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CN102751393A - Light emitting diode structure - Google Patents

Light emitting diode structure Download PDF

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Publication number
CN102751393A
CN102751393A CN2011100987927A CN201110098792A CN102751393A CN 102751393 A CN102751393 A CN 102751393A CN 2011100987927 A CN2011100987927 A CN 2011100987927A CN 201110098792 A CN201110098792 A CN 201110098792A CN 102751393 A CN102751393 A CN 102751393A
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type semiconductor
semiconductor layer
layer
quantum well
light emitting
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赖彦霖
王信介
黄吉丰
林京亮
李允立
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Genesis Photonics Inc
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Genesis Photonics Inc
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Abstract

A light emitting diode structure comprises a first type semiconductor layer, a light emitting layer, a second type semiconductor layer, a first conductive layer and a second conductive layer. The light emitting layer is disposed on the first type semiconductor layer. The light-emitting layer comprises a plurality of energy barrier layers and a plurality of quantum well layers, wherein the quantum well layers are respectively clamped between the energy barrier layers. The second type semiconductor layer is configured on the light emitting layer, wherein the thickness of the quantum well layer closest to the second type semiconductor layer is at least more than or equal to 1.1 times of the average thickness of other quantum well layers. The first conductive layer is electrically connected with the first type semiconductor layer. The second conductive layer is electrically connected to the second type semiconductor layer. The LED structure can improve the overall luminous efficiency of the LED structure.

Description

发光二极管结构LED structure

技术领域 technical field

本发明涉及一种发光二极管结构,且特别涉及一种发光效率较佳的发光二极管结构。The invention relates to a light emitting diode structure, and in particular to a light emitting diode structure with better luminous efficiency.

背景技术 Background technique

近年来,由于发光二极管的发光效率不断提升,使得发光二极管在某些领域已渐渐取代日光灯与白热灯泡,例如需要高速反应的扫描器灯源、液晶显示器的背光源或前光源汽车的仪表板照明、交通号志灯,以及一般的照明装置等。一般常见的发光二极管是使用氮化物的半导体材料来形成,大多数如上所述的发光二极管是以磊晶方式形成于蓝宝石基板上。In recent years, due to the continuous improvement of the luminous efficiency of light-emitting diodes, light-emitting diodes have gradually replaced fluorescent lamps and incandescent bulbs in some fields, such as scanner light sources that require high-speed response, backlights for liquid crystal displays, or dashboards for front lights. Lighting, traffic lights, and general lighting installations, etc. Common light-emitting diodes are formed using nitride semiconductor materials, and most of the above-mentioned light-emitting diodes are formed on sapphire substrates in an epitaxial manner.

传统的发光二极管结构通常会包含一基板、一N型下局限层(N typecladding layer)、一多重量子井结构(multiple quantum wells tructure)、一P型上局限层、一N型电极及一P型电极。N型下局限层、多重量子井结构与P型上局限层依序配置于基板上,而N型电极及P型电极分别电性连接N型下局限层与P型上局限层,其中施加驱动电压于N型电极及P型电极,便可驱动发光二极管结构发光。The traditional LED structure usually includes a substrate, an N type cladding layer (N type cladding layer), a multiple quantum well structure (multiple quantum wells structure), a P type confinement layer, an N type electrode and a P type electrode. The N-type lower confinement layer, the multiple quantum well structure, and the P-type upper confinement layer are sequentially arranged on the substrate, and the N-type electrode and the P-type electrode are respectively electrically connected to the N-type lower confinement layer and the P-type upper confinement layer, wherein the driving force is applied. Applying voltage to the N-type electrode and the P-type electrode can drive the LED structure to emit light.

一般来说,多重量子井结构内的量子井层的厚度通常会设计成相同,且量子井层的厚度若过厚,则会产生缺陷而影响发光二极管结构的发光效益,因此,如何有效地设计多重量子井结构内的量子井层的厚度,在避免缺陷产生的同时,还能有效地使发光二极管结构的发光效益获得提升,实为一项重要的课题。Generally speaking, the thickness of the quantum well layer in the multiple quantum well structure is usually designed to be the same, and if the thickness of the quantum well layer is too thick, defects will be generated and affect the luminous efficiency of the LED structure. Therefore, how to effectively design The thickness of the quantum well layer in the multiple quantum well structure, while avoiding defects, can effectively improve the luminous efficiency of the light emitting diode structure, which is an important issue.

发明内容Contents of the invention

本发明提供一种发光二极管结构,其具有较佳的发光效率。The invention provides a light emitting diode structure with better luminous efficiency.

本发明的其他目的和优点可以从本发明所揭示的技术特征中得到进一步的了解。Other purposes and advantages of the present invention can be further understood from the technical features disclosed in the present invention.

