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CN102420385A - Passive Q-switched microchip laser device - Google Patents

Passive Q-switched microchip laser device Download PDF

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CN102420385A
CN102420385A CN2011103599270A CN201110359927A CN102420385A CN 102420385 A CN102420385 A CN 102420385A CN 2011103599270 A CN2011103599270 A CN 2011103599270A CN 201110359927 A CN201110359927 A CN 201110359927A CN 102420385 A CN102420385 A CN 102420385A
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王璞
曹镱
刘江
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Beijing University of Technology
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Abstract

本发明公开了一种被动调Q微片激光器,属于激光技术领域。主要包括激光增益介质、石墨烯或碳纳米管可饱和吸收体、光学元件以及LD泵浦装置。将厚度纳米量级的石墨烯、碳纳米管可饱和吸收体紧密夹贴于激光器增益介质与光学元件之间,利用器件镀膜构成平平腔或平凹腔,使用胶合、光胶或深化光胶的方法将器件全固化为简单紧凑的三明治结构。利用石墨烯、碳纳米管材料可饱和吸收波长范围宽、导热性好的特点可实现微片激光器不同波长的宽带脉冲调制和良好的散热特性。本发明具有光学体积小、全固化易维护、波长调制范围宽的优点,可降低脉冲微片激光器的工艺难度和生产成本,有着广泛应用前景。

Figure 201110359927

The invention discloses a passive Q-switched microchip laser, which belongs to the technical field of lasers. It mainly includes laser gain medium, graphene or carbon nanotube saturable absorber, optical element and LD pumping device. Graphene and carbon nanotube saturable absorbers with a thickness of nanometers are tightly clamped between the laser gain medium and the optical element, and the device coating is used to form a flat cavity or a flat concave cavity, and the glue, optical glue or deepening of the optical glue is used The method fully cured the device into a simple and compact sandwich structure. Using graphene and carbon nanotube materials with wide saturable absorption wavelength range and good thermal conductivity can realize broadband pulse modulation of different wavelengths of microchip lasers and good heat dissipation characteristics. The invention has the advantages of small optical volume, full curing and easy maintenance, and wide wavelength modulation range, can reduce the process difficulty and production cost of pulsed microchip lasers, and has wide application prospects.

Figure 201110359927

Description

被动调Q微片激光器Passively Q-switched Microchip Laser

技术领域 technical field

本发明涉及激光器领域,尤其涉及微片式结构被动调Q激光器与新型可饱和吸收体材料——石墨烯、碳纳米管。The invention relates to the field of lasers, in particular to passive Q-switched lasers with a microchip structure and novel saturable absorber materials—graphene and carbon nanotubes.

背景技术 Background technique

全固化被动调Q微片激光器结构简单紧凑易维护,特别是其毫米量级的极短腔长可实现单频和高峰值功率脉冲激光输出,有着较高的倍频效率。这些特点使得被动调Q微片激光器在科学研究、工业加工、生物医学、军事探测等领域获得了广泛应用。目前LD泵浦的被动调Q微片激光器已可实现脉宽皮秒至纳秒量级、重频千赫兹量级、峰值功率千瓦量级的脉冲输出。被动调Q微片激光器多使用Cr4+:YAG等晶体作为可饱和吸收体,亦有使用半导体可饱和吸收镜(SESAM)的报道。前者即便采用键合的Cr4+:YAG/Nd:YAG晶体,仍存在激光腔长不易控制的问题,而且此类晶体的掺杂工艺要求严格,损伤阈值也不理想。The all-solidified passive Q-switched microchip laser has a simple and compact structure and is easy to maintain. In particular, its extremely short cavity length on the order of millimeters can achieve single-frequency and high-peak-power pulsed laser output, and has high frequency-doubling efficiency. These characteristics make passive Q-switched microchip lasers widely used in scientific research, industrial processing, biomedicine, military detection and other fields. At present, the passively Q-switched microchip laser pumped by LD can realize the pulse output of the pulse width from picosecond to nanosecond, the repetition frequency of the kilohertz level, and the peak power of the kilowatt level. Most passive Q-switched microchip lasers use crystals such as Cr 4+ :YAG as saturable absorbers, and there are also reports using semiconductor saturable absorber mirrors (SESAM). Even if the former uses bonded Cr 4+ :YAG/Nd:YAG crystals, there is still the problem that the laser cavity length is not easy to control, and the doping process requirements of this type of crystals are strict, and the damage threshold is not ideal.

作为一种新型材料,石墨烯及碳纳米管有着优异的电学、光学和力学特性,在高性能电子器件、传感探测、信息存储、复合材料等领域具有重要的潜在应用价值。石墨烯及碳纳米管对多波长激光有可观的光限幅作用,特别是原子层级的石墨烯材料能够实现从可见光到中红外波段的可饱和吸收,使其在激光器制造与应用方面有着非同寻常的重要意义。随着石墨烯、碳纳米管材料大规模生产制备技术的提高与成熟,利用其作可饱和吸收体将十分有利于降低脉冲激光器工艺难度和生产成本,有望替代现有的激光脉冲被动调制器件。As a new type of material, graphene and carbon nanotubes have excellent electrical, optical and mechanical properties, and have important potential application values in high-performance electronic devices, sensing detection, information storage, composite materials and other fields. Graphene and carbon nanotubes have considerable light-limiting effects on multi-wavelength lasers. In particular, graphene materials at the atomic level can achieve saturable absorption from visible light to mid-infrared bands, making them unique in laser manufacturing and applications. unusual significance. With the improvement and maturity of the large-scale production and preparation technology of graphene and carbon nanotube materials, using them as saturable absorbers will be very beneficial to reduce the process difficulty and production cost of pulsed lasers, and is expected to replace the existing laser pulse passive modulation devices.

