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CN103021451B - A kind of multi-step temperature based on threshold voltage adjustments controls self-refresh memory device and method thereof - Google Patents

A kind of multi-step temperature based on threshold voltage adjustments controls self-refresh memory device and method thereof Download PDF

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CN103021451B
CN103021451B CN201110284656.7A CN201110284656A CN103021451B CN 103021451 B CN103021451 B CN 103021451B CN 201110284656 A CN201110284656 A CN 201110284656A CN 103021451 B CN103021451 B CN 103021451B
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selector
refresh
temperature
threshold voltage
substrate
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CN103021451A (en
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解玉凤
林殷茵
孟超
程宽
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Fudan University
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Abstract

本发明涉及存储器技术领域,尤其涉及一种基于阈值电压调节的多级温度控制自刷新方法,本存储设备,包括振荡器、分频器、温度传感器,第一选择器,所述的温度传感器和第一选择器连接,振荡器连接到分频器,分频器和第一选择器连接,第一选择器和DRAM阵列相连接,该存储设备还包括n个衬底电压稳定模块和第二选择器,所述n个衬底电压稳定模块产生DRAM保持期间的衬底电压VBB1、VBB2、……VBBn,第二选择器在温度传感器产生的温度电压信号Vtemp控制下从衬底电压VBB1、VBB2、……VBBn中选择一个输出到DRAM阵列的晶体管衬底电压上。本发明克服了现有技术存在的,如每级的频率对应的温度范围大,阈值电压变化范围大,可能出现低效率或者不可靠问题。

The present invention relates to the field of memory technology, in particular to a multi-level temperature control self-refresh method based on threshold voltage adjustment. The storage device includes an oscillator, a frequency divider, a temperature sensor, a first selector, the temperature sensor and The first selector is connected, the oscillator is connected to the frequency divider, the frequency divider is connected to the first selector, the first selector is connected to the DRAM array, and the storage device also includes n substrate voltage stabilization modules and a second selection The n substrate voltage stabilization modules generate substrate voltages VBB1, VBB2, ... VBBn during DRAM retention, and the second selector selects from the substrate voltages VBB1, VBB2, VBBn under the control of the temperature voltage signal Vtemp generated by the temperature sensor. ...Select one of VBBn to output to the transistor substrate voltage of the DRAM array. The present invention overcomes the problems existing in the prior art, such as the large temperature range corresponding to the frequency of each stage, the large variation range of the threshold voltage, and the possible low efficiency or unreliability problems.

Description

一种基于阈值电压调节的多级温度控制自刷新存储设备及其方法A multi-level temperature-controlled self-refresh memory device and method based on threshold voltage adjustment

技术领域 technical field

本发明涉及存储器技术领域,尤其涉及一种基于阈值电压调节的多级温度控制自刷新方法。The invention relates to the technical field of memory, in particular to a multi-level temperature-controlled self-refresh method based on threshold voltage adjustment.

背景技术 Background technique

DRAM会由于漏电流而造成数据破坏,因此,应当在单元数据丢失之前将数据读出之后再充电到初始的电荷水平。这个再充电的过程就称为刷新。另外,自刷新指的DRAM自身以固定的周期进行刷新,以维持standby状态的存储单元中的数据。另一方面,温度每上升10度,漏电流增加一倍。换句话说,当温度上升10度,存储单元数据的维持时间降低1/2,当上升50度时,维持时间降低到1/32。如上所描述,漏电流与温度密切相关,因此,温度是影响刷新周期的重要因素。即,自刷新周期在相对较高温度时应该更短。DRAM can cause data corruption due to leakage current, so the data should be read out before the cell data is lost and then charged to the initial charge level. This recharging process is called refreshing. In addition, self-refresh means that the DRAM itself refreshes at a fixed period to maintain data in the memory cells in the standby state. On the other hand, the leakage current doubles for every 10°C rise in temperature. In other words, when the temperature rises by 10 degrees, the retention time of the memory cell data is reduced by 1/2, and when the temperature rises by 50 degrees, the retention time is reduced to 1/32. As described above, leakage current is closely related to temperature, therefore, temperature is an important factor affecting the refresh cycle. That is, the self-refresh period should be shorter at relatively higher temperatures.

