all technical schemes that belongs under the thinking of the present invention all belong to category of the present invention.
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Cited By (7)
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| CN103954305A (en) * | 2014-05-09 | 2014-07-30 | 浙江大学 | MEMS resonant mode charge sensor with flexible levers and detection method thereof |
| CN104132657A (en) * | 2014-07-14 | 2014-11-05 | 中国电子科技集团公司第二十六研究所 | Bisaxial quartz angular velocity sensor chip |
| CN105424021A (en) * | 2015-12-08 | 2016-03-23 | 中国电子科技集团公司第二十六研究所 | Chip of angular velocity sensor of double-ended tuning fork |
| CN110207685A (en) * | 2019-06-13 | 2019-09-06 | 华中科技大学 | A MEMS gyroscope |
| CN115597572A (en) * | 2022-09-16 | 2023-01-13 | 北京晨晶电子有限公司（Cn） | Quartz tuning fork gyroscope |
| CN115900675A (en) * | 2022-09-16 | 2023-04-04 | 北京晨晶电子有限公司 | Quartz Tuning Fork Gyro |
| CN117146791A (en) * | 2023-10-30 | 2023-12-01 | 北京晨晶电子有限公司 | Micromechanical quartz tuning fork gyroscope and electronic equipment |
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| CN117146791B (en) * | 2023-10-30 | 2024-02-23 | 北京晨晶电子有限公司 | Micromechanical quartz tuning fork gyroscope and electronic equipment |
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