CN201762481U - Single crystal furnace seed crystal chuck mechanism - Google Patents
Single crystal furnace seed crystal chuck mechanism Download PDFInfo
- Publication number
- CN201762481U CN201762481U CN2010205095683U CN201020509568U CN201762481U CN 201762481 U CN201762481 U CN 201762481U CN 2010205095683 U CN2010205095683 U CN 2010205095683U CN 201020509568 U CN201020509568 U CN 201020509568U CN 201762481 U CN201762481 U CN 201762481U
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- seed crystal
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- hole
- circular hole
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Abstract
The utility model relates to the field of single crystal furnaces, in particular to a single crystal furnace seed crystal chuck mechanism, which comprises a seed crystal chuck, a counter weight and a seed crystal joint. The bottom end of the seed crystal chuck is coaxially fixed into a positioning hole of an axial center of the top of the counter weight in a threaded manner; the top of the seed crystal joint is connected into an axial center of the bottom of the counter weight in a threaded manner; a tapered circular hole from top to bottom is arranged at the position of an axial center of the seed crystal joint; and a seed crystal is clamped inside the tapered circular hole. As the seed crystal joint and the seed crystal are connected in a positioning manner by the aid of the tapered circular hole, the single crystal furnace seed crystal chuck mechanism has the advantages of high positioning concentricity, stable rotation, even stress, difficult breakage of the seed crystal, more stable growth of the crystal and improvement of productivity and product quality.
Description
Technical field
The utility model relates to the single crystal growing furnace field, relates in particular to a kind of single crystal growing furnace seed crystal mechanism.
Background technology
Single crystal growing furnace is that polysilicon is converted into the indispensable equipment in the silicon single crystal technological process, and silicon single crystal is the basic material in photovoltaic generation and the semicon industry.Silicon single crystal is as the critical support material of advanced information society, is one of most important monocrystal material in the world at present, and it is not only the major function material of development computer and unicircuit, also is the major function material that photovoltaic generation utilizes sun power.
Single crystal growing furnace concentricity of seed crystal parts and crucible parts in the crystal pulling process is high more, the seed crystal quality that obtains is good more, so in the installation process of single crystal growing furnace, need to determine the concentricity of seed crystal parts and crucible parts by seed crystal mechanism, seed crystal mechanism can make the growth that crystal can be more stable, in the silicon single-crystal pulling process, the dislocation in the silicon crystal has been got rid of in the necking down of seed crystal by being passed through by the crystal pulling of seed crystal mechanism, guarantees the crystalline unicity.Existing seed crystal mechanism as shown in Figure 1, comprise seed chuck 1, weight 2 and steady brace 4, the bottom of described seed chuck 1 is by in the coaxial pilot hole that is fixed on axle center, weight 2 top of screw thread, the top of seed chuck 1 is connected with seed crystal rope 6, be connected with seed crystal 5 suits in the hole at axle center, described weight 2 bottom place, between weight 2 and the seed crystal 5 by steady brace 4 positioning and fixing of side; Because only fixing between weight 2 and the seed crystal 5 by steady brace 4, cause bearing accuracy low easily, monolateral stressed between while steady brace 4 and the seed crystal 5, make seed crystal 5 frangibility.
Summary of the invention
Technical problem to be solved in the utility model provides a kind of single crystal growing furnace seed chuck mechanism, links to each other by convergent circular hole location between the in-house seed crystal joint of this seed crystal, and location concentricity height, seed crystal is frangibility not.
The utility model is achieved in that a kind of single crystal growing furnace seed chuck mechanism, comprise seed chuck and weight, the bottom of described seed chuck is by in the coaxial pilot hole that is fixed on axle center, weight top of screw thread, this seed crystal mechanism also comprises the seed crystal joint, described seed crystal joint top is by in the axle center hole that is threaded in the weight bottom, seed crystal coupling axis place has from the top to the convergent circular hole of bottom, and seed chuck is contained in the convergent circular hole.
Described convergent circular hole is made of two-layer cylindrical hole, and the cylindrical hole internal diameter of close bottom is less than the cylindrical hole internal diameter near the top, and two-layer cylindrical hole adjacent is by the cone surface transition.
Described convergent circular hole is the truncated cone-shaped hole.
Link to each other by convergent circular hole location between the in-house seed crystal joint of the utility model single crystal growing furnace seed chuck and the seed crystal, location concentricity height, spin stabilization, stressed even, make not frangibility of seed crystal, the growth that crystal can be more stable has improved production capacity and quality product.
Description of drawings
Fig. 1 is existing seed crystal mechanism structure synoptic diagram;
Fig. 2 is the utility model single crystal growing furnace seed chuck mechanism structure synoptic diagram.
Among the figure: 1 seed chuck, 2 weights, 3 seed crystal joints, 31 convergent circular holes, 4 steady braces, 5 seed crystals, 6 seed crystal ropes.
Embodiment
Below in conjunction with specific embodiment, further set forth the utility model.Should be understood that these embodiment only to be used to the utility model is described and be not used in the restriction scope of the present utility model.Should be understood that in addition those skilled in the art can make various changes or modifications the utility model after the content of having read the utility model statement, these equivalent form of values fall within the application's appended claims institute restricted portion equally.