现有技术按照温度多级控制刷新频率的技术,参考附图1,按照温度多级控制刷新频率的存储设备包括,振荡器101,分频器102,温度传感器103和选择器104。温度传感器103具有感知温度并分级处理的功能,给出不同阶段温度对应的电压信号,输出到选择器104的输入端。分频器102产生多种刷新频率。根据不同温度对应电压信号,选择器104选择一种刷新频率输出refrq。参考附图2,附图2为现有技术阈值电压和多级刷新频率、温度变化的曲线图。现有技术中,阈值电压Vth随着温度升高而下降,刷新周期在不同的温度阶段对应不同的周期。此时各阶段刷新周期应当满足该温度阶段内最坏情况下的刷新需求,其中刷新周期的倒数为刷新频率。In the prior art, the refresh frequency is controlled in multiple levels according to the temperature. Referring to FIG. The temperature sensor 103 has the function of sensing the temperature and processing it in stages, and provides voltage signals corresponding to the temperatures in different stages, which are output to the input terminal of the selector 104 . Frequency divider 102 generates various refresh frequencies. According to the voltage signals corresponding to different temperatures, the selector 104 selects a refresh frequency and outputs refrq. Referring to FIG. 2 , FIG. 2 is a graph of threshold voltage, multi-level refresh frequency, and temperature variation in the prior art. In the prior art, the threshold voltage Vth decreases as the temperature increases, and the refresh period corresponds to different periods in different temperature stages. At this time, the refresh cycle of each stage should meet the refresh requirements in the worst case in the temperature stage, and the reciprocal of the refresh cycle is the refresh frequency.

现有技术CN1734667A就公开了一种刷新周期产生电路。该刷新周期产生电路,产生刷新DRAM单元时的刷新周期,其构成具有:以对环境温度具有温度依赖性的频率进行振荡的振荡电路部;对所述振荡电路部的振荡输出进行分频的分频电路;检测所述环境温度的温度检测器;以及根据所述温度检测器的输出,可切换地选择输出来自所述分频电路的多个频率的分频输出,输出作为所述刷新周期的基准的信号的选择电路,所述振荡电路部的所述温度依赖性在规定的温度范围内具有正的温度系数,而在所述规定的温度范围外不具有正的温度系数,所述选择电路在所述规定的温度范围外进行所述分频输出的切换。The prior art CN1734667A discloses a refresh cycle generating circuit. This refresh cycle generating circuit generates a refresh cycle when refreshing a DRAM cell, and includes: an oscillation circuit section that oscillates at a frequency that is temperature-dependent on the ambient temperature; and a frequency divider that divides the oscillation output of the oscillation circuit section. A frequency circuit; a temperature detector for detecting the ambient temperature; and according to the output of the temperature detector, switchably select and output frequency division outputs of a plurality of frequencies from the frequency division circuit, and output as the frequency of the refresh period A selection circuit of a reference signal, wherein the temperature dependence of the oscillating circuit unit has a positive temperature coefficient within a predetermined temperature range and does not have a positive temperature coefficient outside the predetermined temperature range, the selection circuit Switching of the frequency division output is performed outside the prescribed temperature range.

现有技术的不足之处在于,通常情况下,如果不加控制,每隔12度,刷新频率就需要提高一倍。那么必须分段设置刷新频率。每级的频率对应的温度范围大,阈值电压变化范围大,可能出现低效率或者不可靠问题。The disadvantage of the existing technology is that, usually, if it is not controlled, the refresh rate needs to be doubled every 12 degrees. Then the refresh frequency must be set in sections. The temperature range corresponding to the frequency of each stage is large, and the threshold voltage changes in a large range, which may cause low efficiency or unreliability problems.

