CN102829883B - Polarization laser wavelength meter - Google Patents
Polarization laser wavelength meter Download PDFInfo
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- CN102829883B CN102829883B CN201210307087.8A CN201210307087A CN102829883B CN 102829883 B CN102829883 B CN 102829883B CN 201210307087 A CN201210307087 A CN 201210307087A CN 102829883 B CN102829883 B CN 102829883B
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Abstract
本发明公开了一种偏振激光波长计。现有的波长计存在结构复杂或成本较高等问题。本发明中的参考激光和被测激光分别通过第一机械快门和第二机械快门入射至激光偏振干涉仪镜组，并分别构成各自的激光偏振干涉仪，激光偏振干涉仪测量固定于压电陶瓷上的移动镜的位移并输出线性偏振激光束；线性偏振激光束被发送至偏振计，偏振计内的两个信号经过滤波整形电路后成为同频率的TTL信号，这两个TTL信号发送至相位计测量相位，该相位计与PC机通过GPIB线连接。本发明有效地减小了环境机械振动对测量结果的影响，可用于工作环境较为复杂的场所，同时本发明结构简单、体积小，所用的偏振干涉仪光路设置简洁，光学调节和光路对准操作简单。
The invention discloses a polarized laser wavelength meter. The existing wavelength meter has problems such as complex structure or high cost. In the present invention, the reference laser and the measured laser are respectively incident on the mirror group of the laser polarization interferometer through the first mechanical shutter and the second mechanical shutter, and constitute respective laser polarization interferometers, and the laser polarization interferometer is fixed on the piezoelectric ceramic The displacement of the moving mirror on the top and output the linearly polarized laser beam; the linearly polarized laser beam is sent to the polarimeter, and the two signals in the polarimeter become TTL signals with the same frequency after passing through the filter shaping circuit, and the two TTL signals are sent to the phase The phase meter measures the phase, and the phase meter is connected to the PC through the GPIB line. The invention effectively reduces the influence of environmental mechanical vibration on the measurement results, and can be used in places with relatively complicated working environments. At the same time, the invention has simple structure and small volume, and the optical path of the polarization interferometer used is simple and easy to operate. Simple.
Description
Technical field
The present invention relates to a kind of wavemeter, particularly a kind of polarization laser wavemeter.
Background technology
Optical maser wavelength/frequency measuring instrument is wavemeter, can be used to measure the output wave long value of tuned laser, or for measuring the wavelength value of unknown laser, has important effect in opctical frequency standard research field.
In existing system for laser wavelength measurement, what account for main flow is mainly Michelson interferometer type wavemeter, although the wavemeter of the type has the advantages that precision is high, the stroke of moving component is had relatively high expectations, as reached
the precision of magnitude, for 633nm wavelength, the stroke of moving component should be greatly about 15 millimeters, and measuring system is subject to the impact of mechanical shock like this, should not use in the workplace of circumstance complication.
Expense rope laser interferometer wavemeter is also conventional system for laser wavelength measurement, the disclosed Fizeau laser wavemeter of patent that Chinese invention patent publication number is CN1077530A, and its measuring accuracy can reach
but the optical system of this invention needs the more optical element of coupling technique, the difficulty that tuned optical and light path are aimed at is higher.
Chinese invention patent publication number is that the disclosed optical-fiber type laser wavemeter of the patent of CN102155997A utilizes the precision of the optogalvanic effect calibration wavelength of the transparent hollow cathode lamp of Fe can reach 0.01pm, this wavelength measuring apparatus uses grating monochromator, high-sensitive CCD optical receiver, wavelength calibration device and wavelength accurate measurement device etc., structure relative complex, cost is high.
Summary of the invention
The object of the present invention is to provide a kind of polarization laser wavemeter, this wavemeter is simple in structure, can be convenient, accurately measure optical maser wavelength, and for the displacement of moving component micron order stroke, its measuring accuracy can reach 10
-6.
