CN103162679B - System and method for eliminating micromechanical gyroscope in-phase error based on multiplication - Google Patents
System and method for eliminating micromechanical gyroscope in-phase error based on multiplication Download PDFInfo
- Publication number
- CN103162679B CN103162679B CN201310070816.7A CN201310070816A CN103162679B CN 103162679 B CN103162679 B CN 103162679B CN 201310070816 A CN201310070816 A CN 201310070816A CN 103162679 B CN103162679 B CN 103162679B
- Authority
- CN
- China
- Prior art keywords
- phase
- signal
- circuit
- sensitive demodulation
- demodulation module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims description 23
- 238000001514 detection method Methods 0.000 claims abstract description 52
- 238000000605 extraction Methods 0.000 claims abstract description 21
- 238000001914 filtration Methods 0.000 claims description 11
- 239000003990 capacitor Substances 0.000 claims description 4
- 230000001133 acceleration Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000006870 function Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
Landscapes
- Gyroscopes (AREA)
Abstract
The invention discloses a system for eliminating micromechanical gyroscope in-phase error based on multiplication, an input end of a phase shifter is connected to a driving signal, an output end is connected to a 90 DEG phase shifter and a first phase-sensitive demodulation module, and is connected to a multiplication circuit through a controlled switch; the input end of the first phase-sensitive demodulation module is connected to a micromechanical gyroscope angular velocity extraction signal, one path of the output end is connected to an amplitude detection circuit through the controlled switch, the output end of the amplitude detection circuit is connected to the multiplication circuit, other path is connected to the multiplication circuit through the controlled switch; the multiplication circuit is connected to a data memory through the controlled switch, the output end of the data memory is connected to a difference circuit, the difference circuit is connected to the micromechanical gyroscope angular velocity extraction signal; the output end of the 90 DEG phase shifter is connected to a second phase-sensitive demodulation module, the output end of the second phase-sensitive demodulation module is connected to the micromechanical gyroscope angular velocity extraction signal, the output end is connected to a peak detection circuit, the output end of the peak detection circuit is connected to the phase shifter. According to the invention, the in-phase error can be effectively eliminated, and the measure precision of the micromechanical gyroscope can be enhanced.
Description
Technical Field
The invention relates to a system and a method for eliminating in-phase errors of a micromechanical gyroscope based on multiplication, in particular to a system and a method for eliminating in-phase errors of a capacitive micromechanical gyroscope based on multiplication.
Background
The gyroscope is a sensor capable of detecting the self attitude and state change of a moving object even if no external reference signal exists, and has the function of sensing the angular speed of the moving object. The third-generation micro-mechanical gyroscope based on the MEMS technology has the advantages of small volume, light weight, large bandwidth, low power consumption, high impact strength and the like, and is widely applied to the military and civil fields.
In the prior art, a sensitive structure of a capacitive micro-mechanical gyroscope is manufactured by bulk silicon or surface silicon process, and due to the fact that the size is extremely small and is usually micron-sized, the processing precision is difficult to control under the existing process conditions. Therefore, the sensitive structure has a process error in the manufacturing process. The error directly affects key technical indexes such as stability of zero output of the silicon micromechanical gyroscope, nonlinearity of scale factors, working bandwidth and the like. Meanwhile, the application of the micro-mechanical gyroscope in the fields of space navigation, accurate guidance, precise instruments, deep sea detection and the like which need to accurately measure angular velocity signals is restricted.
Various process errors of the sensitive structure can be converted into two error signals of a quadrature error and an in-phase error in the processing process of extracting the angular velocity signal by the micro-mechanical gyroscope. The quadrature error and the in-phase error are two main interference signals in the angular velocity signal extraction process, and are main factors for restricting the overall performance of the micro-mechanical gyroscope.
The in-phase error is derived from incomplete perpendicularity of a driving shaft and a detection shaft of a micromechanical gyroscope sensor structure, when a driving voltage is loaded, a component force exists in the detection direction of the driving force, the component force is consistent with the Coriolis force (Coriolis force) to be detected in the direction and the phase, and therefore the angular velocity signal and the in-phase error signal are difficult to distinguish in the signal processing process. Since the in-phase error is the same as the Coriolis acceleration signal in frequency and phase, it is difficult to separate and suppress the error signal, and in the prior art, there are very few signal processing schemes for suppressing the in-phase error, and there is no general signal processing scheme that can effectively eliminate or suppress the in-phase error.
As shown in fig. 1, a conventional micromechanical gyroscope angular velocity signal extraction signal processing circuit system. According to the working principle of the micro-mechanical gyroscope, the variation of the detection capacitor of the sensitive structure must be measured to obtain the value of the input angular velocity signal. However, the capacitance variation is very weak, and is usually submerged in low-frequency 1/f noise, in order to suppress 1/f noise, as shown in fig. 1, an angular velocity extraction circuit generally adopts a high-frequency carrier modulation method, and uses an integrator to form a charge amplifier, so as to convert the variation value of the detected capacitance into a voltage signal, and then, after two phase-sensitive demodulation processes, the voltage signal proportional to the variation value of the detected capacitance is obtained by first demodulation; the second demodulation results in a voltage signal proportional to the input angular velocity signal. The extracted final output signal includes an angular velocity signal, a quadrature error signal, and an in-phase error signal.