为达到上述的一或部分或全部目的或是其他目的,本发明的一实施例提出一种发光二极管结构,包括第一型半导体层、发光层、第二型半导体层、第一导电层以及第二导电层。发光层配置于第一型半导体层上。发光层包括数个能障层以及数个量子井层,其中这些量子井层分别夹设于这些能障层之间。第二型半导体层配置于发光层上,其中最靠近第二型半导体层的量子井层的厚度至少大于等于其他这些量子井层的平均厚度的1.1倍。第一导电层电性连接第一型半导体层。第二导电层电性连接第二型半导体层。In order to achieve one or part or all of the above objectives or other objectives, an embodiment of the present invention provides a light emitting diode structure, including a first type semiconductor layer, a light emitting layer, a second type semiconductor layer, a first conductive layer and a second Two conductive layers. The light emitting layer is configured on the first type semiconductor layer. The light-emitting layer includes several energy barrier layers and several quantum well layers, wherein the quantum well layers are respectively sandwiched between the energy barrier layers. The second-type semiconductor layer is disposed on the light-emitting layer, wherein the thickness of the quantum well layer closest to the second-type semiconductor layer is at least 1.1 times the average thickness of the other quantum well layers. The first conductive layer is electrically connected to the first type semiconductor layer. The second conductive layer is electrically connected to the second type semiconductor layer.

在本发明的一实施例中,最靠近第二型半导体层的量子井层的厚度大于其他每一这些量子井层的厚度。In an embodiment of the present invention, the thickness of the quantum well layer closest to the second-type semiconductor layer is greater than the thickness of each of the other quantum well layers.

在本发明的一实施例中,最靠近第二型半导体层的量子井层的厚度至少大于等于其他这些量子井层的平均厚度的1.2倍。In an embodiment of the present invention, the thickness of the quantum well layer closest to the second-type semiconductor layer is at least 1.2 times the average thickness of the other quantum well layers.

在本发明的一实施例中,最靠近第二型半导体层的量子井层的厚度小于等于其他这些量子井层的平均厚度的3倍。In an embodiment of the present invention, the thickness of the quantum well layer closest to the second-type semiconductor layer is less than or equal to three times the average thickness of the other quantum well layers.

在本发明的一实施例中,其他每一这些量子井层的厚度均相同。In an embodiment of the present invention, each of the other quantum well layers has the same thickness.

在本发明的一实施例中,发光二极管结构还包括磊晶基板,其中第一型半导体层、发光层与第二型半导体层依序堆叠于磊晶基板上,且发光层与第二型半导体层配置于第一型半导体层的部分区域上并暴露出部分第一型半导体层,而第一导电层配置于被发光层与第二型半导体层所暴露出的第一型半导体层上。In an embodiment of the present invention, the light emitting diode structure further includes an epitaxial substrate, wherein the first type semiconductor layer, the light emitting layer and the second type semiconductor layer are sequentially stacked on the epitaxial substrate, and the light emitting layer and the second type semiconductor layer The layer is configured on a part of the first-type semiconductor layer and exposes a part of the first-type semiconductor layer, and the first conductive layer is configured on the first-type semiconductor layer exposed by the light-emitting layer and the second-type semiconductor layer.

在本发明的一实施例中,第一导电层配置于第一型半导体层的另一侧,且第一型半导体层位于发光层与第一导电层之间。在本发明的一实施例中,发光二极管结构,还包括导电基板,配置于第一型半导体层与第一导电层之间。In an embodiment of the present invention, the first conductive layer is disposed on the other side of the first type semiconductor layer, and the first type semiconductor layer is located between the light emitting layer and the first conductive layer. In an embodiment of the present invention, the LED structure further includes a conductive substrate disposed between the first type semiconductor layer and the first conductive layer.

在本发明的一实施例中,第一型半导体层为N型半导体层,而第二型半导体层为P型半导体层。In an embodiment of the present invention, the first-type semiconductor layer is an N-type semiconductor layer, and the second-type semiconductor layer is a P-type semiconductor layer.

在本发明的一实施例中,第一型半导体层与第二型半导体层的材质是由氮化镓、氮化铝镓、氮化铟镓、氮化铝铟镓至少其中之一掺杂II族元素或IV族元素所构成。In an embodiment of the present invention, the material of the first-type semiconductor layer and the second-type semiconductor layer is at least one of gallium nitride, aluminum gallium nitride, indium gallium nitride, and aluminum indium gallium nitride doped with II Composed of group elements or group IV elements.

在本发明的一实施例中,这些能障层的材质包括氮化镓,而这些量子井层的材质包括氮化铟镓。In an embodiment of the present invention, the material of the energy barrier layers includes gallium nitride, and the material of the quantum well layers includes indium gallium nitride.

