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CN102920438B - High-resolution optical scanning holographic slice imaging method based on variable pupils - Google Patents

High-resolution optical scanning holographic slice imaging method based on variable pupils Download PDF

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CN102920438B
CN102920438B CN201210422643.6A CN201210422643A CN102920438B CN 102920438 B CN102920438 B CN 102920438B CN 201210422643 A CN201210422643 A CN 201210422643A CN 102920438 B CN102920438 B CN 102920438B
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pupil
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CN102920438A (en
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欧海燕
王秉中
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University of Electronic Science and Technology of China
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Abstract

本发明公开了一种基于可变光瞳的高分辨率光学扫描全息切片成像方法,属于光学扫描领域,主要解决了现有技术中对任意二维切片的图像重构时存在较大离焦噪声的缺陷。本发明利用二维扫描镜控制第一菲涅尔波带板的偏转,从而实现对待测物体的第一次二维扫描,得到第一矩阵方程;并在偏移了第二光瞳后控制第二菲涅尔波带板的偏转,从而实现对待测物体的第二次二维扫描,得到第二矩阵方程;然后将两个矩阵方程结合,再引入共轭梯度算法实现切片成像。通过上述方案,本发明实现了高精度的切片成像,大大减少了离焦噪声,适用于各个求得切片成像的光学领域。

The invention discloses a high-resolution optical scanning holographic slice imaging method based on a variable pupil, which belongs to the field of optical scanning and mainly solves the problem of relatively large defocus noise when reconstructing images of arbitrary two-dimensional slices in the prior art Defects. The present invention uses a two-dimensional scanning mirror to control the deflection of the first Fresnel zone plate, thereby realizing the first two-dimensional scanning of the object to be measured, and obtaining the first matrix equation; and controlling the second pupil after shifting the second pupil The deflection of the two Fresnel zone plates realizes the second two-dimensional scanning of the object to be measured, and obtains the second matrix equation; then combines the two matrix equations, and then introduces the conjugate gradient algorithm to realize slice imaging. Through the above solution, the present invention realizes high-precision slice imaging, greatly reduces defocus noise, and is applicable to various optical fields for obtaining slice imaging.

Description

一种基于可变光瞳的高分辨率光学扫描全息切片成像方法A High-Resolution Optical Scanning Holographic Slice Imaging Method Based on Variable Pupil

技术领域 technical field

本发明属于光学扫描领域,具体的说,涉及一种基于可变光瞳的高分辨率光学扫描全息切片成像方法。 The invention belongs to the field of optical scanning, and in particular relates to a high-resolution optical scanning holographic slice imaging method based on a variable pupil.

背景技术 Background technique

光学扫描全息技术,简称OSH,是一种基于菲涅尔波带板扫描的非传统成像技术,即通过二维光学扫描实现对目标的高分辨率三维成像,它在生物医学成像、荧光物体成像、三维全息电视系统以及光学遥感等领域都有广泛的应用前景。 Optical scanning holography, referred to as OSH, is a non-traditional imaging technology based on Fresnel zone plate scanning, which achieves high-resolution three-dimensional imaging of targets through two-dimensional optical scanning. It is used in biomedical imaging and fluorescent object imaging. , 3D holographic television system and optical remote sensing and other fields have broad application prospects.

而通过光学扫描全息技术获得的二维全息图,包含了物体完整的三维信息,因此在光学扫描全息技术中对物体全息图的一个重要分析处理步骤就是物体的切片成像,即物体任意二维切面的图像重构。而物体任意二维切面图像重构中的难点在于如何消除来自物体其他层面的噪声,即离焦噪声。切片成像是一个典型的图像处理中的逆问题,同时也是一个不适定问题。 The two-dimensional hologram obtained by optical scanning holography technology contains the complete three-dimensional information of the object. Therefore, an important analysis and processing step of the object hologram in optical scanning holography technology is the slice imaging of the object, that is, any two-dimensional section of the object image reconstruction. The difficulty in image reconstruction of any two-dimensional slice of an object is how to eliminate noise from other layers of the object, that is, defocus noise. Slice imaging is a typical inverse problem in image processing, and it is also an ill-posed problem.