The output signal when quadrature and in-phase errors are considered when no phase error is present is analyzed as follows:
as can be seen from FIG. 1, after the first phase-sensitive demodulation, the resulting signal is obtained inV(t)Is a voltage signal proportional to the variation of the detection capacitor, when there is a quadrature error and an in-phase error, inV(t)is the sum of the angular velocity signal, the quadrature error signal and the in-phase error signal, and can be expressed as follows:
wherein, corVrepresenting the amplitude of the Coriolis acceleration signal; in-pVrepresenting the amplitude of the in-phase error signal; qucVrepresenting the amplitude of the quadrature error signal; w represents an input angular velocity signal; ω represents the angular frequency of the micromechanical gyroscope drive signal;Φrepresenting the phase of the drive signal. From the equation (1), it can be seen that the in-phase error signal and the Coriolis acceleration signal have the same frequency and phase, while the quadrature error signal and the Coriolis acceleration signal have the same frequency and the phase difference is 90 degrees. If no phase error signal exists, the reference signal of the second phase-sensitive demodulation refV(t)Is the drive signal, it inV(t)And performing multiplication operation as follows:
eliminating high frequency term with frequency of 2 omega by low pass filtering to obtain output signal out1V(t)Comprises the following steps:
it can be seen that the reference signal of the second phase-sensitive demodulation is the driving signal ref dV(t)=Vcos（ωt+Φ) And in time, the final output signal contains an angular velocity signal and an in-phase error signal, and the quadrature error is completely eliminated.
Reference signal if second phase sensitive demodulation refV(t)Orthogonal to the drive signal, i.e. expressed asTo put it in inV(t)And performing multiplication operation as follows:
eliminating high frequency term with frequency of 2 omega by low pass filtering to obtain output signal out2V(t)Comprises the following steps:
it can be seen that the reference signal is demodulated if the second phase-sensitive demodulation is performed refV(t)In quadrature with the drive signal, the final output signal is a clean quadrature error signal.
The output signal when the quadrature error and the in-phase error are considered in the presence of a phase error is analyzed as follows:
since the ac signal inevitably causes phase shift during transmission processing, phase error is difficult to avoid in practice, and consideration should be given to the case where phase error exists, when phase error is taken into consideration inV(t)It is expressed by the following equation:
in the formula (6) < delta >ΦI.e. phase error introduced by the signal processing, when the drive signal is used as the reference signal for the second phase-sensitive demodulation refV(t) d=Vcos（ωt+Φ) The final output signal after low-pass filtering is:
as can be seen from comparison of equations (7) and (3), when a phase error exists, if the reference signal of the second phase-sensitive demodulation is a drive signal, the final output signal includes an angular velocity signal and an in-phase error signal, and also includes a quadrature error signal, and the phase error ΔΦThe smaller, the smaller sin ΔΦThe closer to zero, the smaller the quadrature error signal.
Reference signal if second phase sensitive demodulation refV(t)Orthogonal to the drive signal, i.e. expressed asThe final output signal after low-pass filtering is:
comparing the equations (8) and (5) shows that if there is a phase error, the reference signal is demodulated for the second time refV(t)When the driving signal is orthogonal, the final output signal contains an orthogonal error signal, an angular velocity signal, an in-phase error signal and a phase error deltaΦThe smaller, the smaller sin ΔΦThe closer to zero, the smaller the angular velocity and in-phase error signals.
The amplitude of the quadrature error signal is usually much larger than the amplitude of the in-phase error and the angular velocity signal, and when the three signals are superimposed, the quadrature error is dominant. Therefore, in equation (8), the first term on the right side of the equation plays a major role when ΔΦWhen the value is equal to zero, the first term on the right side of the equation is taken to be the maximum value which can be reached by the first term, and the second term on the right side of the equation (8) is zero at this time, that is, the angular velocity signal and the in-phase error signal are zero, and the right side of the equation (8) only contains a pure quadrature error signal. Further, when ΔΦWhen the value is equal to zero, the right side of the equation (7) only contains the angular velocity signal and the in-phase error signal, and the quadrature error signal is completely eliminated, so that only the in-phase error signal and the useful angular velocity signal are left.
The traditional micromechanical gyroscope angular velocity signal extraction signal processing circuit system cannot eliminate in-phase errors.
Disclosure of Invention
The invention aims to provide a system and a method for eliminating in-phase errors of a micromechanical gyroscope based on multiplication, which can effectively eliminate the in-phase errors, thereby improving the measurement accuracy of the micromechanical gyroscope.