发明内容 Contents of the invention

本发明的目的是利用纳米量级厚度石墨烯或碳纳米管材料作可饱和吸收体,实现结构简单紧凑的三明治型全固化微片激光器及其不同波长的被动调Q。The purpose of the present invention is to use nanoscale thick graphene or carbon nanotube material as a saturable absorber to realize a sandwich-type fully solidified microchip laser with a simple and compact structure and its passive Q-switching at different wavelengths.

为实现上述目的,本发明采用以下技术方案:To achieve the above object, the present invention adopts the following technical solutions:

微片激光器包括激光增益介质、石墨烯或碳纳米管可饱和吸收体、光学元件以及LD泵浦装置。将纳米量级厚度的石墨烯或碳纳米管可饱和吸收体紧密夹贴于激光增益介质与光学元件之间,构成三明治结构。在激光增益介质与光学元件上镀膜作前后腔镜构成平行平面谐振腔或平凹腔。上述光学元件为温度补偿介质、倍频晶体、波片、对振荡波长通过的光学玻璃或晶体等器件,亦可是此类器件的组合。使用胶合、光胶或深化光胶等方法将各器件全固化。采用LD或光纤耦合输出型LD对上述三明治结构微片激光器进行端面泵浦。所述的石墨烯或碳纳米管可饱和吸收体含有石墨烯、氧化石墨烯、石墨烯聚合物、碳纳米管中的一种或多种成分,可以直接生长在基质表面,可以制备为固体粉末或薄膜形式,也可以与PVC等溶剂混合制备成聚合物薄膜形式。Microchip lasers include laser gain media, graphene or carbon nanotube saturable absorbers, optical elements, and LD pumping devices. The graphene or carbon nanotube saturable absorber with nanometer thickness is tightly sandwiched between the laser gain medium and the optical element to form a sandwich structure. Coating the laser gain medium and the optical element as the front and rear cavity mirrors constitutes a parallel plane resonant cavity or a flat concave cavity. The above-mentioned optical elements are devices such as temperature compensation media, frequency doubling crystals, wave plates, optical glass or crystals that pass the oscillation wavelength, or a combination of such devices. Each device is fully cured using gluing, photoresist, or deepening photoresist. The above-mentioned sandwich structure microchip laser is end-pumped by LD or fiber-coupled output LD. The graphene or carbon nanotube saturable absorber contains one or more components of graphene, graphene oxide, graphene polymer, and carbon nanotubes, can be directly grown on the surface of the substrate, and can be prepared as a solid powder Or film form, also can be mixed with PVC and other solvents to prepare polymer film form.

一种被动调Q的微片激光器,包括激光增益介质、石墨烯或碳纳米管可饱和吸收体、光学元件或光学材料以及LD泵浦装置;其特征在于:在增益介质泵浦端面镀对泵浦光增透光学膜、或者对激光全反射或部分反射光学膜,或者同时镀上述增透光学膜和反射光学膜;光学元件镀对激光全反射或部分反射光学膜,利用增益介质和光学元件的镀膜作前后腔镜构成平平腔或平凹腔,将厚度0.5纳米至5纳米的石墨烯、碳纳米管可饱和吸收体紧密夹贴于激光器增益介质与光学元件之间构成三明治结构。A passively Q-switched microchip laser, comprising a laser gain medium, a graphene or carbon nanotube saturable absorber, an optical element or an optical material, and an LD pumping device; it is characterized in that: a pair of pumps is plated on the pump end face of the gain medium Puguang anti-reflection optical film, or laser total reflection or partial reflection optical film, or the above-mentioned anti-reflection optical film and reflective optical film are coated at the same time; optical components are coated with laser total reflection or partial reflection optical film, using gain media and optical components The coating is used as the front and rear cavity mirrors to form a flat cavity or a flat concave cavity. Graphene and carbon nanotube saturable absorbers with a thickness of 0.5 nm to 5 nm are tightly clamped between the laser gain medium and the optical element to form a sandwich structure.

所制备的石墨烯或碳纳米管材料可饱和吸收体厚度为0.5纳米至5纳米;石墨烯可饱和吸收体中石墨烯材料的层数1至10层。The prepared graphene or carbon nanotube material saturable absorber has a thickness of 0.5 nanometers to 5 nanometers; the number of graphene material layers in the graphene saturable absorber is 1 to 10 layers.

激光增益介质为Nd:YAG晶体、Nd:YVO4晶体、Er:Yb:glass激光材料。The laser gain medium is Nd:YAG crystal, Nd:YVO 4 crystal, Er:Yb:glass laser material.

光学元件为温度补偿介质、倍频晶体、波片、对振荡波长通过的光学玻璃或晶体器件或材料,以及此类器件或材料的组合。The optical element is a temperature compensation medium, a frequency doubling crystal, a wave plate, an optical glass or crystal device or material that passes through the oscillation wavelength, and a combination of such devices or materials.

使用胶合、光胶或深化光胶的方法将微片激光器器件全固化为三明治结构。The microchip laser device is fully cured into a sandwich structure by gluing, photoresist or deepening photoresist.

使用LD直接端面泵浦,采用光纤耦合输出LD经光学系统进行端面泵浦。The LD is used for direct end-pumping, and the fiber-coupled output LD is used for end-pumping through the optical system.

所述的一种被动调Q的微片激光器,其特征在于:依次包括LD泵浦源601、准直系统602、激光增益介质301与光学元件402将石墨烯或碳纳米管可饱和吸收体201紧密夹贴在中间,构成的三明治结构;激光增益介质301泵浦端面镀有对泵浦光增透并对激光全反射的光学膜,其与镀有对激光部分反射光学膜的光学元件402作前后腔镜构成平行平面谐振腔或平凹腔。The microchip laser of a kind of passive Q-switching is characterized in that: successively comprises LD pumping source 601, collimation system 602, laser gain medium 301 and optical element 402 and graphene or carbon nanotube saturable absorber 201 Closely clamped in the middle to form a sandwich structure; the pump end of the laser gain medium 301 is coated with an optical film that is anti-reflective to the pump light and fully reflective to the laser light, and it cooperates with the optical element 402 coated with an optical film that partially reflects the laser light The front and rear cavity mirrors form a parallel plane resonant cavity or a flat concave cavity.

