CN102324290A - Copper electrode zinc oxide varistor and preparation method thereof - Google Patents
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Abstract
Description
技术领域 technical field
本发明涉及以铜作为电极的氧化锌压敏电阻器的技术领域。The invention relates to the technical field of zinc oxide varistors with copper electrodes.
背景技术 Background technique
氧化锌压敏电阻器是一种以氧化锌为主材料,通过半导化掺杂后,在正常大气环境下高温烧结而成的半导体陶瓷元件。行业中广泛使用的氧化锌压敏器仍是银电极元件。该元件具有优异的电压非线性特性以及高能量冲击的承受能力,主要应用于家电、通讯、工业电源、照明、汽车等领域,起防雷和过压保护作用。由于银是一种贵金属材料,用它作为电极材料必然会增加产品的成本,因此考虑其它的金属材料替代银作为电极,例如铜。用银浆料制作压敏电阻器的电极,其烧渗的气氛环境是正常大气环境,与压敏陶瓷基体的烧结环境一样,因此银电极烧渗工艺对压敏电阻的电性能影响较小。而采用铜浆料制作压敏电阻器的电极,其烧渗的气氛环境不能采用正常大气环境,另一方面烧渗温度的控制也可关键,过高将会破坏压敏半导体元件的晶界势垒,从而导致压敏电阻器电性能的严重劣化。国内外对该技术处于研发状态,希望开发出可替代银电极的氧化锌压敏电阻器技术。Zinc oxide varistor is a semiconductor ceramic element made of zinc oxide as the main material, which is sintered at high temperature under normal atmospheric environment after semiconducting doping. Zinc oxide varistors widely used in the industry are still silver electrode components. The component has excellent voltage non-linear characteristics and the ability to withstand high-energy shocks. It is mainly used in household appliances, communications, industrial power supplies, lighting, automobiles and other fields, and plays the role of lightning protection and overvoltage protection. Since silver is a precious metal material, using it as an electrode material will inevitably increase the cost of the product, so consider other metal materials to replace silver as an electrode, such as copper. The electrode of the varistor is made of silver paste, and the atmosphere environment of the infiltration is the normal atmospheric environment, which is the same as the sintering environment of the varistor ceramic substrate. Therefore, the silver electrode infiltration process has little influence on the electrical properties of the varistor. However, copper paste is used to make the electrodes of varistors. The atmosphere environment of the infiltration cannot adopt the normal atmospheric environment. On the other hand, the control of infiltration temperature is also critical. If it is too high, the grain boundary potential of the varistor will be destroyed. barrier, resulting in serious degradation of the electrical performance of the varistor. The technology is in the research and development state at home and abroad, hoping to develop zinc oxide varistor technology that can replace silver electrodes.
申请号为200310117432.2,发明名称为“铜电极钛酸锶环形压敏电阻器及其制备方法”的中国发明专利申请公开了一种环形压敏电阻器及其制备方法。该环形压敏电阻器包括一个环形的电阻器陶瓷基片和三个或三个以上的电极,基片由钛酸锶制成,电极为铜电极,且位于基片的上端面、下端面或者外侧面上。其制备方法包括:瓷坯的制造、铜浆料的印刷与烘干、铜电极的还原。该申请介绍了制造铜电极钛酸锶环形压敏电阻器的工艺,铜浆料印刷到陶瓷基片上后干燥形成铜电极,在氮气氛或氮氢混合气氛环境下,700~900℃下对铜电极进行还原。The Chinese invention patent application with the application number 200310117432.2 and the title of the invention "copper electrode strontium titanate ring varistor and its preparation method" discloses a ring varistor and its preparation method. The ring-shaped varistor includes a ring-shaped resistor ceramic substrate and three or more electrodes, the substrate is made of strontium titanate, the electrodes are copper electrodes, and are located on the upper end surface, lower end surface or on the outside. The preparation method includes: manufacture of porcelain body, printing and drying of copper slurry, and reduction of copper electrodes. This application introduces the process of manufacturing copper electrode strontium titanate annular varistors. The copper paste is printed on the ceramic substrate and then dried to form copper electrodes. Electrodes are restored.
发明内容 Contents of the invention
本发明的目的在于提供一种以铜作为电极的氧化锌压敏电阻器及其制备方法。The object of the present invention is to provide a zinc oxide varistor with copper as an electrode and a preparation method thereof.
为了实现上述发明目的,本发明采用了以下技术方案:一种铜电极氧化锌压敏电阻器的制备方法,其特征在于包括以下步骤:制作压敏陶瓷体、印刷铜电极浆料、铜电极烘干、铜电极烧渗,其中铜电极烧渗采用链带式隧道电炉作为生产设备,在无氧气氛环境下进行。In order to achieve the above invention, the present invention adopts the following technical scheme: a method for preparing a copper electrode zinc oxide varistor, which is characterized in that it includes the following steps: making a pressure sensitive ceramic body, printing copper electrode paste, copper electrode baking Dry and copper electrode infiltration, in which the copper electrode infiltration adopts chain-belt tunnel electric furnace as the production equipment and is carried out in an oxygen-free atmosphere.