文献‘Optical Scanning Holography with MATLAB’提出了一种传统的切片成像方法,即用物体的全息图与待重构切片处的菲涅尔波带板共轭进行卷积运算,从而实现切片成像,但由于无法消除隔离噪声,因此其应用受到极大的制约。 The literature 'Optical Scanning Holography with MATLAB' proposes a traditional slice imaging method, that is, to perform convolution operation with the hologram of the object and the Fresnel zone plate conjugate at the slice to be reconstructed, so as to realize slice imaging, but Since isolation noise cannot be eliminated, its application is greatly restricted.

文献‘Three-dimensional microscopy and sectional image reconstruction using optical scanning holography’介绍了一种逆成像算法,此迭代算法能够实现轴向分辨率为1毫米左右的切片成像,并能有效抑制离焦噪声,但其无法在更小的轴向尺寸下实现良好成像。 The literature 'Three-dimensional microscopy and sectional image reconstruction using optical scanning holography' introduces an inverse imaging algorithm. This iterative algorithm can achieve slice imaging with an axial resolution of about 1 mm, and can effectively suppress defocus noise, but its Good imaging cannot be achieved at smaller axial dimensions.

文献‘Depth resolution enhancement in optical scanning holography with a dual-wavelength laser source’提出了一种利用双波长激光器提高切片成像轴向分辨率的方法,其利用输出波长分别为632nm和543nm的激光器,获取两组物体全息图,进而将轴向分辨率提高至2.5微米左右,但由于在光学系统中同时工作的两个不同波长引入了较大的噪声,导致其实用性受到极大限制。 The document 'Depth resolution enhancement in optical scanning holography with a dual-wavelength laser source' proposed a method to improve the axial resolution of slice imaging by using a dual-wavelength laser. It uses lasers with output wavelengths of 632nm and 543nm respectively to obtain two sets of Object hologram, which in turn increases the axial resolution to about 2.5 microns, but its practicality is greatly limited due to the large noise introduced by the two different wavelengths working simultaneously in the optical system.

发明内容 Contents of the invention

本发明的目的在于降低切片成像中的离焦噪声,提出一种基于可变光瞳的高分辨率光学扫描全息切片成像方法,利用两个不同的菲涅尔波带板对同一个待测物体进行扫描,获取两组全息图,从而为切片成像这一不适定逆问题引入了更多的线性方程组,实现及高分辨率的切片成像。 The purpose of the present invention is to reduce the defocus noise in slice imaging, and propose a high-resolution optical scanning holographic slice imaging method based on variable pupils, using two different Fresnel zone plates for the same object to be measured Scanning is performed to obtain two sets of holograms, so that more linear equations are introduced for the ill-posed inverse problem of slice imaging, and high-resolution slice imaging is realized.

本发明采用的技术方案如下: The technical scheme that the present invention adopts is as follows:

一种基于可变光瞳的高分辨率光学扫描全息切片成像方法,包括以下步骤: A high-resolution optical scanning holographic slice imaging method based on a variable pupil, comprising the following steps:

(1)第一偏振分束器将同一光源发出的光分为两束,第一束光通过第一光瞳形成平面波,第二束光经过声光调制器产生                                                的平移后再通过第二光瞳形成球面波,将平面波和第一球面波通过第二偏振分束器聚光,聚合后在待测物体上产生干涉形成第一菲涅尔波带板; (1) The first polarizing beam splitter divides the light emitted by the same light source into two beams. The first beam passes through the first pupil to form a plane wave, and the second beam passes through the acousto-optic modulator to generate After the translation, the spherical wave is formed through the second pupil, and the plane wave and the first spherical wave are condensed through the second polarizing beam splitter, and after polymerization, interference is generated on the object to be measured to form the first Fresnel zone plate;

(2)利用二维扫描镜控制第一菲涅尔波带板的偏转,从而实现对待测物体的第一次二维扫描,得到包含切片信息的第一矩阵方程; (2) Use the two-dimensional scanning mirror to control the deflection of the first Fresnel zone plate, so as to realize the first two-dimensional scanning of the object to be measured, and obtain slice information The first matrix equation of ;

(3)调节空间光调制器的电压,使第二光瞳产生偏移; (3) Adjust the voltage of the spatial light modulator to shift the second pupil;

