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CN102413646A - Manufacturing method of circuit board - Google Patents

Manufacturing method of circuit board Download PDF

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Publication number
CN102413646A
CN102413646A CN2010102884460A CN201010288446A CN102413646A CN 102413646 A CN102413646 A CN 102413646A CN 2010102884460 A CN2010102884460 A CN 2010102884460A CN 201010288446 A CN201010288446 A CN 201010288446A CN 102413646 A CN102413646 A CN 102413646A
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layer
copper foil
holes
hole
foil layer
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CN102413646B (en
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刘瑞武
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Peng Ding Polytron Technologies Inc
Hongqisheng Precision Electronics Qinhuangdao Co Ltd
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Fukui Precision Component Shenzhen Co Ltd
Zhending Technology Co Ltd
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  • Manufacturing Of Printed Circuit Boards (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

本发明提供一种电路板制作方法,包括步骤:提供包括绝缘层、第一铜箔层及第二铜箔层的双面覆铜板,所述绝缘层位于第一铜箔层与第二铜箔层之间;以化学蚀刻工艺在第一铜箔层中形成多个第一孔,并在第二铜箔层中形成与多个第一孔一一对应的多个第二孔,且每个第一孔的孔径均大于或等于与其对应的第二孔的孔径;以激光烧蚀工艺在绝缘层中形成与多个第二孔一一对应的多个第三孔,每个第三孔的孔径均等于或小于与其对应的第二孔的孔径,每个第三孔均连通于一个第一孔与一个第二孔之间,从而在双面覆铜板中构成多个通孔;在暴露于多个通孔中的绝缘层表面形成导电层;将第一铜箔层形成第一导电线路,将第二铜箔层形成第二导电线路。

The invention provides a circuit board manufacturing method, comprising the steps of: providing a double-sided copper clad laminate including an insulating layer, a first copper foil layer and a second copper foil layer, the insulating layer is located between the first copper foil layer and the second copper foil between layers; a plurality of first holes are formed in the first copper foil layer by a chemical etching process, and a plurality of second holes corresponding to the plurality of first holes are formed in the second copper foil layer, and each The apertures of the first holes are greater than or equal to the apertures of the corresponding second holes; a plurality of third holes corresponding to the plurality of second holes are formed in the insulating layer by a laser ablation process, and each third hole The apertures are equal to or smaller than the apertures of the corresponding second holes, and each third hole is connected between a first hole and a second hole, thereby forming a plurality of through holes in the double-sided copper clad laminate; when exposed to A conductive layer is formed on the surface of the insulating layer in the plurality of through holes; the first copper foil layer is formed into a first conductive circuit, and the second copper foil layer is formed into a second conductive circuit.

Description

电路板制作方法Circuit board manufacturing method

技术领域 technical field

本发明涉及电路板制造技术,尤其涉及一种电路板制作方法。The invention relates to circuit board manufacturing technology, in particular to a circuit board manufacturing method.

背景技术 Background technique

在信息、通讯及消费性电子产业中,电路板是所有电子产品不可或缺的基本构成要件。随着电子产品往小型化、高速化方向发展,电路板也从单面电路板往双面电路板、多层电路板方向发展。双面电路板和多层电路板由于具有较多的布线面积和较高的装配密度而得到广泛的应用,请参见Takahashi,A.等人于1992年发表于IEEE Trans.on Components,Packaging,andManufacturing Technology的文献“High density multilayer printed circuitboard for HITAC M~880”。In the information, communication and consumer electronics industries, circuit boards are an indispensable and basic component of all electronic products. With the development of electronic products in the direction of miniaturization and high speed, circuit boards are also developing from single-sided circuit boards to double-sided circuit boards and multi-layer circuit boards. Double-sided circuit boards and multilayer circuit boards are widely used due to their large wiring area and high assembly density. Please refer to Takahashi, A. et al. published in IEEE Trans.on Components, Packaging, and Manufacturing in 1992 Technology's literature "High density multilayer printed circuitboard for HITAC M~880".

双面电路板具有两层导电层,两层导电层之间通过导孔实现信号连接。导孔一般通过钻孔、化学镀及电镀的工艺形成。在现有技术中,对于制作导孔中的钻孔工序一般是仅采用机械钻孔工艺,或者仅采用激光钻孔工艺。然而,机械钻孔的制作精度不佳,而激光钻孔虽然精度较高,但使用激光钻导电层时则速度较慢,需要较长的制作时间。并且,仅有紫外激光适合用于钻导电层,但使用紫外激光的成本较高。The double-sided circuit board has two conductive layers, and the signal connection is realized through the guide holes between the two conductive layers. The guide hole is generally formed by drilling, electroless plating and electroplating. In the prior art, generally, only the mechanical drilling process or the laser drilling process is used for the drilling process in making the guide hole. However, the manufacturing precision of mechanical drilling is not good, and although laser drilling has high precision, the speed of drilling conductive layers using laser is relatively slow and requires a long production time. Also, only UV lasers are suitable for drilling conductive layers, but the cost of using UV lasers is high.

因此,有必要提供一种可具有较高制作效率和制作精度的电路板制作方法。Therefore, it is necessary to provide a circuit board manufacturing method with higher manufacturing efficiency and manufacturing accuracy.

发明内容 Contents of the invention

以下将以实施例说明一种电路板制作方法。A method for fabricating a circuit board will be described below with an embodiment.

