CN102879858B - Single-fiber three-way multiplexer with grating - Google Patents
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Abstract
本发明提供一种具有光栅的单纤三向复用器。该单纤三向复用器至少包括：用于接入第一波长及第二波长的光波信号的输入波导；用于接入第三波长的光波信号的上传波导；第一输出波导；第二输出波导；及多模波导耦合器；该多模波导耦合器用于分离所述第一波长信号及第二波长信号，并使两者分别由第一输出波导及第二输出波导输出；此外，该多模波导耦合器所具有的光栅，能反射所述第三波长的光波信号，并使该光波信号由输入波导输出。优选地，输入波导、上传波导、第一输出波导、第二输出波导及多模波导耦合器均通过对半导体基底的刻蚀来形成。本发明的优点包括：结构紧凑小巧，且制作工艺与CMOS工艺完全兼容，无需复杂工艺，加工成本低。
The invention provides a single-fiber three-way multiplexer with a grating. The single-fiber three-way multiplexer at least includes: an input waveguide for accessing optical signals of the first wavelength and a second wavelength; an uplink waveguide for accessing optical signals of the third wavelength; a first output waveguide; a second an output waveguide; and a multimode waveguide coupler; the multimode waveguide coupler is used to separate the first wavelength signal and the second wavelength signal, and make them output from the first output waveguide and the second output waveguide respectively; in addition, the The grating of the multimode waveguide coupler can reflect the light wave signal of the third wavelength, and make the light wave signal output from the input waveguide. Preferably, the input waveguide, the upstream waveguide, the first output waveguide, the second output waveguide and the multimode waveguide coupler are all formed by etching the semiconductor substrate. The invention has the advantages of compact structure, complete compatibility with CMOS technology, no complicated technology and low processing cost.
Description
技术领域 technical field
本发明涉及光纤接入网络领域，特别是涉及一种具有光栅的单纤三向复用器。The invention relates to the field of optical fiber access networks, in particular to a single-fiber three-way multiplexer with a grating.
背景技术 Background technique
随着光纤接入网络技术的长足进展，以及IPTV、视频点播和网络游戏等业务量的增加，用户对接入带宽的需求进一步增加，对光纤接入网络要求越来越高，光纤到户技术（FTTH）已经成为光纤接入网络的主要技术方案，而无源光网络（PON）技术是FTTH的主流技术，它可以实现视频、语音、数据三网合一。在用于FTTH的PON技术中，实现光线路终端（OLT)和终端用户之间通信的核心器件就是单纤三向复用器，研究出满足通信带宽要求、低成本、小型化的单纤三向复用器是应用领域的实际需求，因此具有非常重要的意义。这些实际要求也是制约FTTH技术推广的关键因素。With the rapid development of optical fiber access network technology and the increase of IPTV, video on demand and online games, users' demand for access bandwidth is further increasing, and the requirements for optical fiber access network are getting higher and higher. Fiber-to-the-home technology (FTTH) has become the main technical solution of optical fiber access network, and passive optical network (PON) technology is the mainstream technology of FTTH, which can realize the integration of video, voice and data. In the PON technology used for FTTH, the core device to realize the communication between the optical line terminal (OLT) and the end user is the single-fiber three-way multiplexer. The multiplexer is an actual requirement in the application field, so it is of great significance. These actual requirements are also key factors restricting the promotion of FTTH technology.
单纤三向复用器的主要功能，是将OLT输出的波长1490nm的语音信号和波长1550nm的视频信号、以及用户上传的波长1310nm信号复用进一根光纤，用户可以通过接收机分别接收波长1490nm的语音信号和波长1550nm的视频信号，并通过上传波导将本地数据上传至OLT。目前实际应用的单纤三向复用器是由分立器件所构成，具有不易于封装，耦合损耗大和成本高等缺点；而另一种基于平面光波导技术（PLC)的三向复用器由于芯层与包层之间的折射率差很小，导致其器件尺寸仍然较大。另外，基于PLC的三向复用器往往使用多模波导耦合器（MMI)和阵列波导光栅（AWG)相互级联的方式来实现复用功能，使得器件的结构不够紧凑。The main function of the single-fiber three-way multiplexer is to multiplex the voice signal with a wavelength of 1490nm output by the OLT, the video signal with a wavelength of 1550nm, and the signal with a wavelength of 1310nm uploaded by the user into one optical fiber, and the user can receive the wavelength through the receiver. 1490nm voice signal and 1550nm video signal, and upload the local data to the OLT through the upload waveguide. The single-fiber three-way multiplexer currently used in practice is composed of discrete devices, which has the disadvantages of not being easy to package, large coupling loss, and high cost; and another three-way multiplexer based on planar optical waveguide technology (PLC) due to its core The refractive index difference between the layer and the cladding is small, resulting in a still large device size. In addition, the PLC-based three-way multiplexer often uses a multimode waveguide coupler (MMI) and an arrayed waveguide grating (AWG) in cascaded manner to realize the multiplexing function, which makes the structure of the device not compact enough.
