CN102278943B - Non-contact digital micromirror device microlens consistency tester - Google Patents
Non-contact digital micromirror device microlens consistency tester Download PDFInfo
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Abstract
本发明公开了一种非接触式数字微镜器件微镜片一致性检测仪，该检测仪包括白光光源、会聚透镜、光阑、透镜、散射镜、光波长滤波器、半透分光反射镜、变焦透镜组、正光焦度透镜、单凸透镜、单凹透镜、双胶合透镜、平面透光板、凹凸单透镜、盖玻片、双凸正光焦透镜、反光镜、ICCD、数字微镜器件、高度可调节平台、手动调节旋钮、平台自动调节驱动器、光波长滤波器驱动单元、光源控制器、图像采集和控制终端、计算机、封闭式机壳、样本窗、滑动开关门、传送带、滚珠及传送带控制器。本发明能够根据不同微镜片能清晰成像时对应的光波长不同，通过计算波长差异来换算微镜片之间的水平高度差，从而对微镜器件表面一致性进行无接触检测。
The invention discloses a non-contact digital micromirror device microlens consistency detector, which includes a white light source, a converging lens, a diaphragm, a lens, a scattering mirror, a light wavelength filter, a semi-transparent spectroscopic mirror, a zoom Lens group, positive power lens, single-convex lens, single-concave lens, doublet lens, flat light-transmitting plate, concave-convex single lens, cover glass, double-convex positive focus lens, mirror, ICCD, digital micromirror device, height adjustable Platform, manual adjustment knob, platform automatic adjustment driver, optical wavelength filter drive unit, light source controller, image acquisition and control terminal, computer, closed casing, sample window, sliding switch door, conveyor belt, ball and conveyor belt controller. The invention can convert the level difference between the microlenses by calculating the wavelength difference according to the different light wavelengths corresponding to the clear imaging of different microlenses, so as to perform non-contact detection on the surface consistency of the micromirror device.
Description
Technical field
The present invention relates to a kind of micromirror consistency detection device, particularly a kind of non-contact digital micro mirror element micromirror consistency detection appearance.The level height consistance that is used for each sheet micromirror above the Non-Destructive Testing DMD.
Background technology
The device that invention in 1987, it was a kind of based semiconductor manufacturing technology to DMD (DMD, Digital Micro-mirror Device) by TIX, be made up of high-speed figure formula light reflex switch array.DMD digital micro-mirror array adopts the microelectron-mechanical principle, utilizes sputtered aluminum technology, the square micromirror that on semi-conductor silicon chip, generates.The imaging of DMD leans on micromirror rotation to accomplish, and a rotating micro mirror is all arranged on each pixel, the corresponding different shooting angle in position that micro mirror is different.Each micro mirror is equivalent to a photoswitch.Control micro mirror open and close state as required, realize that image shows.DMD is the core devices of DLP (Digital Light Processing) projection display technique, and the quality of its performance index will directly influence the image quality of Projection Display.In some technical indicators of DMD, the level height consistance of each sheet micromirror is a key index that directly influences image quality.A kind of can quick nondestructive to detect this fine difference detector significant to the yield rate that improves DMD because the difference of technology, the level height difference between the DMD micromirror usually at submicron-scale, are therefore developed.
Summary of the invention
A kind of micromirror consistency detection appearance that the objective of the invention is to be directed against the detection demand of level height difference between the micromirror that has DMD now and provide.This detector through each sheet micromirror of record can be on ICCD residing optical wavelength position during blur-free imaging; Promptly can calculate between the micromirror difference in height in vertical direction according to the difference of these wavelength then, provide each sheet micromirror coincident indicator in the horizontal direction of DMD to be detected at last.