发明内容 Contents of the invention

为了达到上述目的,本发明提出一种基于阈值电压调节的多级温度控制自刷新存储设备,包括振荡器、分频器、温度传感器,第一选择器,所述的温度传感器和第一选择器连接,振荡器连接到分频器,分频器和第一选择器连接,第一选择器和DRAM阵列相连接,该存储设备还包括n个衬底电压稳定模块和第二选择器,所述n个衬底电压稳定模块产生DRAM保持期间的衬底电压VBB1、VBB2、……VBBn,第二选择器在温度传感器产生的温度电压信号Vtemp控制下从衬底电压VBB1、VBB2、……VBBn中选择一个输出到DRAM阵列的晶体管衬底电压上,其中,n为自然数。In order to achieve the above object, the present invention proposes a multi-level temperature-controlled self-refresh storage device based on threshold voltage adjustment, including an oscillator, a frequency divider, a temperature sensor, a first selector, and the temperature sensor and the first selector connected, the oscillator is connected to the frequency divider, the frequency divider is connected to the first selector, the first selector is connected to the DRAM array, the storage device also includes n substrate voltage stabilization modules and the second selector, the n substrate voltage stabilization modules generate substrate voltages VBB1, VBB2, ... VBBn during DRAM retention, and the second selector selects from the substrate voltages VBB1, VBB2, ... VBBn under the control of the temperature voltage signal Vtemp generated by the temperature sensor Select one to output to the transistor substrate voltage of the DRAM array, where n is a natural number.

优选的,振荡器产生刷新信号frq,然后输出到分频器。Preferably, the oscillator generates a refresh signal frq, which is then output to the frequency divider.

优选的,分频器对振荡器产生的刷新信号frq进行分频,产生分频后的刷新频率frqs。Preferably, the frequency divider divides the frequency of the refresh signal frq generated by the oscillator to generate a frequency-divided refresh frequency frqs.

优选的,在Vtemp控制下,第一选择器从多个刷新频率frqs中选择给出最终刷新频率Refrq,输出到DRAM阵列。Preferably, under the control of Vtemp, the first selector selects from a plurality of refresh frequencies frqs to give a final refresh frequency Refrq, and outputs it to the DRAM array.

优选的,衬底电压稳定模块包括三个定值电阻、一个三极管T1、比较器和电荷泵。Preferably, the substrate voltage stabilizing module includes three fixed value resistors, a transistor T1, a comparator and a charge pump.

优选的,三极管为跟DRAM阵列中晶体管完全相同的晶体管,取自冗余单元。Preferably, the triode is the same transistor as the transistor in the DRAM array, and is obtained from a redundant unit.

优选的,通过调整三个定值电阻得到衬底电压VBBn。Preferably, the substrate voltage VBBn is obtained by adjusting three fixed value resistors.

优选的,第二选择器为三态传输门。Preferably, the second selector is a tri-state transmission gate.

为了达到上述目的,本发明还提出一种方法,包括以下步骤:n个衬底电压稳定模块产生DRAM保持期间的衬底电压VBB1、VBB2、……VBBn,第二选择器在温度传感器产生的温度电压信号Vtemp控制下从衬底电压VBB1、VBB2、……VBBn中选择一个输出到DRAM阵列的晶体管衬底电压上,其中,n为自然数。In order to achieve the above object, the present invention also proposes a method, comprising the following steps: n substrate voltage stabilization modules generate substrate voltages VBB1, VBB2, ... VBBn during DRAM retention, and the temperature generated by the second selector at the temperature sensor Under the control of the voltage signal Vtemp, one of the substrate voltages VBB1, VBB2, . . . VBBn is selected and output to the transistor substrate voltage of the DRAM array, wherein n is a natural number.

本发明克服了现有技术存在的,如每级的频率对应的温度范围大,阈值电压变化范围大,可能出现低效率或者不可靠问题。The present invention overcomes the problems existing in the prior art, such as the large temperature range corresponding to the frequency of each stage, the large variation range of the threshold voltage, and the possible low efficiency or unreliability problems.