随着半导体技术的发展，Si和SiO2的高折射差(2.0)为实现纳米光波导和超小尺度的集成光波导器件提供了可能性。并且Si纳米线波导的制造工艺与现有电子工业中使用的CMOS工艺可完全兼容，为低成本，大批量的生产提供了可能性。因此相对于传统的三向复用器，如何提供一种低成本，小尺寸，高集成度的三向复用器，已成为本领域技术人员需要解决的技术课题。With the development of semiconductor technology, the high refractive difference (2.0) of Si and SiO2 provides the possibility to realize nano-optical waveguides and ultra-small-scale integrated optical waveguide devices. And the manufacturing process of the Si nanowire waveguide is fully compatible with the CMOS process used in the existing electronic industry, which provides the possibility for low-cost and mass production. Therefore, compared with the traditional three-way multiplexer, how to provide a low-cost, small-sized, and highly integrated three-way multiplexer has become a technical problem to be solved by those skilled in the art.
发明内容 Contents of the invention
鉴于以上所述现有技术的缺点，本发明的目的在于提供一种结构紧凑成本低的具有光栅的单纤三向复用器。In view of the above-mentioned shortcomings of the prior art, the object of the present invention is to provide a single-fiber three-way multiplexer with a compact structure and low cost.
为实现上述目的及其他相关目的，本发明提供一种具有光栅的单纤三向复用器，其至少包括：In order to achieve the above purpose and other related purposes, the present invention provides a single-fiber three-way multiplexer with a grating, which at least includes:
用于接入第一波长及第二波长的光波信号的输入波导；an input waveguide for accessing lightwave signals at the first wavelength and the second wavelength;
用于接入第三波长的光波信号的上传波导；an uplink waveguide for accessing a lightwave signal at a third wavelength;
第一输出波导；a first output waveguide;
第二输出波导；second output waveguide;
通过端口分别连接所述输入波导、上传波导、第一输出波导及第二输出波导的多模波导耦合器，用于分离所述第一波长信号及第二波长信号，并使两者分别由第一输出波导及第二输出波导输出，所述多模波导耦合器还具有光栅，所述光栅能反射所述第三波长的光波信号，并使该光波信号由输入波导输出至OLT。A multimode waveguide coupler connected to the input waveguide, the upstream waveguide, the first output waveguide, and the second output waveguide through the port, is used to separate the first wavelength signal and the second wavelength signal, and make the two respectively transmitted by the second wavelength signal An output waveguide and a second output waveguide output, the multimode waveguide coupler also has a grating, the grating can reflect the light wave signal of the third wavelength, and make the light wave signal output from the input waveguide to the OLT.
优选地，所述输入波导、上传波导、第一输出波导、第二输出波导及多模波导耦合器均通过对半导体基底的刻蚀来形成；更为优选地，通过对绝缘体上硅的顶层硅刻蚀来形成。Preferably, the input waveguide, the upstream waveguide, the first output waveguide, the second output waveguide and the multimode waveguide coupler are all formed by etching the semiconductor substrate; more preferably, by etching the top layer of silicon-on-insulator etched to form.
优选地，所述输入波导、上传波导、第一输出波导、及第二输出波导均为纳米线波导。Preferably, the input waveguide, the upstream waveguide, the first output waveguide, and the second output waveguide are all nanowire waveguides.