光纤耦合输出LD泵浦源601提供泵浦,泵浦光经准直系统602聚焦到激光增益介质301泵浦端面并耦合注入;激光增益介质301与光学元件402将石墨烯或碳纳米管可饱和吸收体201紧密夹贴在中间,构成三明治结构;激光增益介质301泵浦端面镀有对泵浦光增透并对激光全反射的光学膜,其与镀有对激光部分反射光学膜的光学元件402作前后腔镜构成平行平面谐振腔或平凹腔;石墨烯或碳纳米管可饱和吸收体201作为激光调Q装置,调Q脉冲激光通过光学元件402输出。The fiber-coupled output LD pump source 601 provides pumping, and the pumping light is focused to the pumping end face of the laser gain medium 301 by the collimation system 602 and then coupled and injected; the laser gain medium 301 and the optical element 402 combine the graphene or carbon nanotube saturable The absorber 201 is tightly sandwiched in the middle to form a sandwich structure; the pump end surface of the laser gain medium 301 is coated with an optical film that is anti-reflective to the pump light and fully reflects the laser, and it is in contact with the optical element coated with an optical film that partially reflects the laser. 402 is used as the front and rear cavity mirrors to form a parallel plane resonant cavity or a flat concave cavity; the graphene or carbon nanotube saturable absorber 201 is used as a laser Q-switching device, and the Q-switched pulse laser is output through the optical element 402 .

所述的一种被动调Q的微片激光器,其特征在于:依次包括LD泵浦源,LD泵浦源601紧贴激光增益介质301;激光增益介质301与光学元件402将石墨烯或碳纳米管可饱和吸收体201紧密夹贴在中间,构成的三明治结构;激光增益介质301泵浦端面镀有对泵浦光增透并对激光全反射的光学膜,其与镀有对激光部分反射光学膜的光学元件402作前后腔镜构成平行平面谐振腔或平凹腔。The microchip laser of a kind of passive Q-switching is characterized in that: it comprises LD pumping source in turn, and LD pumping source 601 is close to laser gain medium 301; Laser gain medium 301 and optical element 402 combine graphene or carbon nano The tube saturable absorber 201 is tightly clamped in the middle to form a sandwich structure; the pump end surface of the laser gain medium 301 is coated with an optical film that is antireflective to the pump light and fully reflective to the laser, and is coated with an optical film that is partially reflective to the laser. The optical element 402 of the film is used as the front and rear cavity mirrors to form a parallel plane resonant cavity or a flat concave cavity.

LD泵浦源601紧贴于激光增益介质301进行端面泵浦;激光增益介质301与光学元件402将石墨烯或碳纳米管可饱和吸收体201紧密夹贴在中间,构成三明治结构;激光增益介质301泵浦端面镀有对泵浦光增透并对激光全反射的光学膜,其与镀有对激光部分反射光学膜的光学元件402作前后腔镜构成平行平面谐振腔或平凹腔;石墨烯或碳纳米管可饱和吸收体201作为激光调Q装置,调Q脉冲激光通过光学元件402输出。The LD pumping source 601 is closely attached to the laser gain medium 301 for end pumping; the laser gain medium 301 and the optical element 402 tightly sandwich the graphene or carbon nanotube saturable absorber 201 in the middle to form a sandwich structure; the laser gain medium The pump end surface of 301 is coated with an optical film that is anti-reflective to the pump light and fully reflective to the laser, and is used as a front and rear cavity mirror with the optical element 402 coated with an optical film that partially reflects the laser to form a parallel plane resonant cavity or a flat concave cavity; graphite The alkene or carbon nanotube saturable absorber 201 is used as a laser Q-switching device, and the Q-switched pulsed laser is output through an optical element 402 .

所述的一种被动调Q的微片激光器,其特征在于:依次包括LD泵浦源601、准直系统602、部分反射镜603;激光增益介质301与光学元件402将石墨烯或碳纳米管可饱和吸收体201紧密夹贴在中间,构成的三明治结构;激光增益介质301的泵浦端面镀有对泵浦光增透同时对激光部分反射的光学膜,其与对激光和泵浦光全反射的光学元件402构成谐振腔。The microchip laser of a kind of passive Q-switching is characterized in that: comprise LD pumping source 601, collimation system 602, partial reflection mirror 603 successively; Laser gain medium 301 and optical element 402 combine graphene or carbon nanotube The saturable absorber 201 is tightly sandwiched in the middle to form a sandwich structure; the pump end surface of the laser gain medium 301 is coated with an optical film that can reduce the reflection of the pump light and partially reflect the laser, which is fully compatible with the laser and the pump light. The reflective optical element 402 forms a resonant cavity.

LD泵浦源601经准直系统602和部分反射镜603耦合注入激光增益介质301;激光增益介质301与光学元件402将石墨烯或碳纳米管可饱和吸收体201紧密夹贴在中间,构成三明治结构;激光增益介质301的泵浦端面镀有对泵浦光增透同时对激光部分反射的光学膜,其与对激光和泵浦光全反射的光学元件402构成谐振腔;石墨烯或碳纳米管可饱和吸收体201作为激光调Q装置,调Q脉冲激光从增益介质泵浦端面经部分反射镜603反射输出。The LD pump source 601 is coupled and injected into the laser gain medium 301 through the collimation system 602 and the partial reflector 603; the laser gain medium 301 and the optical element 402 tightly clamp the graphene or carbon nanotube saturable absorber 201 in the middle to form a sandwich Structure; the pumping end surface of the laser gain medium 301 is coated with an optical film that increases the transmission of the pump light and partially reflects the laser, which forms a resonant cavity with the optical element 402 that fully reflects the laser and the pump light; graphene or carbon nano The tube saturable absorber 201 is used as a laser Q-switching device, and the Q-switched pulsed laser is reflected from the pump end face of the gain medium and output by the partial reflection mirror 603 .

