CN103047348A - Magnetic suspension vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of sliding joint bearing - Google Patents
Magnetic suspension vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of sliding joint bearing Download PDFInfo
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Abstract
共面气浮正交解耦与滑动关节轴承角度解耦的磁浮隔振器属于精密隔振技术领域，隔振器主体的套筒与下安装板之间通过磁浮推力轴承进行承载，活塞筒与套筒之间通过气浮面进行润滑与支撑，上安装板与下安装板之间的水平直线运动自由度通过共面正交气浮导轨进行解耦，二者之间的角运动自由度通过滑动关节轴承进行解耦，音圈电机、位移传感器、限位开关和控制器、驱动器构成位置闭环反馈控制系统，对上、下安装板的相对位置进行精确控制；本发明具有三维近似零刚度、高定位精度、直线运动自由度和角运动自由度解耦的特性，可有效解决超精密测量仪器与加工装备、尤其是步进扫描光刻机中的高性能隔振问题。
The maglev vibration isolator with coplanar air bearing orthogonal decoupling and sliding joint bearing angle decoupling belongs to the field of precision vibration isolation technology. The sleeve of the main body of the The sleeves are lubricated and supported by the air bearing surface, the degree of freedom of horizontal linear motion between the upper mounting plate and the lower mounting plate is decoupled by coplanar orthogonal air bearing guide rails, and the degree of freedom of angular motion between the two is through sliding The joint bearing is decoupled, and the voice coil motor, displacement sensor, limit switch, controller, and driver form a position closed-loop feedback control system to accurately control the relative position of the upper and lower mounting plates; the invention has three-dimensional approximate zero stiffness, high The decoupling characteristics of positioning accuracy, linear motion degree of freedom and angular motion degree of freedom can effectively solve the problem of high-performance vibration isolation in ultra-precision measuring instruments and processing equipment, especially in step-and-scan lithography machines.
Description
Technical field
The invention belongs to the accurate vibration isolation technical field, relate generally to the floating vibration isolator of magnetic of a kind of coplanar air supporting crossing decoupling and the decoupling zero of arthrodia bearing angle.
Background technique
Along with improving constantly of ultraprecise processing and measuring accuracy, ambient vibration becomes the key factor that restriction ultraprecise process unit and surveying instrument precision and performance improve.Especially step-by-step scanning photo-etching device is the vlsi circuit process unit of representative, technology-intensive degree and complexity are high, key technical index has all reached the limit of prior art, represented the highest level of ultraprecise process unit, the ultraprecise vibration isolation becomes the core key technology in this type of equipment; The live width of step-by-step scanning photo-etching device has reached 22nm and following, silicon chip Location accuracy and alignment precision all reach several nanometers, and the work stage movement velocity reaches more than the 1m/s, and the work stage acceleration reaches tens times of gravity accleration, and this has proposed new challenge to existing vibration isolation technique.At first, lithography machine need to provide for metering system and photoetched object lens the working environment of " super quiet ", simultaneously again the demand motive work stage at full speed with High acceleration motion, this anti-vibration performance to vibrating isolation system has proposed extremely harsh requirement, and the natural frequency of its three directions all needs to reach below the 1Hz; Secondly, relative position between each parts of lithography machine, the distance of photoetched object lens and silicon chip surface for example, all has very strict requirement, and be under the control of position closed loop feedback control system, require the relative positional accuracy between the upper and lower mounting plate of vibration isolator to reach 10 μ m magnitudes, the Location accuracy of traditional vibration isolator can not meet the demands far away.
According to theory of vibration isolation, the natural frequency of passive type vibration isolator is directly proportional with rigidity, is inversely proportional to load quality, therefore under the certain prerequisite of load quality, the rigidity that reduces vibration isolator is the effective way that reduces natural frequency, improves low frequency and superlow frequency vibration isolating performance.There are the intrinsic contradictions of static bearing capacity and rigidity in the vibration isolator of the forms such as conventional air spring, restricted by the factors such as material behavior, structural rigidity, further reduce its rigidity, especially level very difficult to rigidity.For this problem, the researcher is incorporated into " pendulum " formula structure in the air cushion shock absorber, reaches purpose (the 1.Nikon Corporation.Vibration Isolator With Low Lateral Stiffness. U.S. Patent Publication No.: US20040065517A1 that reduces the vibration isolator horizontal rigidity; 2.U.S.Philips Corporation.Positioning Device with a Force Actuator Systemfor Compensating Center-of-gravity Displacements, and Lithographic Device Provided with Such APositioning Device. U.S. Patent number: US005844664A).The method can reduce the horizontal rigidity of air cushion shock absorber to a certain extent, promotes its low frequency vibration isolation performance.The problem that the method exists is: restricted by material behavior and structural rigidity, vibration isolator is vertical limited to the amplitude of stiffness degradation with level; 2) the vertical and level of air cushion shock absorber is all very poor to Location accuracy, can't satisfy the requirement of photoetching process; 3) will reach lower horizontal rigidity needs larger pendulum length, causes the vibration isolator height excessive, the string membrane resonance easily occurs, poor stability.
