CN103163446B

CN103163446B - Test handler

Info

Publication number: CN103163446B
Application number: CN201210526125.9A
Authority: CN
Inventors: 成耆炷
Original assignee: Techwing Co Ltd
Current assignee: Techwing Co Ltd
Priority date: 2011-12-08
Filing date: 2012-12-07
Publication date: 2015-09-09
Anticipated expiration: 2032-12-07
Also published as: TW201324666A; CN104841639B; TWI549216B; KR101644481B1; CN103163446A; CN104841639A; KR20130064204A

Abstract

Disclosing a kind of Test handler, it is disclosed that by using brake unit or the second feed unit to keep the technology from test cabinet to the test pallet going infusion chamber to be fed to securely in rest position.

Description

Test handler

Technical field

The present invention relates to Test handler, this Test handler is supported in the test carried out produced semiconductor device performed before semiconductor device is transported.

Background technology

Test handler be the semiconductor device of supporting that test makes tester to test to be manufactured by pre-customized fabrication technique and before semiconductor device is loaded into object pallet according to test result by graduate for semiconductor device device.

Fig. 1 is the conceptual view of the universal test separator 100 from above, and universal test separator 100 comprises according to Test handler of the present invention.With reference to Fig. 1, Test handler 100 comprises test pallet 110, load units 120, infusion chamber 130, test cabinet 140, removes infusion chamber 150 and unloading unit 160.

With reference to Fig. 2, in test pallet 110, multiple inserts 111 of semiconductor D can be settled to be tightly fitted to framework 112, and by multiple feed unit (not shown) along the closed path C circulation determined.As a reference, the surface of insert 111 and the surface of framework 112 have step (step on framework surface is greater than insert step from the degree that accompanying drawing is given prominence to is from the outstanding degree of accompanying drawing).

The semiconductor device D do not tested is loaded into and is positioned on the test pallet 110 of " loaded " position LP by load units 120.

Infusion chamber 130 is set to preheat the semiconductor device D that the test pallet 110 be fed to from " loaded " position LP loads according to test environment conditions before semiconductor device D is tested or pre-cooled.

Test cabinet 140 is set to support test, thus can to preheat in infusion chamber 130 or pre-cooled after be fed to the semiconductor device D that the insert 111 of the test pallet 110 of test position TP is settled and test.And the tester for measuring semiconductor device is attached to the Test handler 100 being positioned at test cabinet 140 side.

The heating that the test pallet 110 going infusion chamber 150 to be set to recover to be fed to from test cabinet 140 loads or the semiconductor device of cooling.

Unloading unit 160 is sorted out from the semiconductor device going infusion chamber 150 to be fed to the test pallet 110 of unloading position UP loads according to test grade, and is unloaded to by semiconductor device in empty object pallet.

As mentioned above, semiconductor device D along from " loaded " position LP through infusion chamber 130, test cabinet 140, go infusion chamber 150 and unloading position UP again to extend to the closed path C circulation of " loaded " position LP, simultaneously semiconductor device D is loaded on test pallet 110.

The Test handler 100 with the basic circulating path of test pallet is divided into two types: one is the following dock Test handler of head, another kind is side dock Test handler, head following dock Test handler allow load semiconductor device tested while test pallet 110 keep level, and side dock Test handler allow load semiconductor device tested while test pallet 110 keep vertical.Therefore, side dock Test handler 100 needs to comprise one or two posture conversion unit, for the posture of the horizontal checkout pallet being mounted with semiconductor is transformed into vertical state, or the posture of vertical test pallet is transformed into horizontality with unloading semiconductor device after tested.

Next, feed unit related to the present invention will be described in more detail.

As mentioned above, test pallet 110 circulates along predetermined closed path C, and Test handler needs multiple feed units of comprising for being fed to test pallet 100.Multiple feed units in many feed units, especially, signal feed technique according to the present invention relates to the technology for loaded semiconductor device to be fed to the desired location in infusion chamber 150 by the test pallet 110 of full test.