基于上述,本发明通过使最靠近第二型半导体层的量子井层的厚度大于等于其他每一这些量子井层的厚度,且最靠近第二型半导体层的量子井层的厚度至少大于会等于其他这些量子井层的平均厚度的1.1倍,较佳为1.2倍,如此一来,当发光二极管结构被驱动时,最靠近第二型半导体层的量子井层便可承载较多的载子,从而可提升发光二极管结构的整体发光效率。Based on the above, the present invention makes the thickness of the quantum well layer closest to the second type semiconductor layer greater than or equal to the thickness of each of the other quantum well layers, and the thickness of the quantum well layer closest to the second type semiconductor layer is at least greater than or equal to The average thickness of these other quantum well layers is 1.1 times, preferably 1.2 times, so that when the light-emitting diode structure is driven, the quantum well layer closest to the second-type semiconductor layer can carry more carriers, Therefore, the overall luminous efficiency of the light emitting diode structure can be improved.

为让本发明的上述特征和优点能更明显易懂,下文特举实施例,并配合附图作详细说明如下。In order to make the above-mentioned features and advantages of the present invention more comprehensible, the following specific embodiments are described in detail with reference to the accompanying drawings.

附图说明 Description of drawings

图1为本发明一实施例的发光二极管结构的局部剖示图。FIG. 1 is a partial cross-sectional view of a light emitting diode structure according to an embodiment of the present invention.

图2A~图2D分别为图1的发光层的不同实施态样的局部示意图。2A to 2D are partial schematic diagrams of different implementations of the light-emitting layer in FIG. 1 .

图3为本发明一实施例的发光二极管结构的局部剖示图。FIG. 3 is a partial cross-sectional view of a light emitting diode structure according to an embodiment of the present invention.

附图标记:Reference signs:

100、200:发光二极管结构    110、210:第一型半导体层100, 200: light emitting diode structure 110, 210: first type semiconductor layer

120、220:发光层            122:能障层120, 220: Light-emitting layer 122: Barrier layer

124a、124b:量子井层        130、230:第二型半导体层124a, 124b: quantum well layer 130, 230: second type semiconductor layer

140:磊晶基板               150:电流阻隔层140: Epitaxy substrate 150: Current blocking layer

160:电流分散层             170:缓冲层160: Current distribution layer 170: Buffer layer

240:导电基板               E1:第一导电层240: Conductive substrate E1: The first conductive layer

E2:第二导电层        H1、H2、H3:厚度E2: Second conductive layer H1, H2, H3: Thickness

具体实施方式 Detailed ways

有关本发明的前述及其他技术内容、特点与功效,在以下配合参考附图的一较佳实施例的详细说明中,将可清楚的呈现。以下实施例中所提到的方向用语,例如:上、下、左、右、前或后等,仅是参考附图的方向。因此,使用的方向用语是用来说明并非用来限制本发明。The foregoing and other technical contents, features and effects of the present invention will be clearly presented in the following detailed description of a preferred embodiment with reference to the accompanying drawings. The directional terms mentioned in the following embodiments, such as: up, down, left, right, front or back, etc., are only referring to the directions of the drawings. Accordingly, the directional terms are used to illustrate and not to limit the invention.

图1为本发明一实施例的发光二极管结构的局部剖示图,图2A~图2D分别为图1的发光层的不同实施态样的局部示意图。请先参考图1与图2A,本实施例的发光二极管结构100包括一第一型半导体层110、一发光层120、一第二型半导体层130、一第一导电层E1以及一第二导电层E2。发光层120配置于第一型半导体层110上,而第二型半导体层130配置于发光层120上,即发光层120是位于第一型半导体层110与第二型半导体层130之间。在本实施例中,第一型半导体层110例如是一N型半导体层,而第二型半导体层130则可为一P型半导体层。具体而言,第一型半导体层110与第二型半导体层130的材质是可由氮化镓、氮化铝镓、氮化铟镓、氮化铝铟镓至少其中之一掺杂II族元素或IV族元素所构成,其中本实施例以氮化镓作为举例说明。于其他实施例中,第一型半导体层110与第二型半导体层130所选用的材质也可以选用二元化合物(binary compound),例如氮化铝、氮化铟;三元化合物(ternary compound),例如氮化铝镓、氮化镓铟、氮化铝铟、砷化铝镓、砷化铟镓;及四元化合物(quaternary compound)氮化镓铟铝、磷化铝铟镓或上述组合,此部分可视使用者的需求与设计而定。FIG. 1 is a partial cross-sectional view of a light-emitting diode structure according to an embodiment of the present invention, and FIGS. 2A-2D are partial schematic diagrams of different implementations of the light-emitting layer in FIG. 1 . Please refer to FIG. 1 and FIG. 2A first. The LED structure 100 of this embodiment includes a first-type semiconductor layer 110, a light-emitting layer 120, a second-type semiconductor layer 130, a first conductive layer E1 and a second conductive layer. Layer E2. The light-emitting layer 120 is disposed on the first-type semiconductor layer 110 , and the second-type semiconductor layer 130 is disposed on the light-emitting layer 120 , that is, the light-emitting layer 120 is located between the first-type semiconductor layer 110 and the second-type semiconductor layer 130 . In this embodiment, the first-type semiconductor layer 110 is, for example, an N-type semiconductor layer, and the second-type semiconductor layer 130 is a P-type semiconductor layer. Specifically, the materials of the first-type semiconductor layer 110 and the second-type semiconductor layer 130 can be made of at least one of gallium nitride, aluminum gallium nitride, indium gallium nitride, and aluminum indium gallium nitride doped with group II elements or It is composed of group IV elements, and gallium nitride is used as an example in this embodiment. In other embodiments, the material selected for the first-type semiconductor layer 110 and the second-type semiconductor layer 130 can also be a binary compound, such as aluminum nitride and indium nitride; a ternary compound (ternary compound) , such as aluminum gallium nitride, gallium indium nitride, aluminum indium nitride, aluminum gallium arsenide, indium gallium arsenide; and quaternary compounds (quaternary compound) gallium indium aluminum nitride, aluminum indium gallium phosphide or combinations thereof, This part depends on the user's needs and design.