By to the analysis of existing air cushion shock absorber technological scheme as seen, existing air cushion shock absorber is difficult to satisfy lithography machine to the requirement of ultralow rigidity and high position precision.Germany IDE company has proposed a kind of vibration isolator technological scheme (1.Integrated Dynamics Engineering GmbH.Isolatorgeometrie EinesSchwingungsisolationssystem. european patent number: EP1803965A2 of abandoning tradition rubber air spring; 2.Integrated Dynamics EngineeringGmbH.Schwingungsisolationssystem Mit Pneumatischem Tiefpassfilter. european patent number: EP1803970A2; 3.Integrated Dynamics Engineering GmbH.Air Bearing with Consideration ofHigh-Frequency Resonances. U.S. Patent Publication No.: US20080193061A1).This scheme adopts vertical and level is carried out decoupling zero and vibration isolation to air bearing surface to the vibration of all directions, can reach extremely low rigidity and natural frequency.The problem that this scheme exists is: 1) in the public technology scheme, vibration isolator can't be realized accurate location; 2) among the patent EP1803965A2, do not have the angular motion degrees of freedom around horizontal rotational shaft between the upper and lower mounting plate, the angular rigidity of this direction and natural frequency are all very high; Patent EP1803970A2 and US20080193061A1 adopt block rubber to provide angular motion degrees of freedom around horizontal rotational shaft for upper and lower mounting plate, but because the block rubber angular rigidity is very large, can't effectively carry out the angular motion freedom decoupling, there is frictional force between the decoupling mechanism component and introduces larger additional stiffness, restriction natural frequency and low frequency vibration isolation performance.
Holland ASML company has also proposed similar vibration isolator technological scheme (1.U.S.Philips Corp, ASM LithographyB.V.Pneumatic Support Device with A Controlled Gas Supply, and Lithographic Device Providedwith Such A Support Device. U.S. Patent number: US006144442A; 2.Koninklijke Philips ElectronicsN.V., ASM Lithography B.V.Lithographic Pneumatic Support Device with Controlled Gas Supply. International Patent Publication No.: WO99/22272; 3.ASML Netherlands B.V.Support Device, LithographicApparatus, and Device Manufacturing Method Employing A Supporting Device, and A PositionControl System Arranged for Use in A Supporting Device. U.S. Patent number: US007084956B2; 4.ASML Netherlands B.V.Support Device, Lithographic Apparatus, and Device ManufacturingMethod Employing A Supporting Device and A Position Control System Arranged for Use in ASupporting Device. european patent number: EP1486825A1).Among patent US006144442A and the WO99/22272 bleed pressure is carried out closed-loop feedback control, reach the stability of raising vibration isolator and the purpose of performance; Be provided with vibration transducer at upper mounting plate among patent US007084956B2 and the EP1486825A1, introduce simultaneously with reference to vibration system, promote the anti-vibration performance of vibration isolator by control algorithm.But the technological scheme that proposes still not effectively do not solve the accurate location of vibration isolator and the angular motion freedom decoupling problem of upper and lower mounting plate.
Summary of the invention
The objective of the invention is for ultra precise measurement instrument and process unit, especially the vlsi circuit process unit such as step-by-step scanning photo-etching device is to the low natural frequency of vibration isolator, the an urgent demand of high position precision, the floating vibration isolator of magnetic of a kind of coplanar air supporting crossing decoupling and the decoupling zero of arthrodia bearing angle is provided, vibration isolator has three-dimensional approximate zero rigidity and extremely low natural frequency, on, can accurately locate and the 3 d-line freedom of movement between the lower installation board, the angular motion freedom decoupling, thus ultra precise measurement instrument and process unit effectively solved, especially the accurate vibration isolation problem in the step-by-step scanning photo-etching device.
