CN103071910A - Double-ultrasonic-high-frequency induction combined precision micro-connection device and method - Google Patents
Double-ultrasonic-high-frequency induction combined precision micro-connection device and method Download PDFInfo
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- CN103071910A CN103071910A CN2013100135127A CN201310013512A CN103071910A CN 103071910 A CN103071910 A CN 103071910A CN 2013100135127 A CN2013100135127 A CN 2013100135127A CN 201310013512 A CN201310013512 A CN 201310013512A CN 103071910 A CN103071910 A CN 103071910A
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- B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
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- B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
- B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- Lining Or Joining Of Plastics Or The Like (AREA)
Abstract
本发明公开一种双超声-高频感应复合精密微连接装置，所述装置包括机架，设于机架上的驱动机构和传动机构；与传动机构连接的上超声振动系统；与上超声振动系统输出端连接的高频感应自热装置；上超声振动系统下方设有下超声振动系统；下超声振动系统上方设有工作台；上超声振动系统、高频感应自热装置和下超声振动系统连接有电源。本发明所述装置将双超声波振动和热能复合，避免了单纯使用热能导致温度过高出现的熔断或损坏待连接工件的现象，也避免了普通超声热压焊容易脱焊和绝缘层去除不彻底的问题，提高了工作效率，降低了生产成本。同时，本发明还公开了采用所述装置进行双超声-高频感应复合精密微连接的方法。
The invention discloses a dual-ultrasonic-high-frequency induction composite precision micro-connection device, which includes a frame, a driving mechanism and a transmission mechanism arranged on the frame; an upper ultrasonic vibration system connected with the transmission mechanism; and an upper ultrasonic vibration The high-frequency induction self-heating device connected to the output of the system; the lower ultrasonic vibration system is installed below the upper ultrasonic vibration system; the workbench is installed above the lower ultrasonic vibration system; Power is connected. The device of the present invention combines double ultrasonic vibration and thermal energy, avoiding the phenomenon of fusing or damaging the workpieces to be connected due to excessive temperature caused by the simple use of thermal energy, and also avoids the easy desoldering and incomplete removal of the insulating layer by ordinary ultrasonic thermocompression welding problems, improve work efficiency and reduce production costs. At the same time, the invention also discloses a method for using the device to perform double ultrasonic-high frequency induction compound precision micro-connection.
Description
Technical field
The present invention relates to a kind of little jockey and method, the especially a kind of pair of ultrasonic-little jockey of high-frequency induction combined precision and method.
Background technology
Enamel-covered wire is widely used in electronics, electric, medical apparatus and the semi-conductive production (such as sensor, transformer, coil, winding, implant electrode, chip interconnect lead-in wire etc.), a part of serving as the inner base element is perhaps as the conductive medium that connects inside and outside the element.When as the medium of inside and outside connection, the end of enamel-covered wire must and metallic terminations (such as inserted sheet, pin, paper tinsel etc.) realize electrically contacting, and satisfy the requirements such as certain mechanical property, electric conductivity and heatproof degree cyclic fatigue performance.Therefore, in the manufacturing of electronic devices and components, medicine equipment, sensor product, relate to accurate little spot welding that a large amount of enamel-covered wires are drawn contact.But common little method of attachment directly welding enamelled wires particularly high-temperature resistant enamelled wire all has deficiency.The common little interconnection technique of enamel-covered wire roughly has following a few class at present:
Soldering.Soldering is the modal method of attachment of enamel-covered wire, and its conductive line surfaces and substrate is fully wetting by the low-melting solder of fusing, parcel forms joint after the cooling.But, with soldering enamel-covered wire is welded the macromolecule paint film removal that must will hinder first conduction before and endanger Joint Reliability, operation is loaded down with trivial details.And under some occasion (such as aerospace electronics, nuclear power facility, implantation medical device) and high temperature dynamic loading condition (such as the encapsulate electric rotors commutator), the inefficacy because soldering comes off easily, oxidation and pollution to workpiece are also more serious, and these occasions do not allow to adopt soldering processes.
Laser Welding and laser soldering.Realize welding after both utilizing laser energy with the insulating barrier burn off of enamel-covered wire, with laser as welding energy, heat is concentrated, noncontact, the high vacuum environment that does not also need electron beam welding during welding, and have the advantages such as simultaneously paint removal and welding, but the processing of laser weld butt-welding fitting, assembling, positioning requirements are all very high, and welding cost is relatively high.It is usually used in the welding of chip or beam lead, and not too is fit to the welding between fine rule.
Thermocompression bonding.Thermal compression welding is the method that adopts heating, pressurization, makes welded intermetallic produce plastic deformation, makes the atom phase counterdiffusion of surperficial intersection.Under certain pressure, fill mutually on two surfaces, produces the elasticity packing interaction simultaneously.Make at last both combine closely into firmly keyed jointing.The thermal compression welding common used material is aluminium-Jin, aluminium-aluminium, Jin-Jin, silico-aluminum-aluminium, golden antimony alloy-Jin etc.Because the character of thermocompression bonding needs welded interface cleaning, oxide or greasy dirt etc. will affect the quality of welding.
Ultrasonic bond.Ultrasonic bond is mainly used in the Bonding in the IC chip interconnects technique, namely realizes being electrically connected between chip and lead frame with gold thread, aluminum steel or copper cash.Because pre-heat energy makes the ultrasonic bond joint performance better, so heat sound bonding is the main flow of ultrasonic bond.Along with the appearance of ultra fine-pitch (＜25 μ m) and stacked die, avoid simultaneously lead short circuit for realizing more intensive I/O pin in recent years, enamel-covered wire is considered to the potential substituent of gold thread.Ultrasonic thermocompression can be realized the welding of enamel-covered wire, and still, the problem such as insulated paint is residual substitutes traditional gold thread to enamel-covered wire and brought challenge.