In most of the cases, for by test pallet 110 from infusion chamber 130 be fed to test cabinet 140 feed unit (hereinafter referred to as " the first feed unit ") and for loaded semiconductor device is had identical mechanical realization by the feed unit (hereinafter referred to as " the second feed unit ") that the test pallet 110 of full test is fed to the desired location infusion chamber 150, example is included in Korean Patent 10-0897067(and announces on May 14th, 2009) pallet device for feeding (hereinafter referred to as prior art) of proposing in (being entitled as " Tray Feeding Apparatus for Test Handler (the pallet device for feeding for Test handler) ").

Next, describe from the infusion chamber 130 closed path C to test cabinet 140 with reference to Fig. 3 and go the method being fed to test pallet 110 in the path of infusion chamber 150.As a reference, Fig. 3 shows the example of side dock Test handler, in the dock Test handler of side, test pallet 110 from infusion chamber 130 to test cabinet 140 with go to the path of infusion chamber 150 to be fed while test pallet 110 keep vertically upright (this is identical with Test handler when docking below head).

First, as shown in Figure 3A, test pallet 110A in infusion chamber 130 is present in by the first feed unit 170(as shown in Figure 3 B) be fed to test cabinet 140.And, when the semiconductor device on test pallet 110A is tested with the state of Fig. 3 B, the test pallet 110B followed after test pallet 110A waits for after being fed to a position, and wherein test pallet 110B will be fed to test cabinet 140 from this position.

If be loaded in semiconductor device on test pallet 110A subsequently by full test, then test pallet 110B is fed to test cabinet by the first feed unit 170, as shown in Figure 3 C, the tested pallet 110B of test pallet 110A promotes and towards going infusion chamber 150 to be fed preset distance, is then positioned at stop position SP.

Next, as shown in Figure 3 D, the second feed unit 180 test pallet 110A is fed in infusion chamber 150 needed for desired location RP.

By this way, the first feed unit 170 relates to a certain extent and being fed to towards removing infusion chamber 150 by the test pallet 110 be fed to from test cabinet 140.

Certainly, the first feed unit 170 and the second feed unit 180 can be present in room (infusion chamber, test cabinet and remove infusion chamber), and some elements can be present in outdoor and some elements can be present in indoor.That is, select the structure being applicable to equipment just enough.

Simultaneously, when the test pallet 110 be present in test cabinet 140 is fed to infusion chamber 150 in the mode identical with shown in Fig. 4 A amplified, the test pallet 110 of not expelled by other feed unit is not accurately parked in stop position SP because of motional inertia and exceedes stop position SP to a certain degree, produces error thus in the feeding of the second feed unit 180.Therefore, with reference to Fig. 4 B, provide the detent 190 that after being accurately positioned at stop position SP at test pallet 110, test pallet 110 stopped and for making detent 190 be positioned in closed path or operational brake 190 makes detent 190 depart from the independent operating mechanism of closed path (reference Fig. 4 C).

But even if when detent 190 configures as Fig. 4, with reference to Fig. 5, test pallet 110A moves about 1mm due to the reacting force of detent 190 to test cabinet 140, and test pallet 110B also moves from test position TP towards infusion chamber 130 thus.Certainly, although test pallet 110B is expelled by the first feed unit 170, test pallet 110B also moves the gap in the necessary tolerance of expulsion first feed unit 170 towards infusion chamber 130.In this case, because test pallet 110B departs from accurate test position, therefore test pallet 110B and the non-exact matching of tester, thus damage semiconductor device D, insert 111 or test pallet 110B.

Summary of the invention

Therefore, the object of the invention is to solve the aforementioned problems in the prior, target of the present invention is to provide by using the first feed unit will to remain on the technology of stop position from test cabinet towards the test pallet going infusion chamber to be fed to.