所述无氧气氛是通过向炉膛通入高纯氮气或含有极微量空气的高纯氮气来实现的。The oxygen-free atmosphere is realized by feeding high-purity nitrogen gas or high-purity nitrogen gas containing a very small amount of air into the furnace.
所述链带式隧道炉的进口和出口设置有密布的气孔,向所述气孔通入高纯氮气,形成气帘,隔绝外部空气的进入。The entrance and exit of the chain-belt tunnel furnace are provided with dense air holes, and high-purity nitrogen gas is introduced into the air holes to form an air curtain to isolate the entry of external air.
所述气帘的气流量为10~200L/min。The air flow rate of the air curtain is 10-200 L/min.
所述链带式隧道电炉的炉膛依次设置有进口气帘区、若干段升温区、高温区、降温区及出口气帘区,在升温区内通入混有微量空气的高纯度氮气,其中氧气的混合比例控制在50~500ppm,温度越高的区间,氧的比例越小。The hearth of the chain-belt tunnel electric furnace is sequentially provided with an inlet gas curtain area, several heating zones, a high temperature zone, a cooling zone and an outlet gas curtain zone. The proportion is controlled at 50-500ppm, and the higher the temperature is, the smaller the proportion of oxygen is.
所述高温段的温度为500~600℃,恒温时间为1~10分钟,该高温区通入99.999%纯度的高纯氮,氧含量控制在≤20ppm。The temperature of the high-temperature section is 500-600° C., and the constant temperature time is 1-10 minutes. The high-temperature section is fed with high-purity nitrogen with a purity of 99.999%, and the oxygen content is controlled at ≤ 20ppm.
所述降温区通入99.999%纯度的高纯氮,氧含量控制在≤20ppm,并采用水冷设备进行降温,出炉产品的温度低于60℃。The cooling zone is fed with high-purity nitrogen with a purity of 99.999%, the oxygen content is controlled at ≤ 20ppm, and water-cooling equipment is used for cooling, and the temperature of the product out of the furnace is lower than 60°C.
所述印刷铜电极浆料是采用200~250目的尼龙丝网印刷电极,获得膜厚为5-10μm的铜电极层。The printed copper electrode paste uses 200-250 mesh nylon screen printing electrodes to obtain a copper electrode layer with a film thickness of 5-10 μm.
所述铜电极烘干在普通大气环境下进行,烘干的温度为100-200℃,时间周期为5~15分钟。The drying of the copper electrodes is carried out in an ordinary atmospheric environment, the drying temperature is 100-200° C., and the time period is 5-15 minutes.
一种根据上述制备方法制得的铜电极氧化锌压敏电阻器。A copper electrode zinc oxide varistor prepared according to the above preparation method.
本发明用贱金属铜替代贵金属银作为电极材料,使用特殊的电极烧渗工艺,制作出性能合格的铜电极氧化锌压敏电阻器,大大的节约了生产成本。本发明具有以下优点:1、该工艺技术适合铜电极氧化锌压敏电阻器的大批量生产。2、该工艺技术生产的产品,各项电性能(包括电压非线性系数、漏电流、通流容量、能量耐量等)均能达到与银电极产品相当的水平,满足客户需求。2、产品成本比相同规格的银电极产品低很多。The present invention uses base metal copper instead of noble metal silver as the electrode material, and uses a special electrode burning-infiltration process to produce qualified copper electrode zinc oxide piezoresistors, which greatly saves production costs. The invention has the following advantages: 1. The technology is suitable for mass production of copper electrode zinc oxide piezoresistors. 2. The electrical properties of the products produced by this process technology (including voltage nonlinear coefficient, leakage current, flow capacity, energy tolerance, etc.) can reach a level equivalent to that of silver electrode products to meet customer needs. 2. The product cost is much lower than that of silver electrode products with the same specifications.
附图说明 Description of drawings
图1是铜电极压敏陶瓷体的结构示意图。Fig. 1 is a structural schematic diagram of a copper electrode varistor ceramic body.
