CN102889887A - Quartz micromechanical tuning fork gyroscope - Google Patents
Quartz micromechanical tuning fork gyroscope Download PDFInfo
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- CN102889887A CN102889887A CN2012103763373A CN201210376337A CN102889887A CN 102889887 A CN102889887 A CN 102889887A CN 2012103763373 A CN2012103763373 A CN 2012103763373A CN 201210376337 A CN201210376337 A CN 201210376337A CN 102889887 A CN102889887 A CN 102889887A
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Abstract
The invention belongs to the technical field of inertia devices and discloses a quartz micromechanical tuning fork gyroscope. A tuning fork structure of the micromechanical tuning fork gyroscope comprises two driving arms, two sensitive arms and one bearing beam shaped like a Chinese character 'wang'; the bearing beam shaped like the Chinese character 'wang' is composed of an upper beam, a middle beam, a lower beam and a longitudinal beam; the two driving arms and the two sensitive arms are arranged on the middle beam and are respectively symmetrically located at two sides of the longitudinal beam; sensitive charges are distributed on fork fingers in bilateral symmetry; and a side electrode is not needed to be blocked again, so that the problem that the blocked electrode is high in machining difficulty is solved. Meanwhile, accelerated speeds and various coupling effects can be eliminated through utilizing the symmetry of the structure. Through increasing the number of the fork fingers, the sensitivity is improved, the advantages of the symmetry of an H-shaped structure and introduction of a feedback electrode are absorbed, and the advantage that an electrode of a planar structure is easy to manufacture is also absorbed.
Description
Technical field
The present invention relates to the inertia device technical field, particularly relate to a kind of quartz micro mechanical tuning fork gyroscope.
Background technology
Along with the development of domestic attitude control and airmanship, more and more urgent to the demand of production domesticization high accuracy gyroscope instrument product.Existing quartz micro mechanical gyroscope instrument is most widely used general, mainly comprises U-shaped structure quartz micro mechanical gyroscope instrument and H type structure quartz micro mechanical gyroscope instrument.
U-shaped structure quartz micro mechanical gyroscope instrument side sensitive electrode needs piecemeal, and the manufacturing process difficulty is large, and its interdigital thickness and width approach, and drives the coupling of signal and detection signal serious.And H type structure quartz micro mechanical gyroscope instrument need to adopt side piecemeal detecting electrode can obtain higher detection sensitivity equally, and that is that all right is ripe for present domestic piecemeal electrode fabrication technology, and difficulty of processing is larger.
Summary of the invention
The technical matters that (one) will solve
The invention provides a kind of quartz micro mechanical tuning fork gyroscope, need piecemeal sensitive electrode and detecting electrode in order to solve existing structure quartz micro mechanical gyroscope instrument side, and piecemeal electrode fabrication technology is immature, the problem that difficulty of processing is larger.
(2) technical scheme
In order to solve the problems of the technologies described above, the invention provides a kind of quartz micro mechanical tuning fork gyroscope, comprise tuning fork structure, wherein, described tuning fork structure is two H structures, comprises two actuating arms, two responsive arms and " king " font carrier bar; Described " king " font carrier bar is tuning fork structure, is made of entablature, middle cross beam, three crossbeams of sill and a longeron;
Described two actuating arms and two responsive arms all are arranged on the described middle cross beam, and the respectively symmetrical both sides that are positioned at described longeron, and the shape of described two actuating arms and quality are identical, and shape and the quality of described two responsive arms are identical;
The top of described entablature and the bottom of sill respectively connect a fixed block, and described micro-mechanical tuning fork structure is fixed on the pedestal by described fixed block;
Wherein, described tuning fork structure is the mirror image symmetry take described longeron as axis of symmetry, is simultaneously the mirror image symmetry take described middle cross beam as axis of symmetry.
Aforesaid quartz micro mechanical tuning fork gyroscope, preferably, the two ends of described two actuating arms are provided with the first quality fine setting piece.
Aforesaid quartz micro mechanical tuning fork gyroscope preferably, is characterized in that, the two ends of described two responsive arms are provided with the second quality fine setting piece.
Aforesaid quartz micro mechanical tuning fork gyroscope, preferably, the distance of the described longeron of described actuating arm distance is greater than the distance of the described longeron of described responsive arm distance.