The little connection of resistance also is called the micro electric welding resistance.It is the resistance heat heating of metal that produces when utilizing electric current to flow through workpiece and contact-making surface, then finishes under pressure welding.In order to overcome insulated paint to the obstruction in resistance welding current path, must design special soldering tip and remove insulated paint.The application success of these soldering tips has been realized the connection of part enamel-covered wire (such as straight weldering type enamel-covered wire), and the solder joint that obtains has preferably performance, but connects for some enamel-covered wire (such as insulating lacquer layer), and also there are many problems in this method.And this connected mode is not suitable for single-sided welding, is very restricted aspect connection space.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art part and provide a kind of can directly connect enamel-covered wire or other non-ferrous metal even plastics two ultrasonic-the little jockey of high-frequency induction combined precision; In addition, the present invention also provides and has adopted described device to carry out pair method of ultrasonic-little connection of high-frequency induction combined precision.
For achieving the above object, the technical scheme that the present invention takes is: a kind of pair of ultrasonic-little jockey of high-frequency induction combined precision, and it comprises:
Frame is located at driving mechanism and transmission mechanism on the described frame;
The upper ultrasonic vibration system that is connected with described transmission mechanism;
The high-frequency induction Self-heating device that is connected with described upper ultrasonic vibration system output;
Described upper ultrasonic vibration system below is provided with lower ultrasonic vibration system;
Described lower ultrasonic vibration system top is provided with workbench;
Described upper ultrasonic vibration system, high-frequency induction Self-heating device and lower ultrasonic vibration system are connected with power supply; Described driving mechanism drives upper ultrasonic vibration system knee-action by described transmission mechanism.
In described pair of ultrasonic-little jockey of high-frequency induction combined precision, workbench is used for placing workpiece to be connected, the driving mechanism that arranges on the described frame drives described upper ultrasonic vibration system knee-action by transmission mechanism, because the output of upper ultrasonic vibration system is connected with the high-frequency induction Self-heating device, the knee-action of upper ultrasonic vibration system will drive described high-frequency induction Self-heating device and carry out synchronously knee-action.When described high-frequency induction Self-heating device moves downwards, the high-frequency induction Self-heating device compresses the upper surface of workpiece to be connected on the workbench with predetermined pressure, when pressure reaches preset value, in the triggering, lower ultrasonic vibration system and high-frequency induction Self-heating device are started working, described high-frequency induction Self-heating device is to the joint input heat energy of workpiece to be connected, described upper ultrasonic vibration system is inputted ultrasonic vibration by the high-frequency induction Self-heating device that is connected with its output to the joint of workpiece to be connected, described lower ultrasonic vibration system is inputted ultrasonic vibration by the workbench that its top arranges to workpiece to be connected, under the compound action of heat energy and ultrasonic vibration, realize the accurate little connection to workpiece to be connected.During use, can be according to the difference of workpiece material, upper and lower ultrasonic vibration system provides ultrasonic vibration to workpiece to be connected simultaneously, i.e. two ultrasound mode, also can only use, in the ultrasonic vibration system one provides ultrasonic vibration to workpiece to be connected, namely go up ultrasonic simple sund source pattern or lower ultrasonic simple sund source pattern, two hyperacoustic characteristic parameters can be identical or different.
Preferred embodiment as of the present invention pair of ultrasonic-little jockey of high-frequency induction combined precision, described high-frequency induction Self-heating device comprise for the high-frequency induction that contacts with workpiece surface to be connected from thermal head, be surrounded on described high-frequency induction from the induction coil of thermal head and be used for the temperature sensing device that the Real-time Collection temperature signal feeds back to power supply, described induction coil and described upper ultrasonic vibration system insulation, described high-frequency induction is relative with described induction coil static from thermal head.Described high-frequency induction is connected with the output of upper ultrasonic vibration system from thermal head, when high-frequency induction when thermal head contacts with the upper surface of workpiece to be connected, induction heating in the alternating magnetic field that induction coil provides, the pressure that provides heat energy, ultrasonic wave and connection to be connected from thermal head to workpiece to be connected by high-frequency induction.
Preferred embodiment as of the present invention pair of ultrasonic-little jockey of high-frequency induction combined precision, described upper ultrasonic vibration system comprise the upper ultrasonic vibration system transducer that is connected with power supply, with the upper ultrasonic vibration system ultrasonic transformer that described upper ultrasonic vibration system transducer is connected, the output of described upper ultrasonic vibration system ultrasonic transformer is connected with the high-frequency induction Self-heating device.The output of described upper ultrasonic vibration system ultrasonic transformer is connected from thermal head with the high-frequency induction of high-frequency induction Self-heating device, described upper ultrasonic vibration system transducer converts electrical energy into the ultrasonic vibration mechanical energy, and is input to the junction of workpiece to be connected from thermal head by the high-frequency induction that is connected with described upper ultrasonic vibration system ultrasonic transformer.Described upper ultrasonic vibration system ultrasonic transformer can be realized knee-action in the acting in conjunction of driving mechanism and transmission mechanism, thereby drive the high-frequency induction is connected with its output from the thermal head knee-action, the realization high-frequency induction moves compression workpiece to be connected and connection downwards from thermal head and finishes backward upper action and get back to original position.
Preferred embodiment as of the present invention pair of ultrasonic-little jockey of high-frequency induction combined precision, described lower ultrasonic vibration system comprises the lower ultrasonic vibration system transducer that is connected with power supply, the lower ultrasonic vibration system ultrasonic transformer that is connected with described lower ultrasonic vibration system transducer, the output of described lower ultrasonic vibration system ultrasonic transformer is connected with described workbench, and described lower ultrasonic vibration system is held mechanism and is fixed on the base by adding.During use, described workbench contacts with the lower surface of workpiece to be connected, described lower ultrasonic vibration system transducer becomes the ultrasonic vibration mechanical energy with electric energy conversion, and offers workpiece to be connected junction on the workbench by the workbench that is connected with described lower ultrasonic vibration system ultrasonic transformer output.