附图说明 Description of drawings

附图1为现有技术按照温度多级控制刷新频率的存储设备;Accompanying drawing 1 is the storage device of the prior art that controls refresh frequency according to temperature multilevel;

附图2为现有技术阈值电压和多级刷新频率、温度变化的曲线图;Accompanying drawing 2 is the graph of prior art threshold voltage and multi-level refresh frequency, temperature change;

附图3为根据本发明实施例基于阈值电压调节的多级温度控制自刷新存储设备;Figure 3 is a multi-level temperature-controlled self-refresh storage device based on threshold voltage adjustment according to an embodiment of the present invention;

附图4为根据本发明实施例衬底电压稳定模块201的电路图;Accompanying drawing 4 is the circuit diagram of the substrate voltage stabilizing module 201 according to the embodiment of the present invention;

附图5为根据本发明实施例衬底电压稳定模块202的电路图;Accompanying drawing 5 is the circuit diagram of the substrate voltage stabilizing module 202 according to the embodiment of the present invention;

附图6为根据本发明实施例阈值电压和多级刷新频率、温度变化的曲线图;Figure 6 is a graph of threshold voltage, multi-level refresh frequency, and temperature change according to an embodiment of the present invention;

附图7为根据本发明实施例选择器300的电路图;Accompanying drawing 7 is the circuit diagram of selector 300 according to the embodiment of the present invention;

具体实施方式 detailed description

附图3为根据本发明实施例基于阈值电压调节的多级温度控制自刷新存储设备,相同的元件采用和附图1中相同的附图标记。基于阈值电压调节的多级温度控制自刷新存储设备包括,振荡器101、分频器102、温度传感器103。根据本发明实施例基于阈值电压调节的多级温度控制自刷新存储设备设置两个选择器选择器104和选择器300,400为DRAM阵列。所述存储设备设置多个衬底电压稳定模块201、202、……20n,n为自然数。衬底电压稳定模块201、202、……20n每一个连接到选择器300,衬底电压稳定模块201、202、……20n产生DRAM保持期间的衬底电压VBB1、VBB2、……VBBn,输出到选择器300中。温度传感器101用于生成依赖于温度波动的电压Vtemp,温度传感器103同时和选择器104以及选择器300连接。选择器300在温度电压信号Vtemp控制下从VBB1、VBB2直到VBBn中选择一个输出到DRAM阵列的晶体管衬底电压VBB上。振荡器101产生刷新信号frq,然后输出到分频器,对其进行分频,产生分频后的刷新频率frqs。刷新频率Reffq,也是在Vtemp控制下,由选择器1模块104从多个频率frqs中选择给出。也即,温度传感器103分别和选择器104、选择器300连接,温度传感器输出的依赖于温度波动的电压Vtemp输出到选择器104和选择器300,选择器300在温度电压信号Vtemp控制下从VBB1、VBB2直到VBBn中选择一个输出到DRAM阵列的晶体管衬底电压VBB上;同时,在Vtemp控制下,由选择器1模块104从多个频率ffqs中选择给出。FIG. 3 is a multi-level temperature-controlled self-refresh storage device based on threshold voltage adjustment according to an embodiment of the present invention, and the same components are designated with the same reference numerals as those in FIG. 1 . The self-refresh storage device with multi-level temperature control based on threshold voltage adjustment includes an oscillator 101 , a frequency divider 102 and a temperature sensor 103 . According to an embodiment of the present invention, the multi-level temperature-controlled self-refresh memory device based on threshold voltage adjustment sets two selectors The selector 104 and the selectors 300, 400 are a DRAM array. The storage device is provided with a plurality of substrate voltage stabilizing modules 201, 202, ... 20n, where n is a natural number. Each of the substrate voltage stabilization modules 201, 202, ... 20n is connected to the selector 300, and the substrate voltage stabilization modules 201, 202, ... 20n generate substrate voltages VBB1, VBB2, ... VBBn during DRAM retention, and output to Selector 300. The temperature sensor 101 is used to generate a voltage Vtemp that depends on temperature fluctuations, and the temperature sensor 103 is connected to the selector 104 and the selector 300 at the same time. The selector 300 selects one of VBB1, VBB2 and VBBn to output to the transistor substrate voltage VBB of the DRAM array under the control of the temperature voltage signal Vtemp. The oscillator 101 generates a refresh signal frq, which is then output to a frequency divider for frequency division to generate a frequency-divided refresh frequency frqs. The refresh frequency Reffq, also under the control of Vtemp, is selected from a plurality of frequencies frqs by the selector 1 module 104 . That is, the temperature sensor 103 is connected to the selector 104 and the selector 300 respectively, and the temperature fluctuation-dependent voltage Vtemp output by the temperature sensor is output to the selector 104 and the selector 300, and the selector 300 is controlled by the temperature voltage signal Vtemp from VBB1 , VBB2 until VBBn select one to output to the transistor substrate voltage VBB of the DRAM array; at the same time, under the control of Vtemp, the selector 1 module 104 selects and gives from a plurality of frequencies ffqs.