优选地，所述输入波导、上传波导、第一输出波导、及第二输出波导均呈锥形。Preferably, the input waveguide, the upstream waveguide, the first output waveguide, and the second output waveguide are all tapered.
优选地，所述光栅通过对所述半导体基底的浅刻蚀来形成。Preferably, the grating is formed by shallow etching of the semiconductor substrate.
优选地，所述光栅包括布拉格光栅。Preferably, said grating comprises a Bragg grating.
如上所述，本发明的具有光栅的单纤三向复用器，具有以下有益效果：将光栅嵌入于多模波导耦合器上以实现三个波长的复用功能，使得器件的结构极其紧凑；基于绝缘体上硅的Si纳米线波导加工工艺与CMOS工艺完全兼容，无需复杂工艺，加工成本低；基于Si纳米线波导，为芯层和包层之间提供了巨大的折射率差，可以极大限度的减小器件的尺寸，大幅度提高集成度。As mentioned above, the single-fiber three-way multiplexer with grating of the present invention has the following beneficial effects: the grating is embedded in the multimode waveguide coupler to realize the multiplexing function of three wavelengths, making the structure of the device extremely compact; The Si nanowire waveguide processing technology based on silicon-on-insulator is fully compatible with the CMOS process, no complicated process is required, and the processing cost is low; based on the Si nanowire waveguide, a huge refractive index difference is provided between the core layer and the cladding layer, which can be greatly improved. Minimize the size of the device and greatly improve the integration level.
附图说明 Description of drawings
图1显示为本发明的具有光栅的单纤三向复用器的二维结构示意图。Fig. 1 is a schematic diagram of a two-dimensional structure of a single-fiber three-way multiplexer with a grating according to the present invention.
图2显示为本发明的具有光栅的单纤三向复用器的三维结构示意图。Fig. 2 is a schematic three-dimensional structure diagram of the single-fiber three-way multiplexer with gratings of the present invention.
元件标号说明Component designation description
具体实施方式 Detailed ways
以下由特定的具体实施例说明本发明的实施方式，熟悉此技术的人士可由本说明书所揭露的内容轻易地了解本发明的其他优点及功效。The implementation of the present invention will be illustrated by specific specific examples below, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.
请参阅图1至图2。须知，本说明书所附图式所绘示的结构、比例、大小等，均仅用以配合说明书所揭示的内容，以供熟悉此技术的人士了解与阅读，并非用以限定本发明可实施的限定条件，故不具技术上的实质意义，任何结构的修饰、比例关系的改变或大小的调整，在不影响本发明所能产生的功效及所能达成的目的的前提下，均应仍落在本发明所揭示的技术内容的涵盖范围内。同时，本说明书中所引用的如“上”、“下”、“左”、“右”、“中间”及“一”等的用语，亦仅为便于叙述的明了，而非用以限定本发明可实施的范围，其相对关系的改变或调整，在无实质变更技术内容下，当亦视为本发明可实施的范畴。Please refer to Figure 1 to Figure 2. It should be noted that the structures, proportions, sizes, etc. shown in the drawings attached to this specification are only used to match the content disclosed in the specification, for those who are familiar with this technology to understand and read, and are not used to limit the implementation of the present invention. Therefore, it has no technical substantive meaning. Any modification of structure, change of proportional relationship or adjustment of size should still fall within the premise of not affecting the effect and purpose of the present invention within the scope of the technical content disclosed in the present invention. At the same time, terms such as "upper", "lower", "left", "right", "middle" and "one" quoted in this specification are only for the convenience of description and are not used to limit this specification. The practicable scope of the invention and the change or adjustment of its relative relationship shall also be regarded as the practicable scope of the present invention without any substantial change in the technical content.
如图所示，本发明提供一种具有光栅的单纤三向复用器。所述单纤三向复用器1至少包括：输入波导11、上传波导12、第一输出波导13、第二输出波导14以及多模波导耦合器15。As shown in the figure, the present invention provides a single-fiber three-way multiplexer with a grating. The single-fiber three-way multiplexer 1 at least includes: an input waveguide 11 , an uplink waveguide 12 , a first output waveguide 13 , a second output waveguide 14 and a multimode waveguide coupler 15 .
所述输入波导11用于接入第一波长及第二波长的光波信号。The input waveguide 11 is used for receiving optical signals of the first wavelength and the second wavelength.