As the preferred embodiment of of the present invention pair of ultrasonic-little jockey of high-frequency induction combined precision, described upper and lower ultrasonic vibration system is mutually vertical.When described upper and lower ultrasonic vibration system is mutually vertical, one of them ultrasonic vibration system can be workpiece to be connected the one-dimensional linear horizontal vibration is provided, the another one ultrasonic vibration system can be workpiece to be connected extensional vibration is provided, the two separately or be combined with can be high-frequency induction and provides one-dimensional linear horizontal vibration, extensional vibration, torsional oscillation or complex vibration from the vibration of thermal head and workbench.
In addition, another object of the present invention is to provide a kind of and adopts device described above to carry out pair method of ultrasonic-little connection of high-frequency induction combined precision, for realizing this purpose, the technical scheme that the present invention takes is: a kind of pair of ultrasonic-little method of attachment of high-frequency induction combined precision, and it may further comprise the steps:
(1) start power supply, according to workpiece material to be connected and size, the default parameter that connects;
(2) place high-frequency induction between thermal head and ultrasonic workbench workpiece to be connected;
(3) high-frequency induction begins descendingly from original position from thermal head, compresses workpiece to be connected with predetermined pressure;
(4) when pressure reaches preset value, trigger upper and lower ultrasonic vibration system and the high-frequency induction Self-heating device is started working, respectively to workpiece joints to be connected place input ultrasonic vibration and heat energy, under ultrasonic vibration and heat energy compound action, realize the accurate little connection to workpiece to be connected;
(5) connect end, upper and lower ultrasonic vibration system and high-frequency induction Self-heating device quit work, and high-frequency induction is got back to original position from thermal head, prepare next and connect circulation.
As the preferred embodiment of of the present invention pair of ultrasonic-little method of attachment of high-frequency induction combined precision, described high-frequency induction is one-dimensional linear horizontal vibration, extensional vibration, torsional oscillation or complex vibration from the vibration mode of thermal head and workbench.
As the preferred embodiment of of the present invention pair of ultrasonic-little method of attachment of high-frequency induction combined precision, described workpiece to be connected is enamel-covered wire, bare copper wire, bare aluminium wire or foil material.
Preferred embodiment as of the present invention pair of ultrasonic-little method of attachment of high-frequency induction combined precision, in the described step (4), ultrasonic wave is provided by in the upper and lower ultrasonic vibration system one or two, two hyperacoustic characteristic parameters in ultrasonic simple sund source pattern, lower ultrasonic simple sund source pattern or the two ultrasound mode in the formation, the described pair of ultrasound mode are identical or different.
Preferred embodiment as of the present invention pair of ultrasonic-little method of attachment of high-frequency induction combined precision, in the described step (1), default connection parameter comprises: Bonding pressure, connection temperature and ultrasonic wave relevant feature parameters, and described each parameter of upper and lower ultrasonic vibration system is separate adjustable; In the described step (2), high-frequency induction is resistance heated, eddy-current heating, infrared heating, LASER HEATING or other energy sources for heatings from the mode of heating of thermal head; In the described step (3), the pressurised driving mode is the servo-actuated pressurization of spring, Pneumatic Pressure, hydraulic pressurization or servo pressurization; The pressure-loaded form is that constant voltage, secondary load or multi-stage loading; In the described step (4), connect in the circulation at one, hyperacoustic amplitude is adjustable, and ultrasonic wave is continuously or is interrupted that the initial time of pressure, heat energy and ultrasonic vibration and termination are constantly identical or different.
Compared with prior art, device of the present invention is compound with two ultrasonic vibrations and heat energy, both avoided simple use heat energy to remove the phenomenon that enamel-covered wire causes the fusing of excess Temperature appearance or damages workpiece to be connected, also avoided the easy sealing-off of common ultrasonic-thermocompression welding and insulating barrier to remove the problems such as not thorough, can directly connect enamel-covered wire and need not to remove in advance any pre-treatments such as insulating barrier, improve operating efficiency, reduced production cost; The method of the invention can realize the monolateral welding to workpiece, has greatly reduced the restriction in space, has improved the flexibility of welding; Under Ultrasonic Vibration kinetic energy automated cleaning surface of the work oxide to be connected, whole connection procedure can not pollute joint and surrounding environment, is a kind of efficient, environmental protection, economic reliable little interconnection technique.
Description of drawings
Fig. 1 is the structural representation of a kind of embodiment of of the present invention pair of ultrasonic-little jockey of high-frequency induction combined precision.
The structural representation of upper ultrasonic vibration system and high-frequency induction Self-heating device in shown in Figure 1 pair of ultrasonic-little jockey of high-frequency induction combined precision of Fig. 2.
Fig. 3 is the working state schematic representation of the shown in Figure 1 pair of little jockey medium-high frequency induction of ultrasonic-high-frequency induction combined precision Self-heating device.
The structural representation of upper and lower ultrasonic vibration system and high-frequency induction Self-heating device when Fig. 4 is the upper ultrasonic simple sund source pattern of employing.
The structural representation of upper and lower ultrasonic vibration system and high-frequency induction Self-heating device when Fig. 5 is the lower ultrasonic simple sund source pattern of employing.
The structural representation of upper and lower ultrasonic vibration system and high-frequency induction Self-heating device when Fig. 6 is the two ultrasound mode of employing.
Fig. 7 is little connection parameter schematic diagram of a kind of embodiment of of the present invention pair of ultrasonic-little method of attachment of high-frequency induction combined precision.
Fig. 8 is little connection parameter schematic diagram of another embodiment of of the present invention pair of ultrasonic-little method of attachment of high-frequency induction combined precision.