The object of the present invention is achieved like this:
The magnetic of a kind of coplanar air supporting crossing decoupling and the decoupling zero of arthrodia bearing angle floats vibration isolator, by upper mounting plate, lower installation board, clean compressed gas source, tracheae and vibration isolator main body form, the vibration isolator main body is installed between upper mounting plate and the lower installation board, clean compressed gas source is connected with the vibration isolator main body by tracheae, the structure of described vibration isolator main body is: the lower surface of sleeve and lower installation board be lubricated and support by the floating thrust-bearing of magnetic, the piston cylinder back-off is installed in the sleeve, and with sleeve by radially carry the cylinder air bearing surface lubricated with support, the arthrodia bearing is installed between piston cylinder and the upper mounting plate, sleeve and X-direction air-float guide rail be lubricated and guiding by X-direction guide rail air bearing surface, X-direction air-float guide rail and lower installation board be lubricated and support by Z-direction bearing air-float face, Y-direction air-float guide rail and lower installation board are rigidly connected, and the two ends of X-direction air-float guide rail and Y-direction air-float guide rail be lubricated and guiding by Y-direction guide rail air bearing surface; Z-direction voice coil motor, Z-direction displacement transducer and Z-direction limit switch are installed between piston cylinder and the sleeve, X-direction voice coil motor, X-direction displacement transducer, X-direction limit switch and Y-direction voice coil motor, Y-direction displacement transducer, Y-direction limit switch are installed between sleeve and the lower installation board, the driving force direction of Z-direction voice coil motor is vertical direction, the driving force direction of X-direction voice coil motor and Y-direction voice coil motor is in horizontal plane and mutually vertical, and the line of action direction of X, Y, Z-direction displacement transducer and X, Y, Z-direction limit switch is consistent with the driving force direction of X, Y, Z-direction voice coil motor; X, Y, Z-direction displacement transducer are connected Y, Z-direction limit switch and are connected with the signal input part of controller respectively with X, the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with X, Y, Z-direction voice coil motor respectively.
Be provided with gas pressure sensor in the described piston cylinder, piston cylinder is provided with suction port and solenoid valve, and gas pressure sensor is connected with the signal input part of controller, and the signal output part of driver is connected with solenoid valve.
The configuration mode of the floating thrust-bearing of described magnetic is to be provided with permanent magnet at sleeve bottom surface sidewall, and at the relatively equipped electromagnetic coil of lower installation board upper surface sidewall, the floating gap thickness of magnetic is 0.01mm～1mm.
Described X, Y, Z-direction voice coil motor are cylinder type voice coil motor or plate voice coil motor.
Described X-direction air-float guide rail and Y-direction air-float guide rail are single rail structure or two guide rail structure.
Described X, Y, Z-direction displacement transducer are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Gas pressure is 0.1MPa～0.8MPa in the described piston cylinder.
The good result of technological innovation of the present invention and generation is:
(1) the present invention has abandoned the vibration isolator technological scheme of tradition based on elastic element/mechanism, adopt the floating thrust-bearing of magnetic, radially carry the cylinder air bearing surface respectively to level to carrying out decoupling zero and vibration isolation with vertical vibration, the floating thrust-bearing of magnetic and air bearing surface are without friction, rigidity is approximately zero, can make vibration isolator obtain approximate zero stiffness characteristic and outstanding superlow frequency vibration isolating performance, having solved prior art limited by structural rigidity, material behavior, rigidity is difficult to further reduction, rigidity and the stable problem that can not take into account.This is that the present invention is different from one of innovative point of prior art.
(2) the present invention adopts displacement transducer, limit switch, controller, driver and voice coil motor etc. to consist of the position closed loop feedback control system of vertical direction and substantially horizontal, relative position between the upper and lower mounting plate is accurately controlled, Location accuracy can reach 10 μ m levels and more than, the problem that can solve effectively that prior art scheme Location accuracy is low, Location accuracy and rigidity, anti-vibration performance can not be taken into account.This is two of the present invention's innovative point of being different from prior art.
