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CN103148983B - Three-dimensional force loading and calibration device of flexible touch sensor - Google Patents

Three-dimensional force loading and calibration device of flexible touch sensor Download PDF

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CN103148983B
CN103148983B CN201310073483.3A CN201310073483A CN103148983B CN 103148983 B CN103148983 B CN 103148983B CN 201310073483 A CN201310073483 A CN 201310073483A CN 103148983 B CN103148983 B CN 103148983B
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guide rail
force loading
loading device
axis
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CN103148983A (en
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潘宏青
双丰
庄学坤
孙鑫
汪玉冰
王耀雄
高放
王菲露
葛运建
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Hefei Institutes of Physical Science of CAS
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Abstract

本发明属于传感器测试技术,特别涉及柔性触觉传感器的三维力加载及标定装置。该装置包括放置样品的操作台及夹持机构、力加载装置与控制机构、方向与角度调节机构及支撑架。力加载装置及控制机构是力加载杆、拉压传感器、微型气缸、气压调节阀与气源、电控制盒等组成的气动力机构;或是力加载杆、拉压传感器、音圈电机、电流控制器、电控制盒等组成的电磁力机构。支撑架是简支撑或由机械运动付构成的X-Y-Z直线运动三维支撑架。力加载装置直接或通过方向与角度调节机构安装在操作台上方支撑架上。本发明以加载力为控制量,加载力能平滑连续调节,满足了传感器静态和动态标定要求,能在工作平台上半球区域内,实现任意方向和角度的力加载和标定作业。

The invention belongs to the sensor testing technology, in particular to a three-dimensional force loading and calibration device for a flexible tactile sensor. The device includes an operating platform for placing samples and a clamping mechanism, a force loading device and a control mechanism, a direction and angle adjustment mechanism and a support frame. The force loading device and control mechanism is a pneumatic mechanism composed of a force loading rod, a tension and pressure sensor, a miniature cylinder, an air pressure regulating valve, an air source, and an electric control box; or a force loading rod, a tension and pressure sensor, a voice coil motor, a current Electromagnetic force mechanism composed of controller, electric control box, etc. The support frame is a simple support or a XYZ linear motion three-dimensional support frame composed of mechanical motion pairs. The force loading device is installed on the support frame above the operating table directly or through the direction and angle adjustment mechanism. The invention takes the loading force as the control quantity, the loading force can be adjusted smoothly and continuously, meets the static and dynamic calibration requirements of the sensor, and can realize force loading and calibration operations in any direction and angle in the upper hemisphere area of the working platform.

Description

柔性触觉传感器的三维力加载及标定装置Three-dimensional force loading and calibration device for flexible tactile sensor

技术领域 technical field

本发明属于传感器测试技术,特别涉及柔性触觉传感器的三维力加载及标定装置。 The invention belongs to the sensor testing technology, in particular to a three-dimensional force loading and calibration device for a flexible tactile sensor.

背景技术 Background technique

柔性触觉传感器是一类高精度、高分辨率、高响应速度,具有和人类皮肤类似的感知能力,能测量大面积触觉信息的传感器。因此,此类传感器近年成为机器人皮肤研究的热点。 Flexible tactile sensors are a class of high-precision, high-resolution, high-response sensors that have similar perception capabilities to human skin and can measure large-area tactile information. Therefore, this type of sensor has become a hotspot in robotic skin research in recent years.