在发光二极管结构100中,本实施例的发光层120包括数个能障层122以及数个量子井层124a、124b,其中这些量子井层124a、124b分别夹设于这些能障层122之间,如图2A所示。换言之,本实施例的发光层120便是呈现一种多重量子井的结构,特别的是,在此多重量子井的结构中,最靠近第二型半导体层130的量子井层124a的厚度H1至少会大于等于其他这些量子井层124b的平均厚度的1.1倍,较佳为1.2倍,如此一来,当发光二极管结构100被驱动时,最靠近第二型半导体层130的量子井层124a便可承载较多的载子,从而可提升发光二极管结构100的整体发光效率。在本实施例中,最靠近第二型半导体层130的量子井层124a的厚度H1可大于其他每一这些量子井层124b的厚度H2。In the light-emitting diode structure 100, the light-emitting layer 120 of this embodiment includes several energy barrier layers 122 and several quantum well layers 124a, 124b, wherein these quantum well layers 124a, 124b are respectively sandwiched between these energy barrier layers 122 , as shown in Figure 2A. In other words, the light-emitting layer 120 of this embodiment presents a multiple quantum well structure, especially, in this multiple quantum well structure, the thickness H1 of the quantum well layer 124a closest to the second-type semiconductor layer 130 is at least It will be greater than or equal to 1.1 times, preferably 1.2 times, the average thickness of these other quantum well layers 124b, so that when the light emitting diode structure 100 is driven, the quantum well layer 124a closest to the second type semiconductor layer 130 can Carrying more carriers can improve the overall luminous efficiency of the LED structure 100 . In this embodiment, the thickness H1 of the quantum well layer 124a closest to the second-type semiconductor layer 130 may be greater than the thickness H2 of each of the other quantum well layers 124b.

以图2A所示的发光层120(多重量子井)来说,若量子井层124a、124b的厚度H1、H2皆为2.8nm时,则发光二极管结构100的整体发光亮度为750mcd。相反地,若提升最靠近第二型半导体层130的量子井层124a的厚度H1至3.1nm,而其他量子井层124b的厚度H2皆保持不变,则发光二极管结构100的整体发光亮度便可提升至820mcd。换言之,通过将本实施例的最靠近第二型半导体层130的量子井层124a的厚度H1设计成大于其他每一这些量子井层124b的厚度H2时,发光二极管结构100的发光亮度至少可提高9.33%。Taking the light-emitting layer 120 (multiple quantum wells) shown in FIG. 2A as an example, if the thicknesses H1 and H2 of the quantum well layers 124 a and 124 b are both 2.8 nm, the overall luminous brightness of the light-emitting diode structure 100 is 750 mcd. Conversely, if the thickness H1 of the quantum well layer 124a closest to the second-type semiconductor layer 130 is increased to 3.1 nm, while the thickness H2 of the other quantum well layers 124b remains unchanged, the overall luminous brightness of the LED structure 100 can be improved. Boost to 820mcd. In other words, by designing the thickness H1 of the quantum well layer 124a closest to the second-type semiconductor layer 130 in this embodiment to be greater than the thickness H2 of each of the other quantum well layers 124b, the luminance of the light emitting diode structure 100 can be improved at least 9.33%.