(3) the present invention adopts coplanar quadrature air-float guide rail and arthrodia bearing that the horizontal rectilinear motion degrees of freedom between the upper and lower mounting plate of vibration isolator and angular motion degrees of freedom are carried out decoupling zero, air-float guide rail is without friction and wear, it is less and have a larger bearing capacity that the arthrodia bearing is introduced frictional force, can be to upper and lower mounting plate, be that freedom of movement between vibration isolator and the load carries out abundant decoupling zero, effectively solve the existing technological scheme such as elastomer decoupling zero that adopts and introduce the problems such as larger additional stiffness, restriction natural frequency and low frequency vibration isolation performance.This is three of the present invention's innovative point of being different from prior art.
(4) the present invention adopts gas pressure sensor, solenoid valve and controller, driver etc. to consist of the pressure closed loop feedback control system, accurately the gas pressure in the control sleeve makes it to keep constant, thrust load to vibration isolator is carried out gravitational equilibrium and compensation, under the effect of radially carrying the cylinder air bearing surface, the piston cylinder of carry load gravity can freely slide up and down with zero stiffness along sleeve, thus the gravitational equilibrium of realizing ideal and zero stiffness vibration isolating effect.This is four of the present invention's innovative point of being different from prior art.
(5) the present invention adopts active actuators that the relative position between the upper and lower mounting plate and the gas pressure in the piston cylinder are carried out ACTIVE CONTROL, the vibration isolator parameter can be according to being changed in real time adjusting by vibration isolation features of the object and working environment, thereby adapt to different operating modes, have preferably flexibility, adaptability and stability.This is five of the present invention's innovative point of being different from prior art.
Description of drawings
Fig. 1 floats the structural representation of vibration isolator for removing coplanar air supporting crossing decoupling and the magnetic of arthrodia bearing angle decoupling zero behind the upper mounting plate;
Fig. 2 is the cross-sectional view of the floating vibration isolator of magnetic of coplanar air supporting crossing decoupling and the decoupling zero of arthrodia bearing angle;
Fig. 3 is the floating gap of magnetic, radially carries the schematic diagram of cylinder air bearing surface, X-direction guide rail air bearing surface and Z-direction bearing air-float face;
Fig. 4 is the schematic diagram of Y-direction guide rail air bearing surface;
Fig. 5 is the tube-in-tube structure schematic diagram;
Fig. 6 is the structural representation of arthrodia bearing;
Fig. 7 is the control structure block diagram of the floating vibration isolator of magnetic of coplanar air supporting crossing decoupling and the decoupling zero of arthrodia bearing angle;
Fig. 8 is the schematic diagram of cylinder air bearing surface throttle orifice on the piston cylinder.
Piece number explanation among the figure: 1 upper mounting plate, 2 lower installation boards, 3 clean compressed gas sources, 4 vibration isolator main bodys, 5 piston cylinders, 6 sleeves, 7 arthrodia bearings, the 7a bearing support, the 7b bearing support, 8X is to voice coil motor, 8a X-direction motor iron yoke, 8b X-direction magnetic steel of motor, 8c X-direction motor coil skeleton, 8d X-direction motor coil, 9Y is to voice coil motor, 10Z is to voice coil motor, 10aZ is to motor iron yoke, 10b Z-direction magnetic steel of motor, 10c Z-direction motor coil skeleton, 10d Z-direction motor coil, 10e Z-direction motor transitional spare, 11X is to displacement transducer, 11a X-direction grating reading head transition piece, 11b X-direction grating reading head, 11c X-direction glass raster chi, 12Y is to displacement transducer, 13Z is to displacement transducer, 13a Z-direction grating reading head transition piece, 13b Z-direction grating reading head, 13c Z-direction glass raster chi, 14X is to limit switch, 14a X-direction limiting stopper, 14b X-direction Hall switch, 14cX is to the limit switch transition piece, 14dX is to the limiting stopper transition piece, 15Y is to limit switch, 16Z is to limit switch, 16aZ is to limiting stopper, 16b Z-direction Hall switch, 16c Z-direction limit switch transition piece, 17 gas pressure sensors, 18 solenoid valves, 19 controllers, 20 drivers, 21 magnetic float the gap, 22 radially carry the cylinder air bearing surface, 23 suction ports, 24 magnetic float thrust-bearing, the 24a permanent magnet, the 24b electromagnetic coil, 25 cylinder air bearing surface throttle orifices, 26 tracheaes, 29X is to air-float guide rail, 30Y is to air-float guide rail, 31X direction guiding rail air bearing surface, 32Y direction guiding rail air bearing surface, 33Z is to the bearing air-float face.
Embodiment
Provide specific embodiments of the invention below in conjunction with accompanying drawing.