其中，第一波长及第二波长的光波信号包括任意波长的光波信号，优选地，第一波长及第二波长的光波信号分别为语音信号及视频信号，例如，第一波长的光波信号为波长1490nm的语音信号；第二波长的光波信号为波长1550nm的视频信号。Wherein, the light wave signals of the first wavelength and the second wavelength include light wave signals of arbitrary wavelengths, preferably, the light wave signals of the first wavelength and the second wavelength are voice signals and video signals respectively, for example, the light wave signals of the first wavelength are wavelength The voice signal of 1490nm; the light wave signal of the second wavelength is the video signal of 1550nm wavelength.
所述输入波导11可通过对半导体基底的刻蚀来形成，例如，如图2所示，输入波导11对绝缘体上硅2的顶层硅21进行刻蚀，形成4个Si纳米线波导，其中左侧的一个Si纳米线波导作为输入波导11。The input waveguide 11 can be formed by etching the semiconductor substrate. For example, as shown in FIG. A Si nanowire waveguide on the side serves as the input waveguide 11.
此外，可进一步将作为输入波导11的Si纳米线波导刻蚀成锥形，例如，如图1所示的锥形，由此来减小传输损耗。In addition, the Si nanowire waveguide serving as the input waveguide 11 can be further etched into a tapered shape, for example, the tapered shape shown in FIG. 1 , thereby reducing the transmission loss.
所述上传波导12用于接入第三波长的光波信号。The uplink waveguide 12 is used to access the light wave signal of the third wavelength.
其中，第三波长信号包括任意不同于第一波长及第二波长的光波信号，优选地，第三波长信号为用户上传信号，例如，为波长1310nm的光波信号。Wherein, the third wavelength signal includes any light wave signal different from the first wavelength and the second wavelength. Preferably, the third wavelength signal is a signal uploaded by a user, for example, a light wave signal with a wavelength of 1310nm.
所述上传波导12也可通过对半导体基底的刻蚀来形成，例如，如图2所示，左侧的一个Si纳米线波导作为上传波导12。The upstream waveguide 12 can also be formed by etching the semiconductor substrate, for example, as shown in FIG. 2 , a Si nanowire waveguide on the left serves as the upstream waveguide 12 .
此外，也可进一步将图2所示的作为上传波导12的Si纳米线波导刻蚀成锥形，例如，如图1所示的锥形，由此来减小传输损耗。In addition, the Si nanowire waveguide as the uplink waveguide 12 shown in FIG. 2 may be further etched into a tapered shape, for example, the tapered shape shown in FIG. 1 , thereby reducing the transmission loss.
所述第一输出波导13用于输出光波信号，其也可通过对半导体基底的刻蚀来形成，例如，如图2所示，右侧的一个Si纳米线波导作为第一输出波导13。The first output waveguide 13 is used to output light wave signals, which can also be formed by etching the semiconductor substrate, for example, as shown in FIG. 2 , a Si nanowire waveguide on the right is used as the first output waveguide 13 .
此外，也可进一步将图2所示的作为第一输出波导13的Si纳米线波导刻蚀成锥形，例如，如图1所示的锥形，由此来减小传输损耗。In addition, the Si nanowire waveguide as the first output waveguide 13 shown in FIG. 2 may be further etched into a tapered shape, for example, the tapered shape shown in FIG. 1 , thereby reducing the transmission loss.
所述第二输出波导14用于输出光波信号，其也可通过对半导体基底的刻蚀来形成，例如，如图2所示，右侧的一个Si纳米线波导作为第二输出波导14。The second output waveguide 14 is used to output light wave signals, which can also be formed by etching the semiconductor substrate, for example, as shown in FIG. 2 , a Si nanowire waveguide on the right is used as the second output waveguide 14 .
此外，也可进一步将图2所示的作为第二输出波导14的Si纳米线波导刻蚀成锥形，例如，如图1所示的锥形，由此来减小传输损耗。In addition, the Si nanowire waveguide as the second output waveguide 14 shown in FIG. 2 may be further etched into a tapered shape, for example, the tapered shape shown in FIG. 1 , thereby reducing the transmission loss.