The present invention realizes through following technical scheme:
A kind of non-contact digital micro mirror element micromirror consistency detection appearance; This detector comprises white light source, first convergent lens, second convergent lens, the 3rd convergent lens, the 4th convergent lens, the 5th convergent lens, first diaphragm, second diaphragm, the 3rd diaphragm, first lens, second lens, the 3rd lens, the 4th lens, first light-radiating lens, second light-radiating lens, the 3rd light-radiating lens, optical wavelength filter, partly dichroic reflector, variable focus lens package, the first positive light coke lens, the second positive light coke lens, the 3rd positive light coke lens, first single convex lens, second single convex lens, single concavees lens, cemented doublet, plane light-passing board, concavo-convex simple lens, cover glass, the positive light focus lens of biconvex, reflective mirror, ICCD, DMD, Height Adjustable platform, manual adjustments knob, platform are regulated driver, optical wavelength filter driver element, light source controller, IMAQ and control terminal, computing machine, closed casing, sample window, slide switch door, travelling belt, ball and travelling belt controller automatically thoroughly, and said white light source, first convergent lens, first diaphragm, first lens, second diaphragm, second lens, first light-radiating lens, second convergent lens, optical wavelength filter, the 3rd convergent lens, half pass through dichroic reflector, variable focus lens package, the first positive light coke lens, first single convex lens, the 3rd diaphragm, second single convex lens, the 3rd lens, single concavees lens, cemented doublet, plane light-passing board, concavo-convex simple lens and cover glass and constitute illumination path successively; Said cover glass, concavo-convex simple lens, plane light-passing board, cemented doublet, single concavees lens, the 3rd lens, second single convex lens, the 3rd diaphragm, first single convex lens, the first positive light coke lens, variable focus lens package, half are passed through dichroic reflector, the positive light focus lens of biconvex, second light-radiating lens, the second positive light coke lens, the 3rd light-radiating lens, the 3rd positive light coke lens, the 4th convergent lens, reflective mirror, the 4th lens, the 5th convergent lens and ICCD and are constituted imaging optical path successively; Wherein, Beam split light path and imaging optical path are by closed casing complete closed; Both sides, closed casing lower end respectively have a slide switch door; The slide switch door is coupled on the closed casing through sliding tray, and the slide switch door passes travelling belt in the middle of opening the back, and the part that travelling belt passes in the closed casing places on the ball of Height Adjustable platform; The control input end of slide switch door is connected to the control output end of IMAQ and control terminal, can under the control of IMAQ and control terminal, open or close; The control input end of travelling belt is connected to the control output end of travelling belt controller, and the control input end of travelling belt controller is connected to the control output end of IMAQ and control terminal; Height Adjustable platform is coupled on the closed casing through accurate thread; Height Adjustable platform is furnished with the manual adjustments knob; The control input end of Height Adjustable platform is connected to the control output end that platform is regulated driver automatically, and the control input end that platform is regulated driver automatically is connected to the control output end of IMAQ and control terminal; The control input end of variable focus lens package is connected to the control output end of IMAQ and control terminal; The control input end of light source controller is connected to the control output end of IMAQ and control terminal; The control input end of optical wavelength filter is connected to the control output end of optical wavelength filter driver element; The control input end of optical wavelength filter driver element is connected to the control output end of IMAQ and control terminal, and the optical wavelength filter driver element is fixed in the upper end of closed casing; The data output end of ICCD is connected to the data input pin of IMAQ and control terminal, and the data output end of IMAQ and control terminal is connected to the data input pin of computing machine.
The employed light path element of detector is to see through the device from ultraviolet to the infrared broad spectrum scope.
A kind of method of using above-mentioned detector to realize the micromirror consistency detection; This method is: the pairing optical wavelength of the different micromirror ability blur-free imagings of difference, measurement of the focal length that forms images after the same light path of light process according to different wave length; Converse the level height difference between the micromirror according to the wavelength difference between it, realize the conforming detection of micromirror.
