CN102829902A - Array-type multi-channel fiber-process Fabry-Perot pressure sensor and pressure measurement method - Google Patents
Array-type multi-channel fiber-process Fabry-Perot pressure sensor and pressure measurement method Download PDFInfo
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Abstract
本发明公开了一种阵列式多通道光纤法珀压力传感装置及压力测量方法,从输入到输出端依序设置LED光源调制模块(1)、LED光源(2)构成的LED光源阵列(3)、光纤耦合器(4)构成的光纤耦合器阵列(5)、光纤法珀传感器(6)构成的光纤法珀传感器阵列(7)、光纤阵列(8)、光楔(9)、线阵CCD(10)构成的解调光路模块以及信号处理单元(11)。与现有技术相比,本发明的LED光源阵列调制结合光纤阵列结构实现单个解调光路对多个光纤法珀压力传感器的顺序快速解调,克服了传统光开关结构无法同时满足高速切换、低损耗、高可靠性的问题;且通道扩展容易,使得传感通道最多可达到64通道。
The invention discloses an array type multi-channel optical fiber percol pressure sensing device and a pressure measurement method. An LED light source array (3) composed of an LED light source modulation module (1) and an LED light source (2) is sequentially arranged from the input end to the output end. ), fiber optic coupler array (5) composed of fiber optic coupler (4), fiber optic Fab sensor array (7), fiber optic array (8), optical wedge (9), linear array A demodulation optical path module composed of a CCD (10) and a signal processing unit (11). Compared with the prior art, the combination of LED light source array modulation and optical fiber array structure of the present invention realizes the sequential and fast demodulation of multiple optical fiber F-P pressure sensors by a single demodulation optical path. The problem of loss and high reliability; and the channel expansion is easy, so that the sensing channel can reach up to 64 channels.
Description
技术领域 technical field
本发明涉及光纤传感领域,特别是涉及一种基于LED光源调制的阵列式多通道光纤法珀压力传感装置及其压力测量方法。The invention relates to the field of optical fiber sensing, in particular to an array type multi-channel optical fiber Fabry pressure sensing device based on LED light source modulation and a pressure measurement method thereof.
背景技术 Background technique
光纤法珀压力传感器通常由光纤端面和膜片端面构成法布里-珀罗微谐振腔,压力作用在膜片上使膜片变形,导致法珀腔长发生变化,从而实现传感。由于这样的结构特点使得光纤法珀压力传感器不能像光纤光栅那样实现串联波分复用,其多通道的实现需要通过光开关切换。光开关是光纤传输中光交换系统的常用器件,广泛应用于多通道光纤传感系统。光开关可分为机械式和非机械式两大类,机械式光开关靠光纤或光学元件移动,使光路发生改变而实现通道切换,其优点是插入损耗较低,隔离度高,不受偏振和波长的影响,缺点是开关时间较长,切换瞬间光功率抖动,切换次数有限以及重复性较差。非机械式光开关依靠电光效应、磁光效应、声光效应以及热光效应来改变波导折射率,使光路发生改变,这类光开关的优点是开关时间短,可达到毫秒甚至更短,但由于器件材料的光学特性限制,通常光谱工作谱宽窄,且不能工作于可见光波段。The fiber optic Fabry pressure sensor usually consists of a Fabry-Perot microresonator cavity formed by the end face of an optical fiber and the end face of a diaphragm. The pressure acts on the diaphragm to deform the diaphragm, resulting in a change in the length of the Fabry cavity, thereby realizing sensing. Due to such structural characteristics, the fiber optic Fabry pressure sensor cannot realize series wavelength division multiplexing like fiber gratings, and its multi-channel realization needs to be switched by optical switches. Optical switches are commonly used in optical switching systems in optical fiber transmission, and are widely used in multi-channel optical fiber sensing systems. Optical switches can be divided into two categories: mechanical and non-mechanical. Mechanical optical switches are moved by optical fibers or optical components to change the optical path to achieve channel switching. The advantages are low insertion loss, high isolation, and no polarization. And wavelength, the disadvantage is that the switching time is long, the optical power jitters at the moment of switching, the number of switching is limited, and the repeatability is poor. Non-mechanical optical switches rely on electro-optical effects, magneto-optic effects, acousto-optic effects, and thermo-optic effects to change the refractive index of the waveguide and change the optical path. The advantage of this type of optical switch is that the switching time is short, which can reach milliseconds or even shorter, but Due to the limitation of the optical characteristics of the device material, the spectral working spectrum is usually narrow, and it cannot work in the visible light band.