需要说明的是,虽然使量子井层124a的厚度H1大于其他每一这些量子井层124b的厚度H2有助于提升发光二极管结构100的发光效益,但量子井层124a的厚度过厚也会使其产生缺陷,从而降低提升发光二极管结构100的发光亮度。因此,最靠近第二型半导体层130的量子井层124a的厚度原则上会小于等于其他这些量子井层124b的平均厚度的3倍,较佳为小于平均厚度的2.5倍。在本实施例中,量子井层124a、124b的厚度H1、H2原则上大约是落在0.5nm至8nm,较佳为2nm至4.5nm。另外,由于本实施例的第一型半导体层110与第二型半导体层130是以氮化镓作为举例说明,因此,本实施例的能障层122的材质可为氮化镓,而量子井层124a、124b的材质则可为氮化铟镓。It should be noted that although making the thickness H1 of the quantum well layer 124a greater than the thickness H2 of each of the other quantum well layers 124b helps to improve the luminous efficiency of the light emitting diode structure 100, an excessive thickness of the quantum well layer 124a will also make the It produces defects, thereby reducing the luminous brightness of the LED structure 100 . Therefore, the thickness of the quantum well layer 124a closest to the second-type semiconductor layer 130 is in principle less than or equal to 3 times the average thickness of the other quantum well layers 124b, preferably less than 2.5 times the average thickness. In this embodiment, the thicknesses H1 and H2 of the quantum well layers 124a and 124b are in principle about 0.5nm to 8nm, preferably 2nm to 4.5nm. In addition, since the first-type semiconductor layer 110 and the second-type semiconductor layer 130 in this embodiment are illustrated with gallium nitride as an example, the material of the energy barrier layer 122 in this embodiment can be gallium nitride, and the quantum well The material of the layers 124a and 124b can be InGaN.

请继续参考图1与图2A,在发光二极管结构100中,发光层120可以是采用如图2A所示的多重量子井结构,即是最靠近第二型半导体层130的量子井层124a的厚度H1可大于每一量子井层124b的厚度H2,且这些量子井层124b的厚度H2实质上均为相同,但本发明并不以此为限。在其他实施例中,图1所示的发光二极管结构100的发光层120也可采用如图2B~图2D所示的多重量子井结构,而仍可具有较佳的发光效益,以下将详述各多重量子井的形态。Please continue to refer to FIG. 1 and FIG. 2A. In the light-emitting diode structure 100, the light-emitting layer 120 can adopt a multiple quantum well structure as shown in FIG. 2A, that is, the thickness of the quantum well layer 124a closest to the second-type semiconductor layer 130 H1 may be greater than the thickness H2 of each quantum well layer 124b, and the thickness H2 of these quantum well layers 124b are substantially the same, but the invention is not limited thereto. In other embodiments, the light-emitting layer 120 of the light-emitting diode structure 100 shown in FIG. 1 can also adopt the multiple quantum well structure as shown in FIGS. 2B-2D , and still have better luminous efficiency, which will be described in detail below. The shape of each multiple quantum well.

在图2B中,最靠近第二型半导体层130的量子井层124a的厚度H1大于每一量子井层124b的厚度H2,且这些量子井层124b的厚度H2实质上往远离第二型半导体层130的方向上变小;在图2C中,最靠近第二型半导体层130的量子井层124a的厚度H1可等于最靠近第一型半导体层110的量子井层124b的厚度H3并大于其他量子井层124b的厚度H2,且最靠近第二型半导体层130的量子井层124a的厚度H1会大于等于这些量子井层124b的厚度H2、H3和的平均的1.1倍;在图2D中,最靠近第二型半导体层130的量子井层124a的厚度H1等于其他某一量子井层124b的厚度H3,并大于其他量子井层124b的厚度H2,且最靠近第二型半导体层130的量子井层124a的厚度H1会大于等于这些量子井层124b的厚度H2、H3和的平均的1.1倍。In FIG. 2B, the thickness H1 of the quantum well layer 124a closest to the second-type semiconductor layer 130 is greater than the thickness H2 of each quantum well layer 124b, and the thickness H2 of these quantum well layers 124b is substantially away from the second-type semiconductor layer. 130 becomes smaller; in Fig. 2C, the thickness H1 of the quantum well layer 124a closest to the second type semiconductor layer 130 can be equal to the thickness H3 of the quantum well layer 124b closest to the first type semiconductor layer 110 and greater than other quantum wells The thickness H2 of the well layer 124b, and the thickness H1 of the quantum well layer 124a closest to the second-type semiconductor layer 130 will be greater than or equal to 1.1 times the average of the thicknesses H2, H3 of these quantum well layers 124b; in FIG. 2D, the most The thickness H1 of the quantum well layer 124a close to the second-type semiconductor layer 130 is equal to the thickness H3 of another certain quantum well layer 124b, and greater than the thickness H2 of the other quantum well layer 124b, and the quantum well closest to the second-type semiconductor layer 130 The thickness H1 of the layer 124a is greater than or equal to 1.1 times the average of the thicknesses H2, H3 and the quantum well layers 124b.