目前,典型的触觉传感器产品有美国Tekscan公司推出的压力分布测试系统,它使用了一种柔性阵列传感器,该传感器阵列由两片聚酯薄膜组成,两片薄膜的内表面分别印制列导线和行导线,当两片薄膜叠合时,行导线和列导线相互交叉,形成一个由若干个行列交叉点组成的点阵。阵列中的每个交叉点中间放置压敏半导体材料构成压力感应点,当外力作用到这些感应点上时,半导体阻值随外力的变化而成比例变化,进而可以检测大面积的受力情况,该技术已被广泛应用于多个领域的压力分布测试与分析。此外,美国SPI公司、比利时RSscan公司等也在生产和使用柔性压力阵列传感器。国内,西安交通大学研究了基于导电橡胶的触觉传感器,不但可以获得物体表面的形状特征,还可以得到物体滑觉信息以及相对速度。清华大学工程力学系采用导电橡胶为传感器材料,成功研制了具有251点阵的接触力传感型人体足底压力分布测量系统。中科院上海微系统与信息技术研究所则以聚二甲基硅氧烷(PDMS)作为中间层,柔性聚酰亚胺(PI)为衬底开发了一种电容式柔性触觉传感器的制作方法。而中科院合肥智能机械研究所利用导电橡胶研制了可检测三维力的“人工皮肤”,这是一种类似人类皮肤组织,具有整体多层阵列式结构,能感知多维力信息的柔性多维触觉传感器系统。该传感器使用多条分层交叉排列的行/列导线进行扫描,通过检测传感器受力后交叉节点间的电阻值变化,配合高精度算法实现三维力测量。此类柔性触觉传感器采用柔性敏感材料制作而成,可以弯曲成各种非平面形状,适用于非平面触觉信息的测量,可用在如机器人手指、关节,以及人造皮肤等方面,展现了广阔的应用前景。除压阻和电容技术以外,国内外基于聚偏氟乙烯(PVDF)、光波导等新材料、新技术研制的机器人三维力触觉传感器阵列也得到蓬勃发展。 At present, the typical tactile sensor products include the pressure distribution test system launched by Tekscan Company of the United States. It uses a flexible array sensor. The sensor array is composed of two polyester films. Row conductors, when two films are stacked, the row conductors and column conductors cross each other to form a lattice composed of several row and column intersections. A pressure-sensitive semiconductor material is placed in the middle of each intersection point in the array to form a pressure-sensing point. When an external force acts on these sensing points, the resistance of the semiconductor changes proportionally with the change of the external force, and then it can detect a large area of force. This technology has been widely used in pressure distribution testing and analysis in many fields. In addition, the US SPI company, the Belgian RSscan company, etc. are also producing and using flexible pressure array sensors. In China, Xi'an Jiaotong University has studied a tactile sensor based on conductive rubber, which can not only obtain the shape characteristics of the object surface, but also obtain the object's slip information and relative velocity. The Department of Engineering Mechanics of Tsinghua University used conductive rubber as the sensor material and successfully developed a contact force sensing type human foot pressure distribution measurement system with 251 dots. The Shanghai Institute of Microsystem and Information Technology of the Chinese Academy of Sciences developed a method for the fabrication of capacitive flexible tactile sensors using polydimethylsiloxane (PDMS) as the intermediate layer and flexible polyimide (PI) as the substrate. The Hefei Institute of Intelligent Machinery of the Chinese Academy of Sciences has used conductive rubber to develop an "artificial skin" that can detect three-dimensional forces. This is a flexible multi-dimensional tactile sensor system that is similar to human skin tissue, has an overall multi-layer array structure, and can perceive multi-dimensional force information. . The sensor uses multiple layered cross-arranged row/column wires for scanning, and realizes three-dimensional force measurement with high-precision algorithms by detecting the resistance value change between the cross nodes after the sensor is stressed. This kind of flexible tactile sensor is made of flexible sensitive materials, which can be bent into various non-planar shapes, suitable for the measurement of non-planar tactile information, and can be used in aspects such as robotic fingers, joints, and artificial skin, showing a wide range of applications prospect. In addition to piezoresistive and capacitive technologies, robotic three-dimensional force tactile sensor arrays developed based on new materials and technologies such as polyvinylidene fluoride (PVDF) and optical waveguides at home and abroad have also developed vigorously.

但是,由于材料成分、生产工艺、加工技术上的差别,以及使用环境的差异,无论使用什么材料和技术制作的传感器,在实际输入量与输出的测量值之间都会存在误差。而对于需要精密测量的场合,这些误差将严重影响检测结果的准确性,甚至会导致错误的结论,因此只有标定后的传感器才能投入实际应用。另一方面,现有的传感器标定技术多采用线性最小二乘法,但是受到检测原理、材料性能、多维非线性耦合等因素的影响,这种标定方法并不适用于非线性的场合。因而,为提高标定精度,开发非线性标定方法成为近年的发展方向。非线性标定涉及到非线性方程的许多求解算法,例如迭代法、仿生算法等,它们都需要大量的数据作为求解依据,但是目前的标定手段多是手动操作,不可能满足求解非线性方程所需的密集采样要求。另外,现有的标定装置几乎不能对传感器进行不同加力方向和加力角度的精确标定,并且缺乏对动态测量方面的支持,因而难于对传感器的力学特性进行全面有效的评价。有鉴于此,迫切需要一种能为柔性触觉传感器提供不同方向和角度下连续加力,持续采集含时数据的标定平台及方法,以满足传感器静态和动态标定的要求。 However, due to differences in material composition, production process, processing technology, and use environment, no matter what materials and technologies are used to make sensors, there will be errors between the actual input and output measurement values. For occasions that require precise measurement, these errors will seriously affect the accuracy of the detection results, and even lead to wrong conclusions, so only the calibrated sensor can be put into practical application. On the other hand, the existing sensor calibration technology mostly uses the linear least squares method, but due to the influence of detection principles, material properties, multi-dimensional nonlinear coupling and other factors, this calibration method is not suitable for nonlinear occasions. Therefore, in order to improve the calibration accuracy, the development of nonlinear calibration methods has become the development direction in recent years. Nonlinear calibration involves many algorithms for solving nonlinear equations, such as iterative methods, bionic algorithms, etc., which require a large amount of data as the basis for solving, but the current calibration methods are mostly manual operations, which cannot meet the needs of solving nonlinear equations. intensive sampling requirements. In addition, the existing calibration device is hardly able to accurately calibrate the sensor in different force directions and angles, and lacks support for dynamic measurement, so it is difficult to comprehensively and effectively evaluate the mechanical characteristics of the sensor. In view of this, there is an urgent need for a calibration platform and method that can provide flexible tactile sensors with continuous force in different directions and angles, and continuously collect time-dependent data, so as to meet the requirements of static and dynamic calibration of sensors.

