CN103018505A - Probe correcting device - Google Patents
Probe correcting device Download PDFInfo
- Publication number
- CN103018505A CN103018505A CN2012105102021A CN201210510202A CN103018505A CN 103018505 A CN103018505 A CN 103018505A CN 2012105102021 A CN2012105102021 A CN 2012105102021A CN 201210510202 A CN201210510202 A CN 201210510202A CN 103018505 A CN103018505 A CN 103018505A
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- CN
- China
- Prior art keywords
- probe
- screw
- rotation platform
- matches
- correction device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000000523 sample Substances 0.000 title claims abstract description 36
- 230000008439 repair process Effects 0.000 abstract description 4
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Tests Of Electronic Circuits (AREA)
Abstract
The invention discloses a probe correcting device which comprises a probe repair tool, wherein the head of the probe repair tool is provided with a clamping hook matching with a probe, the lower end of the probe repair tool is arranged on a rotating platform in a back and forth movement mode, the rotating platform is arranged on a horizontal plate in a left and right movement mode, and the horizontal plate is arranged on a perpendicular plate in an up and down movement mode. The probe correcting device is simple in structure and easy in application and can move in modes of up and down, left and right and back and forth and rotate according to the direction of the probe needed to be corrected, with easy operation and high correction efficiency.
Description
Technical field
The present invention relates to a kind of perspective detection machine, relate in particular to a kind of Probe-correction device.
Background technology
Semiconductor test system comprises wafer sort and finished product test; Wherein, wafer sort is to go to contact with wafer PAD point by the probe on the probe station, to test.Probe on the existing probe station is thinner, easily is offset, thereby so that probe can not be mapped one by one with the PAD of wafer, at this moment, need to repairs probe; At present, be used for repairing the apparatus structure complexity of probe offset, complex operation, and inefficiency.
Summary of the invention
The object of the invention is to for the problems referred to above, a kind of Probe-correction device is provided, to solve the existing apparatus structure complexity that is used for repairing probe offset, complex operation, and the problem of inefficiency.
The objective of the invention is to be achieved through the following technical solutions:
A kind of Probe-correction device, comprise the probe fix tool, the head of described probe fix tool is provided with the grab that matches with probe, and what its lower end can move forward and backward is arranged on the rotation platform, but being arranged on the leveling board of described rotation platform move left and right, described leveling board is moving up and down to be arranged on the vertical panel.
Further, the lower end of described probe fix tool is connected with screw, and described screw matches with screw mandrel on being arranged on rotation platform.
Further, the lower end of described rotation platform is connected with horizontal screw, and described horizontal screw matches with horizontal lead screw on being horizontally installed on leveling board.
Further, described rotation platform comprises base plate and turntable, is provided with reducing motor on the described base plate, and the output shaft of described reducing motor is fixedly connected with turntable.
Further, an end of described leveling board vertically has the threaded hole of perforation, and described threaded hole matches with the screw rod that vertically is arranged on the vertical panel.
Beneficial effect of the present invention is that described Probe-correction apparatus structure is simple, is easy to realize, it can carry out the movement of top to bottom, left and right, front and rear by the required correction direction of probe, and the direction that can revise as required is rotated, and is easy to operate, simply, revise the efficient height.
Description of drawings
Fig. 1 is the structural representation of a kind of Probe-correction device of the present invention.
Among the figure:
1, probe fix tool; 2, rotation platform; 3, horizontal lead screw; 4, horizontal screw; 5, leveling board; 6, vertical panel; 7, screw rod.
Embodiment
Further specify technical scheme of the present invention below in conjunction with accompanying drawing and by embodiment.