附图4为根据本发明实施例衬底电压稳定模块的电路图(201,202,……,20n)。作为其中的一个示例,附图4示出了衬底电压稳定模块201的电路图。该衬底电压稳定模块201包括定值电阻R11、R12、R13,一个三极管T1,一个比较器和一个电荷泵。T1为跟DRAM阵列中晶体管完全相同的晶体管,可取自冗余单元。电阻R12和R13的一端连接,并连接到比较器的正输入端,R12的另外一端接电源电压VDD或者某一个参考电压Vref,R13的另外一端接地。R11的一端接电源电压VDD或者某一个参考电压Vref,而另外一端接三极管T1的漏极和栅极,并接到比较器的负输入端,比较器的输出端和电荷泵连接,电荷泵的输出即为VBB,同时反馈给三极管。通过调整R11、R12、R13得到VBB1;202中,通过调整R21、R22、R23得到VBB2。以此类推,在20n中,通过调整对应的Rn1、Rn2、Rn3得到VBBn。这里的三极管T1为跟DRAM阵列中晶体管完全相同的晶体管,可取自冗余单元。同理,附图5为根据本发明实施例衬底电压稳定模块202的电路图,由于是同样的结构,所以在此不一一介绍。Fig. 4 is a circuit diagram (201, 202, ..., 20n) of a substrate voltage stabilizing module according to an embodiment of the present invention. As an example, FIG. 4 shows a circuit diagram of the substrate voltage stabilization module 201 . The substrate voltage stabilization module 201 includes fixed value resistors R11, R12, R13, a transistor T1, a comparator and a charge pump. T1 is the same transistor as the transistor in the DRAM array, which can be taken from the redundant cell. One end of the resistor R12 is connected to the positive input end of the comparator, the other end of the R12 is connected to the power supply voltage VDD or a certain reference voltage Vref, and the other end of the R13 is grounded. One end of R11 is connected to the power supply voltage VDD or a certain reference voltage Vref, while the other end is connected to the drain and gate of the triode T1, and connected to the negative input end of the comparator, the output end of the comparator is connected to the charge pump, and the charge pump The output is VBB, and it is fed back to the triode at the same time. VBB1 is obtained by adjusting R11, R12, and R13; in 202, VBB2 is obtained by adjusting R21, R22, and R23. By analogy, in 20n, VBBn is obtained by adjusting the corresponding Rn1, Rn2, and Rn3. The transistor T1 here is the same transistor as the transistor in the DRAM array, and can be taken from the redundant unit. Similarly, FIG. 5 is a circuit diagram of the substrate voltage stabilizing module 202 according to an embodiment of the present invention. Since it has the same structure, it will not be introduced here one by one.

附图6为根据本发明实施例阈值电压和多级刷新频率、温度变化的曲线图。采用本发明后,阈值电压在一定温度范围内保持不变,那么刷新频率可以采用该范围内较低的频率,因而降低刷新功耗。FIG. 6 is a graph of threshold voltage, multi-level refresh frequency, and temperature variation according to an embodiment of the present invention. After adopting the present invention, the threshold voltage remains unchanged in a certain temperature range, so the refreshing frequency can adopt a lower frequency in the range, thereby reducing the refreshing power consumption.