(4)第一偏振分束器将同一光源发出的光分为两束,第一束光通过第一光瞳形成球面波,第二束光通过声光调制器产生的平移后再通过偏移后的第二光瞳形成第二球面波,将平面波和第二球面波通过第二偏振分束器聚光,聚合后再待测物体上产生干涉形成第二菲涅尔波带板; (4) The first polarizing beam splitter divides the light emitted by the same light source into two beams. The first beam passes through the first pupil to form a spherical wave, and the second beam is generated by the acousto-optic modulator. After the translation, the second spherical wave is formed through the shifted second pupil, the plane wave and the second spherical wave are condensed by the second polarizing beam splitter, and after polymerization, interference is generated on the object to be measured to form the second Fresnel Erbo belt plate;

(5)利用二维扫描镜控制第二菲涅尔波带板的偏转,从而实现对待测物体的第二次二维扫描,得到包含切片信息的第二矩阵方程; (5) Use the two-dimensional scanning mirror to control the deflection of the second Fresnel zone plate, so as to realize the second two-dimensional scanning of the object to be measured, and obtain slice information The second matrix equation of ;

(6)将第一矩阵方程和第二矩阵方程整合,使切片成像过程转化为一个最小线性方程,并且根据共轭梯度算法,求解出切片信息(6) Integrate the first matrix equation and the second matrix equation to convert the slice imaging process into a minimum linear equation, and solve the slice information according to the conjugate gradient algorithm .

其中,所述步骤(1)中所述第一菲涅尔波带板为: Wherein, the first Fresnel zone plate in the step (1) is:

                        (1) (1)

其中xyz代表空间坐标,k为光的波数,z为待测物体到二维扫描镜的距离。 Among them, x , y , z represent space coordinates, k is the wave number of light, and z is the distance from the object to be measured to the two-dimensional scanning mirror.

进一步的,所述步骤(2)中待测物体为两个离散切片的集合,两个切片的轴向位置分别为,因此得到第一矩阵方程的具体实现方式如下: Further, the object to be measured in the step (2) is a set of two discrete slices, and the axial positions of the two slices are respectively and , so the specific implementation of the first matrix equation is as follows:

(2a)将待测物体进行第一次二维扫描,得到第一二维全息图: (2a) Carry out the first two-dimensional scanning of the object to be measured to obtain the first two-dimensional hologram:

    (2) (2)

其中复函数为该待测物体的幅度信息,同时*代表二维卷积; where the complex function is the amplitude information of the object to be measured, and * represents two-dimensional convolution;

(2b)将菲涅尔波带板在处的值分别转换为矩阵(2b) Place the Fresnel zone plate on and The values at are converted to matrix and ;

(2c)将第一二维全息图与矩阵结合起来得到第一矩阵方程: (2c) Combine the first 2D hologram with the matrix and Combined to get the first matrix equation:

      (3) (3)

其中为高斯白噪声,该高斯白噪声是长度为的一维矢量矩阵。 in is Gaussian white noise, the Gaussian white noise is of length A one-dimensional vector matrix of .

为了精确求得切片信息,调节电压后,光瞳的偏移距离为,因此第二菲涅尔波带板为: In order to obtain slice information accurately, after adjusting the voltage, the pupil offset distance is , so the second Fresnel zone plate is:

            (4)。 (4).

再进一步的,所述步骤(5)中得到第二矩阵的具体实现方式与步骤(2)得到第一矩阵的具体实现方式相同,因此第二矩阵方程为下式: Furthermore, the specific implementation of obtaining the second matrix in step (5) is the same as the specific implementation of obtaining the first matrix in step (2), so the equation of the second matrix is as follows:

  (5)。 (5).

更进一步的,所述步骤(6)中求解出切片信息的方法如下: Furthermore, in the step (6), the slice information is obtained The method is as follows:

(6a)将第一矩阵方程和第二矩阵方程整合,得到: (6a) Integrating the first matrix equation and the second matrix equation, we get:

           (6) (6)

(6b)将上式转化为最小化线性方程: (6b) Transform the above formula into a minimized linear equation:

                              (7) (7)

其中|| ||代表二阶行列范数,为罚系数且>0,C为拉普拉斯算子,该最小化线性方程的解表示为: Where || || represents the second-order determinant norm, is a penalty coefficient and >0, C is the Laplacian operator, and the solution of the minimized linear equation is expressed as:

                                         (8) (8)

其中的共轭转置; in for The conjugate transpose of ;

(4c)通过引入共轭梯度算法即可对该最小化线性方程求解,求出切片信息的值。 (4c) By introducing the conjugate gradient algorithm, the minimized linear equation can be solved to obtain the slice information value.