一种电路板制作方法,包括步骤:提供双面覆铜板,所述双面覆铜板包括绝缘层、第一铜箔层及第二铜箔层,所述绝缘层位于第一铜箔层与第二铜箔层之间;以化学蚀刻工艺在第一铜箔层中形成多个第一孔,并在第二铜箔层中形成多个第二孔,所述多个第一孔与所述多个第二孔一一对应,且每个第一孔的孔径均大于或等于与其对应的第二孔的孔径;以激光烧蚀工艺在所述绝缘层中形成与多个第二孔一一对应的多个第三孔,每个第三孔的孔径均等于或小于与其对应的第二孔的孔径,每个第三孔均连通于一个第一孔与一个第二孔之间,从而所述多个第一孔、多个第二孔及多个第三孔在所述双面覆铜板中构成多个通孔;在暴露于所述多个通孔中的绝缘层表面形成导电层,从而导通第一铜箔层与第二铜箔层;以及将第一铜箔层形成第一导电线路,并将第二铜箔层形成第二导电线路。A method for manufacturing a circuit board, comprising the steps of: providing a double-sided copper-clad laminate, the double-sided copper-clad laminate includes an insulating layer, a first copper foil layer, and a second copper foil layer, and the insulating layer is located between the first copper foil layer and the second copper foil layer. Between the two copper foil layers; a plurality of first holes are formed in the first copper foil layer by a chemical etching process, and a plurality of second holes are formed in the second copper foil layer, and the plurality of first holes are connected to the A plurality of second holes correspond one to one, and the diameter of each first hole is greater than or equal to the diameter of the second hole corresponding to it; a laser ablation process is used to form a plurality of second holes in the insulating layer one by one A plurality of corresponding third holes, the diameter of each third hole is equal to or smaller than the diameter of the corresponding second hole, and each third hole is connected between a first hole and a second hole, so that the The plurality of first holes, the plurality of second holes and the plurality of third holes form a plurality of through holes in the double-sided copper clad laminate; a conductive layer is formed on the surface of the insulating layer exposed to the plurality of through holes, Thereby conducting the first copper foil layer and the second copper foil layer; and forming the first copper foil layer into a first conductive circuit, and forming the second copper foil layer into a second conductive circuit.

本技术方案的电路板制作方法中,采用先化学蚀刻第一铜箔层和第二铜箔层再用激光烧蚀绝缘层的工艺制作通孔,由于化学蚀刻的成本较低,而激光烧蚀绝缘层的速度较快,如此则以较低的生产成本及较高的制作效率实现了电路板的制作。并且,在制作通孔时,第一铜箔层中的第一孔的孔径大于或等于第二铜箔层的第二孔的孔径,如此在生产时仅需保证第二孔的制作精度,即可保证第一孔的制作精度,也就是说降低了生产的难度。而在用激光烧蚀绝缘层形成第三孔时,第三孔的孔径等于或小于第二孔的孔径,如此则保证了通孔的制作精度。In the circuit board manufacturing method of the technical solution, the first copper foil layer and the second copper foil layer are chemically etched first and then the insulating layer is ablated to produce through holes. Due to the low cost of chemical etching, laser ablation The speed of the insulating layer is faster, so that the production of the circuit board is realized with lower production cost and higher production efficiency. And, when making through holes, the aperture diameter of the first hole in the first copper foil layer is greater than or equal to the aperture diameter of the second hole of the second copper foil layer, so only need to ensure the manufacturing accuracy of the second hole during production, that is The manufacturing accuracy of the first hole can be guaranteed, that is to say, the difficulty of production is reduced. When the third hole is formed by laser ablation of the insulating layer, the diameter of the third hole is equal to or smaller than that of the second hole, thus ensuring the manufacturing accuracy of the through hole.

附图说明 Description of drawings

图1为本技术方案实施方式提供的电路板制作方法的流程示意图。FIG. 1 is a schematic flow chart of a method for manufacturing a circuit board provided by an embodiment of the technical solution.

图2为本技术方案实施方式提供的双面覆铜板的剖视示意图。FIG. 2 is a schematic cross-sectional view of a double-sided copper-clad laminate provided in an embodiment of the technical solution.

图3为本技术方案实施方式提供的在双面覆铜板两侧分别形成第一光致抗蚀剂层和第二光致抗蚀剂层之后的剖视示意图。FIG. 3 is a schematic cross-sectional view after forming a first photoresist layer and a second photoresist layer on both sides of a double-sided copper-clad laminate according to an embodiment of the technical solution.

图4为本技术方案实施方式提供的图案化第一光致抗蚀剂层和第二光致抗蚀剂层之后的剖视示意图。FIG. 4 is a schematic cross-sectional view after patterning the first photoresist layer and the second photoresist layer according to the embodiment of the technical solution.

图5为本技术方案实施方式提供的蚀刻第一铜箔层和第二铜箔层之后的剖视示意图。Fig. 5 is a schematic cross-sectional view after etching the first copper foil layer and the second copper foil layer according to the embodiment of the technical solution.

图6为本技术方案实施方式提供的去除第一光致抗蚀剂层和第二光致抗蚀剂层之后的剖视示意图。FIG. 6 is a schematic cross-sectional view after removing the first photoresist layer and the second photoresist layer according to the embodiment of the technical solution.

图7为本技术方案实施方式提供的采用激光烧蚀双面覆铜板的绝缘层之后形成多个通孔的剖视示意图。7 is a schematic cross-sectional view of forming multiple through holes after laser ablation of the insulating layer of the double-sided copper-clad laminate provided by the embodiment of the technical solution.