In order to realize this object, provide the Test handler according to one aspect of the invention, this Test handler comprises: test pallet, test pallet is mounted with semiconductor device and loads, and test pallet circulates along closed path; Load units, moves to the non-measuring semiconductor device on object pallet the test pallet being positioned at " loaded " position; Infusion chamber, before test, preheat according to test environment conditions or pre-cooled be loaded in from " loaded " position feeding test pallet semiconductor device; Test cabinet, support to be loaded into semiconductor device in infusion chamber preheated or pre-cooled after be fed to the test of the semiconductor device on the test pallet of test position; Remove infusion chamber, the semiconductor device be loaded in from the test pallet of test cabinet feeding is returned to room temperature; Unloading unit, will be loaded in from going the infusion chamber semiconductor device be fed to the test pallet of unloading position to move to empty object pallet; First feed unit, is fed to test cabinet by the test pallet in infusion chamber; Brake unit, after the test of the semiconductor device loaded completes, according to the operation of the first feed unit, makes to stop at required stop position from test cabinet to the test pallet going infusion chamber to be fed to; And second feed unit, by the test pallet stopped by brake unit from desired location needed for stop position is fed to infusion chamber, wherein, brake unit comprises: detent, and test pallet is stopped at required stop position; Lock, the test pallet that edge returns in the opposite direction with feeder is tended in maintenance by the reacting force of detent when colliding with detent; Release, makes lock discharge test pallet and makes test pallet be fed to desired location by the second feed unit from stop position; And manipulater, operational brake, makes detent be arranged in closed path or depart from closed path.

When manipulater is operated, release departs from the operation of closed path in conjunction with detent, makes lock discharge test pallet.

The drive source that manipulater comprises rotatable rotating member and rotating member is rotated, detent is fixed to rotating member and rotates together with rotating member with the rotation in conjunction with rotating member and be therefore positioned in closed path or depart from closed path, release is fixed to rotating member, to rotate together with rotating member in conjunction with the rotation of rotating member along with release, when detent departs from closed path, lock is made to discharge test pallet.

Lock comprises rotatable locking component and elastic component, locking component keeps test pallet or release test pallet according to rotation status, elastic component applies elastic force and makes locking component rotate the state extremely keeping test pallet, and the direction that release discharges test pallet along locking component rotates.

According to a further aspect in the invention, provide a kind of Test handler, it comprises: test pallet, and test pallet is mounted with semiconductor device, and test pallet circulates along closed path; Load units, moves to the non-measuring semiconductor device on object pallet the test pallet being positioned at " loaded " position; Infusion chamber, before test, preheat according to test environment conditions or pre-cooled be loaded in from " loaded " position feeding test pallet semiconductor device; Test cabinet, support to be loaded into semiconductor device in infusion chamber preheated or pre-cooled after be fed to the test of the semiconductor device on the test pallet of test position; Remove infusion chamber, make the semiconductor device be loaded in from the test pallet of test cabinet feeding return to room temperature; Unloading unit, will be loaded in from going the infusion chamber semiconductor device be fed to the test pallet of unloading position to move to empty object pallet; First feed unit, is fed to test cabinet by the test pallet in infusion chamber; And second feed unit, by after completing in the test of semiconductor device of loading according to the operation of the first feed unit from test cabinet to going infusion chamber to be fed to and the test pallet being positioned at required stop position is fed to required desired location, wherein, second feed unit comprises: lock, keeps test pallet; First feeding parts, move to the desired location in closed path, and are attached to lock along the feed direction of test pallet by lock; And second is fed to parts, the first feeding parts are moved along the direction vertical with the feed direction of test pallet, keep test pallet or release test pallet to allow lock.

Lock comprises braking parts and sticking department, and braking parts makes test pallet stop at required stop position, and the test pallet that edge returns in the opposite direction with feeder is tended in sticking department maintenance because of the reacting force of detent.

Sticking department comprises rotatable locking component and elastic component, and locking component keeps test pallet or release test pallet according to rotation status, and elastic component applies elastic force and makes locking component rotate the state extremely keeping test pallet.

Accompanying drawing explanation

By the detailed description below in conjunction with accompanying drawing, above-mentioned and other objects, features and advantages of the present invention will be more apparent, in the accompanying drawings:

Fig. 1 to Fig. 5 is the view describing prior art;

Fig. 6 is the concept plan view of Test handler according to first embodiment of the invention;

Fig. 7 is the diagrammatic plan view of the brake unit of the Test handler being applied to Fig. 6;

Fig. 8 A to Fig. 8 D is the reference-view of the operation of the brake unit of key drawing 7;

Fig. 9 is the concept plan view of Test handler second embodiment of the invention;

Figure 10 is the diagrammatic plan view of the second feed unit of the Test handler being applied to Fig. 9; And

Figure 11 A to Figure 11 E is the reference-view of the second feed unit operation explaining Figure 10.