发明内容 Contents of the invention
基于上述现有技术存在的问题,本发明提出了一种新型的阵列式多通道光纤法珀压力传感装置及压力测量方法,通过LED光源阵列和光纤法珀传感器阵列构建阵列式光纤法珀多通道传感装置结构,对每个LED光源快速调制,实现单个解调光路对多个光纤法珀压力传感器的顺序解调,达到高速切换、低损耗、高可靠性、多通道光纤法珀传感目的。Based on the problems existing in the above-mentioned prior art, the present invention proposes a novel array type multi-channel fiber optic sensor pressure sensing device and pressure measurement method, and constructs an arrayed fiber optic sensor array through an array of LED light sources The structure of the channel sensing device can quickly modulate each LED light source, and realize the sequential demodulation of multiple optical fiber FAP pressure sensors by a single demodulation optical path, achieving high-speed switching, low loss, high reliability, and multi-channel optical fiber FAP sensing Purpose.
本发明提出了一种阵列式多通道光纤法珀压力传感装置,该装置从输入到输出端依序设置LED光源调制模块1、LED光源2构成的LED光源阵列3、光纤耦合器4构成的光纤耦合器阵列5、光纤法珀传感器6构成的光纤法珀传感器阵列7、光纤阵列8、光楔9、线阵CCD10构成的解调光路模块以及信号处理单元11,其中:The present invention proposes an array type multi-channel optical fiber Perot pressure sensing device, the device is sequentially provided with an LED light source modulation module 1, an LED
LED光源阵列3,用于提供传感检测宽带光源;The LED
LED光源调制模块1,用于产生LED光源调制信号,对各个LED光源依据调制信号进行切换,使LED光源阵列中的各个LED光源依次发光和熄灭;The LED light source modulation module 1 is used to generate the LED light source modulation signal, and switch each LED light source according to the modulation signal, so that each LED light source in the LED light source array emits light and goes out sequentially;
光纤法珀传感器阵列7,用于感受外界压力变化,将压力转化为法珀腔信息,不同压力对应不同法珀腔腔长;The optical fiber
光纤耦合器阵列5:用于将LED光源阵列发出的光引入到光纤法珀传感器阵列,并将光纤法珀传感器阵列返回的光引入到解调光路模块中;Fiber optic coupler array 5: used to introduce the light emitted by the LED light source array into the fiber optic Fab sensor array, and introduce the light returned by the fiber optic Fap sensor array into the demodulation optical path module;
解调光路模块,用于接收光纤耦合器阵列返回的光信号,并将低相干干涉信号转化成电信号,其中光纤阵列8将光纤耦合器阵列返回的信号并行导入到解调光路中;The demodulation optical circuit module is used to receive the optical signal returned by the fiber coupler array, and convert the low-coherence interference signal into an electrical signal, wherein the
信号处理单元;基于嵌入式系统或计算机,用于从电信号中提取出腔长信息,并对应成压力测量结果;Signal processing unit; based on an embedded system or computer, it is used to extract cavity length information from electrical signals and correspond to pressure measurement results;
一个LED光源2、一个光纤法珀传感器6和一个光纤耦合器4构成一路压力传感通道,预先对每一路压力传感通道进行传感信号标定,该传感信号标定值即该通道光纤法珀传感器腔长与解调光路中线阵CCD10所采集干涉条纹位置的对应关系,作为信号处理单元11的解调依据。An
所述光纤阵列8的光纤输出端12按一定点阵形状排列,包括单排一字点阵排列结构、双排点阵排列结构以及多排点阵或圆形点阵排列结构。The optical fiber output ends 12 of the
所述LED光源调制模块1输出调制频率在10Hz到40kHz的调制信号。The LED light source modulation module 1 outputs modulation signals with a modulation frequency of 10 Hz to 40 kHz.