图8为本技术方案实施方式提供的将多个通孔制成多个导孔的剖视示意图。FIG. 8 is a schematic cross-sectional view of forming a plurality of through holes into a plurality of guide holes according to an embodiment of the technical solution.

图9为本技术方案实施方式提供的在双面覆铜板两侧分别形成第三光致抗蚀剂层和第四光致抗蚀剂层之后的剖视示意图。FIG. 9 is a schematic cross-sectional view after forming a third photoresist layer and a fourth photoresist layer on both sides of a double-sided copper-clad laminate according to an embodiment of the technical solution.

图10为本技术方案实施方式提供的图案化第三光致抗蚀剂层和第四光致抗蚀剂层之后的剖视示意图。FIG. 10 is a schematic cross-sectional view after patterning the third photoresist layer and the fourth photoresist layer according to the embodiment of the technical solution.

图11为本技术方案实施方式提供的蚀刻第一铜箔层和第二铜箔层之后形成导电线路的剖视示意图。FIG. 11 is a schematic cross-sectional view of forming conductive lines after etching the first copper foil layer and the second copper foil layer according to the embodiment of the technical solution.

图12为本技术方案实施方式提供的去除第三光致抗蚀剂层和第四光致抗蚀剂层之后的剖视示意图。FIG. 12 is a schematic cross-sectional view after removing the third photoresist layer and the fourth photoresist layer according to the embodiment of the technical solution.

主要元件符号说明Description of main component symbols

双面覆铜板          10Double-sided copper clad laminate 10

第一铜箔层          11The first copper foil layer 11

绝缘层              13Insulation layer 13

第二铜箔层          12The second copper foil layer 12

第一表面            131First Surface 131

第二表面            132Second Surface 132

第一孔              110The first hole 110

第二孔              120Second hole 120

第一光致抗蚀剂层    14First photoresist layer 14

第二光致抗蚀剂层    15Second photoresist layer 15

第一开口            140First opening 140

第二开口            150Second opening 150

第三孔              130The third hole 130

通孔                100Through hole 100

第一导电线路        111First conductive line 111

第二导电线路        121Second conductive line 121

第三光致抗蚀剂层    17Third photoresist layer 17

第四光致抗蚀剂层    18Fourth photoresist layer 18

第三开口            170Third opening 170

第四开口            180Fourth opening 180

双面电路板          20Double-sided circuit board 20

具体实施方式 Detailed ways

下面将结合多个附图及实施方式,对本技术方案提供的电路板制作方法作进一步的详细说明。The circuit board manufacturing method provided by the technical solution will be further described in detail below in conjunction with multiple drawings and implementation manners.

请参阅图1,本技术方案实施方式提供一种电路板制作方法,包括步骤:Please refer to Figure 1, the embodiment of the technical solution provides a circuit board manufacturing method, including steps:

第一步,请参阅图2,提供双面覆铜板10。所述双面覆铜板10包括依次堆叠的第一铜箔层11、绝缘层13及第二铜箔层12。所述绝缘层13具有第一表面131及与第一表面131相对的第二表面132。所述第一铜箔层11贴合在第一表面131,所述第二铜箔层12贴合在第二表面132,也就是说,绝缘层13位于第一铜箔层11与第二铜箔层12之间。所述绝缘层13的材料为柔性材料,例如聚酰亚胺(Polyimide,PI)、聚乙烯对苯二甲酸乙二醇酯(Polyethylene Terephthalate,PET)、聚萘二甲酸乙二醇酯(Polyethylenenaphthalate,PEN)等,但也可以为硬性材料,如环氧树脂、玻纤布等。The first step, referring to FIG. 2 , is to provide a double-sided copper-clad board 10 . The double-sided copper clad laminate 10 includes a first copper foil layer 11 , an insulating layer 13 and a second copper foil layer 12 stacked in sequence. The insulating layer 13 has a first surface 131 and a second surface 132 opposite to the first surface 131 . The first copper foil layer 11 is attached to the first surface 131, and the second copper foil layer 12 is attached to the second surface 132, that is to say, the insulating layer 13 is located between the first copper foil layer 11 and the second copper foil layer 13. Between foil layers 12. The material of the insulating layer 13 is a flexible material, such as polyimide (Polyimide, PI), polyethylene terephthalate (Polyethylene Terephthalate, PET), polyethylene naphthalate (Polyethylenenaphthalate, PEN), etc., but can also be hard materials, such as epoxy resin, glass fiber cloth, etc.

第二步,请一并参阅图3至图5,以化学蚀刻工艺在第一铜箔层11中形成多个第一孔110,并在第二铜箔层12中形成多个第二孔120。化学蚀刻工艺是指采用蚀刻液蚀刻去除材料的方法。所述多个第一孔110与所述多个第二孔120一一对应,且每个第一孔110的孔径均大于或等于与其对应的一个第二孔120的孔径。In the second step, please refer to FIG. 3 to FIG. 5 together, a plurality of first holes 110 are formed in the first copper foil layer 11 by a chemical etching process, and a plurality of second holes 120 are formed in the second copper foil layer 12 . The chemical etching process refers to the method of etching and removing materials using an etching solution. The plurality of first holes 110 correspond to the plurality of second holes 120 one by one, and the diameter of each first hole 110 is greater than or equal to the diameter of a corresponding second hole 120 .