Please refer to shown in Figure 1ly, Fig. 1 is the structural representation of a kind of Probe-correction device of the present invention; In present embodiment, a kind of Probe-correction device, comprise probe fix tool 1, the head of described probe fix tool 1 is provided with the grab that matches with probe, and its lower end is connected with screw, described screw matches with screw mandrel on being arranged on rotation platform 2, described screw mandrel is by driven by servomotor, the lower end of described rotation platform 2 is connected with horizontal screw 4, described horizontal screw 4 matches with horizontal lead screw 3 on being horizontally installed on leveling board 5, described horizontal lead screw 3 is by driven by servomotor, one end of described leveling board 5 vertically has the threaded hole of perforation, described threaded hole matches with screw rod 7 on vertically being arranged on vertical panel 6, and described screw rod 7 is by driven by servomotor.
Described rotation platform 2 comprises base plate and turntable, is provided with reducing motor on the described base plate, and the output shaft of described reducing motor is fixedly connected with turntable.
During use, by the driven by servomotor screw mandrel, can so that probe fix tool 1 move forward and backward, by driven by servomotor horizontal lead screw 3, can be so that probe fix tool 1 carries out move left and right, by driven by servomotor screw rod 7, can so that probe fix tool 1 moves up and down, by reducing motor, can drive 1 rotation of probe fix tool to required direction, and the grab by probe fix tool 1 head, the drive probe moves, and realizes the skew reparation of probe, and is easy to operate, simply, revise the efficient height.
Above embodiment has just set forth ultimate principle of the present invention and characteristic; the present invention is not limited by above-described embodiment; without departing from the spirit and scope of the present invention, the present invention also has various variations and change, and these variations and change all fall in the claimed scope of the invention.The claimed scope of the present invention is defined by appending claims and equivalent thereof.
Claims (5)
1. Probe-correction device, it is characterized in that: comprise the probe fix tool, the head of described probe fix tool is provided with the grab that matches with probe, and what its lower end can move forward and backward is arranged on the rotation platform, but being arranged on the leveling board of described rotation platform move left and right, described leveling board is moving up and down to be arranged on the vertical panel.
2. a kind of Probe-correction device according to claim 1, it is characterized in that: the lower end of described probe fix tool is connected with screw, and described screw matches with screw mandrel on being arranged on rotation platform.
3. a kind of Probe-correction device according to claim 1, it is characterized in that: the lower end of described rotation platform is connected with horizontal screw, and described horizontal screw matches with horizontal lead screw on being horizontally installed on leveling board.
4. according to claim 1 and 2 or 3 described a kind of Probe-correction devices, it is characterized in that: described rotation platform comprises base plate and turntable, is provided with reducing motor on the described base plate, and the output shaft of described reducing motor is fixedly connected with turntable.
5. a kind of Probe-correction device according to claim 1, it is characterized in that: an end of described leveling board vertically has the threaded hole of perforation, and described threaded hole matches with the screw rod that vertically is arranged on the vertical panel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012105102021A CN103018505A (en) | 2012-12-04 | 2012-12-04 | Probe correcting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012105102021A CN103018505A (en) | 2012-12-04 | 2012-12-04 | Probe correcting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103018505A true CN103018505A (en) | 2013-04-03 |
Family
ID=47967342