Aforesaid quartz micro mechanical tuning fork gyroscope, preferably, the width of described actuating arm and responsive arm is identical.
Aforesaid quartz micro mechanical tuning fork gyroscope, preferably, the width dimensions of described actuating arm and responsive arm is greater than gauge.
Aforesaid quartz micro mechanical tuning fork gyroscope, preferably, one of them described actuating arm is feedback electrode, connects and composes feedback circuit with external circuit.
Aforesaid quartz micro mechanical tuning fork gyroscope, preferably, the junction, right angle of described actuating arm and described middle cross beam has 70 ° of chamferings.
Aforesaid quartz micro mechanical tuning fork gyroscope, preferably, the junction, right angle of described responsive arm and described middle cross beam has 70 ° of chamferings.
(3) beneficial effect
The tuning fork structure of micromechanical tuning fork gyroscope provided by the present invention comprises two actuating arms, two responsive arms and " king " font carrier bar, should be consisted of by three crossbeams in upper, middle and lower and a longeron by " king " font carrier bar, and two actuating arms and two responsive arms are arranged on the middle cross beam, and symmetry is positioned at the both sides of longeron respectively, responsive electric charge left and right sides on interdigital is symmetrical, do not need again side electrode to be carried out piecemeal, overcome minute large problem of cube electrode difficulty of processing.Simultaneously, utilize the symmetry of structure can eliminate the impact of acceleration and various couplings.By increasing interdigital number, improve sensitivity, and absorbed the advantage of H type structural symmetry and introducing feedback electrode, also absorbed the advantage that the planarized structure electrode is easy to make.
Description of drawings
Fig. 1 is the structural representation of quartz micro mechanical tuning fork gyroscope tuning fork structure in the embodiment of the invention;
Fig. 2 is that Fig. 1 is along the partial sectional view of A-A direction;
Fig. 3 is the fabrication processing figure of quartz micro mechanical tuning fork gyroscope tuning fork structure in the embodiment of the invention;
Wherein, a, tuning fork structure; 1: the first quality fine setting piece; 2: actuating arm; 3: the second quality fine setting pieces; 4: responsive arm; 5: " king " font carrier bar; 6: fixed block; 7: entablature; 8: middle cross beam; 9: sill; 10: longeron.
Embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples are used for explanation the present invention, but are not used for limiting the scope of the invention.
Figure 1 shows that the structural representation of quartz micro mechanical tuning fork gyroscope tuning fork structure in the embodiment of the invention.As shown in Figure 1, quartz micro mechanical tuning fork gyroscope tuning fork structure a in the embodiment of the invention is two H structures, comprise two actuating arms 2, two responsive arms 4 and " king " font carrier bar 5, two actuating arms 2 are as drive electrode, two responsive arms 4 are as sensitive electrode, wherein, " king " font carrier bar 5 is tuning fork structure, by entablature 7, middle cross beam 8,9 three crossbeams of sill and a longeron 10 consist of, two actuating arms 2 and two responsive arms 4 all are arranged on the middle cross beam 8, symmetry is positioned at the both sides of longeron 10 respectively, and namely two actuating arms 2 are the mirror image symmetry take longeron 10 as axis of symmetry, and two responsive arms 4 also are the mirror image symmetry take longeron 10 as axis of symmetry.And shape and the quality of two actuating arms 2 are identical, and the shape of two responsive arms 4 and quality are also identical, distribute to realize responsive electric charge left-right symmetric, no longer need a minute cube electrode, have evaded the processing difficult problem that cube electrode is divided in the side.And respectively connecting a fixed block 6 on the top of entablature 7 and the bottom of sill 9, tuning fork structure a is fixed on the pedestal by fixed block 6.Tuning fork structure a is the mirror image symmetry take longeron 10 as axis of symmetry, be simultaneously the mirror image symmetry take middle cross beam 8 as axis of symmetry.
By two actuating arms 2 and two responsive arms 4 are set, increased the interdigital number of tuning fork structure a, the sensitivity that has improved the quartz micro mechanical tuning fork gyroscope.Two H structural symmetries of tuning fork structure a can be eliminated the impact of linear acceleration and various couplings.Wherein, between two actuating arms 2 and two responsive arms 4 and " king " font carrier bar 5 for being rigidly connected, thereby two responsive arms 4 can vibrate under the driving of two actuating arms 2.