The magnetic of a kind of coplanar air supporting crossing decoupling and the decoupling zero of arthrodia bearing angle floats vibration isolator, by upper mounting plate 1, lower installation board 2, clean compressed gas source 3, tracheae 26 and vibration isolator main body 4 form, vibration isolator main body 4 is installed between upper mounting plate 1 and the lower installation board 2, clean compressed gas source 3 is connected with vibration isolator main body 4 by tracheae 26, the structure of described vibration isolator main body 4 is: the lower surface of sleeve 6 and lower installation board 2 are by floating the thrust-bearing 24 lubricated and supports of magnetic, piston cylinder 5 back-offs are installed in the sleeve 6, and with sleeve 6 by radially carry cylinder air bearing surface 22 lubricated with support, arthrodia bearing 7 is installed between piston cylinder 5 and the upper mounting plate 1, sleeve 6 lubricates and guiding by X-direction guide rail air bearing surface 31 with X-direction air-float guide rail 29, X-direction air-float guide rail 29 lubricates by Z-direction bearing air-float face 33 with lower installation board 2 and supports, Y-direction air-float guide rail 30 is rigidly connected with lower installation board 2, and the two ends of X-direction air-float guide rail 29 and Y-direction air-float guide rail 30 are by Y-direction guide rail air bearing surface 32 lubricated and guiding; Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed between piston cylinder 5 and the sleeve 6, X-direction voice coil motor 8, X-direction displacement transducer 11, X-direction limit switch 14 and Y-direction voice coil motor 9, Y-direction displacement transducer 12, Y-direction limit switch 15 is installed between sleeve 6 and the lower installation board 2, the driving force direction of Z-direction voice coil motor 10 is vertical direction, the driving force direction of X-direction voice coil motor 8 and Y-direction voice coil motor 9 in horizontal plane and mutually vertical, X, Y, Z- direction displacement transducer 11,12,13 and X, Y, Z- direction limit switch 14,15,16 line of action direction and X, Y, Z-direction voice coil motor 8,9,10 driving force direction is consistent; X, Y, Z- direction displacement transducer 11,12,13 are connected Y, Z- direction limit switch 14,15,16 and are connected with the signal input part of controller 19 respectively with X, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with X, Y, Z-direction voice coil motor 8,9,10 respectively.
X, Y, Z- direction displacement transducer 11,12,13 pairs of X, Y, Z-direction voice coil motor 8,9,10 displacements of exporting are measured, and X, Y, Z- direction limit switch 14,15,16 pairs of X, Y, Z-direction voice coil motor 8,9,10 strokes that move limit; Controller 19 is according to X, Y, Z- direction displacement transducer 11,12,13 and X, Y, Z- direction limit switch 14,15,16 feedback signal, and the relative position between control X, Y, Z-direction voice coil motor 8,9, the 10 pairs of upper and lower mounting plates 1,2 is accurately controlled.
Be provided with gas pressure sensor 17 in the described piston cylinder 5, piston cylinder 5 is provided with suction port 23 and solenoid valve 18, and gas pressure sensor 17 is connected with the signal input part of controller 19, and the signal output part of driver 20 is connected with solenoid valve 18.
The configuration mode of the floating thrust-bearing 24 of described magnetic is to be provided with permanent magnet 24a at sleeve 6 bottom surface sidewalls, and at the relatively equipped electromagnetic coil 24b of lower installation board upper surface sidewall, the floating gap of magnetic 21 thickness are 0.01mm～1mm.
Described X, Y, Z-direction voice coil motor 8,9,10 are cylinder type voice coil motor or plate voice coil motor.
Described X-direction air-float guide rail 29 and Y-direction air-float guide rail 30 are single rail structure or two guide rail structure.
Described X, Y, Z- direction displacement transducer 11,12,13 are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z- direction limit switch 14,15,16 are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Described piston cylinder 5 interior gas pressures are 0.1MPa～0.8MPa.