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012105102021A Pending CN103018505A (en) | 2012-12-04 | 2012-12-04 | Probe correcting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103018505A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108214620A (en) * | 2016-12-15 | 2018-06-29 | 浙江海洋大学 | Position correcting device again |
| CN118534171A (en) * | 2024-07-24 | 2024-08-23 | 美博科技(苏州)有限公司 | Probe repair method |
Citations (11)
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|---|---|---|---|---|
| CN1067502A (en) * | 1992-05-03 | 1992-12-30 | 国营青岛前哨机械厂 | Horizontal arm type three-coordinate measuring machine |
| CN1427265A (en) * | 2001-12-21 | 2003-07-02 | 瀚宇彩晶股份有限公司 | Electronic product circuit signal location detection system and method |
| US20030178988A1 (en) * | 2002-03-22 | 2003-09-25 | Electro Scientific Industries, Inc. | Test probe alignment apparatus |
| CN2627459Y (en) * | 2003-05-12 | 2004-07-21 | 第二炮兵工程学院对外技术服务部 | Three-dimensional continuous high-precision measuring device for revolution body component |
| CN1882821A (en) * | 2003-11-13 | 2006-12-20 | 瑞尼斯豪公司 | Method of error compensation in a coordinate measuring machine with an articulating probe head |
| CN101071141A (en) * | 2006-05-09 | 2007-11-14 | 飞而康公司 | Detecting unit and detecting device with same |
| CN101424705A (en) * | 2007-10-29 | 2009-05-06 | 京元电子股份有限公司 | Probe tower, wafer test bearing and wafer test system |
| CN101498764A (en) * | 2008-01-31 | 2009-08-05 | 东京毅力科创株式会社 | Probe apparatus and detection method |
| CN101568844A (en) * | 2006-12-26 | 2009-10-28 | 东京毅力科创株式会社 | Probe inspecting device, displacement correcting method, information processor, information processing method, and program |
| CN102472615A (en) * | 2009-07-03 | 2012-05-23 | 莱卡地球系统公开股份有限公司 | Coordinate measuring machine (cmm) and method of compensating errors in a cmm |
| CN102679929A (en) * | 2012-06-04 | 2012-09-19 | 山东金马精汇天成精密技术有限公司 | Horizontal arm type three-coordinate measuring and ruling machine |
-
2012
- 2012-12-04 CN CN2012105102021A patent/CN103018505A/en active Pending
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1067502A (en) * | 1992-05-03 | 1992-12-30 | 国营青岛前哨机械厂 | Horizontal arm type three-coordinate measuring machine |
| CN1427265A (en) * | 2001-12-21 | 2003-07-02 | 瀚宇彩晶股份有限公司 | Electronic product circuit signal location detection system and method |
| US20030178988A1 (en) * | 2002-03-22 | 2003-09-25 | Electro Scientific Industries, Inc. | Test probe alignment apparatus |
| CN1639577A (en) * | 2002-03-22 | 2005-07-13 | 电子科学工业公司 | Test probe alignment apparatus |
| CN2627459Y (en) * | 2003-05-12 | 2004-07-21 | 第二炮兵工程学院对外技术服务部 | Three-dimensional continuous high-precision measuring device for revolution body component |
| CN1882821A (en) * | 2003-11-13 | 2006-12-20 | 瑞尼斯豪公司 | Method of error compensation in a coordinate measuring machine with an articulating probe head |
| CN101071141A (en) * | 2006-05-09 | 2007-11-14 | 飞而康公司 | Detecting unit and detecting device with same |
| CN101568844A (en) * | 2006-12-26 | 2009-10-28 | 东京毅力科创株式会社 | Probe inspecting device, displacement correcting method, information processor, information processing method, and program |
| CN101424705A (en) * | 2007-10-29 | 2009-05-06 | 京元电子股份有限公司 | Probe tower, wafer test bearing and wafer test system |
| CN101498764A (en) * | 2008-01-31 | 2009-08-05 | 东京毅力科创株式会社 | Probe apparatus and detection method |
| CN102472615A (en) * | 2009-07-03 | 2012-05-23 | 莱卡地球系统公开股份有限公司 | Coordinate measuring machine (cmm) and method of compensating errors in a cmm |
| CN102679929A (en) * | 2012-06-04 | 2012-09-19 | 山东金马精汇天成精密技术有限公司 | Horizontal arm type three-coordinate measuring and ruling machine |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108214620A (en) * | 2016-12-15 | 2018-06-29 | 浙江海洋大学 | Position correcting device again |
| CN118534171A (en) * | 2024-07-24 | 2024-08-23 | 美博科技(苏州)有限公司 | Probe repair method |
| CN118534171B (en) * | 2024-07-24 | 2024-12-06 | 美博科技(苏州)有限公司 | Probe repair method |
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| PB01 | Publication | ||
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| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20130403 |