Fig. 9 is little connection parameter schematic diagram of another embodiment of of the present invention pair of ultrasonic-little method of attachment of high-frequency induction combined precision.
Figure 10 is little connection parameter schematic diagram of another embodiment of of the present invention pair of ultrasonic-little method of attachment of high-frequency induction combined precision.
Figure 11 is little connection parameter schematic diagram of another embodiment of of the present invention pair of ultrasonic-little method of attachment of high-frequency induction combined precision.
Figure 12 is little connection parameter schematic diagram of the another embodiment of of the present invention pair of ultrasonic-little method of attachment of high-frequency induction combined precision.
Figure 13 is little connection parameter schematic diagram of an again embodiment of of the present invention pair of ultrasonic-little method of attachment of high-frequency induction combined precision.
Among the figure, 10 hold mechanism, 48 and are workpiece to be connected for wire, 70 for power supply, 62 for workbench, 60 for base, 50 for adding for lower ultrasonic vibration system ultrasonic transformer, 46 for lower ultrasonic vibration system transducer, 44 for lower ultrasonic vibration system, 42 for temperature sensing device, 40 for induction coil, 36 from thermal head, 34 for high-frequency induction for high-frequency induction Self-heating device, 32 for upper ultrasonic vibration system ultrasonic transformer, 30 for upper ultrasonic vibration system transducer, 24 for upper ultrasonic vibration system, 22 for transmission mechanism, 20 for driving mechanism, 14 for frame, 12.
The specific embodiment
For the purpose, technical solutions and advantages of the present invention better are described, the invention will be further described below in conjunction with the drawings and specific embodiments.
A kind of pair of ultrasonic-little jockey of high-frequency induction combined precision, as shown in Figure 1, described device comprises frame 10, is located at driving mechanism 12 and transmission mechanism 14 on the described frame 10; The upper ultrasonic vibration system 20 that is connected with described transmission mechanism 14; The high-frequency induction Self-heating device 30 that is connected with described upper ultrasonic vibration system 20 outputs; Described upper ultrasonic vibration system 20 belows are provided with lower ultrasonic vibration system 40; Described lower ultrasonic vibration system 40 tops are provided with workbench 50; Described upper ultrasonic vibration system 20, high-frequency induction Self-heating device 30 and lower ultrasonic vibration system 40 are connected with power supply 60, and described driving mechanism 12 drives upper ultrasonic vibration system 20 knee-actions by described transmission mechanism 14.
Workbench 50 is used for placing workpiece 70 to be connected, described upper ultrasonic vibration system 20 can be by the acting in conjunction knee-action of driving mechanism 12 and transmission mechanism 14, because the output of upper ultrasonic vibration system 20 is connected with high-frequency induction Self-heating device 30, the knee-action of upper ultrasonic vibration system 20 will drive described high-frequency induction Self-heating device 30 and carry out synchronously knee-action.When the action downwards of described high-frequency induction Self-heating device 30, high-frequency induction Self-heating device 30 compresses the upper surface of workpiece 70 to be connected on the workbench 50 with predetermined pressure, when pressure reaches preset value, in the triggering, lower ultrasonic vibration system (20,40) and high-frequency induction Self-heating device 30 start working, described high-frequency induction Self-heating device 30 is to the joint input heat energy of workpiece 70 to be connected, described upper ultrasonic vibration system 20 is inputted ultrasonic vibration by the high-frequency induction Self-heating device 30 that is connected with its output to the joint of workpiece 70 to be connected, described lower ultrasonic vibration system 40 is inputted ultrasonic vibrations by the workbench 50 that its top arranges to workpiece 70 to be connected, under the compound action of heat energy and ultrasonic vibration, realize the accurate little connection to workpiece 70 to be connected.
Preferably, shown in attached Fig. 1 and 2, described high-frequency induction Self-heating device 30 comprise for the high-frequency induction that contacts with workpiece 70 upper surfaces to be connected from thermal head 32, be surrounded on described high-frequency induction from the induction coil 34 of thermal head 32 and be used for the temperature sensing device 36 that the Real-time Collection temperature signal feeds back to power supply, described induction coil 34 and described upper ultrasonic vibration system 20 insulation, described high-frequency induction is relative static with described induction coil 34 from thermal head 32.
Preferably, shown in attached Fig. 1 and 2, described upper ultrasonic vibration system 20 comprise the upper ultrasonic vibration system transducer 22 that is connected with power supply 60, with the upper ultrasonic vibration system ultrasonic transformer 24 that described upper ultrasonic vibration system transducer 22 is connected, the output of described upper ultrasonic vibration system ultrasonic transformer 24 is connected with high-frequency induction Self-heating device 30.
Preferably, as shown in Figure 1, described lower ultrasonic vibration system 40 comprises the lower ultrasonic vibration system transducer 42 that is connected with power supply 60, the lower ultrasonic vibration system ultrasonic transformer 44 that is connected with described lower ultrasonic vibration system transducer 42, the output of described lower ultrasonic vibration system ultrasonic transformer 44 is connected with described workbench 50, and described lower ultrasonic vibration system 40 is held mechanism 46 and is fixed on the base 48 by adding.
More preferably, as shown in Figure 1, described upper and lower ultrasonic vibration system (20,40) is mutually vertical.When described upper and lower ultrasonic vibration system (20,40) was mutually vertical, one of them ultrasonic vibration system can be workpiece 70 to be connected the one-dimensional linear horizontal vibration is provided, and the another one ultrasonic vibration system can be workpiece 70 to be connected extensional vibration is provided.Described upper and lower ultrasonic vibration system (20,40) can provide ultrasonic vibration for workpiece 70 to be connected simultaneously, i.e. two ultrasound mode, also can be according to different workpiece to be connected 70 materials, select one of them to provide ultrasonic vibration for workpiece 70 to be connected, namely go up ultrasonic simple sund source pattern or lower ultrasonic simple sund source pattern.
