CN102402131A - Exposure system - Google Patents
Exposure system Download PDFInfo
- Publication number
- CN102402131A CN102402131A CN2011103576531A CN201110357653A CN102402131A CN 102402131 A CN102402131 A CN 102402131A CN 2011103576531 A CN2011103576531 A CN 2011103576531A CN 201110357653 A CN201110357653 A CN 201110357653A CN 102402131 A CN102402131 A CN 102402131A
- Authority
- CN
- China
- Prior art keywords
- pallet face
- wiring board
- putting
- egative film
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims abstract description 48
- 239000002390 adhesive tape Substances 0.000 claims abstract description 5
- 238000005538 encapsulation Methods 0.000 claims description 2
- 238000007789 sealing Methods 0.000 abstract description 7
- 238000000605 extraction Methods 0.000 abstract 3
- 238000009434 installation Methods 0.000 description 8
- 238000012797 qualification Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012467 final product Substances 0.000 description 2
- 230000003760 hair shine Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Images
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The invention discloses an exposure system, which comprises a board placing table surface, a circuit board, a negative and a glass plate, wherein the board placing table surface, the circuit board, the negative and the glass plate are sequentially vertical to a horizontal plane in the transverse direction; the board placing table surface is arranged on a mechanical fixed device; the circuit board is sucked by a suction nozzle which is arranged on the board placing table surface; a gas outlet of the suction nozzle is connected with a gas extraction device through a gas guide pipe; the negative is sucked by a gas suction piece which is arranged on the glass plate; the gas outlet of the gas suction piece is connected with the gas extraction device through the gas guide pipe; or the negative is adhered to the glass plate through an adhesive tape; a sealing rubber ring is arranged on the board placing table surface and used for sealing the board placing table surface and the glass plate into a sealed space in which the circuit board and the negative are sealed; gas in the sealed space is exhausted from a first gas suction hole which is formed in the board placing table surface to make the negative pressed against the circuit board; and the gas outlet of the first gas suction hole is connected with the air extraction device through the gas guide pipe. By adoption of the exposure system, the exposure quality of the circuit board is effectively improved.
Description
Technical field
The present invention relates to a kind of exposure system of wiring board.
Background technology
Exposure is a crucial processing step of making in the wiring board processes such as scratching the combined circuit plate like base plate for packaging, flexible circuit board and steel.At present, exposure technology generally adopts the exposure of vacuum adherence formula, promptly closely attaches each other between egative film and the wiring board, to realize high-precision image transfer.
See also Fig. 1, Fig. 1 is the structural representation of the horizontal exposure system of prior art.Prior art lies in a horizontal plane in one with wiring board and puts on the pallet face when actual the exposure, and the egative film that will be close to again on the glass disc is placed in the circuit board, and egative film is close on the wiring board, thereby constitutes a horizontal exposure system.As shown in Figure 1, prior art is when exposure, and the incident light vertical irradiation is on horizontal exposure system.
In the practical application; The reciprocal etc. of environment, personnel operation and the machinery that exposure is on-the-spot tends to bring such as foreign matters such as particle or dust to exposure system; When light incident; If foreign matter appears on the road that light advances just, then can hinder advancing of light, the wiring board zone that the actual needs irradiate light occurs does not receive irradiate light because receiving the obstruction of foreign matter and can not be completed the situation of exposure; Follow-up when wiring board is carried out circuit etching technology, will cause the phenomenon of breach and open circuit.Because in the prior art; The egative film of exposure system, glass disc, to put the pallet face all are horizontal positioned, thereby in the actual exposure process, foreign matter is owing to receive the sucking action of gravity; Can drop down onto glass disc and accept the one side of exposure; Will inevitably hinder advancing of light, cause on the wiring board some positions that need make public not can not be completed exposure, have a strong impact on the exposure quality of wiring board because of receiving light.
Summary of the invention
The invention provides a kind of exposure system, can be used in the circuit board to explosure.