Provide one embodiment of the present of invention below in conjunction with Fig. 1～Fig. 5, Fig. 7.In the present embodiment, the pedestal of lower installation board 2 and ground, instrument or basic framework etc. are rigidly connected during vibration isolator work, and upper mounting plate 1 is rigidly connected with load or platform.X, Y, Z-direction voice coil motor 8,9,10 all adopt the cylinder type voice coil motor.Take X-direction voice coil motor 8 as example, it mainly is comprised of X-direction motor iron yoke 8a, X-direction magnetic steel of motor 8b, X-direction motor coil skeleton 8c, X-direction motor coil 8d.X-direction motor iron yoke 8a and X-direction motor coil skeleton 8c are cylindrical shape, and X-direction magnetic steel of motor 8b is cylindrical, and X-direction motor coil 8d is around on the X-direction motor coil skeleton 8c.X-direction motor iron yoke 8a and X-direction magnetic steel of motor 8b consist of motor stator, and X-direction motor coil skeleton 8c and X-direction motor coil 8d consist of electric mover.In the Z-direction voice coil motor 10, Z-direction motor transitional spare 10e provides the mounting structure of Z-direction motor coil skeleton 10c.Pass to electric current during machine operation in the coil, according to electromagnetic theory, hot-wire coil can be subject to the Lorentz force effect in magnetic field, can control the size and Orientation of motor output drive strength by the size and Orientation of control electric current.
X, Y, Z- direction displacement transducer 11,12,13 adopt grating scale.Take Z-direction displacement transducer 13 as example, it mainly comprises the parts such as Z-direction grating reading head transition piece 13a, Z-direction grating reading head 13b and Z-direction glass raster chi 13c.Z-direction grating reading head transition piece 13a provides the mounting structure of Z-direction grating reading head 13b.In grating scale when work,, Z-direction grating reading head 13b can detect the relative displacement of itself and Z-direction glass raster chi 13c, and gives controller 19 by signal conductor.
X, Y, Z- direction limit switch 14,15,16 adopt the Hall-type limit switch.Take Z-direction limit switch 16 as example, it mainly comprises the parts such as Z-direction limiting stopper 16a, Z-direction Hall switch 16b and Z-direction limit switch transition piece 16c.Two Z-direction Hall switch 16b install back-to-back, and two Z-direction limiting stopper 16a are metallic material, with relative installation of sensitivity end of Z-direction Hall switch 16b.Z-direction limit switch transition piece 16c provides the mounting structure of Z-direction Hall switch 16b.In limit switch when work,, as Z-direction Hall switch 16b during near Z-direction limiting stopper 16a, Z-direction Hall switch 16b provides limit signal, and gives controller 19 by signal conductor.
In the present embodiment, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed between piston cylinder 5 and the sleeve 6, and are installed in piston cylinder 5 inside.
Vibration isolator is realized in the following way to the carrying of load: clean compressed gas source 3 by tracheae 26, through solenoid valve 18, suction port 23 to piston cylinder 5 interior conveying clean compressed airs.Controller 19 is according to the feedback signal of gas pressure sensor 17, the aperture of control solenoid valve 18, adjusting is input to the gas flow in the piston cylinder 5, thereby the pressure of regulating piston cylinder 5 interior clean compressed airs, make active force and load, the piston cylinder 5 that clean compressed air makes progress to piston cylinder 5 and the gravity that loads on other component on the piston cylinder 5 balance each other the gravity compensation of realizing ideal and zero stiffness vibration isolating effect.
In the present embodiment, the pressure of piston cylinder 5 interior clean compressed airs is 0.4Mpa, and the effective radius of piston cylinder 5 lower surfaces is 100mm, and then the quality of single vibration isolator carrying is: m=p * π r
2/ g ≈ 1282kg, wherein p is gas pressure, and p=0.4Mpa, r are the effective radius of piston cylinder 5 lower surfaces, and r=100mm, g are gravity accleration, g=9.8m/m
2
Fig. 2 provides a kind of mode of execution of arthrodia bearing.Arthrodia bearing 7 mainly is comprised of bearing support 7a and bearing support 7b, it is secondary that protruding sphere on concave spherical surface on the bearing support 7b and the bearing support 7a consists of sliding movement, adopt the liquid or solid oiling agent to be lubricated, the angular motion degrees of freedom between the upper and lower mounting plate 1,2 is carried out decoupling zero.
Fig. 6 provides the another kind of mode of execution of arthrodia bearing.Have protruding sphere on the bearing support 7b, and the formation of the concave spherical surface on bearing support 7a sliding movement is secondary, adopts the liquid or solid oiling agent to be lubricated, the angular motion degrees of freedom between the upper and lower mounting plate 1,2 is carried out decoupling zero.