本发明采用以上技术方案,由于石墨烯、碳纳米管可饱和吸收体厚度在纳米量级、几乎不影响谐振腔长的特点,使得利用镀膜构成的激光谐振腔腔长只取决于激光增益介质厚度与腔内光学元件厚度。而使用胶合、光胶或深化光胶的方法将微片激光器器件全固化为简单紧凑的三明治结构,可有效减小激光器光学体积,便于维护。特别地,石墨烯、碳纳米管材料可饱和吸收作用波长覆盖范围宽,利用其作可饱和吸收体进行被动调Q,选用合适的激光增益介质(e.g Nd:YAG、Nd:YVO4、Er:Yb:glass)即可实现不同波长的激光脉冲输出。此外石墨烯、碳纳米管材料具有良好的导热性,十分有利于腔内器件的导热与散热。同时灵活应用各种光学器件及其组合,可以进一步实现微片激光器脉冲激光的稳频、倍频、偏振等特性。The present invention adopts the above technical scheme, because the thickness of the saturable absorber of graphene and carbon nanotubes is on the order of nanometers, which hardly affects the length of the resonant cavity, so that the length of the laser resonant cavity formed by coating film only depends on the thickness of the laser gain medium vs. cavity optics thickness. However, the method of gluing, optical glue or deepening optical glue is used to fully cure the microchip laser device into a simple and compact sandwich structure, which can effectively reduce the optical volume of the laser and facilitate maintenance. In particular, graphene and carbon nanotube materials have a wide range of saturable absorption wavelengths, and they can be used as saturable absorbers for passive Q-switching, and suitable laser gain media (eg Nd:YAG, Nd:YVO 4 , Er: Yb:glass) can realize laser pulse output with different wavelengths. In addition, graphene and carbon nanotube materials have good thermal conductivity, which is very beneficial to the heat conduction and heat dissipation of devices in the cavity. At the same time, the flexible application of various optical devices and their combinations can further realize the characteristics of frequency stabilization, frequency doubling, and polarization of the pulsed laser of the microchip laser.

附图说明 Description of drawings

图1为本发明的第一实施例的结构示意图Fig. 1 is the structural representation of the first embodiment of the present invention

图2为本发明的第二实施例的结构示意图Fig. 2 is the structural representation of the second embodiment of the present invention

图3为本发明的第三实施例的结构示意图Fig. 3 is the structural representation of the third embodiment of the present invention

图4为本发明的第四实施例的结构示意图Fig. 4 is the structural representation of the fourth embodiment of the present invention

具体实施方式 Detailed ways

现结合附图和具体实施方式对本发明进一步说明。The present invention will be further described in conjunction with the accompanying drawings and specific embodiments.

本发明主要包括:激光增益介质、石墨烯或碳纳米管可饱和吸收体、光学元件以及泵浦装置。The invention mainly includes: laser gain medium, graphene or carbon nanotube saturable absorber, optical element and pumping device.

具体实施方式1Specific implementation mode 1

石墨烯作可饱和吸收体的被动调Q掺钕钇铝石榴石(Nd:YAG)全固化微片激光器。如图2所示,所属结构器件为顺序排列的LD泵浦源601、光学准直耦合系统602、激光增益介质301、石墨烯可饱和吸收体201、光学元件401。本实施例中LD泵浦源601为波长808nm光纤耦合输出LD,激光增益介质301为Nd:YAG晶体、石墨烯可饱和吸收体201为石墨烯层数1~10层的可饱和吸收体薄膜、,光学元件401为YAG晶体。其中激光增益介质301和光学元件401镀膜:S1镀波长808nm增透、1064nm全反射的二色膜,S2镀波长808nm全反射、1064nm增透二色膜,S3镀波长1064nm部分反射膜,S4镀波长1064nm增透膜。S1与S3构成平行平面谐振腔。厚度纳米量级且具有良好导热性的石墨烯可饱和吸收体紧密夹贴于激光腔内,腔长只取决于激光增益介质301的厚度。将上述激光增益介质301、石墨烯可饱和吸收体201、光学元件401紧密压合并光胶固化为紧凑的三明治结构,嵌入铜热沉自然冷却。上述光胶具有对相应波长的高透过率和低吸收率,并有良好的导热性、耐热性和粘结强度。波长808nm泵浦光由S1耦合进入激光增益介质301,激发的激光在谐振腔内振荡,经石墨烯可饱和吸收体201调制后于S3耦合输出波长1064nm的脉冲激光。Passively Q-switched neodymium-doped yttrium aluminum garnet (Nd:YAG) all-solid-state microchip laser with graphene as saturable absorber. As shown in FIG. 2 , the structural devices are LD pump source 601 , optical collimation coupling system 602 , laser gain medium 301 , graphene saturable absorber 201 , and optical element 401 arranged in sequence. In this embodiment, the LD pump source 601 is a fiber-coupled output LD with a wavelength of 808 nm, the laser gain medium 301 is a Nd:YAG crystal, and the graphene saturable absorber 201 is a saturable absorber film with 1 to 10 graphene layers, , the optical element 401 is a YAG crystal. Among them, the laser gain medium 301 and the optical element 401 are coated: S1 is coated with a dichromatic film with a wavelength of 808nm and a total reflection of 1064nm; S2 is coated with a dichromatic film with a wavelength of 808nm and a total reflection of 1064nm; Anti-reflection coating for wavelength 1064nm. S1 and S3 form a parallel plane resonant cavity. The graphene saturable absorber with nanometer thickness and good thermal conductivity is tightly clamped in the laser cavity, and the cavity length only depends on the thickness of the laser gain medium 301 . The above-mentioned laser gain medium 301, graphene saturable absorber 201, and optical element 401 are tightly pressed and optical glue is cured to form a compact sandwich structure, which is naturally cooled by embedding a copper heat sink. The above-mentioned photoresist has high transmittance and low absorptivity for corresponding wavelengths, and has good thermal conductivity, heat resistance and bonding strength. The pump light with a wavelength of 808nm is coupled into the laser gain medium 301 by S1, and the excited laser oscillates in the resonant cavity, modulated by the graphene saturable absorber 201, and then coupled with a pulsed laser with a wavelength of 1064nm at S3.