与现有技术相比,本发明具有以下有益效果: Compared with the prior art, the present invention has the following beneficial effects:

(1)本发明使用了光学扫描全息技术,即通过两个菲涅尔波带板的偏转实现对待测物体的两次扫描,得到其高分辨率的三维成像,菲涅尔波带板应用范围包括生物、机械、光学、电学类等,因此本发明适用于各个领域,应用范围非常广; (1) The present invention uses optical scanning holography technology, that is, through the deflection of two Fresnel zone plates to realize two scans of the object to be measured, and obtain its high-resolution three-dimensional imaging, the application range of Fresnel zone plates Including biology, machinery, optics, electricity, etc., so the present invention is applicable to various fields and has a very wide range of applications;

(2)本发明仅仅通过调节空间光调制器的电压,即可使第二光瞳的位置在上偏移,并在第二束光通过偏移过后的光瞳即可获得新的球面波,得到第二菲涅尔波带板,与只扫描一次相比,多获得了一个二维全息图,因此为切片成像这一不适定逆问题引入更多的线性方程组,使得在求解切片信息时其得到的结果进一步逼近切片信息的真实值,这是从根本上提高切片成像分辨率的原因; (2) In the present invention, the position of the second pupil can be adjusted only by adjusting the voltage of the spatial light modulator When the second beam of light passes through the shifted pupil, a new spherical wave can be obtained, and the second Fresnel zone plate can be obtained. Compared with scanning only once, one more two-dimensional hologram can be obtained. , so more linear equations are introduced for the ill-posed inverse problem of slice imaging, so that when solving the slice information The obtained results further approximate the slice information The true value of , which is the reason for fundamentally improving the resolution of slice imaging;

(3)本发明不需要移动待测物体,只需要调节空间光调制器的电压,易于实现,具有很强的可操作性; (3) The invention does not need to move the object to be tested, but only needs to adjust the voltage of the spatial light modulator, which is easy to implement and has strong operability;

(4)本发明将求得的第一矩阵方程和第二矩阵方程相结合,将其转化为最小化线性方程,并结合共轭梯度算法即可求解出精确度高的切片信息的值,整个计算过程简单,实际操作容易,大大简化了切片信息的求解过程; (4) The present invention combines the obtained first matrix equation with the second matrix equation, transforms it into a minimized linear equation, and combines the conjugate gradient algorithm to solve the high-precision slice information The value of , the entire calculation process is simple, the actual operation is easy, and the slice information is greatly simplified The solution process;

(5)本发明在精确求得切片信息的过程中操作简单、实现方式容易,具有很强的实用性和可操作性,适合推广使用。 (5) The present invention accurately obtains slice information The process is simple to operate, easy to implement, has strong practicability and operability, and is suitable for popularization and use.

附图说明 Description of drawings

图1为本发明结构示意图。 Fig. 1 is a schematic diagram of the structure of the present invention.

图2为本发明—实施例中待测样品切片示意图。 Fig. 2 is a schematic diagram of a slice of a sample to be tested in an embodiment of the present invention.

图3为本发明—实施例中不同的光瞳对应的菲涅尔波带图。 Fig. 3 is different pupils among the present invention-embodiment The corresponding Fresnel zone plot.

图4为本发明—实施例中第一次扫描获得的余弦全息图。 Fig. 4 is a cosine hologram obtained by the first scan in the embodiment of the present invention.

图5为本发明—实施例中第一次扫描获得的正弦全息图。 Fig. 5 is a sinusoidal hologram obtained by the first scan in the embodiment of the present invention.

图6为本发明—实施例中第二次扫描获得的余弦全息图。 Fig. 6 is a cosine hologram obtained in the second scan in the embodiment of the present invention.