具体地,请参阅图3,首先,在第一铜箔层11表面形成第一光致抗蚀剂层14,在第二铜箔层12表面形成第二光致抗蚀剂层15。所述第一光致抗蚀剂层14和第二光致抗蚀剂层15可以为正型光致抗蚀剂,也可以负型光致抗蚀剂。其次,对第一光致抗蚀剂层14和第二光致抗蚀剂层15进行曝光、显影,从而图案化第一光致抗蚀剂层14和第二光致抗蚀剂层15。在本实施例中,在第一光致抗蚀剂层14中形成多个第一开口140,在第二光致抗蚀剂层15中形成多个第二开口150,如图4所示。需要说明的是,多个第一开口140的数量不限,可以为两个以上的任意自然数;多个第一开口140的位置与需要形成的多个第一孔110的位置相对应;多个第二开口150的数量不限,可以为两个以上的任意自然数;多个第二开口150的位置与需要形成的多个第二孔120的位置相对应。在本实施例的图示中,以两个第一开口140和两个第二开口150为例进行说明。再次,利用铜蚀刻液蚀刻从多个第一开口140中暴露出的第一铜箔层11以及从多个第二开口150中暴露出的第二铜箔层12,从而在第一铜箔层11中形成所述多个第一孔110,在第二铜箔层12中形成所述多个第二孔120,如图5所示。绝缘层13的第一表面131暴露于所述多个第一孔110中,绝缘层13的第二表面暴露于所述多个第二孔120中。所述铜蚀刻液可以为酸性氯化铜蚀刻液、碱性氯化铜蚀刻液或者硝酸系统的蚀刻液。举例而言,酸性氯化铜蚀刻液的主要成分包括氯化铜、过氧化氢、盐酸、氯化纳、氯化铵、氯酸钠等。最后,请参阅图6,通过剥离、磨刷或溶解去除第一光致抗蚀剂层14和第二光致抗蚀剂层15。Specifically, referring to FIG. 3 , first, a first photoresist layer 14 is formed on the surface of the first copper foil layer 11 , and a second photoresist layer 15 is formed on the surface of the second copper foil layer 12 . The first photoresist layer 14 and the second photoresist layer 15 can be positive photoresists or negative photoresists. Secondly, the first photoresist layer 14 and the second photoresist layer 15 are exposed and developed to pattern the first photoresist layer 14 and the second photoresist layer 15 . In this embodiment, a plurality of first openings 140 are formed in the first photoresist layer 14 , and a plurality of second openings 150 are formed in the second photoresist layer 15 , as shown in FIG. 4 . It should be noted that the number of the plurality of first openings 140 is not limited, and may be any natural number above two; the positions of the plurality of first openings 140 correspond to the positions of the plurality of first holes 110 to be formed; The number of the second openings 150 is not limited, and may be any natural number above two; the positions of the plurality of second openings 150 correspond to the positions of the plurality of second holes 120 to be formed. In the illustration of this embodiment, two first openings 140 and two second openings 150 are taken as an example for illustration. Again, use copper etchant to etch the first copper foil layer 11 exposed from the plurality of first openings 140 and the second copper foil layer 12 exposed from the plurality of second openings 150, so that the first copper foil layer The plurality of first holes 110 are formed in 11, and the plurality of second holes 120 are formed in the second copper foil layer 12, as shown in FIG. 5 . The first surface 131 of the insulating layer 13 is exposed in the plurality of first holes 110 , and the second surface of the insulating layer 13 is exposed in the plurality of second holes 120 . The copper etching solution may be an acidic copper chloride etching solution, an alkaline copper chloride etching solution or an etching solution of a nitric acid system. For example, the main components of the acid copper chloride etching solution include copper chloride, hydrogen peroxide, hydrochloric acid, sodium chloride, ammonium chloride, sodium chlorate and the like. Finally, referring to FIG. 6 , the first photoresist layer 14 and the second photoresist layer 15 are removed by stripping, brushing or dissolving.

在本实施方式中,每个第一孔110的孔径均大致在20微米至50微米之间,且每个第一孔110的孔径均大于或等于与其对应的一个第二孔120的孔径。具体地,每个第一孔110的孔径均为与其对应的一个第二孔120的孔径的1至2倍。也就是说,每个第二孔120的孔径在20微米至100微米之间。需要说明的是,在本实施方式中,每个第一孔110的孔径可以不同,仅需每个第一孔110的孔径均在与其对应的一个第二孔120的孔径的2倍以下即可。In this embodiment, the diameter of each first hole 110 is approximately between 20 microns and 50 microns, and the diameter of each first hole 110 is greater than or equal to that of a corresponding second hole 120 . Specifically, the diameter of each first hole 110 is 1 to 2 times the diameter of a corresponding second hole 120 . That is to say, the diameter of each second hole 120 is between 20 microns and 100 microns. It should be noted that, in this embodiment, the diameter of each first hole 110 can be different, it only needs that the diameter of each first hole 110 is less than twice the diameter of a corresponding second hole 120 .

第三步,请参阅图7,以激光烧蚀工艺在所述绝缘层13中形成与多个第二孔120一一对应的多个第三孔130。激光烧蚀工艺是指采用激光烧蚀去除材料的方法。The third step, please refer to FIG. 7 , is to form a plurality of third holes 130 corresponding to the plurality of second holes 120 in the insulating layer 13 by a laser ablation process. Laser ablation process refers to the method of removing material by laser ablation.