其中,1压敏陶瓷体,2铜电极Among them, 1 pressure sensitive ceramic body, 2 copper electrodes
具体实施方式 Detailed ways
实施例1Example 1
本例为直径尺寸为φ20mm的20K821规格铜电极氧化锌压敏电阻生产工艺,其步骤如下:This example is the production process of 20K821 copper electrode zinc oxide varistor with a diameter of φ20mm. The steps are as follows:
先按传统压敏电阻烧结工艺制作压敏陶瓷体,然后用200目丝网在压敏陶瓷体印上8-10μm厚度的铜含量在70%-75%,烧渗温度为520-600℃的氧化锌压敏电阻专用低温铜浆(可从市场上购买),然后用一般的链带式烘干炉,在普通大气环境下,使用最高温度为150-200℃,烘干周期为5-10分钟的工艺进行烘干。接着,用筛网装好后,放入氧化锌压敏电阻器专用的链带式氮气氛保护隧道电炉,例如采用新宝华电子设备公司设计的型号为BHTDL-100的隧道炉,中烧渗铜电极。烧渗过程的工艺参数如下表1所示:First make the pressure-sensitive ceramic body according to the traditional varistor sintering process, and then use a 200 mesh screen to print on the pressure-sensitive ceramic body with a copper content of 70%-75% and a firing temperature of 520-600°C on the pressure-sensitive ceramic body with a thickness of 8-10 μm. Low-temperature copper paste for zinc oxide varistors (can be purchased from the market), and then use a general chain-belt drying furnace. Minute process for drying. Then, after installing it with a screen, put it into a chain-type nitrogen atmosphere protection tunnel electric furnace dedicated to zinc oxide varistors, such as a tunnel furnace with a model BHTDL-100 designed by Xinbaohua Electronic Equipment Company. Copper electrodes. The process parameters of the infiltration process are shown in Table 1 below:
表1Table 1
整个烧渗过程必须在几乎无氧的气氛环境下进行。通过隧道炉的进口和出口密布的气孔,喷出高纯氮气,形成气帘,隔绝外部空气的进入,为炉膛造就一个无氧的气氛环境。气帘的大小使用流量计控制。在炉膛内,利用管道为每个温区段输送符合要求的高纯氮气或含有极微量空气的混合气。在温度为200~450℃的升温区,为了更有利地排走铜浆料中的溶剂和粘合剂等有机物,通入的高纯氮混有微量空气,其中氧气的混合比例控制在50~500ppm,温度越高的区间,氧的比例越小。对于高温区,氧化锌压敏电阻的最高铜电极烧渗温度为500~600℃,恒温时间为1~10分钟,该温区段必须通入99.999%纯度的高纯氮,氧含量控制在≤20ppm。温度与时间的设定,视压敏电阻的尺寸大小不同而有所区别。降温区通入99.999%纯度的高纯氮,氧含量控制在≤20ppm。靠近出口的地方使用水冷降温,以确保出炉产品的温度低于60℃。出炉后产品要在室温20~30℃,湿度≤60%,的环境下密封存放。The entire infiltration process must be carried out in an almost oxygen-free atmosphere. Through the dense air holes at the entrance and exit of the tunnel furnace, high-purity nitrogen is sprayed to form an air curtain, which isolates the entry of external air and creates an oxygen-free atmosphere for the furnace. The size of the air curtain is controlled using a flow meter. In the furnace, pipes are used to deliver high-purity nitrogen gas or mixed gas containing a very small amount of air to each temperature zone. In the heating zone with a temperature of 200-450°C, in order to more advantageously remove organic matter such as solvents and binders in the copper paste, the high-purity nitrogen introduced is mixed with a small amount of air, and the mixing ratio of oxygen is controlled at 50-50°C. 500ppm, the higher the temperature range, the smaller the proportion of oxygen. For the high-temperature zone, the highest copper electrode infiltration temperature of the zinc oxide varistor is 500-600°C, and the constant temperature time is 1-10 minutes. This temperature zone must be fed with high-purity nitrogen with a purity of 99.999%, and the oxygen content is controlled at ≤ 20ppm. The setting of temperature and time differs depending on the size of the piezoresistor. The cooling zone is fed with high-purity nitrogen with a purity of 99.999%, and the oxygen content is controlled at ≤20ppm. Water cooling is used near the outlet to ensure that the temperature of the baked product is lower than 60°C. After being released from the oven, the product should be sealed and stored in an environment with a room temperature of 20-30°C and a humidity of ≤60%.
使用上述工艺生产出的20K821规格铜电极氧化锌压敏电阻产品,其压敏电压为740~900v,非线性系数α≥50,漏电流≤3μA,电极可焊性好,8/20μs通流容量和2ms能量耐量性能达到相同规格银电极压敏电阻器的水平,而生产成本节约50%以上。The 20K821 copper electrode zinc oxide varistor produced by the above process has a varistor voltage of 740~900v, a nonlinear coefficient α≥50, a leakage current ≤3μA, good solderability of the electrode, and a flow capacity of 8/20μs. And 2ms energy tolerance performance reaches the level of the silver electrode varistor with the same specification, and the production cost is saved by more than 50%.