A kind of exposure system comprises and puts pallet face, wiring board, egative film and glass disc;
Said pallet face, wiring board, egative film and the glass disc put laterally arranged perpendicular to surface level successively;
The said pallet face of putting is used to be installed in mechanical fastening system, and said wiring board is held by the said suction nozzle that is provided with on the pallet face of putting, and the gas outlet of said suction nozzle is used for connecting air extractor through wireway; Air-breathing of being provided with on the said glass disc of said egative film holds, and said air-breathing gas outlet is used for connecting air extractor through wireway; Perhaps said egative film is bonded on the said glass disc through adhesive tape;
The said pallet face of putting is provided with a circle O-ring seal, and said O-ring seal is used for putting the pallet face and said glass disc is sealed to a confined space with said, and said wiring board and said egative film are encapsulated in the said confined space; Wherein, the gas in the said confined space is discharged through said first suction hole that is provided with on the pallet face of putting, and make said egative film press said wiring board, and the gas outlet of said first suction hole is used for connecting air extractor through wireway.
As a kind of optional embodiment, said O-ring seal is put the pallet face and said glass disc is sealed to a confined space with said under inflated condition, said wiring board of encapsulation and said egative film in the said confined space.
As a kind of optional embodiment, said first suction hole is evenly distributed on said putting on the pallet face, and the said edge of putting the pallet face of convergence.
As a kind of optional embodiment, said suction nozzle is at least one circle and is evenly distributed on said putting on the pallet face.
As a kind of optional embodiment, said putting also is provided with equally distributed second suction hole of at least one row on the pallet face, and said second suction hole is used to hold said wiring board, and the gas outlet of said second suction hole is used for connecting air extractor through wireway.
Can find out that from above technical scheme the present invention has the following advantages:
In the exposure system provided by the invention; Put all vertical installation of pallet face, wiring board, egative film and glass disc; Effectively prevent foreign matters such as airborne dust, particle because the sucking action of gravity is gathered in the one side that glass disc is accepted exposure; Avoid foreign matter to hinder advancing of exposure light, thereby can promote the exposure quality of wiring board.
Description of drawings
Fig. 1 is the structural representation of the horizontal exposure system of prior art;
Fig. 2 is the structural representation of exposure system provided by the invention;
Fig. 3 is the structural representation of putting the pallet face of exposure system provided by the invention.
Embodiment
To combine the accompanying drawing among the present invention below, the technical scheme among the present invention is carried out clear, intactly description, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on the embodiment among the present invention, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the present invention's protection.
The invention provides a kind of exposure system, can be to the circuit board to explosure.Below introduce through specific embodiment.
See also Fig. 2 and Fig. 3, Fig. 2 is the structural representation of exposure system provided by the invention; Fig. 3 is the structural representation of putting the pallet face of exposure system provided by the invention.
As shown in Figure 2, this exposure system can comprise: put pallet face 1, wiring board 2, egative film 3 and glass disc 4; Wherein, putting pallet face 1, wiring board 2, egative film 3 and glass disc 4 laterally arranges perpendicular to surface level successively.
Wherein, put pallet face 1 and be used to be installed in mechanical fastening system, wiring board 2 is put the suction nozzle 5 that is provided with on the pallet face 1 and is held, and the gas outlet of suction nozzle 5 is used for connecting air extractor through wireway.
Wherein, egative film 3 is not held by air-breathing (drawing among the figure) being provided with on the glass disc 4, and this gas outlet of air-breathing is used for connecting air extractor through wireway; Perhaps, egative film 3 is bonded on the glass disc 4 through adhesive tape.
Wherein, put pallet face 1 and be provided with a circle O-ring seal 6, O-ring seal 6 is used for being sealed to a confined space with putting pallet face 1 with glass disc 4, and wiring board 2 and egative film 3 are encapsulated in this confined space.
Wherein, the gas in the above-mentioned confined space can be discharged through putting first suction hole 7 that is provided with on the pallet face 1, makes egative film 3 press wiring board 2; The gas outlet of this first suction hole is used for connecting air extractor through wireway.
As a kind of optional embodiment, wiring board 2 can comprise that base plate for packaging, printed circuit board, flexible circuit board, steel scratch combined circuit plate etc., and the present invention does not limit.