由图1可知,本实施例的发光二极管结构为一种水平式发光二极管结构,因此发光二极管结构100还包括一磊晶基板140,其中第一型半导体层110、发光层120与第二型半导体层130会依序堆叠于磊晶基板140上,且发光层120与第二型半导体层130配置于第一型半导体层110的部分区域上并暴露出部分第一型半导体层110。具体而言,当第一型半导体层110、发光层120与第二型半导体层130会依序堆叠于磊晶基板140后,便可通过一微影蚀刻过程移除部分发光层120与第二型半导体层130,以暴露出部分第一型半导体层110,如图1所示。之后,第一导电层E1配置于被发光层120与第二型半导体层130所暴露出的第一型半导体层110上,而第二导电层E2配置于第二型半导体层130上,以驱动发光二极管结构100,其中第一导电层E1会电性连接第一型半导体层110,而第二导电层E2电性连接第二型半导体层130。在本实施例中,第一导电层E1与第二导电层E2可以是单一层或是多层金属堆叠,且二者的材质也可以选用如:金、银、铂、铜、铬、锡、铅、铪、钨、钼、钕、钛、钽、铝、锌等金属、上述合金、上述金属氧化物、上述金属氮化物,或上述组合的材质,此部分视使用者的需求而定。It can be seen from FIG. 1 that the light emitting diode structure of this embodiment is a horizontal light emitting diode structure, so the light emitting diode structure 100 further includes an epitaxial substrate 140, wherein the first type semiconductor layer 110, the light emitting layer 120 and the second type semiconductor layer The layers 130 are sequentially stacked on the epitaxial substrate 140 , and the light-emitting layer 120 and the second-type semiconductor layer 130 are disposed on a part of the first-type semiconductor layer 110 and part of the first-type semiconductor layer 110 is exposed. Specifically, after the first-type semiconductor layer 110, the light-emitting layer 120, and the second-type semiconductor layer 130 are sequentially stacked on the epitaxial substrate 140, a part of the light-emitting layer 120 and the second-type semiconductor layer can be removed through a lithographic etching process. type semiconductor layer 130 to expose part of the first type semiconductor layer 110, as shown in FIG. 1 . After that, the first conductive layer E1 is disposed on the first-type semiconductor layer 110 exposed by the light-emitting layer 120 and the second-type semiconductor layer 130, and the second conductive layer E2 is disposed on the second-type semiconductor layer 130 to drive In the LED structure 100 , the first conductive layer E1 is electrically connected to the first-type semiconductor layer 110 , and the second conductive layer E2 is electrically connected to the second-type semiconductor layer 130 . In this embodiment, the first conductive layer E1 and the second conductive layer E2 can be a single layer or a multi-layer metal stack, and the materials of the two can also be selected such as: gold, silver, platinum, copper, chromium, tin, The material of lead, hafnium, tungsten, molybdenum, neodymium, titanium, tantalum, aluminum, zinc and other metals, the above-mentioned alloys, the above-mentioned metal oxides, the above-mentioned metal nitrides, or the combination of the above-mentioned materials depends on the needs of users.

在本实施例中,为了可提升发光二极管结构100的整体电性表现与发光效率,发光二极管结构100还可包括有一电流阻隔层150与一电流分散层160。电流阻隔层150配置于部分第二型半导体层130上。另外,电流分散层160配置于部分第二型半导体层13上以覆盖电流阻隔层150。在本实施例中,电流分散层160可为透明导电层,其材质例如是铟锡氧化物(indium tin oxide,ITO)、铟锌氧化物(indium zinc oxide,IZO)、铟锡锌氧化物(indium tin zincoxide,ITZO)、氧化锌(zinc oxide)、铝锡氧化物(aluminum tin oxide,ATO)、铝锌氧化物(aluminum zinc oxide,AZO)、镉铟氧化物(cadmium indium oxide,CIO)、镉锌氧化物(cadmium zinc oxide,CZO)、镓锌氧化物(GZO)及锡氟氧化物(FTO)。In this embodiment, in order to improve the overall electrical performance and luminous efficiency of the LED structure 100 , the LED structure 100 may further include a current blocking layer 150 and a current spreading layer 160 . The current blocking layer 150 is disposed on a portion of the second-type semiconductor layer 130 . In addition, the current spreading layer 160 is disposed on a portion of the second-type semiconductor layer 13 to cover the current blocking layer 150 . In this embodiment, the current spreading layer 160 can be a transparent conductive layer, and its material is, for example, indium tin oxide (ITO), indium zinc oxide (IZO), indium tin zinc oxide ( indium tin zinc oxide (ITZO), zinc oxide (zinc oxide), aluminum tin oxide (aluminum tin oxide, ATO), aluminum zinc oxide (aluminum zinc oxide, AZO), cadmium indium oxide (cadmium indium oxide, CIO), Cadmium zinc oxide (CZO), gallium zinc oxide (GZO) and tin fluoride oxide (FTO).

值得一提的是,为了可成长或磊晶高品质的第一型半导体层110于基板110上,还可以于形成第一型半导体层110于基板110之前,先形成一缓冲层170于基板110上,如图1所示。It is worth mentioning that, in order to grow or epitaxial the high-quality first-type semiconductor layer 110 on the substrate 110, a buffer layer 170 may be formed on the substrate 110 before forming the first-type semiconductor layer 110 on the substrate 110. on, as shown in Figure 1.