具体实施方式2Specific implementation mode 2

碳纳米管作可饱和吸收体的被动调Q掺钕钒酸钇晶体(Nd:YVO4)微片激光器实现倍频绿光脉冲输出。如图2所示,所述结构器件为顺序排列的LD泵浦源601、光学准直耦合系统602、激光增益介质301、碳纳米管可饱和吸收体201、光学元件401、光学元件402.。本实施例中LD泵浦源601为波长808nm光纤耦合输出LD,激光增益介质301为Nd:YVO4晶体,碳纳米管可饱和吸收体201为碳纳米管的PVC聚合物膜,光学元件401为温度补偿介质,光学元件402为KTP倍频晶体。其中温度补偿介质的热膨胀系数或光热系数与Nd:YVO4晶体相反。其中激光增益介质301和光学元件402镀膜:S1镀波长808nm增透、1064nm全反射的二色膜,S2镀波长808nm全反射、1064nm增透二色膜,S3镀波长1064nm部分反射、532nm全反射二色膜,S4镀波长1064nm全反射、532nm增透二色膜。厚度纳米量级且具备良好导热性的碳纳米管可饱和吸收体紧密夹贴于激光增益介质301和光学元件401之间,由S1与S3构成平平谐振腔,激光腔长只取决于激光增益介质301和光学元件401的厚度。S3与S4构成倍频腔。将上述激光增益介质301、碳纳米管可饱和吸收体201、光学元件401和光学元件402紧密压合并光胶固化为紧凑的复数三明治结构,嵌入铜热沉自然冷却。上述光胶具有对相应波长的高透过率和低吸收率,并有良好的导热性、耐热性和粘结强度。波长808nm泵浦光由S1耦合进入激光增益介质301,激发的激光在谐振腔内振荡,经碳纳米管可饱和吸收体201调制后于S3耦合输出波长1064nm的脉冲激光。其间由热效应引起的腔内器件形变被光学元件401修正,使得激光腔长对温度不敏感,进而获得稳频效果。此后,由光学元件402提供倍频,在S4实现波长532nm的脉冲激光输出。Passively Q-switched neodymium-doped yttrium vanadate crystal (Nd:YVO 4 ) microchip laser with carbon nanotubes as saturable absorber realizes frequency-doubled green pulse output. As shown in FIG. 2 , the structural device is an LD pump source 601 , an optical collimation coupling system 602 , a laser gain medium 301 , a carbon nanotube saturable absorber 201 , an optical element 401 , and an optical element 402 . In this embodiment, the LD pumping source 601 is a fiber-coupled output LD with a wavelength of 808nm, the laser gain medium 301 is Nd:YVO 4 crystal, the carbon nanotube saturable absorber 201 is a PVC polymer film of carbon nanotubes, and the optical element 401 is As a temperature compensation medium, the optical element 402 is a KTP frequency doubling crystal. The thermal expansion coefficient or photothermal coefficient of the temperature compensation medium is opposite to that of the Nd:YVO 4 crystal. Among them, the laser gain medium 301 and the optical element 402 are coated: S1 is coated with a dichromatic film with a wavelength of 808nm and a total reflection of 1064nm; S2 is coated with a dichromatic film with a wavelength of 808nm and a total reflection of 1064nm; Dichroic coating, S4 plated with 1064nm total reflection and 532nm anti-reflection dichroic coating. The carbon nanotube saturable absorber with nanometer thickness and good thermal conductivity is tightly sandwiched between the laser gain medium 301 and the optical element 401. S1 and S3 form a flat resonant cavity. The length of the laser cavity only depends on the laser gain medium 301 and the thickness of the optical element 401. S3 and S4 form a frequency doubling cavity. The above-mentioned laser gain medium 301, carbon nanotube saturable absorber 201, optical element 401, and optical element 402 are tightly pressed and optical glue is cured into a compact complex sandwich structure, which is naturally cooled by embedding a copper heat sink. The above-mentioned photoresist has high transmittance and low absorptivity for corresponding wavelengths, and has good thermal conductivity, heat resistance and bonding strength. The pump light with a wavelength of 808nm is coupled into the laser gain medium 301 by S1, and the excited laser oscillates in the resonant cavity, modulated by the carbon nanotube saturable absorber 201, and then coupled with pulsed laser light with a wavelength of 1064nm at S3. During this period, the deformation of the device in the cavity caused by the thermal effect is corrected by the optical element 401, so that the laser cavity length is not sensitive to temperature, thereby obtaining a frequency stabilization effect. Thereafter, frequency doubling is provided by the optical element 402, and pulsed laser output with a wavelength of 532 nm is realized in S4.