Embodiment

Hereinafter, describe illustrative embodiments of the present invention with reference to the accompanying drawings, wherein for clearly object, if possible will omit or description that compression repeats.

The description > of < first embodiment

Fig. 6 is the schematic diagram of the side dock Test handler 600 according to an embodiment of the invention.

Comprise test pallet 610, load units 620, infusion chamber 630, test cabinet 640 according to the Test handler 600 of embodiment of the present invention, remove infusion chamber 650, unloading unit 660, first feed unit 670, brake unit 680 and the second feed unit 690.

In composed component, test pallet 610, load units 620, infusion chamber 630, test cabinet 640, go infusion chamber 650 and unloading unit 660 to be described in the introduction, their description will be omitted.

The pallet feed unit that first feed unit 670 can provide with prior art has identical structure, and is set to the test pallet 610 in infusion chamber 630 to be fed to test cabinet 640.

Brake unit 680 is set at the semiconductor device loaded after desired location is by full test, make to stop to the test pallet going infusion chamber 650 to be fed to (description with reference to Fig. 3 prior art) from test cabinet 640 according to the operation of the first feed unit 670, and with reference to Fig. 7 A and 7B, brake unit 680 comprises detent 681, lock 682, release 683 and manipulater 684.

Detent 681 is set to make test pallet 610 stop at required stop position, and the contact site 681a of detent 681 is preferably formed to relax contact impact by soft silica gel.And, detent 681(more specifically, contact site) rotate to be positioned on closed path C according to the mode of operation of manipulater 684 test pallet 610 stopped, or depart from closed path C to be fed to test pallet 610 as shown in Figure 7 B.

Lock 682 is set to keep to tend to due to the reacting force of detent 681 when test pallet 610 collides with detent 681 test pallet that edge returns in the opposite direction with feeder, and comprises locking component 682a and elastic component 682b.

Locking component 682a takes the shape of the letter U when watching in the plane substantially, and the line perpendicular to accompanying drawing can be rotated as rotation (dashed area).In more detail, locking component 682a comprises the Linear portion of external force end 682a-1(U shape) and the lower linear portion of dog point 682a-2(U shape), external force end 682a-1 is used for receiving from release 683 external force overcoming the elastic force of elastic component 682a, and dog point 682a-2 arrives the step part of test pallet 610 to keep test pallet 610.At this, the part contacted with test pallet of dog point 682a-2 is preferably formed by the soft rubber that can relax contact impact.

Elastic component 682b can be torque spring, and elastic force is applied to locking component 682a, and locking component 682a is rotated while maintenance test pallet 610.Certainly, in some embodiments, elastic component can be universal compressed volute spring.In this case, elastic component needs considering to design under turning axle (dotted portion) and the prerequisite of the relative position of volute spring support.

Release 683 is set to according to rotation status, the external force being used for the elastic force overcoming elastic component 682b is applied to the external force end 682a-1 of locking component 682a.

Manipulater 684 is set to make detent 683 be positioned on closed path C or depart from closed path C, and comprises rotating member 684a and drive source 684b.

It is the clavate shape of length direction that rotating member 684a has perpendicular to accompanying drawing direction, and the line perpendicular to accompanying drawing can be rotated as rotation.

Drive source 684b can be motor or cylinder, and is set to make rotating member 684a rotate predetermined angular forward and backward.

Meanwhile, with reference to accompanying drawing, detent 681 and release 683 are attached to the rotating member 684a of manipulater 684.Thus, along with the rotation of rotating member 684a, detent 681 and release 683 be combined with each other along equidirectional and rotate.Therefore, release 683 rotates to depart from while then closed path C overcome the elastic force of elastic component 682a in conjunction with the rotation process of detent 681, make the dog point 682a-2 of locking component 682a discharge test pallet 610 by external force end 682a-1 external force being applied to locking component 682a.That is, detent 681 and lock 682 be combined with each other movement.

Finally, second feed unit 690 such as can have identical structure with the pallet feed unit according to prior art, and is set to be braked test pallet 310 that unit 680 stops at stop position from the desired location needed for stop position is fed to infusion chamber 650.

Next, the operation of the major part of above-mentioned Test handler 600 is described with reference to Fig. 8.