具体地,以二氧化碳激光从靠近第二铜箔层12的位置向朝向第一铜箔层11的方向烧蚀绝缘层13暴露于多个第二孔120的部分,从而在所述绝缘层13中形成与多个第二孔120一一对应的多个第三孔130。由于激光从多个第二孔120向多个第一孔110方向烧蚀绝缘层13,因此,每个第三孔130的孔径均等于或小于与其对应的第二孔120的孔径。在本实施例中,每个第三孔130的孔径均等于与其对应的第二孔120的孔径。也就是说,每个第三孔130的孔径均在20微米至50微米之间。Specifically, a carbon dioxide laser is used to ablate the part of the insulating layer 13 exposed to the plurality of second holes 120 from a position close to the second copper foil layer 12 toward the direction of the first copper foil layer 11, so that in the insulating layer 13 A plurality of third holes 130 corresponding to the plurality of second holes 120 is formed. Since the laser ablates the insulating layer 13 from the plurality of second holes 120 to the direction of the plurality of first holes 110 , the diameter of each third hole 130 is equal to or smaller than that of the corresponding second hole 120 . In this embodiment, the diameter of each third hole 130 is equal to the diameter of the corresponding second hole 120 . That is to say, the diameter of each third hole 130 is between 20 microns and 50 microns.

每个第三孔130均连通于一个第一孔110与一个第二孔120之间,从而所述多个第一孔110、多个第二孔120及多个第三孔130在双面覆铜板10中构成多个通孔100。也就是说,每个第三孔130以及与其连通的第一孔110和第二孔120共同构成一个通孔100。在本实施方式中,每个第三孔130的孔径也可以不同,仅需第三孔130的孔径小于或等于与其连通的第二孔120的孔径即可。Each third hole 130 is connected between a first hole 110 and a second hole 120, so that the plurality of first holes 110, the plurality of second holes 120 and the plurality of third holes 130 are covered on both sides. A plurality of through holes 100 are formed in the copper plate 10 . That is to say, each third hole 130 and the first hole 110 and the second hole 120 communicating with it together form a through hole 100 . In this embodiment, the diameter of each third hole 130 may also be different, it only needs that the diameter of the third hole 130 is smaller than or equal to the diameter of the second hole 120 communicating with it.

第四步,请参阅图8,在暴露于所述多个通孔100中的绝缘层13表面形成导电层16,从而将多个通孔100制成多个导孔,从而导通第一铜箔层11与第二铜箔层12。导电层16的厚度在5微米至25微米之间。The fourth step, please refer to FIG. 8, forms a conductive layer 16 on the surface of the insulating layer 13 exposed in the plurality of through holes 100, thereby making the plurality of through holes 100 into a plurality of via holes, thereby conducting the first copper Foil layer 11 and second copper foil layer 12 . The thickness of the conductive layer 16 is between 5 microns and 25 microns.

本实施例中,通过黑化、电镀工艺在暴露于所述多个通孔100中的绝缘层13表面沉积导电层16。具体地,先通过黑化工艺在在暴露于所述多个通孔100中的绝缘层13表面沉积导电石墨层(图未示),然后再通过电镀工艺在导电石墨层表面、第一铜箔层11表面以及第二铜箔层12表面沉积电镀铜层,如此导电石墨层及导电石墨层表面的电镀铜层构成了绝缘层13表面的导电层16,从而使得第一铜箔层11与第二铜箔层12通过导电层16电性连接。需要说明,由于导电石墨层的厚度较薄,因此未在本实施例的图示中绘示。另外,黑化工艺可以黑影工艺、化学沉铜工艺或其他相关工艺替代。并且,在其他实施例中,也可以仅通过黑化工艺或者化学沉铜工艺形成所述导电层16。换言之,导电层16可以为化学铜层、导电石墨层或者为多层结构。当导电层16为化学铜层或为导电石墨层时,第一铜箔层11表面以及第二铜箔层12表面不形成有镀层材料。当导电层16为多层结构时,第一铜箔层11表面以及第二铜箔层12表面形成有镀层材料。多层结构可以为导电石墨层与电镀铜层的复合结构,也可以为化学铜层与电镀铜层的复合结构,还可以为其他可沉积在绝缘材料表面的导电材料层与电镀铜层一起构成的复合结构。In this embodiment, the conductive layer 16 is deposited on the surface of the insulating layer 13 exposed in the plurality of through holes 100 through blackening and electroplating processes. Specifically, a conductive graphite layer (not shown) is deposited on the surface of the insulating layer 13 exposed to the plurality of through holes 100 through a blackening process, and then the surface of the conductive graphite layer and the first copper foil are deposited on the surface of the conductive graphite layer and the first copper foil through an electroplating process. Layer 11 surface and the surface of the second copper foil layer 12 are deposited electroplated copper layer, so the conductive graphite layer and the electroplated copper layer on the surface of the conductive graphite layer constitute the conductive layer 16 on the surface of the insulating layer 13, so that the first copper foil layer 11 and the second copper foil layer The two copper foil layers 12 are electrically connected through the conductive layer 16 . It should be noted that since the thickness of the conductive graphite layer is relatively thin, it is not shown in the diagram of this embodiment. In addition, the blackening process can be replaced by black shadow process, electroless copper deposition process or other related processes. Moreover, in other embodiments, the conductive layer 16 may also be formed only through a blackening process or an electroless copper deposition process. In other words, the conductive layer 16 can be a chemical copper layer, a conductive graphite layer or a multilayer structure. When the conductive layer 16 is an electroless copper layer or a conductive graphite layer, no plating material is formed on the surface of the first copper foil layer 11 and the surface of the second copper foil layer 12 . When the conductive layer 16 has a multi-layer structure, the surface of the first copper foil layer 11 and the surface of the second copper foil layer 12 are formed with plating materials. The multilayer structure can be a composite structure of a conductive graphite layer and an electroplated copper layer, or a composite structure of an electroless copper layer and an electroplated copper layer, or it can be composed of other conductive material layers that can be deposited on the surface of an insulating material together with an electroplated copper layer composite structure.