具体实施方式3Specific implementation mode 3

石墨烯作可饱和吸收体实现被动调Q的Er:Yb:glass全固化微片激光器。如图3所示,所述结构器件为顺序排列的LD泵浦源601、激光增益介质301、石墨烯可饱和吸收体201、光学元件401。本实施例中LD泵浦源601为波长980nm的LD,激光增益介质301为Er:Yb:glass材料、石墨烯可饱和吸收体201为在光学元件401上生长的单层石墨烯,光学元件401为6H-SiC晶体。其中激光增益介质301的泵浦端面镀有波长980nm增透、1550nm全反射二色膜。由于6H-SiC晶体本身折射率较高(n=2.6),故光学元件反射率为20%,其与激光增益介质301的泵浦端面共同构成平行平面谐振腔。石墨烯直接生长在光学元件401腔内表面作可饱和吸收体。LD泵浦源601紧贴激光增益介质301的泵浦端面进行直接端面泵浦。将上述器件紧密压合并光胶固化为紧凑的三明治结构,嵌入铜热沉自然冷却。上述光胶具有对相应波长的高透过率和低吸收率,并有良好的导热性、耐热性和粘结强度。980nm激励光经激光增益介质301泵浦端面耦合进入,产生的激光在平平腔内振荡,经石墨烯可饱和吸收体201调制后由光学元件401耦合输出波长1550nm的脉冲激光。Graphene as saturable absorber for passive Q-switching of Er:Yb:glass all-solidified microchip lasers. As shown in FIG. 3 , the structural device is an LD pump source 601 , a laser gain medium 301 , a graphene saturable absorber 201 , and an optical element 401 arranged in sequence. In the present embodiment, the LD pumping source 601 is an LD with a wavelength of 980nm, the laser gain medium 301 is Er:Yb:glass material, and the graphene saturable absorber 201 is a single-layer graphene grown on the optical element 401, and the optical element 401 It is 6H-SiC crystal. Wherein, the pumping end surface of the laser gain medium 301 is coated with a dichroic film with a wavelength of 980nm for anti-reflection and 1550nm for total reflection. Since the 6H-SiC crystal itself has a relatively high refractive index (n=2.6), the reflectivity of the optical element is 20%, and together with the pumping end face of the laser gain medium 301, it forms a parallel plane resonant cavity. Graphene is directly grown on the inner surface of the cavity of the optical element 401 as a saturable absorber. The LD pumping source 601 is close to the pumping end face of the laser gain medium 301 for direct end face pumping. The above devices are tightly pressed and photoresist is cured into a compact sandwich structure, which is naturally cooled by embedding a copper heat sink. The above-mentioned photoresist has high transmittance and low absorptivity for corresponding wavelengths, and has good thermal conductivity, heat resistance and bonding strength. The 980nm excitation light is coupled in through the pump end face of the laser gain medium 301, and the generated laser oscillates in the flat cavity, and is modulated by the graphene saturable absorber 201, and the optical element 401 couples out a pulsed laser with a wavelength of 1550nm.

具体实施方式4Specific implementation mode 4

石墨烯作可饱和吸收体实现被动调Q的YLF基质外延生长LiYErTmHoF晶体全固化微片激光器。如图1所示,所述结构器件为顺序排列的泵浦源601、光学准直耦合系统602、部分反射镜603、激光增益介质301、石墨烯可饱和吸收体201、光学元件401。本实施例中泵浦源601为波长647nm氪激光器,激光增益介质301为YLF基质外延生长LiYErTmHoF晶体,石墨烯可饱和吸收体201为氧化石墨烯粉末,光学元件401为铜基镀金镜。其中激光增益介质301泵浦端面镀波长647nm增透、2um部分反射二色膜。部分反射镜603镀波长647nm增透、2um全反射二色膜。光学元件401对泵浦光、激光全反射,其与激光增益介质301泵浦端面构成平平谐振腔。石墨烯可饱和吸收体201被激光增益介质301和光学元件401紧密夹贴于腔内。利用石墨烯材料所具备良好导热性,激光增益介质301产生的热量可以迅速传递给光学元件401进而得到冷却。使用深化光胶方法将光学元件401、石墨烯可饱和吸收体201和激光增益介质301固化为简单紧凑的三明治结构。上述光胶具有对相应波长的高透过率和低吸收率,并有良好的导热性、耐热性和粘结强度。波长647nm泵浦光透过部分反射镜603耦合进入激光增益介质301,产生的激光在腔内振荡并被石墨烯可饱和吸收体201调制,最终通过激光增益介质301泵浦端面耦合输出,再经部分反射镜603反射输出波长2um的脉冲激光。Graphene as saturable absorber to achieve passive Q-switched YLF matrix epitaxial growth LiYErTmHoF crystal fully solidified microchip laser. As shown in FIG. 1 , the structural device is a pump source 601 , an optical collimation coupling system 602 , a partial mirror 603 , a laser gain medium 301 , a graphene saturable absorber 201 , and an optical element 401 arranged in sequence. In this embodiment, the pump source 601 is a krypton laser with a wavelength of 647nm, the laser gain medium 301 is a LiYErTmHoF crystal epitaxially grown on a YLF matrix, the graphene saturable absorber 201 is graphene oxide powder, and the optical element 401 is a copper-based gold-plated mirror. Among them, the laser gain medium 301 is coated with anti-reflection and 2um partial reflection dichroic coating on the pump end face of the laser gain medium with a wavelength of 647nm. The partial reflection mirror 603 is coated with anti-reflection and 2um total reflection dichroic film with a wavelength of 647nm. The optical element 401 totally reflects the pumping light and the laser, and forms a flat resonant cavity with the pumping end surface of the laser gain medium 301 . The graphene saturable absorber 201 is tightly clamped in the cavity by the laser gain medium 301 and the optical element 401 . Utilizing the good thermal conductivity of the graphene material, the heat generated by the laser gain medium 301 can be quickly transferred to the optical element 401 to be cooled. The optical element 401, the graphene saturable absorber 201 and the laser gain medium 301 are solidified into a simple and compact sandwich structure by using the deepening photoresist method. The above-mentioned photoresist has high transmittance and low absorptivity for corresponding wavelengths, and has good thermal conductivity, heat resistance and bonding strength. The pump light with a wavelength of 647nm is coupled into the laser gain medium 301 through the partial reflection mirror 603, and the generated laser is oscillated in the cavity and modulated by the graphene saturable absorber 201, and finally coupled and output through the pump end face of the laser gain medium 301, and then passed through The partial reflection mirror 603 reflects the pulse laser with an output wavelength of 2um.