The technical scheme that technical solution problem of the present invention is taked:
The present invention is made up of measured laser source, the first mechanical optics shutter, standard laser, the second mechanical optics shutter, the first laser polarization interferometer mirror group, the second laser polarization interferometer mirror group, piezoelectric ceramics, phasometer, polarimeter, filtering shaping circuit, turning-phase Signal source, PLL phase-locked loop and PC, and the annexation of each part mentioned above is as follows:
Reference laser and measured laser are incident to the first laser polarization interferometer mirror group and the second laser polarization interferometer mirror group by the first mechanical shutter and the second mechanical shutter respectively, reference laser and the first laser polarization interferometer mirror group, measured laser and the second laser polarization interferometer mirror group form respectively laser polarization interferometer separately, and laser polarization interferometer measurement is fixed on displacement the output linearity polarized laser beam of the moving lens on piezoelectric ceramics, the linear polarization laser beam of laser polarization interferometer output is sent to polarimeter, this linear polarization laser beam is converted into electric signal by photelectric receiver in polarimeter, this electric signal is synchronizeed with the motor pulses output signal of polarimeter, these two signals become the TTL signal of same frequency after filtering after shaping circuit, these two TTL signals are sent to phasometer and measure phase place, this phasometer is connected by GPIB line with PC, the real-time reading phase measured value of PC, simultaneously by calculating the phase differential ratio of the reference beam of known wavelength and the tested light beam of unknown wavelength, draw the wavelength value of measured laser, turning-phase Signal source, PLL phase-locked loop and piezoelectric ceramics form piezoelectric ceramics servo loop, make piezoelectric ceramics under closed loop state, are advanced step by step by the stride value quantizing.
Beneficial effect of the present invention is:
1. moving component of the present invention---piezoelectric ceramics, in closed-loop working state, has reduced the impact of environment mechanical vibration on measurement result effectively, can be used for the comparatively complicated place of working environment.
2. wavemeter of the present invention is simple in structure, volume is little, and polarized interferometer light path used arranges succinctly, and optics adjusting and light path alignment function are simple.
3. wavelength measurement precision of the present invention can reach
the displacement stroke of required moving component is micron order, and the required displacement stroke of Michelson interfere type wavemeter of same order of magnitude precision is centimetre-sized, the reduction of moving component stroke has reduced environment temperature, wave length shift, the impact of air refraction on measuring accuracy effectively.
Brief description of the drawings
Fig. 1 is system chart of the present invention;
Fig. 2 is laser polarization interferometer light path figure in the present invention;
Fig. 3 is filtering shaping circuit theory diagram in the present invention;
Fig. 4 is PLL phase-locked loop theory diagram in the present invention.
Embodiment
Further illustrate the present invention below in conjunction with accompanying drawing.
As shown in Figure 1, with the first mechanical optics shutter 1 ' standard laser source 1 and with the second mechanical optics shutter 2 ' the laser beam incident exported of measured laser source 2 to polarized interferometer mirror group 3.The first mechanical shutter and the second mechanical shutter are optical-mechanical shutter, only have wherein a branch of light beam of reference laser beam and measured laser bundle to enter polarization laser interferometer for guaranteeing within the scope of certain hour.Reference laser source 1 and polarized interferometer mirror group 3, measured laser source 2 and polarized interferometer mirror group 3 form respectively laser polarization interferometer separately, and polarized interferometer mirror group 3 is common sparing.Laser polarization interferometer measurement is fixed on displacement the output linearity polarized laser beam of the moving lens 3-7 on piezoelectric ceramics 9, the linear polarization laser beam of laser polarization interferometer output is sent to polarimeter 4, this linear polarization laser beam is converted into electric signal by photelectric receiver in polarimeter, this electric signal is synchronizeed with the motor pulses output signal of polarimeter, these two signals become the TTL signal of same frequency after filtering after shaping circuit 5, these two TTL signals are sent to phasometer 6 and measure phase place, this phasometer is connected by GPIB line with PC, the real-time reading phase measured value of Labview program of developing on PC, simultaneously by calculating the phase differential ratio of the reference beam of known wavelength and the tested light beam of unknown wavelength, draw the wavelength value of measured laser.Turning-phase Signal source 7, PLL phase-locked loop 8 and piezoelectric ceramics 9 form piezoelectric ceramics servo loop, make piezoelectric ceramics under closed loop state, are advanced step by step by the stride value quantizing.
