CN102642714B - 基板移运装置 - Google Patents
基板移运装置 Download PDFInfo
- Publication number
- CN102642714B CN102642714B CN201210129129.3A CN201210129129A CN102642714B CN 102642714 B CN102642714 B CN 102642714B CN 201210129129 A CN201210129129 A CN 201210129129A CN 102642714 B CN102642714 B CN 102642714B
- Authority
- CN
- China
- Prior art keywords
- base plate
- block
- bracket
- holding block
- vacuum slot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 claims description 39
- 238000000034 method Methods 0.000 abstract description 16
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 10
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000013508 migration Methods 0.000 description 4
- 230000005012 migration Effects 0.000 description 4
- 238000007665 sagging Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000004801 process automation Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000011112 process operation Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Nonlinear Science (AREA)
- Robotics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (6)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210129129.3A CN102642714B (zh) | 2012-04-27 | 2012-04-27 | 基板移运装置 |
PCT/CN2012/075174 WO2013159388A1 (zh) | 2012-04-27 | 2012-05-08 | 基板移运装置 |
US13/511,180 US20130287532A1 (en) | 2012-04-27 | 2012-05-08 | Transporting Device for Substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210129129.3A CN102642714B (zh) | 2012-04-27 | 2012-04-27 | 基板移运装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102642714A CN102642714A (zh) | 2012-08-22 |
CN102642714B true CN102642714B (zh) | 2015-02-18 |
Family
ID=46655851
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210129129.3A Expired - Fee Related CN102642714B (zh) | 2012-04-27 | 2012-04-27 | 基板移运装置 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN102642714B (zh) |
WO (1) | WO2013159388A1 (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6126396B2 (ja) * | 2013-02-07 | 2017-05-10 | 三星ダイヤモンド工業株式会社 | 基板加工装置 |
US10104820B2 (en) | 2013-09-24 | 2018-10-16 | Fuji Corporation | Mounting machine |
US10981290B2 (en) * | 2015-12-18 | 2021-04-20 | Murata Machinery, Ltd. | Workpiece transportation system and workpiece transportation method |
CN106881238A (zh) * | 2017-03-15 | 2017-06-23 | 复旦大学 | 触控屏的点胶涂布设备 |
CN106882596B (zh) | 2017-03-23 | 2019-07-16 | 京东方科技集团股份有限公司 | 基板上下料系统、基板上料方法及基板下料方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1393385A (zh) * | 2001-06-26 | 2003-01-29 | 日立机电工业株式会社 | 片状基板的移动装载装置及其贮存装置 |
CN1868837A (zh) * | 2005-05-29 | 2006-11-29 | 群康科技(深圳)有限公司 | 基板运送装置 |
CN101058369A (zh) * | 2006-04-19 | 2007-10-24 | 叶祺成 | 基板移运装置 |
CN101450752A (zh) * | 2007-12-06 | 2009-06-10 | 东京毅力科创株式会社 | 基板保持件、基板搬送装置以及基板处理系统 |
JP4377918B2 (ja) * | 2004-09-27 | 2009-12-02 | オリンパス株式会社 | 基板ホルダ |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002009133A (ja) * | 2000-06-26 | 2002-01-11 | Canon Inc | 基板搬送装置 |
JP4605332B2 (ja) * | 2001-03-07 | 2011-01-05 | 株式会社日立ハイテクノロジーズ | 基板重ね合わせ装置 |