In order to achieve the above purpose, the solution of the invention is:
a system for eliminating micromechanical gyroscope in-phase error based on multiplication comprises a peak detection circuit, an amplitude detection circuit, a first phase-sensitive demodulation module, a second phase-sensitive demodulation module, a phase shifter and a phase shifter 90oPhase shifter, data memory, four controlled switches, multiplication circuit and differential circuitA way; the phase shifter has an input terminal connected with the driving signal and an output terminal connected with 90oThe output end of the phase shifter and the first phase sensitive demodulation module is also connected with the multiplication circuit through a control switch; the input end of the first phase-sensitive demodulation module is connected with a micromechanical gyroscope angular velocity extraction signal, one path of the output end of the first phase-sensitive demodulation module is connected with an amplitude detection circuit through a control switch, the output end of the amplitude detection circuit is connected with a multiplication circuit, and the other path of the output end of the first phase-sensitive demodulation module is connected with the multiplication circuit through a controlled switch; the multiplication circuit is connected with a data memory through a controlled switch, the output end of the data memory is connected with a difference circuit, and the difference circuit is also connected with a micromechanical gyroscope angular velocity extraction signal;
90othe output end of the phase shifter is connected with the second phase-sensitive demodulation module, the input end of the second phase-sensitive demodulation module is connected with the micromechanical gyroscope angular velocity extraction signal, the output end of the second phase-sensitive demodulation module is connected with the peak value detection circuit, and the output end of the peak value detection circuit is connected with the phase shifter.
Furthermore, the first phase-sensitive demodulation module consists of a low-pass filter and a phase-sensitive demodulation circuit, wherein the input end of the phase-sensitive demodulation circuit is simultaneously connected with the phase shifter and the micromechanical gyroscope angular velocity extraction signal, the output end of the phase-sensitive demodulation circuit is connected with the low-pass filter, one path of the low-pass filter is connected with the amplitude detection circuit through the control switch, and the other path of the low-pass filter is connected with the multiplication circuit through the control switch.
Furthermore, the second phase-sensitive demodulation module consists of a low-pass filter and a phase-sensitive demodulation circuit, and the input end of the phase-sensitive demodulation circuit is simultaneously connected with 90oThe phase shifter and the micromechanical gyroscope angular velocity extract signals, and the output end of the phase shifter and the micromechanical gyroscope angular velocity extract signals is connected with a low-pass filter; the low-pass filter is connected with the peak value detection circuit.
The high-frequency carrier, the charge amplifier, the filter amplifier, the third phase-sensitive demodulation module, the fourth phase-sensitive demodulation module and the signal amplifier are further included; the input end of the high-frequency carrier is connected with the capacitor of the micro-mechanical gyroscope, and the output end of the high-frequency carrier is connected with the charge amplifier and the third phase-sensitive demodulation module; the charge amplifier is connected with the filter amplifier, the filter amplifier is connected with the input end of the third phase-sensitive demodulation module, the output end of the third phase-sensitive demodulation module is connected with the signal amplifier, and the signal amplifier is respectively connected with the first phase-sensitive demodulation module and the second phase-sensitive demodulation module; the signal passing through the difference circuit is input into a fourth phase-sensitive demodulation module.
Furthermore, the third phase-sensitive demodulation module consists of a low-pass filter and a phase-sensitive demodulation circuit, wherein the input end of the phase-sensitive demodulation circuit is connected with the filter amplifier and the high-frequency carrier at the same time, and the output end of the phase-sensitive demodulation circuit is connected with the low-pass filter; the low-pass filter is connected with the signal amplifier.
Furthermore, the fourth phase-sensitive demodulation module consists of a low-pass filter and a phase-sensitive demodulation circuit, wherein the input end of the phase-sensitive demodulation circuit is simultaneously connected with the driving signal and the signal input by the difference circuit, the output end of the phase-sensitive demodulation circuit is connected with the low-pass filter, and the low-pass filter is connected with the signal amplifier.
A method for eliminating micromechanical gyroscope in-phase errors based on multiplication comprises the following steps:
extracting input signals, wherein the input signals comprise an angular velocity signal, a quadrature error signal and an in-phase error signal;
inputting an input signal into a first phase-sensitive demodulation module and a second phase-sensitive demodulation module; meanwhile, one path of the driving signal is input into the first phase-sensitive demodulation module through the phase shifter and is multiplied with the input signal; the other path of the driving signal is sequentially phase-shifted and 90oThe phase shifter is input into a second phase-sensitive demodulation module, and a signal which is subjected to multiplication and low-pass filtering with an input signal is input into a peak value detection circuit; when the peak value detection circuit detects that the phase error of the input signal is zero, the phase shifter is fed back and controlled to enable the phase of the driving signal to be equal to that of the angular velocity signal, the driving signal is input into the first phase-sensitive demodulation module through the phase shifter, and the signal obtained after multiplication and low-pass filtering with the input signal is the angular velocity signal and the in-phase error signal;
step three, when the signal after passing through the first phase-sensitive demodulation module has an angular velocity signal, all four controlled switches are switched off; when the signal after passing through the first phase-sensitive demodulation module has no angular velocity signal, the four controlled switches are all closed, one path of the in-phase error signal is directly input into the multiplication circuit through the control switch, the other path of the in-phase error signal controls the feedback coefficient through the amplitude detection circuit, the feedback coefficient signal is input into the multiplication circuit, and meanwhile, the driving signal is input into the multiplication circuit through the controlled switches; the signals obtained by multiplying the in-phase error signal, the feedback coefficient signal and the driving signal are stored in a data memory and output to a difference circuit, and the difference circuit performs difference operation with the input signal of the difference circuit, and the signals obtained after difference operation are angular speed signals and serve as final output signals.
