CN103062315A - Coplane air floatation orthogonal decoupling and flexible membrane angle decoupling eddy-current damping vibration isolator - Google Patents
Coplane air floatation orthogonal decoupling and flexible membrane angle decoupling eddy-current damping vibration isolator Download PDFInfo
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- CN103062315A CN103062315A CN2012105758276A CN201210575827A CN103062315A CN 103062315 A CN103062315 A CN 103062315A CN 2012105758276 A CN2012105758276 A CN 2012105758276A CN 201210575827 A CN201210575827 A CN 201210575827A CN 103062315 A CN103062315 A CN 103062315A
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- 239000012528 membrane Substances 0.000 title claims abstract description 50
- 238000013016 damping Methods 0.000 title claims abstract description 26
- 238000006073 displacement reaction Methods 0.000 claims abstract description 31
- 230000005291 magnetic effect Effects 0.000 claims description 16
- 238000003825 pressing Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 9
- 229920001971 elastomer Polymers 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 5
- 230000009471 action Effects 0.000 claims description 3
- 239000003302 ferromagnetic material Substances 0.000 claims description 3
- 238000005461 lubrication Methods 0.000 claims 1
- 238000002955 isolation Methods 0.000 abstract description 12
- 238000001459 lithography Methods 0.000 abstract description 5
- 238000005516 engineering process Methods 0.000 abstract description 3
- 238000009434 installation Methods 0.000 description 22
- 238000000034 method Methods 0.000 description 12
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 10
- 230000007704 transition Effects 0.000 description 9
- 230000008569 process Effects 0.000 description 8
- 229910000831 Steel Inorganic materials 0.000 description 6
- 230000005484 gravity Effects 0.000 description 6
- 239000010959 steel Substances 0.000 description 6
- 239000006096 absorbing agent Substances 0.000 description 5
- 229910052742 iron Inorganic materials 0.000 description 5
- 238000001259 photo etching Methods 0.000 description 5
- 230000035939 shock Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241000486406 Trachea Species 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 210000003437 trachea Anatomy 0.000 description 1
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Abstract
共面气浮正交解耦与柔性膜角度解耦的电涡流阻尼隔振器属于精密隔振技术领域，隔振器主体的套筒与下安装板之间通过气浮面进行润滑与支撑，通过电涡流阻尼器衰减振动能量、提高定位稳定性，上、下安装板之间的水平直线运动自由度通过共面正交气浮导轨进行解耦，二者之间的角运动自由度通过柔性膜进行解耦，音圈电机、位移传感器、限位开关和控制器、驱动器构成位置闭环反馈控制系统，对上、下安装板的相对位置进行精确控制；本发明具有三维零刚度、高定位精度、直线运动与角运动自由度充分解耦的特性，可有效解决超精密测量仪器与加工装备、尤其是步进扫描光刻机中的高性能隔振问题。
The eddy current damping vibration isolator with coplanar air bearing orthogonal decoupling and flexible membrane angle decoupling belongs to the field of precision vibration isolation technology. The sleeve of the main body of the vibration isolator and the lower mounting plate are lubricated and supported by the air bearing surface. The eddy current damper attenuates vibration energy and improves positioning stability. The degree of freedom of horizontal linear motion between the upper and lower mounting plates is decoupled through coplanar orthogonal air bearing guide rails, and the degree of freedom of angular motion between the two is through the flexible membrane. Decoupling, the voice coil motor, displacement sensor, limit switch, controller, and driver constitute a position closed-loop feedback control system to precisely control the relative position of the upper and lower mounting plates; the invention has three-dimensional zero stiffness, high positioning accuracy, The characteristics of fully decoupling the degrees of freedom of linear motion and angular motion can effectively solve the problem of high-performance vibration isolation in ultra-precision measuring instruments and processing equipment, especially in step-and-scan lithography machines.
Description
Technical field
The invention belongs to the accurate vibration isolation technical field, relate generally to the eddy-current damping vibration isolator of a kind of coplanar air supporting crossing decoupling and the decoupling zero of flexible membrane angle.