A kind of employing as mentioned above device carry out two Chao Sheng ?the little method of attachment of high-frequency induction combined precision, said method comprising the steps of:
(1) start power supply, according to workpiece material to be connected and size, the default parameter that connects;
(2) place high-frequency induction between thermal head and ultrasonic workbench workpiece to be connected;
(3) high-frequency induction begins descendingly from original position from thermal head, compresses workpiece to be connected with predetermined pressure;
(4) when pressure reaches preset value, trigger upper and lower ultrasonic vibration system and the high-frequency induction Self-heating device is started working, respectively to workpiece joints to be connected place input ultrasonic vibration and heat energy, under ultrasonic vibration and heat energy compound action, realize the accurate little connection to workpiece to be connected;
(5) connect end, upper and lower ultrasonic vibration system and high-frequency induction Self-heating device quit work, and high-frequency induction is got back to original position from thermal head, prepare next and connect circulation.
As shown in Figure 3, during use, at first start power supply 60, according to material and the size of workpiece 70 to be connected, the default parameter that connects; Then workpiece 70 to be connected is placed on the workbench 50, shown in accompanying drawing 3a; Upper ultrasonic vibration system 20 begins descending under the effect of driving mechanism 12 and transmission mechanism 14, thereby driving high-frequency induction begins descending from thermal head 32 from original position, shown in accompanying drawing 3b, with the workpiece to be connected 70 on the predetermined pressure compression workbench 50, shown in accompanying drawing 3c, when pressure reaches preset value, the control end of ultrasonic vibration system 20 and high-frequency induction Self-heating device 30 in the triggering, ultrasonic vibration system 20 and high-frequency induction are started working from thermal head 32, respectively to workpiece to be connected 70 joints input ultrasonic vibration and heat energy, being connected compound action with high-frequency induction thermal under, ultrasonic vibration realizes the accurate little connection to workpiece 70 to be connected, shown in accompanying drawing 3d; After connecting end, upper ultrasonic vibration system 20 and high-frequency induction Self-heating device 30 quit work, upper ultrasonic vibration system 20 begins up under the acting in conjunction of driving mechanism 12 and transmission mechanism 14, thereby drives high-frequency induction from the thermal head 32 up original positions of getting back to, and prepares next and connects circulation.
Shown in accompanying drawing 4,5 and 6, ultrasonic wave can be provided by in the upper and lower ultrasonic vibration system (20,40) one or two, two hyperacoustic characteristic parameters in ultrasonic simple sund source pattern, lower ultrasonic simple sund source pattern or the two ultrasound mode in the formation, the described pair of ultrasound mode are identical or different.Described high-frequency induction can be one-dimensional linear horizontal vibration, extensional vibration, torsional oscillation or complex vibration from the vibration mode of thermal head 32 and workbench 50.
In the described step (1), default connection parameter can comprise Bonding pressure, connect temperature and ultrasonic wave relevant feature parameters, and described each parameter of upper and lower ultrasonic vibration system is separate adjustable; In the described step (2), high-frequency induction can be resistance heated, eddy-current heating, infrared heating, LASER HEATING or other energy sources for heatings from the mode of heating of thermal head; In the described step (3), the pressurised driving mode can be the servo-actuated pressurization of spring, Pneumatic Pressure, hydraulic pressurization or servo pressurization; The pressure-loaded form can be constant voltage, secondary loads or multi-stage loading; In the described step (4), connect in the circulation at one, hyperacoustic amplitude can be adjustable, and ultrasonic wave can be continuous, also can be interrupted, and the initial time of pressure, heat energy and ultrasonic vibration constantly can be identical with termination, also can be different.
Workpiece to be connected described above can enamel-covered wire, bare copper wire, bare aluminium wire or foil material.
Extremely shown in Figure 7 such as Fig. 1, a kind of pair of ultrasonic-little method of attachment of high-frequency induction combined precision, the implementation step is as follows:
(1) start power supply, according to workpiece material to be connected and size, the default parameter that connects;
(2) workpiece to be connected is placed the high-frequency induction of jockey between thermal head and workbench; (Fig. 3 a)
(3) high-frequency induction begins descendingly from original position from thermal head, compresses workpiece to be connected with predetermined pressure; (Fig. 3 b)
(4) when pressure reaches preset value, the control end of ultrasonic vibration system and high-frequency induction Self-heating device in the triggering, ultrasonic vibration system and high-frequency induction are started working from thermal head, to joint to be connected input heat energy and ultrasonic wave, be connected under the compound action realization with high frequency induction thermal to accurate little connection of workpiece ultrasonic; (Fig. 3 c, Fig. 3 d)
(5) connect end, upper ultrasonic vibration system and high-frequency induction Self-heating device quit work, and high-frequency induction is got back to original position from thermal head, prepare next and connect circulation.(Fig. 3 e)
(6) in the present embodiment, pressuring method is the servo-actuated pressurization of spring, and mode of heating adopts eddy-current heating, and temperature sensing device adopts infrared detection, and the workbench vibration mode is the one-dimensional linear horizontal vibration.
In the described step (1), workpiece to be connected is respectively enamel-covered wire and phosphorus bronze sheet.
In the described step (1), by the default parameter that connects of job requirement shown in Figure 7.Connecting parameter comprises:
Bonding pressure, connection temperature and ultrasonic wave relevant feature parameters.Default pattern of pressure is constant voltage mode, and heating mode is constant temperature mode, and ultrasonic loading mode is the luffing loading mode.The course of work shown in Figure 7 is specific as follows:
Precompressed stage (t
0-t
1): workpiece to be connected is placed the high-frequency induction of jockey between thermal head and workbench; High-frequency induction begins descending from original position from thermal head, compress workpiece to be connected with predetermined pressure;
Access phase (t
1-t
3): ultrasonic wave, pressure and the heat energy parameter preset compound action by as shown in Figure 7 is in the pending connection position, wherein:
t
1Constantly: pressure reaches the precompressed value, and pressure signal triggers the upper ultrasonic vibration system transducer work that power supply makes high-frequency induction Self-heating device and upper ultrasonic vibration system.