经检索,目前有关多维力传感器标定装置的专利文件有DE19616312、CN101109670A、CN101281073A和CN102175388A等。其中CN101281073A和CN102175388A与本申请最为接近。CN101281073A中公布了一种平面阵列力学传感器的标定装置和方法,该专利使用步进电机控制加力探头位置,可在垂直方向施加压力,但不能实现多方向多角度加力。而CN102175388A中公布了一种可对曲面柔性触觉传感器进行标定的装置,该专利使用光栅尺提高定位精度,通过并联机构实现力加载头的姿态控制及力加载,但是该装置同样不能精确控制加力方向及角度。也就是说,这两项专利文件中提供的加力装置,仍然不能满足传感器静态和动态标定的要求,而且由于工作原理上的限制,必须改变位移才能产生加载力,而不是直接输出加载力,这对实际操作十分不便。 After retrieval, the current patent documents related to multi-dimensional force sensor calibration devices include DE19616312, CN101109670A, CN101281073A and CN102175388A. Among them, CN101281073A and CN102175388A are the closest to the present application. CN101281073A discloses a calibration device and method for a planar array mechanical sensor. This patent uses a stepping motor to control the position of the force probe, which can apply pressure in the vertical direction, but cannot achieve multi-directional and multi-angle force. However, CN102175388A discloses a device capable of calibrating curved surface flexible tactile sensors. This patent uses a grating ruler to improve positioning accuracy, and realizes attitude control and force loading of the force loading head through a parallel mechanism, but the device cannot precisely control the force applied. direction and angle. That is to say, the force-adding devices provided in these two patent documents still cannot meet the requirements of static and dynamic calibration of the sensor, and due to the limitation of the working principle, the displacement must be changed to generate the loading force instead of directly outputting the loading force. This is very inconvenient for actual operation.

发明内容 Contents of the invention

本发明的目的在于,针对现有技术中存在的问题,本发明提供了一种可对柔性触觉传感器进行三维力加载及标定的装置,以满足传感器静态和动态标定的要求。 The object of the present invention is to provide a device for three-dimensional force loading and calibration of flexible tactile sensors to meet the requirements of static and dynamic calibration of the sensor, aiming at the problems existing in the prior art.

本发明的技术方案如下: Technical scheme of the present invention is as follows:

本发明的柔性触觉传感器的三维力加载及标定装置,包括一个用于放置样品的操作台及固定样品的夹持机构、力加载与控制机构及支撑架,其特征在于,所述力加载及控制机构是由力加载杆、拉压传感器、微型气缸、气压调节阀与气源、电控制盒、气路和电路连接部分组成的气动力机构,或者是由力加载杆、拉压传感器、音圈电机与电流控制器、电控制盒及相应的电路连接部分组成的电磁力机构;所述力加载与控制机构中的力加载装置通过支撑架安装在操作台的上方。 The three-dimensional force loading and calibration device of the flexible tactile sensor of the present invention includes an operation platform for placing samples, a clamping mechanism for fixing samples, a force loading and control mechanism and a support frame, and it is characterized in that the force loading and control The mechanism is a pneumatic mechanism composed of a force loading rod, a tension and pressure sensor, a miniature cylinder, an air pressure regulating valve and an air source, an electric control box, an air circuit and a circuit connection, or a force loading rod, a tension and pressure sensor, a voice coil An electromagnetic force mechanism composed of a motor, a current controller, an electric control box and corresponding circuit connection parts; the force loading device in the force loading and control mechanism is installed above the operating table through a support frame.

所述支撑架是一简支梁架,该支梁架上设置有一根可垂直移动的导轨,力加载装置安装在该垂直导轨底端;或者是由机械运动付,例如螺母丝杆机构、齿轮齿条机构或蜗轮蜗杆机构,构成的具有X-Y-Z方向直线运动能力的三维支撑架,操作台安装在能实现沿X轴、Y轴方向移动的支撑架底部,力加载装置安装在能作垂直方向移动的Z轴导轨的底端,从而使得力加载装置能相对于操作台在X-Y-Z三维方向作直线移动。 The support frame is a simply supported beam frame, and a vertically movable guide rail is arranged on the support beam frame, and the force loading device is installed at the bottom of the vertical guide rail; or it is paid by mechanical movement, such as a nut screw mechanism, a gear The rack mechanism or worm gear mechanism constitutes a three-dimensional support frame with linear motion capability in the X-Y-Z direction. The operating table is installed at the bottom of the support frame that can move along the X-axis and Y-axis directions, and the force loading device is installed on it. It can move vertically The bottom end of the Z-axis guide rail, so that the force loading device can move linearly in the X-Y-Z three-dimensional direction relative to the operating table.