Because the precision problem of processing, can not guarantee the full symmetric structure of tuning fork structure a, this symmetrical structure comprises that the shape of two actuating arms 2 and quality are identical, also identical with shape and the quality of two responsive arms 4, this will produce larger noise in quartz micro mechanical gyroscope instrument measured angular speed.In order to give quartz micro mechanical gyroscope instrument noise reduction, preferred the first quality fine setting piece 1 that all arranges at the two ends of two actuating arms 2 in the present embodiment, further, the second quality fine setting piece 3 can also all be set at the two ends of two responsive arms 4, by external test circuit and trimming circuit, the mode that can utilize laser trimming is carried out quality to the first quality fine setting piece 1 and the second quality fine setting piece 3 and is trimmed, thus reduction sound make an uproar, can also guarantee the precision of quartz micro mechanical gyroscope instrument simultaneously.
Can arrange in the present embodiment actuating arm 2 apart from the distance of longeron 10 greater than the distance of responsive arm 4 apart from longeron 10, increase and drive the arm of force, improve driving amplitude.
Wherein, because actuating arm 2 and responsive arm 4 are separately, actuating arm 2 can be set identical with the width dimensions of responsive arm 4, because interdigital thickness and operation mode resonance frequency are irrelevant, thereby interdigital thickness requirement is reduced, can be very little, as shown in Figure 2, be conducive to the chemical etching technology in the tuning fork structure a manufacture craft.
Introduce the advantage of feedback motor in order to absorb single H type structure, in the present embodiment also preferably with one of them actuating arm 2 as feedback electrode, connect and compose feedback circuit with external circuit, provide condition for solving resonance, fixed ampllitude, stationary problem.
Tuning fork structure a is based on Coriolis force (also being called Coriolis force) and designs, the specific works principle of quartz micro mechanical gyroscope instrument is in the present embodiment: at first by external test circuit and trimming circuit, the mode of utilizing laser trimming is carried out quality to the first quality fine setting piece 1 and the second quality fine setting piece 3 and is trimmed;
Apply a burning voltage then for actuating arm 2, actuating arm 2 produces the directions X flexural vibrations under the effect of extra electric field.When the quartz micro mechanical gyroscope instrument when its axis of symmetry (being longeron 10) rotates, namely rotate around Z axis, as shown in Figure 1, wherein, angular velocity of rotation is ω, then act on the vibration that the Coriolis force on the tuning fork structure a makes responsive arm 4 produce Y-direction, utilize so quartzy piezoelectric effect, electric charge proportional to Coriolis force just appears on the sensitive electrode, the electric current that these electric charges form is through after amplifying demodulation, just obtain a direct current output that is proportional to input angular velocity of rotation ω, thereby measure the angular velocity of rotation value.
Preferred actuating arm 2 has 70 ° of chamfering α with the junction, right angle of middle cross beam 8 in the present embodiment, and actuating arm 2 also can have 70 ° of undercut ss with the junction, right angle of middle cross beam 8 simultaneously, to strengthen the anti-vibration impact property of tuning fork structure a.
As can be seen from the above embodiments, two H tuning fork structures of quartz micro mechanical tuning fork gyroscope provided by the present invention comprise two actuating arms, two responsive arms and " king " font carrier bar, should be consisted of by three crossbeams in upper, middle and lower and a longeron by " king " font carrier bar, and two actuating arms and two responsive arms are arranged on the middle cross beam, and symmetry is positioned at the both sides of longeron respectively, responsive electric charge distributes in the interdigital left-right symmetric that is, do not need again side electrode to be carried out piecemeal, overcome minute large problem of cube electrode difficulty of processing.Simultaneously, utilize the symmetry of structure can eliminate the impact of acceleration and various couplings.By increasing interdigital number, improve sensitivity, and absorbed the advantage of H type structural symmetry and introducing feedback electrode, also absorbed the advantage that the planarized structure electrode is easy to make.
In the prior art, there are two kinds for the job operation of quartz tuning-fork structure a: cutting+coating method and photoetching+chemical corrosion method.
Wherein, cutting+coating method mainly is to adopt tinsel, diamond cutter or cut to go out the structural drawing of quartz tuning-fork structure a, mask plate with the electrode graphic making blocks the position that tuning fork does not need metal film again, carry out the physical vapor plated film, thereby obtain required electrode pattern, the tuning fork structure edge that this method is made is neat, and dimensional accuracy is mainly determined by process equipment, but the electrode cabling is thicker, and the quartz tuning-fork volume is larger.