Time period t
1-t
2: high-frequency induction remains unchanged from the thermal head temperature; The ultrasonic wave that transducer sends is A through upper ultrasonic vibration system ultrasonic transformer output amplitude respectively
1Ultrasonic wave, pass to high-frequency induction and act on workpiece to be connected junction from thermal head.
Time period t
2-t
3: power supply changes relevant parameter, and the ultrasonic wave that transducer is sent is A through upper ultrasonic vibration system ultrasonic transformer output amplitude respectively
2Ultrasonic wave, pass to high-frequency induction and act on the pending connection position from thermal head.
Time period t
1-t
3: Bonding pressure keeps F
1Constant; Temperature sensing device to power supply, keeps temperature T invariable signal feedback.
Reseting stage (t
3-t
4): high-frequency induction goes upward to original position from thermal head.
In the present embodiment, the concrete condition that the forming process of joint connects the parameter setting is explained as follows in conjunction with Fig. 7:
At first, will preset the connection parameter, insulated wire and phosphorus bronze sheet place the high-frequency induction of jockey (Fig. 3 a) between thermal head and workbench; Spring-compressed, it is descending from thermal head to drive high-frequency induction through transmission mechanism, compresses with predetermined pressure and treats insulated wire and phosphorus bronze sheet (Fig. 3 b); When pressure reaches predetermined value, trigger power supply, road direction induction coil input high-frequency alternating electric current produces magnetic field, and high-frequency induction conducts the heat to workpiece joints to be connected position from thermal head induction heating; The upper ultrasonic vibration system transducer of the upper ultrasonic vibration system of other one tunnel excitation conducts to high-frequency induction from thermal head through upper ultrasonic vibration system ultrasonic transformer, acts on workpiece joints to be connected place.Under pressure, ultrasonic and hot acting in conjunction, insulating barrier is melted, removes (Fig. 3 c); At this moment, the conductor part of insulated wire is exposed out, contact with phosphorus bronze sheet, and under pressure, ultrasonic and hot acting in conjunction, the variation through complexity finally forms joint (Fig. 3 d); Time delay finishes, and high-frequency induction Self-heating device and upper ultrasonic vibration system quit work, and high-frequency induction goes upward to original position from thermal head, prepares the next connection circulation of beginning (Fig. 3 e).
Embodiment 2
Present embodiment is except following characteristics, and other structures are identical with embodiment 1 with process: pressuring method is Pneumatic Pressure.
In the described step (1), workpiece to be connected is respectively aluminum steel and aluminium flake.
In the described step (1), by the default parameter that connects of job requirement shown in Figure 8, default pattern of pressure is the secondary loading mode, and ultrasonic loading mode is permanent amplitude loading mode.
In the described step (4), when pressure reaches preset value, trigger the control end of upper and lower ultrasonic vibration system and high-frequency induction Self-heating device, to joint to be connected input heat energy and two bundle ultrasonic waves, realize the accurate little connection to workpiece.In the present embodiment, in conjunction with Fig. 8 to access phase (t
1-t
4) be described as follows:
Time period t
1-t
2: high-frequency induction compresses aluminum steel and aluminium flake from thermal head with one-level on-load pressure value, and under ul-trasonic irradiation, the foreign material such as oxide-film of pending connection position contact interface are broken rapidly, get rid of outside the interface, forms clean contact-making surface, and contact-making surface is increased gradually;
Time period t
2-t
3: power supply triggers the work of high-frequency induction Self-heating device, and to pending connection position input heat energy, meanwhile, pressure and Ultrasonic characteristics are constant, begin to take shape articulamentum;
Time period t
3-t
4: enter the secondary load phase, pressure increases to F
2Along with t
1-t
3Finishing of connection work, contact area is increasing, at pressure F
2, form firmly joint under heating and the ultrasonic wave acting in conjunction.
Embodiment 3
Present embodiment is except following characteristics, and other structures are identical with embodiment 2 with process:
In the described step (1), by the default parameter that connects of job requirement shown in Figure 9.
In the described step (4), when pressure reached preset value, the control end of ultrasonic vibration system and high-frequency induction Self-heating device in the triggering to joint to be connected input heat energy and ultrasonic wave, was realized the accurate little connection to workpiece.In the present embodiment, in conjunction with Fig. 9 to time period t in the access phase
3-t
5Be described as follows:
Time period t
3-t
4: enter the secondary load phase, pressure increases to F
2Along with t
1-t
3Finishing of connection work, contact area is increasing, and joint basically forms.
Time period t
3-t
4: ultrasonic vibration system quits work, and keeps temperature and pressure constant, is conducive to spread from dividing between joint interface place atom, forms firm joint.
Embodiment 4
Present embodiment is except following characteristics, and other structures are identical with embodiment 3 with process:
In the described step (1), by the default parameter that connects of job requirement shown in Figure 10.In the present embodiment, in conjunction with Figure 10 to time period t in the access phase
1-t
5Be described as follows:
Time period t
1-t
2: enter the one-level load phase, force value is F
1Self-heating device reaches preset value at pressure and starts working.Preheating workpiece to be connected, for follow-up connection procedure ready; Ultrasonic vibration system is not worked in this time period.
Time period t
2-t
3: pressure and temperature remains unchanged; Ultrasonic vibration system work impels joint to form.
Time period t
3-t
4: enter the secondary load phase, force value increases to F
2Temperature and ultrasonic amplitude remain unchanged.Along with the carrying out that connects, the joint contact interface is increasing, and the increasing of pressure is conducive to the interatomic phase counterdiffusion in joint interface place.