And further, the method also comprises a signal output step, wherein the signal subjected to the difference by the difference circuit is input into a phase-sensitive demodulation circuit of the fourth phase-sensitive demodulation module, then input into a low-pass filter, subjected to multiplication and low-pass filtering, and output through a signal amplifier.
After the scheme is adopted, the invention discloses a phase shifter 90oThe phase shifter, the second phase sensitive demodulation module and the peak detection circuit are constructed into a feedback control system.
When the peak detection circuit detects that the phase error of the input signal is zero, the phase shifter is fed back and controlled to enable the phase of the driving signal to be equal to that of the angular velocity signal, the driving signal is input into the first phase-sensitive demodulation module through the phase shifter, and the signal obtained after multiplication and low-pass filtering with the input signal is the angular velocity signal and the in-phase error signal.
The signals obtained by multiplying the in-phase error signal, the feedback coefficient signal and the driving signal are stored in a data memory and output to a difference circuit, and the difference circuit performs difference operation with the input signal of the difference circuit, and the signals obtained after difference operation are angular speed signals and serve as final output signals.
Therefore, the invention compensates the influence of the in-phase error signal on the useful Coriolis acceleration signal while finishing the angular velocity signal extraction, thereby improving the key technical indexes such as the stability of the zero point output of the micromechanical gyroscope, the nonlinearity of the scale factor, the working bandwidth and the like, greatly improving the overall performance of the silicon micromechanical gyroscope, achieving the purpose of compensating the process error by utilizing the signal processing process and improving the measurement precision of the micromechanical gyroscope.
Drawings
FIG. 1 is a prior art micromechanical gyroscope angular velocity signal extraction schematic;
FIG. 2 is a schematic structural view of the present invention;
FIG. 3 is a schematic diagram of a system for implementing the present invention.
Description of the reference symbols
Phase shifter 190oPhase shifter 2
First phase sensitive demodulation module 3 phase sensitive demodulation circuit 31
Low pass filter 32 second phase sensitive demodulation module 4
Phase sensitive demodulation circuit 41 low pass filter 42
Controlled switch 5 multiplier circuit 6
Amplitude detection circuit 7 data memory 8
The difference circuit 9 is a peak value detection circuit 10.
High frequency carrier 20 charge amplifier 30
Filter amplifier 40 third phase sensitive demodulation module 50
Phase sensitive demodulation circuit 501 low pass filter 502
Signal amplifier 60 fourth phase sensitive demodulation module 70
Phase sensitive demodulation circuit 701 low pass filter 702
A signal amplifier 80.
Detailed Description
The invention is described in detail below with reference to the figures and the specific embodiments.
As shown in FIG. 2 and FIG. 3, the system for eliminating in-phase error of micromechanical gyroscope based on multiplication disclosed in the present invention comprises phase shifters 1 and 90oThe phase shifter comprises a phase shifter 2, a first phase sensitive demodulation module 3, a second phase sensitive demodulation module 4, four controlled switches 5, a multiplication circuit 6, an amplitude detection circuit 7, a data memory 8, a difference circuit 9 and a peak value detection circuit 10.
The input end of the phase shifter 1 is connected with a driving signal ref dV(t)=Vcos（ωt+Φ) The output end is connected with 90oThe phase shifter 2 and the first phase sensitive demodulation module 3, the output end is also connected with the multiplication circuit 6 through the control switch 5.
The input end of the first phase-sensitive demodulation module 3 is connected with an angular velocity extraction signal of the micro-mechanical gyroscope, and the input signal comprises an angular velocity signal, a quadrature error signal and an in-phase error signal. One output end is connected with an amplitude detection circuit 7 through a controlled switch 5, the output end of the amplitude detection circuit 7 is connected with a multiplication circuit 6, and the other output end is connected with the multiplication circuit 6 through the controlled switch 5; the multiplication circuit 6 is connected with a data memory 8 through a control switch 5, the output end of the data memory 8 is connected with a difference circuit 9, the difference circuit 9 is also connected with a micromechanical gyroscope angular velocity extraction signal, and the input signal comprises an angular velocity signal, a quadrature error signal and an in-phase error signal.
The first phase-sensitive demodulation module 3 is composed of a phase-sensitive demodulation circuit 31 and a low-pass filter 32, the input end of the phase-sensitive demodulation circuit 31 is connected with the phase shifter 1 and the micromechanical gyroscope angular velocity extraction signal at the same time, the output end is connected with the low-pass filter 32, one path of the low-pass filter 32 is connected with the amplitude detection circuit 7 through a controlled switch 5, and the other path is connected with the multiplication circuit 6 through the controlled switch 5.
90oThe output end of the phase shifter 2 is connected with a second phase-sensitive demodulation module 4, the input end of the second phase-sensitive demodulation module 4 is connected with a micromechanical gyroscope angular velocity extraction signal, and the signal comprises an angular velocity signal, a quadrature error signal and an in-phase error signal. Output terminal is connectedThe output end of the peak value detection circuit 10 is connected with the phase shifter 1.