附图7为根据本发明实施例选择器300的电路图。301、302、……30n可以是三态传输门电路。衬底电压稳定模块201、202、……20n产生的DRAM保持期间的衬底电压VBB1、VBB2、……VBBn依次输出到三态传输门电路301、302、……30n。在温度电压信号Vtemp控制下,从VBB1、VBB2直到VBBn中选择一个电压输出VBB。FIG. 7 is a circuit diagram of a selector 300 according to an embodiment of the present invention. 301, 302, ... 30n may be tri-state transmission gate circuits. The substrate voltages VBB1, VBB2, ... VBBn generated by the substrate voltage stabilizing modules 201, 202, ... 20n during the DRAM retention period are sequentially output to the tri-state transmission gate circuits 301, 302, ... 30n. Under the control of the temperature voltage signal Vtemp, select a voltage from VBB1, VBB2 until VBBn to output VBB.

根据本发明一个实施例,还提出了一种基于阈值电压调节的多级温度控制自刷新存储设备的刷新方法,所述存储设备包括振荡器、分频器、温度传感器,第一选择器,所述的温度传感器和第一选择器连接,振荡器连接到分频器,分频器和第一选择器连接,第一选择器和DRAM阵列相连接。所述方法包括n个衬底电压稳定模块产生DRAM保持期间的衬底电压VBB1、VBB2、……VBBn,第二选择器在温度传感器产生的温度电压信号Vtemp控制下从衬底电压VBB1、VBB2、……VBBn中选择一个输出到DRAM阵列的晶体管衬底电压上,其中,n为自然数。According to an embodiment of the present invention, a method for refreshing a multi-level temperature-controlled self-refresh storage device based on threshold voltage adjustment is also proposed, the storage device includes an oscillator, a frequency divider, a temperature sensor, a first selector, and The temperature sensor is connected to the first selector, the oscillator is connected to the frequency divider, the frequency divider is connected to the first selector, and the first selector is connected to the DRAM array. The method includes n substrate voltage stabilizing modules generating substrate voltages VBB1, VBB2, ... VBBn during DRAM retention, and the second selector selects from substrate voltages VBB1, VBB2, VBBn under the control of temperature voltage signal Vtemp generated by a temperature sensor. ...Select one of VBBn to output to the transistor substrate voltage of the DRAM array, wherein, n is a natural number.

尽管示出和描述了本发明的优选实施例,对本领域技术人员显而易见的是在其更宽的方面不脱离本发明的情况下可以作出很多变化和修改。While preferred embodiments of the present invention have been shown and described, it would be obvious to those skilled in the art that many changes and modifications can be made without departing from the invention in its broader aspects.

Claims (9)