A distinguishing feature of polarization wavemeter of the present invention has been utilized laser polarization interferometer exactly.Light path as shown in Figure 2.The light path of the laser polarization interferometer being made up of reference light source is: reference light source 1 is exported a linear polarization laser beam light, and this linearly polarized photon incides the first polaroid 3-1 and first successively
slide 3-2, the first polaroid 3-1 and first
the effect that slide 3-2 combination is adjusted is to make linear polarization laser beam be adjusted into 45 ° to the deflection angle of optical axis, its objective is and after polarization spectroscope 3-4, can obtain two aplanatic light beams.Then, this polarization angle is that the linear polarization laser beam of 45 ° has the light beam of 50% light intensity to be incident on the light splitting surface of polarization spectroscope 3-4 after spectroscope 3-3,45° angle polarized light is become respectively two bundle polarized lights by the light splitting surface of polarization spectroscope 3-4, is respectively polarization direction and is parallel to the light beam one of paper and the polarization direction light beam two perpendicular to paper.Light beam is once inciding successively first
slide 3-5, the first level crossing 3-6 and be placed in cube catoptron 3-7 on piezoelectric ceramics 9 are again incident to the first level crossing 3-6 and first after a cube catoptron 3-7 reflects
slide 3-5, then becomes direction of vibration and is again incident to perpendicular to the laser beam of paper the light splitting surface place of polarization spectroscope 3-4, after the light splitting surface projection of polarization spectroscope 3-4, is incident to second
slide 3-14, now the polarization state of laser beam becomes as left circularly polarized light.Light beam two is through inciding successively the 3rd simultaneously
slide 3-10, the 3rd level crossing 3-19, the second level crossing 3-8 and be placed in cube catoptron 3-7 on piezoelectric ceramics 9 are again incident to the second level crossing 3-8, the 3rd level crossing 3-9 and the 3rd after a cube catoptron 3-7 reflects
slide 3-10, then becomes laser beam that direction of vibration is parallel to paper and is again incident to the light splitting surface place of polarization spectroscope 3-4, after the light splitting surface reflection of polarization spectroscope 3-4, is incident to second
slide 3-14, now the polarization state of laser beam becomes as right-circularly polarized light.Finally, left circularly polarized light light beam one and right-circularly polarized light light beam two are mixed into a linearly polarized photon and are incident to polarimeter 4.
The light path of the laser polarization interferometer being made up of measured light is: measured light 2 is exported a linear polarization laser beam light, and this linearly polarized photon incides the 4th level crossing 3-13, the second polaroid 3-12 and second successively
slide 3-11, the second polaroid 3-12 and second
the combination corrective action of slide 3-11 is to make linear polarization laser beam be adjusted into 45 ° to the deflection angle of optical axis, its objective is and after polarization spectroscope 3-4, can obtain two aplanatic light beams.Then, this polarization angle is that the linear polarization laser beam of 45 ° has the light beam of 50% light intensity to be incident on the light splitting surface of polarization spectroscope 3-4 after spectroscope 3-3, and the light path of the laser polarization interferometer forming with reference light source through the light path of spectroscope 3-4 is identical.Finally, measured laser bundle also becomes linearly polarized photon and is incident to polarimeter 4 after polarized interferometer.
The polarimeter 4 that the present invention uses is slide machinery rotating type polarimeter, is rotated by driven by motor
slide, linear polarizer and photodetector composition.Light intensity signal to the polarized interferometer outgoing laser beam being recorded by photodetector carries out Fourier analysis, obtains the phase shift signalling of four-time harmonic component and the displacement of piezoelectric ceramics relevant with optical maser wavelength.Its theoretical analysis derivation is as follows:
The left circularly polarized light light beam one of polarized interferometer emergent light and the light field component of right-circularly polarized light light beam two
be respectively:
That is to say, the phase differential of light beam one and light beam two is ±
, the value of phase differential depends on displacement value and the direction of piezoelectric ceramics 9.Polarimeter 4 mixes this two bundles circularly polarized light, obtains linearly polarized light:
Polarization azimuth
value and displacement d and the optical maser wavelength of piezoelectric ceramics 9
relation:
In formula,
for vacuum laser wavelength.
In the present invention, Stokes parameter is measured by polarimeter 4.Employing Fourier analysis can be from the light intensity signal of photodetection
try to achieve
.Light intensity signal
for Stokes parameter (S
0, S
1, S
2, S
3) functional expression, its expression formula is as follows:
(5) formula is launched, after Fourier analysis, can obtain:
(6)
Two in formula (6) are respectively
real part and the imaginary part of four-time harmonic.As used
represent
the phase shift of four-time harmonic, by calculating
and in conjunction with azimuthal definition
can obtain:
Therefore,, by (4) formula and (7) formula, try to achieve displacement
dwith
the phase shift of four-time harmonic
pass be:
If the laser wave long value of reference light source is
, the laser wave long value of measured light is
, the polarized interferometer output intensity signal four-time harmonic phase shift building by calculating known wavelength
polarized interferometer output intensity signal four-time harmonic phase shift with unknown wavelength structure
ratio, can draw the wavelength value of measured laser.