Background technique
Along with improving constantly of ultraprecise processing and measuring accuracy, ambient vibration becomes the key factor that restriction ultraprecise process unit and surveying instrument precision and performance improve.Especially step-by-step scanning photo-etching device is the vlsi circuit process unit of representative, technology-intensive degree and complexity are high, key technical index has all reached the limit of prior art, represented the highest level of ultraprecise process unit, the ultraprecise vibration isolation becomes the core key technology in this type of equipment; The live width of step-by-step scanning photo-etching device has reached 22nm and following, silicon chip Location accuracy and alignment precision all reach several nanometers, and the work stage movement velocity reaches more than the 1m/s, and the work stage acceleration reaches tens times of gravity accleration, and this has proposed new challenge to existing vibration isolation technique.At first, lithography machine need to provide for metering system and photoetched object lens the working environment of " super quiet ", simultaneously again the demand motive work stage at full speed with High acceleration motion, this anti-vibration performance to vibrating isolation system has proposed extremely harsh requirement, and the natural frequency of its three directions all needs to reach below the 1Hz; Secondly, relative position between each parts of lithography machine, the distance of photoetched object lens and silicon chip surface for example, all has very strict requirement, and be under the control of position closed loop feedback control system, require the relative positional accuracy between the upper and lower mounting plate of vibration isolator to reach 10 μ m magnitudes, the Location accuracy of traditional vibration isolator can not meet the demands far away.
According to theory of vibration isolation, the natural frequency of passive type vibration isolator is directly proportional with rigidity, is inversely proportional to load quality, therefore under the certain prerequisite of load quality, the rigidity that reduces vibration isolator is the effective way that reduces natural frequency, improves low frequency and superlow frequency vibration isolating performance.There are the intrinsic contradictions of static bearing capacity and rigidity in the vibration isolator of the forms such as conventional air spring, restricted by the factors such as material behavior, structural rigidity, and it is very difficult to rigidity further to reduce its rigidity, especially level.For this problem, the researcher is incorporated into " pendulum " formula structure in the air cushion shock absorber, reaches purpose (the 1.Nikon Corporation.Vibration Isolator With Low Lateral Stiffness. U.S. Patent Publication No.: US20040065517A1 that reduces the vibration isolator horizontal rigidity; 2.U.S.Philips Corporation.Positioning Device with a Force Actuator Systemfor Compensating Center-of-gravity Displacements, and Lithographic Device Provided with Such APositioning Device. U.S. Patent number: US005844664A).The method can reduce the horizontal rigidity of air cushion shock absorber to a certain extent, promotes its low frequency vibration isolation performance.The problem that the method exists is: restricted by material behavior and structural rigidity, vibration isolator is vertical limited to the amplitude of stiffness degradation with level; 2) the vertical and level of air cushion shock absorber is all very poor to Location accuracy, can't satisfy the requirement of photoetching process; 3) will reach lower horizontal rigidity needs larger pendulum length, causes the vibration isolator height excessive, the string membrane resonance occurs easily, poor stability.
By to the analysis of existing air cushion shock absorber technological scheme as seen, existing air cushion shock absorber is difficult to satisfy lithography machine to the requirement of ultralow rigidity and high position precision.Germany IDE company has proposed a kind of vibration isolator technological scheme (1.Integrated Dynamics Engineering GmbH.Isolatorgeometrie EinesSchwingungsisolationssystem. european patent number: EP1803965A2 of abandoning tradition rubber air spring; 2.Integrated Dynamics EngineeringGmbH.Schwingungsisolationssystem Mit Pneumatischem Tiefpassfilter. european patent number: EP 1803970A2; 3.Integrated Dynamics Engineering GmbH.Air Bearing with Consideration ofHigh-Frequency Resonances. U.S. Patent Publication No.: US20080193061A1).This scheme adopts vertical and level is carried out decoupling zero and vibration isolation to air bearing surface to the vibration of all directions, can reach extremely low rigidity and natural frequency.The problem that this scheme exists is: 1) in the public technology scheme, vibration isolator can't be realized accurate location; 2) among the patent EP1803965A2, do not have the angular motion degrees of freedom around horizontal rotational shaft between the upper and lower mounting plate, the angular rigidity of this direction and natural frequency are all very high; Patent EP1803970A2 and US20080193061A1 adopt block rubber to provide angular motion degrees of freedom around horizontal rotational shaft for upper and lower mounting plate, but because the block rubber angular rigidity is very large, can't effectively carry out the angular motion freedom decoupling, there is frictional force between the angular motion freedom decoupling mechanism components and introduces additional stiffness, restriction anti-vibration performance.
