CN102312288A - Self-tightening type seed crystal chuck - Google Patents
Self-tightening type seed crystal chuck Download PDFInfo
- Publication number
- CN102312288A CN102312288A CN201110186251A CN201110186251A CN102312288A CN 102312288 A CN102312288 A CN 102312288A CN 201110186251 A CN201110186251 A CN 201110186251A CN 201110186251 A CN201110186251 A CN 201110186251A CN 102312288 A CN102312288 A CN 102312288A
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- Prior art keywords
- chuck
- self
- sleeve
- tightening type
- intermediate plate
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- Pending
Links
- 239000013078 crystal Substances 0.000 title abstract description 41
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- 229910002804 graphite Inorganic materials 0.000 claims description 5
- 239000010439 graphite Substances 0.000 claims description 5
- 230000007704 transition Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052710 silicon Inorganic materials 0.000 abstract description 3
- 239000010703 silicon Substances 0.000 abstract description 3
- 230000005484 gravity Effects 0.000 abstract description 2
- 238000010276 construction Methods 0.000 abstract 1
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 206010000372 Accident at work Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 235000019628 coolness Nutrition 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000007770 graphite material Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Images
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to auxiliary equipment of Czochralski silicon single crystal growth equipment and aims at providing a self-tightening type seed crystal chuck. The self-tightening type seed crystal chuck comprises a sleeve and clamping pieces annularly arranged in the inner wall of the sleeve; the inner wall of the sleeve has a conicity contracted downwards towards an axle center, and the clamping pieces have an external shape cooperating with the conicity; the internal diameter of an opening at the upper end in the clamping pieces is greater than the internal diameter of an opening at the lower end in the clamping pieces, and the inner walls of the clamping pieces located between the upper opening and the lower opening transit in a conical face form. When the chuck provided in the invention is used, all the parts of the chuck are automatically strained by the gravity of seed crystals, and the weight of the seed crystals continuously increases in the process of crystal pulling, which enables a frictional force to increase continuously, thereby increasingly lowering down the possibility of skidding. Since the seed crystal chuck comprises a few parts and the construction of the chuck is utmostly simplified, the chuck is very convenient to operate during utilization.
Description
Technical field
The present invention relates to the utility appliance of czochralski silicon monocrystal growth apparatus, particularly a kind of self-tightening type seed chuck.
Background technology
Straight pulling silicon single crystal furnace fixes seed crystal through seed chuck aborning.In the prior art, seed chuck has various ways, but all have complex structure, unhandy problem.
China utility model patent CN201560249U discloses a kind of seed chuck structure: in the taper permanent sleeve, be provided with the seed crystal fixed link; Be provided with taper in the outside of seed crystal fixed link and tighten pad; The water-cooled crystalline style is arranged at the top of seed crystal fixed link; Establish pad below the water-cooled crystalline style, establish gasket ring below the pad, the top that gasket ring is enclosed within the seed crystal fixed link links to each other with the upper end that pad is tightened in taper.When tightening the taper permanent sleeve, taper deflation pad compresses the seed crystal fixed link and realizes fixing.But the shortcoming that this seed chuck structure exists is: whole chuck tightens the pad completion to the fastening force of seed crystal fixed link by taper, and this just claims to the taper permanent sleeve degree of tightening, and is loosening as in the crystal pulling process, taking place, and certainly will cause serious industrial accident.In addition, it is complicated that this chuck junction structure is still disliked comparatively speaking, disassembling section inconvenience.
Summary of the invention
The technical problem that the present invention will solve is, overcomes deficiency of the prior art, and a kind of self-tightening type seed chuck is provided.
Be the technical solution problem, scheme of the present invention is:
A kind of self-tightening type seed chuck is provided, comprises sleeve and the intermediate plate that is located on sleeve lining, sleeve lining has the tapering that shrinks towards the axle center downwards, and intermediate plate has the outer shape that matches with this tapering; The internal diameter of intermediate plate inner upper end opening is greater than the internal diameter of its lower ending opening, and the intermediate plate inwall between open upper end and the lower ending opening is with conical surface transition.
As a kind of improvement, said intermediate plate has two at least.
As a kind of improvement, said intermediate plate is two semicircle graphite flakes.
As a kind of improvement, said intermediate plate is the graphite intermediate plate.
As a kind of improvement, said sleeve is the Mo sleeve.