Fig. 8 provides an embodiment of cylinder air bearing surface throttle orifice on the piston cylinder.In the present embodiment, uniform two arrange cylinder air bearing surface throttle orifices 25 in the circumferential direction of the circle on piston cylinder 5 sidewalls, the quantity of every row's cylinder air bearing surface throttle orifice 25 is 8, and diameter is φ 0.2mm.
Claims (8)
1. the floating vibration isolator of the magnetic of a coplanar air supporting crossing decoupling and the decoupling zero of arthrodia bearing angle, by upper mounting plate (1), lower installation board (2), clean compressed gas source (3), tracheae (26) and vibration isolator main body (4) form, vibration isolator main body (4) is installed between upper mounting plate (1) and the lower installation board (2), clean compressed gas source (3) is connected with vibration isolator main body (4) by tracheae (26), it is characterized in that: the structure of described vibration isolator main body (4) is lower surface and lower installation board (2) lubricated and support by the floating thrust-bearing (24) of magnetic of sleeve (6), piston cylinder (5) back-off is installed in the sleeve (6), and with sleeve (6) by radially carry cylinder air bearing surface (22) lubricated with support, arthrodia bearing (7) is installed between piston cylinder (5) and the upper mounting plate (1), sleeve (6) lubricates and guiding by X-direction guide rail air bearing surface (31) with X-direction air-float guide rail (29), X-direction air-float guide rail (29) and lower installation board (2) lubricated and support by Z-direction bearing air-float face (33), Y-direction air-float guide rail (30) is rigidly connected with lower installation board (2), and the two ends of X-direction air-float guide rail (29) and Y-direction air-float guide rail (30) be lubricated and guiding by Y-direction guide rail air bearing surface (32); Z-direction voice coil motor (10), Z-direction displacement transducer (13) and Z-direction limit switch (16) are installed between piston cylinder (5) and the sleeve (6), X-direction voice coil motor (8), X-direction displacement transducer (11), X-direction limit switch (14) and Y-direction voice coil motor (9), Y-direction displacement transducer (12), Y-direction limit switch (15) is installed between sleeve (6) and the lower installation board (2), the driving force direction of Z-direction voice coil motor (10) is vertical direction, the driving force direction of X-direction voice coil motor (8) and Y-direction voice coil motor (9) in horizontal plane and mutually vertical, X, Y, Z-direction displacement transducer (11,12,13) and X, Y, Z-direction limit switch (14,15,16) line of action direction and X, Y, Z-direction voice coil motor (8,9,10) driving force direction is consistent; X, Y, Z-direction displacement transducer (11,12,13) are connected Y, Z-direction limit switch (14,15,16) and are connected with the signal input part of controller (19) respectively with X, the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with X, Y, Z-direction voice coil motor (8,9,10) respectively.
2. the magnetic of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle floats vibration isolator, it is characterized in that: be provided with gas pressure sensor (17) in the described piston cylinder (5), piston cylinder (5) is provided with suction port (23) and solenoid valve (18), gas pressure sensor (17) is connected with the signal input part of controller (19), and the signal output part of driver (20) is connected with solenoid valve (18).
3. the magnetic of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle floats vibration isolator, it is characterized in that: the configuration mode that described magnetic floats thrust-bearing (24) is to be provided with permanent magnet (24a) at sleeve (6) bottom surface sidewall, at the relatively equipped electromagnetic coil (24b) of lower installation board upper surface sidewall, it is 0.01mm～1mm that magnetic floats gap (21) thickness.
4. the magnetic of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle floats vibration isolator, and it is characterized in that: described X, Y, Z-direction voice coil motor (8,9,10) are cylinder type voice coil motor or plate voice coil motor.
5. the magnetic of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle floats vibration isolator, and it is characterized in that: described X-direction air-float guide rail (29) and Y-direction air-float guide rail (30) are single rail structure or two guide rail structure.
6. the magnetic of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle floats vibration isolator, it is characterized in that: described X, Y, Z-direction displacement transducer (11,12,13) are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
7. the magnetic of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle floats vibration isolator, and it is characterized in that: described X, Y, Z-direction limit switch (14,15,16) are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
8. the magnetic of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of arthrodia bearing angle floats vibration isolator, and it is characterized in that: the interior gas pressure of described piston cylinder (5) is 0.1MPa～0.8MPa.
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| CN201210574732.2A CN103047348B (en) | 2012-12-19 | 2012-12-19 | Magnetic suspension vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of sliding joint bearing |
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