As shown in Figure 2, a kind of single crystal growing furnace seed chuck mechanism, comprise seed chuck 1, weight 2 and seed crystal joint 3, the bottom of described seed chuck 1 is by in the coaxial pilot hole that is fixed on axle center, weight 2 top of screw thread, seed crystal rope 6 has been hung on the top of seed chuck 1, described seed crystal joint 3 tops are by in the axle center hole that is threaded in weight 2 bottoms, place, seed crystal joint 3 axle center has from the top to the convergent circular hole 31 of bottom, seed crystal 5 is installed in the convergent circular hole 31, convergent circular hole 31 not only concentrically located accurately and also can also make between seed crystal joint 3 and the seed crystal 5 stressed evenly, avoided fractureing of seed crystal 5; Described in the present embodiment convergent circular hole 31 is made of two-layer cylindrical hole, and the cylindrical hole internal diameter of close bottom is less than the cylindrical hole internal diameter near the top, and two-layer cylindrical hole adjacent is by the cone surface transition.
Of particular note also can be the truncated cone-shaped hole or the cross section is the hole of polynomial curve in addition, as long as guarantee that seed crystal 5 is stressed even convergent circular hole 31 at the circular hole of convergent described in the utility model 31.
Claims (3)
1. single crystal growing furnace seed chuck mechanism, comprise seed chuck (1) and weight (2), the bottom of described seed chuck (1) is by in the coaxial pilot hole that is fixed on weight (2) axle center, top of screw thread, it is characterized in that: this seed crystal mechanism also comprises seed crystal joint (3), described seed crystal joint (3) top is by in the axle center hole that is threaded in weight (2) bottom, seed crystal joint (3) axle center place has from the top to the convergent circular hole (31) of bottom, and seed crystal (5) is installed in the convergent circular hole (31).
2. single crystal growing furnace seed chuck as claimed in claim 1 mechanism, it is characterized in that: described convergent circular hole (31) is made of two-layer cylindrical hole, the cylindrical hole internal diameter of close bottom is less than the cylindrical hole internal diameter near the top, and two-layer cylindrical hole adjacent is by conical surface transition.
3. single crystal growing furnace seed chuck as claimed in claim 1 mechanism is characterized in that: described convergent circular hole (31) is the truncated cone-shaped hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205095683U CN201762481U (en) | 2010-08-30 | 2010-08-30 | Single crystal furnace seed crystal chuck mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205095683U CN201762481U (en) | 2010-08-30 | 2010-08-30 | Single crystal furnace seed crystal chuck mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201762481U true CN201762481U (en) | 2011-03-16 |
Family
ID=43715095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010205095683U Expired - Lifetime CN201762481U (en) | 2010-08-30 | 2010-08-30 | Single crystal furnace seed crystal chuck mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201762481U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102275238A (en) * | 2011-09-05 | 2011-12-14 | 镇江大成新能源有限公司 | Fixture for connecting seed crystals |
| CN103469297A (en) * | 2013-07-25 | 2013-12-25 | 浙江晶盛机电股份有限公司 | Sapphire seed chuck with double positioning pins |
| CN104611765A (en) * | 2013-11-05 | 2015-05-13 | 有研新材料股份有限公司 | Seed crystal chuck assembly |
| CN105780106A (en) * | 2014-12-23 | 2016-07-20 | 江苏拜尔特光电设备有限公司 | Improved semi-cone seed crystal chuck |
| CN107142517A (en) * | 2017-04-28 | 2017-09-08 | 西安创联新能源设备有限公司 | A kind of manufacturing process of Gem furnace seed shaft |
| CN107779947A (en) * | 2017-11-28 | 2018-03-09 | 浙江晶盛机电股份有限公司 | A kind of single crystal furnace seed crystal chuck structure |
-
2010
- 2010-08-30 CN CN2010205095683U patent/CN201762481U/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102275238A (en) * | 2011-09-05 | 2011-12-14 | 镇江大成新能源有限公司 | Fixture for connecting seed crystals |
| CN103469297A (en) * | 2013-07-25 | 2013-12-25 | 浙江晶盛机电股份有限公司 | Sapphire seed chuck with double positioning pins |
| CN104611765A (en) * | 2013-11-05 | 2015-05-13 | 有研新材料股份有限公司 | Seed crystal chuck assembly |
| CN104611765B (en) * | 2013-11-05 | 2017-08-08 | 有研半导体材料有限公司 | A kind of seedholder component |
| CN105780106A (en) * | 2014-12-23 | 2016-07-20 | 江苏拜尔特光电设备有限公司 | Improved semi-cone seed crystal chuck |
| CN107142517A (en) * | 2017-04-28 | 2017-09-08 | 西安创联新能源设备有限公司 | A kind of manufacturing process of Gem furnace seed shaft |
| CN107142517B (en) * | 2017-04-28 | 2020-04-03 | 西安创联新能源设备有限公司 | Manufacturing process of gem furnace seed crystal shaft |
| CN107779947A (en) * | 2017-11-28 | 2018-03-09 | 浙江晶盛机电股份有限公司 | A kind of single crystal furnace seed crystal chuck structure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110316 |
|
| CX01 | Expiry of patent term |