The present invention includes light path, data acquisition process and control, apparatus structure three parts, wherein light path part comprises illumination path and imaging optical path.Illumination path wherein: after the white-light illuminating light beam is sent by white light source; Successively through arriving optical wavelength filter behind convergent lens, diaphragm, lens, the light-radiating lens; Optical wavelength filter carries out filtering to the white-light illuminating light beam under the control of optical wavelength filter driver element; Only the light transmission of the wavelength of permission choosing arrives the plus lens of back; After dichroic reflector is passed through in entering half; The light beam vertical irradiation passes through positive light coke lens, single convex lens, diaphragm, lens, single concavees lens, cemented doublet, plane light-passing board, concavo-convex simple lens and cover glass then successively on variable focus lens package, the illumination with single wavelength at last is mapped on the DMD surface that places on the Height Adjustable platform; Imaging optical path: arrive variable focus lens package behind process cover glass, concavo-convex simple lens, plane light-passing board, cemented doublet, single concavees lens, lens, diaphragm, single convex lens, the positive light coke lens successively from single wavelength imaging beam of DMD surface reflection; Variable focus lens package can be carried out the zoom adjustment under the control of IMAQ and control terminal; Optical reflection imaging through variable focus lens package is behind more than half dichroic reflectors; After passing through the positive light focus lens of biconvex, light-radiating lens, positive light coke lens and convergent mirror successively; Change imaging beam through reflective mirror; Through being imaged onto on the ICCD image planes behind lens and the convergent lens, IMAQ and control terminal promptly can be gathered single wavelength view data on DMD surface through ICCD again; Height Adjustable platform is coupled on the closed casing through high precision screw, can be through its height of manual adjustments knob up-down adjustment, and height as required also can automatically adjust under platform is regulated the control of driver automatically; White light source can be worked under the control of light source controller; IMAQ and control terminal are connected respectively to light source controller, optical wavelength filter driver element, variable focus lens package, ICCD and platform and regulate on the driver automatically; Accomplish the collection and the initial analysis of view data through the co-ordination of control associated components; And the result is uploaded to computing machine further detect, obtain the micromirror coincident indicator on DMD surface at last.The instrument whole optical path is surrounded by lighttight closed casing, prevents the influence of surround lighting to measurement result, and both sides, closed casing lower end respectively have a slide switch door; The slide switch door is coupled on the closed casing through sliding tray; The slide switch door passes travelling belt in the middle of opening the back, and the part that travelling belt passes in the closed casing places on the ball of Height Adjustable platform, and DMD to be measured places on the travelling belt; After the test of current digit micro mirror element finishes; The slide switch door is opened, and travelling belt is sent to next one travelling belt to be measured in the instrument, and closes the slide switch door and prevent that ambient light from getting into.The optical wavelength filter driver element is fixed in the upper end of closed casing, the work of control optical wavelength filter.
Actual when carrying out between micromirror surperficial consistency detection; DMD to be detected placed be sent to the instrument internal fixed position on the travelling belt; Optical wavelength filter driver element control optical wavelength filter works in the minimum wavelength value; Make the illumination beam that is in this wavelength to the DMD surface; IMAQ and control terminal are regulated driver automatically through adjustment variable focus lens package and platform makes clear picture image on the ICCD, then by IMAQ and control terminal collection with write down this image; Under the condition that Height Adjustable platform, travelling belt and variable focus lens package remain unchanged; Adjust the operation wavelength of optical wavelength filter at interval with fixed wave length through the optical wavelength filter driver element; Repeated acquisition and write down the view data of DMD so repeats to work in maximum filter wavelength value until optical wavelength filter then.For the inconsistent DMD in plane; Relative height difference between its micromirror is in sub-micrometer scale; This species diversity will make that the micromirror of differing heights is different to the distance of imaging lens, thus can be on ICCD during blur-free imaging residing wavelength location also just different.After gathering the image of accomplishing the whole operating wavelength range of optical wavelength filter; Through calculating the wavelength difference of ability blur-free imaging between different micromirror; The relative height that promptly can converse between the micromirror of differing heights is poor, can estimate the consistance of DMD surface micro eyeglass at last.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is a micromirror surface differences synoptic diagram of the present invention.
Embodiment
Embodiment
Be embodiment with Fig. 1 below, architectural feature of the present invention be described, technical feature and effect.
In the present embodiment; Illumination path part is passed through dichroic reflector 7, variable focus lens package 8, positive light coke lens 9, single convex lens 10, diaphragm 303, single convex lens 11, lens 403, single concavees lens 12, cemented doublet 13, plane light-passing board 14, concavo-convex simple lens 15, cover glass 16 by white light source 1, convergent lens 201, diaphragm 301, lens 401, diaphragm 302, lens 402, light-radiating lens 501, convergent lens 202, optical wavelength filter 6, convergent lens 203, half successively and is formed, and wherein white light source 1 can provide the white-light illuminating of the wide spectral range of adjustable brightness under the control of light source controller 27; Optical wavelength filter 6 can make the light transmission of selected wavelength under the control of optical wavelength filter driver element 26; Half passes through dichroic reflector 7 can change single wavelength lighting source after through two secondary reflections and become vertical optical path and shine on the variable focus lens package 8, through shining at last on the surface of DMD 22 after the vertical illumination light path.Imaging optical path part is passed through the positive light focus lens of dichroic reflector 7, biconvex 17, light-radiating lens 502, positive light coke lens 18, light-radiating lens 503, positive light coke lens 19, convergent lens 204, reflective mirror 20, lens 404, convergent lens 205, ICCD 21 by cover glass 16, concavo-convex simple lens 15, plane light-passing board 14, cemented doublet 13, single concavees lens 12, lens 403, single convex lens 11, diaphragm 303, single convex lens 10, positive light coke lens 9, variable focus lens package 8, half successively and is formed; Wherein form images single wavelength light beam behind more than half dichroic reflectors 7, image at last on the ICCD 21 along changing into horizontal optical path after vertical optical path arrives reflective mirror 20; Variable focus lens package 8 can be carried out to the autozoom of picture under the control of IMAQ and control terminal 28.