The second phase-sensitive demodulation module 4 is composed of a phase-sensitive demodulation circuit 41 and a low-pass filter 42, wherein the input end of the phase-sensitive demodulation circuit 41 is simultaneously connected to 90oThe phase shifter 2 and the micromechanical gyroscope angular velocity extract signals, and the output end is connected with the low-pass filter 42; the low pass filter 42 is connected to the peak detection circuit 10.
The present invention further includes a high frequency carrier 20, a charge amplifier 30, a filter amplifier 40, a third phase sensitive demodulation module 50, a fourth phase sensitive demodulation module 70, and a signal amplifier 60. The input end of the high-frequency carrier 20 is connected with the capacitance of the micro-mechanical gyroscope, and the output end is connected with the charge amplifier 30 and the third phase-sensitive demodulation module 50.
The charge amplifier 30 is connected with the filter amplifier 40, the filter amplifier 40 is connected with the input end of the third phase-sensitive demodulation module 50, the output end of the third phase-sensitive demodulation module 50 is connected with the signal amplifier 60, and the signal amplifier 60 is respectively connected with the first phase-sensitive demodulation module 3 and the second phase-sensitive demodulation module 4; the signal passed through the difference circuit 9 is input to the fourth phase sensitive demodulation block 70.
The third phase-sensitive demodulation module 50 consists of a phase-sensitive demodulation circuit 501 and a low-pass filter 502, wherein the input end of the phase-sensitive demodulation circuit 501 is connected with the filter amplifier 40 and the high-frequency carrier 20 at the same time, and the output end of the phase-sensitive demodulation circuit 501 is connected with the low-pass filter 502; the low pass filter 502 is connected to the signal amplifier 60.
The fourth phase-sensitive demodulation module 70 is composed of a phase-sensitive demodulation circuit 701 and a low-pass filter 702, wherein the input end of the phase-sensitive demodulation circuit 701 is connected to the driving signal and the signal input through the difference circuit 9, the output end is connected to the low-pass filter 702, the low-pass filter 702 is connected to the signal amplifier 80, and the signal is finally output.
Phase shifter 1, 90 of the present inventionoThe phase shifter 2, the second phase sensitive demodulation module 4 and the peak detection circuit 10 are constructed as a feedback control system. The peak detection circuit 10 is used to detect the output signal amplitude value of the above-mentioned type (8) in the background art, the output signal amplitude value is fed back to control the phase shifter 1, the phase shifter 1 generates the second signalSecondary demodulation reference signal Vref3(t) phase values. When the peak detection circuit 10 reaches the maximum value, the reference signal Vref3The phase of (t) is equal to the phase of the input angular velocity signal, i.e. Δ, by the phase shifter 1ΦEqual to zero. In FIG. 2, Δ when the feedback system is stableΦIs equal to zero, outputs Vout7(t), i.e., equation (8) is a clean quadrature error signal; output signal Vout8In (t), i.e., equation (7), the quadrature error is completely eliminated, leaving only the in-phase error signal and the useful angular velocity signal.
When the phase error is zero, the quadrature error is completely eliminated after the second phase-sensitive demodulation is carried out by the driving signal, the output signal only has a useful angular velocity signal and an in-phase error signal, at the moment, if no angular velocity signal is input, the output signal only has an in-phase error signal, and the in-phase error signal appears in a direct current mode. The in-phase error signal at the input is in the form of a cosine function, so that the in-phase error signal is multiplied by the reference signal of the second phase-sensitive demodulation and then multiplied by a feedback coefficient, and the multiplied signals are subtracted from the input signal to eliminate the in-phase error signal at the input node. In addition, an amplitude detection circuit, Vout8The in-phase error signal at (t) is used as the input signal of the amplitude detection circuit, the feedback coefficient is controlled by the amplitude detection circuit, when the input of the amplitude detection module is zero, the feedback coefficient is stable, and after the feedback coefficient is stable, V is generatedout8(t) is zero-i.e. the in-phase error signal at the input node is cancelled-and there will be no in-phase error signal in the output signal.
The invention also discloses a method for eliminating the in-phase error of the micromechanical gyroscope based on multiplication, which comprises the following steps:
firstly, an input signal is extracted, as shown in fig. 3, a charge amplifier is formed by an integrator by using a high-frequency carrier modulation method, a change value of a capacitance of a micro-mechanical gyroscope is converted into a voltage signal, and then the voltage signal which is in direct proportion to the change value of the capacitance is obtained after phase-sensitive demodulation by a third phase-sensitive demodulation module 50, wherein the input signal comprises an angular velocity signal, a quadrature error signal and an in-phase error signal.