所述力加载装置安装在简支梁架垂直导轨底端或三维支撑架Z轴导轨的底端,可以是将力加载装置直接固定安装在垂直导轨或Z轴导轨的底端,也可以在导轨的底端与力加载装置的连接处设置滚动轴承,使力加载装置相对于导轨转动,以满足不同使用情况的需要。为方便操作,还可在导轨上设置角度刻度标记,以标示转动角度。 The force loading device is installed on the bottom end of the vertical guide rail of the simply supported beam frame or the bottom end of the Z-axis guide rail of the three-dimensional support frame. Rolling bearings are arranged at the connection between the bottom end of the bottom end and the force loading device, so that the force loading device rotates relative to the guide rail, so as to meet the needs of different usage situations. For the convenience of operation, angle scale marks can also be set on the guide rail to indicate the rotation angle.

在实际使用中,为满足加载力作用方向的变化,还可以将力加载装置先设置在一个角度调节机构上,然后将该角度调节机构直接与导轨底端连接,或通过滚动轴承与导轨底端连接。该角度调节机构包括一个位于垂直平面上的半圆形滑轨、以及与之相配合的滑块,力加载装置与滑块固定连接,滑块在半圆形滑轨上滑动,带动力加载装置在与垂直导轨或Z轴导轨轴线夹角为正负90°的范围内变动,也可在半圆形滑轨边上标注角度刻度,以更加有利于操作。 In actual use, in order to meet the change of the direction of the loading force, the force loading device can also be set on an angle adjustment mechanism first, and then the angle adjustment mechanism is directly connected to the bottom end of the guide rail, or connected to the bottom end of the guide rail through rolling bearings . The angle adjustment mechanism includes a semicircular slide rail on a vertical plane and a matching slide block, the force loading device is fixedly connected with the slide block, and the slide block slides on the semicircle slide rail, with a force loading device The included angle with the vertical guide rail or the axis of the Z-axis guide rail is within the range of plus or minus 90°, and the angle scale can also be marked on the side of the semicircular slide rail to facilitate the operation.

本发明中的力加载及控制机构使用了气动加力或电磁加力两种方案。气动加力方案中以微型气缸为力加载装置,以空气或氮气为工作介质,通过电气比例阀控制气缸压力,实现对加载力的连续无极调节,加载力的大小可由气缸压力计算得出,并与拉压传感器的检测值相比较,实现对加载力的闭环精确控制。以微型气缸为力加载装置,通过气缸瞬时加压驱使力加载杆瞬间加力,可应用于传感器的动态标定。电磁加力方案中以音圈电机为力加载装置,通过调节流经电机的电流大小实现音圈电机推力的精确控制,并通过与拉压传感器的检测值相比较,达到对加载力闭环精确控制的目的。以音圈电机为力加载装置,通过瞬间增大电流在极短的时间内将加载力提高数十甚至数百倍,可用于传感器的动态标定。以微型气缸和音圈电机为力加载装置,与以往力加载装置的区别在于,两者都是直接以加载力为控制量,而非以往驱动电机以移动距离为控制量,因此从原理上避免了加力过程中产生的加载力突跃问题,实现了加载力的平滑连续调节,满足了传感器静态和动态标定的要求。 The force loading and control mechanism in the present invention uses two schemes of pneumatic force or electromagnetic force. In the pneumatic boosting scheme, a miniature cylinder is used as the force loading device, air or nitrogen is used as the working medium, and the cylinder pressure is controlled by an electric proportional valve to realize continuous stepless adjustment of the loading force. The loading force can be calculated from the cylinder pressure and calculated. Compared with the detection value of the tension and pressure sensor, the closed-loop precise control of the loading force is realized. The micro cylinder is used as the force loading device, and the force loading rod is instantly increased through the instantaneous pressurization of the cylinder, which can be applied to the dynamic calibration of the sensor. In the electromagnetic boosting scheme, the voice coil motor is used as the force loading device, and the precise control of the thrust of the voice coil motor is realized by adjusting the current flowing through the motor, and by comparing with the detection value of the tension and pressure sensor, the closed-loop precise control of the loading force is achieved the goal of. The voice coil motor is used as the force loading device, and the loading force can be increased tens or even hundreds of times in a very short time by increasing the current instantaneously, which can be used for dynamic calibration of sensors. The difference between the force loading device and the previous force loading device is that the micro cylinder and the voice coil motor are directly controlled by the loading force, instead of the moving distance of the drive motor in the past. Therefore, it is avoided in principle. The sudden jump of the loading force generated during the boosting process realizes the smooth and continuous adjustment of the loading force and meets the requirements of static and dynamic calibration of the sensor.