Adopt photoetching+chemical corrosion method to prepare two H structure quartz tuning-forks in the embodiment of the invention, photoetching+chemical corrosion method is based on the fine machining method of semiconductor technology, by the structural drawing of technique batch making quartz tuning-fork structure a on the quartz crystal substrate such as plated film, photoetching, chemical corrosion, thereby reduced widely the production cost of quartzy gyro.
The basic fabrication processing of quartz tuning-fork structure a of the present invention is: as shown in Figure 3, and the two-sided plating mask of quartzy thin slice-dual surface lithography tuning fork figure-tuning fork mask etching-photoetching electrode pattern-quartz tuning-fork chemical corrosion-electrode etching-be coated with side electrode.
Quartz substrate requires the Double sided mirror mirror polish, and does cleaning, is attached to particle, organism and the metal residue of quartz surfaces with removal.Cleaning method mainly contains pickling, alkali cleaning, washing agent is washed washes etc. with organic solvent, or wherein several method in conjunction with to remove different residue on the substrate.Make the masking film of quartz tuning-fork structure a corrosion with the Cr/Au film, the figure of the two-sided tuning fork of masking film is by Twi-lithography and corrosion gained.For guaranteeing normally carrying out of quartz tuning-fork structure fabrication technique, emphasis has solved following problem in the embodiment of the invention:
(1) making of Cr/Au masking jig
Can find out from process chart, preparation strong adhesion, good corrosion resistance, the Cr/Au film that stress is little are the bases that guarantees that each operation is normally carried out.At present mainly be coated with the Cr/Au film with vacuum thermal evaporation and vacuum sputtering, two kinds of methods respectively have relative merits.When utilizing vacuum thermal evaporation to be coated with the Cr/Au film, the quartz substrate heating is risen to certain temperature, the residual gas molecule that is adsorbed on substrate surface is reduced, thereby increase the thin-film deposition molecule at on-chip adhesion, reduce on the other hand the poor of steam molecule recrystallization temperature and substrate temperature, thereby effectively reduced the internal stress of rete.But the gather density of rete is little, and in the quartzy process of corrosion, rete is through the immersion of long-time corrosive liquid, and corrosive liquid sees through the rete space quartz surfaces is carried out undercutting, and makes film layer structure become loose; The aggregation density of utilizing vacuum sputtering to prepare is large, the rete space is little, the ability of anti-undercutting is stronger than thermal evaporation.Adopt vacuum sputtering to be coated with the Cr/Au film in the embodiment of the invention.
(2) chemical corrosion of quartz tuning-fork structure a
The chemical anisotropic etch of quartz crystal is determined by the anisotropy of quartz crystal structure.Adopt hydrofluorite (HF)+ammonium fluoride (NH4F) solution that quartz crystal is carried out chemical corrosion in the embodiment of the invention, z cutting is quartzy to show x and side, y cross section in this corrosive liquid have in various degree corner angle, and these corner angle are because quartz crystal is respectively organized the different result of crystal face corrosion rate.In the x cross section, along with the prolongation of etching time, the sideways corner angle of x losing side disappear in advance, form steep side, by continuing to increase etching time, can and then remove the square sideways corner angle of x, obtain the tuning fork structure a of the intact two H structures of pattern.
The above only is preferred implementation of the present invention; should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the technology of the present invention principle; can also make some improvement and replacement, these improvement and replacement also should be considered as protection scope of the present invention.
Claims (9)
1. a quartz micro mechanical tuning fork gyroscope comprises tuning fork structure, it is characterized in that, described tuning fork structure is two H structures, comprises two actuating arms, two responsive arms and " king " font carrier bar; Described " king " font carrier bar is tuning fork structure, is made of entablature, middle cross beam, three crossbeams of sill and a longeron;
Described two actuating arms and two responsive arms all are arranged on the described middle cross beam, and the respectively symmetrical both sides that are positioned at described longeron, and the shape of described two actuating arms and quality are identical, and shape and the quality of described two responsive arms are identical;
The top of described entablature and the bottom of sill respectively connect a fixed block, and described micro-mechanical tuning fork structure is fixed on the pedestal by described fixed block;
Wherein, described tuning fork structure is the mirror image symmetry take described longeron as axis of symmetry, is simultaneously the mirror image symmetry take described middle cross beam as axis of symmetry.