另外,本领域技术人员可以理解,在导电石墨层表面、第一铜箔层11表面以及第二铜箔层12表面沉积电镀铜层时,由于尖端效应,在第一表面131沉积的电镀铜层的厚度可能大于在其它部位沉积的电镀铜层的厚度。In addition, those skilled in the art can understand that when the electroplated copper layer is deposited on the surface of the conductive graphite layer, the surface of the first copper foil layer 11, and the surface of the second copper foil layer 12, due to the tip effect, the electroplated copper layer deposited on the first surface 131 The thickness may be greater than the thickness of the electroplated copper layer deposited in other parts.

第五步,请一并参阅图9至图12,将第一铜箔层11形成第一导电线路111,并将第二铜箔层12形成第二导电线路121。形成导电线路的工艺可以为化学蚀刻,也可以为激光烧蚀。在本实施例中,以化学蚀刻为例进行具体说明。In the fifth step, please refer to FIG. 9 to FIG. 12 together, the first copper foil layer 11 is formed into a first conductive circuit 111 , and the second copper foil layer 12 is formed into a second conductive circuit 121 . The process of forming the conductive lines can be chemical etching or laser ablation. In this embodiment, chemical etching is taken as an example for specific description.

首先,请参阅图9,在第一铜箔层11表面的电镀铜层表面形成第三光致抗蚀剂层17,在第二铜箔层12表面的电镀铜层表面形成第四光致抗蚀剂层18。其次,请参阅图10,通过曝光、显影图案化第三光致抗蚀剂层17,同时图案化第四光致抗蚀剂层18。也就是说,在第三光致抗蚀剂层17中形成多个第三开口170,同时在第四光致抗蚀剂层18中形成多个第四开口180。第三光致抗蚀剂层17的图案与需要在第一铜箔层11中形成的导电线路的图案相对应,第四光致抗蚀剂层18的图案与需要在第二铜箔层12中形成的导电线路的图案相对应。再次,请参阅图11,以铜蚀刻液蚀刻暴露于多个第三开口170中的第一铜箔层11及其表面的电镀铜层,同时蚀刻暴露于多个第四开口180中的第二铜箔层12及其表面的电镀铜层,从而图案化第一铜箔层11和第二铜箔层12。也就是说,在第一铜箔层11中形成与第三光致抗蚀剂层17的图案相对应的第一导电线路111,在第二铜箔层12中形成与第四光致抗蚀剂层18的图案相对应的第二导电线路121。最后,请参阅图12,除去图案化的第三光致抗蚀剂层17和第四光致抗蚀剂层18,即可获得制成的双面电路板20。所述双面电路板20包括第一导电线路111、第二导电线路121及位于第一导电线路111和第二导电线路121之间的绝缘层13,第一导电线路111和第二导电线路121通过多个通孔100中的导电层16实现电性连接。First, referring to FIG. 9, a third photoresist layer 17 is formed on the surface of the electroplated copper layer on the surface of the first copper foil layer 11, and a fourth photoresist layer 17 is formed on the surface of the electroplated copper layer on the surface of the second copper foil layer 12. etchant layer 18. Next, referring to FIG. 10 , the third photoresist layer 17 is patterned by exposure and development, and the fourth photoresist layer 18 is patterned at the same time. That is, a plurality of third openings 170 are formed in the third photoresist layer 17 while a plurality of fourth openings 180 are formed in the fourth photoresist layer 18 . The pattern of the third photoresist layer 17 corresponds to the pattern of the conductive lines that need to be formed in the first copper foil layer 11, and the pattern of the fourth photoresist layer 18 corresponds to the pattern that needs to be formed in the second copper foil layer 12. Corresponds to the pattern of the conductive lines formed in . Again, referring to FIG. 11 , the first copper foil layer 11 exposed in the third openings 170 and the electroplated copper layer on its surface are etched with a copper etching solution, and the second copper foil layer 11 exposed in the fourth openings 180 is etched simultaneously. The copper foil layer 12 and the electroplated copper layer on its surface, thereby patterning the first copper foil layer 11 and the second copper foil layer 12 . That is to say, the first conductive line 111 corresponding to the pattern of the third photoresist layer 17 is formed in the first copper foil layer 11, and the pattern corresponding to the pattern of the fourth photoresist layer 17 is formed in the second copper foil layer 12. The pattern of the agent layer 18 corresponds to the second conductive circuit 121 . Finally, referring to FIG. 12 , the patterned third photoresist layer 17 and fourth photoresist layer 18 are removed to obtain a double-sided circuit board 20 . The double-sided circuit board 20 includes a first conductive circuit 111, a second conductive circuit 121 and an insulating layer 13 between the first conductive circuit 111 and the second conductive circuit 121, the first conductive circuit 111 and the second conductive circuit 121 Electrical connection is achieved through the conductive layer 16 in the plurality of vias 100 .

当然,本领域技术人员可以理解,在形成第一导电线路111,形成第二导电线路121之后,还可以包括在第一导电线路111表面及第二导电线路121表面均贴覆覆盖膜的步骤。Certainly, those skilled in the art can understand that, after forming the first conductive circuit 111 and the second conductive circuit 121 , a step of covering the surface of the first conductive circuit 111 and the surface of the second conductive circuit 121 may also be included.