Holland ASML company has also proposed similar vibration isolator technological scheme (1.U.S.Philips Corp, ASM LithographyB.V.Pneumatic Support Device with A Controlled Gas Supply, and Lithographic Device Providedwith Such A Support Device. U.S. Patent number: US006144442A; 2.Koninklijke Philips ElectronicsN.V., ASM Lithography B.V.Lithographic Pneumatic Support Device with Controlled Gas Supply. International Patent Publication No.: WO99/22272; 3.ASML Netherlands B.V.Support Device, LithographicApparatus, and Device Manufacturing Method Employing A Supporting Device, and A PositionControl System Arranged for Use in A Supporting Device. U.S. Patent number: US007084956B2; 4.ASML Netherlands B.V.Support Device, Lithographic Apparatus, and Device ManufacturingMethod Employing A Supporting Device and A Position Control System Arranged for Use in ASupporting Device. european patent number: EP1486825A1).Among patent US006144442A and the WO99/22272 bleed pressure is carried out closed-loop feedback control, reach the stability of raising vibration isolator and the purpose of performance; Be provided with vibration transducer at upper mounting plate among patent US007084956B2 and the EP1486825A1, introduce simultaneously with reference to vibration system, promote the anti-vibration performance of vibration isolator by control algorithm.But the technological scheme that proposes still do not solve the accurate location of vibration isolator and the angular motion freedom decoupling problem of upper and lower mounting plate.
Summary of the invention
The objective of the invention is for ultra precise measurement instrument and process unit, especially the vlsi circuit process unit such as step-by-step scanning photo-etching device is to the low natural frequency of vibration isolator, the an urgent demand of high position precision, the eddy-current damping vibration isolator of a kind of coplanar air supporting crossing decoupling and the decoupling zero of flexible membrane angle is provided, vibration isolator has three-dimensional ultralow rigidity, ultralow natural frequency, on, can accurately locate and the 3 d-line freedom of movement between the lower installation board, the abundant decoupling zero of angular motion degrees of freedom can effectively solve ultra precise measurement instrument and process unit, especially the accurate vibration isolation problem in the step-by-step scanning photo-etching device.
Technical solution of the present invention is:
The eddy-current damping vibration isolator of a kind of coplanar air supporting crossing decoupling and the decoupling zero of flexible membrane angle, by upper mounting plate, lower installation board, clean compressed gas source, tracheae and vibration isolator main body form, the vibration isolator main body is installed between upper mounting plate and the lower installation board, clean compressed gas source is connected with the vibration isolator main body by tracheae, in the structure of described vibration isolator main body, the lower surface of sleeve and lower installation board be lubricated and support by axial carrying plane air bearing surface, flexible membrane is installed in the upper end of sleeve, and by trim ring compression and sealing, the top board of pressing plate assembly is relative with press table to be fitted in the upper of flexible membrane, lower surface, and clamping flexible membrane, upper surface and the upper mounting plate of top board are rigidly connected, sleeve and X-direction air-float guide rail be lubricated and guiding by X-direction guide rail air bearing surface, X-direction air-float guide rail and lower installation board be lubricated and support by Z-direction bearing air-float face, Y-direction air-float guide rail and lower installation board are rigidly connected, and the two ends of X-direction air-float guide rail and Y-direction air-float guide rail be lubricated and guiding by Y-direction guide rail air bearing surface; Z-direction voice coil motor, Z-direction displacement transducer and Z-direction limit switch are installed between pressing plate assembly and the sleeve, and X-direction voice coil motor, X-direction displacement transducer, X-direction limit switch, X-direction eddy current damper and Y-direction voice coil motor, Y-direction displacement transducer, Y-direction limit switch, Y-direction eddy current damper are installed between sleeve and the lower installation board; The driving force direction of Z-direction voice coil motor is vertical direction, the driving force direction of X-direction voice coil motor and Y-direction voice coil motor is in horizontal plane and mutually vertical, the line of action direction of X, Y, Z-direction displacement transducer and X, Y, Z-direction limit switch is consistent with the driving force direction of X, Y, Z-direction voice coil motor, and the damping force direction of X, the Y-direction eddy current damper respectively driving force direction with X, Y-direction voice coil motor is consistent; X, Y, Z-direction displacement transducer are connected Y, Z-direction limit switch and are connected with the signal input part of controller respectively with X, the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with X, Y, Z-direction voice coil motor respectively.