本发明的柔性触觉传感器的三维力加载及标定装置,通过具有X-Y-Z方向直线运动装置的三维支撑架,并通过设置滚动轴承来调节其水平面上的加力方向,还通过使用具有角度刻度的半圆形导轨控制其垂直平面上的加力角度,从而在工作平台的上半球区域内,能够实现以任意方向和角度进行力加载和标定作业,操作十分方便,这将大大扩大其适用范围。  The three-dimensional force loading and calibration device of the flexible tactile sensor of the present invention uses a three-dimensional support frame with a linear motion device in the X-Y-Z direction, and adjusts the force direction on the horizontal plane by setting a rolling bearing, and also uses a semicircle with an angle scale The guide rail controls the force angle on the vertical plane, so that in the upper hemisphere area of the working platform, force loading and calibration operations can be performed in any direction and angle, and the operation is very convenient, which will greatly expand its application range. the

附图说明 Description of drawings

下面通过实施例和附图作进一步描述。 Further description will be made below through examples and accompanying drawings.

图1是所述气动加力及控制机构的实施例结构示意图。 Fig. 1 is a structural schematic diagram of an embodiment of the pneumatic booster and control mechanism.

图2是所述电磁加力及控制机构的实施例结构示意图。 Fig. 2 is a structural schematic diagram of an embodiment of the electromagnetic force and control mechanism.

图3是所述具有水平方向与倾斜角度调节能力的装置的实施例结构示意图。 Fig. 3 is a schematic structural diagram of an embodiment of the device with the ability to adjust the horizontal direction and tilt angle.

图4是所述具有X-Y-Z方向直线运动装置的三维支撑架的实施例结构示意图。 Fig. 4 is a schematic structural view of an embodiment of the three-dimensional support frame with a linear motion device in the X-Y-Z direction.

图5是所述电控制盒的实施例电路模块示意图。 Fig. 5 is a schematic diagram of the circuit module of the embodiment of the electric control box.

具体实施方式 Detailed ways

参见图1,由硬质塑料、铝合金或不锈钢棒制成的力加载杆1通过螺纹接口与拉压传感器2连接,该拉压传感器再通过螺纹接口与微型气缸的活塞11连接,而微型气缸10也通过螺纹接口与角度调节滑块6连接,其中力加载杆1、拉压传感器2和微型气缸10的轴线重合。所述微型气缸10通过气压调节阀4及PU管道3与气源5连通。所述电控制盒8通过信号线9分别与拉压传感器2和气压调节阀4连接。微型气缸10以空气或氮气为工作介质,通过气压调节阀4的控制,实现气体压力、流速的无极调节,由于力加载杆1和微型气缸活塞11固连成整体,因此改变微型气缸10中的气压的大小,即实现力加载杆1对被标定样品作用力大小的调节。所用气源5为高压空气钢瓶或空气压缩机,使用PU管将其与气压调节阀4连接,为微型气缸10提供工作介质。角度调节滑块6中部有中空“凹”槽结构,以便与“凸”字形滑轨配合连接,滑块侧面的滑块固定螺钉7用于锁定滑块位置。电控制盒8的输入端与拉压传感器2的输出端电连接,用于接收拉压传感器2的力检测信号;电控制盒8的输出端和气压调节阀4的输入端电连接,将控制信号传输给气压调节阀4;电控制盒8上配有USB模块,用于与计算机连接,通过计算机换算得到加载力的量值,继而控制整个力加载过程。 Referring to Fig. 1, the force loading rod 1 made of hard plastic, aluminum alloy or stainless steel rod is connected with the tension and pressure sensor 2 through the threaded interface, and the tension and pressure sensor is connected with the piston 11 of the miniature cylinder through the threaded interface, and the miniature cylinder 10 is also connected to the angle adjustment slider 6 through a threaded interface, wherein the axes of the force loading rod 1, the tension and pressure sensor 2 and the miniature cylinder 10 coincide. The miniature cylinder 10 communicates with the air source 5 through the air pressure regulating valve 4 and the PU pipeline 3 . The electric control box 8 is respectively connected with the tension and pressure sensor 2 and the air pressure regulating valve 4 through the signal line 9 . The micro cylinder 10 uses air or nitrogen as the working medium, and through the control of the air pressure regulating valve 4, it realizes the stepless regulation of gas pressure and flow rate. The size of the air pressure is to realize the adjustment of the force applied by the force loading rod 1 to the calibrated sample. The air source 5 used is a high-pressure air cylinder or an air compressor, which is connected to the air pressure regulating valve 4 with a PU tube to provide the working medium for the miniature cylinder 10 . There is a hollow "concave" groove structure in the middle part of the angle adjustment slide block 6, so as to be connected with the "convex" glyph slide rail, and the slide block fixing screw 7 on the side of the slide block is used to lock the position of the slide block. The input end of the electric control box 8 is electrically connected with the output end of the tension-pressure sensor 2, and is used to receive the force detection signal of the tension-pressure sensor 2; the output end of the electric control box 8 is electrically connected with the input end of the pressure regulating valve 4, and the The signal is transmitted to the air pressure regulating valve 4; the electric control box 8 is equipped with a USB module, which is used to connect with the computer, and obtain the value of the loading force through computer conversion, and then control the entire force loading process.