As a kind of improvement, said sleeve lining downwards and the tapering that shrinks towards the axle center be 0.5 °～2 °.
As a kind of improvement, said sleeve lining downwards and the tapering that shrinks towards the axle center be 1 °.
The invention has the beneficial effects as follows:
The self-tightening type seed chuck designs through structural taper fit, and through utilizing seed crystal gravity that each parts is strained automatically, seed crystal constantly increases weight in the crystal pulling process in use, and frictional force also constantly increases, and can not occur skidding more.
What is more important, because the seed chuck parts are few, structure has accomplished to simplify most, so the present invention is in use, operation is very easy.Before use, only need seed crystal is carried out simple pre-treatment, its upper end is processed as the shape that matches with intermediate plate inwall tapering, the seed crystal upper end is omited high or can not influenced result of use a little less than intermediate plate.After crystal pulling finishes to treat the seed crystal cooling, seed crystal is upwards loose, exceed sleeve, two lobe intermediate plates unclamp automatically, take out intermediate plate then, and seed crystal can take out from the sleeve lower port, and is very convenient.
Description of drawings
Fig. 1 is the telescopic vertical view;
Fig. 2 is the shape synoptic diagram of seed crystal head;
Fig. 3 is the clamped condition synoptic diagram of self-tightening type seed chuck.
Reference numeral: 1 sleeve, 2 intermediate plates, 3 seed crystals.
Embodiment
Carry out detailed presentations below in conjunction with the accompanying drawing specific embodiments of the invention.
Self-tightening type seed chuck among the present invention; Comprise the sleeve 1 of Mo and the intermediate plate 2 of two semicircles of the high strength graphite material that is located on sleeve 1 inwall; Sleeve 1 inwall have downwards shrink towards the axle center tapering; This tapering can be set between 0.5 °～2 ° and (be preferably 1 °), and intermediate plate 2 has the outer shape that matches with this tapering; The internal diameter of intermediate plate 2 inner upper end openings is greater than the internal diameter of its lower ending opening, and the intermediate plate inwall between open upper end and the lower ending opening is then with conical surface transition.
Before the single crystal growing furnace crystal pulling, pass seed crystal 3 in the middle of the two lobe graphite intermediate plates 2 of in sleeve 1, packing into, intermediate plate 2, under seed crystal 3 self gravitations, effect is squeezed down two intermediate plates 2 at sleeve 1 inwall inclination angle, and realization adds the self-tightening of seed crystal holds.In the crystal pulling process, seed crystal 3 is more and more heavier, and sleeve 1, intermediate plate 2 and seed crystal 3 triangular frictional force also constantly increase, and self-tightening power is also big more, and seed crystal 3 is along with the synchronous rotation of weight is also just steady more.After crystal pulling finishes to treat seed crystal 3 coolings, seed crystal 3 is upwards loose, exceed sleeve 1, two lobe intermediate plate 2 and unclamp automatically.Take out intermediate plate 2 then, seed crystal 3 takes out from the lower port of sleeve 1 and gets final product.
Claims (7)
1. the self-tightening type seed chuck comprises sleeve and the intermediate plate that is located on sleeve lining, and sleeve lining has the tapering that shrinks towards the axle center downwards, and intermediate plate has the outer shape that matches with this tapering; It is characterized in that the internal diameter of intermediate plate inner upper end opening is greater than the internal diameter of its lower ending opening, the intermediate plate inwall between open upper end and the lower ending opening is with conical surface transition.
2. self-tightening type seed chuck according to claim 1 is characterized in that, said intermediate plate has two at least.
3. self-tightening type seed chuck according to claim 1 is characterized in that, said intermediate plate is two semicircle graphite flakes.
4. self-tightening type seed chuck according to claim 1 is characterized in that, said intermediate plate is the graphite intermediate plate.
5. self-tightening type seed chuck according to claim 1 is characterized in that, said sleeve is the Mo sleeve.
6. self-tightening type seed chuck according to claim 1 is characterized in that, said sleeve lining downwards and the tapering that shrinks towards the axle center be 0.5 °～2 °.