2. quartz micro mechanical tuning fork gyroscope according to claim 1 is characterized in that, the two ends of described two actuating arms are provided with the first quality fine setting piece.
3. quartz micro mechanical tuning fork gyroscope according to claim 1 is characterized in that, the two ends of described two responsive arms are provided with the second quality fine setting piece.
4. quartz micro mechanical tuning fork gyroscope according to claim 1 is characterized in that, the distance of the described longeron of described actuating arm distance is greater than the distance of the described longeron of described responsive arm distance.
5. quartz micro mechanical tuning fork gyroscope according to claim 1 is characterized in that, the width of described actuating arm and responsive arm is identical.
6. quartz micro mechanical tuning fork gyroscope according to claim 1 is characterized in that, the width dimensions of described actuating arm and responsive arm is greater than gauge.
7. quartz micro mechanical tuning fork gyroscope according to claim 1 is characterized in that, one of them described actuating arm is feedback electrode, connects and composes feedback circuit with external circuit.
8. arbitrary described quartz micro mechanical tuning fork gyroscope is characterized in that according to claim 1 ~ 7, and the junction, right angle of described actuating arm and described middle cross beam has 70 ° of chamferings.
9. arbitrary described quartz micro mechanical tuning fork gyroscope is characterized in that according to claim 1 ~ 7, and the junction, right angle of described responsive arm and described middle cross beam has 70 ° of chamferings.
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Cited By (6)
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| CN103234535A (en) * | 2013-04-18 | 2013-08-07 | 北京理工大学 | Quartz tuning-fork-type biaxial micro-gyroscope |
| CN103954305A (en) * | 2014-05-09 | 2014-07-30 | 浙江大学 | MEMS resonant mode charge sensor with flexible levers and detection method thereof |
| CN105424021A (en) * | 2015-12-08 | 2016-03-23 | 中国电子科技集团公司第二十六研究所 | Chip of angular velocity sensor of double-ended tuning fork |
| CN108007448A (en) * | 2017-11-22 | 2018-05-08 | 湖南天羿领航科技有限公司 | A kind of axial symmetry silicon micromechanical gyroscope sensitive structure and its manufacture method |
| CN114543779A (en) * | 2020-11-24 | 2022-05-27 | 北京晨晶电子有限公司 | Inertial element calibration structure and micromechanical gyroscope |
| CN115507831A (en) * | 2022-10-24 | 2022-12-23 | 准懋(杭州)科技有限公司 | Micro-electromechanical gyroscope |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103234535A (en) * | 2013-04-18 | 2013-08-07 | 北京理工大学 | Quartz tuning-fork-type biaxial micro-gyroscope |
| CN103234535B (en) * | 2013-04-18 | 2015-08-19 | 北京理工大学 | A kind of quartz tuning-fork-type biaxial micro-gyroscope |
| CN103954305A (en) * | 2014-05-09 | 2014-07-30 | 浙江大学 | MEMS resonant mode charge sensor with flexible levers and detection method thereof |
| CN105424021A (en) * | 2015-12-08 | 2016-03-23 | 中国电子科技集团公司第二十六研究所 | Chip of angular velocity sensor of double-ended tuning fork |
| CN105424021B (en) * | 2015-12-08 | 2017-12-05 | 中国电子科技集团公司第二十六研究所 | A kind of double-ended tuning fork angular-rate sensor chip |
| CN108007448A (en) * | 2017-11-22 | 2018-05-08 | 湖南天羿领航科技有限公司 | A kind of axial symmetry silicon micromechanical gyroscope sensitive structure and its manufacture method |
| CN114543779A (en) * | 2020-11-24 | 2022-05-27 | 北京晨晶电子有限公司 | Inertial element calibration structure and micromechanical gyroscope |
| CN114543779B (en) * | 2020-11-24 | 2023-03-17 | 北京晨晶电子有限公司 | Inertial element calibration structure and micromechanical gyroscope |
| CN115507831A (en) * | 2022-10-24 | 2022-12-23 | 准懋(杭州)科技有限公司 | Micro-electromechanical gyroscope |
| CN115507831B (en) * | 2022-10-24 | 2024-06-07 | 准懋(杭州)科技有限公司 | Micro-electromechanical gyro |
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