特别声明,在不脱离所附专利要求书所限定的本发明的精神和范围内,在形式和细节上对本发明所做的任何变化均为本发明的保护范围。In particular, it is stated that within the spirit and scope of the present invention defined by the appended patent claims, any changes made to the present invention in form and details are within the protection scope of the present invention.

Claims (9)

1.一种被动调Q的微片激光器,包括激光增益介质、石墨烯或碳纳米管可饱和吸收体、光学元件或光学材料以及LD泵浦装置;其特征在于:在增益介质泵浦端面镀对泵浦光增透光学膜、或者对激光全反射或部分反射光学膜,或者同时镀上述增透光学膜和反射光学膜;光学元件镀对激光全反射或部分反射光学膜,利用增益介质和光学元件的镀膜作前后腔镜构成平平腔或平凹腔,将厚度0.5纳米至5纳米的石墨烯、碳纳米管可饱和吸收体紧密夹贴于激光器增益介质与光学元件之间构成三明治结构。1. A passively Q-switched microchip laser, comprising laser gain medium, graphene or carbon nanotube saturable absorber, optical element or optical material and LD pumping device; it is characterized in that: the pumping end face of gain medium is plated Anti-reflection optical film for pump light, or total reflection or partial reflection optical film for laser light, or coated with the above-mentioned anti-reflection optical film and reflective optical film at the same time; optical components are coated with total reflection or partial reflection optical film for laser light, using gain medium and The coating of the optical element is used as the front and rear cavity mirrors to form a flat cavity or a flat concave cavity. Graphene and carbon nanotube saturable absorbers with a thickness of 0.5nm to 5nm are tightly clamped between the laser gain medium and the optical element to form a sandwich structure. 2.根据权利要求1所述的一种被动调Q的微片激光器,其特征在于:所制备的石墨烯或碳纳米管材料可饱和吸收体厚度为0.5纳米至5纳米;石墨烯可饱和吸收体中石墨烯材料的层数1至10层。2. The microchip laser of a kind of passive Q-switching according to claim 1, is characterized in that: prepared graphene or carbon nanotube material saturable absorber thickness is 0.5 nanometer to 5 nanometers; Graphene saturable absorber The number of layers of graphene material in the body is 1 to 10 layers. 3.根据权利要求1所述的一种被动调Q的微片激光器,其特征在于:激光增益介质为Nd:YAG晶体、Nd:YVO4晶体、Er:Yb:glass激光材料。3. A passive Q-switched microchip laser according to claim 1, characterized in that: the laser gain medium is Nd:YAG crystal, Nd:YVO 4 crystal, Er:Yb:glass laser material. 4.根据权利要求1所述的一种被动调Q的微片激光器,其特征在于:光学元件为温度补偿介质、倍频晶体、波片、对振荡波长通过的光学玻璃或晶体器件或材料,以及此类器件或材料的组合。4. A kind of passive Q-switched microchip laser according to claim 1, characterized in that: the optical element is a temperature compensation medium, a frequency doubling crystal, a wave plate, an optical glass or crystal device or material that passes through the oscillation wavelength, and combinations of such devices or materials. 5.根据权利要求1所述的一种被动调Q的微片激光器,其特征在于:使用胶合、光胶或深化光胶的方法将微片激光器器件全固化为三明治结构。5. A passively Q-switched microchip laser according to claim 1, characterized in that: the microchip laser device is fully cured into a sandwich structure by gluing, photoglue or deepening photoglue. 6.根据权利要求1所述的一种被动调Q的微片激光器,其特征在于:使用LD直接端面泵浦,采用光纤耦合输出LD经光学系统进行端面泵浦。6. A passively Q-switched microchip laser according to claim 1, characterized in that: LD is used for direct end-pumping, and optical fiber coupling is used to output LD for end-pumping through an optical system. 7.根据权利要求1所述的一种被动调Q的微片激光器,其特征在于:依次包括LD泵浦源(601)、准直系统(602)、激光增益介质(301)与光学元件(402)将石墨烯或碳纳米管可饱和吸收体(201)紧密夹贴在中间,构成的三明治结构;激光增益介质(301)泵浦端面镀有对泵浦光增透并对激光全反射的光学膜,其与镀有对激光部分反射光学膜的光学元件(402)作前后腔镜构成平行平面谐振腔或平凹腔;7. A kind of microchip laser of passive Q-switching according to claim 1, is characterized in that: comprise LD pumping source (601), collimation system (602), laser gain medium (301) and optical element ( 402) The graphene or carbon nanotube saturable absorber (201) is tightly clamped in the middle to form a sandwich structure; the pump end surface of the laser gain medium (301) is coated with anti-reflection of the pump light and total reflection of the laser An optical film, which is used as a front and rear cavity mirror with an optical element (402) coated with an optical film that partially reflects laser light to form a parallel plane resonant cavity or a flat concave cavity; 光纤耦合输出LD泵浦源(601)提供泵浦,泵浦光经准直系统(602)聚焦到激光增益介质(301)泵浦端面并耦合注入;激光增益介质(301)与光学元件(402)将石墨烯或碳纳米管可饱和吸收体(201)紧密夹贴在中间,构成三明治结构;激光增益介质(301)泵浦端面镀有对泵浦光增透并对激光全反射的光学膜,其与镀有对激光部分反射光学膜的光学元件(402)作前后腔镜构成平行平面谐振腔或平凹腔;石墨烯或碳纳米管可饱和吸收体(201)作为激光调Q装置,调Q脉冲激光通过光学元件(402)输出。