As a kind of optional embodiment, the material of putting pallet face 1 can be stainless steel or other metal material, and the present invention does not limit.
Among the present invention; Putting pallet face 1 can be vertically mounted on the mechanical fastening system, and puts pallet face 1 and be provided with suction nozzle 5, and the gas outlet of suction nozzle 5 is used for connecting air extractor through wireway; Make that putting pallet face 1 can suck wiring board 2 through suction nozzle 5; Thereby make and put pallet face 1 and be attached to tightly together, guarantee that wiring board 2 remains vertical installation, and can not come off from putting pallet face 1 with wiring board 2.
Among the present invention, can be provided with air-breathing on the glass disc 4, this gas outlet of air-breathing can connect air extractor through wireway, makes when air extractor is worked egative film 3 be close on the glass disc owing to air-breathing getter action.Wherein, this air-breathing the structure that specifically can be suction nozzle, inhale hole or bothrium, the present invention does not do concrete qualification.
Certainly, among the present invention, egative film 3 also can be bonded in above the glass disc 4 through adhesive tape, and this mode need not change the structure of glass disc 4, but is unfavorable for the frequent change of egative film 3.
Among the present invention; In order to make all vertical installation of the pallet face 1 of putting, wiring board 2, egative film 3 and glass disc 4 and firm; Put an O-ring seal 6 can be set on the pallet face 1; Sealing cushion rubber 6 can 4 sealings become a confined space with glass disc with putting pallet face 1, make wiring board 2 and egative film 3 all are encapsulated in this confined space.
As a kind of optional embodiment; O-ring seal 6 can be arranged on the peripheral edge of putting pallet face 1; Also can be provided with and put pallet face 1 other place; As long as sealing cushion rubber 6 can 4 sealings become a confined space with glass disc with putting pallet face 1, and can be packaged with wiring board 2 in this confined space and get final product with egative film 3.
Further; Can put pallet face 1 and be provided with a plurality of first suction holes 7; The gas outlet of first suction hole 7 is used for connecting air extractor through wireway, and air extractor can be extracted the confined space gas inside out through first suction hole 7, thus make put pallet face 1 and glass disc 4 each other near; And inner egative film 3 compresses wiring board 2, can not come off when guaranteeing wiring board 2, egative film 3, glass disc 4 vertical installations.
Among the present invention, incident light can be perpendicular to glass disc 4 incidents of exposure system during exposure, and promptly the incident light along continuous straight runs shines on the exposure system.Incident light shines on the wiring board 2 that posts photosensitive dry film through glass disc 4 and egative film 3, dry film is carried out the selectivity exposure, thereby realize high-precision image transfer.
Among the present invention, O-ring seal 6 can will be put pallet face 1 and be sealed to a confined space with glass disc 4 under inflated condition.
Need be pointed out that further that O-ring seal 6 is arranged on to be put on the pallet face 1, O-ring seal 6 volume when inflation can become greatly, seals with glass disc 4 four corresponding limits putting pallet face 1, and 4 sealings will become a confined space with glass disc thereby will put pallet face 1.This confined space is encapsulated in inside with wiring board 2 and egative film 3.
Among the present invention, first suction hole 7 is evenly distributed on to be put on the pallet face 1, and convergence is put the edge of pallet face 1.
Wherein, first suction hole 7 is distributed in the position of putting convergence edge on the pallet face 1 symmetrically.The gas outlet of first suction hole 7 is used for connecting air extractor through wireway; Can extract out with the confined space gas inside that glass disc 4 constitutes putting pallet face 1; Make when putting pallet face 1 each other with glass disc 4 vertical installations near; And wiring board 2 and egative film 3 be encapsulated in the inside of this confined space, egative film 2 compresses wiring board 3 simultaneously, thereby realizes high-precision image transfer.The present invention does not do concrete qualification to the quantity of first suction hole 7; As long as first suction hole 7 can effectively be extracted out with the confined space gas inside that glass disc 4 is constituted putting pallet face 1 down through the air extractor effect; Make when putting pallet face 1 each other with glass disc 4 vertical installations near, can not come off during glass disc 4 vertical installations gets final product.