并且,需要说明的是,所述双面电路板20也可以用来制作成多层电路板。也就是说,双面电路板20可以再与一个以上的单面电路板、双面电路板或多层电路板压合,构成多层电路板;双面电路板20也可以再与一个以上单面覆铜板压合并通过线路制作工艺构成多层电路板。Moreover, it should be noted that the double-sided circuit board 20 can also be used to make a multi-layer circuit board. That is to say, the double-sided circuit board 20 can be pressed with more than one single-sided circuit board, double-sided circuit board or multilayer circuit board to form a multilayer circuit board; the double-sided circuit board 20 can also be combined with more than one single-sided circuit board. The surface copper-clad board is pressed and combined to form a multi-layer circuit board through a circuit manufacturing process.

本技术方案的制作双面电路板20的方法中,采用先化学蚀刻第一铜箔层11和第二铜箔层12再用激光烧蚀绝缘层13的工艺制作通孔100,由于化学蚀刻的成本较低,而激光烧蚀绝缘层13的速度较快,如此则以较低的生产成本及较高的制作效率实现了双面电路板20的制作。并且,在制作通孔100时,第一铜箔层11中的第一孔110的孔径大于或等于第二铜箔层12的第二孔120的孔径,如此在生产时仅需保证第二孔120的制作精度,即可保证第一孔110的制作精度,也就是说降低了生产的难度。而在用激光烧蚀绝缘层13形成第三孔130时,从第二孔120向第一孔110方向烧蚀,如此则保证了第三孔130的孔径范围,保证了通孔100的制作精度。In the method for making the double-sided circuit board 20 of the technical solution, the through hole 100 is made by first chemically etching the first copper foil layer 11 and the second copper foil layer 12 and then laser ablation of the insulating layer 13. The cost is low, and the speed of laser ablation of the insulating layer 13 is fast, so that the production of the double-sided circuit board 20 is realized with low production cost and high production efficiency. Moreover, when making the through hole 100, the aperture of the first hole 110 in the first copper foil layer 11 is greater than or equal to the aperture of the second hole 120 of the second copper foil layer 12, so only the second hole needs to be guaranteed during production. The manufacturing accuracy of 120 can guarantee the manufacturing accuracy of the first hole 110, that is to say, the difficulty of production is reduced. When forming the third hole 130 by laser ablation of the insulating layer 13, the ablation is performed from the second hole 120 to the first hole 110, thus ensuring the aperture range of the third hole 130 and ensuring the manufacturing accuracy of the through hole 100 .

可以理解的是,对于本领域的普通技术人员来说,可以根据本发明的技术构思做出其它各种相应的改变与变形,而所有这些改变与变形都应属于本发明权利要求的保护范围。It can be understood that those skilled in the art can make various other corresponding changes and modifications according to the technical concept of the present invention, and all these changes and modifications should belong to the protection scope of the claims of the present invention.

Claims (10)