Inputting an input signal into the phase sensitive demodulation circuit 31 of the first phase sensitive demodulation module 3 and the phase sensitive demodulation circuit 41 of the second phase sensitive demodulation module 4; meanwhile, one path of the driving signal is input into the phase sensitive demodulation circuit 31 of the first phase sensitive demodulation module 3 through the phase shifter 1, and is multiplied with the input signal; the other path of the driving signal passes through the phase shifters 1 and 90 in sequenceoThe phase shifter 2 inputs the phase sensitive demodulation circuit 41 of the second phase sensitive demodulation module 4, after the multiplication operation with the input signal, the signal is input to the low-pass filter 42 of the second phase sensitive demodulation module 4, the filtered signal is input to the peak value detection circuit 10; when the peak detection circuit 10 detects that the phase error of the input signal is zero, the phase shifter 1 is feedback-controlled to make the phase of the driving signal equal to the phase of the angular velocity signal, the driving signal is input to the phase-sensitive demodulation circuit 31 of the first phase-sensitive demodulation module 3 through the phase shifter 1, multiplication is performed on the driving signal and the signal filtered by the low-pass filter 32 of the first phase-sensitive demodulation module 3 is an angular velocity signal and an in-phase error signal.
Step three, when the signal filtered by the low-pass filter 32 of the first phase-sensitive demodulation module has an angular velocity signal, all four controlled switches 5 are turned off; when the signal filtered by the low-pass filter 32 of the first phase-sensitive demodulation module has no angular velocity signal, the four controlled switches 5 are all closed, one path of the in-phase error signal is directly input into the multiplication circuit 6 through the controlled switch 5, one path of the in-phase error signal controls a feedback coefficient through the amplitude detection circuit 7, the feedback coefficient signal is input into the multiplication circuit 6, and meanwhile, a driving signal is input into the multiplication circuit 6 through the controlled switch 5; the signal obtained by multiplying the in-phase error signal, the feedback coefficient signal, and the drive signal is stored in the data memory 8, and is output to the difference circuit 9, and is subjected to difference operation with the input signal of the difference circuit 9, and the signal obtained by difference operation is an angular velocity signal and is used as a final output signal.
The method further comprises a signal output step, wherein the signal subjected to the difference by the difference circuit 9 is input into a phase sensitive demodulation circuit 701 of the fourth phase sensitive demodulation module 70, then input into a low-pass filter 702, subjected to multiplication and low-pass filtering, and output through a signal amplifier 80.
The above description is only an embodiment of the present invention, and is not intended to limit the design of the present invention, and all equivalent changes made based on the design key of the present invention fall within the protection scope of the present invention.
Claims (8)
1. A system for eliminating micromechanical gyroscope in-phase error based on multiplication is characterized in that: comprises a peak value detection circuit, an amplitude detection circuit, a first phase-sensitive demodulation module, a second phase-sensitive demodulation module, a phase shifter and a phase detector 90oThe phase shifter comprises a phase shifter, a data memory, four controlled switches, a multiplication circuit and a difference circuit; the phase shifter has an input terminal connected with the driving signal and an output terminal connected with 90oThe output end of the phase shifter and the first phase sensitive demodulation module is also connected with the multiplication circuit through a control switch; the input end of the first phase-sensitive demodulation module is connected with the angular velocity extraction signal of the micromechanical gyroscope, and the output end is oneThe shunt controlled switch is connected with the amplitude detection circuit, the output end of the amplitude detection circuit is connected with the multiplication circuit, and the other shunt is connected with the multiplication circuit through the controlled switch; the multiplication circuit is connected with a data memory through a controlled switch, the output end of the data memory is connected with a difference circuit, and the difference circuit is also connected with a micromechanical gyroscope angular velocity extraction signal;
90othe output end of the phase shifter is connected with the second phase-sensitive demodulation module, the input end of the second phase-sensitive demodulation module is connected with the micromechanical gyroscope angular velocity extraction signal, the output end of the second phase-sensitive demodulation module is connected with the peak value detection circuit, and the output end of the peak value detection circuit is connected with the phase shifter.
2. The system for eliminating micromechanical gyroscope in-phase errors based on multiplication according to claim 1, characterized in that: the first phase-sensitive demodulation module consists of a low-pass filter and a phase-sensitive demodulation circuit, wherein the input end of the phase-sensitive demodulation circuit is simultaneously connected with the phase shifter and the micromechanical gyroscope angular velocity extraction signal, the output end of the phase-sensitive demodulation circuit is connected with the low-pass filter, one path of the low-pass filter is connected with the amplitude detection circuit through the controlled switch, and the other path of the low-pass filter is connected with the multiplication circuit through the controlled switch.
3. The system for eliminating micromechanical gyroscope in-phase errors based on multiplication according to claim 1, characterized in that: the second phase-sensitive demodulation module consists of a low-pass filter and a phase-sensitive demodulation circuit, and the input end of the phase-sensitive demodulation circuit is simultaneously connected with 90 DEG CoThe phase shifter and the micromechanical gyroscope angular velocity extract signals, and the output end of the phase shifter and the micromechanical gyroscope angular velocity extract signals is connected with a low-pass filter; the low-pass filter is connected with the peak value detection circuit.