1.一种基于阈值电压调节的多级温度控制自刷新存储设备,包括振荡器,分频器,温度传感器和第一选择器,所述的温度传感器和第一选择器连接,振荡器连接到分频器,分频器和第一选择器连接,第一选择器和DRAM阵列相连接,其特征在于:1. A multi-level temperature-controlled self-refresh storage device based on threshold voltage regulation, comprising an oscillator, a frequency divider, a temperature sensor and a first selector, the temperature sensor is connected to the first selector, and the oscillator is connected to The frequency divider is connected with the first selector, and the first selector is connected with the DRAM array, and is characterized in that: 该存储设备还包括n个衬底电压稳定模块和第二选择器,所述n个衬底电压稳定模块产生DRAM保持期间的衬底电压VBB1、VBB2、……VBBn,第二选择器在温度传感器产生的温度电压信号Vtemp控制下从衬底电压VBB1、VBB2、……VBBn中选择一个输出到DRAM阵列的晶体管衬底电压上,The storage device also includes n substrate voltage stabilizing modules and a second selector, the n substrate voltage stabilizing modules generate substrate voltages VBB1, VBB2, ... VBBn during DRAM retention, and the second selector controls the temperature sensor Under the control of the generated temperature voltage signal Vtemp, select one of the substrate voltages VBB1, VBB2, ... VBBn to output to the transistor substrate voltage of the DRAM array, 其中,n为自然数。Among them, n is a natural number. 2.根据权利要求1所述的基于阈值电压调节的多级温度控制自刷新存储设备,其特征在于,振荡器产生刷新信号frq,然后输出到分频器。2. The multi-level temperature-controlled self-refresh memory device based on threshold voltage adjustment according to claim 1, wherein the oscillator generates the refresh signal frq, which is then output to the frequency divider. 3.根据权利要求2所述的基于阈值电压调节的多级温度控制自刷新存储设备,其特征在于,分频器对振荡器产生的刷新信号frq进行分频,产生分频后的刷新频率frqs。3. The multi-level temperature-controlled self-refresh storage device based on threshold voltage adjustment according to claim 2, wherein the frequency divider divides the frequency of the refresh signal frq generated by the oscillator to generate a frequency-divided refresh frequency frqs . 4.根据权利要求3所述的基于阈值电压调节的多级温度控制自刷新存储设备,其特征在于,在Vtemp控制下,第一选择器从多个刷新频率frqs中选择给出最终刷新频率Refrq,输出到DRAM阵列。4. The multi-level temperature-controlled self-refresh storage device based on threshold voltage adjustment according to claim 3, characterized in that, under the control of Vtemp, the first selector selects from a plurality of refresh frequencies frqs to give the final refresh frequency Refrq , output to the DRAM array. 5.根据权利要求1所述的基于阈值电压调节的多级温度控制自刷新存储设备,其特征在于,衬底电压稳定模块包括三个定值电阻、一个三极管T1、比较器和电荷泵。5. The multi-level temperature-controlled self-refresh memory device based on threshold voltage adjustment according to claim 1, wherein the substrate voltage stabilization module includes three fixed value resistors, a transistor T1, a comparator and a charge pump. 6.根据权利要求5所述的基于阈值电压调节的多级温度控制自刷新存储设备,其特征在于,三极管为跟DRAM阵列中晶体管完全相同的晶体管,取自冗余单元。6. The multi-level temperature-controlled self-refresh memory device based on threshold voltage adjustment according to claim 5, wherein the triode is the same transistor as that in the DRAM array, and is taken from a redundant unit. 7.根据权利要求6所述的基于阈值电压调节的多级温度控制自刷新存储设备,其特征在于,通过调整三个定值电阻得到衬底电压VBBn。7. The self-refresh storage device with multi-level temperature control based on threshold voltage adjustment according to claim 6, wherein the substrate voltage VBBn is obtained by adjusting three fixed-value resistors. 8.根据权利要求1所述的基于阈值电压调节的多级温度控制自刷新存储设备,其特征在于,第二选择器为三态传输门。8. The multi-level temperature-controlled self-refresh memory device based on threshold voltage adjustment according to claim 1, wherein the second selector is a tri-state transmission gate. 9.一种基于阈值电压调节的多级温度控制自刷新存储设备的刷新方法,所述存储设备包括振荡器,分频器,温度传感器和第一选择器,所述的温度传感器和第一选择器连接,振荡器连接到分频器,分频器和第一选择器连接,第一选择器和DRAM阵列相连接,其特征在于:9. A method for refreshing a multi-level temperature-controlled self-refresh storage device based on threshold voltage regulation, the storage device comprising an oscillator, a frequency divider, a temperature sensor and a first selector, the temperature sensor and the first selector The oscillator is connected to the frequency divider, the frequency divider is connected to the first selector, the first selector is connected to the DRAM array, and it is characterized in that: n个衬底电压稳定模块产生DRAM保持期间的衬底电压VBB1、VBB2、……VBBn,第二选择器在温度传感器产生的温度电压信号Vtemp控制下从衬底电压VBB1、VBB2、……VBBn中选择一个输出到DRAM阵列的晶体管衬底电压上,其中,n为自然数。n substrate voltage stabilization modules generate substrate voltages VBB1, VBB2, ... VBBn during DRAM retention, and the second selector selects from the substrate voltages VBB1, VBB2, ... VBBn under the control of the temperature voltage signal Vtemp generated by the temperature sensor Select one to output to the transistor substrate voltage of the DRAM array, where n is a natural number.
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