The X-direction permanent magnet that described X-direction eddy current damper is installed along X-direction voice coil motor driving force direction by sleeve lower surface sidewall consists of, the Y-direction permanent magnet that the Y-direction eddy current damper is installed along Y-direction voice coil motor driving force direction by sleeve lower surface sidewall consists of, the pole orientation of X, Y-direction permanent magnet is perpendicular to the lower surface of sleeve, and N, the S utmost point are alternately arranged, sleeve adopts ferromagnetic material, and lower installation board adopts non-magnetic good conductor material.
Be provided with gas pressure sensor in the described sleeve, sleeve is provided with suction port and solenoid valve, gas pressure sensor is connected with the signal input part of controller, and the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with solenoid valve.
Described X, Y, Z-direction voice coil motor are cylinder type voice coil motor or plate voice coil motor.
Described X-direction air-float guide rail and Y-direction air-float guide rail are single rail structure or two guide rail structure.
Described X, Y, Z-direction displacement transducer are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Described flexible membrane is rubber membrane.
Gas pressure is 0.1MPa～0.8MPa in the described sleeve.
The air-film thickness of described axial carrying plane air bearing surface, X-direction guide rail air bearing surface, Y-direction guide rail air bearing surface and Z-direction bearing air-float face is 10 μ m～20 μ m.
The good result of technological innovation of the present invention and generation is:
(1) the present invention adopts axial carrying plane air bearing surface that Horizontal Vibration is isolated, air bearing surface is approximately zero without friction, rigidity, can make vibration isolator obtain substantially horizontal approximate zero stiffness characteristics and outstanding superlow frequency vibration isolating performance, having solved prior art limited by structural rigidity, material behavior, the vibration isolator horizontal rigidity is difficult to further reduction, rigidity and the stable problem that can not take into account.This is that the present invention is different from one of innovative point of prior art.
(2) the present invention adopts displacement transducer, limit switch, controller, driver and voice coil motor etc. to consist of the position closed loop feedback control system of vertical direction and substantially horizontal, relative position between the upper and lower mounting plate is accurately controlled, Location accuracy can reach 10 μ m levels and more than, the problem that can solve effectively that prior art scheme Location accuracy is low, Location accuracy and rigidity, anti-vibration performance can not be taken into account.This is two of the present invention's innovative point of being different from prior art.
(3) the present invention adopts coplanar quadrature air-float guide rail that the horizontal rectilinear motion degrees of freedom between the upper and lower mounting plate of vibration isolator is carried out decoupling zero, air-float guide rail is without friction and wear, do not introduce additional stiffness, decoupling zero is effective, can make vibration isolator obtain high position precision and substantially horizontal zero stiffness characteristic; Adopt flexible membrane diagonal motion degrees of freedom to carry out decoupling zero, it is less to introduce additional angular rigidity, and the technological scheme that can effectively solve the decoupling zero of existing employing elastomer is introduced the problem of larger additional stiffness.This is three of the present invention's innovative point of being different from prior art.