4. The system for eliminating micromechanical gyroscope in-phase errors based on multiplication according to claim 1, characterized in that: the high-frequency carrier, the charge amplifier, the filter amplifier, the third phase-sensitive demodulation module, the fourth phase-sensitive demodulation module and the signal amplifier are also included; the input end of the high-frequency carrier is connected with the capacitor of the micro-mechanical gyroscope, and the output end of the high-frequency carrier is connected with the charge amplifier and the third phase-sensitive demodulation module; the charge amplifier is connected with the filter amplifier, the filter amplifier is connected with the input end of the third phase-sensitive demodulation module, the output end of the third phase-sensitive demodulation module is connected with the signal amplifier, and the signal amplifier is respectively connected with the first phase-sensitive demodulation module and the second phase-sensitive demodulation module; the signal passing through the difference circuit is input into a fourth phase-sensitive demodulation module.
5. The system for eliminating micromechanical gyroscope in-phase errors based on multiplication according to claim 4, wherein: the third phase-sensitive demodulation module consists of a low-pass filter and a phase-sensitive demodulation circuit, wherein the input end of the phase-sensitive demodulation circuit is connected with the filter amplifier and the high-frequency carrier at the same time, and the output end of the phase-sensitive demodulation circuit is connected with the low-pass filter; the low-pass filter is connected with the signal amplifier.
6. The system for eliminating micromechanical gyroscope in-phase errors based on multiplication according to claim 4, wherein: the fourth phase sensitive demodulation module consists of a low-pass filter and a phase sensitive demodulation circuit, wherein the input end of the phase sensitive demodulation circuit is simultaneously connected with the driving signal and the signal input by the difference circuit, the output end of the phase sensitive demodulation circuit is connected with the low-pass filter, and the low-pass filter is connected with the signal amplifier.
7. A method for eliminating micromechanical gyroscope in-phase errors based on multiplication is characterized in that: the method comprises the following steps:
extracting input signals, wherein the input signals comprise an angular velocity signal, a quadrature error signal and an in-phase error signal;
inputting an input signal into a first phase-sensitive demodulation module and a second phase-sensitive demodulation module; meanwhile, one path of the driving signal is input into the first phase-sensitive demodulation module through the phase shifter and is multiplied with the input signal; the other path of the driving signal is sequentially phase-shifted and 90oThe phase shifter is input into a second phase-sensitive demodulation module, and a signal which is subjected to multiplication and low-pass filtering with an input signal is input into a peak value detection circuit; when the peak detection circuit detects that the phase error of the input signal is zero, the phase shifter is feedback-controlled to make the phase of the driving signal equal to that of the angular velocity signal, the driving signal is input into the first phase-sensitive demodulation module through the phase shifter, and is multiplied and low-passed with the input signalThe filtered signals are angular velocity signals and in-phase error signals;
step three, when the signal after passing through the first phase-sensitive demodulation module has an angular velocity signal, all four controlled switches are switched off; when the signal after passing through the first phase-sensitive demodulation module has no angular velocity signal, the four controlled switches are all closed, one path of the in-phase error signal is directly input into the multiplication circuit through the control switch, the other path of the in-phase error signal controls the feedback coefficient through the amplitude detection circuit, the feedback coefficient signal is input into the multiplication circuit, and meanwhile, the driving signal is input into the multiplication circuit through the controlled switches; the signals obtained by multiplying the in-phase error signal, the feedback coefficient signal and the driving signal are stored in a data memory and output to a difference circuit, and the difference circuit performs difference operation with the input signal of the difference circuit, and the signals obtained after difference operation are angular speed signals and serve as final output signals.
8. The method for eliminating micromechanical gyroscope inphase errors based on multiplication according to claim 7, characterized in that: and a signal output step, namely inputting the signal subjected to difference by the difference circuit into a phase-sensitive demodulation circuit of the fourth phase-sensitive demodulation module, then inputting the signal into a low-pass filter, and outputting the signal through a signal amplifier after multiplication and low-pass filtering.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310070816.7A CN103162679B (en) | 2013-03-06 | 2013-03-06 | System and method for eliminating micromechanical gyroscope in-phase error based on multiplication |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310070816.7A CN103162679B (en) | 2013-03-06 | 2013-03-06 | System and method for eliminating micromechanical gyroscope in-phase error based on multiplication |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103162679A CN103162679A (en) | 2013-06-19 |
| CN103162679B true CN103162679B (en) | 2015-07-22 |
Family