参见图2,由硬质塑料、铝合金或不锈钢棒制成的力加载杆1通过螺纹接口与拉压传感器2连接,该拉压传感器再通过螺纹接口与音圈电机的动子15连接,而音圈电机14也通过螺纹接口与角度调节滑块6连接,其中力加载杆1、拉压传感器2和音圈电机14的轴线重合。所述音圈电机14和电流控制器13通过导线12连接。所述电控制盒8通过信号线9分别与拉压传感器2和电流控制器13连接。音圈电机14依靠电流产生的电磁力工作,通过电流控制器13连续精确调节电流,可实现对电机推力的无极连续调节。由于力加载杆1和音圈电机的动子15固连成整体,因此改变音圈电机14中的电流大小,即实现力加载杆1对被标定样品作用力大小的调节。角度调节滑块6中部有中空“凹”槽结构,以便与“凸”字形滑轨配合连接,滑块侧面的滑块固定螺钉7用于锁定滑块位置。电控制盒8的输入端与拉压传感器2的输出端电连接,用于接收拉压传感器2的力检测信号;电控制盒8的输出端和电流控制器13的输入端电连接,将控制信号传输给电流控制器13;电控制盒8上配有USB模块,用于与计算机连接,通过计算机换算得到加载力的量值,继而控制整个力加载过程。 Referring to Fig. 2, the force loading rod 1 made of hard plastic, aluminum alloy or stainless steel rod is connected to the tension and pressure sensor 2 through the threaded interface, and the tension and pressure sensor is connected to the mover 15 of the voice coil motor through the threaded interface, and The voice coil motor 14 is also connected to the angle adjustment slider 6 through a threaded interface, wherein the axes of the force loading rod 1 , the pull-pressure sensor 2 and the voice coil motor 14 coincide. The voice coil motor 14 and the current controller 13 are connected by wires 12 . The electric control box 8 is respectively connected with the tension and pressure sensor 2 and the current controller 13 through the signal wire 9 . The voice coil motor 14 relies on the electromagnetic force generated by the current to work, and the current can be continuously and accurately adjusted by the current controller 13 to realize stepless and continuous adjustment of the thrust of the motor. Since the force loading rod 1 and the mover 15 of the voice coil motor are integrally connected, changing the current in the voice coil motor 14 realizes the adjustment of the force applied by the force loading rod 1 to the calibrated sample. There is a hollow "concave" groove structure in the middle part of the angle adjustment slide block 6, so as to be connected with the "convex" glyph slide rail, and the slide block fixing screw 7 on the side of the slide block is used to lock the position of the slide block. The input end of electric control box 8 is electrically connected with the output end of pull-pressure sensor 2, is used to receive the force detection signal of pull-pressure sensor 2; The output end of electric control box 8 is electrically connected with the input end of current controller 13, will control The signal is transmitted to the current controller 13; the electric control box 8 is equipped with a USB module for connecting with a computer, and the value of the loading force is obtained through computer conversion, and then controls the entire force loading process.

参见图3,半圆形滑轨16顶端与方向调节盘18底部固定连接,方向调节盘18中间嵌套转动轴承17,并通过转动轴承与Z轴导轨末端连接。角度调节滑块6与半圆形滑轨16动配合链接,滑块底部具有与力加载装置连接的螺纹接头19,滑块侧面动配合连接滑块固定螺钉7。所述半圆形滑轨16以加力点为圆心呈半圆形弯曲,横截面成“凸”字形,表面标示角度刻度,可精确指示倾斜角度。所述方向调节盘18通过转动轴承17与Z轴导轨连接,因此可以Z轴导轨为轴心旋转,配合表面上的角度刻度,可精确控制水平面内的旋转方向角。角度调节滑块6中部有中空“凹”槽结构,与半圆形的“凸”字形滑轨16动配合连接,可沿半圆形滑轨做弧形运动,实现在垂直平面内精确调节倾斜角度,滑块侧面的滑块固定螺钉7用于锁定滑块位置。由于力加载装置与角度调节滑块6固连成整体,半圆形滑轨16又与方向调节盘18固连成整体,因此组合调节方向调节盘18和角度调节滑块6,即实现在操作台的上半球区内以力加载点为中心的力加载方向和角度的任意调节。 Referring to FIG. 3 , the top of the semicircular slide rail 16 is fixedly connected to the bottom of the direction adjusting disc 18 , and the rotating bearing 17 is nested in the middle of the direction adjusting disc 18 , and is connected to the end of the Z-axis guide rail through the rotating bearing. The angle adjustment slide block 6 is dynamically matched with the semicircular slide rail 16, the bottom of the slide block has a threaded joint 19 connected with the force loading device, and the side of the slide block is dynamically fitted with the fixed screw 7 of the slide block. The semicircular slide rail 16 is semicircular curved with the force point as the center, the cross section is "convex" shape, and the surface is marked with an angle scale, which can accurately indicate the inclination angle. The direction adjusting disc 18 is connected to the Z-axis guide rail through the rotating bearing 17, so it can rotate on the Z-axis guide rail as the axis, and cooperate with the angle scale on the surface to precisely control the rotation direction angle in the horizontal plane. There is a hollow "concave" groove structure in the middle of the angle adjustment slider 6, which is movably connected with the semicircular "convex" slide rail 16, and can make arc movements along the semicircular slide rail to achieve precise adjustment of inclination in the vertical plane Angle, the slider fixing screw 7 on the side of the slider is used to lock the position of the slider. Because the force loading device is fixedly connected with the angle adjustment slider 6 as a whole, and the semicircular slide rail 16 is fixedly connected with the direction adjustment disc 18 as a whole, so the combined adjustment of the direction adjustment disc 18 and the angle adjustment slider 6 realizes the operation Arbitrary adjustment of the force loading direction and angle centered on the force loading point in the upper hemisphere area of the stage.