图7为本发明—实施例中第二次扫描获得的正弦全息图。 Fig. 7 is a sinusoidal hologram obtained in the second scan in the embodiment of the present invention.

图8为本发明—实施例中采用不同的方法在处获得的切片成像图。 Fig. 8 adopts different methods in the present invention-embodiment and Slice images obtained at .

具体实施方式 Detailed ways

下面结合附图与实施例对本发明作进一步说明,本发明的实施方式包括但不限于下列实施例。 The present invention will be further described below in conjunction with the accompanying drawings and examples, and the embodiments of the present invention include but not limited to the following examples.

实施例 Example

如图2所示,为了简化问题,图2为本发明中待测物体示意图,该待测物体仅包含两个切片信息。在第一次光学扫描中,物体两个切片的轴向位置分别为,的轴向距离为10nm,且每个切片尺寸为,矩阵尺寸为,其中按照如下所示步骤即可实现扫描过程: As shown in FIG. 2 , in order to simplify the problem, FIG. 2 is a schematic diagram of the object to be tested in the present invention, and the object to be tested only includes two slices of information. In the first optical scan, the axial positions of the two slices of the object are , , and The axial distance is 10nm, and each slice size is , the matrix size is , where the scanning process can be realized by following the steps shown below:

步骤1 将可变光瞳设置为,获得第一个菲涅尔波带板FZP1,对物体进行第一次扫描 Step 1 Set the variable pupil to , to obtain the first Fresnel zone plate FZP 1 , to scan the object for the first time

(1)如图1所示,由同一光源发出的角频率为ω的光被第一偏振分束器BS1分成两束,其中第一束光通过第一光瞳形成平面波;第一束光经过声光调制器产生Ω的频移后再通过第一光瞳,第二光瞳为可变光瞳,由透射型空间光调制器实现,第一次扫描样品时,将设置为,从而形成第一球面波。其中使用的单波长光源中心波长为632nm。 (1) As shown in Figure 1, the light with angular frequency ω emitted by the same light source is split into two beams by the first polarizing beam splitter BS1, where the first beam passes through the first pupil form a plane wave ; The first beam of light passes through the first pupil after passing through the acousto-optic modulator to produce a frequency shift of Ω , the second pupil It is a variable pupil, which is realized by a transmission-type spatial light modulator. When scanning the sample for the first time, the Set as , thus forming the first spherical wave. The central wavelength of the single-wavelength light source used therein is 632nm.

(2)该两束被处理的光经第二偏振分束器BS2合在一起,在被测物体上产生干涉形成第一菲涅尔波带板FZP1,然后利用该二维扫描镜2D Scanning控制TD-FZP的偏转,从而实现对三维物体的第一次二维扫描。 (2) The two beams of processed light are combined by the second polarizing beam splitter BS2 to generate interference on the measured object to form the first Fresnel zone plate FZP 1 , and then use the two-dimensional scanning mirror 2D Scanning Control the deflection of TD-FZP, so as to realize the first two-dimensional scanning of three-dimensional objects.

当待测物体被扫描时,光电探测器接收传播到探测面的光波,并产生外差电流输出,光生电流经过混频、放大等电学处理,产生解调信息并存储于计算机中。 When the object to be measured is scanned, the photodetector receives the light wave propagating to the detection surface and generates a heterodyne current output. The photogenerated current undergoes electrical processing such as frequency mixing and amplification to generate demodulation information and store it in the computer.

该光学扫描全息系统的空间脉冲响应,即第一菲涅尔波带板可以表示为: The spatial impulse response of the optical scanning holographic system, that is, the first Fresnel zone plate can be expressed as:

                              (1) (1)

其中代表空间坐标,为光的波数。从(1)式看出,对于某一轴向位置,第一菲涅尔波带板是一个关于的二维函数。 in represent space coordinates, is the wavenumber of light. It can be seen from formula (1) that for a certain axial position , the first Fresnel wave zone plate is a about two-dimensional function.