With reference to Fig. 8 A to Fig. 8 C, the test pallet 610 being arranged in test cabinet 640 is fed predetermined section (description see prior art) according to the operation of the first feed unit 670 towards removing infusion chamber 650.Then, with reference to Fig. 8 B, first the right part of the framework of test pallet 610 contacts the dog point 682a-2 of locking component 682a, locking component 682a overcomes the elastic force of elastic component 682b and is rotated counterclockwise to a certain degree simultaneously, and with reference to Fig. 8 C, the right-hand member of the framework of test pallet 610 contacts detent 681 and the dog point 682a-2 of locking component 682a is released from the contact of the right part with test pallet 610, thus locking component 682a is turned clockwise by the elastic force of elastic component 682a, the dog point 682a-2 of locking component 682a makes the framework right part of test pallet 620 stop thus.Therefore, no matter the reacting force of detent 681 how, test pallet 610 stops at stop position, thus prevents the test pallet 610 be subsequently currently located in test cabinet 640 to be pushed to infusion chamber 630.

Then, in order to continue to be fed to test pallet 610, with reference to Fig. 8 D, manipulater 684 is operated to rotating member 684a and is rotated counterclockwise.Thus, along with detent 681 edge together with release 683 is rotated counterclockwise, detent 681 departs from closed path C, and release 683 promotes the external force end 682a-1 of locking component 682a, along being rotated counterclockwise while making locking component 682a overcome elastic component 682b elastic force, the dog point 682a-2 of release locking component 682a keeps the state of test pallet 610.

When detent 681 departs from closed path C as in fig. 8d, detent 681, lock 682 and release 683 are positioned at the rear side (defining according to from the point at test pallet place to the direction of tester) of test pallet 610.

And by operating the second feed unit 690, test pallet 610 is fed to desired location.

The description > of < second embodiment

Fig. 9 is the schematic diagram of the side dock Test handler 900 according to another embodiment of the present invention.

Test handler 900 according to the present embodiment comprises test pallet 910, load units 920, infusion chamber 930, test cabinet 940, removes infusion chamber 950, unloading unit 960, first feed unit 970 and the second feed unit 980.

In composed component, test pallet 910, load units 920, infusion chamber 930, test cabinet 940, go infusion chamber 950, unloading unit 960 and the first feed unit 970 to be described in background technology part, their description will be omitted.

The second feed unit 980 as shown in Figure 10 comprises lock 981, first and is fed to parts 982 and the second feeding parts 983.

Lock 981 is set to keep test pallet 910, and comprises braking parts 981a and sticking department 981b.

Braking parts 981a is set to test pallet 910 to stop at required stop position.

Sticking department 981b is set to keep to tend to because of the reacting force of braking parts 981a when test pallet 910 collides with braking parts 981a the test pallet 910 that edge returns in the opposite direction with feedback side, and comprises locking component 981b-1 and elastic component 981b-2.

Line perpendicular to accompanying drawing can rotate as rotation by locking component 981b-1, and according to the rotation status of locking component 981-b, test pallet 910 is stopped or discharging the state that is kept to make pallet 910 stop or discharging test pallet 910 of test pallet 910 stopped.

Elastic force can be applied to locking component 981b-1 by elastic component 981b-2, and locking component 981b-1 is rotated while maintenance test pallet 910.

Preferably, first feeding parts 982 can be cylindrical, and on closed path C, lock 981 is moved to desired location along the feed direction of test pallet 910, the side (being the end of piston rod in cylindrical situation) of the first feeding parts 982 is attached to lock 981.

Preferably, second feeding parts 983 can be cylindrical, and along with the first feeding parts 982 move forward and backward along the direction vertical with test pallet 910 feed direction, the lock 981 being attached to the first feeding parts 982 keeps test pallet 910 or release to keep the state of test pallet 910.Certainly, in some embodiments, the second feeding parts can be configured to lock is moved forward and backward together with test pallet.

Next, the operation of the major part of above-mentioned Test handler 900 is described with reference to Figure 11.