Illumination path and imaging optical path prevent the influence of ambient light to measurement result by closed casing 30 complete closed; Both sides, closed casing 30 lower end respectively have a slide switch door 31; Slide switch door 31 is coupled on the closed casing 30 through sliding tray; Slide switch door 31 passes travelling belt 32 in the middle of opening the back; The part that travelling belt 32 passes in the closed casing 30 places on the ball 33 of Height Adjustable platform 23, and DMD 22 to be measured places on the travelling belt 32, can send it to instrument internal; Height Adjustable platform 23 is coupled on the closed casing 30 through accurate thread; Can under platform is regulated the control of driver 25 automatically, Height Adjustable platform 23 be moved up and down; Thereby the change imaging focal length also can be carried out manual adjustments through 24 pairs of Height Adjustable platforms 23 of manual adjustments knob in needs; Optical wavelength filter driver element 26 is fixed in the upper end of closed casing 30; The control output end of IMAQ and control terminal 28 is connected respectively to the control input end that variable focus lens package 8, light source controller 27, optical wavelength filter driver element 26, platform are regulated driver 25, travelling belt controller 34, slide switch door 31 automatically, realizes respectively that zoom, lighting source, the lighting source wavelength to imaging optical path selected, the keying of the moving of the position adjustments of Height Adjustable platform, travelling belt, slide switch door; The data input pin of IMAQ and control terminal 28 is connected to the data output end of ICCD 21, gathers the view data of DMD 22 surperficial specific wavelengths; The data outlet terminal of IMAQ and control terminal 28 is connected to computing machine 29, supplies subsequent treatment to use with analyzing to computing machine 29 image data transmission that collects.
When carrying out the conforming detection in DMD 22 micromirror surface; IMAQ and control terminal 28 are luminous through light source controller 27 control white light sources 1; When the white-light illuminating light beam passes through optical wavelength filter 6; Under the control of optical wavelength filter driver element 26, make and the light transmission of selecting wavelength, image on the ICCD 21 behind the imaging beam of the reflection process imaging optical path through shining on the surface of DMD 22 behind the residue illumination path; Make most of micromirror unit ability blur-free imaging, IMAQ and control terminal 28 document images and work at present wavelength through regulating variable focus lens package 8 with Height Adjustable platform 23.Keep variable focus lens package 8 and Height Adjustable platform 23 constant; Change wavelength through optical wavelength filter driver element 26 according to constant spacing through optical wavelength filter 6 illuminating bundles; Again gather the image on DMD 22 surfaces, so circulation works in maximum filter wavelength value until optical wavelength filter 6.
As shown in Figure 2; M1, M2 and M3 are three not at grade micromirror; If pairing wavelength is λ 1 during micromirror M1 ability blur-free imaging, pairing wavelength is λ 2 during M2 ability blur-free imaging, and pairing wavelength is λ 3 during M3 ability blur-free imaging; Then promptly can calculate the difference on level height, i.e. d1=between M1, M2 and the M3 according to the difference of λ 1 and λ 2 and the difference of λ 2 and λ 3
f(λ 1)-
f(λ 2), d2=
f(λ 3)-
f(λ 2).When the level height difference d between all micromirror is no more than preset threshold on the full wafer DMD 22, think that promptly these DMD 22 surperficial consistance are good.
The present invention is when level height there are differences between the DMD surface micro eyeglass; Micromirror is can the pairing wavelength of blur-free imaging also different; Can be through calculating the wavelength difference difference in level between the micromirror that converts, thus realized the conforming detection in surface of noncontact DMD.