实施例2Example 2
本例为直径尺寸为φ10mm的10K471规格铜电极氧化锌压敏电阻生产工艺,包括以下步骤:This example is the production process of 10K471 copper electrode zinc oxide varistor with a diameter of φ10mm, including the following steps:
先按传统压敏电阻烧结工艺制作压敏陶瓷体,然后用200目丝网在压敏陶瓷体印上8-10μm厚度的铜含量在70%-75%,烧渗温度为520-600℃的氧化锌压敏电阻专用低温铜浆(可从市场上购买),然后用一般的链带式烘干炉,在普通大气环境下,使用最高温度为150-200℃,烘干周期为5-10分钟的工艺进行烘干。接着,用筛网装好后,放入氧化锌压敏电阻器专用的链带式氮气氛保护隧道电炉中烧渗铜电极。烧渗过程的工艺参数如下:First make the pressure-sensitive ceramic body according to the traditional varistor sintering process, and then use a 200 mesh screen to print on the pressure-sensitive ceramic body with a copper content of 70%-75% and a firing temperature of 520-600°C on the pressure-sensitive ceramic body with a thickness of 8-10 μm. Low-temperature copper paste for zinc oxide varistors (can be purchased from the market), and then use a general chain-belt drying furnace. Minute process for drying. Then, after installing it with a screen, put it into a chain belt type nitrogen atmosphere protection tunnel electric furnace dedicated to zinc oxide varistors and burn infiltrated copper electrodes. The process parameters of the infiltration process are as follows:
整个烧渗过程在几乎无氧的气氛环境下进行。可采用与实施例1相同的气氛环境。The entire infiltration process is carried out in an almost oxygen-free atmosphere. The same atmospheric environment as in Example 1 can be used.
使用上述工艺生产出的10K471规格铜电极氧化锌压敏电阻产品,其压敏电压为430~5100v,非线性系数α≥50,漏电流≤3μA,电极可焊性好,8/20μs通流容量和2ms能量耐量性能达到相同规格银电极压敏电阻器的水平,而生产成本节约50%以上。The 10K471 copper electrode zinc oxide varistor produced by the above process has a varistor voltage of 430-5100v, a nonlinear coefficient α≥50, a leakage current ≤3μA, good solderability of the electrode, and a flow capacity of 8/20μs. And 2ms energy tolerance performance reaches the level of the silver electrode varistor with the same specification, and the production cost is saved by more than 50%.
实施例3Example 3
本例为直径尺寸为φ7mm的7K271规格铜电极氧化锌压敏电阻生产工艺,包括以下步骤:This example is the production process of 7K271 copper electrode zinc oxide varistor with a diameter of φ7mm, including the following steps:
先按传统压敏电阻烧结工艺制作压敏陶瓷体,然后用200目丝网在压敏陶瓷体印上8-10μm厚度的铜含量在70%-75%,烧渗温度为520-600℃的氧化锌压敏电阻专用低温铜浆(可从市场上购买),然后用一般的链带式烘干炉,在普通大气环境下,使用最高温度为150-200℃,烘干周期为5-10分钟的工艺进行烘干。接着,用筛网装好后,放入氧化锌压敏电阻器专用的链带式氮气氛保护隧道电炉中烧渗铜电极。烧渗过程的工艺参数如下:First make the pressure-sensitive ceramic body according to the traditional varistor sintering process, and then use a 200 mesh screen to print on the pressure-sensitive ceramic body with a copper content of 70%-75% and a firing temperature of 520-600°C on the pressure-sensitive ceramic body with a thickness of 8-10 μm. Low-temperature copper paste for zinc oxide varistors (can be purchased from the market), and then use a general chain-belt drying furnace. Minute process for drying. Then, after installing it with a screen, put it into a chain belt type nitrogen atmosphere protection tunnel electric furnace dedicated to zinc oxide varistors and burn infiltrated copper electrodes. The process parameters of the infiltration process are as follows:
整个烧渗过程在几乎无氧的气氛环境下进行。可采用与实施例1相同的气氛环境。The entire infiltration process is carried out in an almost oxygen-free atmosphere. The same atmospheric environment as in Example 1 can be used.
使用上述工艺生产出的7K271规格铜电极氧化锌压敏电阻产品,其压敏电压为243~297v,非线性系数α≥48,漏电流≤3μA,电极可焊性好,8/20μs通流容量和2ms能量耐量性能达到相同规格银电极压敏电阻器的水平,而生产成本节约50%以上。The 7K271 copper electrode zinc oxide varistor produced by the above process has a varistor voltage of 243-297v, a nonlinear coefficient α≥48, a leakage current ≤3μA, good electrode solderability, and a flow capacity of 8/20μs. And 2ms energy tolerance performance reaches the level of the silver electrode varistor with the same specification, and the production cost is saved by more than 50%.
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