假设复函数代表物体的幅度信息,该物体经过光学系统扫描后得到的第一二维全息图可以表示为: Assuming a complex function Represents the amplitude information of the object, and the first two-dimensional hologram obtained after the object is scanned by the optical system can be expressed as:

               (9) (9)

其中*代表二维卷积,如果将物体看作一系列离散切片的集合,即可对轴向坐标z进行离散化处理,表示为,分别代表不同切片所在的轴向位置。那么(9)式表征的第一二维全息图可以表示为: Among them, * represents two-dimensional convolution. If the object is regarded as a collection of a series of discrete slices, the axial coordinate z can be discretized, expressed as , respectively representing the axial positions of different slices. Then the first two-dimensional hologram represented by formula (9) can be expressed as:

                     (10) (10)

由于只有两个切片,那么上式可以简化为如下形式: Since there are only two slices, the above formula can be simplified to the following form:

       (2) (2)

为了将(2)式简化为一组线性方程进行分析,我们将分别转换为一维矢量矩阵。由于待测物体的切片为一个的矩阵,则为长度为的一维矢量矩阵。同样,物体的二维全息图也可以转化为一个长度为一维矢量矩阵In order to simplify equation (2) into a set of linear equations for analysis, we will and respectively converted to a one-dimensional vector matrix and . Since the slice of the object to be measured is a matrix, and then the length is A one-dimensional vector matrix of . Likewise, a two-dimensional hologram of an object can also be transformed into a length of 1D vector matrix .

(2)式的卷积运算可以表示为矩阵运算,为此第一菲涅尔波带板在处的值分别为的矩阵的矩阵,分别构造如下所示的两个的二维矩阵The convolution operation in (2) can be expressed as a matrix operation, so the first Fresnel zone plate is in and The values at the matrix and the matrix , respectively constructing two The two-dimensional matrix of and :

 (11) (11)

(12) (12)

则通过(11)式和(12)式可以表示为第一矩阵方程: Then through (11) and (12) can be expressed as the first matrix equation:

    (3) (3)

其中代表系统的高斯白噪声,是长度为N 2 的一维矢量矩阵。 in and Represents the white Gaussian noise of the system and is a one-dimensional vector matrix of length N2 .

所谓切片成像,即要从G 1 中恢复出切片信息的信息,这是一个不适定逆问题,因此我们再利用第二菲涅尔波带板对同一个待测物体进行扫描,提高切片成像轴向分辨率。 The so-called slice imaging means recovering the slice information from G1 This is an ill-posed inverse problem, so we use the second Fresnel zone plate to scan the same object to improve the axial resolution of slice imaging.

步骤2 利用第二菲涅尔波带板对同一个待测物体进行扫描 Step 2 Use the second Fresnel zone plate to scan the same object to be measured

调节空间光调制器的电压,将设置为: adjust the voltage of the spatial light modulator, the Set as:

                                 (13) (13)

从而获得中心位置偏移的球面波,其中代表第二光瞳轴上的空间偏移量。将第二球面波与平面波经第二偏振分束器合在一起,在被测物体上产生干涉形成第二菲涅尔波带板FZP2So as to obtain the spherical wave with center position offset, where and Represents the second pupil exist Spatial offset on axis. The second spherical wave and the plane wave are combined through the second polarization beam splitter to produce interference on the measured object to form the second Fresnel zone plate FZP 2 .

因此该光学扫描全息系统的空间脉冲响应,即第二菲涅尔波带板可以表示为: Therefore, the spatial impulse response of the optical scanning holographic system, that is, the second Fresnel zone plate can be expressed as:

                  (4) (4)

将(4)式和(1)式对比可以看出,通过改变第二光瞳,可以利用同一套光学系统,设计实现不同的菲涅尔波带板。 Comparing formula (4) with formula (1), we can see that by changing the second pupil , different Fresnel zone plates can be designed and realized by using the same optical system.

通过对同一待测物体进行扫描,可获得第二待测物体全息图,同样 过程可以表征为矩阵方程: By scanning the same object to be measured, the hologram of the second object to be measured can be obtained, and the same process can be characterized as a matrix equation:

 (5) (5)

从(6)式可以看出,通过第二次扫描我们又获得了个线性方程组。两次扫描中,记录样品全息信息的菲涅尔波带板是不一样的,即,可见利用第二个菲涅尔波带板对同一个待测物体进行扫描获得的线性方程组是不同的。这样我们就为该不适定问题的求解添加了更多的有效线性方程组。 It can be seen from (6) that through the second scan we have obtained set of linear equations. In the two scans, the Fresnel zone plates that record the holographic information of the sample are different, namely , it can be seen that the linear equations obtained by using the second Fresnel zone plate to scan the same object to be measured are different. This way we add more efficient systems of linear equations to the solution of this ill-posed problem.