Among the present invention, suction nozzle 5 is at least one circle and is evenly distributed on and puts on the pallet face 1.
Wherein, the gas outlet of suction nozzle 5 is used to connect air extractor.Owing to put pallet face 1 and wiring board 2 sucked through suction nozzle 5, suck in the position of putting on the pallet face 1 according to the size and the wiring board 2 of wiring board 2, can set suction nozzle 5 in the position of arranging of putting on the pallet face.Particularly, can be the equally distributed suction nozzle 5 of at least one circle to be set in the convergence edge of putting on the pallet face 1 with the surface of contact position of wiring board 2.For the quantity and the number of turns of suction nozzle 5, the present invention does not do concrete qualification, as long as suction nozzle 5 can suck wiring board 2 under the air extractor effect.
Wherein, Suction nozzle 5 can adopt the cushion design; Can wiring board 2 be sucked through suction nozzle 5 and to put on the pallet face 1; Simultaneously can suitably cushion the powerful attractive force of putting between pallet face 1 and the wiring board 2, avoid wiring board 2, play the purpose of protection circuit plate 2 because receiving powerful attractive force causes damage.
Among the present invention, put and also be provided with the gas outlet that equally distributed second suction hole of at least one row 8, the second suction holes 8 are used for holding wiring board 2, the second suction holes 8 on the pallet face 1 complementaryly and be used for connecting air extractor through wireway.
Wherein, second suction hole 8 is evenly distributed on to be put on the pallet face 1, and its gas outlet is used for connecting air extractor through wireway.The function of second suction hole 8 and suction nozzle 5 are similar, are used to strengthen the attractive force to wiring board 2, wiring board 2 is sucked putting on the pallet face 1.The distributing position of second suction hole 8 can be installed in the position of putting on the pallet face 1 according to the size of wiring board 2 and wiring board 2 and set.Concrete set-up mode can be, second suction hole 8 is arranged to be put on the pallet face 1 and wiring board 2 contacted surface of contact positions.Wherein, second suction hole 8 is at least one row and evenly distributes, and can suck wiring board 2 better.The present invention does not do concrete qualification to the quantity that second suction hole 8 is provided with.
In sum; In the exposure system provided by the invention; Put all vertical installation of pallet face 1, wiring board 2, egative film 3 and glass disc 4; Effectively prevent foreign matters such as airborne dust, particle because the sucking action of gravity is gathered in the one side that glass disc is accepted exposure, avoid foreign matter to hinder advancing of exposure light, thereby can promote the exposure quality of wiring board.
More than a kind of exposure system provided by the present invention has been carried out detailed introduction; For one of ordinary skill in the art; Thought according to the embodiment of the invention; The part that on embodiment and range of application, all can change, in sum, this description should not be construed as limitation of the present invention.
Claims (5)
1. an exposure system comprises and puts pallet face, wiring board, egative film and glass disc, it is characterized in that,
Said pallet face, wiring board, egative film and the glass disc put laterally arranged perpendicular to surface level successively;
The said pallet face of putting is used to be installed in mechanical fastening system, and said wiring board is held by the said suction nozzle that is provided with on the pallet face of putting, and the gas outlet of said suction nozzle is used for connecting air extractor through wireway; Air-breathing of being provided with on the said glass disc of said egative film holds, and said air-breathing gas outlet is used for connecting air extractor through wireway; Perhaps said egative film is bonded on the said glass disc through adhesive tape;
The said pallet face of putting is provided with a circle O-ring seal, and said O-ring seal is used for putting the pallet face and said glass disc is sealed to a confined space with said, and said wiring board and said egative film are encapsulated in the said confined space; Wherein, the gas in the said confined space is discharged through said first suction hole that is provided with on the pallet face of putting, and make said egative film press said wiring board, and the gas outlet of said first suction hole is used for connecting air extractor through wireway.
2. exposure system according to claim 1 is characterized in that,
Said O-ring seal is put the pallet face and said glass disc is sealed to a confined space with said under inflated condition, said wiring board of encapsulation and said egative film in the said confined space.