1.一种电路板制作方法,包括步骤:1. A circuit board manufacturing method, comprising steps: 提供双面覆铜板,所述双面覆铜板包括绝缘层、第一铜箔层及第二铜箔层,所述绝缘层位于第一铜箔层与第二铜箔层之间;A double-sided copper-clad laminate is provided, the double-sided copper-clad laminate includes an insulating layer, a first copper foil layer, and a second copper foil layer, and the insulating layer is located between the first copper foil layer and the second copper foil layer; 以化学蚀刻工艺在第一铜箔层中形成多个第一孔,并在第二铜箔层中形成多个第二孔,所述多个第一孔与所述多个第二孔一一对应,且每个第一孔的孔径均大于或等于与其对应的第二孔的孔径;A plurality of first holes are formed in the first copper foil layer by a chemical etching process, and a plurality of second holes are formed in the second copper foil layer, the plurality of first holes and the plurality of second holes are one by one corresponding, and the diameter of each first hole is greater than or equal to the diameter of the corresponding second hole; 以激光烧蚀工艺在所述绝缘层中形成与多个第二孔一一对应的多个第三孔,每个第三孔的孔径均等于或小于与其对应的第二孔的孔径,每个第三孔均连通于一个第一孔与一个第二孔之间,从而所述多个第一孔、多个第二孔及多个第三孔在所述双面覆铜板中构成多个通孔;A plurality of third holes corresponding to the plurality of second holes are formed in the insulating layer by a laser ablation process, the diameter of each third hole is equal to or smaller than the diameter of the corresponding second hole, and each The third holes are all connected between one first hole and one second hole, so that the plurality of first holes, the plurality of second holes and the plurality of third holes form a plurality of passages in the double-sided copper clad laminate. hole; 在暴露于所述多个通孔中的绝缘层表面形成导电层,从而导通第一铜箔层与第二铜箔层;以及forming a conductive layer on the surface of the insulating layer exposed to the plurality of through holes, so as to conduct the first copper foil layer and the second copper foil layer; and 将第一铜箔层形成第一导电线路,并将第二铜箔层形成第二导电线路。The first copper foil layer is formed into a first conductive line, and the second copper foil layer is formed into a second conductive line. 2.如权利要求1所述的电路板制作方法,其特征在于,所述绝缘层具有相对的第一表面和第二表面,所述第一铜箔层与第一表面相接触,所述第二铜箔层与第二表面相接触,所述多个第一孔暴露于第一表面,所述多个第二孔暴露于第二表面。2. The circuit board manufacturing method according to claim 1, wherein the insulating layer has opposite first and second surfaces, the first copper foil layer is in contact with the first surface, and the first copper foil layer is in contact with the first surface. The two copper foil layers are in contact with the second surface, the plurality of first holes are exposed on the first surface, and the plurality of second holes are exposed on the second surface. 3.如权利要求1所述的电路板制作方法,其特征在于,每个第二孔的孔径均在20微米至50微米。3. The method for manufacturing a circuit board according to claim 1, wherein the diameter of each second hole is between 20 microns and 50 microns. 4.如权利要求1所述的电路板制作方法,其特征在于,每个第一孔的孔径均在与其对应的第二孔的孔径的两倍以下。4. The circuit board manufacturing method according to claim 1, wherein the diameter of each first hole is less than twice the diameter of the corresponding second hole. 5.如权利要求1所述的电路板制作方法,其特征在于,在所述绝缘层中形成与多个第二孔一一对应的多个第三孔时,利用二氧化碳激光从多个第二孔向多个第一孔方向烧蚀。5. The method for manufacturing a circuit board according to claim 1, wherein when a plurality of third holes corresponding to a plurality of second holes are formed in the insulating layer, carbon dioxide laser is used to select from a plurality of second holes. The holes are ablated toward the plurality of first holes. 6.如权利要求1所述的电路板制作方法,其特征在于,采用化学蚀刻工艺将第一铜箔层形成第一导电线路,采用化学蚀刻工艺将第二铜箔层形成第二导电线路。6 . The circuit board manufacturing method according to claim 1 , wherein the first copper foil layer is formed into a first conductive circuit by a chemical etching process, and the second copper foil layer is formed into a second conductive circuit by a chemical etching process. 7.如权利要求1所述的电路板制作方法,其特征在于,所述导电层为铜层。7. The circuit board manufacturing method according to claim 1, wherein the conductive layer is a copper layer. 8.如权利要求1所述的电路板制作方法,其特征在于,在暴露于所述通孔中的绝缘层表面形成导电层包括步骤:8. The circuit board manufacturing method according to claim 1, wherein forming a conductive layer on the surface of the insulating layer exposed in the through hole comprises the steps of: 在暴露于所述通孔中的绝缘层表面沉积化学铜层或导电石墨层;以及depositing a chemical copper layer or a conductive graphite layer on the surface of the insulating layer exposed in the through hole; and 通过电镀工艺在化学铜层表面或导电石墨层表面形成电镀铜层。An electroplated copper layer is formed on the surface of the chemical copper layer or the conductive graphite layer through an electroplating process. 9.如权利要求8所述的电路板制作方法,其特征在于,在化学铜层表面或导电石墨层表面形成电镀铜层时,还在第一铜箔层表面及第二铜箔层表面形成电镀铜层。9. circuit board manufacturing method as claimed in claim 8, is characterized in that, when electroplating copper layer is formed on chemical copper layer surface or conductive graphite layer surface, also forms on the first copper foil layer surface and the second copper foil layer surface Electroplated copper layer. 10.如权利要求1所述的电路板制作方法,其特征在于,在将第一铜箔层形成第一导电线路,并将第二铜箔层形成第二导电线路后,在第一导电线路表面及第二导电线路表面均形成覆盖层。10. The circuit board manufacturing method according to claim 1, characterized in that, after the first copper foil layer is formed into the first conductive circuit, and the second copper foil layer is formed into the second conductive circuit, after the first conductive circuit A covering layer is formed on the surface and the surface of the second conductive circuit.
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CN103717014A (en) * 2012-10-08 2014-04-09 旭德科技股份有限公司 Method for manufacturing substrate structure
CN104684279A (en) * 2013-11-27 2015-06-03 深圳崇达多层线路板有限公司 Processing method of blind hole in printed wiring board
CN110519941A (en) * 2019-07-09 2019-11-29 安徽捷鑫光电科技有限公司 A kind of processing method in flexibility led circuit board function hole
CN111465219A (en) * 2020-04-15 2020-07-28 深圳市信维通信股份有限公司 Circuit board processing method

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CN1641801A (en) * 2004-01-09 2005-07-20 国巨股份有限公司 Method for manufacturing surface-bonded metal foil chip resistor
CN101165514A (en) * 2007-08-27 2008-04-23 西安理工大学 Process for preparing high density inorganic material grating
CN101722367A (en) * 2008-10-17 2010-06-09 华通电脑股份有限公司 Laser drilling method for printed circuit board

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CN1454043A (en) * 2002-04-26 2003-11-05 耀华电子股份有限公司 Laser direct burning multilayer circuit board manufacturing method
CN1641801A (en) * 2004-01-09 2005-07-20 国巨股份有限公司 Method for manufacturing surface-bonded metal foil chip resistor
CN101165514A (en) * 2007-08-27 2008-04-23 西安理工大学 Process for preparing high density inorganic material grating
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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103717014A (en) * 2012-10-08 2014-04-09 旭德科技股份有限公司 Method for manufacturing substrate structure
CN103717014B (en) * 2012-10-08 2016-08-03 旭德科技股份有限公司 Method for manufacturing substrate structure
CN104684279A (en) * 2013-11-27 2015-06-03 深圳崇达多层线路板有限公司 Processing method of blind hole in printed wiring board
CN110519941A (en) * 2019-07-09 2019-11-29 安徽捷鑫光电科技有限公司 A kind of processing method in flexibility led circuit board function hole
CN111465219A (en) * 2020-04-15 2020-07-28 深圳市信维通信股份有限公司 Circuit board processing method
CN111465219B (en) * 2020-04-15 2022-02-22 深圳市信维通信股份有限公司 Circuit board processing method

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