参见图4,Y轴支撑架23垂直固定安装在Y轴导轨22上,Y轴燕尾导向槽21平行于Y轴安装在操作台33侧面,Y轴位移调节旋钮20置于操作台33的另一侧,其安装面与Y轴燕尾导向槽21的安装面相互垂直。Y轴导轨22与Y轴燕尾导向槽21动配合连接,并通过丝杠副与Y轴位移调节旋钮20动配合连接。由于Y轴支撑架23与Y轴导轨22固连成整体,因此转动Y轴位移调节旋钮20,即实现驱动Y轴支撑架23沿Y轴燕尾导向槽21作直线运动。 Referring to Fig. 4, the Y-axis support frame 23 is vertically and fixedly installed on the Y-axis guide rail 22, the Y-axis dovetail guide groove 21 is installed on the side of the console 33 parallel to the Y-axis, and the Y-axis displacement adjustment knob 20 is placed on the other side of the console 33. side, its mounting surface is perpendicular to the mounting surface of the Y-axis dovetail guide groove 21. The Y-axis guide rail 22 is movably connected with the Y-axis dovetail guide groove 21 , and is movably connected with the Y-axis displacement adjustment knob 20 through a screw pair. Since the Y-axis support frame 23 is integrally connected with the Y-axis guide rail 22 , turning the Y-axis displacement adjustment knob 20 can drive the Y-axis support frame 23 to move linearly along the Y-axis dovetail guide groove 21 .

X轴导轨25与Y轴垂直,水平固定安装于Y轴支撑架23顶端,X轴燕尾导向槽26平行安装于X轴横梁27底部,X轴位移调节旋钮24置于Y轴支撑架23顶部侧面。由于X轴横梁27通过X轴燕尾导向槽26与X轴导轨25动配合连接,并通过齿条-齿轮结构与X轴位移调节旋钮24动配合连接,因此转动X轴位移调节旋钮24,即实现驱动X轴横梁27沿X轴导轨25做直线运动。 The X-axis guide rail 25 is perpendicular to the Y-axis, fixed horizontally on the top of the Y-axis support frame 23, the X-axis dovetail guide groove 26 is installed parallel to the bottom of the X-axis beam 27, and the X-axis displacement adjustment knob 24 is placed on the top side of the Y-axis support frame 23 . Since the X-axis beam 27 is movably connected with the X-axis guide rail 25 through the X-axis dovetail guide groove 26, and is movably connected with the X-axis displacement adjustment knob 24 through the rack-and-pinion structure, so turning the X-axis displacement adjustment knob 24 realizes Drive the X-axis beam 27 to move linearly along the X-axis guide rail 25 .

Z轴支撑架30侧面固定连接在X轴横梁27末端,并垂直于水平面。Z轴支撑架30内部为中空结构,固定安装Z轴导向槽28,Z轴位移调节旋钮31置于Z轴支撑架30外侧。Z轴导轨29与Z轴导向槽28动配合连接穿过Z轴支撑架30,并通过齿条-齿轮结构与Z轴位移调节旋钮31动配合连接,因此转动Z轴位移调节旋钮31,即实现驱动Z轴导轨29沿Z轴导向槽28做直线运动。 The side of the Z-axis support frame 30 is fixedly connected to the end of the X-axis beam 27 and is perpendicular to the horizontal plane. The inside of the Z-axis support frame 30 is a hollow structure, and the Z-axis guide groove 28 is fixedly installed, and the Z-axis displacement adjustment knob 31 is placed outside the Z-axis support frame 30 . The Z-axis guide rail 29 is movably connected with the Z-axis guide groove 28 through the Z-axis support frame 30, and is movably connected with the Z-axis displacement adjustment knob 31 through the rack-gear structure, so turning the Z-axis displacement adjustment knob 31 realizes Drive the Z-axis guide rail 29 to move linearly along the Z-axis guide groove 28 .

Z轴导轨29末端通过转动轴承与方向调节盘18连接,方向调节盘18与半圆形滑轨16固连成整体,因此转动Y轴位移调节旋钮20、X轴位移调节旋钮24和Z轴位移调节旋钮31,即实现驱动方向与角度调节装置在X-Y-Z方向做三维直线运动。 The end of the Z-axis guide rail 29 is connected to the direction adjustment disc 18 through a rotating bearing, and the direction adjustment disc 18 is fixedly connected with the semicircular slide rail 16 as a whole, so turning the Y-axis displacement adjustment knob 20, the X-axis displacement adjustment knob 24 and the Z-axis displacement Adjusting the knob 31 realizes the three-dimensional linear motion of the driving direction and angle adjusting device in the X-Y-Z direction.