(4) the present invention adopts gas pressure sensor, solenoid valve and controller, driver to consist of the pressure closed loop feedback control system, accurately the gas pressure in the control sleeve makes it to keep constant, thrust load to vibration isolator is carried out gravitational equilibrium and compensation, near the flexible membrane rigidity equilibrium position is approximately zero, the upper and lower pressing plate of carry load gravity and upper mounting plate can ultralow rigidity slide up and down, thus the gravity compensation of realizing ideal and zero stiffness vibration isolating effect.This is four of the present invention's innovative point of being different from prior art.
(5) the present invention adopts active actuators that the relative position between the upper and lower mounting plate is carried out ACTIVE CONTROL, the vibration isolator parameter can be according to being changed in real time adjusting by vibration isolation features of the object and working environment, thereby adapt to different operating modes, have preferably flexibility, adaptability and stability.This is five of the present invention's innovative point of being different from prior art.
(6) the present invention adopts the eddy current damper that replaces permanent magnet array based on magnetic pole, can be integrated in one with vibration isolator well, eddy current damper has comparatively ideal linear damping characteristic, but the effective attenuation vibrational energy, reduce the overshoot of motor driving location, the stability of vibration isolator is provided.This is six of the present invention's innovative point of being different from prior art.
Description of drawings
Fig. 1 is the structural representation of the eddy-current damping vibration isolator of removing coplanar air supporting crossing decoupling behind the upper mounting plate and the decoupling zero of flexible membrane angle;
Fig. 2 is the cross-sectional view of the eddy-current damping vibration isolator of coplanar air supporting crossing decoupling and the decoupling zero of flexible membrane angle;
Fig. 3 is the schematic representation of axial carrying plane air bearing surface, X-direction guide rail air bearing surface and Z-direction bearing air-float face;
Fig. 4 is the schematic representation of Y-direction guide rail air bearing surface;
Fig. 5 is the tube-in-tube structure schematic representation;
Fig. 6 is the control structure block diagram of the eddy-current damping vibration isolator of coplanar air supporting crossing decoupling and the decoupling zero of flexible membrane angle;
Fig. 7 is the schematic representation of air bearing surface throttle orifice in plane on the sleeve;
Fig. 8 is the cross-sectional view of eddy current damper;
Fig. 9 is that X, Y-direction permanent magnet are at a kind of mounting type schematic representation of sleeve lower surface sidewall;
Figure 10 is that X, Y-direction permanent magnet are at the another kind of mounting type schematic representation of sleeve lower surface sidewall.
Piece number explanation among the figure: 1 upper mounting plate, 2 lower installation boards, 3 clean compressed gas sources, 4 vibration isolator main bodys, 5 flexible membranes, 6 sleeves, 7 pressing plate assemblies, the 7a top board, the 7b press table, 8X is to voice coil motor, 8a X-direction motor iron yoke, 8b X-direction magnetic steel of motor, 8c X-direction motor coil skeleton, 8d X-direction motor coil, 9Y is to voice coil motor, 10Z is to voice coil motor, 10a Z-direction motor iron yoke, 10b Z-direction magnetic steel of motor, 10c Z-direction motor coil skeleton, 10d Z-direction motor coil, 10e Z-direction motor transitional spare, 11X is to displacement transducer, 11a X-direction grating reading head transition piece, 11b X-direction grating reading head, 11c X-direction glass raster chi, 12Y is to displacement transducer, 13Z is to displacement transducer, 13a Z-direction grating reading head transition piece, 13b Z-direction grating reading head, 13c Z-direction glass raster chi, 14X is to limit switch, 14a X-direction limiting stopper, 14b X-direction Hall switch, 14c X-direction limit switch transition piece, 14d X-direction limiting stopper transition piece, 15Y is to limit switch, 16Z is to limit switch, 16aZ is to limiting stopper, 16b Z-direction Hall switch, 16c Z-direction limit switch transition piece, 17 gas pressure sensors, 18 solenoid valves, 19 controllers, 20 drivers, 21 axial carrying plane air bearing surface, 22 trim rings, 23 suction ports, 24 plane air bearing surface throttle orifices, 26 tracheaes, 29X is to air-float guide rail, 30Y is to air-float guide rail, 31X direction guiding rail air bearing surface, 32Y direction guiding rail air bearing surface, 33Z is to the bearing air-float face, 40X is to eddy current damper, 40AX is to permanent magnet, 41Y is to eddy current damper, 41AY is to permanent magnet.