JP2003261221A (ja) * | 2002-03-08 | 2003-09-16 | Hitachi Kiden Kogyo Ltd | ガラス基板搬送用移載装置及びそれに用いるガラス基板収納用カセット |
KR100860522B1 (ko) * | 2002-03-23 | 2008-09-26 | 엘지디스플레이 주식회사 | 액정 패널의 이송장치 |
JP2005075663A (ja) * | 2003-08-29 | 2005-03-24 | Hitachi Kiden Kogyo Ltd | 基板置台 |
JP4213610B2 (ja) * | 2004-03-15 | 2009-01-21 | 富士通株式会社 | 貼合せ基板製造装置 |
KR20110036207A (ko) * | 2009-10-01 | 2011-04-07 | (주)와이티에스 | 글라스 기판 이송용 컨베이어 유닛 승강장치 |
JP5480605B2 (ja) * | 2009-12-01 | 2014-04-23 | 東京エレクトロン株式会社 | 基板搬送装置および基板処理システム |
JP2011204963A (ja) * | 2010-03-26 | 2011-10-13 | Toppan Printing Co Ltd | 大型基板収納装置 |
CN201882633U (zh) * | 2010-11-19 | 2011-06-29 | 扬博科技股份有限公司 | 可调整横向间距的基板输送装置 |
-
2012
- 2012-04-27 CN CN201210129129.3A patent/CN102642714B/zh not_active Expired - Fee Related
- 2012-05-08 WO PCT/CN2012/075174 patent/WO2013159388A1/zh active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1393385A (zh) * | 2001-06-26 | 2003-01-29 | 日立机电工业株式会社 | 片状基板的移动装载装置及其贮存装置 |
JP4377918B2 (ja) * | 2004-09-27 | 2009-12-02 | オリンパス株式会社 | 基板ホルダ |
CN1868837A (zh) * | 2005-05-29 | 2006-11-29 | 群康科技(深圳)有限公司 | 基板运送装置 |
CN101058369A (zh) * | 2006-04-19 | 2007-10-24 | 叶祺成 | 基板移运装置 |
CN101450752A (zh) * | 2007-12-06 | 2009-06-10 | 东京毅力科创株式会社 | 基板保持件、基板搬送装置以及基板处理系统 |
Also Published As
Publication number | Publication date |
---|---|
WO2013159388A1 (zh) | 2013-10-31 |
CN102642714A (zh) | 2012-08-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102642714B (zh) | 基板移运装置 | |
CN108502543B (zh) | 一种基板传输装置及方法 | |
CN101428708B (zh) | 基板移载装置及方法 | |
CN102583050B (zh) | 液晶面板基材的运输控制设备及其控制方法 | |
TWI717947B (zh) | 一種基板交接裝置及基板交接方法 | |
CN102502260A (zh) | 玻璃基板存储搬运系统以及玻璃基板存储平台 | |
CN102674007A (zh) | 液晶面板搬运方法及搬运装置 | |
US7585145B2 (en) | Panel transfer apparatus | |
KR101545499B1 (ko) | 기능성 필름 커팅장치 | |
CN217806966U (zh) | 一种电芯步进搬运装置 | |
CN113911741B (zh) | 高精度Demura设备 | |
CN213386558U (zh) | 交接支撑载台 | |
CN214187167U (zh) | 一种搬送机械手 | |
CN202487550U (zh) | 玻璃基板搬运装置 | |
US10165716B2 (en) | Substrate conveyance mechanism and component mounting method | |
KR101394482B1 (ko) | 기판 처리장치 | |
CN102119356A (zh) | 用于制造显示面板的面板装载设备和装载面板的方法 | |
US20160021800A1 (en) | Substrate conveyance mechanism and component mounting device | |
CN221727088U (zh) | 一种新型层前光伏组件搬运装置 | |
CN116322012B (zh) | 一种密集型辅料高效自动贴装设备及方法 | |
CN221149967U (zh) | 一种花篮硅片掏料送料装置 | |
TWM470376U (zh) | 用於板材之輸送機構 | |
CN216752282U (zh) | 高效率贴片机 | |
CN222098959U (zh) | 一种背光模组传送机构 | |
TWI851212B (zh) | 蓋板組裝設備 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Base-board migration device Effective date of registration: 20190426 Granted publication date: 20150218 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Registration number: 2019440020032 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20201016 Granted publication date: 20150218 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: Shenzhen China Star Optoelectronics Technology Co.,Ltd. Registration number: 2019440020032 |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150218 |