Filtering shaping circuit of the present invention is for the treatment of the output signal from polarimeter 4, and the output signal of polarimeter is the light intensity signal S being detected by photodetector
1with drag
the pulse signal S that the motor of slide rotation produces
2, the theory diagram of filtering shaping circuit as shown in Figure 3.Light intensity signal S
1the four-time harmonic component that obtains this signal after high-grade filting circuit filtering, changes into square-wave signal by waveform conversion circuit 1, and this square-wave signal obtains TTL signal S3 after frequency dividing circuit 1 frequency division; Motor pulses signal S
2obtain TTL signal S4 through waveform conversion circuit 2 and frequency dividing circuit 2; The setting of frequency dividing circuit is TTL signal S3 and the signal S4 in order to obtain same frequency, to compare the phase difference value of these two signals
.Polarimeter is measured
the Measurement Resolution at angle is 0.01 °, as standard laser wavelength used
for 632.991nm, for the Measurement Resolution of unknown wavelength is reached
, the stroke of interferometer moving component at least should be
, the moving component of magnitude stroke can complete with piezoelectric ceramics like this, and will reach other Michelson interferometer type wavemeter of same stage resolution ratio, and required displacement stroke is
, that is to say that stroke multiple is about 50000 times.
Phase difference value of the present invention is measured the phasometer that adopts 12, and phasometer is connected to PC by gpib bus, and the Labview program function one of developing on PC is the phase difference value that reads in real time measuring-signal S3 and signal S4
, the second mechanical optics shutter close in the situation that, measure the accumulative total variable quantity of phase difference value during piezoelectric ceramics action at the first mechanical optics shutter opening
, the second mechanical optics shutter opening in the situation that, measure the phase difference value accumulative total variable quantity causing with the displacement of stroke piezoelectric ceramics at the first mechanical optics shutter close
, the operation of Labview phase difference value sampling routine is synchronizeed with the start and stop of the first and second mechanical optics shutters.The function two of Labview program is real-time calculating
value, to draw the wavelength value of measured laser.
The position control of piezoelectric ceramics 9 of the present invention adopts the control of PLL phase-lock loop.Under open loop situations, the displacement measurement of piezoelectric ceramics is subject to the impact of mechanical noise, temperature drift etc. larger, and in the present invention, piezoelectric ceramics is operated under closed loop state, as shown in formula (8), as under the certain condition of wavelength value, the phase-shift value of light intensity signal four-time harmonic
with piezoelectric ceramics displacement
dlinearly proportional, therefore the method for available phases locking tracking is controlled the displacement of piezoelectric ceramics.As shown in Figure 4, in closed phase-locked loop, the TTL signal S5 that the turning-phase Signal source 7 of being controlled by PC produces with from the signal S3 same frequency of polarized interferometer, and there is continuous phase shift difference, signal S5 and signal S3 are done phase bit comparison by XOR circuit, the error signal obtaining is converted into voltage signal through low-pass filter circuit and drives piezoelectric ceramics, and piezoelectric ceramics to be to be advanced step by step with the corresponding step-length of phase shift difference, thereby realizes the servocontrol of piezoelectric ceramics displacement.
Embodiment:
The standard laser 2 of the embodiment of the present invention is selected He-Ne laser instrument, and its wavelength calibration value is 632.991nm, is relatively uncertainly
.Measured laser device 1 is an external cavity diode laser.The piezoelectric ceramics range adopting is
.The phasometer adopting is the phasometer of 12.Turning-phase Signal source is a DDS function signal generator, and the phase-shift value of generation is 1 °, and occurrence frequency is 4Hz.In Fig. 3, light intensity signal S
1for containing the light intensity signal of direct current, second harmonic and four-time harmonic component, motor pulses signal S
2frequency be 280Hz, the center frequency filtering of high-grade filting circuit is 1120Hz, the frequency division multiple of frequency dividing circuit 1 is 8, the frequency division multiple of frequency dividing circuit 2 is that the frequency of 2, TTL signal S3 and signal S4 is 140Hz.In Fig. 4, XOR circuit adopts simple XOR gate chip, the cutoff frequency very little (several hertz) of low-pass filter circuit.The phase shift value producing due to phase generator is 1 °, and according to (8) formula, the corresponding theoretical step size value of piezoelectric ceramics is 20nm, and displacement total kilometres are
.Examples measure result is: the accumulative total phase value that the polarized interferometer being made up of standard laser records
be 4228.4571 °, the accumulative total phase value that the polarized interferometer being made up of measured laser device records
be 4080.4801 °, its ratio is 1.036275397, and the wavelength that obtains measured laser device is 655.931nm, and this measurement has repeated 40 times.The final tested wavelength average measurement value obtaining is 655.941nm, measuring accuracy
for
.