图3为本发明一实施例的发光二极管结构的局部剖示图。请参考图3,本实施例的发光二极管结构200包括一第一型半导体层210、一发光层220、一第二型半导体层230、一第一导电层E1以及一第二导电层E2。发光层220配置于第一型半导体层210上,而第二型半导体层230配置于发光层220上,即发光层220是位于第一型半导体层210与第二型半导体层230之间。在本实施例中,第一型半导体层210可为N型半导体层,而第二型半导体层230则可为P型半导体层。具体而言,第一型半导体层210与第二型半导体层230的材质是可由氮化镓、氮化铝镓、氮化铟镓、氮化铝铟镓至少其中之一掺杂II族元素或IV族元素所构成,其中本实施例以氮化镓作为举例说明。于其他实施例中,第一型半导体层210与第二型半导体层230所选用的材质也可以选用二元化合物(binary compound),例如氮化铝、氮化铟;三元化合物(ternary compound),例如氮化铝镓、氮化镓铟、氮化铝铟、砷化铝镓、砷化铟镓;及四元化合物(quaternary compound)氮化镓铟铝、磷化铝铟镓或上述组合,此部分可视使用者的需求与设计而定。FIG. 3 is a partial cross-sectional view of a light emitting diode structure according to an embodiment of the present invention. Please refer to FIG. 3 , the LED structure 200 of this embodiment includes a first-type semiconductor layer 210 , a light-emitting layer 220 , a second-type semiconductor layer 230 , a first conductive layer E1 and a second conductive layer E2 . The light-emitting layer 220 is disposed on the first-type semiconductor layer 210 , and the second-type semiconductor layer 230 is disposed on the light-emitting layer 220 , that is, the light-emitting layer 220 is located between the first-type semiconductor layer 210 and the second-type semiconductor layer 230 . In this embodiment, the first-type semiconductor layer 210 can be an N-type semiconductor layer, and the second-type semiconductor layer 230 can be a P-type semiconductor layer. Specifically, the materials of the first-type semiconductor layer 210 and the second-type semiconductor layer 230 can be made of at least one of gallium nitride, aluminum gallium nitride, indium gallium nitride, and aluminum indium gallium nitride doped with group II elements or It is composed of group IV elements, and gallium nitride is used as an example in this embodiment. In other embodiments, the material selected for the first-type semiconductor layer 210 and the second-type semiconductor layer 230 can also be a binary compound, such as aluminum nitride and indium nitride; a ternary compound (ternary compound) , such as aluminum gallium nitride, gallium indium nitride, aluminum indium nitride, aluminum gallium arsenide, indium gallium arsenide; and quaternary compounds (quaternary compound) gallium indium aluminum nitride, aluminum indium gallium phosphide or combinations thereof, This part depends on the user's needs and design.

由图3可知,本实施例的发光二极管结构200为一种垂直式发光二极管结构,因此第一导电层E1配置于第一型半导体层210的另一侧,且第一型半导体层210位于发光层220与第一导电层E1之间。在本实施例中,发光二极管结构200可包括有一导电基板240,配置于第一型半导体层210与第一导电层E1之间。需要说明的是,由于本实施例的发光层220也是采用前述的发光层110所描述的实施态样,即发光层220也可采用如图2A至图2D所示的实施态样,因此,本实施例的发光二极管结构200的发光效率也可获得有效的提升,此部分可参考前述说明,在此便不再赘述。It can be seen from FIG. 3 that the light emitting diode structure 200 of this embodiment is a vertical light emitting diode structure, so the first conductive layer E1 is disposed on the other side of the first type semiconductor layer 210, and the first type semiconductor layer 210 is located on the light emitting diode layer. layer 220 and the first conductive layer E1. In this embodiment, the LED structure 200 may include a conductive substrate 240 disposed between the first-type semiconductor layer 210 and the first conductive layer E1. It should be noted that, since the light-emitting layer 220 of this embodiment also adopts the implementation described above for the light-emitting layer 110, that is, the light-emitting layer 220 can also adopt the implementation forms shown in Figures 2A to 2D, therefore, this The luminous efficiency of the light emitting diode structure 200 of the embodiment can also be effectively improved, and for this part, reference can be made to the foregoing description, and details will not be repeated here.