所述通道的数量设计成3至64路通道。The number of channels is designed to be 3 to 64 channels.
所述光纤耦合器采用1×2多模光纤耦合器,光纤规格包括50/125μm、62.5/125μm、80/125μm或100/125μm。The fiber coupler is a 1×2 multimode fiber coupler, and the fiber specifications include 50/125 μm, 62.5/125 μm, 80/125 μm or 100/125 μm.
利用阵列式多通道光纤法珀压力传感装置的压力测量方法,该方法包括以下步骤;A method for measuring pressure using an arrayed multi-channel optical fiber Fabry pressure sensing device, the method includes the following steps;
步骤一、将一个LED光源2、一个光纤法珀传感器6和一个光纤耦合器4构成一路压力传感通道,预先对每一路压力传感通道进行传感信号标定,该传感信号标定值为该通道光纤法珀传感器腔长与解调光路中线阵CCD10所采集干涉条纹位置的对应关系,作为信号处理单元11的解调依据。Step 1. An
步骤二、进行采集处理,即LED光源调制模块1产生LED光源调制信号,使某一时刻LED光源阵列3中的一个LED光源2发光,其它LED光源2无光输出;该路LED光源2输出的光通过与其相连的光纤耦合器4到达光纤法珀传感器6,使压力信号调制到光信号;光信号再次通过光纤耦合器6导入到光纤阵列8中的对应光纤,并通过光纤阵列8的光纤输出端12进入解调光路模块;Step 2: Collect and process, that is, the LED light source modulation module 1 generates an LED light source modulation signal, so that one
步骤三、光信号通过解调光路模块的光楔9形成空间低相干干涉条纹,并被线阵CCD10接收,线阵CCD的信号输出与LED光源调制信号保持同步;
步骤四、信号处理单元11对线阵CCD10输出的干涉条纹信号进行处理,从中提取出法珀腔信号,并根据标定数据对应出压力测量结果;Step 4, the
步骤五、重复上述步骤二至步骤四,直到解调出所有通道的压力。
与现有技术相比,本发明采用的LED光源阵列调制结合光纤阵列结构实现单个解调光路对多个光纤法珀压力传感器的顺序快速解调,克服了传统光开关结构无法同时满足高速切换、低损耗、高可靠性的问题;另外,本发明提出的LED快速调制方法,使得传感通道切换速度大为提升,能达到40kHz。且通道扩展容易,使得传感通道最多可达到64通道。Compared with the prior art, the LED light source array modulation adopted in the present invention combined with the fiber array structure realizes a single demodulation optical path to quickly demodulate the order of multiple fiber-optic F-P pressure sensors, which overcomes the inability of the traditional optical switch structure to simultaneously meet high-speed switching, low loss and high reliability; in addition, the LED fast modulation method proposed by the present invention greatly improves the switching speed of the sensing channel, which can reach 40kHz. And the channel expansion is easy, so that the sensing channel can reach 64 channels at most.
附图说明 Description of drawings
图1为阵列式多通道光纤法珀压力传感装置结构示意图;Fig. 1 is a schematic structural diagram of an arrayed multi-channel optical fiber Fabry pressure sensing device;
图2为光纤阵列示意图,Figure 2 is a schematic diagram of an optical fiber array,
其中:a、为单排一字点阵光纤阵列结构;b、为双排点阵光纤阵列结构;c、为四排点阵光纤阵列结构;d、为圆形点阵光纤阵列结构;Among them: a, is a single-row one-word lattice fiber array structure; b, is a double-row lattice fiber array structure; c, is a four-row lattice fiber array structure; d, is a circular lattice fiber array structure;
图3为10kHz调制频率时白光LED光源调制响应信号图;Fig. 3 is a modulation response signal diagram of a white LED light source at a modulation frequency of 10 kHz;
图1中:In Figure 1:
1、LED光源调制模块 2、LED光源 3、LED光源阵列 4、光纤耦合器 5、光纤耦合器阵列 6、光纤法珀传感器 7、光纤法珀传感器阵列 8、光纤阵列 9、光楔10、线阵CCD 11、信号处理单元1. LED light
图2中:In Figure 2:
12、光纤输出端12. Optical fiber output port
图3中:In Figure 3:
13、LED光源响应波形,14、驱动电路输出电压,15、调制电压13. Response waveform of LED light source, 14. Output voltage of drive circuit, 15. Modulation voltage
具体实施方式 Detailed ways
以下结合附图及较佳实施例,对依据本发明提供的具体实施方式、结构、特征及其功效,详细说明如下。The specific implementation, structure, features and effects provided by the present invention will be described in detail below in conjunction with the accompanying drawings and preferred embodiments.