Time period t
4-t
5: pressure and temperature remains unchanged, and ultrasonic vibration system quits work, and this is conducive to fully diffusion between joint interface place atom, forms firm joint.
Embodiment 5
Present embodiment is except following characteristics, and other structures are identical with embodiment 1 with process:
In the described step (1), workpiece to be connected is respectively aluminum steel and easily by the terminal of the components and parts of fire damage.
In the described step (1), by the default parameter that connects of job requirement shown in Figure 11.In the present embodiment, in conjunction with Figure 11 to time period t in the access phase
1-t
5Be described as follows:
Time period t
1-t
2: enter the one-level load phase, force value is F
1The high-frequency induction Self-heating device is not worked in this time period; Ultrasonic vibration system is started working when pressure reaches preset value, is A to the pending connection position input amplitude
1Ultrasonic wave.Because workpiece, should reduce the heat energy input to workpiece to be connected by fire damage as far as possible; Under ul-trasonic irradiation, the foreign material such as oxide-film of pending connection position contact interface are broken rapidly, get rid of outside the interface, form clean contact-making surface, and contact-making surface is increased gradually;
Time period t
2-t
3: pressure remains unchanged, and the high-frequency induction Self-heating device is started working, and ultrasonic vibration system is A to the pending connection position input amplitude
1Ultrasonic wave.At pressure, under heat energy and the hyperacoustic acting in conjunction, the minute protrusions place of workpiece contact interface to be connected will at first connect together, and begin to take shape joint.
Time period t
3-t
4: enter the secondary load phase, force value increases to F
2Temperature and ultrasonic amplitude remain unchanged.Along with the carrying out that connects, the joint contact interface is increasing, and the increasing of pressure is conducive to the interatomic phase counterdiffusion in joint interface place.
Time period t
4-t
5: pressure and ultrasonic amplitude remain unchanged, and the high-frequency induction Self-heating device quits work.Minimizing is avoided fire damage to components and parts to the heat energy input of workpiece to be connected; The continuation effect of ultrasonic wave and pressure is conducive to fully diffusion between joint interface place atom, forms firm joint.
Embodiment 6
Present embodiment is except following characteristics, and other structures are identical with embodiment 5 with process:
In the described step (1), workpiece to be connected is respectively insulated wire and easily by the terminal of the components and parts of fire damage.
In the described step (1), by the default parameter that connects of job requirement shown in Figure 12.In the present embodiment, in conjunction with Figure 12 to time period t in the access phase
1-t
5Be described as follows:
Time period t
1-t
2: enter the one-level load phase, force value is F
1Because workpiece, should reduce the heat energy input to workpiece to be connected by fire damage as far as possible, the high-frequency induction Self-heating device is not worked in this time period; Ultrasonic vibration system is started working when pressure reaches preset value, to the ultrasonic wave of pending connection position input large amplitude.The large amplitude ul-trasonic irradiation can make the insulating barrier of insulated wire broken, remove, and makes the conductor part of insulated wire exposed out.
Time period t
2-t
3: pressure remains unchanged, and the high-frequency induction Self-heating device is started working, and ultrasonic vibration system is A to the pending connection position input amplitude
1Ultrasonic wave.Pressure, heat energy and hyperacoustic acting in conjunction thoroughly remove insulating barrier on the one hand, and the minute protrusions place of workpiece contact interface to be connected is at first connected together, and begin to take shape joint.
Time period t
3-t
4: enter the secondary load phase, force value increases to F
2Temperature and ultrasonic amplitude remain unchanged.Along with the carrying out that connects, the joint contact interface is increasing, and the increasing of pressure is conducive to the interatomic phase counterdiffusion in joint interface place.
Time period t
4-t
5: pressure and temperature remains unchanged, and ultrasonic amplitude increases to A
2, this is conducive to fully diffusion between joint interface place atom.
Time period t
5-t
6: pressure and ultrasonic amplitude remain unchanged, and the high-frequency induction Self-heating device quits work.Minimizing is avoided fire damage to components and parts to the heat energy input of workpiece to be connected; Ultrasonic wave and pressure remake uses a period of time, forms firm joint.
Embodiment 7
Present embodiment except the ultrasonic wave interval action in the pending connection position, other structures are identical with embodiment 6 with process.The concrete condition of pressure, temperature and ul-trasonic irradiation as shown in figure 13.
In above-described embodiment explanation, only for hyperacoustic action mode is described, two hyperacoustic characteristic parameters that upper and lower ultrasonic vibration system sends can be identical for the ultrasonic wave waveform among Fig. 7 to Figure 13, also can be different.
Last institute should be noted that; above embodiment is only in order to illustrate technical scheme of the present invention but not limiting the scope of the invention; although with reference to preferred embodiment the present invention has been done detailed description; those of ordinary skill in the art is to be understood that; the change that every foundation technical spirit of the present invention and principle are done, modification, substitute, combination, simplify; all should be the substitute mode of equivalence, be included within protection scope of the present invention.