综上所述,本发明的发光二极管结构至少具有下列优点。首先,通过使最靠近第二型半导体层的量子井层的厚度大于等于其他每一这些量子井层的厚度,且最靠近第二型半导体层的量子井层的厚度至少大于会等于其他这些量子井层的平均厚度的1.1倍,较佳为1.2倍,如此一来,当发光二极管结构被驱动时,最靠近第二型半导体层的量子井层便可承载较多的载子,从而可提升发光二极管结构的整体发光效率。另外,由于最靠近第二型半导体层的量子井层的厚度小于等于其他这些量子井层的平均厚度的3倍,因此可在有效提升发光二极管结构的整体发光效率下,并可同时避免量子井层过厚而产生缺陷,而影响发光二极管结构的整体发光效率。To sum up, the LED structure of the present invention has at least the following advantages. First, by making the thickness of the quantum well layer closest to the second-type semiconductor layer greater than or equal to the thickness of each of the other quantum well layers, and the thickness of the quantum well layer closest to the second-type semiconductor layer is at least greater than or equal to the thickness of the other quantum well layers The average thickness of the well layer is 1.1 times, preferably 1.2 times, so that when the light-emitting diode structure is driven, the quantum well layer closest to the second-type semiconductor layer can carry more carriers, thereby improving The overall luminous efficiency of a light-emitting diode structure. In addition, since the thickness of the quantum well layer closest to the second-type semiconductor layer is less than or equal to 3 times the average thickness of the other quantum well layers, the overall luminous efficiency of the light-emitting diode structure can be effectively improved, and the quantum well can be avoided at the same time. If the layer is too thick, defects will be generated, which will affect the overall luminous efficiency of the LED structure.

以上所述,仅为本发明的较佳实施例而已,当不能以此限定本发明实施的范围,即凡依本发明申请专利范围及发明说明内容所作的简单的等效变化与修饰,皆仍属本发明专利涵盖的范围内。另外本发明的任一实施例或申请专利范围不须达成本发明所揭示的全部目的或优点或特点。此外,摘要部分和标题仅是用来辅助专利文件搜寻之用,并非用来限制本发明的权利范围。The above is only a preferred embodiment of the present invention, and should not limit the scope of the present invention, that is, all simple equivalent changes and modifications made according to the patent scope of the present invention and the description of the invention are still the same. It belongs to the scope covered by the patent of the present invention. In addition, any embodiment or patent scope of the present invention does not need to achieve all the objects or advantages or features disclosed in the present invention. In addition, the abstract and the title are only used to assist in the search of patent documents, and are not used to limit the scope of rights of the present invention.

Claims (11)

1. light emitting diode construction comprises:
First type semiconductor layer;
Luminescent layer is disposed on this first type semiconductor layer, and this luminescent layer comprises several energy barrier layers and several quantum well layers, and wherein those quantum well layers are located in respectively between those energy barrier layers;
Second type semiconductor layer is disposed on this luminescent layer, wherein near the thickness of this quantum well layer of this second type semiconductor layer at least more than or equal to 1.1 times of the average thickness of other those quantum well layers;
First conductive layer electrically connects this first type semiconductor layer; And
Second conductive layer electrically connects this second type semiconductor layer.
2. light emitting diode construction according to claim 1 is wherein near the thickness of this quantum well layer of this second type semiconductor layer thickness greater than other each those quantum well layers.
3. light emitting diode construction according to claim 1, wherein near the thickness of this quantum well layer of this second type semiconductor layer at least more than or equal to 1.2 times of the average thickness of other those quantum well layers.
4. light emitting diode construction according to claim 1 is wherein near smaller or equal to the average thickness of other those quantum well layers 3 times of the thickness of this quantum well layer of this second type semiconductor layer.
5. light emitting diode construction according to claim 1, wherein the thickness of other each those quantum well layers is all identical.
6. light emitting diode construction according to claim 1; Also comprise brilliant substrate of heap of stone; Wherein this first type semiconductor layer, this luminescent layer and this second type semiconductor layer are stacked on this brilliant substrate of heap of stone in regular turn; And this luminescent layer and this second type semiconductor layer are disposed on the subregion of this first type semiconductor layer and expose this first type semiconductor layer of part, and this first conductive layer is disposed on this first type semiconductor layer that is exposed by this luminescent layer and this second type semiconductor layer.
7. light emitting diode construction according to claim 1, wherein this first conductive layer is disposed at the opposite side of this first type semiconductor layer, and this first type semiconductor layer is between this luminescent layer and this first conductive layer.
8. light emitting diode construction according to claim 7 also comprises electrically-conductive backing plate, is disposed between this first type semiconductor layer and this first conductive layer.
9. light emitting diode construction according to claim 1, wherein this first type semiconductor layer is a n type semiconductor layer, and this second type semiconductor layer is a p type semiconductor layer.
10. light emitting diode construction according to claim 1, wherein the material of this first type semiconductor layer and this second type semiconductor layer is that one of them doped with II family element or IV family element constitute at least by gallium nitride, aluminium gallium nitride alloy, InGaN, aluminum indium nitride gallium.
11. light emitting diode construction according to claim 1, wherein the material of those energy barrier layers comprises gallium nitride, and the material of those quantum well layers comprises InGaN.
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Application publication date: 20121024