如图1所示,阵列式多通道光纤法珀压力传感装置包括:LED光源调制模块1、LED光源2构成的LED光源阵列3、光纤耦合器4构成的光纤耦合器阵列5、光纤法珀传感器6构成的光纤法珀传感器阵列7、光纤阵列8、光楔9、线阵CCD10和信号处理单元11。其中,光纤阵列8的光纤输出端12按一定点阵形状排列,包括单排一字点阵结构、双排点阵结构、多排点阵或圆形点阵结构,如图2所示。As shown in Figure 1, the array type multi-channel fiber optic FAP pressure sensing device includes: LED light source modulation module 1, LED
一个LED光源2、一个光纤法珀传感器6和一个光纤耦合器4构成一路压力传感通道,首先对每一路压力传感通道进行传感信号标定,即实验获取该通道光纤法珀传感器腔长与解调光路中线阵CCD10所采集干涉条纹位置的对应关系,作为信号处理单元11的解调依据。An
阵列式多通道光纤法珀压力测量方法,包括以下步骤:采集处理时,LED光源调制模块1产生LED光源调制信号,使某一时刻LED光源阵列3中的一个LED光源2发光,其它LED光源2无光输出,该路LED光源2输出的光通过与其相连的光纤耦合器4到达光纤法珀传感器6,使压力信号调制到光信号。经调制后的光信号再次通过光纤耦合器6导入到光纤阵列8中的对应光纤,并通过光纤阵列8的光纤输出端12进入解调光路模块。在解调光路模块中,光信号通过光楔9形成空间低相干干涉条纹并被线阵CCD10接收,线阵CCD信号输出与LED光源调制信号保持同步。信号处理单元11对线阵CCD10输出的干涉条纹信号进行处理,从中提取出法珀腔信号,并根据标定数据对应出压力信息。The array type multi-channel optical fiber method for measuring the Perkin pressure includes the following steps: during acquisition and processing, the LED light source modulation module 1 generates an LED light source modulation signal, so that one
LED光源调制模块1输出调制频率在10Hz到40kHz的调制信号,LED光源阵列3中的各个LED光源2依据此调制信号进行切换,依次发光和熄灭。线阵CCD10同步采集发光LED光源2所在压力传感通道产生的低相干干涉条纹信号,通过信号处理单元11解调出该路压力传感通道对应的压力信息。因此,信号处理单元11依据LED光源调制模块1输出的调制信号,顺序解调出各个压力传感通道对应的压力信息,实现基于LED光源调制的阵列式多通道光纤法珀压力传感。The LED light source modulation module 1 outputs a modulation signal with a modulation frequency of 10 Hz to 40 kHz, and each
本发明的具体实施方式描述如下:Specific embodiments of the present invention are described as follows:
本实施例中所例举的是由12路压力传感通道构成多通道光纤法珀压力传感装置,LED光源调制模块1采用10kHz电压调制频率,对12路白光LED光源2进行调制,其光源调制响应如图3所示。由于LED光源响应快、切换速度快、信号稳定,电压调制频率为10kHz时,白光LED光源响应波形13为完整方波,且与驱动电路输出电压14和调制电压15同步,具有非常好的响应特性。What is exemplified in this embodiment is a multi-channel fiber optic Fabry pressure sensing device composed of 12 pressure sensing channels. The LED light source modulation module 1 adopts a voltage modulation frequency of 10 kHz to modulate the 12-way white LED
一个白光LED光源2、一个光纤法珀传感器6和一个光纤耦合器4构成一路压力传感通道,首先对12路压力传感通道分别进行传感信号标定,得到该通道法珀传感器腔长与解调光路中线阵CCD10所采集干涉条纹位置的对应关系,作为信号处理单元11的解调依据。A white light
采集处理时,每一时刻只有一路压力传感通道的白光LED光源2打开,该路通道上的光纤法珀传感器6的两个端面反射光存在光程差2d,其中d为两个端面的距离。两路反射光构成光调制信号,耦合到光纤中并通过光纤耦合器4到达光纤阵列8中该路光纤输出端12,从光纤输出端12出射的光通过光楔9,到达线阵CCD10,当光纤法珀传感器6与光楔9产生的光程差相匹配时,线阵CCD10相应的区域会产生明显的干涉条纹。信号处理单元11根据该路压力传感通道的标定数据,对线阵CCD10采集到的干涉条纹进行处理,解调得到法珀腔腔长2d,进而得到腔长2d对应的压力值。During acquisition and processing, only the white light