步骤3 利用通过两次菲涅尔波带板进行扫描后获得的全息图进行切片成像。 Step 3 Use the hologram obtained after two Fresnel zone plate scans to perform slice imaging.

所谓切片成像,即时在已知的情况下,求解切片信息The so-called slice imaging, even in the known In the case of , solve the slice information .

首先将两次二维扫描得到的第一矩形方程和第二矩阵方程组合起来,表示为: First, combine the first rectangular equation and the second matrix equation obtained by two 2D scans, expressed as:

                    (6) (6)

该问题的求解可转化为如下的最小化线性方程,即: The solution to this problem can be transformed into the following minimized linear equation, namely:

                                (7) (7)

其中(8)中|| ||表示二阶范数,λ>0为罚系数,C是拉普拉斯算子。该最小化问题的解可表示为: In (8), || || represents the second-order norm, λ>0 is the penalty coefficient, and C is the Laplacian operator. The solution to this minimization problem can be expressed as:

                              (8) (8)

其中为矩阵的共轭转置。通过引入共轭梯度算法,即可对于(9)式进行求解,而该算法的收敛性取决于矩阵。对于包含两个切片的物体而言,该矩阵可以表示为: in for the matrix The conjugate transposition of . Equation (9) can be solved by introducing the conjugate gradient algorithm, and the convergence of the algorithm depends on the matrix . For an object containing two slices, the matrix can be expressed as:

                       (14) (14)

由(14)式可知,该矩阵为正定对称矩阵,则通过共轭梯度算法进行求解,从而求出切片信息,其中所述共轭梯度算法为现有技术。 It can be seen from formula (14) that the matrix is a positive definite symmetric matrix, and it is solved by the conjugate gradient algorithm to obtain the slice information , wherein the conjugate gradient algorithm is a prior art.

两次扫描中,不同光瞳获得的菲涅尔波带图如图3所示。其中图4为第一次扫描的余弦全息图,图5为第一次扫描的正弦全息图,图6为第二次扫描的余弦全息图,图7为第二次扫描的正弦全息图。由图4~图7可见,我们无法从全息图中获取任何待测样品的切片信息。 Fresnel zone diagrams obtained with different pupils in the two scans are shown in Figure 3. 4 is the cosine hologram of the first scan, FIG. 5 is the sine hologram of the first scan, FIG. 6 is the cosine hologram of the second scan, and FIG. 7 is the sine hologram of the second scan. It can be seen from Figures 4 to 7 that we cannot obtain any slice information of the sample to be tested from the hologram.

比较三种切片成像方法:(1)传统切片成像方法,即用切片处的菲涅尔波带片共轭函数与样品全息图进行卷积;(2)基于固定光瞳单次扫描的切片成像方法;(3)基于可变光瞳两次扫描的切片成像方法。图8(a)-(f)分别展示了用三种不同方法进行切片成像的结果。由图8(a)-(b)可以看出,传统切片成像方法不仅不能区分两个切片,而且引入了较大的离焦噪声;而图8(c)-(d)展示的基于固定光瞳单次扫描的切片成像方法虽然能够在一定程度上抑制离焦噪声,但是无法达到较高的10nm轴向分辨率;而采用本发明的方法,则可以完全区分出轴向距离为10nm的两个深度切片,其结果如图8(e)-(f)所示,这意味着,本发明方法将光学扫描全息术的轴向分辨率提高到了10nm。 Comparison of three slice imaging methods: (1) traditional slice imaging method, that is, using the Fresnel zone plate conjugate function at the slice to convolve the sample hologram; (2) slice imaging based on a single scan with a fixed pupil Methods; (3) Slice imaging method based on two scans with variable pupil. Figure 8(a)-(f) shows the results of slice imaging using three different methods, respectively. It can be seen from Figure 8(a)-(b) that the traditional slice imaging method not only cannot distinguish between two slices, but also introduces large defocus noise; Although the slice imaging method of a single pupil scan can suppress the defocus noise to a certain extent, it cannot achieve a higher axial resolution of 10nm; while using the method of the present invention, it is possible to completely distinguish two images with an axial distance of 10nm. A depth slice, the results are shown in Figure 8(e)-(f), which means that the method of the present invention improves the axial resolution of optical scanning holography to 10nm.