Embodiment
Provide specific embodiments of the invention below in conjunction with accompanying drawing.
The eddy-current damping vibration isolator of a kind of coplanar air supporting crossing decoupling and the decoupling zero of flexible membrane angle, by upper mounting plate 1, lower installation board 2, clean compressed gas source 3, tracheae 26 and vibration isolator main body 4 form, vibration isolator main body 4 is installed between upper mounting plate 1 and the lower installation board 2, clean compressed gas source 3 is connected with vibration isolator main body 4 by tracheae 26, in the structure of described vibration isolator main body 4, the lower surface of sleeve 6 and lower installation board 2 are by the 21 lubricated and supports of axial carrying plane air bearing surface, flexible membrane 5 is installed in the upper end of sleeve 6, and by trim ring 22 compressions and sealing, the top board 7a of pressing plate assembly 7 is relative with press table 7b to be fitted in the upper of flexible membrane 5, lower surface, and clamping flexible membrane 5, the upper surface of top board 7a and upper mounting plate 1 are rigidly connected, sleeve 6 lubricates and guiding by X-direction guide rail air bearing surface 31 with X-direction air-float guide rail 29, X-direction air-float guide rail 29 lubricates by Z-direction bearing air-float face 33 with lower installation board 2 and supports, Y-direction air-float guide rail 30 is rigidly connected with lower installation board 2, and the two ends of X-direction air-float guide rail 29 and Y-direction air-float guide rail 30 are by Y-direction guide rail air bearing surface 32 lubricated and guiding; Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed between pressing plate assembly 7 and the sleeve 6, and X-direction voice coil motor 8, X-direction displacement transducer 11, X-direction limit switch 14, X-direction eddy current damper 40 and Y-direction voice coil motor 9, Y-direction displacement transducer 12, Y-direction limit switch 15, Y-direction eddy current damper 41 are installed between sleeve 6 and the lower installation board 2; The driving force direction of Z-direction voice coil motor 10 is vertical direction, the driving force direction of X-direction voice coil motor 8 and Y-direction voice coil motor 9 is in horizontal plane and mutually vertical, X, Y, Z- direction displacement transducer 11,12,13 consistent with X, Y, Z- direction limit switch 14,15,16 line of action direction and X, Y, Z-direction voice coil motor 8,9,10 driving force direction, X, Y-direction eddy current damper 40,41 damping force direction are consistent with X, Y-direction voice coil motor 8,9 driving force direction respectively; X, Y, Z- direction displacement transducer 11,12,13 are connected Y, Z- direction limit switch 14,15,16 and are connected with the signal input part of controller 19 respectively with X, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with X, Y, Z-direction voice coil motor 8,9,10 respectively.
X, Y, Z- direction displacement transducer 11,12,13 pairs of X, Y, Z-direction voice coil motor 8,9,10 displacements of exporting are measured, and X, Y, Z- direction limit switch 14,15,16 pairs of X, Y, Z-direction voice coil motor 8,9,10 strokes that move limit; Controller 19 is according to X, Y, Z- direction displacement transducer 11,12,13 and X, Y, Z- direction limit switch 14,15,16 feedback signal, and the relative position between control X, Y, Z-direction voice coil motor 8,9, the 10 pairs of upper and lower mounting plates 1,2 is accurately controlled.
The X-direction permanent magnet 40A that described X-direction eddy current damper 40 is installed along X-direction voice coil motor 8 driving force directions by sleeve 6 lower surface sidewalls consists of, the Y-direction permanent magnet 41A that Y-direction eddy current damper 41 is installed along Y-direction voice coil motor 9 driving force directions by sleeve 6 lower surface sidewalls consists of, the pole orientation of X, Y-direction permanent magnet 40A, 41A is perpendicular to the lower surface of sleeve 6, and N, the S utmost point are alternately arranged, sleeve 6 adopts ferromagnetic material, and lower installation board 2 adopts non-magnetic good conductor material.