The fiber-coupled output LD pump source (601) provides pumping, and the pump light is focused to the pump end face of the laser gain medium (301) through the collimation system (602) and coupled and injected; the laser gain medium (301) and the optical element (402 ) tightly sandwich graphene or carbon nanotube saturable absorbers (201) in the middle to form a sandwich structure; the pump end surface of the laser gain medium (301) is coated with an optical film that is anti-reflective to the pump light and fully reflective to the laser , and the optical element (402) coated with an optical film that partially reflects the laser is used as a front and rear cavity mirror to form a parallel plane resonant cavity or a flat concave cavity; a graphene or carbon nanotube saturable absorber (201) is used as a laser Q-switching device, The Q-switched pulse laser is output through an optical element (402). 8.根据权利要求1所述的一种被动调Q的微片激光器,其特征在于:依次包括LD泵浦源,LD泵浦源(601)紧贴激光增益介质(301);激光增益介质(301)与光学元件(402)将石墨烯或碳纳米管可饱和吸收体(201)紧密夹贴在中间,构成的三明治结构;激光增益介质(301)泵浦端面镀有对泵浦光增透并对激光全反射的光学膜,其与镀有对激光部分反射光学膜的光学元件(402)作前后腔镜构成平行平面谐振腔或平凹腔;8. the microchip laser of a kind of passive Q-switching according to claim 1, is characterized in that: comprise LD pumping source successively, LD pumping source (601) is close to laser gain medium (301); Laser gain medium ( 301) and the optical element (402) tightly sandwich the graphene or carbon nanotube saturable absorber (201) in the middle to form a sandwich structure; the pump end surface of the laser gain medium (301) is coated with an anti-reflection layer for the pump light And the optical film for laser total reflection, it and the optical element (402) coated with the optical film for partial reflection of laser are used as front and rear cavity mirrors to form a parallel plane resonant cavity or a flat concave cavity; LD泵浦源(601)紧贴于激光增益介质(301)进行端面泵浦;激光增益介质(301)与光学元件(402)将石墨烯或碳纳米管可饱和吸收体(201)紧密夹贴在中间,构成三明治结构;激光增益介质(301)泵浦端面镀有对泵浦光增透并对激光全反射的光学膜,其与镀有对激光部分反射光学膜的光学元件(402)作前后腔镜构成平行平面谐振腔或平凹腔;石墨烯或碳纳米管可饱和吸收体(201)作为激光调Q装置,调Q脉冲激光通过光学元件(402)输出。The LD pump source (601) is close to the laser gain medium (301) for end pumping; the laser gain medium (301) and the optical element (402) tightly clamp the graphene or carbon nanotube saturable absorber (201) In the middle, a sandwich structure is formed; the pump end surface of the laser gain medium (301) is coated with an optical film that is anti-reflective to the pump light and fully reflective to the laser light, and it cooperates with the optical element (402) coated with an optical film that partially reflects the laser light. The front and rear cavity mirrors form a parallel plane resonant cavity or a flat concave cavity; the graphene or carbon nanotube saturable absorber (201) is used as a laser Q-switching device, and the Q-switched pulse laser is output through an optical element (402). 9.根据权利要求1所述的一种被动调Q的微片激光器,其特征在于:依次包括LD泵浦源(601)、准直系统(602)、部分反射镜(603);激光增益介质(301)与光学元件(402)将石墨烯或碳纳米管可饱和吸收体(201)紧密夹贴在中间,构成的三明治结构;激光增益介质(301)的泵浦端面镀有对泵浦光增透同时对激光部分反射的光学膜,其与对激光和泵浦光全反射的光学元件(402)构成谐振腔;9. The microchip laser of a kind of passive Q-switching according to claim 1, is characterized in that: comprise LD pumping source (601), collimation system (602), partial reflection mirror (603) successively; Laser gain medium (301) and the optical element (402) tightly sandwich the graphene or carbon nanotube saturable absorber (201) in the middle to form a sandwich structure; the pump end surface of the laser gain medium (301) is coated with An optical film that is anti-reflection and partially reflects the laser light, and forms a resonant cavity with the optical element (402) that fully reflects the laser light and the pump light; LD泵浦源(601)经准直系统(602)和部分反射镜(603)耦合注入激光增益介质(301);激光增益介质(301)与光学元件(402)将石墨烯或碳纳米管可饱和吸收体(201)紧密夹贴在中间,构成三明治结构;激光增益介质(301)的泵浦端面镀有对泵浦光增透同时对激光部分反射的光学膜,其与对激光和泵浦光全反射的光学元件(402)构成谐振腔;石墨烯或碳纳米管可饱和吸收体(201)作为激光调Q装置,调Q脉冲激光从增益介质泵浦端面经部分反射镜(603)反射输出。The LD pump source (601) is coupled and injected into the laser gain medium (301) through the collimation system (602) and the partial reflection mirror (603); the laser gain medium (301) and the optical element (402) combine graphene or carbon nanotubes The saturable absorber (201) is tightly clamped in the middle to form a sandwich structure; the pump end surface of the laser gain medium (301) is coated with an optical film that can enhance the reflection of the pump light and partially reflect the laser, which is compatible with the laser and the pump. The optical element (402) of total light reflection constitutes a resonant cavity; the graphene or carbon nanotube saturable absorber (201) is used as a laser Q-switching device, and the Q-switched pulsed laser is reflected from the pump end face of the gain medium through a partial reflector (603) output.
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