Claims (3)
1. non-contact digital micro mirror element micromirror consistency detection appearance; It is characterized in that this detector comprises white light source (1), first convergent lens (201), second convergent lens (202), the 3rd convergent lens (203), the 4th convergent lens (204), the 5th convergent lens (205), first diaphragm (301), second diaphragm (302), the 3rd diaphragm (303), first lens (401), second lens (402), the 3rd lens (403), the 4th lens (404), first light-radiating lens (501), second light-radiating lens (502), the 3rd light-radiating lens (503), optical wavelength filter (6), partly dichroic reflector (7), variable focus lens package (8), the first positive light coke lens (9), the second positive light coke lens (18), the 3rd positive light coke lens (19), first single convex lens (10), second single convex lens (11), single concavees lens (12), cemented doublet (13), plane light-passing board (14), concavo-convex simple lens (15), cover glass (16), the positive light focus lens of biconvex (17), reflective mirror (20), ICCD (21), DMD (22), Height Adjustable platform (23), manual adjustments knob (24), platform are regulated driver (25), optical wavelength filter driver element (26), light source controller (27), IMAQ and control terminal (28), computing machine (29), closed casing (30), slide switch door (31), travelling belt (32), ball (33) and travelling belt controller (34) automatically thoroughly, dichroic reflector (7), variable focus lens package (8), the first positive light coke lens (9), first single convex lens (10), the 3rd diaphragm (303), second single convex lens (11), the 3rd lens (403), single concavees lens (12), cemented doublet (13), plane light-passing board (14), concavo-convex simple lens (15), cover glass (16) constitute illumination path successively thoroughly for said white light source (1), first convergent lens (201), first diaphragm (301), first lens (401), second diaphragm (302), second lens (402), first light-radiating lens (501), second convergent lens (202), optical wavelength filter (6), the 3rd convergent lens (203), half; Said cover glass (16); Concavo-convex simple lens (15); Plane light-passing board (14); Cemented doublet (13); Single concavees lens (12); The 3rd lens (403); Second single convex lens (11); The 3rd diaphragm (303); First single convex lens (10); The first positive light coke lens (9); Variable focus lens package (8); Half passes through dichroic reflector (7); The positive light focus lens of biconvex (17); Second light-radiating lens (502); The second positive light coke lens (18); The 3rd light-radiating lens (503); The 3rd positive light coke lens (19); The 4th convergent lens (204); Reflective mirror (20); The 4th lens (404); The 5th convergent lens (205); ICCD (21) constitutes imaging optical path successively; Wherein, Illumination path and imaging optical path are by closed casing (30) complete closed; Closed casing (30) both sides, lower end respectively have a slide switch door (31); Slide switch door (31) is coupled on the closed casing (30) through sliding tray, and slide switch door (31) passes travelling belt (32) in the middle of opening the back, and the part that travelling belt (32) passes in the closed casing (30) places on the ball (33) of Height Adjustable platform (23); The control input end of slide switch door (31) is connected to the control output end of IMAQ and control terminal (28); The control input end of travelling belt (32) is connected to the control output end of travelling belt controller (34), and the control input end of travelling belt controller (34) is connected to the control output end of IMAQ and control terminal (28); Height Adjustable platform (23) is coupled on the closed casing (30) through accurate thread; Height Adjustable platform (23) is furnished with manual adjustments knob (24); The control input end of Height Adjustable platform (23) is connected to the control output end that platform is regulated driver (25) automatically, and the control input end that platform is regulated driver (25) automatically is connected to the control output end of IMAQ and control terminal (28); The control input end of variable focus lens package (8) is connected to the control output end of IMAQ and control terminal (28); The control input end of light source controller (27) is connected to the control output end of IMAQ and control terminal (28); The control input end of optical wavelength filter (6) is connected to the control output end of optical wavelength filter driver element (26); The control input end of optical wavelength filter driver element (26) is connected to the control output end of IMAQ and control terminal (28), and optical wavelength filter driver element (26) is fixed in the upper end of closed casing (30); The data output end of ICCD (21) is connected to the data input pin of IMAQ and control terminal (28), and the data output end of IMAQ and control terminal (28) is connected to the data input pin of computing machine (29).
2. non-contact digital micro mirror element micromirror consistency detection appearance according to claim 1 is characterized in that the employed light path element of instrument is for seeing through the device from ultraviolet to the infrared broad spectrum scope.
3. method of using the said detector of claim 1 to realize the micromirror consistency detection; It is characterized in that this method is: the difference of the focal length that forms images after the same light path of light process according to different wave length; Measure the pairing optical wavelength of different micromirror ability blur-free imagings; Converse the level height difference between the micromirror according to the wavelength difference between it, realize the conforming detection of micromirror.
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Non-Patent Citations (2)
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| 唐永建等.数字微镜器件的优化设计.《浙江大学学报》.2005,第39卷(第6期),第896-900页. |
| 数字微镜器件的优化设计;唐永建等;《浙江大学学报》;20050630;第39卷(第6期);第896-900页 * |
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