Be provided with gas pressure sensor 17 in the described sleeve 6, sleeve 6 is provided with suction port 23 and solenoid valve 18, gas pressure sensor 17 is connected with the signal input part of controller 19, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with solenoid valve 18.
Described X, Y, Z-direction voice coil motor 8,9,10 are cylinder type voice coil motor or plate voice coil motor.
Described X-direction air-float guide rail 29 and Y-direction air-float guide rail 30 are single rail structure or two guide rail structure.
Described X, Y, Z- direction displacement transducer 11,12,13 are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z- direction limit switch 14,15,16 are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Described flexible membrane 5 is rubber membrane.
Described sleeve 6 interior gas pressures are 0.1MPa～0.8MPa.
The air-film thickness of described axial carrying plane air bearing surface 21, X-direction guide rail air bearing surface 31, Y-direction guide rail air bearing surface 32 and Z-direction bearing air-float face 33 is 10 μ m～20 μ m.
The diameter of the plane air bearing surface throttle orifice 24 on the described sleeve 6 is φ 0.1mm～φ 1mm.
Provide one embodiment of the present of invention below in conjunction with Fig. 1～Fig. 6.In the present embodiment, in vibration isolator when work,, lower installation board 2 is installed on the pedestal or basic framework of ground, instrument, upper mounting plate 1 be connected by the load of vibration isolation.X, Y, Z-direction voice coil motor 8,9,10 all adopt the cylinder type voice coil motor.Take X-direction voice coil motor 8 as example, it mainly comprises X-direction motor iron yoke 8a, X-direction magnetic steel of motor 8b, X-direction motor coil skeleton 8c, X-direction motor coil 8d.X-direction motor iron yoke 8a and X-direction motor coil skeleton 8c are cylindrical shape, and X-direction magnetic steel of motor 8b is cylindrical, and X-direction motor coil 8d is around on the X-direction motor coil skeleton 8c.X-direction motor iron yoke 8a and X-direction magnetic steel of motor 8b consist of the stator of motor, and X-direction motor coil skeleton 8c and X-direction motor coil 8d consist of the mover of motor.In the Z-direction voice coil motor 10, Z-direction motor transitional spare 10e provides the mounting structure of Z-direction motor coil skeleton 10c.Pass to electric current during machine operation in the coil, according to electromagnetic theory, hot-wire coil can be subject to the effect of voice coil loudspeaker voice coil power in magnetic field, can control the size and Orientation of motor output drive strength by the size and Orientation of control electric current.
In the present embodiment, flexible membrane 5, trim ring 22 with the mounting type of sleeve 6 is: thread mill drilling along the circumferential direction on sleeve 6, on trim ring 22, flexible membrane 5, along the circumferential direction process through hole, adopt screw that trim ring 22 is compressed flexible membranes 5 and be assemblied on the sleeve 6, utilize the elasticity of flexible membrane 5 materials to play the effect of sealing.The mounting type of top board 7a, press table 7b and flexible membrane 5 is similar with it.
X, Y, Z- direction displacement transducer 11,12,13 adopt grating scale.Take Z-direction displacement transducer 13 as example, it mainly comprises the parts such as Z-direction grating reading head transition piece 13a, Z-direction grating reading head 13b and Z-direction glass raster chi 13c, and Z-direction grating reading head transition piece 13a provides the mounting structure of Z-direction grating reading head 13b.In grating scale when work,, Z-direction grating reading head 13b can detect the relative displacement of itself and Z-direction glass raster chi 13c, and gives controller 19 by signal conductor.
X, Y, Z- direction limit switch 14,15,16 adopt the Hall-type limit switch.Take Z-direction limit switch 16 as example, it mainly comprises the parts such as Z-direction limiting stopper 16a, Z-direction Hall switch 16b and Z-direction limit switch transition piece 16c.Two Z-direction Hall switch 16b install back-to-back, and two Z-direction limiting stopper 16a are metallic material, with relative installation of sensitivity end of Z-direction Hall switch 16b.Z-direction limit switch transition piece 16c provides the mounting structure of Z-direction Hall switch 16b.In limit switch when work,, as Z-direction Hall switch 16b during near Z-direction limiting stopper 16a, Z-direction Hall switch 16b provides limit signal, and gives controller 19 by signal conductor.