With reference to Figure 11 A to Figure 11 C, according to the operation of the first feed unit, the test pallet 910 being arranged in test cabinet 940 is fed predetermined section from test cabinet 940 to removing infusion chamber 950.Then, with reference to Figure 11 B, first the right part of the framework of test pallet 910 contacts locking component 981b-1, locking component 981b-1 overcomes the elastic force of elastic component 981b-2 and turns clockwise to a certain degree simultaneously, and with reference to Figure 11 C, the right-hand member contact braking parts 981a of the framework of test pallet 910, meanwhile locking component 981b-1 is released from the contact of the right part of the framework with test pallet 910, locking component 981b-a is rotated counterclockwise by the elastic force of elastic component 981b-2, locking component 981b-1 makes the right part of the framework of test pallet 910 stop thus.

Subsequently, in order to continue to be fed to test pallet 910, with reference to Figure 11 D, while locking component 981b-1 keeps test pallet 910, first feeding parts 982 are operated that test pallet 910 is fed to desired location, and with reference to Figure 11 E, second feeding parts 983 are operated to move the first feeding parts 982 along the direction vertical with test pallet 910 feed direction and are attached to the lock 981 of the first feeding parts 982, the state discharging lock 981 to allow lock 981 and keep test pallet 910.As a reference, if the second feeding parts 983 move forward the first feeding parts 982 and lock 981, state gets back to the state that lock 981 can keep test pallet 910.

According to the present invention, because the test pallet moving to infusion chamber from test cabinet is accurately parked in stop position, then move to required desired location by brake unit or the second feed unit, the caused effect guaranteeing the accuracy of feeder operation can be obtained and can prevent when reacting force is not applied to the damage to test pallet adjoint during test pallet subsequently.

As mentioned above, although describe the present invention in detail with reference to embodiment and accompanying drawing, above-mentioned embodiment only exemplarily describes the preferred embodiments of the present invention.Therefore, the invention is not restricted to these embodiments, scope of the present invention should be explained by claim and equivalency range thereof.

Claims

1. Test handler, comprising:

Test pallet, described test pallet is mounted with semiconductor device, and described test pallet circulates along closed path;

Load units, moves to the described test pallet being positioned at " loaded " position by the non-measuring semiconductor device on object pallet;

Infusion chamber, before test, preheats according to test environment conditions or is pre-cooledly loaded in from the described semiconductor device the described test pallet that described " loaded " position is fed to;

Test cabinet, support to be loaded into described semiconductor device in described infusion chamber preheated or pre-cooled after be fed to the test of the described semiconductor device on the described test pallet of test position;

Remove infusion chamber, the described semiconductor device be loaded in from the described test pallet that described test cabinet is fed to is returned to room temperature;

Unloading unit, moves to empty object pallet by being loaded in from the described infusion chamber described semiconductor device be fed to the described test pallet of unloading position that goes;

First feed unit, is fed to described test cabinet by the described test pallet in described infusion chamber;

Brake unit, after the test of the semiconductor device loaded completes, according to the operation of described first feed unit, makes to stop at required stop position from described test cabinet to the described described test pallet going infusion chamber to be fed to; And

Second feed unit, by the described test pallet stopped by described brake unit from desired location needed for going infusion chamber described in described stop position is fed to,

Wherein, described brake unit comprises:

Detent, makes described test pallet stop at required stop position;

Lock, the described test pallet that edge returns in the opposite direction with described feeder is tended in maintenance by the reacting force of described detent when colliding with described detent;

Release, makes described lock discharge described test pallet and makes described test pallet be fed to desired location by described second feed unit from described stop position;

And

Manipulater, operates described detent, makes described detent be arranged in described closed path or depart from described closed path.

2. Test handler as claimed in claim 1, wherein when described manipulater is operated, described release departs from the operation of described closed path in conjunction with described detent, makes described lock discharge described test pallet.

3. Test handler as claimed in claim 1, the drive source that wherein said manipulater comprises revolvable rotating member and described rotating member is rotated, described detent is fixed to described rotating member to rotate together with described rotating member, and be therefore positioned in described closed path or depart from described closed path, described release is fixed to described rotating member, thus rotate together with described rotating member at described release, when described detent departs from described closed path, described lock is made to discharge described test pallet.

4. Test handler as claimed in claim 1, wherein said lock comprises revolvable locking component and elastic component, described locking component keeps described test pallet according to rotation status or discharges described test pallet, described elastic component applies elastic force and described locking component is rotated to the state keeping described test pallet, and described release rotates with the direction making described locking component and discharge described test pallet.