操作台33位于Z轴导轨29正下方,通过侧面的Y轴燕尾导向槽21与整个三维支撑架结构动配合连接,操作台33表面放置样品夹持器32用于固定样品。 The operating table 33 is located directly below the Z-axis guide rail 29, and is dynamically connected with the entire three-dimensional support frame structure through the Y-axis dovetail guide groove 21 on the side. The sample holder 32 is placed on the surface of the operating table 33 to fix the sample.

参见图5,电控制盒的信号输入模块34与拉压传感器的信号输出端电连接,信号输出模块35与压力调节阀或电流控制器的信号输入端电连接,电控制盒通过USB通讯模块37与计算机38电连接。信号输入模块34接收拉压传感器实时传输的推力信号,经模数转换、信号放大模块39后提供给单片机36处理;单片机36在接收信号输入模块34传入信号的同时,通过USB通讯模块37与计算机38交换信息,并将执行命令经信号输出模块35提交给加力控制机构。 Referring to Fig. 5, the signal input module 34 of the electric control box is electrically connected to the signal output end of the tension and pressure sensor, the signal output module 35 is electrically connected to the signal input end of the pressure regulating valve or the current controller, and the electric control box is connected through the USB communication module 37 It is electrically connected with the computer 38 . The signal input module 34 receives the thrust signal transmitted by the tension and pressure sensor in real time, and provides it to the single-chip microcomputer 36 for processing after the analog-to-digital conversion and the signal amplification module 39; The computer 38 exchanges information, and submits the execution command to the force control mechanism through the signal output module 35 .

上述实施方式中,所述微型气缸、拉压传感器、音圈电机等材料均由市场直接购得。 In the above embodiments, the materials such as the miniature cylinder, tension and pressure sensors, and voice coil motors are all directly purchased from the market.

Claims (6)

1. the three-dimensional force of a flexible touch sensation sensor loads and caliberating device, comprise that one for placing the operator's console of sample and the clamping device of fixed sample, force loading device and control gear and bracing frame, described force loading device and control gear are the aerodynamic force mechanisms being grouped into by power load bar, tension-compression sensor, minitype cylinder, air pressure regulator and source of the gas, photoelectric control box, gas circuit and circuit connecting section, or the electromagnetic force mechanism being grouped into by power load bar, tension-compression sensor, voice coil motor and current controller, photoelectric control box and corresponding circuit connecting section; Described force loading device is arranged on the top of operator's console by bracing frame, it is characterized in that, support frame as described above is a freely-supported roof beam structure, is provided with a vertically moving guide rail on this freely-supported roof beam structure, and force loading device is arranged on this vertical guide rail bottom; Or by mechanical motion, paid the three-dimensional bracing frame with X-Y-Z direction linear motion device forming, operator's console is arranged on can realize the bracing frame bottom of moving along Y-axis or X-direction, force loading device is arranged on the bottom of the Z axis guide rail that can move as vertical direction, makes charger at X-Y-Z three-dimensional, make traveling priority with respect to operator's console.
2. the three-dimensional force of flexible touch sensation sensor as claimed in claim 1 loads and caliberating device, it is characterized in that, described force loading device is arranged on the bottom of vertical guide rail bottom or three-dimensional bracing frame Z axis guide rail, be, in the bottom of guide rail and the junction of force loading device, rolling bearing is set, force loading device is rotated with respect to vertical guide rail or Z axis guide rail.
3. the three-dimensional force of flexible touch sensation sensor as claimed in claim 2 loads and caliberating device, it is characterized in that, when the bottom of described vertical guide rail bottom or Z axis guide rail and the junction of force loading device arrange rolling bearing, on vertical guide rail or Z axis guide rail, angle index mark is set.
4. the three-dimensional force of flexible touch sensation sensor as claimed in claim 1 loads and caliberating device, it is characterized in that, described force loading device is arranged on the bottom of vertical guide rail bottom or Z axis guide rail, first force loading device to be arranged on an angle adjusting mechanism, then this angle adjusting mechanism is connected with vertical guide rail or Z axis guide rail bottom, or is connected with vertical guide rail or Z axis guide rail bottom by rolling bearing.
5. the three-dimensional force of flexible touch sensation sensor as claimed in claim 4 loads and caliberating device, it is characterized in that, described angle adjusting mechanism comprises the semicircle slide rail and the slide block with matching that are positioned on vertical plane, force loading device is fixedly connected with slide block, slide block slides on semicircle slide rail, and drive charger changes in the angle with vertical guide rail or Z axis rail axis is the scope of positive and negative 90 °.
6. the three-dimensional force of flexible touch sensation sensor as claimed in claim 5 loads and caliberating device, it is characterized in that, the semicircle slide rail subscript of described angle adjusting mechanism is marked with angle index.
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