3. exposure system according to claim 1 and 2 is characterized in that,
Said first suction hole is evenly distributed on said putting on the pallet face, and the said edge of putting the pallet face of convergence.
4. exposure system according to claim 1 and 2 is characterized in that,
Said suction nozzle is at least one circle and is evenly distributed on said putting on the pallet face.
5. exposure system according to claim 1 and 2 is characterized in that,
Said putting also is provided with equally distributed second suction hole of at least one row on the pallet face, said second suction hole is used to hold said wiring board, and the gas outlet of said second suction hole is used for connecting air extractor through wireway.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011103576531A CN102402131A (en) | 2011-11-11 | 2011-11-11 | Exposure system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011103576531A CN102402131A (en) | 2011-11-11 | 2011-11-11 | Exposure system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102402131A true CN102402131A (en) | 2012-04-04 |
Family
ID=45884475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011103576531A Pending CN102402131A (en) | 2011-11-11 | 2011-11-11 | Exposure system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102402131A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103901736A (en) * | 2014-01-25 | 2014-07-02 | 保定来福光电科技有限公司 | Method of depth fitting of operation film in exposure machine |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4888488A (en) * | 1988-03-15 | 1989-12-19 | Eiichi Miyake | Exposing apparatus used in fabrication of printed circuit boards |
| CN1452013A (en) * | 2002-04-18 | 2003-10-29 | 显像制造服务股份有限公司 | Exposure system |
| CN1499299A (en) * | 2002-10-25 | 2004-05-26 | 东京毅力科创株式会社 | Substrate calibrating appts, its processing device and delivery appts. |
| CN1617019A (en) * | 2003-11-13 | 2005-05-18 | 显示器生产服务株式会社 | Vacuum-utilizing mask support device and exposure system and method of use thereof |
| CN1623321A (en) * | 2002-02-16 | 2005-06-01 | 乌尔苏拉·吕舍尔 | Printing plate handling system |
| CN1703137A (en) * | 2004-05-13 | 2005-11-30 | 三荣技研股份有限公司 | Exposure unit |
| CN101887217A (en) * | 2009-05-15 | 2010-11-17 | 三荣技研股份有限公司 | Exposure device |
| CN102162935A (en) * | 2010-12-30 | 2011-08-24 | 中国科学院长春光学精密机械与物理研究所 | Adjustable vacuum sucker device for assembling and adjusting lens of photoetching machine |
-
2011
- 2011-11-11 CN CN2011103576531A patent/CN102402131A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4888488A (en) * | 1988-03-15 | 1989-12-19 | Eiichi Miyake | Exposing apparatus used in fabrication of printed circuit boards |
| CN1623321A (en) * | 2002-02-16 | 2005-06-01 | 乌尔苏拉·吕舍尔 | Printing plate handling system |
| CN1452013A (en) * | 2002-04-18 | 2003-10-29 | 显像制造服务股份有限公司 | Exposure system |
| CN1499299A (en) * | 2002-10-25 | 2004-05-26 | 东京毅力科创株式会社 | Substrate calibrating appts, its processing device and delivery appts. |
| CN1617019A (en) * | 2003-11-13 | 2005-05-18 | 显示器生产服务株式会社 | Vacuum-utilizing mask support device and exposure system and method of use thereof |
| CN1703137A (en) * | 2004-05-13 | 2005-11-30 | 三荣技研股份有限公司 | Exposure unit |
| CN101887217A (en) * | 2009-05-15 | 2010-11-17 | 三荣技研股份有限公司 | Exposure device |
| CN102162935A (en) * | 2010-12-30 | 2011-08-24 | 中国科学院长春光学精密机械与物理研究所 | Adjustable vacuum sucker device for assembling and adjusting lens of photoetching machine |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103901736A (en) * | 2014-01-25 | 2014-07-02 | 保定来福光电科技有限公司 | Method of depth fitting of operation film in exposure machine |
| CN103901736B (en) * | 2014-01-25 | 2017-10-13 | 保定来福光电科技有限公司 | The method that the film depth that worked in a kind of exposure machine is adjacent to |
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Application publication date: 20120404 |