所述多模波导耦合器15具有4个端口（图中未示出），该4个端口分别连接输入波导11、上传波导12、第一输出波导13及第二输出波导14；所述多模波导耦合器15还具有光栅151，如图1所示。The multimode waveguide coupler 15 has 4 ports (not shown in the figure), and the 4 ports are respectively connected to the input waveguide 11, the upload waveguide 12, the first output waveguide 13 and the second output waveguide 14; The waveguide coupler 15 also has a grating 151 as shown in FIG. 1 .
所述多模波导耦合器15也可通过对半导体基底的刻蚀来形成，例如，如图2所示，其中，所述光栅151通过对顶层硅21的浅刻蚀来形成。The multimode waveguide coupler 15 can also be formed by etching the semiconductor substrate, for example, as shown in FIG. 2 , wherein the grating 151 is formed by shallow etching the top silicon 21 .
其中，所述光栅151包括任何能反射所述第三波长的光波信号，并使该光波信号由输入波导输出的光栅，优选地，包括但不限于布拉格光栅等。Wherein, the grating 151 includes any grating capable of reflecting the light wave signal of the third wavelength and making the light wave signal output from the input waveguide, preferably, including but not limited to Bragg gratings and the like.
由图1可见，该多模波导耦合器15将输入波导11接入的波长1490nm和1550nm的光波信号分开，并从第一输出波导13输出波长1490nm的光波信号、从第二输出波导14输出波长1550nm的光波信号；同时该多模波导耦合器15的光栅151反射上传波导12接入的波长1310nm的光波信号，使波长1310nm的光波信号由输入波导11输出，同时不影响输入波导11传输波长1490nm和1550nm的光波信号。It can be seen from FIG. 1 that the multimode waveguide coupler 15 separates the optical wave signals of wavelength 1490nm and 1550nm received by the input waveguide 11, and outputs the optical wave signal of wavelength 1490nm from the first output waveguide 13, and outputs the optical wave signal of wavelength 14 from the second output waveguide 14. 1550nm light wave signal; at the same time, the grating 151 of the multimode waveguide coupler 15 reflects the light wave signal with a wavelength of 1310nm connected to the upstream waveguide 12, so that the light wave signal with a wavelength of 1310nm is output by the input waveguide 11 without affecting the transmission wavelength of 1490nm by the input waveguide 11 And 1550nm light wave signal.
综上所述，本发明的具有光栅的单纤三向复用器采取的是在绝缘体上硅上刻蚀的方法制作而成，Si纳米线波导与SiO2基底之间巨大的折射率差将极大限度的减小器件的尺寸，并且基于绝缘体上硅的Si纳米线波导加工工艺与CMOS工艺完全兼容，无需复杂工艺，加工成本低；此外，将浅刻蚀的布拉格光栅嵌入于多模波导耦合器上以实现三个波长的复用功能，使得器件的结构极其紧凑。所以，本发明有效克服了现有技术中的种种缺点，从而具有高度产业利用价值。In summary, the single-fiber three-way multiplexer with grating of the present invention is made by etching silicon on insulator, and the huge refractive index difference between the Si nanowire waveguide and the SiO2 substrate will The size of the device is greatly reduced, and the Si nanowire waveguide processing technology based on silicon-on-insulator is fully compatible with the CMOS process, no complicated process is required, and the processing cost is low; in addition, the shallowly etched Bragg grating is embedded in the multimode waveguide The multiplexing function of three wavelengths can be realized on the coupler, which makes the structure of the device extremely compact. Therefore, the present invention effectively overcomes various shortcomings in the prior art, thereby having high industrial application value.
上述实施例仅例示性说明本发明的原理及其功效，而非用于限制本发明。任何熟悉此技术的人士皆可在不违背本发明的精神及范畴下，对上述实施例进行修饰或改变。因此，举凡所属技术领域中具有通常知识者在未脱离本发明所揭示的精神与技术思想下所完成的一切等效修饰或改变，仍应由本发明的权利要求所涵盖。The above-mentioned embodiments only illustrate the principles and effects of the present invention, but are not intended to limit the present invention. Anyone skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or changes made by those skilled in the art without departing from the spirit and technical ideas disclosed in the present invention should still be covered by the claims of the present invention.
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