按照上述实施例,便可很好的实现本发明。 According to the above-mentioned embodiments, the present invention can be well realized.

Claims (6)

1. the high-resolution optical scanning holography slice imaging method based on variable pupil, is characterized in that, comprises the following steps:
The light that (1) first polarization beam apparatus sends same light source is divided into two bundles, and light beam forms plane wave by the first pupil, and the second bundle light produces through acousto-optic modulator translation after by the second pupil, form the first spherical wave again, plane wave and the first spherical wave, by the second polarization beam apparatus optically focused, are produced after polymerization to interfere and form the first Fresnel plate on object under test;
(2) utilize two-dimensional scan mirror to control the deflection of the first Fresnel plate, thereby realize the two-dimensional scan for the first time to object under test, obtain comprising slice information the first matrix equation;
(3) regulate the voltage of spatial light modulator, make the second pupil produce skew;
The light that (4) first polarization beam apparatus send same light source is divided into two bundles, and light beam forms plane wave by the first pupil, and the second bundle light produces by acousto-optic modulator translation after by the second pupil after skew, form the second spherical wave again, plane wave and the second spherical wave, by the second polarization beam apparatus optically focused, are produced after polymerization to interfere and form the second Fresnel plate on object under test;
(5) utilize two-dimensional scan mirror to control the deflection of the second Fresnel plate, thereby realize the two-dimensional scan for the second time to object under test, obtain comprising slice information the second matrix equation;
(6) the first matrix equation and the second matrix equation are integrated, made slice imaging process be converted into a minimal linear equation, and according to conjugate gradient algorithms, solve slice information .
2. a kind of high-resolution optical scanning holography slice imaging method based on variable pupil according to claim 1, is characterized in that, described in described step (1), the first Fresnel plate is:
(1)
Wherein x, y, zrepresent space coordinates, kfor the wave number of light, zfor the distance of object under test to two-dimensional scan mirror.
3. a kind of high-resolution optical scanning holography slice imaging method based on variable pupil according to claim 2, is characterized in that, in described step (2), object under test is the set of two discrete slices, and the axial location of two sections is respectively with , the specific implementation that therefore obtains the first matrix equation is as follows:
(2a) object under test is carried out to two-dimensional scan for the first time, obtains the first two-dimensional hologram:
(2)
Complex function wherein for the amplitude information of this object under test, * represents two-dimensional convolution simultaneously;
(2b) the first Fresnel plate is existed with the value at place is converted to respectively matrix with ;
(2c) by the first two-dimensional hologram and matrix with combine and obtain the first matrix equation:
(3)
Wherein for white Gaussian noise, this white Gaussian noise is that length is one dimension vector matrix; represent axial distance z 1the slice information at place, represent axial distance z 2the slice information at place.
4. a kind of high-resolution optical scanning holography slice imaging method based on variable pupil according to claim 3, is characterized in that, after regulation voltage, the offset distance of the second pupil is , therefore the second Fresnel plate is:
(4)。
5. a kind of high-resolution optical scanning holography slice imaging method based on variable pupil according to claim 4, it is characterized in that, the specific implementation that obtains the second matrix in described step (5) is identical with the specific implementation that step (2) obtains the first matrix, and therefore the second matrix equation is following formula:
(5);
represent the white Gaussian noise in the second matrix equation.
6. a kind of high-resolution optical scanning holography slice imaging method based on variable pupil according to claim 5, is characterized in that, described step solves slice information in (6) method as follows:
(6a) the first matrix equation and the second matrix equation are integrated, are obtained:
(6)
(6b) above formula is converted into and minimizes linear equation:
(7)
Wherein || || represent second order ranks norm, for penalty factor and > 0, cfor Laplace operator, this solution that minimizes linear equation is expressed as:
(8)
Wherein for conjugate transpose;
(6c) by introducing conjugate gradient algorithms, can minimize linear equation to this and solve, obtain slice information value.
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