ID=48585969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310070816.7A Active CN103162679B (en) | 2013-03-06 | 2013-03-06 | System and method for eliminating micromechanical gyroscope in-phase error based on multiplication |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103162679B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103983257B (en) * | 2014-05-06 | 2017-02-22 | 华侨大学 | Signal processing method capable of eliminating quadrature errors of micro-machined gyroscope |
| CN106918351A (en) * | 2017-03-24 | 2017-07-04 | 北方电子研究院安徽有限公司 | A kind of micro mechanical gyroscope automatic fault selftesting method based on quadrature error signal |
| CN114109505B (en) * | 2021-11-19 | 2023-07-04 | 中铁二十二局集团第四工程有限公司 | Tunnel catastrophe prediction system |
| CN114427854B (en) * | 2022-01-10 | 2023-04-07 | 北京自动化控制设备研究所 | Orthogonal coupling error suppression circuit of micro-electromechanical gyroscope |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101158582A (en) * | 2007-10-25 | 2008-04-09 | 北京航空航天大学 | A MEMS gyroscope differential measurement method |
| CN102109345A (en) * | 2010-12-13 | 2011-06-29 | 谢元平 | Digital signal processing method and device for micro-mechanical gyroscope |
| CN203163737U (en) * | 2013-03-06 | 2013-08-28 | 莫冰 | System for eliminating in-phase errors of micromechanical gyroscopes based on multiplication |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8783103B2 (en) * | 2009-08-21 | 2014-07-22 | Analog Devices, Inc. | Offset detection and compensation for micromachined inertial sensors |
-
2013
- 2013-03-06 CN CN201310070816.7A patent/CN103162679B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101158582A (en) * | 2007-10-25 | 2008-04-09 | 北京航空航天大学 | A MEMS gyroscope differential measurement method |
| CN102109345A (en) * | 2010-12-13 | 2011-06-29 | 谢元平 | Digital signal processing method and device for micro-mechanical gyroscope |
| CN203163737U (en) * | 2013-03-06 | 2013-08-28 | 莫冰 | System for eliminating in-phase errors of micromechanical gyroscopes based on multiplication |
Non-Patent Citations (2)
| Title |
|---|
| 微机械陀螺的误差抑制电路;周志广;《传感技术学报》;20100630;第23卷(第6期);第808-811页 * |
| 振动式微陀螺正交误差自补偿方法;刘学等;《传感技术学报》;20120930;第25卷(第9期);第1221-1225页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103162679A (en) | 2013-06-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103148847B (en) | System and method for eliminating in-phase error of micromechanical gyroscope based on differential | |
| CN111578923B (en) | A resonant gyro closed-loop control method and system | |
| CN110160514B (en) | Multi-loop digital closed-loop control device of silicon MEMS gyroscope | |
| CN103162679B (en) | System and method for eliminating micromechanical gyroscope in-phase error based on multiplication | |
| CN102607546B (en) | Orthogonal error processing method for micromechanical gyroscope and device | |
| CN103983260B (en) | A kind of static electricity driving capacitor mechanical gyroscope that declines effectively suppresses the method for quadrature error | |
| CN110426025B (en) | A real-time automatic mode matching method for micromachined gyroscope | |
| CN103983257B (en) | Signal processing method capable of eliminating quadrature errors of micro-machined gyroscope | |
| CN107063307B (en) | Micro-mechanical gyroscope self-calibrating method based on virtual coriolis force | |
| CN102353384A (en) | Measuring method and system for bandwidth and scale factors of micromechanical gyro | |
| CN104267244B (en) | A kind of integration ratio circuit and the impedance measurement method based on integration ratio circuit | |
| CN105954806B (en) | A kind of metal probing method and device modulated based on giant magnetoresistance and quadrature bias | |
| CN107702731B (en) | Method for testing gyroscope with unknown parameters | |
| RU2415442C1 (en) | Compensation accelerometre | |
| CN105841685B (en) | Silicon micromechanical gyroscope rapid hot start implementation method | |
| CN203163737U (en) | System for eliminating in-phase errors of micromechanical gyroscopes based on multiplication | |
| US20160084871A1 (en) | Dual-functional resonant magnetic field sensor | |
| CN210005012U (en) | multi-loop digital closed-loop control device for silicon MEMS gyroscope | |
| CN203163738U (en) | System for eliminating in-phase errors of micromechanical gyroscopes based on difference | |
| RU2363957C1 (en) | Compensation accelerometer | |
| CN104142158B (en) | Analog circuit of direct frequency output resonant type micromechanical gyroscope harmonic oscillator | |
| KR101502689B1 (en) | Apparatus and Method for driving gyro sensor | |
| CN110082564B (en) | Tunnel reluctance type accelerometer closed-loop control circuit based on feedback capacitance torquer | |
| RU2411522C1 (en) | Compensation accelerometre | |
| CN107084745A (en) | Gyroscope self-calibration and gyroscope mass block amplitude measurement device and method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Free format text: FORMER OWNER: DUAN ZHIQIN Effective date: 20150722 Owner name: XIAMEN JANSON ELECTRONICS CO., LTD. Free format text: FORMER OWNER: MO BING Effective date: 20150722 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20150722 Address after: 361000 building, North building, Weiye building, pioneer zone, torch hi tech Zone, Xiamen, Fujian Patentee after: Xiamen Jing Xin Electronics Co., Ltd. Address before: 361000, room 1, 3006 mile 1, waterfront, Jimei District, Fujian, Xiamen Patentee before: Mo Bing Patentee before: Duan Zhiqin |
|
| CP03 | Change of name, title or address |
Address after: 361000 unit 201, No. 1708, Gangzhong Road, Xiamen area, China (Fujian) pilot Free Trade Zone, Xiamen, Fujian Patentee after: Xiamen Jingxin Electronics Co.,Ltd. Address before: 361000 room n231, North building, Weiye building, entrepreneurship Park, torch high tech Zone, Xiamen, Fujian Patentee before: XIAMEN JINGXIN ELECTRONIC Co.,Ltd. |
|
| CP03 | Change of name, title or address |