7. self-tightening type seed chuck according to claim 1 is characterized in that, said sleeve lining downwards and the tapering that shrinks towards the axle center be 1 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110186251A CN102312288A (en) | 2011-07-04 | 2011-07-04 | Self-tightening type seed crystal chuck |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110186251A CN102312288A (en) | 2011-07-04 | 2011-07-04 | Self-tightening type seed crystal chuck |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102312288A true CN102312288A (en) | 2012-01-11 |
Family
ID=45425839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110186251A Pending CN102312288A (en) | 2011-07-04 | 2011-07-04 | Self-tightening type seed crystal chuck |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102312288A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103014843A (en) * | 2013-01-10 | 2013-04-03 | 苏州巍迩光电科技有限公司 | Clamp for mounting seed crystal for growing sapphire crystal with kyropoulos method |
| CN105648520A (en) * | 2016-03-18 | 2016-06-08 | 江苏中电振华晶体技术有限公司 | Seed crystal capable of reinforcing seeding temperature signals and seeding method thereof |
| CN107059113A (en) * | 2017-04-14 | 2017-08-18 | 南京晶能半导体科技有限公司 | Semiconductor grade silicon single crystal furnace seed crystal chuck device and its application |
| CN107794565A (en) * | 2016-09-06 | 2018-03-13 | 上海新昇半导体科技有限公司 | Seedholder and czochralski crystal growing furnace |
| CN108203842A (en) * | 2016-12-20 | 2018-06-26 | 深圳市晶格材料科技有限公司 | A kind of crystal growth inexpensive seedholder of easily assembling |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002316891A (en) * | 2001-04-16 | 2002-10-31 | Sumitomo Mitsubishi Silicon Corp | Seed crystal holder |
| CN101724892A (en) * | 2008-10-22 | 2010-06-09 | Omt集团有限公司 | Seed crystal clamping device |
| CN201560249U (en) * | 2009-09-27 | 2010-08-25 | 上海元亮光电科技有限公司 | Novel seedchuck structure |
| CN202202018U (en) * | 2011-07-04 | 2012-04-25 | 浙江晶盛机电股份有限公司 | Self-tightening seed chuck |
-
2011
- 2011-07-04 CN CN201110186251A patent/CN102312288A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002316891A (en) * | 2001-04-16 | 2002-10-31 | Sumitomo Mitsubishi Silicon Corp | Seed crystal holder |
| CN101724892A (en) * | 2008-10-22 | 2010-06-09 | Omt集团有限公司 | Seed crystal clamping device |
| CN201560249U (en) * | 2009-09-27 | 2010-08-25 | 上海元亮光电科技有限公司 | Novel seedchuck structure |
| CN202202018U (en) * | 2011-07-04 | 2012-04-25 | 浙江晶盛机电股份有限公司 | Self-tightening seed chuck |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103014843A (en) * | 2013-01-10 | 2013-04-03 | 苏州巍迩光电科技有限公司 | Clamp for mounting seed crystal for growing sapphire crystal with kyropoulos method |
| CN103014843B (en) * | 2013-01-10 | 2015-05-27 | 苏州巍迩光电科技有限公司 | Clamp for mounting seed crystal for growing sapphire crystal with kyropoulos method |
| CN105648520A (en) * | 2016-03-18 | 2016-06-08 | 江苏中电振华晶体技术有限公司 | Seed crystal capable of reinforcing seeding temperature signals and seeding method thereof |
| CN107794565A (en) * | 2016-09-06 | 2018-03-13 | 上海新昇半导体科技有限公司 | Seedholder and czochralski crystal growing furnace |
| CN107794565B (en) * | 2016-09-06 | 2020-11-13 | 上海新昇半导体科技有限公司 | Seed crystal chuck and vertical pulling single crystal furnace |
| CN108203842A (en) * | 2016-12-20 | 2018-06-26 | 深圳市晶格材料科技有限公司 | A kind of crystal growth inexpensive seedholder of easily assembling |
| CN107059113A (en) * | 2017-04-14 | 2017-08-18 | 南京晶能半导体科技有限公司 | Semiconductor grade silicon single crystal furnace seed crystal chuck device and its application |
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| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C53 | Correction of patent of invention or patent application | ||
| CB03 | Change of inventor or designer information |
Inventor after: Zhu Liang Inventor after: Cao Jianwei Inventor after: Qiu Minxiu Inventor after: Wang Wei Inventor after: Tao Chuanchuan Inventor before: Zhu Liang Inventor before: Cao Jianwei Inventor before: Qiu Minxiu Inventor before: Wang Wei Inventor before: Tao Chuanchuan |
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| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20120111 |