In the present embodiment, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed in the inside of sleeve 6.
Vibration isolator is realized in the following way to the carrying of load: clean compressed gas source 3 by tracheae 26, through solenoid valve 18, suction port 23 to sleeve 6 interior conveying clean compressed airs.Controller 19 is according to the feedback signal of gas pressure sensor 17, the aperture of control solenoid valve 18, adjusting is input to the gas flow in the sleeve 6, thereby the pressure of regulating sleeve 6 interior clean compressed airs balances each other the gravity of active force that clean compressed air makes progress to pressing plate assembly 7 and flexible membrane 5 and load and pressing plate assembly 7, the gravity that loads on other component on the pressing plate assembly 7.In the equilibrium position of flexible membrane 5, the vertical stiffness of flexible membrane 5 is approximately zero, and lateral stiffness is then very large with respect to the lateral stiffness of axial carrying air bearing surface 21.Therefore, sleeve 6 can vertically move up and down with approximate zero rigidity near the equilibrium position of flexible membrane 5, thereby has outstanding superlow frequency vibration isolating performance.
In the present embodiment, the pressure of sleeve 6 interior clean compressed airs is 0.4Mpa, and the effective radius of press table 7b and flexible membrane 5 lower surfaces is 100mm, and then the quality of single vibration isolator carrying is: m=p * π r
2/ g ≈ 1282kg, wherein p is gas pressure, and p=0.4Mpa, r are the effective radius of press table 7b and flexible membrane 5 lower surfaces, and r=100mm, g are gravity accleration, g=9.8m/m
2
Fig. 7 provides an embodiment of air bearing surface throttle orifice in plane on the sleeve.In the present embodiment, sleeve 6 lower surfaces center on along the circumferential direction uniform 8 plane air bearing surface throttle orifices 24 of the center of circle, and diameter is φ 0.2mm.
Provide an embodiment of eddy current damper below in conjunction with Fig. 8, Fig. 9.In the present embodiment, vibration isolator has two X-direction eddy current dampers 40, two Y-direction eddy current dampers 41, consisted of by the X that is installed in sleeve 6 lower surface sidewalls, Y-direction permanent magnet 40A, 41A array respectively, sleeve 6 adopts No. 45 Steel materials, have higher permeability, lower installation board 2 adopts the red copper materials, not magnetic conduction and have high conductivity.X, Y-direction permanent magnet 40A, 41A are elongate in shape, arrange along X, Y-direction voice coil motor 8,9 driving force direction respectively, and pole orientation is perpendicular to the lower surface of sleeve 6, and N, the S utmost point alternately arrange.When sleeve 6 produces relative movement with lower installation board 2, lower installation board 2 cutting magnetic lines and produce electric convolution and damping force, X, Y-direction damping force are directly proportional with X, the Y-direction speed of related movement of lower installation board 2 with sleeve 6, direction and X, Y-direction voice coil motor 8,9 driving force direction are consistent, thereby reach the consumption vibrational energy, improve the purpose of position stability.
Provide another embodiment of eddy current damper below in conjunction with Fig. 8, Figure 10.In the present embodiment, vibration isolator has 40, one Y-direction eddy current dampers 41 of an X-direction eddy current damper, is made of the X that is installed in sleeve 6 lower surface sidewalls, Y-direction permanent magnet 40A, 41A array respectively.X, Y-direction permanent magnet 40A, 41A are elongate in shape, arrange along X, Y-direction voice coil motor 8,9 driving force direction respectively, and pole orientation is perpendicular to the lower surface of sleeve 6, and N, the S utmost point alternately arrange.
Claims (10)
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| CN201210575827.6A CN103062315B (en) | 2012-12-19 | 2012-12-19 | Coplane air floatation orthogonal decoupling and flexible membrane angle decoupling eddy-current damping vibration isolator |
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