LED光源调制模块1每完成一组12只光源信号的输出,信号处理系统相应的完成这一组12只光调制信号的解调。光源调制模块1采用10kHz电压调制频率,每路光纤法珀传感器6信号的采集及解调只需要0.1毫秒,每采集并解调这一组12路传感信号只需要1.2毫秒。When the LED light source modulation module 1 completes the output of a group of 12 light source signals, the signal processing system correspondingly completes the demodulation of the group of 12 light modulation signals. The light source modulation module 1 adopts a voltage modulation frequency of 10kHz, and it only takes 0.1 milliseconds to collect and demodulate the signals of each fiber-
分析这12路解调数据的分布概率,根据系统故障和分布概率关系,以及多传感器数据融合理论建立的故障检测模型,可以实现检测仪对传感器自检。使用单路光纤法珀传感通道的系统,由于传感器信号异常导致的压力算法发散,解调结果失效的概率为5%。使用12路光纤法珀传感通道的系统,通过故障检测模型,超过3路传感器同时发生信号异常导致整个系统失败的概率减小到0.0052%,大幅度提高系统的稳定性和可靠性。By analyzing the distribution probability of the 12 channels of demodulation data, according to the relationship between system faults and distribution probability, and the fault detection model established by the theory of multi-sensor data fusion, the self-test of the sensor can be realized by the detector. For a system using a single-channel optical fiber sensor channel, the probability of demodulation result failure is 5% due to the divergence of the pressure algorithm caused by the abnormal signal of the sensor. Using the system with 12 optical fiber sensor channels, through the fault detection model, the probability of the failure of the entire system due to signal abnormalities in more than 3 sensors at the same time is reduced to 0.0052%, which greatly improves the stability and reliability of the system.
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Cited By (7)
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CN103234672A (en) * | 2013-04-17 | 2013-08-07 | 天津大学 | Birefringent crystal temperature compensation based optic fiber pressure sensor and production method thereof |
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CN105890679A (en) * | 2016-06-20 | 2016-08-24 | 天津大学 | Optical fiber Fabry-Perot type flow measuring device with local bending for flow guiding and measuring method |
CN105890679B (en) * | 2016-06-20 | 2019-11-22 | 天津大学 | Fiber-optic Far-Pert Flow Test Method for Local Bend Diversion |
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CN110686707A (en) * | 2019-09-06 | 2020-01-14 | 天津大学 | Multichannel polarization low-coherence interference demodulation system and demodulation method based on area array CCD |
CN113176032A (en) * | 2021-04-23 | 2021-07-27 | 天津大学 | Pressure measurement device and method based on orthogonal phase rapid demodulation and intensity compensation |
CN113176032B (en) * | 2021-04-23 | 2022-04-05 | 天津大学 | Pressure measurement device and method based on orthogonal phase rapid demodulation and intensity compensation |
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