Claims (10)
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Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103909288A (en) * | 2014-04-04 | 2014-07-09 | 广东工业大学 | Electrophoretic assisted ultrasonic mechanical composite micro-drilling machining device |
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| CN105234555A (en) * | 2015-11-13 | 2016-01-13 | 哈尔滨普瑞斯材料科技有限公司 | Ultrasonic-assisted transitional liquid phase bonding method |
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| CN106098576A (en) * | 2016-08-22 | 2016-11-09 | 中国电子科技集团公司第二十六研究所 | The ultrasonic ball-planting device of wafer hot pressing and technique |
| CN107138846A (en) * | 2017-06-27 | 2017-09-08 | 哈尔滨工业大学深圳研究生院 | Ultrasonic micro-bonding method and its device applied to RFID magnetic card copper lines |
| CN107378234A (en) * | 2017-08-15 | 2017-11-24 | 江苏大学 | Ultrasonic vibration aids in the device and method of high speed impact pressure welding metal foil plate |
| CN107413871A (en) * | 2017-09-28 | 2017-12-01 | 中国地质大学（武汉） | A kind of composite ultraphonic vibration aids in micro- extrusion molding process equipment |
| CN107848216A (en) * | 2015-07-29 | 2018-03-27 | 伍德韦尔丁公司 | Can be by the device and equipment of the method for means for engaging to object and suitable this method by ultrasonic vibration |
| CN108436463A (en) * | 2017-01-10 | 2018-08-24 | 温州职业技术学院 | A kind of high-frequency induction laserHybrid welding connection device of socket hollow copper tubing |
| CN110234457A (en) * | 2016-11-16 | 2019-09-13 | Csm机械有限公司 | Laser pressure welding |
| JP2020114593A (en) * | 2019-01-17 | 2020-07-30 | 株式会社ダイヘン | Joint device |
| CN112776348A (en) * | 2021-02-01 | 2021-05-11 | 北京工业大学 | Fiber reinforced thermoplastic composite material and metal laser pressure welding method |
| CN115464247A (en) * | 2022-09-16 | 2022-12-13 | 上海创贤半导体有限公司 | Power semiconductor ultrasonic aluminum wire welding method |
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| CN103909288A (en) * | 2014-04-04 | 2014-07-09 | 广东工业大学 | Electrophoretic assisted ultrasonic mechanical composite micro-drilling machining device |
| CN103920985A (en) * | 2014-04-10 | 2014-07-16 | 中国兵器工业第五九研究所 | Fast preheating unit for thin-walled pipe type part axial friction welding |
| CN104690414A (en) * | 2015-03-04 | 2015-06-10 | 天津大学 | Electroplastic ultrasonic spot welding device |
| CN107848216B (en) * | 2015-07-29 | 2020-09-01 | 伍德韦尔丁公司 | Method for joining a device to an object by means of ultrasonic vibrational energy, and device and apparatus suitable for the method |
| CN107848216A (en) * | 2015-07-29 | 2018-03-27 | 伍德韦尔丁公司 | Can be by the device and equipment of the method for means for engaging to object and suitable this method by ultrasonic vibration |
| JP2018522765A (en) * | 2015-07-29 | 2018-08-16 | ウッドウェルディング・アクチェンゲゼルシャフト | Method of joining a device to an object using ultrasonic vibration energy and equipment and equipment suitable for this method |
| CN105234555A (en) * | 2015-11-13 | 2016-01-13 | 哈尔滨普瑞斯材料科技有限公司 | Ultrasonic-assisted transitional liquid phase bonding method |
| CN105856473A (en) * | 2016-05-06 | 2016-08-17 | 华南理工大学 | Method and device for processing high polymer material at low temperature through cooperation of high-frequency electric field and vibration force field |
| CN105856473B (en) * | 2016-05-06 | 2018-04-13 | 华南理工大学 | High-frequency electric field and the method and device of Vibrational force field cooperating with low-temperature processing macro-molecular material |
| CN106098576A (en) * | 2016-08-22 | 2016-11-09 | 中国电子科技集团公司第二十六研究所 | The ultrasonic ball-planting device of wafer hot pressing and technique |
| CN110234457B (en) * | 2016-11-16 | 2021-04-30 | Csm机械有限公司 | Method and apparatus for manufacturing workpiece by laser pressure welding and workpiece manufactured by laser pressure welding |
| CN110234457A (en) * | 2016-11-16 | 2019-09-13 | Csm机械有限公司 | Laser pressure welding |
| CN108436463A (en) * | 2017-01-10 | 2018-08-24 | 温州职业技术学院 | A kind of high-frequency induction laserHybrid welding connection device of socket hollow copper tubing |
| CN108436463B (en) * | 2017-01-10 | 2019-05-28 | 温州职业技术学院 | A kind of high-frequency induction laserHybrid welding connection device being socketed hollow copper tubing |
| CN107138846A (en) * | 2017-06-27 | 2017-09-08 | 哈尔滨工业大学深圳研究生院 | Ultrasonic micro-bonding method and its device applied to RFID magnetic card copper lines |
| CN107138846B (en) * | 2017-06-27 | 2022-12-06 | 哈尔滨工业大学深圳研究生院 | Ultrasonic micro-welding method and device applied to metal copper wire of RFID magnetic card |
| CN107378234B (en) * | 2017-08-15 | 2019-04-30 | 江苏大学 | Ultrasonic vibration-assisted high-speed impact pressure welding device and method for metal foil plates |
| CN107378234A (en) * | 2017-08-15 | 2017-11-24 | 江苏大学 | Ultrasonic vibration aids in the device and method of high speed impact pressure welding metal foil plate |
| CN107413871A (en) * | 2017-09-28 | 2017-12-01 | 中国地质大学（武汉） | A kind of composite ultraphonic vibration aids in micro- extrusion molding process equipment |
| JP2020114593A (en) * | 2019-01-17 | 2020-07-30 | 株式会社ダイヘン | Joint device |
| JP7144330B2 (en) | 2019-01-17 | 2022-09-29 | 株式会社ダイヘン | Welding equipment |
| CN112776348A (en) * | 2021-02-01 | 2021-05-11 | 北京工业大学 | Fiber reinforced thermoplastic composite material and metal laser pressure welding method |
| CN112776348B (en) * | 2021-02-01 | 2022-07-19 | 北京工业大学 | Fiber reinforced thermoplastic composite material and metal laser pressure welding method |
| CN115464247A (en) * | 2022-09-16 | 2022-12-13 | 上海创贤半导体有限公司 | Power semiconductor ultrasonic aluminum wire welding method |
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