Claims (5)
1. polarization laser wavemeter, it is characterized in that: this wavemeter is made up of measured laser source, the first mechanical optics shutter, standard laser, the second mechanical optics shutter, the first laser polarization interferometer mirror group, the second laser polarization interferometer mirror group, piezoelectric ceramics, phasometer, polarimeter, filtering shaping circuit, turning-phase Signal source, PLL phase-locked loop and PC, and the annexation of each part mentioned above is as follows:
Reference laser and measured laser are incident to the first laser polarization interferometer mirror group and the second laser polarization interferometer mirror group by the first mechanical shutter and the second mechanical shutter respectively, reference laser and the first laser polarization interferometer mirror group, measured laser and the second laser polarization interferometer mirror group form respectively laser polarization interferometer separately, and laser polarization interferometer measurement is fixed on displacement the output linearity polarized laser beam of the moving lens on piezoelectric ceramics, the linear polarization laser beam of laser polarization interferometer output is sent to polarimeter, this linear polarization laser beam is converted into electric signal by photelectric receiver in polarimeter, this electric signal is synchronizeed with the motor pulses output signal of polarimeter, these two signals become the TTL signal of same frequency after filtering after shaping circuit, these two TTL signals are sent to phasometer and measure phase place, this phasometer is connected by GPIB line with PC, the real-time reading phase measured value of PC, simultaneously by calculating the phase differential ratio of the reference beam of known wavelength and the tested light beam of unknown wavelength, draw the wavelength value of measured laser, turning-phase Signal source, PLL phase-locked loop and piezoelectric ceramics form piezoelectric ceramics servo loop, make piezoelectric ceramics under closed loop state, are advanced step by step by the stride value quantizing,
The first described laser polarization interferometer mirror group is by the first polaroid, first
slide, spectroscope, polarization spectroscope, first
slide, the first level crossing, cube catoptron, the second level crossing, the 3rd level crossing, second
slide, the 3rd
slide composition;
The second described laser polarization interferometer mirror group is by the 4th level crossing, the second polaroid, second
slide, spectroscope, polarization spectroscope, first
slide, the first level crossing, cube catoptron, the second level crossing, the 3rd level crossing, second
slide, the 3rd
slide composition.
2. polarization laser wavemeter according to claim 1, it is characterized in that: the first described mechanical shutter or the second mechanical shutter are optical-mechanical shutter within the scope of certain hour, only having wherein a branch of light beam of reference laser beam and measured laser bundle to enter laser polarization interferometer for guaranteeing.
3. polarization laser wavemeter according to claim 1, is characterized in that: described polarization is counted commercial polarimeter, is rotated by driven by motor
slide, linear polarizer and photodetector composition; Recorded the light intensity signal of laser polarization interferometer outgoing laser beam by photodetector, this light intensity signal is after Fourier analysis, and the phase shift signalling of its four-time harmonic component is relevant with the displacement of piezoelectric ceramics and optical maser wavelength.
4. polarization laser wavemeter according to claim 1, is characterized in that: described filtering shaping circuit comprises high-grade filting, frequency division and waveform transformation three parts.
5. polarization laser wavemeter according to claim 1, is characterized in that: described PLL phase-locked loop comprises turning-phase Signal source, polarized interferometer, XOR circuit, low-pass filter.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1844868A (en) * | 2006-04-28 | 2006-10-11 | 清华大学 | Method and device for measuring laser wavelength by heterodyne interferometry |
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| CN1844868A (en) * | 2006-04-28 | 2006-10-11 | 清华大学 | Method and device for measuring laser wavelength by heterodyne interferometry |
Non-Patent Citations (6)
| Title |
|---|
| Polarimetric interferometer for nanoscale positioning applications;S.Xu et al;《 Review of Scientific Instruments》;20081231;全文 * |
| S.Xu et al.Polarimetric interferometer for nanoscale positioning applications.《 Review of Scientific Instruments》.2008,全文. |
| 偏振激光干涉仪的纳米定位系统;许素安等;《中国计量学院学报》;20090630;第20卷(第2期);第118－121页 * |
| 基于相控外差干涉技术的纳米定位方法的研究;许素安等;《仪器仪表学报》;20110731;第32卷(第7期);全文 * |
| 许素安等.偏振激光干涉仪的纳米定位系统.《中国计量学院学报》.2009,第20卷(第2期),第118－121页. |
| 许素安等.基于相控外差干涉技术的纳米定位方法的研究.《仪器仪表学报》.2011,第32卷(第7期),全文. |
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